CN110733141A - miniature ultra-precise single-point diamond fly-cutting machine tool - Google Patents
miniature ultra-precise single-point diamond fly-cutting machine tool Download PDFInfo
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- CN110733141A CN110733141A CN201911106074.2A CN201911106074A CN110733141A CN 110733141 A CN110733141 A CN 110733141A CN 201911106074 A CN201911106074 A CN 201911106074A CN 110733141 A CN110733141 A CN 110733141A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0064—Devices for the automatic drive or the program control of the machines
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
Abstract
The invention discloses an miniature ultra-precise single-point diamond fly-cutting machine tool, which comprises a machine tool vibration isolation system, a machine tool body arranged on the machine tool vibration isolation system, an X-axis feeding system, an in-situ measuring system, a spindle system, a workpiece clamping system and a Z-axis feeding system, wherein the X-axis feeding system and the Z-axis feeding system are arranged on the machine tool body and are arranged in a T shape, the center line of the X-axis feeding system is 30mm away from the center line of the Z-axis feeding system, the size of the whole machine is 500mm 620mm 500mm, the position of the spindle system is adjusted by a spindle positioning block and a spindle mounting block and is arranged on a carrying table of the X-axis feeding system, and a laser displacement sensor is arranged on a spindle box, so that the real-time machining amount of the fly-cutting machine tool can be measured.
Description
Technical Field
The invention relates to the technical field of ultra-precise cutting processing, in particular to an miniature ultra-precise single-point diamond fly-cutting machine tool.
Background
The ultra-precision cutting machining technology is an advanced manufacturing technology developed from the last century, and the machining precision of parts depends on the precision of an ultra-precision machine tool. The ultra-precision machining technology comprehensively utilizes advanced technological achievements in the fields of measurement, servo control, optics, environmental control, sensing, hydraulic pressure and the like.
Potassium dihydrogen phosphate crystal (KH2PO4), abbreviated as KDP crystal, is typical piezoelectric crystals, and is applied to high-end front-edge equipment and instruments such as key optical elements in optical path systems such as sonar systems, laser inertial confinement nuclear fusion devices, large solid lasers and the like by , and has an important strategic position, meanwhile, the KDP crystal is also an important piezoelectric transducer material in the civil field, and the market is wide.
At present, the ultraprecise single-point diamond fly-cutting machine tool has the problems of large size, high cost, large occupied area, serious power consumption, severe requirements on use environment, difficulty in maintenance and the like, meanwhile, due to the defect of an on-site measurement system, a workpiece is taken down to measure a machining error every times of machining, the machining time of the workpiece is seriously increased, and the clamping error of the workpiece is also introduced.
Disclosure of Invention
The invention aims to provide miniature ultra-precise single-point diamond fly-cutting machine tools, which solve the problems of clamping errors and long time consumption caused by the prior art and have the advantages of simple and compact structure and small size.
The invention is realized by the following technical scheme:
miniature ultra-precise single-point diamond fly-cutting machine tools, which comprise a vibration isolation system, a tool body, an X-axis feeding system, an in-situ measurement system, a main shaft system, a workpiece clamping system and a Z-axis feeding system;
the X-axis feeding system and the Z-axis feeding system are respectively used for realizing displacement adjustment in the X-axis direction and the Z-axis direction, and the X-axis feeding system and the Z-axis feeding system are both used for carrying out displacement adjustment through a linear motor and a grating ruler;
the main shaft system comprises a main shaft box, the main shaft box is arranged on an X-axis object carrying table of an X-axis feeding system, an air floatation main shaft is arranged on the main shaft box, a flying cutter disc is arranged at the end of the air floatation main shaft, and the flying cutter disc is used for fixing a single-point diamond flying cutter;
the on-site measurement system comprises a laser displacement sensor, and the laser displacement sensor is arranged on the spindle box;
the workpiece clamping system is arranged on a Z-axis object carrying table of the Z-axis feeding system and used for mounting workpieces.
The laser displacement sensor of the invention belongs to the prior art.
The working principle of the invention is as follows:
the air-floating main shaft adopts a multi-air-floating support, the permanent magnet synchronous motor drives the fly cutter disc to rotate, the X-axis feeding system and the Z-axis feeding system both adopt a composite throttling magnetic preloading support mode, and a linear motor and a grating ruler form closed-loop drive to complete X-direction linear motion; the workpiece frame is located on the Z-axis object carrying platform to complete Z-direction linear motion; the cutting feeding is completed through the linkage and the matching of the X-axis object carrying table and the Z-axis object carrying table.
