CN201215516Y - Differential capacitive load sensor - Google Patents

Differential capacitive load sensor Download PDF

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Publication number
CN201215516Y
CN201215516Y CNU2008200695782U CN200820069578U CN201215516Y CN 201215516 Y CN201215516 Y CN 201215516Y CN U2008200695782 U CNU2008200695782 U CN U2008200695782U CN 200820069578 U CN200820069578 U CN 200820069578U CN 201215516 Y CN201215516 Y CN 201215516Y
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sensor
measuring head
pole
utmost point
capacitance
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Expired - Fee Related
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CNU2008200695782U
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Chinese (zh)
Inventor
于晓光
司柽宇
卢满怀
彭芳
潘奇明
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University of Electronic Science and Technology of China Zhongshan Institute
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University of Electronic Science and Technology of China Zhongshan Institute
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Abstract

The utility model provides a differential capacitance load sensor, mainly by deciding utmost point post, move utmost point post, measuring element (elastomer), the measuring head, the casing constitutes, when the measuring head receives the measured exogenic action, pass measuring element (elastomer) with this effort, measuring element takes place elastic deformation, along the axial compressed, measuring head and electric capacity move utmost point post and produce corresponding displacement together, then the area of covering between electric capacity sensor two utmost point posts changes, cause the capacitance value of sensor to change thereupon, there is the one-to-one relation in the change volume of capacitance value and the displacement volume of measuring head. The capacitance variation is output to an external circuit through the electrode lead wire, and the external load can be obtained through processing and output. The sensor is characterized by high sensitivity and convenient signal pickup; the polar plates are not contacted, deformed and abraded, and the service life is long; the capacitance sensor is less affected by temperature; the dynamic performance is good.

Description

差动式电容荷载传感器 Differential capacitive load sensor

一、技术领域 1. Technical field

本实用新型涉及一种检测各种荷载(力)大小的差动式电容传感器。The utility model relates to a differential capacitance sensor for detecting various loads (forces).

二、背景技术 2. Background technology

目前,在众多的用于荷载(力)检测的传感器当中,绝大部分为电阻应变式传感器,暂未有电容式传感器产品或设计问世。电阻应变式荷载传感器的弊端一是检测灵敏度不够高,一般的误差在0.5%左右;二是电阻应变片易受环境温度的影响,使测量数值不准确;三是电阻应变片的粘贴位置精度和牢固度都会造成测量误差;四是电阻应变片信号变化微弱,不利于检测。At present, among the numerous sensors used for load (force) detection, most of them are resistance strain sensors, and no capacitive sensor products or designs have been released yet. The disadvantages of the resistance strain load sensor are that the detection sensitivity is not high enough, and the general error is about 0.5%; the second is that the resistance strain gauge is easily affected by the ambient temperature, which makes the measurement value inaccurate; Firmness will cause measurement errors; Fourth, the signal change of the resistance strain gauge is weak, which is not conducive to detection.

三、发明内容 3. Contents of the invention

本实用新型要解决的技术问题是:提供一种全新的差动式电容荷载传感器,以克服现有技术的不足。The technical problem to be solved by the utility model is to provide a brand-new differential capacitive load sensor to overcome the deficiencies of the prior art.

本实用新型采用的技术方案是:它主要由定极柱、动极柱、测量元件、测量头、壳体组成,动极柱与测量头固定连接为一体,定极柱与壳体固定连接为一体,测量头与壳体为间隙配合,测量元件安装在测量头与壳体底座之间;定极柱和动极拄的电极引出线经外壳底座上的引线孔引出。The technical solution adopted by the utility model is: it is mainly composed of a fixed pole, a moving pole, a measuring element, a measuring head and a housing, the moving pole and the measuring head are fixedly connected as one, and the fixed pole and the housing are fixedly connected as One body, the measuring head and the housing are in clearance fit, the measuring element is installed between the measuring head and the base of the housing; the electrode leads of the fixed pole and the moving pole are drawn out through the lead holes on the base of the housing.

动极拄、定极柱采用陶瓷材料作基底,表面分别镀有一层银,构成电容两个电极,银层表面再镀有一层惰性金属铑;定极柱的电极外还敷有一层聚氯乙烯层。The moving pole column and the fixed pole column are made of ceramic materials, and the surfaces are respectively plated with a layer of silver to form two electrodes of the capacitor. The surface of the silver layer is plated with a layer of inert metal rhodium; layer.

动极柱的电极两端分别设有电容等位环。Capacitive equipotential rings are respectively provided at both ends of the electrode of the movable pole.

