CN102519635B - Triaxial force sensor with overload protection function - Google Patents

Triaxial force sensor with overload protection function Download PDF

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Publication number
CN102519635B
CN102519635B CN 201110389091 CN201110389091A CN102519635B CN 102519635 B CN102519635 B CN 102519635B CN 201110389091 CN201110389091 CN 201110389091 CN 201110389091 A CN201110389091 A CN 201110389091A CN 102519635 B CN102519635 B CN 102519635B
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join
foil gauge
pin
joins
power
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CN102519635A (en
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翟崇朴
徐明龙
卢天健
王战
陶福洋
安增勇
冯勃
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Beijing Etrol Oil And Gas Technology Co ltd
Sichuan Security Control Technology Co ltd
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Xian Jiaotong University
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Abstract

The invention discloses a triaxial force sensor with an overload protection function. The triaxial force sensor comprises a base, wherein an elastic element is fixed in a notch reserved in the upper end of the base; one end of a first connecting rod is fixed at the top end of the elastic element; the spherical end of the first connecting rod is hinged with a spherical hinge; a second connecting rod is fixed on the spherical hinge; the other end of the second connecting rod is clamped with a third connecting rod; the third connecting rod is connected with a measured member; an overload protection shell is clamped outside the notch in the upper end of the base; the top end of the overload protection shell is leveled to the top end of the elastic element; three internal hexagonal screws are arranged on the top of the overload protection shell; a circuit board is fixed in the lower end of the base; a knob on the circuit board is exposed from an opening in the base; the output signal line and a power line of the circuit board are connected to the external part of the sensor through the opening in the base; and a base plate fixed on the base is arranged on the lower part of the circuit board. According to the sensor, the problem of overload of the elastic element during mounting and use is well solved; and due to a built-in amplification circuit, a phenomenon of extremely low signal to noise ratio caused by remote transmission is improved remarkably.

Description

Three-axis force sensor with overload protection function
Technical field
The present invention relates to a kind of three-axis force sensor, be specifically related to a kind of three-axis force sensor with overload protection function.
Background technology
The three-axis force sensor can be widely used in various fields such as Aeronautics and Astronautics, building, machining, automobile, robot.The three-axis force sensor has become one of high-tech product of present urgent need, and its development is paid much attention to.But there is following difficult point in the development of three-axis force sensor: one, and the overload in installation and the use makes flexible member generation plastic deformation cause the sensor permanent damage; Two, the long-distance transmissions of sensor output signal causes the signal to noise ratio (S/N ratio) of signal very low.
Summary of the invention
In order to overcome the shortcoming of above-mentioned prior art; the object of the present invention is to provide a kind of three-axis force sensor with overload protection function, solved the low problem of signal to noise ratio (S/N ratio) that the long-distance transmissions of the overload problem of flexible member in installation and the use and output signal causes.
For achieving the above object, the technical solution used in the present invention is:
Three-axis force sensor with overload protection function; comprise base 1; flexible member 3 is fixed in the notch of base 1 upper end; head rod 6 one ends are fixed on flexible member 3 tops; head rod 6 spheric ends and ball pivot 7 are hinged; second connecting link 8 is fixed on the ball pivot 7; the other end of second connecting link 8 blocks the 3rd connecting link 9; the 3rd connecting link 9 is connected with tested member; overload protection shell 2 is stuck in the notch outside of base 1 upper end; make overload protection shell 2 tops and flexible member 3 top levels; three SOC.HD. cap screw 11 are installed in the top of overload protection shell 2; circuit board 4 is fixed in base 1 lower end; the knob 18 of six sidespin potentiometers on the circuit board 4 exposes by the opening 17 on the base 1; the output signal line of circuit board 4 and power lead are transferred to the sensor outside by the perforate 16 on the base 1, and circuit board 4 bottoms are provided with base plate 5, and base plate 5 is fixed on the base 1.
The circuit of described circuit board 4 comprises power unit and signal amplifying part branch, the signal amplifying part branch contains three signal amplification circuits, the voltage signal of the power output of corresponding three-axis force sensor measurement on each respectively, three signal amplifying circuit principles are identical, and three signal amplification circuits share a power circuit.