Compared with the traditional ultraprecise single-point diamond fly-cutting machine tool, the desktop type miniaturized fly-cutting machine tool is easier to maintain and maintain by virtue of the advantages of small occupied area, low manufacturing difficulty, low power consumption and the like. In addition, the miniaturization of the ultra-precision cutting machine tool can ensure the manufacturing precision and the assembly precision of key parts more easily, greatly improve the self-excitation frequency of the machine tool and reduce the influence of the temperature change of a foundation and an external processing environment on the processing precision of the machine tool. Meanwhile, due to the introduction of an in-situ measurement system, the machining efficiency of the precision component is effectively improved, and the workpiece clamping error is reduced. In the invention, the interference source existing in the traditional machine tool is effectively avoided through innovative designs such as an innovative driving mode, an additional vibration isolation system design and the like, the dependence on the foundation is reduced, and the processing precision is greatly improved.
The invention not only ensures that the workpiece is accurately clamped and positioned and the feeding process is stable, but also can detect the implementation condition of the fly-cutting process in real time through the laser displacement sensor, the laser displacement sensor transmits the data detected in real time to the upper computer through an external control system of the laser displacement sensor, the upper computer compares the detected data with the standard size of the workpiece, and the speed of the linear motor is controlled by the compared difference value to correct the machining size in time when the next feeding is carried out, thereby avoiding the problems of clamping error and long time consumption caused by the measurement error of the taken workpiece, and further improving the machining precision.
, the X-axis feeding system comprises an X-axis linear motor, an X-axis grating ruler, an X-axis air-floating guide rail, an X-axis object carrying table, an X-axis baffle and an X organ cover;
the X-axis linear motor is installed on an X-axis air-floating guide rail, the X-axis object carrying table is installed on the X-axis linear motor, the X-axis grating ruler is installed on the X-axis object carrying table, an X organ cover is arranged above the X-axis air-floating guide rail, and an X-axis baffle is arranged on the part of the X organ cover in a matched mode.
, the Z-axis feeding system comprises a Z-axis baffle, a Z organ cover, a Z-axis object carrying table, a Z-axis grating ruler, a Z-axis linear motor and a Z-axis air-floating guide rail;
the Z-axis linear motor is installed on a Z-axis air-floating guide rail, the Z-axis object carrying platform is installed on the Z-axis linear motor, the Z-axis grating ruler is installed on the Z-axis object carrying platform, a Z organ cover is arranged above the Z-axis air-floating guide rail, and a Z-axis baffle is arranged at the end of the Z organ cover in a matched mode.
, the vibration isolation system comprises a supporting steel frame, a film type gas spring, an automatic leveling valve, a foot margin and a moving wheel;
the thin film type gas spring and the automatic leveling valve are both arranged at the top of the supporting steel frame and used for supporting the lathe bed, and the ground feet and the moving wheels are arranged at the bottom of the supporting steel frame.
The ground feet can be firstly roughly leveled after the machine tool is installed and debugged, and the design of the movable wheels is beneficial to the transfer and transportation of the machine tool.
The film type gas spring can isolate external vibration interference through the inflation and deflation of a gas chamber of the gas spring; the automatic leveling valve controls the height of the spring body by varying the pressure in the vibration isolation system arrangement; even if the center of gravity changes, the machine can be kept in a horizontal state by rapid inflation and deflation; the gas spring and the leveling valve are both connected to the vibration isolation system controller to form a control loop.
The lathe bed is formed by processing marble, a wiring pipe is arranged in the lathe bed and led out from the lower part of the lathe bed, and the interference of a control line and the disordered air pipe to the movement precision of the lathe bed is avoided.
, the main shaft system comprises a main shaft box which is arranged on the X-axis object carrying table through a main shaft positioning block and a main shaft positioning adjusting block.
, the center of the flying cutter head is mounted on the air-floating main shaft through a bearing, the side wall of the flying cutter head is provided with a cutter positioning block, the cutter positioning block is provided with a cutter fixing frame, and the cutter positioning block and the cutter fixing frame are respectively provided with a coarse adjusting nut and a fine adjusting nut.
