CN108387171A - A kind of flexible probe and its roughness algorithm detecting roughness based on capacitance method - Google Patents
A kind of flexible probe and its roughness algorithm detecting roughness based on capacitance method Download PDFInfo
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- CN108387171A CN108387171A CN201810432890.1A CN201810432890A CN108387171A CN 108387171 A CN108387171 A CN 108387171A CN 201810432890 A CN201810432890 A CN 201810432890A CN 108387171 A CN108387171 A CN 108387171A
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- flexible
- metal
- roughness
- capacitance
- pole plate
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/002—Constructional details of contacts for gauges actuating one or more contacts
Abstract
The invention discloses a kind of flexible probes and its roughness algorithm detecting roughness based on capacitance method, measured capacitance value, including flexible electrical pole plate, interior contact pin, supply connector, metal shielding, flexible embedding structure are carried out by capacitance measuring tester between flexible probe and tested metal.Effect of the front end of flexible probe because of flexible embedding structure so that can be preferably bonded with tested metal surface, with the better test request for adapting to be tested metal different curvature surface；It is made and is popped one's head in of standard BNC M 50KKY connectors, reduce cost；The outer rim of dielectric layers is all higher than metal polar plate outer rim so that flexible electrical pole plate and the contact forces of measured object metal are uniform；Since the structure of the present invention combines originality, so on implementing operation, it is more more simple and easy to do than traditional optical method and probe consistency profiles；Using the measurement of unique roughness algorithm combination flexible probe, accurate roughness value is got.
Description
Technical field
The invention belongs to a kind of detection roughness equipment technical fields, and in particular to one kind detecting roughness based on capacitance method
Flexible probe and its roughness algorithm.
Background technology
The basic principle of capacitance measurement Metal Surface Roughness is as shown in Figure 1, if make the top crown P1 of capacitor
For sensing probe, for bottom crown P2 as metal parts surface is tested, then it is C's that sensing probe collectively forms a pair of of capacitance with part
Plate condenser.The area A between capacitance C and pole plate between two plate P1 and P2 is directly proportional, the distance between parallel plate electrode t
It is inversely proportional.That is, when the clearance t between sensing probe and tested part surface changes, C will change.For thick
Rough surface, different roughness will cause the gap of contact surface different, and the capacitance C between two-plate is also different, passes through theory point
The relationship between roughness and capacitance is established in analysis and test, so that it may to test roughness value by capacitance.
Document (1) and document (2) propose a kind of basic structure of capacitance sensor, using one piece of flexible material as ginseng
Electrode plate is examined, the thin electrode of one piece of standard is attached to conductive glues on conductive elastomeric substrate, and make conductive conjunction
It is insulated from each other at rubber and sensor metal shell, as shown in Figure 2.
Flexible transducer probe contacts piece surface when measurement, can track arbitrary shape, arbitrary curvature tested part
The summit line on surface actually plays the role of geometry " cutoff value ", therefore shape mistake can be automatically filtered from measurement result
The influence of difference and morphology.
Pass through the above correlation model, so that it may to carry out the measurement of roughness.
Document (3) describes the development of Measuring Instrument For Metal Surface Roughness By Capacitance Method, but to the configuration of detection probe, and
Do not specifically describe.
Above with reference to document：
(1) Yuan Changliang, Ding Zhihua, military text hall surface roughnesses and its measurement, Beijing：China Machine Press, 1989,
p169-171；
(2) .1992.06 is cold worked in Guo Su chastity capacitance measurements surface roughness mechanic；
(3) Lou Minzhu, the sternly still development non-destructive testings .1996.10 of spring Measuring Instrument For Metal Surface Roughness By Capacitance Methods；
The problem of above-mentioned technology, is：
1, using conductive while conductive elastomeric support polar plate, but conductive rubber contact be pressurized when, general impedance
It can change, to bring measurement error.
2, there is metal-back design, but there is no statement metal-backs whether to be grounded, if earth-free, environment electromagnetics interfere meeting
Seriously affect measuring accuracy；
3, there is no a set of accurate and complete roughness computational algorithms.