Described power unit circuit is, join from recovering insurance F1 one end and interface OUT first pin+24V, the other end and Xiao Jite diode D1 positive pole join, the negative pole of Xiao Jite diode D1 and capacitor C 1 and inductance L 1 are joined, the first pin GND of the other end of capacitor C 1 and power module of voltage regulation U1 joins, the crus secunda 0V of while and interface OUT joins, the crus secunda of the other end of inductance L 1 and power module of voltage regulation U1 joins, one end of the 6th pin of power module of voltage regulation U1+VO and inductance L 2 joins, the other end of inductance L 2 and capacitor C 3, the tripod VIN of capacitor C 2 and voltage stabilizer U2 joins, and draw+the 12V end, for signal amplification circuit provides+voltage of 12V, capacitor C 2, the other end of capacitor C 3 and signal ground AGND join, power module of voltage regulation U1 the 7th pin 0V and signal ground AGND join, one end of the octal of power module of voltage regulation U1-VO and inductance L 4 joins, the other end of inductance L 4 and capacitor C 6, the crus secunda VIN of capacitor C 7 and voltage stabilizer U3 joins, and draw-the 12V end, for signal amplification circuit provides-voltage of 12V, capacitor C 6, the other end of capacitor C 7 and signal ground AGND join, the first pin VOUT of voltage stabilizer U2 and an end of capacitor C 4 join, and draw+the 5V end, for signal amplification circuit provides+voltage of 5V, the other end of capacitor C 4 and signal ground AGND join, crus secunda GND and the signal ground AGND of voltage stabilizer U2 join, the tripod VOUT of voltage stabilizer U3 and an end of capacitor C 9 join, and draw-the 5V end, for signal amplification circuit provides-voltage of 5V, the other end of capacitor C 9 and signal ground AGND join, and the first pin GND and the signal ground AGND of voltage stabilizer U3 join;
Interface OUT first pin+24V and crus secunda 0V join with the 24VDC power positive cathode respectively, interface OUT tripod OUTx, the 4th pin OUTy, the 5th pin OUTz connects first respectively, and second, the electric bridge output signal after the 3rd amplification, the 6th pin and signal ground AGND join, inductance L 5 one ends and signal ground AGND join, and the other end and capacitor C 13 are joined, and the other end of capacitor C 13 and casing ground GND join.
The power corresponding signal amplification circuit of described measurement on first is, interface INX first pin+5V, the 4th pin-5V respectively with power circuit+5V end,-5V end joins, crus secunda-IN of crus secunda-INX of interface INX and chip U4x joins, the tripod of the tripod of interface INX+INX and chip U4x+IN joins, the two ends of resistance R 1 respectively with chip U4x first pin-RG, the octal+RG joins, chip U4x the 4th pin-VS, chip U5x the 4th pin V-follows power circuit-12V end to join, chip U4x the 7th pin+VS, chip U5x octal V+ follows power circuit+12V end to join, the 5th pin REF of chip U4x and the first pin OUTA of chip U5x, crus secunda-INA of chip U5x joins, the 6th pin OUT and resistance R 5 one ends of chip U4x join, the other end of resistance R 5 and capacitor C 10, the 5th pin of chip U5x+INB joins, the other end of capacitor C 10 and signal ground AGND join, the crus secunda of the tripod of chip U5x+INA and sidespin potentiometer x0 joins, first pin and the resistance R 2 of sidespin potentiometer x0 are joined, tripod and the resistance R 3 of sidespin potentiometer x0 are joined, the other end of resistance R 2 and power circuit+5V end joins, the other end of resistance R 3 and power circuit-5V end joins, the 6th pin of chip U5x-INB and sidespin potentiometer x crus secunda join, first pin and the resistance R 6 of sidespin potentiometer x are joined, tripod and the resistance R 7 of sidespin potentiometer x are joined, the other end of resistance R 6 and signal ground AGND join, the 7th pin OUTB of the other end of resistance R 7 and chip U5x, power circuit interface OUT tripod OUTx joins.