The single-point diamond fly-cutting cutter is fixed on the fly-cutting cutter disc through a cutter positioning block and a cutter fixing frame and rotates along with the fly-cutting cutter disc so as to cut a workpiece; the fine adjustment nut and the coarse adjustment nut are used for finishing the pose adjustment of the single-point diamond fly-cutting tool.
, the workpiece clamping system comprises a workpiece rack and a 3R clamp, the workpiece rack is mounted on a Z-axis loading table of the Z-axis feeding system, the 3R clamp is mounted on the workpiece rack and used for mounting a workpiece, the 3R clamp and the fly-cutting knife disc are arranged oppositely, and the position height of the central axis of the 3R clamp and the position height of the laser displacement sensor are in the same horizontal plane.
The 3R clamp is in the prior art, and can realize high-precision clamping of workpieces.
, the in-place measuring system comprises a laser displacement sensor and a sensor fixing frame, wherein the sensor fixing frame is fixed on the inner wall of the main spindle box, the laser displacement sensor is arranged on the sensor fixing frame, and the main spindle box is provided with an opening for passing through the measuring laser light.
, the X-axis feeding system and the Z-axis feeding system are arranged in a T shape on the lathe bed, the center line of the X-axis feeding system is 30mm away from the center line of the Z-axis feeding system, and the overall size of the machine tool is 500mm 620mm 500 mm.
In the invention, in order to reduce the interference of the control lines of the linear motor and the grating ruler on the moving object carrying platform, the linear motor adopts a moving iron driving mode, namely, a rotor of the linear motor is fixed on the machine body, a stator of the linear motor is arranged on each axle object carrying platform, the mounting mode is a centroid driving mode, namely, the center line of the motor is superposed with the center line of the object carrying platform to avoid pitching generated in the moving process of the machine tool. Besides, the grating ruler adopts a fixed reading head and follows the installation mode of the ruler body, so that the interference of the control line on the platform is avoided.
, the linear motor is driven by moving iron.
Compared with the prior art, the invention has the following advantages and beneficial effects:
1. the invention not only ensures that the workpiece is accurately clamped and positioned and the feeding process is stable, but also can detect the implementation condition of the fly-cutting process in real time through the laser displacement sensor and make timely correction, thereby avoiding the problems of clamping error and long time consumption caused by the measurement error of the taken workpiece, thereby improving the processing precision
2. The invention mainly aims at the defects of the traditional ultra-precise single-point diamond fly-cutting, innovating a design scheme and reducing the dimension of the whole machine tool; compared with the conventional air floatation support or hydraulic support, the design of the composite throttling magnetic preloading air floatation support greatly reduces the redundancy of a machine tool feeding system, and can still obtain higher rigidity and stability on the premise of ensuring smaller machine tool size; and after the size of the miniaturized machine tool is reduced, the self-excitation frequency is greatly improved, and the influence of the temperature change of the foundation and the external processing environment on the processing precision of the machine tool is reduced. Meanwhile, due to the introduction of an in-situ measurement system, the machining efficiency of the precision component is effectively improved, and the workpiece clamping error is avoided; in the invention, by innovating a driving mode and adding a vibration isolation system design, an interference source existing in a traditional machine tool is effectively avoided, and the processing precision is greatly improved.
Drawings
The accompanying drawings, which are included to provide a further understanding of embodiments of the invention, constitute a part of this application and do not constitute a limitation on embodiments of the invention, and wherein:
FIG. 1 is a schematic structural diagram of the present invention
FIG. 2 is a schematic size diagram of the present invention
FIG. 3 is a schematic view of the vibration isolation system of FIG. 1
FIG. 4 is an in-situ measurement schematic diagram of the laser displacement sensor in FIG. 1
FIG. 5 is a schematic view showing a view of the fly cutter of FIG. 1
FIG. 6 is a schematic view of the air bearing guide of FIG. 1.
