CN110307287B

CN110307287B - Vibration isolation system

Info

Publication number: CN110307287B
Application number: CN201810231648.8A
Authority: CN
Inventors: 伍康; 要佳敏; 郭梅影
Original assignee: Tsinghua University
Current assignee: Tsinghua University
Priority date: 2018-03-20
Filing date: 2018-03-20
Publication date: 2020-10-13
Anticipated expiration: 2038-03-20
Also published as: CN110307287A

Abstract

The invention discloses a vibration isolation system. The vibration isolation system comprises a first elastic element, a fixed separation mechanism, an object carrying device and a bearing structure. The first elastic element comprises an elastic main body and a clamping part. The clamping part is fixedly connected to one end of the elastic main body. The clamping part is detachably arranged on the fixed separation mechanism. The carrying device is detachably arranged at one end of the elastic main body, which is far away from the clamping part. The bearing structure comprises a bearing structure main body and a bearing hole arranged in the bearing structure main body. The bearing hole is used for enabling the elastic main body to penetrate through, and enabling the bearing main body to be located between the clamping part and the carrying device, when the clamping part is separated from the fixed separating mechanism, the clamping part falls to the bearing main body under the action of gravity, and the bearing main body provides support for the clamping part. The vibration-damping effect can be improved because the vibration-damped object is kept in an initial stationary state during the period from the separation of the fixing/separating mechanism and the engaging portion to the transmission of the longitudinal wave of the first elastic element to the loading device.

Description

Vibration isolation system

Technical Field

The invention relates to the field of precision instruments, in particular to a vibration isolation system.

Background

In all the existing ultra-low frequency vertical vibration isolation systems, the object to be isolated is connected with other parts in the system through elements such as a spring or a swing plate, although theoretically, the systems can realize infinite eigen period through feedback control, namely, the influence of all external vibration is isolated, the eigen period of the actual system is limited, so that a small part of ground vibration is inevitably transmitted to the object to be isolated, and the working precision of the object to be isolated is influenced.

Disclosure of Invention

Accordingly, it is necessary to provide a vibration isolation system for solving the problem of low working accuracy of the object to be vibration isolated.

A vibration isolation system comprising:

the first elastic element comprises an elastic main body and a clamping part, and the clamping part is fixedly connected to one end of the elastic main body;

the clamping part is detachably arranged on the fixed separation mechanism;

the carrying device is detachably arranged at one end of the elastic main body, which is far away from the clamping part; and

the bearing structure comprises a bearing main body and a bearing hole arranged in the bearing main body, the bearing hole is used for enabling the elastic main body to penetrate through and enabling the bearing main body to be located between the clamping portion and the carrying device, when the clamping portion is separated from the fixed separating mechanism, the clamping portion falls to the bearing main body under the action of gravity, and the bearing main body supports the clamping portion.

In one embodiment, the device further comprises a fixing plate for mounting the fixed separating mechanism.

In one embodiment, the apparatus further comprises a fixture to which the receiving structure is mounted.

In one embodiment, the fixing device further includes a reset mechanism, the loading device is fixedly mounted on the reset mechanism, and the reset mechanism is used for transporting the clamping part falling on the receiving main body to the fixing and separating mechanism.

In one embodiment, the reset mechanism comprises:

the two first rotating wheels are arranged at intervals;

the hold-in range, the cover is located the outside of first runner, first runner is used for driving the hold-in range rotates, accept the structure fixed set up in the hold-in range.

In one embodiment, the reset mechanism comprises

The two second rotating wheels are arranged at intervals;

the steel belt is sleeved outside the two second rotating wheels, and the second rotating wheels drive the steel belt to rotate through friction;

the bearing structure is fixedly arranged on the steel belt.

In one embodiment, the fixed release mechanism comprises:

a rotating shaft;

the hook part is fixedly connected with the rotating shaft; and

and the hanging part is used for connecting the hanging hook part and the first elastic element, and the rotating shaft drives the hanging hook part to rotate so as to separate or connect the hanging hook part and the hanging part.

In one embodiment, further comprising:

the front stage vibration isolation device is arranged on the fixing plate and used for reducing vibration of the fixing plate.

In one embodiment, the fore stage vibration isolation apparatus comprises:

the fixing frame comprises a first fixing part;

a parallel frame comprising:

the connecting part is arranged in parallel with the first fixing part at intervals;

the swinging plate and the fixed plate are arranged in parallel at intervals, one end of the swinging plate and one end of the fixed plate are respectively and rotatably connected to the first fixed part, and the other end of the swinging plate and the other end of the fixed plate are respectively and rotatably connected to the connecting part; and

and one end of the second elastic element is connected with the fixed frame, and the other end of the second elastic element is connected with the parallel frame, so that the swinging plate and the fixed plate are horizontally arranged under the action of gravity.

In one embodiment, one end of the second elastic element is connected to the first fixing portion, and the other end of the second elastic element is connected to the swing plate or the fixing plate.

In one embodiment, the fixture further comprises:

the second fixing part is crossed with the first fixing part, one end of the second elastic element is connected to the second fixing part, and the other end of the second elastic element is connected to the swinging plate or the fixing plate.

In one embodiment, further comprising:

the first feedback control device is arranged on the parallel frame and used for monitoring the first relative displacement of the parallel frame relative to the fixed frame and outputting a first relative displacement signal; and

and the first driving device is arranged between the fixed frame and the parallel frame and used for driving the parallel frame to move according to the first relative displacement signal so as to enable the first relative displacement to be zero or approach to zero.

In one embodiment, the connection portion includes:

the two ends of the connecting frame rotate to the swinging plate and the fixing plate respectively;

the first feedback control device includes:

the laser emitting element is arranged on one side of the connecting frame and used for emitting laser signals;

the light-gathering element is suspended in the connecting frame through the third elastic element and is used for focusing the laser signal; and

and the signal processing element is arranged in the same linear direction with the light condensing element and the laser emitting element and is used for receiving the focused laser signal and outputting the first relative displacement signal.