Three groups of foil gauges are arranged on the described flexible member, first group of upper side that is attached to flexible member, second group of foil gauge is attached to side, flexible member middle part, the 3rd group of foil gauge is attached to the flexible member bottom, first group of foil gauge comprises the first foil gauge RA1, the second foil gauge RB1, the 3rd foil gauge RC1 and the 4th foil gauge RD1, four foil gauges are formed full-bridge and are used for measuring power on first, second group of foil gauge comprises the first foil gauge RA2, the second foil gauge RB2, the 3rd foil gauge RC2 and the 4th foil gauge RD2, four foil gauges are formed full-bridge and are used for measuring power on second, the 3rd group of foil gauge comprises the first foil gauge RA3, the second foil gauge RB3, the 3rd foil gauge RC3 and the 4th foil gauge RD3, four foil gauges form full-bridge and are used for measuring power on the 3rd.
Described first group of foil gauge is: the first foil gauge RA1, one end and the 4th foil gauge RD1 join, and and first pin+5V of measuring the interface INX on the corresponding signal amplification circuit of power on first join, the first foil gauge RA1 other end and the second foil gauge RB1 join, and and crus secunda-INX of measuring the interface INX on the corresponding signal amplification circuit of power on first join.The 3rd foil gauge RC1 two ends do not join with that end that the first foil gauge RA1 joins with the 4th foil gauge RD1, the second foil gauge RB1 respectively, join that end also with the 4th foil gauge RD1 and and third angle pin+INX of measuring the interface INX on the corresponding signal amplification circuit of power on first join, that end that joins with the second foil gauge RB1 also and and the 4th pin-5V of measuring the interface INX on the corresponding signal amplification circuit of power on first join.
The bridge circuit composing method of described second group of foil gauge, the 3rd group of foil gauge and mode of connection and first group of foil gauge identical.
The present invention compares with prior art, has following advantage: the design by to circuit in the innovation of three-axis force sensor overload protection arrangement and the sensor base provides a kind of compact conformation, the three-axis force sensor with overload protection function easy to assembly; Its characteristics are: tested member is connected with the sensor flexible member with stationary installation by the 3rd connecting link on sensor construction top; this sensor fixedly has the overload protection shell at base; on base He in the overload protection shell, have the sensor flexible member; and the Wiring port that flexible member is provided with in foil gauge and the base circuit connects to form Wheatstone bridge; in installation process; SOC.HD. cap screw on the overload protection shell holds out against flexible member; can prevent the damage of sensor overload by the deformation that limits flexible member; in measuring process; unclamp the SOC.HD. cap screw that holds out against flexible member on the containment vessel; make the flexible member can operate as normal; and the overload protection shell can limit the maximum displacement of flexible member; prevent that the sensor flexible member from large deformation taking place and produce plastic deformation; tested member is subjected to the miniature deformation of the effect initiation flexible member of power; and then corresponding deformation takes place in foil gauge; have influence on the Wheatstone bridge output signal of its composition that is connected with corresponding Wiring port subsequently synchronously; output signal is through the amplification of circuit in the base; and can be by the enlargement factor of signal in sidespin potentiometer on the opening regulating circuit plate in the base and then the change circuit; output signal lead after amplifying like this spreads out of by the perforate in the base; output signal voltage just can obtain the size of the suffered power of tested member thus; such sensor has well solved flexible member overload in installation and the use; the very low phenomenon of the signal to noise ratio (S/N ratio) that embedded amplifying circuit causes the long-distance transmissions of output signal be improved significantly; and it is simple in structure, easy for installation.
Description of drawings
Fig. 1 is the three-axis force sensor construction figure with overload protection function.
Fig. 2 is the three-axis force sensor part explosive view with overload protection function.
Fig. 3 is probe power partial circuit figure.
Fig. 4 is the corresponding signal amplification circuit figure of power that measures on first.
