CN115217889A - Gas magnetic vibration isolation and active and passive damping transfer device for large-scale precision equipment - Google Patents
Gas magnetic vibration isolation and active and passive damping transfer device for large-scale precision equipment Download PDFInfo
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- CN115217889A CN115217889A CN202210834985.2A CN202210834985A CN115217889A CN 115217889 A CN115217889 A CN 115217889A CN 202210834985 A CN202210834985 A CN 202210834985A CN 115217889 A CN115217889 A CN 115217889A
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- 238000002955 isolation Methods 0.000 title claims abstract description 114
- 238000013016 damping Methods 0.000 title claims abstract description 55
- 238000000034 method Methods 0.000 claims abstract description 28
- 238000001514 detection method Methods 0.000 claims abstract description 27
- 230000000670 limiting effect Effects 0.000 claims abstract description 18
- 238000005188 flotation Methods 0.000 claims abstract description 14
- 238000006073 displacement reaction Methods 0.000 claims description 14
- 230000021715 photosynthesis, light harvesting Effects 0.000 claims description 2
- 230000008569 process Effects 0.000 abstract description 23
- 230000009471 action Effects 0.000 abstract description 10
- 230000000694 effects Effects 0.000 description 17
- 230000008859 change Effects 0.000 description 4
- 238000007599 discharging Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/022—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using dampers and springs in combination
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60P—VEHICLES ADAPTED FOR LOAD TRANSPORTATION OR TO TRANSPORT, TO CARRY, OR TO COMPRISE SPECIAL LOADS OR OBJECTS
- B60P7/00—Securing or covering of load on vehicles
- B60P7/06—Securing of load
- B60P7/16—Protecting against shocks
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/0232—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means with at least one gas spring
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
- F16F15/046—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means using combinations of springs of different kinds
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2228/00—Functional characteristics, e.g. variability, frequency-dependence
- F16F2228/06—Stiffness
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2228/00—Functional characteristics, e.g. variability, frequency-dependence
- F16F2228/06—Stiffness
- F16F2228/063—Negative stiffness
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2228/00—Functional characteristics, e.g. variability, frequency-dependence
- F16F2228/06—Stiffness
- F16F2228/066—Variable stiffness
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2230/00—Purpose; Design features
- F16F2230/0047—Measuring, indicating
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2230/00—Purpose; Design features
- F16F2230/06—Fluid filling or discharging
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T90/00—Enabling technologies or technologies with a potential or indirect contribution to GHG emissions mitigation
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Abstract
The invention relates to a large-scale precision equipment gas magnetic vibration isolation and active and passive damping transfer device, belonging to the technical field of transfer equipment, and the technical scheme comprises a frame, a vibration isolation platform, an air flotation vibration isolation unit, a height detection and control device and a processor, and further comprises an active damping unit, a limiting unit, a permanent magnet negative stiffness module and a passive damper, wherein the vibration isolation platform supports the transferred equipment; the air-flotation vibration isolation unit, the active damping unit, the limiting unit, the height detection and control device, the permanent magnet negative stiffness module and the passive damper are respectively arranged in parallel between the upper bottom surface and four inner side surfaces of the frame and the vibration isolation platform at intervals. The mode that positive and negative rigidity and active and passive damping are connected in parallel is adopted to realize safety protection under the action of three-dimensional precise vibration isolation and strong impact, and the problem that the transportation of three-dimensional precise vibration isolation and impact protection cannot be realized in the transportation process of large-scale precise equipment in the prior art is solved.
Description
Technical Field
The invention belongs to the technical field of transfer equipment, and particularly relates to a gas-magnetic vibration isolation and active and passive damping transfer device for large-scale precision equipment.
