CN101808181B - Harmonic drive rotary scanning system - Google Patents
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- CN101808181B CN101808181B CN2010101242298A CN201010124229A CN101808181B CN 101808181 B CN101808181 B CN 101808181B CN 2010101242298 A CN2010101242298 A CN 2010101242298A CN 201010124229 A CN201010124229 A CN 201010124229A CN 101808181 B CN101808181 B CN 101808181B
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Abstract
The invention provides a harmonic drive rotary scanning system, which comprises a central drive block, spiral beams and a fixed frame. The harmonic drive rotary scanning system adopts a transmission structure with a pair of centrosymmetric spiral beams, the top ends of the spiral beams are fixedly connected with the central drive block, and the fixing positions of the top ends of the spiral beams are uniformly distributed along the periphery of the upper edge of the central drive block and are uniformly arranged around the central block with identical spiral lengths and with the central drive block as a center; the terminals of the spiral beams are fixedly connected with the fixed frame through a rotating hinge which is formed by directly processing a material used in the spiral beam bodies, a driver is respectively arranged on each spiral beam and close to the terminal of the corresponding spiral beam, two solenoid drivers in orthogonal directions in a plane are used for driving and positioning the drivers, the drivers are connected with a scanning head through the spiral beams, the spiral beams can amplify motion of the drivers and transmit the motion of the drivers to the scanning head, and an amplification transmission structure can amplify a motion trip through static leverage effect and dynamic resonance effect.
Description
Technical field
The present invention relates to two and three dimensions scanning system technology.
Background technology
3 D scanning system is the system that carries out three dimensions (coordinate) stereoscan according to time sequencing, and this system can carry out three-dimensional and drive as driver, realizes the location or the track scanning of solid space; And as transducer, motion that then can be through scanning system is with three-dimensional position and movable information converts coordinate into and momental signal is exported.3 D scanning system is mainly used in three-dimensional processing and measuring task; In field extensive application such as graph scanning, printing, information stores (addressing), image processing, microscopic analysis, photoetching, track following, inertia sensing and aerospace telemetries, two dimension or 3 D scanning system have all been used like optical driver of computer, hard disk and printer, AFM and scanning confocal microscope, mechanical engraving machine and scanning photoetching machine etc.
The one-dimensional scanning system can be divided into rotation sweep and linear scanning two major types, and rotation sweep is generally used for polar-coordinate position-fixing system, and linear scanning is generally used for the rectangular coordinate navigation system.3 D scanning system needs the combination of the one-dimensional scanning system of three quadratures (or nonopiate more than three) to use, to realize three-dimensional scan synthesis.For example can be through the 3-D scanning of a rotation sweep and two linear scanning realization Cylindrical Coordinate; Also can be through the 3-D scanning of two rotation sweeps and a linear scanning realization spherical coordinates mode, the linear scanning of three quadratures is the 3-D scanning of form right angle coordinate mode then.
Prior art often adopts the compound mode of multilayered structure when realizing 3 D scanning system; Be that the one-dimensional scanning structure need be connected through a rigid border with another dimension Scan Architecture; This combination has a series of shortcomings: the one, and physical dimension is bigger, is not easy to realize microminiaturized; The 2nd, extra frame structure has increased motional inertia, and will consume driving power, is unfavorable for realizing high-velocity scanning; The 3rd, overall structure is asymmetric, is not easy to realize the coordinated movement of various economic factors of quadrature bidimensional, particularly will realize the helical scanning mode, and this shortcoming will be more outstanding.Therefore helical scanning system all adopts a rotation sweep to add the compound mode of one dimension linear scanning mostly; But this structure is slower in the sweep speed of pivot; And the accuracy of alignment of pivot and scanning straight line has very big influence to the scanning result of central point; A bigger problem is that such bidimensional scanning often needs substrate and probe to make one-dimensional scanning respectively, otherwise the connecting line of probe will produce the winding problem.
