CN104948629A - Equal-stiffness vibration isolator based on air floatation and magnetic floatation combination three-directional decoupling - Google Patents
Equal-stiffness vibration isolator based on air floatation and magnetic floatation combination three-directional decoupling Download PDFInfo
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- CN104948629A CN104948629A CN201510224972.3A CN201510224972A CN104948629A CN 104948629 A CN104948629 A CN 104948629A CN 201510224972 A CN201510224972 A CN 201510224972A CN 104948629 A CN104948629 A CN 104948629A
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- magnetic
- damped system
- air supporting
- floatation
- equiped
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F7/00—Vibration-dampers; Shock-absorbers
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/0232—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means with at least one gas spring
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2222/00—Special physical effects, e.g. nature of damping effects
- F16F2222/06—Magnetic or electromagnetic
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2222/00—Special physical effects, e.g. nature of damping effects
- F16F2222/12—Fluid damping
- F16F2222/126—Fluid damping using gases
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2224/00—Materials; Material properties
- F16F2224/04—Fluids
- F16F2224/043—Fluids electrorheological
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2224/00—Materials; Material properties
- F16F2224/04—Fluids
- F16F2224/046—Fluids pneumatic
Abstract
The invention discloses an equal-stiffness vibration isolator based on air floatation and magnetic floatation combination three-directional decoupling, and mainly relates to the field of three-directional equal-stiffness vibration isolation of electronic equipment. The equal-stiffness vibration isolator comprises a mounting shell, a suspension block, a connecting rod, an electronic platform, an air floatation damping system and a magnetic floatation damping system, wherein the magnetic floatation damping system is assembled in at least one of an X direction, a Y direction and a Z direction; the air floatation damping system is assembled in at least one of the X direction, the Y direction and the Z direction; and the anti-bending stiffness of the air floatation damping system and the anti-bending stiffness of the magnetic floatation damping system are zero, namely, stiffness decoupling in the X direction, the Y direction and the Z direction is implemented. The equal-stiffness vibration isolator based on air floatation and magnetic floatation combination three-directional decoupling is reasonable in structure and has a three-directional stiffness decoupling effect.
Description
Technical field
The present invention relates generally to the rigidity vibration isolation fields such as the three-dimensional of electronic equipment, refers in particular to a kind of based on rigidity vibration isolators such as air supporting and the decoupling zeros of magnetic floating combination three-dimensional.
Background technique
For high, precision and frontier end electronic instrument, usually require to carry out the rigidity vibration isolation protections such as three-dimensional to it.Traditional device for vibration insutation mainly contains steel-wire isolator, rubber vibration isolator, metal spring vibration isolator, without humorous peak damping isolator etc., these vibration isolators have a common feature: Z-direction rigidity is far longer than X, Y-direction rigidity.Therefore, they are difficult to meet the vibration isolation requirement of electronic equipment in rigidity such as three directions.
In prior art, patent document (the patent No.: 201210449640.1) disclose the rigid metal vibration isolators such as a kind of three-dimensional, it achieves the rigidity vibration isolation such as X, Y, Z-direction by the six roots of sensation compression helical spring be arranged on six convex axles, solves the technical problem that in traditional vibration isolator, three-way rigidity difference is larger.But because compression helical spring has certain bending resistance, therefore there is the effect of intercoupling in the rigidity in three directions.Therefore, design a kind of in X, Y, Z tri-directional stiffness decoupling zeros and the vibration isolator of equal stiffness has certain use value.
Summary of the invention
Goal of the invention of the present invention: wait Rigidity for existing vibration isolator after three vibration isolation directions cannot realize decoupling zero, the object of this invention is to provide a kind of rational in infrastructure, have three-way rigidity decoupling zero based on rigidity vibration isolators such as air supporting and magnetic floating combination three-dimensional decoupling zeros.
In order to solve the problem, the solution that the present invention proposes is: a kind of based on rigidity vibration isolators such as air supporting and the decoupling zeros of magnetic floating combination three-dimensional, and it comprises mounting casing, suspension block, connecting rod, e-platform, air supporting damped system, magnetic float damped system; The lower end of described connecting rod is installed in described suspension block, and its upper end is equiped with described e-platform; Described air supporting damped system comprises annular gas bag and rarefied gas; Described magnetic floats damped system and comprises main coil, displacement transducer and secondary coil; In X, Y, Z tri-directions, have at least a direction to be equiped with magnetic and float damped system, have at least a direction to be equiped with air supporting damped system.
