CN105606200B - A kind of three-axial vibration sensor structure - Google Patents

A kind of three-axial vibration sensor structure Download PDF

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Publication number
CN105606200B
CN105606200B CN201410594846.2A CN201410594846A CN105606200B CN 105606200 B CN105606200 B CN 105606200B CN 201410594846 A CN201410594846 A CN 201410594846A CN 105606200 B CN105606200 B CN 105606200B
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plate
rigid plate
shell
rigid
fixing device
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CN105606200A (en
Inventor
姜志国
陈玉玲
张艳华
李国珍
史岩峰
赵爽
窦海峰
马佳
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China Academy of Launch Vehicle Technology CALT
Beijing Institute of Structure and Environment Engineering
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China Academy of Launch Vehicle Technology CALT
Beijing Institute of Structure and Environment Engineering
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Abstract

The present invention relates to vibrating sensor technical fields, and in particular to a kind of three-axial vibration sensor structure, it is therefore an objective to solve the problems, such as existing three-axial vibration sensor be also easy to produce high-frequency resonant, easily by electromagnetic interference and volume it is larger.It is characterized in that, it includes fixing device, signal transmitting apparatus and measuring device;Measuring device is fixedly connected on inside fixing device;Signal transmitting apparatus penetrates into outside fixing device inside fixing device, is fixedly connected with fixing device;Signal transmitting apparatus is also connect with measuring device;Measuring device is used to measure the acceleration of object under test;Fixing device is used to provide support and protection to measuring device and signal transmitting apparatus;Signal transmitting apparatus is used to the acceleration signal that measuring device measures being transferred to signal collecting device.The present invention realizes the reliability connection of interface, saves the inner space of sensor, frequency response obtains larger raising, and signal noise is obviously reduced by using the integrated design of four pieces of rigid printed boards and three pieces of flex plates.

Description

A kind of three-axial vibration sensor structure
Technical field
The present invention relates to vibrating sensor technical fields, and in particular to a kind of three-axial vibration sensor structure.
Background technology
Three-axial vibration sensor can measure the vibration letter in tri- directions measuring point mutually orthogonal X, Y, a Z simultaneously Number, it is had broad application prospects in aerospace field.
Frequency Response is one of the most important index for weighing vibrating sensor performance quality, the vibration of traditional three-axis piezoresistance formula Though sensor has good direct current effect, its temperature effect is serious, and dynamic range is limited, and Frequency Response is only capable of reaching 1KHz Left and right.Three axis condenser type vibrating sensors have many advantages, such as high sensitivity, low temperature effects, low-power consumption, but since sensor is defeated The high impedance gone out is not suitable for working in the presence of a harsh environment easily by electromagnetic interference influence.And its frequency range is limited, up to 3KHz or so.Three axis piezoelectric vibration pickup wide frequency ranges, the linearity are good, but due to charge leakage, and charge resistance easily occurs Effect, and the structure design that three-way piezoelectric formula vibrating sensor generally uses sensor seperated with converter are filled in, is not easy to realize one Body.
Above-mentioned vibrating sensor all comes with some shortcomings, and this severely limits the application ranges of sensor.
Invention content
Present invention aim to address existing three-axial vibration sensors to be also easy to produce high-frequency resonant, easily by electromagnetic interference and The larger problem of volume, provides that a kind of Frequency Response height, strong antijamming capability, connection reliability be high and three axis of volume compact To vibrating sensor structure.
The invention is realized in this way:
A kind of three-axial vibration sensor structure, including fixing device, signal transmitting apparatus and measuring device;Measuring device It is fixedly connected on inside fixing device;Signal transmitting apparatus penetrates into outside fixing device inside fixing device, is filled with fixed It sets and is fixedly connected;Signal transmitting apparatus is also connect with measuring device;Measuring device is used to measure the acceleration of object under test;It is fixed Device is used to provide support and protection to measuring device and signal transmitting apparatus;Signal transmitting apparatus is for measuring measuring device Acceleration signal be transferred to signal collecting device.