In one embodiment, the first feedback control device includes an acceleration sensor, and the acceleration sensor is disposed on the parallel frame and configured to monitor an acceleration change of the parallel frame and output the first relative displacement signal according to the acceleration change.

In one embodiment, the first driving means comprises:

a piezoelectric driver, comprising:

and the output shaft is connected with the swinging plate or the fixing plate and is used for driving the swinging plate or the fixing plate to move in the vertical direction.

In one embodiment, the fore stage vibration isolation mounting comprises:

a first central shaft;

the primary frame is symmetrically arranged around the first central shaft and comprises a first accommodating cavity;

the secondary frame is arranged symmetrically around the first central shaft and is arranged in the first accommodating cavity, the secondary frame comprises a second accommodating cavity, the fixing plate is fixedly arranged on the secondary frame, the shaft of the first elastic element is overlapped with the first central shaft, and the carrying device is suspended in the second accommodating cavity through the first elastic element; and

and the fourth elastic elements are symmetrically arranged around the first central shaft, are connected between the primary frame and the secondary frame and are used for damping the vibration of the fixed separation mechanism.

In one embodiment, the primary frame comprises:

a plurality of first side posts symmetrically disposed about the first central axis;

the top plate and the first bottom plate are respectively and fixedly arranged at two ends of the first side columns, and the first side columns, the top plate and the first bottom plate form the first accommodating cavity;

the secondary frame includes:

a plurality of second side posts symmetrically disposed about the first central axis;

the second bottom plate and the fixing plate are respectively and fixedly arranged at two ends of the plurality of second side columns, and the plurality of second side columns, the fixing plate and the second bottom plate form the second accommodating cavities; and

both ends of the plurality of fourth elastic elements are respectively connected to the top plate and the second bottom plate.

In one embodiment, further comprising:

the second feedback control device is arranged on the primary frame and used for monitoring second relative displacement of the primary frame and the secondary frame and outputting a second relative displacement signal; and

and the second driving device is arranged between the primary frame and the secondary frame and used for driving the second driving device according to the second relative displacement signal so as to enable the second relative displacement to be zero or approach to zero.

In one embodiment, a horizontal limiting structure for limiting the horizontal movement of the secondary frame in the first accommodating cavity is arranged between the primary frame and the secondary frame.

In one embodiment, the fore stage vibration isolation mounting comprises:

a fixed frame comprising:

the second central shaft is arranged on the first central shaft,

a plurality of side plates symmetrically disposed about the second central axis;

the fixing plate is arranged at intervals with the side plate, and the axis of the first elastic element is superposed with the second central shaft;

the torsion bars are symmetrically arranged around the second central shaft at intervals, and two ends of each torsion bar are respectively and rotatably connected to the side plate and the fixing plate;

the third bottom plate is connected to one end, far away from the torsion bars, of the side plates; and

and the plurality of pressure bars are symmetrically arranged around the second central shaft at intervals, and two ends of each pressure bar are respectively and fixedly connected to the torsion bar and the third bottom plate.

The vibration isolation system provided by the embodiment of the invention comprises a first elastic element, a fixed separation mechanism, an object carrying device and a bearing structure. The first elastic element comprises an elastic main body and a clamping part. The clamping part is fixedly connected to one end of the elastic main body. The engaging portion is detachably mounted to the fixed separating mechanism. The carrying device is detachably mounted at one end, far away from the clamping part, of the elastic main body. The bearing structure comprises a bearing structure main body and a bearing hole arranged in the bearing structure main body. When the vibration isolation system is used, the fixed separation mechanism is fixed at a certain height, so that the elastic main body passes through the bearing hole. The bearing structure main body is arranged between the clamping part and the carrying device. When the clamping part is separated from the fixed separating mechanism, the clamping part falls to the bearing structure main body under the action of gravity, and the bearing structure main body provides support for the clamping part. In the period from the separation of the fixed separation mechanism and the engagement portion to the transmission of the longitudinal wave of the first elastic element to the loading device, the vibration-isolated object can be completely isolated from the outside, so that the vibration-isolated object is kept in an initial static state, and therefore, the vibration isolation effect can be improved, and the working precision of the vibration-isolated object can be improved.

Drawings

Fig. 1 is a schematic structural diagram of a vibration isolation system according to an embodiment of the present disclosure;

FIG. 2 is a schematic view of a reset mechanism provided in an embodiment of the present application;

fig. 3 is another schematic structural diagram of a vibration isolation system provided in an embodiment of the present application;

FIG. 4 is a schematic view of a fixed release mechanism provided in an embodiment of the present application;

fig. 5 is another schematic structural diagram of a vibration isolation system provided in an embodiment of the present application;

fig. 6 is another schematic structural diagram of a vibration isolation system provided in an embodiment of the present application;

fig. 7 is another schematic structural diagram of a vibration isolation system provided in an embodiment of the present application;

fig. 8 is another schematic structural diagram of a vibration isolation system provided in an embodiment of the present application;

fig. 9 is another schematic structural diagram of a vibration isolation system provided in an embodiment of the present application;

fig. 10 is a feedback control flowchart of the vibration isolation system according to the embodiment of the present application;

fig. 11 is a schematic view of a capacitive displacement sensor according to an embodiment of the present disclosure.