Traditional sieve has just utilized people's the shake technology that realize sieve rotation of both arms through coordinating.In the modern miniaturization optical table; Have and adopt a plurality of hinged linear actuators to realize the three-dimensional structure of verting and driving; This inclining rotary mechanism utilization is the verting of asymmetric stretch implementation platform of a plurality of support arms that the corolla shape arranges along circumference; But this structure is three-dimensional Tiebar structure, is difficult to realize integrated making.
In CD drive, the system that adopts four voice coil motors (permanent magnetism-coil actuator) that optical head is carried out two-dimentional precision positioning is arranged, but this system adopts short straight beam to connect moving mass, movement travel is very little.In MEMS (MEMS), there is the folded beam that adopts high-aspect-ratio to connect the design that the centroplasm gauge block is realized the two dimension acceleration sensing; In MOEMS (MOEMS), the design that utilizes three or four the two-dimentional micro mirrors that vert of belt beams realization is arranged, but still do not realize the design of two-dimentional rotation sweep or three-dimensional balanced scanning.
Summary of the invention
The present invention is directed to the deficiency that prior art exists, propose a kind of harmonic drive rotary scanning system, this system is integrated scanning system, can realize two-dimentional rotation sweep and three-dimensional balanced scanning.
Technical scheme of the present invention is following:
A kind of harmonic drive rotary scanning system, it adopts a kind of rotational symmetric spiral beam to form the amplification drive mechanism, and said amplification drive mechanism is through the amplification of static leverage with dynamic resonance effect realization movement travel.
Said system comprises centre-driven piece, spiral beam, driver and fixed border;
Said centre-driven piece is positioned at the center of whole system; Said spiral beam adopts one of 2,3,4,6 or 8 mode to arrange respectively; The top of spiral beam is fixedly connected on respectively on the centre-driven piece; And circumference evenly distributes in centre-driven piece upper edge in the fixed position of spiral beam; And is pivot with identical helix length with the centre-driven piece, evenly be centered around the centre-driven piece around; The end of spiral beam through by spiral beam bulk material directly the turning joint and the fixed border of processing fix, and on every spiral beam near the terminal position installation of driver, the spiral beam is driven and locatees;
Said driver adopts electromagnetic driver, electrostatic actuator, piezoelectric actuator, magnetic telescopic driver, photoproduction stress drive device or electro;
Said centre-driven piece is through center mounting hole scanning constant head, and the spiral beam amplifies the movement travel of driver, and passes motion to probe.
The depth-to-width ratio of said spiral beam is 5-20: 1.
The present invention is an a kind of integrated scanning system, realizes rotation sweep through resonant drive, has compact conformation, and controllability is good, and scanning accuracy is high, can adopt multiple driver, and can further realize series of advantages such as three-dimensional balanced scanning.
Description of drawings
Fig. 1 is the structure chart that adopts the harmonic drive rotary scanning system of Electromagnetic Drive
Fig. 1 (a) is a front view, and Fig. 1 (b) is a front view, and Fig. 1 (c) is the A-A profile.
Wherein, the 1st, centre-driven piece, the 2nd, probe installing hole; The 3rd, spiral beam, the 4th, turning joint; The 5th, drive coil, the 6th, permanent magnet; The 7th, fixed border, the 8th, frame installing hole.
Fig. 2 is the layout plan of spiral beam
Fig. 2 (a) is an individual layer double helix girder construction, and Fig. 2 (b) is individual layer four spiral girder constructions, and Fig. 2 (c) is an individual layer triple helical girder construction, and Fig. 2 (d) is individual layer six spiral girder constructions, and Fig. 2 (e) is lamination eight spiral girder constructions.
Fig. 3 is the structure chart of 3 D scanning system
Fig. 3 (a) is a front view, and Fig. 3 (b) is the E1 partial enlarged drawing.
Wherein, the 1st, centre-driven piece, the 2nd, probe installing hole; The 3rd, spiral beam, the 4th, turning joint; 5-1 is a planar drive coil, and 5-2 is the vertical drive coil, the 6th, and permanent magnet, the 7th, fixed border, the 8th, frame installing hole.
Fig. 4 is the structure chart of static driven scanning system
Fig. 4 (a) is a front view, and Fig. 4 (b) is the E2 partial enlarged drawing.