Fixing device as described above includes shell, bunch pipe, bunch screw, nut, washer and head cover;Shell is generally The hollow cuboid of upper end opening;It is solid there are two being opened in two opposite angle upper edge body height directions of shell cuboid Determine through-hole;It is provided with through-hole on shell cuboid rear end face;The generally square plate of head cover, lid are closed in the upper surface of shell On;Head cover is opened with shell fixed hole corresponding position there are two through-hole, and two through-holes are matched with the fixed hole of shell respectively, For vibrating sensor structure to be fixed on object under test;Bunch pipe is generally "T"-shaped, by upper and lower two hollow cylinders Composition, the outer diameter of upper end cylinder are more than the outer diameter of lower end cylinder, and the internal diameter of upper end cylinder is more than the interior of lower end cylinder Diameter, the outer diameter of upper end cylinder are more than the diameter of through-hole on shell cuboid rear end face, and the outer diameter of lower end cylinder is less than etc. In the diameter of through-hole on shell cuboid rear end face;In upper end, the front end of cylinder is provided with through-hole, which has interior Screw thread;There is external screw thread in the outer surface of lower end cylinder;Upper end cylinder is located at enclosure interior, and lower end cylinder is from shell cuboid Through-hole is pierced by shape rear end face;Nut is threadedly coupled with bunch pipe lower end cylinder;Nut is used to bunch pipe being fixed on shell On;Washer generally circular ring shape, notch is provided on annulus, and annulus outer diameter is less than or equal to the internal diameter of bunch pipe upper end cylinder;Pad Mounted on the inside of bunch pipe upper end cylinder, washer annular indentation and the through-hole of bunch pipe upper end cylinder front end are staggered circle; Bunch screw is the M3 type screws that upper surface is diametrically provided with gap;The front end of bunch screw and bunch pipe upper end cylinder The through hole whorl connection being provided with, the tip of bunch screw is in contact with the outer surface of washer.
Shell, bunch pipe, bunch screw, nut and head cover as described above are all made of aluminum alloy materials and are made;Washer is adopted It is made of soft aluminum material;The thickness of shell is 1.5mm;The overall size of shell and head cover is 27 × 27 × 21mm.
Signal transmitting apparatus as described above includes conducting wire, cable and electric connector;One end of conducting wire connects with measuring device It connects, one end connection of the other end and cable;The other end of cable and one end of electric connector connect;The other end of electric connector with Signal collecting device connects;Conducting wire is passed through from the inside of the bunch pipe of fixing device, also cross the inside of washer.
Measuring device as described above includes rigid-flexible combined circuit plate and sensitive core body;Rigid-flexible combined circuit plate includes first Rigid plate, the second rigid plate, third rigid plate, the 4th rigid plate, the first flex plate, the second flex plate and third flex plate;The One rigid plate is connect with third rigid plate by the second flex plate;Second rigid plate is connected with third rigid plate by the first flex plate It connects;Third rigid plate is connect with the 4th rigid plate by third flex plate;First rigid plate, the second rigid plate, third rigid plate It is all made of four-sheet structure with the 4th rigid plate, is from top to bottom followed successively by a layer signal layer, two layers of internal signal layers and bottom;Letter Number floor is used for welding component, and internal signal layers are for connecting up, and bottom is for connecting and being dielectrically separated from the shell of fixing device; First flex plate, the second flex plate and third flex plate are all made of double panel structure, are connected up between two-ply;Sensitive core body is shared It three, is respectively welded on the signals layer of the first rigid plate, the second rigid plate and third rigid plate;The power end of sensitive core body with Voltage adjuster connection in rigid plate, the output end of sensitive core body are connect with the front end of rigid plate up conversion circuit;First just Property plate is fixed on the right side inner wall of shell, and the second rigid plate is fixed on the front inner wall of shell, and the 4th rigid plate is fixed on In the inner left wall of shell, third rigid plate is fixed on the downside inner wall of shell;The conducting wire of signal transmitting apparatus is respectively with The signals layer welding of one rigid plate, the second rigid plate, third rigid plate and the 4th rigid plate.
First rigid plate, the second rigid plate, third rigid plate and the 4th rigid plate as described above are all made of expoxy glass Cloth pressing plate is made;First flex plate, the second flex plate and third flex plate are all made of polyimide material and are made.
The circuit connecting relation of rigid-flexible combined circuit plate as described above determines that sensitive core body is adopted according to GJB362B-2009 It is realized with 1221 core bodies that SDI companies produce.