Description of the reference numerals

Vibration isolation system 10

Fixed release mechanism 100

Rotating shaft 110

Hook part 120

Hanging part 130

First elastic element 140

Elastic body 141

Fixing plate 150

Object carrying device 200

Receiving structure 300

Receiving body 310

Pre-stage vibration isolation device 400

Fixing frame 410

First fixing part 411

Second fixing part 412

Parallel frame 413

Connecting part 414

Connection frame 415

Swing plate 416

Second elastic element 420

First central shaft 430

Primary frame 440

First side post 441

Top plate 442

First base plate 443

First accommodation cavity 444

Secondary frame 450

Second side column 451

Second bottom plate 453

Second accommodation cavity 454

Fourth elastic element 460

Fixed frame 470

Second central axis 471

Side plate 472

Torsion bar 474

Third backplane 475

Compression bar 476

Horizontal limiting structure 480

First feedback control device 500

Laser emitting element 510

Third elastic element 520

Light-condensing element 530

Signal processing component 540

Acceleration sensor 550

First drive 560

Piezoelectric driver 570

Output shaft 571

Second feedback control device 580

Second driving device 590

Reset mechanism 630

Transport section 610

First wheel 611

Synchronous belt 612

Second runner 613

Steel belt 614

Receiving hole 621

Engaging part 622

Capacitive displacement sensor 700

Mass block 710

Middle movable polar plate 720

Upper fixed polar plate 730

Bottom fixed polar plate 740

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein, but rather should be construed as broadly as the present invention is capable of modification in various respects, all without departing from the spirit and scope of the present invention.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

Referring to fig. 1, an embodiment of the invention provides a vibration isolation system 10. The vibration isolation system 10 includes a first elastic member 140, a fixed separating mechanism 100, a carrier device 200, and a receiving structure 300.

The first elastic element 140 includes an elastic body 141 and an engaging portion 622. The engaging portion 622 is fixedly connected to one end of the elastic body 141. The engaging portion 622 may have a diameter larger than that of the elastic body 141. The elastic body 141 may be a spring. The engaging portion 622 is detachably attached to the fixed release mechanism 100. The loading device 200 is detachably mounted on one end of the elastic body 141 away from the engaging portion 622.

The receiving structure 300 includes a receiving structure body 310 and a receiving hole 621 opened in the receiving structure body 310. The receiving hole 621 is used for the elastic body 141 to pass through. The receiving structure body 310 is located between the engaging portion 622 and the loading device 200. When the engaging portion 622 is separated from the fixed separating mechanism 100, the engaging portion 622 falls down to the receiving structure body 310 by gravity. The receiving structure body 310 provides support for the engaging portion 622.

The receiving structure body 31 may be plate-shaped. The receiving hole 621 may be opened in the middle of the receiving structure body 310, or may be opened in the edge of the receiving structure body 310. The first elastic member 140 may be fixed at a specific position by the fixed separating mechanism 100. The fixed separating mechanism 100 may be manually controlled to be disengaged from the first elastic member 140, or the fixed separating mechanism 100 may be automatically controlled to be disengaged from the first elastic member 140. The carrier device 200 is used for placing objects to be vibration-isolated. The vibration-isolated object comprises a precise scientific instrument and the like.

The vibration isolation system 10 can fix the fixed separating mechanism 100 at a position having a certain height with respect to the ground when operating. One end of the first elastic element 140 is fixed to the fixed separation mechanism 100 by the engaging portion 622, so that the first elastic element 140 is suspended below the fixed separation mechanism 100. The first elastic element 140 suspends the carrier device 200 at an end away from the fixed separating mechanism 100. The carrier device 200 can be used for placing the vibration-isolated object. When the object to be vibration-isolated needs to work under a static condition, after the object to be vibration-isolated is in a static state, the fixed separating mechanism 100 is controlled to separate from the engaging portion 622. Because the first elastic element 140 has a certain length and elasticity, when one end of the first elastic element 140 close to the fixed separating mechanism 100 falls under the action of gravity, the first elastic element 140 generates longitudinal waves to be transmitted to the carrier device 200. Before the longitudinal wave is transmitted to the loading device 200, the vibration-isolated object is completely isolated from the outside, so that the vibration-isolated object can be completely in a state of not being interfered by the outside, and thus the vibration-isolated object can be completely in a state of being completely static relative to the ground.

The object to be vibration-isolated on the loading device 200 can be operated during the period from the separation of the longitudinal wave from the fixed separation mechanism 100 and the first elastic element 140 to the transmission of the longitudinal wave to the loading device 200. The vibration-isolated object can work under good vibration isolation conditions, so that the working accuracy of the vibration-isolated object is improved. After the longitudinal wave is transmitted to the loading device 200, the loading device 200 will fall under the action of gravity. When the engaging portion 622 contacts the receiving hole 621 before the loading device 200 falls, the engaging portion 622 cannot pass through the receiving hole 621. Therefore, the engaging portion 622 is caught by the receiving body 310 and is stopped by the receiving body 310. The elastic body 141 is connected to the engaging portion 622. Therefore, the elastic body 141 cannot continuously fall, and the vibration-isolated object can be prevented from being damaged due to the falling of the loading device 200. In one embodiment, the carrier device 200 can be reset again to the fixed detachment mechanism 100 by the receiving structure 300.

The vibration isolation system 10 according to the embodiment of the present invention includes a first elastic element 140, a fixed separating mechanism 100, a loading device 200, and a receiving structure 300. The first elastic element 140 includes an elastic body 141 and an engaging portion 622. The engaging portion 622 is fixedly connected to one end of the elastic body 141. The engaging portion 622 is detachably attached to the fixed release mechanism 100. The loading device 200 is detachably mounted on one end of the elastic body 141 away from the engaging portion 622. The receiving structure 300 includes a receiving structure body 310 and a receiving hole 621 opened in the receiving structure body 310. When the vibration isolating system is used, the fixed separating mechanism 100 is fixed at a certain height such that the elastic body 141 passes through the receiving hole 621. The receiving structure body 310 is disposed between the engaging portion 622 and the loading device 200. When the engaging portion 622 is separated from the fixed separating mechanism 100, the engaging portion 622 falls down to the receiving structure body 310 by gravity, and the receiving structure body 310 provides support for the engaging portion 622. In the period from the time when the longitudinal wave separated from the fixed and separated mechanism 100 and the engaging portion 622 to the time when the first elastic element 140 is transmitted to the loading device 200, the vibration-isolated object can be completely isolated from the outside, and the vibration-isolated object can be kept in an initial stationary state, so that the vibration isolation effect can be improved, and the working accuracy of the vibration-isolated object can be improved.