Background
Large-scale precision equipment, especially after precision assembly, often has characteristics such as big volume, big quality, high stationarity requirement, and the operation process is requested badly when transporting. Large-scale precision equipment is in the transportation, often need keep invariable gesture and stable support, and slight vibration often can influence equipment wholeness ability in the transportation, and the impact effect that ground jolted the production also can exert an influence to the security performance of equipment, especially under the unbalance loading condition, the strong impact effect that ground jolted the production can directly lead to equipment skew, upset, causes the threat to equipment itself and transportation personnel's safety.
The air cushion vehicle utilizes the gas film technology to support the load in a suspension manner, avoids the contact with the ground, produces good vibration isolation effect and plays an important role in the transportation of precision instruments. The patent No. 201010242011.2 discloses an automatic leveling control device for an air cushion suspension transport vehicle, which utilizes signals sent by high and low photoelectric switches to control the air charging and discharging of an air cushion so as to realize an automatic leveling function. The technical scheme is characterized in that: (1) According to the technical scheme, the air cushion vehicle is used for realizing a good vertical vibration isolation effect, but due to the lack of a negative stiffness device, the initial vibration isolation frequency is higher, and due to the lack of a damping device, the vibration amplification effect at the natural frequency in the transferring process can damage the transferred equipment; (2) The technical scheme can not realize safety protection under the action of strong impact, when the high-impact energy is caused by factors such as ground jolt, huge impact energy cannot be dissipated and then directly acts on transported equipment to cause the damage of the transported equipment, meanwhile, the strong impact action instantly causes larger relative displacement between the transported equipment and the ground, and the rigid collision of the transported equipment can be directly caused to cause the damage due to the lack of a limiting device; (3) According to the technical scheme, the photoelectric switch is used as the height sensor, the height of the air cushion transfer trolley cannot be detected and adjusted in real time, the horizontal posture is adjusted by a height adjusting method, supporting force is not applied in the horizontal direction, and swing caused by ground bumping in the transfer process cannot be effectively restrained.
The patent No. 201310280075.5 discloses an intelligent air cushion transfer vehicle and a control method thereof, the technical scheme adopts a method of arranging height sensors at four corners of a frame of the air cushion transfer vehicle to feed back the height of a vehicle body relative to the ground in real time, and a remote control main processor controls an air cushion inflation and deflation unit according to vehicle body height information to realize the adjustment of the fluctuation height of the vehicle body and achieve the purpose of controlling the posture of the vehicle body. The technical scheme is characterized in that: (1) According to the technical scheme, the air cushion vehicle is utilized to realize a good vertical vibration isolation effect, but due to the lack of a negative stiffness device, the initial vibration isolation frequency is higher, and due to the lack of a damping device, the vibration amplification effect at the natural frequency in the transferring process can damage the transferred equipment; (2) The technical scheme can not realize safety protection under the action of strong impact, when the high-impact energy is caused by factors such as ground jolt, huge impact energy cannot be dissipated and then directly acts on transported equipment to cause the damage of the transported equipment, meanwhile, the strong impact action instantly causes larger relative displacement between the transported equipment and the ground, and the rigid collision of the transported equipment can be directly caused to cause the damage due to the lack of a limiting device; (3) According to the technical scheme, the height of the air cushion transfer trolley is detected and adjusted in real time by adopting the height sensor, the constant horizontal posture is guaranteed to a certain extent, but the horizontal posture is adjusted by the height adjusting method, supporting force is not applied in the horizontal direction, and swing caused by ground jolt in the transfer process cannot be restrained.
The patent No. 202110749514.7 discloses a three-dimensional damping transfer box and a transfer handcart of using thereof, and this technical scheme installs horizontal damping rubber on four lateral walls of transfer box, has realized the three-dimensional vibration isolation in the mode of vertical damping rubber of box bottom installation. The technical scheme is characterized in that: (1) The technical scheme realizes the vibration isolation effect in three directions, has higher initial vibration isolation frequency, can realize transportation operation for general precision equipment with low requirement on the vibration environment, is simple and reliable, but cannot realize the safe transportation of the precision equipment with higher requirement on the environmental vibration because the vibration isolation performance of the vibration-damping rubber is poorer; (2) According to the technical scheme, rubber is adopted for vibration reduction in three directions, and when strong impact generated by factors such as uneven ground is met, a damping device for dissipating impact energy is lacked, so that the transferred equipment is damaged due to the huge impact energy; (3) The vibration isolation mode that this technical scheme adopted has decided that it can't guarantee that the gesture is invariable in the transportation.