The beneficial effects of the invention are as follows:
The present invention includes fixing device, signal transmitting apparatus and measuring device.By using four pieces of rigid printed boards and three The integrated design of block flex plate realizes the reliability connection of interface, saves the inner space of sensor so that signal passes Signal noise during defeated is obviously reduced.5 model machines are produced using the present invention, and enterprising in Vibrating Sensor Calibration system The verification of performance indicator is gone, under conditions of being less than 1dB with interior unevenness, the Frequency Response of sensor can reach 5KHz. After integrated design, the filter function and voltage-regulating circuit function of five model machines are working properly, three directions it is sensitive Noise drying values in degree and final output signal are satisfied by the requirement of experiment.
Description of the drawings
Fig. 1 is a kind of front sectional view of three-axial vibration sensor structure of the present invention;
Fig. 2 is a kind of sectional view along A-A of three-axial vibration sensor structure of the present invention;
Fig. 3 be the present invention a kind of three-axial vibration sensor structure in bunch pipe front sectional view;
Fig. 4 be the present invention a kind of three-axial vibration sensor structure in bunch pipe sectional view along A-A;
Fig. 5 is a kind of front view of three-axial vibration sensor structure middle washer of the present invention;
Fig. 6 is a kind of vertical view of three-axial vibration sensor structure middle washer of the present invention;
Fig. 7 be the present invention a kind of three-axial vibration sensor structure in rigid-flexible combined circuit plate structural schematic diagram.
Wherein:1. shell, 2. rigid-flexible combined circuit plates, 3. conducting wires, 4. sensitive core bodies, 5. bunch pipes, 6. bunch screws, 7. Nut, 8. cables, 9. electric connectors, 10. washers, 11. head covers, 12. rigid plates, the first rigid plates of 12-1., 12-2. second are rigid Property plate, 12-3. third rigid plates, the 4th rigid plates of 12-4., 13. flex plates, the first flex plates of 13-1., 13-2. second is flexible Plate, 13-3. third flex plates.
Specific implementation mode
The present invention is described further with reference to the accompanying drawings and examples.
A kind of three-axial vibration sensor structure, including fixing device, signal transmitting apparatus and measuring device.Measuring device It is fixedly connected on inside fixing device.Signal transmitting apparatus penetrates into outside fixing device inside fixing device, is filled with fixed It sets and is fixedly connected.Signal transmitting apparatus is also connect with measuring device.Measuring device is used to measure the acceleration of object under test.It is fixed Device is used to provide support and protection to measuring device and signal transmitting apparatus.Signal transmitting apparatus is for measuring measuring device Acceleration signal be transferred to signal collecting device.
As depicted in figs. 1 and 2, fixing device includes shell 1, bunch pipe 5, bunch screw 6, nut 7, washer 10 and head cover 11.The hollow cuboid of the generally upper end opening of shell 1.It is high in 1 cuboid of shell, two opposite angle upper edge shells 1 It opens there are two fixed hole in degree direction.It is provided with through-hole on 1 cuboid rear end face of shell.The generally square plate of head cover 11 Shape, lid close on the upper surface of shell 1.Head cover 11 is opened with 1 fixed hole corresponding position of shell there are two through-hole, and two through-holes divide It is not matched with the fixed hole of shell 1, for vibrating sensor structure to be fixed on object under test.Such as Fig. 3 and Fig. 4 institutes Show, bunch pipe 5 is generally "T"-shaped, is made of upper and lower two hollow cylinders, and the outer diameter of upper end cylinder is more than lower end cylinder The outer diameter of body, the internal diameter of upper end cylinder are more than the internal diameter of lower end cylinder, and the outer diameter of upper end cylinder is more than 1 cuboid of shell The diameter of through-hole on shape rear end face, the outer diameter of lower end cylinder are less than or equal to the diameter of through-hole on 1 cuboid rear end face of shell. In upper end, the front end of cylinder is provided with through-hole, which has internal thread.There is external screw thread in the outer surface of lower end cylinder.On End cylinder is located inside shell 1, and lower end cylinder is pierced by from through-hole on 1 cuboid rear end face of shell.Nut 7 and bunch pipe 5 lower end cylinders are threadedly coupled.Nut 7 is used to bunch pipe 5 being fixed on shell 1.As shown in Figure 5 and Figure 6, washer 10 is whole For circular ring shape, notch is provided on annulus, annulus outer diameter is less than or equal to the internal diameter of 5 upper end cylinder of bunch pipe.Washer 10 is mounted on The inside of 5 upper end cylinder of bunch pipe, 10 annular indentation of washer and the through-hole of 5 upper end cylinder front end of bunch pipe are staggered.Bunch Screw 6 is the M3 type screws that upper surface is diametrically provided with gap.The front end of bunch screw 6 and 5 upper end cylinder of bunch pipe The through hole whorl connection being provided with, the tip of bunch screw 6 is in contact with the outer surface of washer 10.