In one embodiment, the vibration isolation system 10 further includes a fixing plate 150. The fixing plate 150 is used to mount the fixed release mechanism 100. The fixing and separating mechanism 100 can be installed at a position having a certain height by the fixing plate 150, and thus experiments can be performed in various occasions.

In one embodiment, the vibration isolation system further includes a fixing plate 150. The fixing plate 150 is used to mount the fixed release mechanism 100. The fixing plate 150 may be a rectangular plate or a rod-shaped structure with a narrow width. The fixing plate 150 may be made of wood material, so as to be easily installed in different situations.

Referring to fig. 2, in one embodiment, the fixture 600 further includes a reset mechanism 630. The staging device 200 is fixedly mounted to the reset mechanism 630. The returning mechanism 630 is used to transport the engaging portion 622 fallen on the receiving body 310 to the fixed separating mechanism 100. The reset mechanism may be triggered after the engaging portion 622 falls into the receiving body 310, so as to drive the engaging portion 622 to move upward in the vertical direction.

In one embodiment, the return mechanism 630 includes two second wheels 613 and a steel belt 614. The two second wheels 613 are provided at intervals. The steel belt 614 is sleeved outside the two second wheels 613. The second wheel 613 drives the steel belt 614 to rotate through friction. The receiving structure 300 is fixedly disposed on the steel belt 614. After the second wheel 613 rotates counterclockwise, the steel belt 614 can drive the receiving structure 300 to move in the vertical direction, and the receiving structure 300 can be transported to the initial position.

Referring to fig. 3, in one embodiment, the reset mechanism 630 includes two first pulleys 611 and a timing belt 612. The two first pulleys 611 are disposed at intervals. The timing belt 612 is sleeved outside the first pulley 611. The first rotating wheel 611 is used to drive the synchronous belt 612 to rotate, and the receiving structure 300 is fixedly disposed on the synchronous belt 612. In one embodiment, after the first pulley 611 rotates counterclockwise, the timing belt 612 can drive the receiving structure 300 to move in the vertical direction, and the receiving structure 300 can be transported to the initial position.

Referring to fig. 4, in one embodiment, the fixed separating mechanism 100 includes a rotating shaft 110, a hook portion 120, and a hanging portion 130. The rotating shaft 110 may be used to position the fixed release mechanism 100. The hook 120 is fixedly connected to the rotating shaft 110 for hooking the hanging 130. The suspension 130 is used to connect the rotating shaft 110 and the first elastic element 140. The rotation shaft 110 drives the hook 120 to rotate so that the hook 120 is separated from or connected to the hanging 130.

In one embodiment, when the hook 120 rotates counterclockwise around the rotation shaft 110, the hook 120 is disengaged from the hanging portion 130, and when the hook 120 rotates clockwise around the rotation shaft 110, the hook 120 hooks the hanging portion 130. It is understood that the rotating shaft 110 may be controlled by a motor. The rotation of the rotating shaft 110 is controlled by a motor to drive the hook 120 to rotate. The hook part 120 can be hooked by clockwise rotation of the hook part 120. The hook part 120 is rotated counterclockwise so that the hanging part 130 is released. The hook part 120 may have a hook structure, and one side of the hook structure may be cut. The hanging portion 130 may include a bulbous structure and a neck structure connected to the bulbous structure. The diameter of the spherical structure is larger than the width of the incision. The neck structure has a diameter less than a width of the slit. Clockwise rotation of the hook portion 120 may cause the neck feature to snap into the slit. Since the diameter of the ball-shaped structure is larger than the width of the slit, the hanging part 130 does not fall off from the hooking part 120.

Referring to fig. 5, in one embodiment, the vibration isolation system 10 further includes a pre-stage vibration isolation apparatus 400. The fixing plate 150 is disposed on the fore stage vibration isolating device 400. The pre-stage vibration isolation device 400 is used to reduce the vibration of the fixed separating mechanism 100. The pre-stage vibration isolation apparatus 400 can maintain the fixing plate 150 in a good stationary state. Since the first elastic member 140 is suspended from the fixing plate 150, the first elastic member 140 can have a good initial rest state. The fore stage vibration isolation device 400 may be an elastic buffer device, or may be an active vibration isolation device having an active vibration isolation capability.

In one embodiment, the fore stage vibration isolation device 400 includes a fixed frame 410, a parallel frame 413, and a second elastic member 420. The fixing frame 410 includes a first fixing portion 411. The parallel frame 413 includes a connection portion 414, a swing plate 416, and the fixing plate 150. The connecting portion 414 is disposed parallel to the first fixing portion 411 at an interval. The swing plates 416 and the fixed plate 150 are spaced apart from each other and arranged in parallel, and one end of each swing plate 416 is rotatably connected to the first fixing portion 411. One end of the swing plate 416 and one end of the fixed plate 150 are respectively and rotatably connected to the first fixing portion 411, and the other end of the swing plate 416 and the other end of the fixed plate 150 are respectively and rotatably connected to the connecting portion 414. One end of the second elastic element 420 is connected to the fixing frame 410. The other end of the second elastic member 420 is connected to the parallel frame 413. So that the swing plate 416 and the fixed plate 150 are horizontally disposed under the action of gravity.

The first fixing portion 411 may have a column shape or a plate shape. The connection portion 414 may have a plate shape or a column shape. The connecting portion 414 and the first fixing portion 411 are rotatably connected by the two swing plates 416. That is, both ends of the swing plate 416 may be rotatably mounted to the first fixing portion 411 and the connecting portion 414 by means of pins. Both ends of the fixing plate 150 may be rotatably mounted to the first fixing portion 411 and the connecting portion 414 by means of pins. The first fixing portion 411, the swing plate 416, the fixing plate 150, and the connecting portion 414 may form a parallelogram structure. When the vibration isolation system 10 is horizontally disposed, the first fixing portion 411 is vertically disposed. The parallel frame 413 may droop under gravity. The parallel frame 413 is pulled up by the second elastic member 420, and a proper position can be selected by calculation so that the swing plate 416 and the fixed plate 150 in the parallel frame 413 are in a horizontal position. By changing the weight and position relationship of each element of the vibration isolation system 10, the eigenperiod of the vibration isolation system 10 can be increased, and the vibration isolation effect of the vibration isolation system 10 can be further improved.