Of the present invention based on rigidity vibration isolators such as air supporting and the decoupling zeros of magnetic floating combination three-dimensional, float on certain direction of damped system at installing magnetic, the respective side of described suspension block is equiped with described secondary coil and institute's displacement sensors, the respective side of described mounting casing is equiped with described main coil; Electric current in the electric current of described main coil and described secondary coil produces repulsion damping in the same way, but the size of electric current can free adjustment; On certain direction of installing air supporting damped system, described suspension block is installed in described annular gas bag center, and described annular gas bag adopts the material of soft easily resiliently deformable to make, and its inside is full of rarefied gas; The counter-bending rigidity of described annular gas bag is zero, and the magnetic that compressional stiffness equals all the other both directions floats the rigidity of damped system.
Beneficial effect of the present invention: propose a kind of based on rigidity vibration isolators such as air supporting and the decoupling zeros of magnetic floating combination three-dimensional, this kind of vibration isolator adopts air supporting and magnetic to float the technology combined, achieve in X, Y, Z tri-directions rigidity decoupling zero and etc. rigidity vibration isolation requirement, the rigidity vibration isolation such as three-dimensional truly can be realized to high, precision and frontier end electronic equipment.Therefore, the one that the present invention proposes is compared existing vibration isolator based on rigidity vibration isolators such as air supporting and magnetic floating combination three-dimensional decoupling zeros and is had better three-dimensional vibration isolation effect.
Accompanying drawing explanation
The structural representation that Fig. 1 is XY two way air float of the present invention, Z-direction magnetic floats the rigidity vibration isolators such as combination three-dimensional decoupling zero.
Fig. 2 is the structural representation of suspension block of the present invention in XY two way air float damped system.
Fig. 3 is the structural representation of the rigidity vibration isolators such as the two-way magnetic of XY of the present invention floats, the decoupling zero of Z-direction air supporting combination three-dimensional.
Fig. 4 is suspension block of the present invention floats in damped system structural representation at the two-way magnetic of XY.
In figure, 1-mounting casing; 2-suspension block; 3-connecting rod; 4-e-platform; 51-annular gas bag; 52-rarefied gas; 61-main coil; 62-displacement transducer; 63-secondary coil.
Embodiment
Below with reference to the drawings and specific embodiments, the present invention is described in further detail.
Composition graphs 1 and Fig. 2, of the present invention based on rigidity vibration isolators such as air supporting and magnetic floating combination three-dimensional decoupling zeros, comprise mounting casing 1, suspension block 2, connecting rod 3, e-platform 4, air supporting damped system, magnetic floats damped system; The lower end of connecting rod 3 is installed in suspension block 2, and its upper end is equiped with e-platform 4; Air supporting damped system comprises annular gas bag 51 and rarefied gas 52; Magnetic floats damped system and comprises main coil 61, displacement transducer 62 and secondary coil 63.
Shown in Fig. 1 and Fig. 2, as embodiment one, of the present invention based on rigidity vibration isolators such as air supporting and the decoupling zeros of magnetic floating combination three-dimensional, be equiped with magnetic in Z-direction and float damped system, be equiped with air supporting damped system in X, Y both direction; Main coil 61 is installed on the internal surface bottom mounting casing 1, and displacement transducer 62 and secondary coil 63 are installed in the lower surface of suspension block 2, and in main coil 61, secondary coil 63, current direction is identical, produces repulsion damping; Annular gas bag 51 adopts the material of soft easily resiliently deformable to make, and its inside is full of rarefied gas 52; Suspension block 2 is installed in the center of annular gas bag 51, and suspension block 2 is when X, Y-direction are subjected to displacement, and rarefied gas 52 pressurized of annular gas bag 51 inside produces buoyancy damping; Suspension block 2 is full decoupled in the rigidity in X, Y, Z tri-directions, completely equal three directional stiffness sizes.
Shown in Fig. 3 and Fig. 4, as embodiment two, of the present invention based on rigidity vibration isolators such as air supporting and the decoupling zeros of magnetic floating combination three-dimensional, be equiped with air supporting damped system in Z-direction, being equiped with magnetic in X, Y both direction floats damped system; Between the bottom of suspension block 2 and mounting casing 1 bottom interior surface, be equiped with the annular gas bag 51 being full of rarefied gas 52, between the top of suspension block 2 and the bottom of e-platform 4, be equiped with the annular gas bag 51 that another is full of rarefied gas 52; The side, four, all around of suspension block 2 is respectively equiped with one group of displacement transducer 62 and secondary coil 63, and four, all around interior surface of mounting casing 1 is respectively equiped with one group of main coil 61; The counter-bending rigidity that air supporting damped system and magnetic float damped system is zero, i.e. the rigidity decoupling zero in X, Y, Z tri-directions; Air supporting damped system and magnetic float the incompressible equal stiffness of damped system, and namely X, Y, Z tri-directions have equal rigidity.