Reference numbers and corresponding part names in the drawings:
1-vibration isolation system; 1-1-supporting a steel frame; 1-2-a diaphragm gas spring; 1-3-automatic leveling valve; 1-4-ground margin; 1-5-moving wheels; 2-bed body; 3-X axis feed system; 3-1-X axis baffles; 3-2-X organ cover; 3-3-X axis object carrying table; 4-in-place measurement system; 4-1-laser displacement sensor; 4-2-sensor mount; 4-3-measuring laser light; 5-a spindle system; 5-1-main shaft positioning block; 5-2-main shaft positioning adjusting block; 5-3-a main spindle box; 5-4-air flotation main shaft; 5-5-fly cutter head; 5-6-cutter positioning blocks; 5-7-a cutter fixing frame; 5-8-single point diamond fly-cutting tool; 5-9-fine adjustment nut; 5-10-coarse adjusting the nut; 6-a workpiece; 7-a workpiece clamping system; 7-1-3R clamp; 7-2-a workpiece holder; an 8-Z axis feed system; 8-1-Z axis baffles; 8-2-Z organ cover; an 8-3-Z axis object carrying table; 8-6-Z axis air-float guide rail; 8-7-grating ruler reading head; 8-8-grating ruler data lines; 8-9-grating ruler body; 8-10-linear motor stator; 8-11-linear motor mover; 8-12-linear motor control line; 8-13-preloaded magnets; 8-14-cover plate; 8-15-aerostatic aerosol; an 8-16-Z axis carrier plate; 8-17-orifice throttling vent.
Detailed Description
To make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in with reference to the following examples and accompanying drawings, wherein the exemplary embodiments and descriptions of the present invention are provided for illustration only and not for limitation of the present invention.
Example 1:
as shown in fig. 1-6, kinds of miniature ultra-precise single-point diamond fly-cutting machine tools comprise a vibration isolation system 1, a machine body 2, an X-axis feeding system 3, an in-situ measurement system 4, a spindle system 5, a workpiece clamping system 7 and a Z-axis feeding system 8;
the lathe bed 2 is arranged on the vibration isolation system 1, the X-axis feeding system 3 and the Z-axis feeding system 8 are connected and arranged on the lathe bed 2 through bolts, the lathe bed 2 is made of marble, and the X-axis feeding system 3 and the Z-axis feeding system 8 are respectively used for realizing displacement adjustment in the X-axis direction and the Z-axis direction;
specifically, the X-axis feeding system 3 comprises an X-axis linear motor, an X-axis grating ruler, an X-axis air-floating guide rail and an X-axis object carrying table 3-3, wherein the X-axis linear motor is installed on the X-axis air-floating guide rail, the X-axis object carrying table 3-3 is installed on the X-axis linear motor, and the X-axis grating ruler is installed on the X-axis object carrying table 3-3;
specifically, the Z-axis feeding system 8 comprises a Z-axis objective table 8-3, a Z-axis linear motor and a Z-axis grating ruler Z-axis air-floating guide rail, wherein the Z-axis linear motor is installed on the Z-axis air-floating guide rail, the Z-axis objective table 8-3 is installed on the Z-axis linear motor, and the Z-axis grating ruler is installed on the Z-axis objective table 8-3;
the spindle system 5 comprises a spindle box 5-3, the spindle box 5-3 is installed on an X-axis objective table 3-3 of an X-axis feeding system 3, an air-floating spindle 5-4 is arranged on the spindle box 5-3 and is a multi-air-floating electric spindle, a flying cutting cutter disc 5-5 is arranged at the end of the air-floating spindle 5-4, and the flying cutting cutter disc 5-5 is used for fixing a single-point diamond flying cutting tool 5-8;
specifically, the center of the fly-cutting cutter disc 5-5 is mounted on an air-floating main shaft 5-4 through a bearing, a cutter positioning block 5-6 is mounted on the side wall of the fly-cutting cutter disc 5-5, a cutter fixing frame 5-7 is mounted on the cutter positioning block 5-6, a coarse adjusting nut 5-10 and a fine adjusting nut 5-9 are respectively arranged on the cutter positioning block 5-6 and the cutter fixing frame 5-7, and the single-point diamond fly-cutting cutter 5-8 is mounted on the cutter fixing frame 5-7;
the in-situ measurement system 4 comprises a laser displacement sensor 4-1, the laser displacement sensor 4-1 is arranged on a main spindle box 5-3, and the laser displacement sensor 4-1 realizes the measurement of the real-time processing amount of the fly cutting machine;
the workpiece clamping system 7 is mounted on a Z-axis objective table 8-3 of the Z-axis feeding system 8, the workpiece clamping system 7 comprises a workpiece holder 7-2 and a 3R clamp 7-1, the workpiece holder 7-2 is mounted on the Z-axis objective table 8-3 of the Z-axis feeding system 8, the 3R clamp 7-1 is mounted on the workpiece holder 7-2, the 3R clamp 7-1 is used for mounting a workpiece 6, the 3R clamp 7-1 is arranged opposite to a fly-cutting cutter disc 5-5, the position height of the central axis of the 3R clamp 7-1 and the position height of a laser displacement sensor 4-1 are in the same horizontal plane, the accuracy and timeliness of real-time detection can be further guaranteed by , form and position errors caused by detection positions are avoided, and the workpiece holder 7-2 is marble;
the X-axis feeding system 3 and the Z-axis feeding system 8 are arranged on the lathe bed 2 in a T shape, the distance between the center line of the X-axis feeding system 3 and the center line of the Z-axis feeding system 8 is 30mm, and the overall size of the machine tool is 500mm + 620mm + 500 mm.