In the present embodiment, shell 1, bunch pipe 5, bunch screw 6, nut 7, washer 10 and head cover 11 are all made of aluminium alloy Material is made.The thickness of shell 1 is 1.5mm.The overall size of shell 1 and head cover 11 is 27 × 27 × 21mm.
As shown in Fig. 2, signal transmitting apparatus includes conducting wire 3, cable 8 and electric connector 9.One end of conducting wire 3 is filled with measurement Connection is set, the other end is connect with one end of cable 8.The other end of cable 8 and one end of electric connector connect.Electric connector it is another One end is connect with signal collecting device.Conducting wire 3 is passed through from the inside of the bunch pipe 5 of fixing device, also cross in washer 10 Portion.
In the present embodiment, conducting wire 3, cable 8 and electric connector 9 are general-purpose device, are commercially available.
As shown in fig. 7, measuring device includes rigid-flexible combined circuit plate 2 and sensitive core body 4.Rigid-flexible combined circuit plate 2 includes First rigid plate 12-1, the second rigid plate 12-2, third rigid plate 12-3, the 4th rigid plate 12-4, the first flex plate 13-1, Two flex plate 13-2 and third flex plate 13-3.First rigid plate 12-1 and third rigid plate 12-3 passes through the second flex plate 13-2 Connection.Second rigid plate 12-2 is connect with third rigid plate 12-3 by the first flex plate 13-1.Third rigid plate 12-3 and Four rigid plate 12-4 pass through the 13-3 connections of third flex plate.First rigid plate 12-1, the second rigid plate 12-2, third rigid plate 12-3 and the 4th rigid plate 12-4 are all made of four-sheet structure, are from top to bottom followed successively by a layer signal layer, two layers of internal signal layers And bottom.Signals layer is used for welding component, and internal signal layers are for connecting up, and bottom with the shell 1 of fixing device for connecting And it is dielectrically separated from.First rigid plate 12-1, the second rigid plate 12-2, third rigid plate 12-3 and the 4th rigid plate 12-4 are all made of Epoxy glass fabric pressing plate is made.First flex plate 13-1, the second flex plate 13-2 and third flex plate 13-3 are all made of doubling plate Structure connects up between two-ply.First flex plate 13-1, the second flex plate 13-2 and third flex plate 13-3 are all made of polyamides Asia Amine material is made.There are three sensitive core body 4 is total, it is rigid to be respectively welded at the first rigid plate 12-1, the second rigid plate 12-2 and third On the signals layer of property plate 12-3.The power end of sensitive core body 4 is connect with the voltage adjuster in rigid plate 12, sensitive core body 4 Output end is connect with the front end of 12 up conversion circuit of rigid plate.First rigid plate 12-1 is fixed on the right side inner wall of shell 1, the Two rigid plate 12-2 are fixed on the front inner wall of shell 1, and the 4th rigid plate 12-4 is fixed in the inner left wall of shell 1, the Three rigid plate 12-3 are fixed on the downside inner wall of shell 1.The conducting wire 3 of signal transmitting apparatus respectively with the first rigid plate 12-1, The signals layer of second rigid plate 12-2, third rigid plate 12-3 and the 4th rigid plate 12-4 weld.
In the present embodiment, the circuit connecting relation of rigid-flexible combined circuit plate 2 is determined according to GJB362B-2009, sensitive core Body 4 is realized using 1221 core bodies of SDI companies production.