Wherein, the 1st, centre-driven piece, the 2nd, probe installing hole; The 3rd, spiral beam, the 4th, turning joint; The 9th, moving electrode, 9-1 are insulating barriers, the 10th, and fixed electrode, 10-1 are insulating barriers; The 7th, fixed border, the 8th, frame installing hole.
Fig. 5 is the structure chart of Piezoelectric Driving scanning system
Fig. 5 (a) is a front view, and Fig. 5 (b) is the E3 partial enlarged drawing.
Wherein, the 1st, centre-driven piece, the 2nd, probe installing hole; The 3rd, the spiral beam; The 11st, piezoelectric material layer, 11-1 and 11-2 are surface electrodes; The 7th, fixed border, the 8th, frame installing hole.
Fig. 6 is the structure chart of magnetostriction driven sweep system
Fig. 6 (a) is a front view, and Fig. 6 (b) is the E4 partial enlarged drawing.
Wherein, the 1st, centre-driven piece, the 2nd, probe installing hole; The 3rd, the spiral beam; The 12nd, the magnetostrictive material layer, the 13rd, electromagnet, 13-1 are the electromagnet magnetic cores, 13-2 is an electromagnet coil; The 7th, fixed border, the 8th, frame installing hole.
Fig. 7 is the structure chart of photoproduction stress drive scanning system
Fig. 7 (a) is a front view, and Fig. 7 (b) is the E5 partial enlarged drawing.
Wherein, the 1st, centre-driven piece, the 2nd, probe installing hole; The 3rd, the spiral beam; The 14th, photoproduction stress material layer, the 15th, light source; The 7th, fixed border, the 8th, frame installing hole.
Fig. 8 is the structure chart of semiconductor heat effect driven sweep system
Fig. 8 (a) is a front view, and Fig. 8 (b) is the E6 partial enlarged drawing.
Wherein, the 1st, centre-driven piece, the 2nd, probe installing hole; The 3rd, the spiral beam; The 16th, thermal strain material layer, the 17th, electrothermal semiconductor lamella; The 7th, fixed border, the 8th, frame installing hole.
Fig. 9 is the dot chart of non-homogeneous scanning.
Figure 10 is the dot chart that evenly scans.
Embodiment
Specify content of the present invention below in conjunction with accompanying drawing:
It is as shown in Figure 1 that the present invention proposes harmonic drive rotary scanning system, and wherein 1 for being positioned at the centre-driven piece at Scan Architecture center, and this centre-driven piece 1 is the center of all spiral beams 3, and there is installing hole 2 at the center of this centre-driven piece 1, and probe can be installed.3 is four rotational symmetric spiral beams with high-aspect-ratio (degree of depth is about 10/1 with the ratio of width); The top of spiral beam 3 is fixedly connected on the centre-driven piece 1; Their fixed position evenly distributes at centre-driven piece 1 upper edge circumference; And with identical helix length, be pivot with centre-driven piece 1, be evenly arranged in centre-driven piece 1 around.The end of spiral beam 3 is fixed on the fixed border 7 through turning joint 4 respectively.At the root of four spiral beam 3 lateral surfaces the place of hinge (promptly near); Fixedly mount four drive coils 5 respectively; Be installed with four permanent magnets 6 at fixed border 7 medial surfaces over against the place of four coils, these permanent magnets 6 constitute the electromagnetic driver of voice coil motor type with drive coil 5.Fixed border 7 is square frame, is rigid border, can support whole scanning system, and can be fixed on the external base through four installing holes that are uniformly distributed with 8.Except that drive coil 5 and permanent magnet 6 need to install; Whole scanning system is integrated; Can adopt the high resiliency sheet material (like elasticity plastics, metal, pottery or glass preferably) of a uniform thickness; Make through accurate (machinery) process technology, also can carry out one-shot forming and make through casting method.