Fig. 5 is position view that foil gauge pastes on the sensor flexible member, and wherein, Fig. 5 (A) is first group of position view that foil gauge pastes; Fig. 5 (B) is second group of position view that foil gauge pastes; Fig. 5 (C) is the 3rd group of position view that foil gauge pastes.
Fig. 6 is first group of strain gauge bridge connection diagram.
Embodiment
Below in conjunction with accompanying drawing structural principle of the present invention and principle of work are described in further detail.
As Fig. 1; shown in Figure 2; the present invention has the three-axis force sensor of overload protection function; comprise base 1; flexible member 3 is fixed in the circular notch of base 1 upper end by four screws 15; overload protection shell 2 is stuck in the notch outside of base 1 upper end by four SOC.HD. cap screw 10; make overload protection shell 2 tops and flexible member 3 top levels; three SOC.HD. cap screw 11 are installed in the top of overload protection shell 2; circuit board 4 is fixed in base 1 lower end by four screws 14; the knob 18 of six sidespin potentiometers on the circuit board 4 exposes by the opening 17 on the base 1; the output signal line of circuit board 4 and power lead are transferred to the sensor outside by the perforate 16 on the base 1; circuit board 4 bottoms are provided with base plate 5; base plate 5 is fixed on the base 1 by four screws 13; head rod 6 one ends are fixed on flexible member 3 tops; head rod 6 spheric ends and ball pivot 7 are hinged; second connecting link 8 is fixed on the ball pivot 7; the other end of second connecting link 8 blocks the 3rd connecting link 9, the three connecting links 9 by two SOC.HD. cap screw 19 and is connected with tested member.
The circuit of circuit board 4 comprises power unit and signal amplifying part branch, the signal amplifying part branch contains three signal amplification circuits, the voltage signal of the power output of corresponding three-axis force sensor measurement on each respectively, three signal amplifying circuit principles are identical, and three signal amplification circuits share a power circuit.
As shown in Figure 3, the power unit circuit is, join from recovering insurance F1 one end and interface OUT first pin+24V, the other end and Xiao Jite diode D1 positive pole join, the negative pole of Xiao Jite diode D1 and capacitor C 1 and inductance L 1 are joined, the first pin GND of the other end of capacitor C 1 and power module of voltage regulation U1 joins, the crus secunda 0V of while and interface OUT joins, the crus secunda of the other end of inductance L 1 and power module of voltage regulation U1 joins, one end of the 6th pin of power module of voltage regulation U1+VO and inductance L 2 joins, the other end of inductance L 2 and capacitor C 3, the tripod VIN of capacitor C 2 and voltage stabilizer U2 joins, and draw+the 12V end, for signal amplification circuit provides+voltage of 12V, capacitor C 2, the other end of capacitor C 3 and signal ground AGND join, power module of voltage regulation U1 the 7th pin 0V and signal ground AGND join, one end of the octal of power module of voltage regulation U1-VO and inductance L 4 joins, the other end of L4 and capacitor C 6, the crus secunda VIN of capacitor C 7 and voltage stabilizer U3 joins, and draw-the 12V end, for signal amplification circuit provides-voltage of 12V, capacitor C 6, the other end of capacitor C 7 and signal ground AGND join, the first pin VOUT of voltage stabilizer U2 and an end of capacitor C 4 join, and draw+the 5V end, for signal amplification circuit provides+voltage of 5V, the other end of capacitor C 4 and signal ground AGND join, crus secunda GND and the signal ground AGND of voltage stabilizer U2 join, the tripod VOUT of voltage stabilizer U3 and an end of capacitor C 9 join, and draw-the 5V end, for signal amplification circuit provides-voltage of 5V, the other end of capacitor C 9 and signal ground AGND join, and the first pin GND and the signal ground AGND of voltage stabilizer U3 join; Interface OUT first pin+24V and crus secunda 0V join with the 24VDC power positive cathode respectively, interface OUT tripod OUTx, the 4th pin OUTy, the 5th pin OUTz respectively with first, second, the electric bridge output signal after the 3rd amplification is joined, and the 6th pin and signal ground AGND join.Inductance L 5 one ends and signal ground AGND join, and the other end and capacitor C 13 are joined, and the other end of capacitor C 13 and casing ground GND join.