In this embodiment:
an X-axis linear motor adopts a moving iron driving mode, a linear motor rotor is fixed, a linear motor stator drives an X-axis object carrying platform 3-3 to move, so that the interference of a control line of the X-axis linear motor is eliminated, a grating of an X-axis grating ruler is installed on the X-axis object carrying platform 3-3 and moves along with the grating, and a reading head of the X-axis grating ruler is installed on an X-axis air floatation guide rail so as to eliminate the interference of a data line.
A Z-axis linear motor adopts a moving iron driving mode, a linear motor rotor is fixed, a linear motor stator drives a Z-axis object carrying platform 8-3 to move, so that interference of a Z-axis linear motor control line is eliminated, a grating of a Z-axis grating ruler is installed on the Z-axis object carrying platform 8-3 and moves along with the grating, and a reading head of the Z-axis grating ruler is installed on a Z-axis air floatation guide rail so that interference of a data line is eliminated.
The use method of the in-place measuring system 4 comprises two steps, namely before machining, the laser displacement sensor 4-1 moves to a certain position, a certain point on the workpiece 6 is measured to obtain data, the data are stored and recorded, after machining, the machine tool distance measuring sensor moves to the same position to measure the data of the same point and record, and the difference value of the two data is the back-cut amount.
The air floatation guide rails selected by the X-axis feeding system 3 and the Z-axis feeding system 8 are both composite throttling magnetic preloading air floatation guide rails, namely, the air floatation guide rails adopt small-hole throttling type magnetic preloading air floatation support in the vertical direction and adopt multi-air-mass air floatation support in the horizontal direction; the straightness of the composite throttling magnetic preloading air floatation guide rail is 0.2-0.3 um.
The workpiece 6 is made of nonferrous metals such as copper and nickel and KDP crystal.
The working principle of the embodiment is as follows:
the air-flotation main shaft 5-4 adopts a multi-air-mass air-flotation support and is driven by a permanent magnet synchronous motor to drive the fly-cutting cutter head 5-5 to rotate, the X-axis feeding system 3 and the Z-axis feeding system 8 both adopt a composite throttling magnetic preloading support mode, and a linear motor and a grating ruler form closed-loop drive to complete X-direction linear motion; the workpiece frame 7-2 is located on the Z-axis object carrying platform 8-3 to complete Z-direction linear motion; the cutting feed is completed through the linkage and the matching of the X-axis object carrying table 3-3 and the Z-axis object carrying table 8-3.
This embodiment is through reducing the lathe size dimension, the effectual not enough of having overcome traditional fly to cut the lathe of innovation lathe design, has greatly avoided the introduction of error source, has improved the machining precision of lathe, has easy operation, characteristics that intelligent degree is high.
At the same time.
The linear motor can accurately control the contact point between the fly cutter and the workpiece, the machining precision can be effectively improved in the step , the feed amount of the fly cutter can be more accurately controlled by adopting the positioning of the grating ruler, the machining precision is ensured in the step , friction-free and vibration-free smooth movement can be realized by arranging the air floatation guide rail, higher guiding precision is obtained, and the machining precision of the workpiece can be indirectly improved.
Example 2:
as shown in fig. 1 to 6, the present embodiment is based on embodiment 1, and the X-axis feeding system 3 further includes an X-axis baffle 3-1 and an X-organ cover 3-2; an X-axis organ cover 3-2 is arranged above the X-axis air floatation guide rail, and an X-axis baffle 3-1 is arranged at the end part of the X-axis organ cover 3-2; the Z-axis feeding system 8 further comprises a Z-axis baffle 8-1 and a Z-shaped organ cover 8-2; a Z-shaped organ cover 8-2 is arranged above the Z-axis air floatation guide rail, and a Z-axis baffle 8-1 is arranged at the end part of the Z-shaped organ cover 8-2 in a matching manner.