In one embodiment, one end of the second elastic element 420 is connected to the first fixing portion 411. The other end of the second elastic member 420 is connected to the swing plate 416 or the fixed plate 150. The position of the end of the second elastic member 420 connected to the wobble plate 416 or the fixed plate 150 may be determined by calculation to increase the eigenperiod of the vibration isolation system 10.

In one embodiment, the fixing frame 410 further includes a second fixing portion 412. The second fixing portion 412 is disposed to intersect with the first fixing portion 411. One end of the second elastic element 420 is connected to the second fixing portion 412, and the other end of the second elastic element 420 is connected to the swing plate 416 or the fixing plate 150.

In one embodiment, the second fixing portion 412 may be disposed perpendicular to the first fixing portion 411. The second fixing portion 412 may be fixedly disposed with the first fixing portion 411. When the vibration isolation system 10 is horizontally disposed, the second fixing portion 412 may serve as a base of the vibration isolation system 10. It is understood that the second elastic member 420 may be a compression spring. The parallel frame 413 may be supported by the compression spring while hanging down by gravity. Therefore, the position relationship between the parallel frame 413 and the second fixing portion 412 can be adjusted, and the balance state of the swing plate 416 can be maintained in a static state according to the length and the elastic characteristics of the compression spring.

In one embodiment, in the vibration isolation system 10, which is horizontally disposed in a static state, the first fixing frame 410 and the parallel frame 413 may be maintained in a rectangular structure. In one embodiment, the second fixing portion 412 may have an opening. The opening may be for the first resilient element 140 to pass through.

Referring to fig. 6, in one embodiment, the vibration isolation system 10 further includes a first feedback control device 500 and a first driving device 560. The first feedback control device 500 is disposed on the parallel frame 413. For monitoring a first relative displacement of the parallel frame 413 with respect to the fixed frame 410 and outputting a first relative displacement signal. The first driving unit 560 is disposed between the fixed frame 410 and the parallel frame 413.

The first driving device 560 is configured to drive the swinging plate 416 or the fixing plate 150 according to the first displacement signal, so that the first relative displacement is zero or approaches zero. The first feedback control device 500 may be disposed on the swing plate 416, the fixed plate 150, or the connecting portion 414. In one embodiment, the parallel frame 413 has a horizontal position limiting function due to the characteristics of a parallelogram. The displacement of the parallel frame 413 in the horizontal direction is small by gravity. The displacement of the wobble plate 416 or the fixed plate 150 in the vertical direction with respect to the second fixed portion 412 can be taken as the first relative displacement. The first driving device 560 may drive the swing plate 416 or the fixed plate 150 to move in a vertical direction, so as to reduce the displacement of the parallel frame 413 in the vertical direction relative to the fixed frame 410.

Referring back to fig. 3, in one embodiment, the connecting portion 414 includes a connecting frame 415. Both ends of the connecting frame 415 are respectively and rotatably connected to the swing plate 416 and the fixing plate 150. The connection frame 415 may be a rectangular frame. Two opposite sides of the rectangular frame may have a rotation structure, and the rotation structure may be connected to the swing plate 416 and the fixed plate 150, respectively. The rectangular frame may rotate relative to the wobble plate 416 and the fixed plate 150.

With continued reference to fig. 3, in one embodiment, the first feedback control device 500 includes a laser emitting element 510, a light focusing element 530, a third elastic element 520, and a signal processing element 540. The laser emitting element 510 is disposed at one side of the connection frame 415. The laser emitting element 510 is used for emitting a laser signal. The light-gathering element 530 is suspended in the connection frame 415 by the third elastic element 520. The light condensing element 530 is used for focusing the laser signal. The signal processing element 540 is disposed in the same linear direction as the light condensing element 530 and the laser emitting element 510. The signal processing component 540 is configured to receive the focused laser signal and output the first relative displacement signal.

Theoretically, the third elastic element 520 is equivalent to the bottom end of an infinite spring suspended vertically, i.e., the equivalent length thereof becomes infinite, and accordingly the eigenperiod also becomes infinite, thereby realizing vibration isolation. After the system is stabilized, theoretically, the connection frame 415 and the light-gathering element 530 remain relatively stationary, and both are stationary in the inertial reference frame, and at this time, the fixed separating mechanism 100 also remains approximately stationary.

The laser emitting element 510 may be a laser, or a collimating lens with a pigtail. The laser emitting element 510 may be coupled with an external light source through an optical fiber. The light condensing elements 530 may be glass beads. The signal processing component 540 may include a displacement detection circuit board and a feedback control circuit board. The displacement detection circuit board may include a two-quadrant detector, or two separate photodiodes, or a position sensitive detector, etc. The laser beam emitted by the laser emitting element 510 is focused on the two-quadrant detector after being focused by the glass beads, and the photocurrent generated by the two photoelectric units of the two-quadrant detector flows into the displacement detection circuit board. And the voltage signal obtained through the differential and amplification processing represents the position of the laser beam on the two-quadrant detector. The first relative displacement may be determined by the position of the laser beam on the two-quadrant detector. The height of the two-quadrant detector can be adjusted according to the position of the glass beads when the displacement detection circuit board is installed.

When the system is initially stable, the laser beam emitted by the laser emitting element 510 is just converged near the center position of the two-quadrant detector through the glass bead, and can be used as a measurement zero point. The displacement detection circuit board can input the power supply signal to the feedback control circuit board to obtain the first relative displacement signal.

In one embodiment, the first feedback control device 500 includes an acceleration sensor 550. The acceleration sensor 550 is disposed on the parallel frame 413. For monitoring the acceleration change of the parallel frame 413. And outputting the first relative displacement signal according to the acceleration change.