本实用新型的积极效果是:1、与现在普遍应用的电阻应变式荷载传感器相比较,结构简单、适应性强、动态相应好、温度稳定性好,可实现非接触测量,具有极板间不接触,不磨损、寿命长等优点;2、测量元件相对独立安装,拆装方便;3、采用差动变极柱面积形式,输入与输出线性关系好,测量精度高,可达um级以下;4、动、定电容极柱采用陶瓷材料作基底,绝缘性能高;电极采用在陶瓷基底上喷镀银,然后再镀一层惰性金属铑,达到了既使电极导电性能好,又使电极相对密封,起到防尘、防潮、防腐蚀、抗氧化、抗磨损的作用,同时降低了温度系数;5、动极柱采用等位环技术可有效消除电容的边缘效应,使得传感器的输入与输出的线性关系更好,测量精度更高;6、动、定极柱之间采用聚氯乙烯材料作为电容的电介质,相对介电常数较高,传感器初始电容值高,便于信号的提取、测量、处理以及减小信号干扰并提高测量精度。The positive effects of the utility model are: 1. Compared with the resistance strain load sensor commonly used at present, it has simple structure, strong adaptability, good dynamic response and good temperature stability. Contact, no wear, long life and other advantages; 2. The measuring element is relatively independent installation, easy to disassemble; 3. Adopt the form of differential variable pole area, the linear relationship between input and output is good, and the measurement accuracy is high, which can reach below um level; 4. The poles of moving and constant capacitors are made of ceramic materials with high insulation performance; the electrodes are spray-plated with silver on the ceramic base, and then plated with a layer of inert metal rhodium, which achieves good conductivity of the electrodes and makes the electrodes relatively It is sealed to prevent dust, moisture, corrosion, oxidation, and wear, while reducing the temperature coefficient; 5. The equipotential ring technology used in the moving pole can effectively eliminate the edge effect of the capacitor, making the input and output of the sensor The linear relationship is better and the measurement accuracy is higher; 6. The polyvinyl chloride material is used as the dielectric of the capacitor between the moving and fixed poles, the relative permittivity is high, and the initial capacitance value of the sensor is high, which is convenient for signal extraction, measurement, Process and reduce signal interference and improve measurement accuracy.

四、附图说明 4. Description of drawings

附图1:本实用新型的结构示意图;Accompanying drawing 1: structural representation of the utility model;

附图2:本传感器的动极柱示意图;Figure 2: Schematic diagram of the moving pole of the sensor;

附图3:本传感器的定极柱示意图。Accompanying drawing 3: The fixed pole schematic diagram of this sensor.

五、具体实施方式 5. Specific implementation

如图1所示,本传感器由定极柱5、动极柱6、测量元件3、测量头1、壳体2构成,动极柱6、定极柱5均采用陶瓷材料作基底,形状为中空圆柱形,在动极柱6的内表面、定极柱5的外表面分别镀以厚度不超过0.1mm的银,作为电容两个电极11、13(如图2、3所示),然后再镀一层厚度0.05mm的惰性金属铑作为电极保护层,以达到既使电极导电性能好,又使电极相对密封,起到防尘、防潮、防腐蚀、抗氧化、抗磨损的作用,同时又可降低温度系数;在定极柱5的电极13外再敷以0.5mm厚的聚氯乙烯层14,以提高介电常数,增大电容值。如图2所示,动极柱6电极两端分别设有电容等位环10,可有效消除电容的边缘效应。定极柱5采用粘接方式与壳体2连为一体,动极柱6与测量头1粘接为一体;测量元件3在实施例中采用弹簧,可做成系列产品,根据检测对象、范围不同任意选用不同弹性系数的测量元件;测量头1和壳体2采用铁镍合金做材料,可减小温度变化对测量精度的影响;测量头1根据检测对象不同也可做成不同类型;壳体2采用铁镍合金材料,稳定性好,温度系数低,对内部的电容起到良好的屏蔽作用,抗信号干扰性能好。As shown in Figure 1, the sensor is composed of a fixed pole 5, a moving pole 6, a measuring element 3, a measuring head 1, and a housing 2. Both the moving pole 6 and the fixed pole 5 are made of ceramic materials, and the shape is Hollow cylinder, the inner surface of moving pole 6 and the outer surface of fixed pole 5 are respectively plated with silver with a thickness of no more than 0.1mm, as two electrodes 11, 13 of the capacitor (as shown in Figures 2 and 3), and then Then plate a layer of inert metal rhodium with a thickness of 0.05mm as the electrode protection layer, so as to achieve good electrical conductivity of the electrode, and make the electrode relatively sealed to prevent dust, moisture, corrosion, oxidation, and wear. It can also reduce the temperature coefficient; outside the electrode 13 of the fixed pole 5, apply a 0.5mm thick polyvinyl chloride layer 14 to increase the dielectric constant and increase the capacitance value. As shown in FIG. 2 , capacitor equipotential rings 10 are respectively provided at both ends of the electrodes of the movable pole 6 , which can effectively eliminate the edge effect of the capacitor. The fixed pole 5 is connected to the housing 2 by bonding, and the moving pole 6 is bonded to the measuring head 1; the measuring element 3 uses a spring in the embodiment, and can be made into a series of products. Different measuring elements with different elastic coefficients are arbitrarily selected; the measuring head 1 and the shell 2 are made of iron-nickel alloy, which can reduce the influence of temperature changes on the measurement accuracy; the measuring head 1 can also be made into different types according to different detection objects; the shell The body 2 is made of iron-nickel alloy material, which has good stability, low temperature coefficient, good shielding effect on the internal capacitance, and good anti-signal interference performance.