In this embodiment:
the X-axis feeding system 3 and the Z-axis feeding system 8 avoid impurity pollution by installing an organ cover and a baffle, the organ cover is made of high-flexibility materials, the baffle made of super-lubricating materials is arranged outside the organ cover, interference of the organ cover on the motion state of a machine tool is effectively avoided, and steps are carried out to reduce interference of control lines of a linear motor and a grating ruler on a moving object carrying platform.
Example 3:
as shown in fig. 1 to 6, in the present embodiment, based on embodiment 1, the vibration isolation system 1 includes a supporting steel frame 1-1, a diaphragm type gas spring 1-2, an automatic leveling valve 1-3, a ground foot 1-4, and a moving wheel 1-4;
the thin film type gas spring 1-2 and the automatic leveling valve 1-3 are both arranged at the top of the supporting steel frame 1-1 and used for supporting the lathe bed 2, and the ground feet 1-4 and the moving wheels 1-4 are arranged at the bottom of the supporting steel frame 1-1;
the spindle system 5 comprises a spindle box 5-3, and the spindle box 5-3 is installed on an X-axis object carrying table 3-3 through a spindle positioning block 5-1 of a spindle positioning block and a spindle positioning adjusting block 5-2;
the on-site measurement system 4 comprises a laser displacement sensor 4-1 and a sensor fixing frame 4-2, the sensor fixing frame 4-2 is fixed on the inner wall of a spindle box 5-3, the laser displacement sensor 4-1 is installed on the sensor fixing frame 4-2, an opening for allowing a measurement laser ray 4-3 to pass through is formed in the spindle box 5-3, and a movable baffle is arranged at the opening in a matched mode.
In this embodiment:
the support steel frame 1-1, the film type air spring 1-2 and the automatic leveling valve 1-3 of the vibration isolation system 1 are bodies connected to a controller to form a control loop, the load capacity of the vibration isolation system 1 is 4000-6000kg, the natural frequency in the vertical direction is 2.5-2.8HZ, the natural frequency in the horizontal direction is 2.5-2.8HZ, the horizontal recovery precision is +/-0.01 mm/m, the response time is less than 1S, the vibration isolation effect of 5HZ can reach more than 85 percent, and the vibration isolation effect of 10HZ can reach more than 95 percent.
The main spindle box 5-3 has the function of preventing cutting liquid from splashing on the laser displacement sensor 4-1 during cutting to influence the detection precision, when times of cutting are finished, the movable baffle is opened, the condition of a workpiece for times can be measured by the laser displacement sensor 4-1, and error compensation is performed during the next flying cutting according to the cutting condition.
In FIG. 6, 8-6 are Z-axis air-floating guide rails; 8-7 is a grating ruler reading head; 8-8 are grating ruler data lines; 8-9 is a grating ruler body; 8-10 is a linear motor stator; 8-11 are linear motor rotors; 8-12 are linear motor control lines; 8-13 are preloaded magnets; 8-14 is a cover plate; 8-15 is a multi-air-floated block; 8-16 is a Z-axis carrier plate; 8-17 are small hole throttling air holes.
The above-mentioned embodiments, objects, technical solutions and advantages of the present invention have been described in , it should be understood that the above-mentioned embodiments are only illustrative and not intended to limit the scope of the present invention, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (10)
- The miniature ultra-precise single-point diamond fly-cutting machine tool is characterized by comprising a vibration isolation system (1), a tool body (2), an X-axis feeding system (3), an in-situ measurement system (4), a main shaft system (5), a workpiece clamping system (7) and a Z-axis feeding system (8);the lathe bed (2) is installed on the vibration isolation system (1), the X-axis feeding system (3) and the Z-axis feeding system (8) are installed on the lathe bed (2), the X-axis feeding system (3) and the Z-axis feeding system (8) are respectively used for achieving displacement adjustment in the X-axis direction and the Z-axis direction, and the X-axis feeding system (3) and the Z-axis feeding system (8) perform displacement adjustment through a linear motor and a grating ruler;the spindle system (5) comprises a spindle box (5-3), the spindle box (5-3) is installed on an X-axis object carrying table (3-3) of the X-axis feeding system (3), an air floatation spindle (5-4) is arranged on the spindle box (5-3), a flying cutting cutter disc (5-5) is arranged at the end of the air floatation spindle (5-4), and the flying cutting cutter disc (5-5) is used for fixing a single-point diamond flying cutting tool (5-8);the in-situ measurement system (4) comprises a laser displacement sensor (4-1), and the laser displacement sensor (4-1) is arranged on a spindle box (5-3);the workpiece clamping system (7) is arranged on a Z-axis object carrying table (8-3) of the Z-axis feeding system (8), and the workpiece clamping system (7) is used for mounting a workpiece (6).