In conclusion, the existing device for transporting large-scale precision equipment is difficult to give consideration to three-dimensional vibration isolation and posture regulation, and the initial vibration isolation frequency is higher due to the lack of a negative stiffness device; when strong impact action caused by factors such as uneven road surface is met in the transferring process, a damping device for dissipating impact energy is lacked, the impact energy cannot be dissipated, and the huge impact energy is transferred to the transferred large precision equipment to cause the transferred large precision equipment to be damaged; the horizontal posture is adjusted in a height adjusting mode, and acting force for adjusting the horizontal posture aiming at the swinging action is not applied in the horizontal direction. Therefore, a pneumatic-magnetic vibration isolation and active-passive damping transfer device for large-scale precision equipment needs to be provided to meet the requirement of China on the transfer aspect of the large-scale precision equipment.
Disclosure of Invention
Aiming at the problems in the prior art, the invention aims to provide a gas-magnetic vibration isolation and active-passive damping transfer device for large-scale precision equipment so as to meet the requirements of precision vibration isolation and safety protection of the large-scale precision equipment in the transfer process in China.
In order to achieve the above object, the present invention provides a technical solution as follows:
a large-scale precision equipment air magnetic vibration isolation and active and passive damping transfer device comprises a frame, a vibration isolation platform, an air flotation vibration isolation unit, a height detection and control device and a processor, wherein the vibration isolation platform supports the transferred large-scale precision equipment; the air floatation vibration isolation unit is respectively arranged in parallel between the upper bottom surface of the middle frame and four inner side surfaces as well as between the air floatation vibration isolation unit and the vibration isolation platform at intervals, and is connected with the frame and the vibration isolation platform; the active damping unit for precise vibration isolation and impact energy dissipation, the height detection and control device for detecting horizontal posture and lateral displacement, the permanent magnet negative stiffness module for reducing the natural frequency of the system and the passive dampers are respectively arranged in parallel between the upper bottom surface of the frame and four inner side surfaces of the frame and the vibration isolation platform at intervals and are all connected with the frame and the vibration isolation platform; the limiting units are arranged among the upper bottom surface of the frame, the four inner side surfaces and the vibration isolation platform in parallel at intervals.
Preferably, the air flotation vibration isolation unit comprises an air chamber and an air spring.
Preferably, the height detection and control device comprises a height detection device, a connecting piece and an air inflation and deflation unit.
Preferably, the active damping unit comprises a damper and a speed sensor.
Preferably, the height detection device comprises a grating ruler reading head connecting rod, a grating ruler guide rail and a grating ruler reading head.
The air-flotation vibration isolation and damping protection transfer device for the large-scale precision equipment, provided by the invention, has the following effects:
(1) The invention can realize the precise vibration isolation effect in the transfer process of large-scale precise equipment. The high-performance air spring vibration isolator can realize higher static rigidity and lower dynamic rigidity, the permanent magnet negative rigidity module is added, the dynamic rigidity is further reduced by adopting a mode of connecting positive rigidity and negative rigidity in parallel, the natural frequency of a system can be further reduced under the condition of large load, higher vibration isolation performance is ensured, meanwhile, the active damping unit and the passive damper are connected in parallel to increase the damping of the system, the vibration transmission rate at the natural frequency can be further reduced, and the precise vibration isolation effect in the transportation process of large-scale precise equipment is realized
(2) The invention can realize the safety protection effect under the action of strong impact in the transfer process. According to the invention, the active damping unit, the limiting unit and the passive damper are arranged between the vibration isolation platform and the vehicle frame, when the equipment to be transported is subjected to strong impact in the transportation process, the active and passive dampers are connected in parallel to generate larger damping force, so that impact energy can be quickly dissipated, safety and reliability are realized, and the limiting unit is arranged between the vibration isolation platform and the vehicle frame, so that the equipment to be transported cannot generate larger displacement to be damaged, and thus the safety protection effect under the strong impact in the transportation process is realized.