Invention content
The purpose of the present invention is that solve the above-mentioned problems and provides a kind of based on the soft of capacitance method detection roughness
Property probe and its roughness algorithm.
The present invention is achieved through the following technical solutions above-mentioned purpose：
A kind of flexible probe detecting roughness based on capacitance method, passes through capacity measurement between flexible probe and tested metal
Instrument carries out measured capacitance value, including：
Flexible electrical pole plate；
Interior contact pin, one end and the flexible electrical pole plate of interior contact pin are electrically connected；
Supply connector, the core first end of supply connector and the other end of interior contact pin are electrically connected, supply connector
The second end of inner core and the first test lead of capacitance measuring tester be electrically connected, be tested the second test of metal and capacitance measuring tester
End is electrically connected；
Metal shielding, metal shielding cladding completely and the internally electricity of one end and flexible electrical pole plate of contact pin, interior contact pin
Property junction, the core first end of supply connector are electromagnetically shielded with the other end electrical connection part of interior contact pin；
For encapsulating connection structure between interior contact pin and flexible electrical pole plate and making the flexible flexible filling of flexible electrical pole plate
Seal structure.
Effect of the front end of flexible probe because of flexible embedding structure so that can preferably be pasted with tested metal surface
It closes, with the better test request for adapting to be tested metal different curvature.
Specifically, flexible electrical pole plate includes metal electrode layer, dielectric layers, two printed board gold-plating plugs, and two layers absolutely
Edge layer is clamped metal electrode layer, two printed board gold-plating plugs and connecting wire installation, and the of two printed board gold-plating plugs
One end is electrically connected by the both ends of conducting wire and metal electrode layer respectively, and one end of interior contact pin is gold-plated slotting with two printed boards respectively
The second end welding of head.
Preferably, the outer rim of dielectric layers is all higher than metal polar plate outer rim.
So that flexible electrical pole plate and the contact forces of measured object metal are uniform.
Preferably, the thickness of flexible electrical pole plate is 0.15mm.
Preferably, metal shielding is the cylinder-like structure that upper and lower ends are both provided with through-hole, the middle part of supply connector
It is fixed on the upper end through hole of metal shielding, metal electrode is placed on outside the lower end through-hole of metal shielding；Flexible embedding
Structure setting is in metal shielding, and to one end embedding of flexible electrical pole plate, interior contact pin and supply connector.
Metal shielding is filled inside metal shielding with Silica hydrogel embedding being electromagnetically shielded and main structure body support,
Also main structure body supporting role is played.
Preferably, supply connector is standard BNC-M-50KKY connectors.
Flexible probe is made using standard BNC-M-50KKY connectors, reduces production cost.
Preferably, the earthing of casing of supply connector.
The roughness algorithm that the flexible probe of roughness is detected based on capacitance method carries out operation using following formula：
Wherein,
RaFor roughness；
ε is dielectric constant of air, is 8.85941pF/m；
S is the single side area of metal electrode layer；
CaFor the capacity measurement zero of capacitance measuring tester；
C0For the capacitance when the surface roughness of the flexible embedding structure between metal electrode layer and tested metal is 0；
Measurement capacitances of the C between flexible probe and tested metal；
K is rough surface correction factor；Coefficient k is engineering experience coefficient, embodies different processing works to simplify power function
The surface characteristics form that skill generates.
The beneficial effects of the present invention are：
A kind of flexible probe and its roughness algorithm detecting roughness based on capacitance method of the present invention：
1, effect of the front end of flexible probe because of flexible embedding structure so that can preferably be pasted with tested metal surface
It closes, with the better test request for adapting to be tested metal different curvature surface；
2, it is made and is popped one's head in of standard BNC-M-50KKY connectors, reduce cost；
3, the outer rim of dielectric layers is all higher than metal polar plate outer rim so that flexible electrical pole plate is indirectly with measured object metal
Touch is uniform；
4, since the structure of this patent combines originality, so on implementing operation, than traditional optical method and probe profile
Method is more simple and easy to do；
5, using the measurement of unique roughness algorithm combination flexible probe, accurate roughness value is got.