- 2. The miniature ultra-precise single-point diamond fly-cutting machine tool according to claim 1, wherein the X-axis feeding system (3) comprises an X-axis linear motor, an X-axis grating ruler, an X-axis air-bearing guide rail, an X-axis object carrying table (3-3), an X-axis baffle (3-1) and an X-axis organ cover (3-2);the X-axis linear motor is installed on an X-axis air-floating guide rail, the X-axis object carrying table (3-3) is installed on the X-axis linear motor, the X-axis grating ruler is installed on the X-axis object carrying table (3-3), an X organ cover (3-2) is arranged above the X-axis air-floating guide rail, and an X-axis baffle (3-1) is arranged at the part of the X organ cover (3-2) in a matched mode.
- 3. The miniature ultra-precise single-point diamond fly-cutting machine tool according to claim 1, wherein the Z-axis feeding system (8) comprises a Z-axis baffle (8-1), a Z-organ cover (8-2), a Z-axis object carrying table (8-3), a Z-axis grating ruler, a Z-axis linear motor and a Z-axis air-floating guide rail;the Z-axis linear motor is installed on a Z-axis air-floating guide rail, the Z-axis object carrying table (8-3) is installed on the Z-axis linear motor, the Z-axis grating ruler is installed on the Z-axis object carrying table (8-3), a Z organ cover (8-2) is arranged above the Z-axis air-floating guide rail, and a Z-axis baffle (8-1) is arranged at the end part of the Z organ cover (8-2) in a matched mode.
- 4. The kinds of miniature ultra-precise single-point diamond fly-cutting machine tool of claim 1, wherein the vibration isolation system (1) comprises a supporting steel frame (1-1), a thin film type gas spring (1-2), an automatic leveling valve (1-3), a ground foot (1-4) and a moving wheel (1-4);the thin film type gas spring (1-2) and the automatic leveling valve (1-3) are both arranged at the top of the supporting steel frame (1-1) and used for supporting the lathe bed (2), and the ground feet (1-4) and the moving wheels (1-4) are arranged at the bottom of the supporting steel frame (1-1).
- 5. The kinds of miniature ultra-precise single-point diamond fly-cutting machine tool according to claim 1, wherein the spindle system (5) comprises a spindle box (5-3), and the spindle box (5-3) is mounted on an X-axis carrier table (3-3) through a spindle positioning block (5-1) and a spindle positioning adjusting block (5-2).
- 6. The kinds of miniature ultra-precise single-point diamond fly-cutting machine tool of claim 1, wherein the center of the fly-cutting cutter disc (5-5) is mounted on an air-floating spindle (5-4) through a bearing, a cutter positioning block (5-6) is mounted on the side wall of the fly-cutting cutter disc (5-5), a cutter fixing frame (5-7) is mounted on the cutter positioning block (5-6), and a rough adjusting nut (5-10) and a fine adjusting nut (5-9) are respectively arranged on the cutter positioning block (5-6) and the cutter fixing frame (5-7).
- 7. The kinds of miniature ultra-precise single-point diamond fly-cutting machine tool of claim 1, wherein the workpiece clamping system (7) comprises a workpiece holder (7-2) and a 3R clamp (7-1), the workpiece holder (7-2) is installed on a Z-axis object carrying table (8-3) of a Z-axis feeding system (8), the 3R clamp (7-1) is installed on the workpiece holder (7-2), the 3R clamp (7-1) is used for installing a workpiece (6), the 3R clamp (7-1) is arranged opposite to the fly-cutting cutter head (5-5), and the position height of the central axis of the 3R clamp (7-1) and the position height of the laser displacement sensor (4-1) are in the same horizontal plane.
- 8. The kinds of miniature ultra-precise single-point diamond fly-cutting machine tool according to claim 1, wherein the in-situ measurement system (4) comprises a laser displacement sensor (4-1) and a sensor fixing frame (4-2), the sensor fixing frame (4-2) is fixed on the inner wall of a main spindle box (5-3), the laser displacement sensor (4-1) is installed on the sensor fixing frame (4-2), and an opening for passing through the measurement laser ray (4-3) is arranged on the main spindle box (5-3).