Before experiment, rigid-flexible combined circuit plate 2 is first bonded in four inner surfaces of shell 1, is welded with the three of sensitive core body 4 The 12 orthogonal thereto distribution of a rigid plate.The conducting wire 3 that cable 8 connects is penetrated by the through-hole on 1 rear end face of shell in shell 1 again Bunch pipe 5 and washer 10 are through on cable 8 by portion, and the tip of bunch screw 6 is held out against washer 10.Then cable 8 is connected Conducting wire 3 is welded with rigid plate 12, and bunch pipe 5 is fixed on shell 1 with nut 7.Head cover 11 is finally bonded in the upper of shell 1 On end face, sensor structure assembly is completed.
When experiment, sensor structure is fixed on the tested surface of object under test by two M3 screws, it is to be measured to measure The acceleration of object in three directions.The result measured is exported through conducting wire 3, cable 8 and electric connector 9 and is set to signal acquisition It is standby.
The present invention includes fixing device, signal transmitting apparatus and measuring device.By using four pieces of rigid printed boards and three The integrated design of block flex plate realizes the reliability connection of interface, saves the inner space of sensor so that signal passes Signal noise during defeated is obviously reduced.5 model machines are produced using the present invention, and enterprising in Vibrating Sensor Calibration system The verification of performance indicator is gone, under conditions of being less than 1dB with interior unevenness, the Frequency Response of sensor can reach 5KHz. After integrated design, the filter function and voltage-regulating circuit function of five model machines are working properly, three directions it is sensitive Noise drying values in degree and final output signal are satisfied by the requirement of experiment.

Claims (4)

1. a kind of three-axial vibration sensor structure, it is characterised in that:It includes fixing device, signal transmitting apparatus and measurement dress It sets;Measuring device is fixedly connected on inside fixing device;Signal transmitting apparatus penetrates into outside fixing device in fixing device Portion is fixedly connected with fixing device;Signal transmitting apparatus is also connect with measuring device;Measuring device is for measuring object under test Acceleration;Fixing device is used to provide support and protection to measuring device and signal transmitting apparatus;Signal transmitting apparatus is used for will The acceleration signal that measuring device measures is transferred to signal collecting device;
The fixing device includes shell (1), bunch pipe (5), bunch screw (6), nut (7), washer (10) and head cover (11);The hollow cuboid of shell (1) generally upper end opening;In two opposite angle upper edges of shell (1) cuboid Shell (1) short transverse is opened there are two fixed hole;It is provided with through-hole on shell (1) cuboid rear end face;Head cover (11) is whole Body is square plate, and lid closes on the upper surface of shell (1);Head cover (11) is provided with shell (1) fixed hole corresponding position Two through-holes, two through-holes are matched with the fixed hole of shell (1) respectively, to be measured for vibrating sensor structure to be fixed on On object;Bunch pipe (5) is generally "T"-shaped, is made of upper and lower two hollow cylinders, under the outer diameter of upper end cylinder is more than The outer diameter of cylinder, the internal diameter of upper end cylinder is held to be more than the internal diameter of lower end cylinder, the outer diameter of upper end cylinder is more than shell (1) on cuboid rear end face through-hole diameter, the outer diameter of lower end cylinder is less than or equal on shell (1) cuboid rear end face The diameter of through-hole;In upper end, the front end of cylinder is provided with through-hole, which has internal thread;The outer surface of lower end cylinder There is external screw thread;Upper end cylinder is located at shell (1) inside, and lower end cylinder is worn from through-hole on shell (1) cuboid rear end face Go out;Nut (7) is threadedly coupled with bunch pipe (5) lower end cylinder;Nut (7) is used to bunch pipe (5) being fixed on shell (1) On;Washer (10) generally circular ring shape, notch is provided on annulus, and annulus outer diameter is less than or equal to bunch pipe (5) upper end cylinder Internal diameter;Washer (10) is mounted on the inside of bunch pipe (5) upper end cylinder, washer (10) annular indentation and bunch pipe (5) upper end The through-hole of cylinder front end is staggered;Bunch screw (6) is the M3 type screws that upper surface is diametrically provided with gap;Bunch screw (6) through hole whorl being provided with the front end of bunch pipe (5) upper end cylinder is connect, tip and the washer (10) of bunch screw (6) Outer surface be in contact;