As shown in Figure 4, the corresponding signal amplification circuit of measuring on first of power is, interface INX first pin+5V, the 4th pin-5V respectively with power circuit+5V end,-5V end joins, crus secunda-IN of crus secunda-INX of interface INX and chip U4x joins, the tripod of the tripod of interface INX+INX and chip U4x+IN joins, the two ends of resistance R 1 respectively with chip U4x first pin-RG, the octal+RG joins, chip U4x the 4th pin-VS, chip U5x the 4th pin V-follows power circuit-12V end to join, chip U4x the 7th pin+VS, chip U5x octal V+ follows power circuit+12V end to join, the 5th pin REF of chip U4x and the first pin OUTA of chip U5x, crus secunda-INA of chip U5x joins, the 6th pin OUT and resistance R 5 one ends of chip U4x join, the other end of resistance R 5 and capacitor C 10, the 5th pin of chip U5x+INB joins, the other end of capacitor C 10 and signal ground AGND join, the crus secunda of the tripod of chip U5x+INA and sidespin potentiometer x0 joins, first pin and the resistance R 2 of sidespin potentiometer x0 are joined, tripod and the resistance R 3 of sidespin potentiometer x0 are joined, the other end of resistance R 2 and power circuit+5V end joins, the other end of resistance R 3 and power circuit-5V end joins, the 6th pin of chip U5x-INB and sidespin potentiometer x crus secunda join, first pin and the resistance R 6 of sidespin potentiometer x are joined, tripod and the resistance R 7 of x are joined, the other end of resistance R 6 and signal ground AGND join, the 7th pin OUTB of the other end of resistance R 7 and chip U5x, power circuit interface OUT tripod OUTx joins.
As shown in Figure 5, three groups of foil gauges are arranged on the flexible member, first group of upper side that is attached to flexible member, second group of foil gauge is attached to side, flexible member middle part, the 3rd group of foil gauge is attached to the flexible member bottom, first group of foil gauge comprises the first foil gauge RA1, the second foil gauge RB1, the 3rd foil gauge RC1 and the 4th foil gauge RD1, four foil gauges are formed full-bridge and are used for measuring power on first, second group of foil gauge comprises the first foil gauge RA2, the second foil gauge RB2, the 3rd foil gauge RC2 and the 4th foil gauge RD2, four foil gauges are formed full-bridge and are used for measuring power on second, the 3rd group of foil gauge comprises the first foil gauge RA3, the second foil gauge RB3, the 3rd foil gauge RC3 and the 4th foil gauge RD3, four foil gauges form full-bridge and are used for measuring power on the 3rd.
As shown in Figure 6, first group of foil gauge is: the first foil gauge RA1, one end and the 4th foil gauge RD1 join, and and first pin+5V of measuring the interface INX on the corresponding signal amplification circuit of power on first join, the first foil gauge RA1 other end and the second foil gauge RB1 join, and and crus secunda-INX of measuring the interface INX on the corresponding signal amplification circuit of power on first join.The 3rd foil gauge RC1 two ends do not join with that end that the first foil gauge RA1 joins with the 4th foil gauge RD1, the second foil gauge RB1 respectively, join that end also with the 4th foil gauge RD1 and and third angle pin+INX of measuring the interface INX on the corresponding signal amplification circuit of power on first join, that end that joins with the second foil gauge RB1 also and and the 4th pin-5V of measuring the interface INX on the corresponding signal amplification circuit of power on first join.
The bridge circuit composing method of second group of foil gauge, the 3rd group of foil gauge and mode of connection and first group of foil gauge identical.
Principle of work of the present invention is: tested member is subjected to the miniature deformation of the effect initiation flexible member 3 of power, and then corresponding deformation takes place in the foil gauge on the flexible member 3, have influence on the voltage signal of the Wheatstone bridge output of its composition that is connected with corresponding Wiring port subsequently synchronously, output signal is through the amplification of circuit in the circuit board 4 in the base 1, and can be by the enlargement factor of voltage signal in sidespin potentiometer knob 18 on the opening 17 regulating circuit plates in the base 1 and then the change circuit, output signal after amplifying like this, spread out of by the perforate 16 in the base 1 via lead, output voltage signal just can obtain the size of the suffered power of tested member thus.