Description of the drawings
Fig. 1 is the basic principle schematic of capacitance measurement Metal Surface Roughness；
Fig. 2 is the principle schematic of the prior art；
Fig. 3 is the relation curve schematic diagram of capacitance and roughness in roughness algorithm of the present invention；
Fig. 4 is the cross-sectional view of the present invention；
Fig. 5 is the work structure diagram of the present invention；
Fig. 6 is the transverse sectional view of the flexible electrical pole plate in the present invention；
Fig. 7 is the longitudinal sectional view of the flexible electrical pole plate in the present invention.
In figure：1, supply connector；2, metal shielding；3, interior contact pin；4, flexible embedding structure；5, flexible electrical pole plate；
51, metal electrode layer；52, insulating layer；53, printed board gold-plating plug.
Specific implementation mode
The invention will be further described below in conjunction with the accompanying drawings：
As shown in Figure 4, Figure 5, a kind of flexible probe detecting roughness based on capacitance method, flexible probe and tested metal it
Between by capacitance measuring tester carry out measured capacitance value, including：
Flexible electrical pole plate 5；
Interior contact pin 3, one end and the flexible electrical pole plate 5 of interior contact pin 3 are electrically connected；
Supply connector 1, the core first end of supply connector 1 and the other end of interior contact pin 3 are electrically connected, supply connection
The second end of the inner core of device 1 and the first test lead of capacitance measuring tester are electrically connected, and are tested the second of metal and capacitance measuring tester
Test lead is electrically connected；
Metal shielding 2, the cladding completely of metal shielding 2 and internally contact pin 3, one end of interior contact pin 3 and flexible electrical pole plate 5
Electrical connection part, the core first end of supply connector 1 is electromagnetically shielded with the other end electrical connection part of interior contact pin 3；
For encapsulating connection structure between interior contact pin 3 and flexible electrical pole plate 5 and making 5 flexible flexibility of flexible electrical pole plate
Embedding structure 4.
Flexible embedding structure 4 is made of flexible potting material.
Flexible potting material includes but not limited to Silica hydrogel, silicon rubber.
Effect of the front end of flexible probe because of flexible embedding structure 4 so that can preferably be pasted with tested metal surface
It closes, with the better test request for adapting to be tested metal different curvature.
As shown in Figure 6 and Figure 7, flexible electrical pole plate 5 includes 52, two metal electrode layer 51, dielectric layers printed board platings
Golden plug 53,51, two printed board gold-plating plugs 53 of metal electrode layer are clamped in dielectric layers 52 and connecting wire is installed, and two
The first end of a printed board gold-plating plug 53 is electrically connected by the both ends of conducting wire and metal electrode layer 51 respectively, interior contact pin 3
It is welded respectively with the second end of two printed board gold-plating plugs 53 one end.
Preferably, the outer rim of dielectric layers 52 is all higher than metal polar plate outer rim.
So that flexible electrical pole plate 5 and the contact forces of measured object metal are uniform.
Preferably, the thickness of flexible electrical pole plate 5 is 0.15mm.
Preferably, metal shielding 2 is that upper and lower ends are both provided with the cylinder-like structure of through-hole, in supply connector 1
Portion is fixed on the upper end through hole of metal shielding 2, and metal electrode layer 51 is placed in outside the lower end through-hole of metal shielding 2；It is soft
Property embedding structure 4 be arranged in metal shielding 2, and one end of flexible electrical pole plate 5, interior contact pin 3 and supply connector 1 is filled
Envelope.
Metal shielding 2 is filled out inside metal shielding 2 to be electromagnetically shielded and main structure body support with Silica hydrogel embedding
It fills, also plays main structure body supporting role.
Preferably, supply connector 1 is standard BNC-M-50KKY connectors.
Flexible probe is made using standard BNC-M-50KKY connectors, reduces production cost.
Preferably, the earthing of casing of supply connector 1.