The signal transmitting apparatus includes conducting wire (3), cable (8) and electric connector (9);One end of conducting wire (3) is filled with measurement Connection is set, the other end is connect with the one end of cable (8);The other end of cable (8) and one end of electric connector connect;Electric connector The other end connect with signal collecting device;Conducting wire (3) is passed through from the inside of the bunch pipe (5) of fixing device, also cross pad Enclose the inside of (10);
The measuring device includes rigid-flexible combined circuit plate (2) and sensitive core body (4);Rigid-flexible combined circuit plate (2) includes the One rigid plate (12-1), the second rigid plate (12-2), third rigid plate (12-3), the 4th rigid plate (12-4), the first flex plate (13-1), the second flex plate (13-2) and third flex plate (13-3);First rigid plate (12-1) and third rigid plate (12-3) It is connected by the second flex plate (13-2);Second rigid plate (12-2) passes through the first flex plate (13- with third rigid plate (12-3) 1) it connects;Third rigid plate (12-3) is connect with the 4th rigid plate (12-4) by third flex plate (13-3);First rigid plate (12-1), the second rigid plate (12-2), third rigid plate (12-3) and the 4th rigid plate (12-4) are all made of four-sheet structure, by A layer signal layer, two layers of internal signal layers and bottom are followed successively by under;Signals layer is used for welding component, and internal signal layers are used In wiring, bottom is for connecting and being dielectrically separated from the shell (1) of fixing device;First flex plate (13-1), the second flex plate (13-2) and third flex plate (13-3) are all made of double panel structure, are connected up between two-ply;There are three sensitive core body (4) is total, It is respectively welded on the signals layer of the first rigid plate (12-1), the second rigid plate (12-2) and third rigid plate (12-3);It is sensitive The power end of core (4) is connect with the voltage adjuster in rigid plate (12), output end and the rigid plate (12) of sensitive core body (4) The front end of up conversion circuit connects;First rigid plate (12-1) is fixed on the right side inner wall of shell (1), the second rigid plate (12- 2) it is fixed on the front inner wall of shell (1), the 4th rigid plate (12-4) is fixed in the inner left wall of shell (1), and third is rigid Property plate (12-3) is fixed on the downside inner wall of shell (1);The conducting wire (3) of signal transmitting apparatus respectively with the first rigid plate (12- 1), the signals layer welding of the second rigid plate (12-2), third rigid plate (12-3) and the 4th rigid plate (12-4).
2. three-axial vibration sensor structure according to claim 1, it is characterised in that:The shell (1), bunch pipe (5), bunch screw (6), nut (7) and head cover (11) are all made of aluminum alloy materials and are made;Washer (10) uses soft aluminum material system At;The thickness of shell (1) is 1.5mm;The overall size of shell (1) and head cover (11) is 27 × 27 × 21mm.
3. three-axial vibration sensor structure according to claim 1, it is characterised in that:First rigid plate (the 12- 1), the second rigid plate (12-2), third rigid plate (12-3) and the 4th rigid plate (12-4) are all made of epoxy glass fabric pressing plate system At;First flex plate (13-1), the second flex plate (13-2) and third flex plate (13-3) are all made of polyimide material and are made.
4. three-axial vibration sensor structure according to claim 3, it is characterised in that:The rigid-flexible combined circuit plate (2) circuit connecting relation determines that sensitive core body (4) uses 1221 core bodies of SDI companies production according to GJB362B-2009 It realizes.
CN201410594846.2A 2014-10-29 2014-10-29 A kind of three-axial vibration sensor structure Active CN105606200B (en)

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Publication number Priority date Publication date Assignee Title
CN106448121A (en) * 2016-12-12 2017-02-22 北京强度环境研究所 Wireless sensor
CN107703330A (en) * 2017-11-07 2018-02-16 南京高华科技股份有限公司 The acceleration sensor apparatus steadily comfortably detected for the axle of standard EMUs three
CN218450493U (en) * 2022-08-11 2023-02-03 瑞声声学科技(深圳)有限公司 Vibration sensor

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CN101876244A (en) * 2010-06-03 2010-11-03 西安思坦仪器股份有限公司 Inertia measuring unit and continuous inclinometer for dynamically tuned gyroscope
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CN202710172U (en) * 2012-08-09 2013-01-30 北京中元瑞讯科技有限公司 Measuring device for low-frequency, small-amplitude vibration signal
CN103591962A (en) * 2013-11-11 2014-02-19 北京航空航天大学 Positioning and orienting instrument optical fiber strap-down inertial measurement unit for coal industry

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