Claims (6)

1. the three-axis force sensor that has overload protection function, comprise base (1), flexible member (3) is fixed in the notch of base (1) upper end, head rod (6) one ends are fixed on flexible member (3) top, head rod (6) spheric end and ball pivot (7) are hinged, second connecting link (8) is fixed on the ball pivot (7), the other end of second connecting link (8) blocks the 3rd connecting link (9), the 3rd connecting link (9) is connected with tested member, it is characterized in that: overload protection shell (2) is stuck in notch outside, base (1) upper end, make overload protection shell (2) top and flexible member (3) top level, three SOC.HD. cap screw (11) are installed in the top of overload protection shell (2), circuit board (4) is fixed in base (1) lower end, the knob (18) of six sidespin potentiometers on the circuit board (4) exposes by the opening 17 on the base (1), the output signal line of circuit board (4) and power lead are transferred to the sensor outside by the perforate (16) on the base (1), circuit board (4) bottom is provided with base plate (5), and base plate (5) is fixed on the base (1); Three groups of foil gauges are arranged on the described flexible member (3), first group of upper side that is attached to flexible member, second group of foil gauge is attached to side, flexible member middle part, the 3rd group of foil gauge is attached to the flexible member bottom, first group of foil gauge comprises the first foil gauge RA1, the second foil gauge RB1, the 3rd foil gauge RC1 and the 4th foil gauge RD1, four foil gauges are formed full-bridge and are used for measuring power on first, second group of foil gauge comprises the first foil gauge RA2, the second foil gauge RB2, the 3rd foil gauge RC2 and the 4th foil gauge RD2, four foil gauges are formed full-bridge and are used for measuring power on second, the 3rd group of foil gauge comprises the first foil gauge RA3, the second foil gauge RB3, the 3rd foil gauge RC3 and the 4th foil gauge RD3, four foil gauges form full-bridge and are used for measuring power on the 3rd.
2. three-axis force sensor according to claim 1, it is characterized in that: the circuit of described circuit board (4) comprises power unit and signal amplifying part branch, the signal amplifying part branch contains three signal amplification circuits, the voltage signal of the power output of corresponding three-axis force sensor measurement on each respectively, three signal amplifying circuit principles are identical, and three signal amplification circuits share a power circuit.
3. three-axis force sensor according to claim 2, it is characterized in that: described power unit circuit is, join from recovering insurance F1 one end and interface OUT first pin+24V, the other end and Xiao Jite diode D1 positive pole join, the negative pole of Xiao Jite diode D1 and capacitor C 1 and inductance L 1 are joined, the first pin GND of the other end of capacitor C 1 and power module of voltage regulation U1 joins, the crus secunda 0V of while and interface OUT joins, the crus secunda of the other end of inductance L 1 and power module of voltage regulation U1 joins, one end of the 6th pin of power module of voltage regulation U1+VO and inductance L 2 joins, the other end of inductance L 2 and capacitor C 3, the tripod VIN of capacitor C 2 and voltage stabilizer U2 joins, and draw+the 12V end, for signal amplification circuit provides+voltage of 12V, capacitor C 2, the other end of capacitor C 3 and signal ground AGND join, power module of voltage regulation U1 the 7th pin 0V and signal ground AGND join, one end of the octal of power module of voltage regulation U1-VO and inductance L 4 joins, the other end of inductance L 4 and capacitor C 6, the crus secunda VIN of capacitor C 7 and voltage stabilizer U3 joins, and draw-the 12V end, for signal amplification circuit provides-voltage of 12V, capacitor C 6, the other end of capacitor C 7 and signal ground AGND join, the first pin VOUT of voltage stabilizer U2 and an end of capacitor C 4 join, and draw+the 5V end, for signal amplification circuit provides+voltage of 5V, the other end of capacitor C 4 and signal ground AGND join, crus secunda GND and the signal ground AGND of voltage stabilizer U2 join, the tripod VOUT of voltage stabilizer U3 and an end of capacitor C 9 join, and draw-the 5V end, for signal amplification circuit provides-voltage of 5V, the other end of capacitor C 9 and signal ground AGND join, and the first pin GND and the signal ground AGND of voltage stabilizer U3 join;
Interface OUT first pin+24V and crus secunda 0V join with the 24VDC power positive cathode respectively, interface OUT tripod OUTx, the 4th pin OUTy, the 5th pin OUTz connects first respectively, and second, the electric bridge output signal after the 3rd amplification, the 6th pin and signal ground AGND join, inductance L 5 one ends and signal ground AGND join, and the other end and capacitor C 13 are joined, and the other end of C13 and casing ground GND join.