In one embodiment, the first driving means 560 comprises a piezoelectric driver 570. The piezoelectric driver 570 includes an output shaft 571. The output shaft 571 is connected to the swing plate 416 or the fixed plate 150, and is used for driving the swing plate 416 to move in the vertical direction. After the piezoelectric driver 570 receives the first relative displacement signal, the output shaft 571 can drive the swing plate 416 or the fixing plate 150 to move in the vertical direction, so as to reduce the first relative displacement.

In one embodiment, the first driving device 560 may be a voice coil motor. The voice coil motor may be composed of a magnet and a coil. The output module of the feedback control circuit board can be a voltage-current conversion circuit. The output end of the coil is connected with the coil of the voice coil motor to provide current for the coil. The coil generates a driving force to drive the swing plate 416 or the fixed plate 150 to rotate, so that the parallel frame 413 can move up and down in a vertical direction.

Referring to fig. 7-8, in one embodiment, the fore stage vibration isolation apparatus 400 includes a first central shaft 430, a primary frame 440, a secondary frame 450, and a plurality of fourth elastic members 460. The primary frame 440 is symmetrically disposed about the first central axis 430. The primary frame 440 includes a first receiving cavity 444. The secondary frame 450 is symmetrically disposed about the first central axis 430. The secondary frame 450 is disposed in the first receiving cavity 444. The secondary frame 450 includes a second receiving cavity 454. The fixing plate 150 is fixed to the secondary frame 450. The axis of the first elastic element 140 coincides with the first central axis 430. The loading device 200 is suspended from the second accommodating cavity 454 by the first elastic element 140. The plurality of fourth elastic members 460 are symmetrically disposed about the first central axis 430. The fourth elastic member 460 is connected between the primary frame 440 and the secondary frame 450 to damp vibration of the fixed separating mechanism 100.

The primary frame 440 and the secondary frame 450 may be axisymmetrical structures. The primary frame 440 and the secondary frame 450 are both symmetrically disposed about the first central axis 430. Both ends of the fourth elastic member 460 are connected to the primary frame 440 and the secondary frame 450, respectively. The primary frame 440 and the frame form a vibration isolation structure. Fixing the fixed separating mechanism 100 to the secondary frame 450 can reduce the vibration of the fixed separating mechanism 100, improve the eigenperiod of the vibration isolation system 10, and improve the vibration resistance of the vibration isolation system 10.

In one embodiment, the primary frame 440 includes a plurality of first side posts 441, a top plate 442, and a first bottom plate 443. The plurality of first side pillars 441 are symmetrically disposed around the first central axis 430 to increase the balance of the primary frame 440. The top plate 442 and the first bottom plate 443 are respectively and fixedly disposed at both ends of the plurality of first side columns 441. The plurality of first side columns 441 and the top plate 442 and the first bottom plate 443 constitute the first accommodation cavity 444. In one embodiment, the number of the first side posts 441 is three. The first side post 441 may have a plate shape or a cylindrical shape.

In one embodiment, the secondary frame 450 includes a plurality of second side posts 451, a second bottom plate 453, and the fixing plate 150. The plurality of second side posts 451 are symmetrically disposed about the first central axis 430 to increase the balance of the secondary frame 450. The fixing plate 150 and the second base plate 453 are respectively fixedly disposed at both ends of the plurality of second side posts 451. The plurality of second side posts 451, the fixing plate 150, and the second bottom plate 453 constitute the second receiving chamber 454.

In one embodiment, both ends of the plurality of fourth elastic members 460 are respectively connected to the top plate 442 and the second bottom plate 453. The secondary frame 450 may be suspended from the first receiving cavity 444.

In one embodiment, the vibration isolation system 10 further comprises a second feedback control device 580 and the second drive device 590. The second feedback control device 580 is disposed on the primary frame 440, and the second feedback control device 580 is configured to monitor a second relative displacement between the primary frame 440 and the secondary frame 450, and output a second relative displacement signal. The second driving device 590 is disposed between the primary frame 440 and the secondary frame 450. The second driving device 590 is configured to drive the second driving device 590 according to the second relative displacement signal, so that the second relative displacement is zero or approaches zero. The specific embodiments of the second feedback control device 580 and the second driving device 590 may be the same as the first feedback control device 500 and the first driving device 560, and are not described herein again.

In one embodiment, a horizontal limiting structure 480 for limiting the horizontal movement of the secondary frame 450 in the first receiving cavity 444 is disposed between the primary frame 440 and the secondary frame 450. The horizontal limiting structure 480 may be a vertical slide disposed between the primary frame 440 and the secondary frame 450. The vertical slides may limit the vertical movement of the secondary frame 450 only within the primary frame 440 to reduce the displacement of the vibration isolation system 10 in the horizontal direction.

Referring to fig. 9, in one embodiment, the fore stage vibration isolation apparatus 400 includes a fixed frame 470. The fixing frame 470 includes a second central shaft 471, a plurality of side plates 472, the fixing plate 150, a plurality of torsion bars 474, a third base plate 475, and a plurality of pressing bars 476. The plurality of side plates 472 are symmetrically disposed about the second central axis 471. The fixing plate 150 is spaced apart from the side plate 472, and the axis of the first elastic element 140 coincides with the second central axis 471. The fixing plate 150 is used to fix the fixed separating mechanism 100. The fixed separating mechanism 100 may be disposed on the second central shaft 471. The torsion bars 474 are arranged symmetrically and spaced around the second central axis 471. Both ends of each torsion bar 474 are rotatably connected to one of the side plates 472 and the fixing plate 150, respectively. The third base plate 475 is attached to an end of the side plates 472 remote from the torsion bars 474. The plurality of pressing rods 476 are symmetrically arranged around the second central axis 471 at intervals. Both ends of each of the pressing rods 476 are fixedly connected to one of the torsion bars 474 and the third base plate 475, respectively. When the axial load experienced by the strut 476 is less than the critical load value for buckling it, the strut 476 only undergoes circumferential compression deformation and no lateral bending deformation. However, when the axial load is slightly greater than the critical load to buckle, the strut 476 flexes unstably and is now in equilibrium. A slight change in axial load at this time may change the axial deformation, so the strut 476 may be equivalent to a negative length spring. Through calculation, when the pressure rod 476 bears a certain gravity, the pressure rod 476 has a tiny equivalent spring stiffness, and the property enables the pressure rod 476 to isolate the vibration for the fixing plate 150 and further isolate the vibration for the vibration-isolated object.