(3) The invention can realize that the transported equipment is in a horizontal posture in the transporting process, and can effectively prevent the equipment from being damaged due to the swing of the transported equipment in the transporting process. The invention uses the height detection and control unit to detect the relative displacement between the vibration isolation platform and the frame in real time, and controls the air charging and discharging unit to charge and discharge the air spring in real time through the processor, thereby ensuring that the equipment can be stably transported in a constant posture.
Drawings
FIG. 1 is a schematic view of a pneumatic-magnetic vibration isolation and active and passive damping protection transfer device for large-scale precision equipment;
FIG. 2 highlights views of the active damping unit, the permanent magnet negative stiffness vibration isolation unit and the passive damping unit in part A of FIG. 1;
FIG. 3 is a top view of the pneumatic-magnetic vibration isolation and active-passive damping protection transfer device for large-scale precision equipment without a controller;
FIG. 4 is a front view of the pneumatic-magnetic vibration isolation and active-passive damping protection transfer device for large-scale precision equipment without a frame and a controller;
FIG. 5 highlights a view of the active damping unit and the height detection and control device in detail B in FIG. 4;
FIG. 6 is a left side view of the pneumatic-magnetic vibration isolation and active-passive damping protection transfer device for large-scale precision equipment without a frame and a controller;
FIG. 7 is a top view of the pneumatic-magnetic vibration isolation and active-passive damping protection transfer device for large-scale precision equipment without a frame and a controller.
Reference numbers in the figures:
100. a frame; 200. a vibration isolation platform; 300. large-scale precision equipment; 400. an air flotation vibration isolation unit; 401. an air chamber; 402. an air spring; 500. an active damping unit; 501. an active damper; 502. a speed sensor; 600. a limiting unit; 601. a stopper bracket; 602. a stopper; 700. a height detection and control device; 710. a height detection device; 711. a grating ruler reading head connecting piece; 712. a grating scale guide rail; 713. a grating ruler reading head; 714. a connecting member; 720. an air charging and discharging unit; 800. a controller; 900. a permanent magnet negative stiffness vibration isolation unit; 1000. a passive damper.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
The invention provides a large-scale precision equipment air-magnetic vibration isolation and active and passive damping protection transfer device, which comprises a frame 100, a vibration isolation platform 200, an air flotation vibration isolation unit 400, an active damping unit 500, a limiting unit 600, a height detection and control device 700, a processor 800, a permanent magnetic negative stiffness module 900 and a passive damper 1000, wherein the vibration isolation platform 200 supports a transferred large-scale precision equipment 300, the air flotation vibration isolation unit 400 and the permanent magnetic negative stiffness module 900 are respectively arranged in parallel between the upper bottom surface and four inner side surfaces of the frame 100 and the vibration isolation platform 200 at intervals and are respectively connected with the frame 100 and the vibration isolation platform 200, the active damping unit 500 and the passive damper 1000 for precisely isolating and dissipating impact energy, the height detection and control device 700 for detecting horizontal posture and lateral displacement and the permanent magnetic negative stiffness module 900 for reducing the inherent frequency of the system are respectively arranged in parallel between the upper bottom surface of the frame 100 and the four inner side surfaces and the vibration isolation platform 200 at intervals and are respectively connected with the frame 100 and the vibration isolation platform 200, and the limiting unit 600 is arranged between the four inner side surfaces of the frame 100 and the vibration isolation platform 200 at intervals.