4. three-axis force sensor according to claim 2, it is characterized in that: the corresponding signal amplification circuit of power in first of the described measurement is, interface INX first pin+5V, the 4th pin-5V respectively with power circuit+5V end,-5V end joins, crus secunda-IN of crus secunda-INX of interface INX and chip U4x joins, the tripod of the tripod of interface INX+INX and chip U4x+IN joins, the two ends of resistance R 1 respectively with chip U4x first pin-RG, the octal+RG joins, chip U4x the 4th pin-VS, chip U5x the 4th pin V-follows power circuit-12V end to join, chip U4x the 7th pin+VS, chip U5x octal V+ follows power circuit+12V end to join, the 5th pin REF of chip U4x and the first pin OUTA of chip U5x, crus secunda-INA of chip U5x joins, the 6th pin OUT and resistance R 5 one ends of chip U4x join, the other end of resistance R 5 and capacitor C 10, the 5th pin of chip U5x+INB joins, the other end of capacitor C 10 and signal ground AGND join, the crus secunda of the tripod of chip U5x+INA and sidespin potentiometer x0 joins, first pin and the resistance R 2 of sidespin potentiometer x0 are joined, tripod and the resistance R 3 of sidespin potentiometer x0 are joined, the other end of resistance R 2 and power circuit+5V end joins, the other end of resistance R 3 and power circuit-5V end joins, the 6th pin of chip U5x-INB and sidespin potentiometer x crus secunda join, first pin and the resistance R 6 of x are joined, tripod and the resistance R 7 of x are joined, the other end of resistance R 6 and signal ground AGND join, the 7th pin OUTB of the other end of resistance R 7 and chip U5x, power circuit interface OUT tripod OUTx joins.
5. three-axis force sensor according to claim 1, it is characterized in that: described first group of foil gauge is: the first foil gauge RA1, one end and the 4th foil gauge RD1 join, and and measure first on the corresponding signal amplification circuit of power on first pin+5V of interface INX join, the first foil gauge RA1 other end and the second foil gauge RB1 join, and and measure first on the corresponding signal amplification circuit of power on crus secunda-INX of interface INX join, the 3rd foil gauge RC1 two ends respectively with the 4th foil gauge RD1, the second foil gauge RB1 does not join with that end that the first foil gauge RA1 joins, join that end also with the 4th foil gauge RD1 and and measure first on the corresponding signal amplification circuit of power on third angle pin+INX of interface INX join, that end that joins with the second foil gauge RB1 also and and measure first on the corresponding signal amplification circuit of power on the 4th pin-5V of interface INX join.
6. three-axis force sensor according to claim 1 is characterized in that: the bridge circuit composing method of described second group of foil gauge, the 3rd group of foil gauge and mode of connection and first group of foil gauge identical.
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CN108972601B (en) * 2018-08-10 2024-03-26 佛山科学技术学院 End effector capable of sensing three-dimensional force
CN108801504A (en) * 2018-08-27 2018-11-13 太仓市悦博电动科技有限公司 A kind of device for pressure measurement and bicycle tread sensors
CN109813472B (en) * 2019-03-14 2023-11-24 衡通华创(北京)科技有限公司 Embedded load sensor

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