Referring to fig. 10, in one embodiment, the object may be an absolute gravimeter. After the primary vibration isolation device is stabilized 400, the absolute gravimeter suspended below the first elastic element 140 may be in an initial equilibrium state. A trigger signal is sent out before each measurement of the absolute gravimeter. The trigger signal controls the fixed release mechanism 100 to release the first elastic element 140. After the absolute gravimeter measurement is completed, the reset mechanism 630 transports the first elastic element 140 falling on the receiving structure 300 to the fixed separating mechanism 100 again. The fixed separating mechanism 100 can hook the first elastic element 140 again, and enter the next working cycle.

In one embodiment, the initial steady state may be determined by the first feedback control device 500 and the first driving device 560, or the second feedback control device 580 or the second driving device 590. The relative movement of the pre-stage vibration isolating device 400, which affects the initial rest state of the object to be isolated, can be fed back to the first driving device 560 or the second driving device 590 by the first feedback control device 500 or the second feedback control device 580. The first driving device 560 or the second driving device 590 may drive the pre-stage vibration isolation device 400 to move, so as to slow down the relative movement, and to make the initial state before the vibration isolation object works still as much as possible.

In one embodiment, the fixed separator mechanism 100 may be automatically triggered to release the first resilient element 140 after the pre-stage vibration isolation apparatus 400 reaches a predetermined static level. The return mechanism 400 may automatically transport the first elastic element 140 to the fixed release mechanism 100 after receiving the first elastic element 140. The reset mechanism 400 may be triggered to send an operating signal to the fixed release mechanism 100. After the first elastic element 140 touches the fixed separating mechanism 100, the fixed separating mechanism 100 hooks the first elastic element 140.

Referring to fig. 11, in one embodiment, the first feedback control device 500 or the second feedback control device 580 may also be a capacitive displacement sensor 700. The capacitive displacement sensor 700 may include a mass 710, and one end of the mass 710 may be connected to a middle moving plate 720, and the other end may be connected to the third elastic element 520. The capacitive displacement sensor 700 may further include an upper stationary plate 730 and a lower stationary plate 740. The middle movable pole plate 720 is disposed between the upper fixed pole plate 730 and the lower fixed pole plate 740. The middle movable plate 720 may form a plate capacitor with the upper fixed plate 730 and the lower fixed plate 740. The output signal of the plate capacitor may reflect the relative motion state of the pre-stage vibration isolation device 400.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims

1. A vibration isolation system, comprising:

the first elastic element (140) comprises an elastic main body (141) and a clamping part (622), wherein the clamping part (622) is fixedly connected to one end of the elastic main body (141);

a fixed separation mechanism (100), wherein the engagement part (622) is detachably mounted on the fixed separation mechanism (100);

the loading device (200) is detachably arranged at one end of the elastic main body (141) far away from the clamping part (622); and

the bearing structure (300) comprises a bearing main body (310) and a bearing hole (621) formed in the bearing main body (310), the bearing hole (621) is used for enabling the elastic main body (141) to penetrate through, the bearing main body (310) is located between the clamping portion (622) and the loading device (200), when the clamping portion (622) is separated from the fixed separating mechanism (100), the clamping portion (622) falls to the bearing main body (310) under the action of gravity, and the bearing main body (310) provides support for the clamping portion (622);

when one end of the first elastic element (140) close to the fixed separation mechanism (100) falls under the action of gravity, the first elastic element (140) generates longitudinal waves and conducts the longitudinal waves to the loading device (200), and before the longitudinal waves are transmitted to the loading device (200), the loading device (200) is in a vibration isolation state.

2. The vibration isolation system according to claim 1, further comprising a fixing plate (150), said fixing plate (150) being used for mounting said fixed separating mechanism (100).

3. The vibration isolation system according to claim 1, further comprising a fixture (600), wherein said receiving structure (300) is mounted to said fixture (600).

4. The vibration isolation system according to claim 3, wherein the fixing device (600) further comprises a return mechanism (630), the loading device (200) is fixedly mounted to the return mechanism (630), and the return mechanism (630) is used for transporting the engaging portion (622) fallen on the receiving body (310) to the fixed separating mechanism (100).

5. The vibration isolation system according to claim 4, wherein the return mechanism (630) comprises:

two first rotating wheels (611) arranged at intervals;

the synchronous belt (612) is sleeved on the outer side of the first rotating wheel (611), the first rotating wheel (611) is used for driving the synchronous belt (612) to rotate, and the bearing structure (300) is fixedly arranged on the synchronous belt (612).

6. The vibration isolation system of claim 4, wherein the return mechanism (630) comprises

Two second rotating wheels (613) which are arranged at intervals;

the steel belt (614) is sleeved outside the two second rotating wheels (613), and the second rotating wheels (613) drive the steel belt (614) to rotate through friction;

the bearing structure (300) is fixedly arranged on the steel belt (614).

7. The vibration isolation system according to claim 1, wherein the fixed separation mechanism (100) comprises:

a rotating shaft (110);

a hook part (120) fixedly connected with the rotating shaft (110); and

the hanging part (130) is used for connecting the hanging hook part (120) and the first elastic element (140), and the rotating shaft (110) drives the hanging hook part (120) to rotate so that the hanging hook part (120) is separated from or connected with the hanging part (130).

8. The vibration isolation system of claim 2, further comprising:

the front stage vibration isolation device (400), the fixing plate (150) is arranged on the front stage vibration isolation device (400), and the front stage vibration isolation device (400) is used for damping vibration of the fixing plate (150).