本实用新型的工作原理是:传感器工作时,测量头1受外力作用,并将该作用力传给测量元件3,测量元件3发生弹性变形,沿轴向被压缩,测量头1和动极柱6一起产生相应位移,则电容传感器两极柱间的覆盖面积发生变化,引起传感器的电容值随之变化,该电容值通过电极引出线4、9输出到外加电路,由电路对传感器的电容值进行检测、处理、输出,就可以得到外加荷载的大小。The working principle of the utility model is: when the sensor is working, the measuring head 1 is subjected to an external force and transmits the force to the measuring element 3, the measuring element 3 undergoes elastic deformation and is compressed in the axial direction, the measuring head 1 and the moving pole 6 together to produce a corresponding displacement, the coverage area between the two poles of the capacitance sensor changes, causing the capacitance value of the sensor to change accordingly, and the capacitance value is output to the external circuit through the electrode lead wires 4 and 9, and the capacitance value of the sensor is determined by the circuit After detection, processing and output, the size of the external load can be obtained.

Claims (3)

1、一种差动式电容荷载传感器,其特征是:它主要由定极柱(5)、动极柱(6)、测量元件(3)、测量头(1)、壳体(2)组成,动极柱(6)与测量头(1)固定连接为一体,定极柱(5)与壳体(2)固定连接为一体,测量头(1)与壳体(2)为间隙配合,测量元件(3)安装在测量头(1)与壳体(2)底座之间;定极柱(5)和动极柱(6)的电极引出线(4、9)经外壳(2)底座上的引线孔(8)引出。1. A differential capacitive load sensor, characterized in that it is mainly composed of a fixed pole (5), a moving pole (6), a measuring element (3), a measuring head (1), and a housing (2) , the moving pole (6) is fixedly connected with the measuring head (1), the fixed pole (5) is fixedly connected with the housing (2), and the measuring head (1) and the housing (2) are in clearance fit. The measuring element (3) is installed between the measuring head (1) and the base of the housing (2); the electrode leads (4, 9) of the fixed pole (5) and the moving pole (6) pass through the base of the housing (2) The lead hole (8) on the lead out. 2、根据权利要求1所述的差动式电容荷载传感器,其特征是:动极柱(6)、定极柱(5)由陶瓷材料作基底,表面分别镀有一层银,银层表面镀有一层惰性金属铑;定极柱(5)的电极(13)外还敷有一层聚氯乙烯(14)层。2. The differential capacitive load sensor according to claim 1, characterized in that: the moving pole (6) and the fixed pole (5) are made of ceramic materials, and the surfaces are respectively plated with a layer of silver, and the surface of the silver layer is plated There is a layer of inert metal rhodium; the electrode (13) of the fixed pole (5) is also coated with a layer of polyvinyl chloride (14). 3、根据权利要求1或2所述的差动式电容荷载传感器,其特征是:动极柱(6)的电极(11)两端分别设有电容等位环(10)。3. The differential capacitive load sensor according to claim 1 or 2, characterized in that: the two ends of the electrodes (11) of the movable pole (6) are respectively provided with capacitive equipotential rings (10).
CNU2008200695782U 2008-03-06 2008-03-06 Differential capacitive load sensor Expired - Fee Related CN201215516Y (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102445629A (en) * 2010-10-06 2012-05-09 微探测株式会社 Capacitance type differential sensor module and inspection apparatus of display panel used thereof
CN110514345A (en) * 2019-08-23 2019-11-29 武汉科技大学 A Capacitive Measuring and Monitoring Device for Bolt Pretightening Force
CN111174962A (en) * 2020-01-08 2020-05-19 哈尔滨工业大学 Capacitance type three-dimensional force sensor with adjustable measuring range
CN113125052A (en) * 2021-03-30 2021-07-16 于智育 Pressure sensor and detection method thereof
CN113297658A (en) * 2021-05-24 2021-08-24 中国十七冶集团有限公司 Bridge structure analysis system based on BIM technology and analysis method thereof

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102445629A (en) * 2010-10-06 2012-05-09 微探测株式会社 Capacitance type differential sensor module and inspection apparatus of display panel used thereof
CN110514345A (en) * 2019-08-23 2019-11-29 武汉科技大学 A Capacitive Measuring and Monitoring Device for Bolt Pretightening Force
CN110514345B (en) * 2019-08-23 2021-09-17 武汉科技大学 Measuring and monitoring device for capacitive bolt pretightening force
CN111174962A (en) * 2020-01-08 2020-05-19 哈尔滨工业大学 Capacitance type three-dimensional force sensor with adjustable measuring range
CN113125052A (en) * 2021-03-30 2021-07-16 于智育 Pressure sensor and detection method thereof
CN113125052B (en) * 2021-03-30 2022-05-27 于智育 Pressure sensor and detection method thereof
CN113297658A (en) * 2021-05-24 2021-08-24 中国十七冶集团有限公司 Bridge structure analysis system based on BIM technology and analysis method thereof
CN113297658B (en) * 2021-05-24 2024-04-26 中国十七冶集团有限公司 Bridge structure analysis system and analysis method based on BIM technology

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Granted publication date: 20090401

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