When the air floatation vibration isolation device is used, a plurality of height detection and control devices 700 are arranged in parallel with the air floatation vibration isolation unit 400 at different positions on the same surface, the processor 800 controls the height detection and control devices 700 to inflate the air floatation vibration isolation unit 400, so that supporting force of a transported large-scale precision device is provided, vibration generated by the ground is attenuated by the air spring 402 and the permanent magnet negative stiffness module 900 and then transmitted to the transported large-scale precision device, and a plurality of active damping units 500 are arranged in parallel with the single air floatation vibration isolation unit 400, so that system damping can be precisely regulated and controlled, and the vibration transmission rate at the natural frequency position is further reduced. Specifically, the height detection device and control device 700 comprises a height detection device 710 and an air inflation and deflation unit 720, the height detection device 710 arranged on the upper bottom surface of the vibration isolation platform 200 detects the floating height of the vibration isolation platform at the installation position in real time, the height detection device 710 arranged on the side surface of the vibration isolation platform detects the horizontal relative displacement between the vibration isolation platform 200 and the vehicle frame 100 in real time, and feeds the result back to the processor 800 for processing, and when the transfer equipment is subjected to vibration actions such as ground bump, the air inflation and deflation unit 720 is controlled to perform air inflation and deflation operations on the air flotation vibration isolation unit 400, so that the vibration isolation platform is always kept in a constant horizontal posture, and the anti-swing control of the vibration isolation platform is realized; when receiving strong impact, the active damping unit 500 generates large damping force according to the vibration speed, the passive damper 1000 also generates corresponding damping force, the active and passive damping parallel connection mode is adopted, impact energy is quickly dissipated, safety and reliability are realized, but the air floatation vibration isolation unit 400 cannot quickly adjust the air pressure value in the air spring 402, the vibration isolation platform is caused to generate large relative displacement, the limiting unit 600 is in contact with the vibration isolation platform and generates limiting effect, and therefore safety protection of the transported large-scale precision equipment is realized.
Specifically, the air flotation vibration isolation unit 400 includes an air chamber 401 and an air spring 402, wherein the air chamber 401 is fixedly mounted on the frame 100, the air spring 402 is fixedly mounted on the air chamber 401, the upper end of the air spring 402 is fixedly connected to the vibration isolation platform 200, and the air path between the air spring 402 and the air chamber 401 is communicated.
Specifically, the active damping unit 500 includes an active damper 501 and a velocity sensor 502.
Specifically, the limiting unit 600 includes a limiter bracket 601 and a limiter 602, wherein the limiter bracket 601 is fixedly mounted on the frame 100, the limiter 602 is fixedly mounted on the limiter bracket 601, and a certain safety gap is left between the upper end surface of the limiter 602 and the vibration isolation platform 200.
Specifically, the height detection device 710 and the inflation/deflation unit 720 are fixedly connected to the air chamber 401 of the air flotation vibration isolation unit through the connecting member 714. The height detection device 710 comprises a grating scale reading head connector 711, a grating scale guide rail 712 and a grating scale reading head 713, wherein the grating scale reading head 711 is connected to the grating scale guide rail 712 in a sliding manner, one end of the grating scale reading head connector 711 is connected with the grating scale reading head 713, and the other end of the grating scale reading head connector 711 is connected with the vibration isolation platform. In the transfer process, after vibration from the ground passes through the frame 100, the air chamber 402, the air spring 500 transmits the vibration isolation platform to cause the vibration isolation platform 200 to vibrate, the vibration isolation platform 200 drives the grating scale reading head 713 to slide on the grating scale guide rail 712 through the grating scale reading head connecting piece 711, thereby causing the change of grating scale reading, and then detecting the relative displacement change between the frame 100 and the vibration isolation platform 200 at the connecting point in real time, when the displacement change value exceeds a certain range, the control is filled and deflated the air inflation and deflation unit 720 to fill and deflate the air flotation vibration isolation unit 400, realize the posture adjustment to the vibration isolation platform 200, when the displacement change is great, directly cause the limiting unit 600 to contact with the vibration isolation platform 200, and then realize the safety protection function.