9. The vibration isolation system of claim 8, wherein said pre-stage vibration isolation apparatus (400) comprises:

a fixing frame (410) including a first fixing portion (411);

a parallel frame (413) comprising:

a connecting part (414) arranged in parallel to the first fixing part (411) at a distance;

the swinging plate (416) and the fixing plate (150) are arranged in parallel at intervals, one end of the swinging plate (416) and one end of the fixing plate (150) are respectively and rotatably connected to the first fixing part (411), and the other end of the swinging plate (416) and the other end of the fixing plate (150) are respectively and rotatably connected to the connecting part (414); and

and one end of the second elastic element (420) is connected to the fixed frame (410), and the other end of the second elastic element is connected to the parallel frame (413) so that the swinging plate (416) and the fixing plate (150) can be horizontally arranged under the action of gravity.

10. The vibration isolation system according to claim 9, wherein one end of the second elastic member (420) is connected to the first fixing portion (411), and the other end of the second elastic member (420) is connected to the swing plate (416) or the fixed plate (150).

11. The vibration isolation system according to claim 10, wherein said mount (410) further comprises:

the second fixing portion (412) is crossed with the first fixing portion (411), one end of the second elastic element (420) is connected to the second fixing portion (412), and the other end of the second elastic element (420) is connected to the swinging plate (416) or the fixing plate (150).

12. The vibration isolation system according to claim 10 or 11, further comprising:

the first feedback control device (500) is arranged on the parallel frame (413) and used for monitoring the first relative displacement of the parallel frame (413) relative to the fixed frame (410) and outputting a first relative displacement signal; and

the first driving device (560) is arranged between the fixed frame (410) and the parallel frame (413) and used for driving the parallel frame (413) to move according to the first relative displacement signal so as to enable the first relative displacement to be zero or approach to zero.

13. The vibration isolation system according to claim 12, wherein the connecting portion (414) includes:

a connecting frame (415), wherein two ends of the connecting frame (415) are respectively rotated on the swinging plate (416) and the fixing plate (150);

the first feedback control device (500) includes:

a laser emitting element (510) disposed at one side of the connection frame (415) for emitting a laser signal;

a third elastic element (520) and a light-focusing element (530), wherein the light-focusing element (530) is suspended in the connecting frame (415) through the third elastic element (520) and is used for focusing the laser signal; and

and the signal processing element (540) is arranged in the same linear direction with the light condensing element (530) and the laser emitting element (510), and is used for receiving the focused laser signal and outputting the first relative displacement signal.

14. The vibration isolation system according to claim 12, wherein the first feedback control device (500) comprises an acceleration sensor (550), the acceleration sensor (550) is disposed on the parallel frame (413) for monitoring an acceleration change of the parallel frame (413) and outputting the first relative displacement signal according to the acceleration change.

15. The vibration isolation system according to claim 12, wherein the first driving means (560) comprises:

a piezoelectric driver (570) comprising:

the output shaft (571) is connected with the swing plate (416) or the fixing plate (150) and used for driving the swing plate (416) or the fixing plate (150) to move in the vertical direction.

16. The vibration isolation system of claim 8, wherein the pre-stage vibration isolation apparatus (400) comprises:

a first central shaft (430);

a primary frame (440) symmetrically disposed about the first central axis (430) and including a first receiving cavity (444);

a secondary frame (450) symmetrically arranged around the first central axis (430) and disposed in the first accommodating cavity (444), wherein the secondary frame (450) comprises a second accommodating cavity (454), the fixing plate (150) is fixedly disposed on the secondary frame (450), an axis of the first elastic element (140) coincides with the first central axis (430), and the carrier device (200) is suspended from the second accommodating cavity (454) through the first elastic element (140); and

a plurality of fourth elastic members (460) symmetrically disposed around the first central axis (430) and connected between the primary frame (440) and the secondary frame (450) to damp vibration of the fixed release mechanism (100).

17. The vibration isolation system of claim 16,

the primary frame (440) includes:

a plurality of first side columns (441) symmetrically disposed about the first central axis (430);

a top plate (442) and a first bottom plate (443) respectively fixed to both ends of the first side pillars (441), the top plate (442), and the first bottom plate (443) constituting the first accommodation chamber (444);

the secondary frame (450) comprises:

a plurality of second side posts (451) symmetrically disposed about the first central axis (430);

a second bottom plate (453) and the fixing plate (150) respectively fixedly disposed at both ends of the plurality of second side posts (451), the fixing plate (150), and the second bottom plate (453) constituting the second receiving chamber (454); and

both ends of the plurality of fourth elastic members (460) are connected to the top plate (442) and the second bottom plate (453), respectively.

18. The vibration isolation system of claim 16, further comprising:

a second feedback control device (580), wherein the second feedback control device (580) is arranged on the primary frame (440) and is used for monitoring a second relative displacement of the primary frame (440) and the secondary frame (450) and outputting a second relative displacement signal; and

and the second driving device (590) is arranged between the primary frame (440) and the secondary frame (450) and is used for driving the second driving device (590) according to the second relative displacement signal so as to enable the second relative displacement to be zero or approach zero.

19. The vibration isolation system according to claim 16, wherein a horizontal limiting structure (480) for limiting the horizontal movement of the secondary frame (450) within the first receiving chamber (444) is provided between the primary frame (440) and the secondary frame (450).

20. The vibration isolation system of claim 8, wherein the pre-stage vibration isolation apparatus (400) comprises:

a fixing frame (470) comprising:

a second central axis (471),

a plurality of side plates (472) symmetrically disposed about the second central axis (471);

the fixing plate (150) is arranged at a distance from the side plate (472), and the axis of the first elastic element (140) is coincided with the second central shaft (471);

a plurality of torsion bars (474) symmetrically arranged around the second central axis (471) at intervals, wherein both ends of each torsion bar (474) are rotatably connected to one side plate (472) and the fixing plate (150), respectively;

a third base plate (475) connected to an end of the side plates (472) remote from the torsion bars (474); and

and the pressing rods (476) are symmetrically arranged around the second central shaft (471) at intervals, and two ends of each pressing rod (476) are respectively and fixedly connected with the torsion bar (474) and the third base plate (475).