As shown in figure 3, detecting the roughness algorithm of the flexible probe of roughness based on capacitance method, carried out using following formula
Operation：
Wherein,
RaFor roughness；
ε is dielectric constant of air, is 8.85941pF/m；
S is the single side area of metal electrode layer；
CaFor the capacity measurement zero of capacitance measuring tester；
C0For the capacitance when the surface roughness of the flexible embedding structure between metal electrode layer and tested metal is 0；
Measurement capacitances of the C between flexible probe and tested metal；
K is rough surface correction factor；Coefficient k is engineering experience coefficient, embodies different processing works to simplify power function
The surface characteristics form that skill generates.
Different processing technologys includes the surface characteristics form of the generations such as vehicle, milling, mill.
It should be noted that for the finished surface of different processing characteristics, different capacitance measuring tester and flexible probe, work
Journey fitting parameter can be slightly different, and need advanced row coefficient to demarcate in the application, then row test application.
5 one end of flexible electrical pole plate of flexible probe is pressed into tested Rough Metal Surface by operation of the present invention, with
Flexible electrical pole plate 5 is a pole, with tested metal (tested metal can be all conductive metals) for another pole, using commercialization
Capacitance measuring tester carry out two interpolars capacity measurement, in conjunction with the correlation of roughness and capacitance time, so that it may with obtain by
Survey the roughness value on surface.
Embodiment：For the stainless steel sample block of different roughness, capacitance method and tracer method are compared, are 0.5- in Ra
There is good related law (as shown in Figure 3), fit curve equation expression formula to be by the Ra of C in the range of 10um：
S is 50.24mm in this example2；
C in this exampleaFor -0.4893pF；
C in this example0For 36.5065pF；
K is 1.1591 in this example.
The basic principles, main features and advantages of the invention have been shown and described above.The technical staff of the industry should
Understand, the present invention is not limited to the above embodiments, and the above embodiments and description only describe the originals of the present invention
Reason, without departing from the spirit and scope of the present invention, various changes and improvements may be made to the invention, these changes and improvements
It all fall within the protetion scope of the claimed invention.The claimed scope of the invention is by appending claims and equivalents circle
It is fixed.
Claims (8)
1. a kind of flexible probe detecting roughness based on capacitance method, passes through capacitance measuring tester between flexible probe and tested metal
Carry out measured capacitance value, which is characterized in that including：
Flexible electrical pole plate；
Interior contact pin, one end and the flexible electrical pole plate of interior contact pin are electrically connected；
The other end of supply connector, the core first end of supply connector and interior contact pin is electrically connected, supply connector it is interior
The second end of core and the first test lead of capacitance measuring tester are electrically connected, and are tested the second test lead electricity of metal and capacitance measuring tester
Property connection；
Metal shielding, metal shielding cladding completely and internally contact pin, one end of interior contact pin and electrically connecting for flexible electrical pole plate
The place of connecing, the core first end of supply connector and the other end electrical connection part of interior contact pin are electromagnetically shielded；
For encapsulating connection structure between interior contact pin and flexible electrical pole plate and making the flexible flexible embedding knot of flexible electrical pole plate
Structure.
2. a kind of flexible probe detecting roughness based on capacitance method according to claim 1, it is characterised in that：Flexible electrical
Pole plate includes metal electrode layer, dielectric layers, two printed board gold-plating plugs, and metal electrode layer, two are clamped in dielectric layers
A printed board gold-plating plug and connecting wire installation, the first end of two printed board gold-plating plugs pass through conducting wire and metal respectively
The both ends of electrode layer are electrically connected, and one end of interior contact pin is welded with the second end of two printed board gold-plating plugs respectively.
3. a kind of flexible probe detecting roughness based on capacitance method according to claim 2, it is characterised in that：Two layers absolutely
The outer rim of edge layer is all higher than metal polar plate outer rim.
4. according to a kind of flexible probe detecting roughness based on capacitance method of claim 1-3 any one of them, feature exists
In：The thickness of flexible electrical pole plate is 0.15mm.