In conclusion, the vibration isolation device can achieve the precise vibration isolation effect in the transfer process of large-scale precise equipment. According to the invention, the high-performance air spring vibration isolator can realize high static rigidity and low dynamic rigidity, the permanent magnet negative rigidity module 900 is added, the dynamic rigidity is further reduced by adopting a mode of connecting positive rigidity and negative rigidity in parallel, the natural frequency of the system can be further reduced under the condition of large load, high vibration isolation performance is ensured, meanwhile, the active damping unit 500 and the passive damper 1000 are connected in parallel to increase the damping of the system, the vibration transmission rate at the natural frequency can be further reduced, and thus the precise vibration isolation effect in the transferring process is realized.
The invention can realize the safety protection effect under the action of strong impact in the transfer process. According to the invention, the active damping unit 500, the limiting unit 600 and the passive damper 1000 are arranged between the vibration isolation platform 200 and the vehicle frame 100, after the equipment to be transported is subjected to strong impact in the transportation process, the active and passive dampers are connected in parallel to generate larger damping force, so that the impact energy can be quickly dissipated, the safety and the reliability are realized, and the limiting unit 600 is arranged between the vibration isolation platform and the vehicle frame, so that the equipment to be transported can not generate larger displacement to be damaged, and the safety protection effect under the strong impact in the transportation process is realized.
The invention can realize that the transported equipment is in a horizontal posture in the transporting process, and can effectively prevent the equipment from being damaged due to swing in the transporting process. The invention uses the height detection and control device 700 to detect the relative displacement between the vibration isolation platform 200 and the frame 100 in real time, and controls the air charging and discharging unit 720 to charge and discharge the air spring 402 in real time through the processor 800, thereby ensuring that the equipment can be stably transported in a constant posture.
The above-mentioned embodiments only express the embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (5)
1. A large-scale precision equipment air magnetic vibration isolation and active and passive damping transfer device comprises a frame (100), a vibration isolation platform (200), an air flotation vibration isolation unit (400), a height detection and control device (700) and a processor (800), wherein the vibration isolation platform (200) supports the transferred large-scale precision equipment (300); the method is characterized in that: the air floatation vibration isolation unit (400) is arranged among the upper bottom surface, four inner side surfaces and the vibration isolation platform (200) of the middle frame (100) in parallel at intervals respectively, and is connected with the frame (100) and the vibration isolation platform (200); the active damping unit (500) is used for precise vibration isolation and impact energy dissipation, the height detection and control device (700) is used for detecting horizontal posture and lateral displacement, the permanent magnet negative stiffness module (900) is used for reducing the natural frequency of the system, and the passive dampers (1000) are respectively arranged in parallel among the upper bottom surface of the frame (100), four inner side surfaces and the vibration isolation platform (200) at intervals and are all connected with the frame (100) and the vibration isolation platform (200); the limiting units (600) are arranged among the upper bottom surface of the frame (100), the four inner side surfaces and the vibration isolation platform (200) in parallel at intervals.
2. The gas-magnetic vibration isolation and active-passive damping transfer device for large-scale precision equipment according to claim 1, which is characterized in that: the air floatation vibration isolation unit (400) comprises an air chamber (401) and an air spring (402).
3. The gas-magnetic vibration isolation and active-passive damping transfer device for large-scale precision equipment according to claim 1, which is characterized in that: the height detection and control device (700) comprises a height detection device (710), a connecting piece (714) and an air inflation and deflation unit (720).
4. The air flotation vibration isolation and active and passive damping transfer device for the large-scale precision equipment as claimed in claim 1, wherein: the active damping unit (500) comprises an active damper (501) and a speed sensor (502).
5. The large-scale precision equipment gas-magnetic vibration isolation and active-passive damping transfer device according to claim 1 or claim 3, characterized in that: the height detection device (710) comprises a grating scale reading head connecting rod (711), a grating scale guide rail (712) and a grating scale reading head (713).
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