The foregoing is only two better embodiment of the present invention, it should be pointed out that for the person of ordinary skill of the art, any improvements and modifications made under the premise without departing from the principles of the invention, all should be considered as protection scope of the present invention.
Claims (1)
1. based on rigidity vibration isolators such as air supporting and magnetic floating combination three-dimensional decoupling zeros, it is characterized in that: comprise mounting casing (1), suspension block (2), connecting rod (3), e-platform (4), air supporting damped system, magnetic floats damped system; The lower end of described connecting rod (3) is installed on described suspension block (2), and its upper end is equiped with described e-platform (4); Described air supporting damped system comprises annular gas bag (51) and rarefied gas (52); Described magnetic floats damped system and comprises main coil (61), displacement transducer (62) and secondary coil (63); In X, Y, Z tri-directions, have at least a direction to be equiped with magnetic and float damped system, have at least a direction to be equiped with air supporting damped system; Float on certain direction of damped system at installing magnetic, the respective side of described suspension block (2) is equiped with described secondary coil (63) and institute's displacement sensors (62), the inside respective side of described mounting casing (1) is equiped with described main coil (61); Electric current in the electric current of described main coil (61) and described secondary coil (63) produces repulsion damping in the same way, but the size of electric current can free adjustment; On certain direction of installing air supporting damped system, described suspension block (2) is installed in described annular gas bag (51) center, described annular gas bag (51) adopts the material of soft easily resiliently deformable to make, and its inside is full of rarefied gas (52); The counter-bending rigidity that described air supporting damped system and described magnetic float damped system is zero, i.e. the rigidity decoupling zero in X, Y, Z tri-directions.
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CN201510224972.3A CN104948629A (en) | 2015-05-05 | 2015-05-05 | Equal-stiffness vibration isolator based on air floatation and magnetic floatation combination three-directional decoupling |
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CN201510224972.3A CN104948629A (en) | 2015-05-05 | 2015-05-05 | Equal-stiffness vibration isolator based on air floatation and magnetic floatation combination three-directional decoupling |
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CN201510224972.3A Pending CN104948629A (en) | 2015-05-05 | 2015-05-05 | Equal-stiffness vibration isolator based on air floatation and magnetic floatation combination three-directional decoupling |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106840570A (en) * | 2017-04-14 | 2017-06-13 | 西南交通大学 | For the stiffness variable mutative damp device of vibration test |
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RU2002139C1 (en) * | 1990-10-11 | 1993-10-30 | Научно-производственное объединение им.С.А.Лавочкина | Shock absorber |
CN1664402A (en) * | 2005-04-01 | 2005-09-07 | 中国科学技术大学 | Vibration damper with controllable stiffness and damping |
CN101067432A (en) * | 2006-09-26 | 2007-11-07 | 哈尔滨工业大学 | Air spring vibro-damping mount with magnetic suspension unit |
RU2354867C1 (en) * | 2007-12-03 | 2009-05-10 | Государственное образовательное учреждение высшего профессионального образования "Ярославский государственный технический университет" | Dynamic dampener |
CN102109766A (en) * | 2009-12-25 | 2011-06-29 | 上海微电子装备有限公司 | Decoupling mechanism and exposure machine using same |
CN103510637A (en) * | 2013-10-24 | 2014-01-15 | 上海电力学院 | Three-way low-frequency variable-rigidity variable-damping tuned mass damper |
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2015
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Patent Citations (6)
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RU2002139C1 (en) * | 1990-10-11 | 1993-10-30 | Научно-производственное объединение им.С.А.Лавочкина | Shock absorber |
CN1664402A (en) * | 2005-04-01 | 2005-09-07 | 中国科学技术大学 | Vibration damper with controllable stiffness and damping |
CN101067432A (en) * | 2006-09-26 | 2007-11-07 | 哈尔滨工业大学 | Air spring vibro-damping mount with magnetic suspension unit |
RU2354867C1 (en) * | 2007-12-03 | 2009-05-10 | Государственное образовательное учреждение высшего профессионального образования "Ярославский государственный технический университет" | Dynamic dampener |
CN102109766A (en) * | 2009-12-25 | 2011-06-29 | 上海微电子装备有限公司 | Decoupling mechanism and exposure machine using same |
CN103510637A (en) * | 2013-10-24 | 2014-01-15 | 上海电力学院 | Three-way low-frequency variable-rigidity variable-damping tuned mass damper |
Non-Patent Citations (1)
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106840570A (en) * | 2017-04-14 | 2017-06-13 | 西南交通大学 | For the stiffness variable mutative damp device of vibration test |
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Application publication date: 20150930 |
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