5. a kind of flexible probe detecting roughness based on capacitance method according to claim 4, it is characterised in that：Metal screen
It is the cylinder-like structure that upper and lower ends are both provided with through-hole to cover shell, and the upper end of metal shielding is fixed in the middle part of supply connector
Through hole, metal electrode are placed on outside the lower end through-hole of metal shielding；Flexible embedding structure setting in metal shielding,
And to one end embedding of flexible electrical pole plate, interior contact pin and supply connector.
6. according to a kind of flexible probe detecting roughness based on capacitance method of claim 1-5 any one of them, feature exists
In：Supply connector is standard BNC-M-50KKY connectors.
7. according to a kind of flexible probe detecting roughness based on capacitance method of claim 1-6 any one of them, feature exists
In：The earthing of casing of supply connector.
8. a kind of roughness for the flexible probe being detected roughness based on capacitance method such as claim 1-7 any one of them is calculated
Method, which is characterized in that operation is carried out using following formula：
Wherein,
RaFor roughness；
ε is dielectric constant of air, is 8.85941pF/m；
S is the single side area of metal electrode layer；
CaFor the capacity measurement zero of capacitance measuring tester；
C0For the capacitance when the surface roughness of the flexible embedding structure between metal electrode layer and tested metal is 0；
Measurement capacitances of the C between flexible probe and tested metal；
K is rough surface correction factor；Coefficient k is engineering experience coefficient, is produced with simplifying power function to embody different processing technologys
Raw surface characteristics form.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109387685A (en) * | 2018-11-01 | 2019-02-26 | 华南理工大学 | A kind of differential probe and contactless voltage measuring apparatus |
| CN109405734A (en) * | 2018-12-14 | 2019-03-01 | 中核新科（天津） 精密机械制造有限公司 | Quick high accuracy plane parallelism measurement device and measurement method |
| CN111174693A (en) * | 2019-12-17 | 2020-05-19 | 金阳 | Surface flatness detection device for new material with capacitance variable control |
| CN113739693A (en) * | 2021-09-06 | 2021-12-03 | 中国工程物理研究院总体工程研究所 | Flexible hollow spherical roughness measuring head based on capacitance method |
| CN114383493A (en) * | 2022-02-28 | 2022-04-22 | 中国工程物理研究院总体工程研究所 | Method for measuring thickness of non-conductive covering layer on non-contact metal surface |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109387685A (en) * | 2018-11-01 | 2019-02-26 | 华南理工大学 | A kind of differential probe and contactless voltage measuring apparatus |
| CN109387685B (en) * | 2018-11-01 | 2024-04-30 | 华南理工大学 | Differential probe and non-contact voltage measurement device |
| CN109405734A (en) * | 2018-12-14 | 2019-03-01 | 中核新科（天津） 精密机械制造有限公司 | Quick high accuracy plane parallelism measurement device and measurement method |
| CN109405734B (en) * | 2018-12-14 | 2023-11-21 | 中核新科（天津）精密机械制造有限公司 | Quick high-precision plane parallelism measuring device and measuring method |
| CN111174693A (en) * | 2019-12-17 | 2020-05-19 | 金阳 | Surface flatness detection device for new material with capacitance variable control |
| CN111174693B (en) * | 2019-12-17 | 2021-07-06 | 江苏骏茂新材料科技有限公司 | Surface flatness detection device for new material with capacitance variable control |
| CN113739693A (en) * | 2021-09-06 | 2021-12-03 | 中国工程物理研究院总体工程研究所 | Flexible hollow spherical roughness measuring head based on capacitance method |
| CN113739693B (en) * | 2021-09-06 | 2024-01-30 | 中国工程物理研究院总体工程研究所 | Flexible hollow sphere roughness measuring head based on capacitance method |
| CN114383493A (en) * | 2022-02-28 | 2022-04-22 | 中国工程物理研究院总体工程研究所 | Method for measuring thickness of non-conductive covering layer on non-contact metal surface |
| CN114383493B (en) * | 2022-02-28 | 2024-01-30 | 中国工程物理研究院总体工程研究所 | Non-contact metal surface non-conductive coating thickness measuring method |
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