- 9. The micro ultra-precise single-point diamond fly-cutting machine tool according to any of claims 1-8, wherein the X-axis feeding system (3) and the Z-axis feeding system (8) are arranged in a T shape on the machine bed (2), the center line of the X-axis feeding system (3) is spaced from the center line of the Z-axis feeding system (8) by 30mm, and the overall size of the machine tool is 500mm 620mm 500 mm.
- 10. The miniature ultra-precise single-point diamond fly-cutting machine tool of any one of claims 1-8- , wherein the linear motor is driven by a moving iron.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115431047A (en) * | 2022-10-14 | 2022-12-06 | 哈尔滨工业大学 | Combined type ultraprecise machining tool |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101067433A (en) * | 2006-09-26 | 2007-11-07 | 哈尔滨工业大学 | Air spring superlow frequency vibration isolating method and apparatus based on differential electromagnetic actuator |
| CN102975299A (en) * | 2012-11-26 | 2013-03-20 | 哈尔滨工业大学 | Double cutter plate type super-precise fly-cutting milling machine |
| JP2014010687A (en) * | 2012-06-29 | 2014-01-20 | Toshiba Mach Co Ltd | Mirror finishing method and grooving method of film-like work by fly cutting |
| CN105364165A (en) * | 2015-12-08 | 2016-03-02 | 中国工程物理研究院机械制造工艺研究所 | Feeding device for diamond fly-cutting tool |
| CN206550755U (en) * | 2017-03-07 | 2017-10-13 | 华侨大学 | A kind of on-line measurement device of contactless turner |
| CN108145179A (en) * | 2017-11-27 | 2018-06-12 | 深圳大学 | Micro-nano structure machining tool and micro-nano structure processing method |
| CN108214423A (en) * | 2016-12-21 | 2018-06-29 | 无锡星微科技有限公司 | A kind of motion platform for OLED detection devices |
| CN109849079A (en) * | 2019-04-11 | 2019-06-07 | 北京理工大学 | A kind of ultra-precision processing apparatus of processing micro structure array |
| CN210999512U (en) * | 2019-11-13 | 2020-07-14 | 中国工程物理研究院机械制造工艺研究所 | Desktop type miniature ultra-precise single-point diamond fly-cutting machine tool |
-
2019
- 2019-11-13 CN CN201911106074.2A patent/CN110733141A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101067433A (en) * | 2006-09-26 | 2007-11-07 | 哈尔滨工业大学 | Air spring superlow frequency vibration isolating method and apparatus based on differential electromagnetic actuator |
| JP2014010687A (en) * | 2012-06-29 | 2014-01-20 | Toshiba Mach Co Ltd | Mirror finishing method and grooving method of film-like work by fly cutting |
| CN102975299A (en) * | 2012-11-26 | 2013-03-20 | 哈尔滨工业大学 | Double cutter plate type super-precise fly-cutting milling machine |
| CN105364165A (en) * | 2015-12-08 | 2016-03-02 | 中国工程物理研究院机械制造工艺研究所 | Feeding device for diamond fly-cutting tool |
| CN108214423A (en) * | 2016-12-21 | 2018-06-29 | 无锡星微科技有限公司 | A kind of motion platform for OLED detection devices |
| CN206550755U (en) * | 2017-03-07 | 2017-10-13 | 华侨大学 | A kind of on-line measurement device of contactless turner |
| CN108145179A (en) * | 2017-11-27 | 2018-06-12 | 深圳大学 | Micro-nano structure machining tool and micro-nano structure processing method |
| CN109849079A (en) * | 2019-04-11 | 2019-06-07 | 北京理工大学 | A kind of ultra-precision processing apparatus of processing micro structure array |
| CN210999512U (en) * | 2019-11-13 | 2020-07-14 | 中国工程物理研究院机械制造工艺研究所 | Desktop type miniature ultra-precise single-point diamond fly-cutting machine tool |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115431047A (en) * | 2022-10-14 | 2022-12-06 | 哈尔滨工业大学 | Combined type ultraprecise machining tool |
| CN115431047B (en) * | 2022-10-14 | 2024-01-05 | 哈尔滨工业大学 | Combined type ultra-precision machining machine tool |
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