Below ins and outs of the present invention and technique effect are specifically described:
Spiral beam drive mechanism: theoretical according to cantilever beam, under the stressing conditions of top, the displacement of beam and the first power of deck-siding are inversely proportional to, and are directly proportional with the cube of beam length; The cube thick with beam is inversely proportional to, and the big local stress of displacement is less, and the little local stress of displacement is big; Concentrate for fear of stress, realize the even distribution of stress, and obtain reliable power transmission; Can the rigidity of spiral beam be reduced gradually the width gradual change (subtracting narrow gradually) of spiral beam thereupon, thereby realize that the top distortion is big with the length increase; Can realize bigger movement travel, and bottom intensity is big, can bear than large driving force.The spiral beam of drive mechanism of the present invention is by the rotation symmetrical arrangement, and number is generally 4, but also can be less than or more than 4, four girder constructions can realize quadrature drive, and kinematic dexterity, stability and controllability are all better; The structure motion flexibility that is less than four beams is bigger, but stability is relatively poor relatively; Many girder constructions can be regarded as the composite beam structure, and its stability is better, but kinematic dexterity descends to some extent.7 of fixed borders can adopt regular polygon or circle.The structure that adopts 2 spiral beams is shown in Fig. 2 (a), and the structure that adopts 4 spiral beams is shown in Fig. 2 (b), and the structure that adopts 3 spiral beams is shown in Fig. 2 (c), and the structure that adopts 6 spiral beams is shown in Fig. 2 (d).In addition; Can adopt the structure of the more spiral beams of method realization of lamination; Shown in Fig. 2 (e); With the Scan Architecture of two four identical spiral beams overlapping (centre can keep certain interval) up and down, and the frame of double-layer structure is rigidly fixed with the centre scan piece be connected, then constitute the Scan Architecture of one eight spiral beam.
Turning joint: turning joint 4 is to the structure of spiral beam 3 bulk materials through directly shaping; Can be bi-concave structure along the bearing of trend of spiral beam 3 roots, as shown in Figure 1, also can be perpendicular to the bi-concave structure on the spiral beam root bearing of trend; But in order to realize bigger rotational angle; Need long hinge, can consider to adopt arc-shaped structure to prolong the deformation place of hinge, reduce stress and concentrate.As shown in Figure 3, turning joint 4 also can be the circular arc turning joint.Simultaneously, the circular arc turning joint also has certain flexible in the Z direction, can constitute the three-dimensional activity hinge.In addition, turning joint 4 adopts arc structure, and makes its stiff end in permanent magnet one side, then can utilize the push-and-pull stiffness difference of hinge, and bucking coil is recommended the difference of electromagnetic actuation force when driving, and the symmetry that makes Drive Structure is with linear better.Certainly; Turning joint also can adopt commentaries on classics spring or rotating shaft replacement, and (root that is the spiral beam is fixed on the fixed border through a rotating shaft; And the root of spiral beam can freely be rotated around the shaft), when adopting the commentaries on classics spring structure, the driving mechanism of spiral beam is equivalent to pointer galvanometer structure; When adopting pivot structure, the driving mechanism of spiral beam adopts usually and waves motor configuration.
The realization of 3-D scanning: can know through the harmonious response analysis of mode; High-aspect-ratio spiral girder construction has the identical rigidity resonant frequency of being close at three orthogonal coordinates direction of principal axis; And very big difference is arranged with other resonance mode; Therefore spiral girder scanning system not only can realize the two-dimensional scan of symmetry fully in the plane, and can realize balanced 3-D scanning.As shown in Figure 3; The realization of 3-D scanning can be installed another coil actuator along Z-direction (perpendicular to the direction of the plane of scanning motion) through the root at spiral beam 3; Can realize simultaneously that then the X/Y direction in the plane drives and the driving of Z direction, and then realize the 3-D scanning of centre-driven piece 1.
Electromagnetic driver and type of drive: drive coil 5 constitutes an electromagnetic driver with corresponding permanent magnet 6; This driver generates an electromagnetic field through the electric current of flowing through coil; And produce with the magnetic field of permanent magnet and to interact, this active force drive coil produces and quickens or retarded motion.The direction of winding of two electromagnetic driver coils on the same direction (X-direction or Y direction) (each coil on two spiral beams of symmetry) is opposite; Thereby the use of can connecting, when a same current was added on two coils, one of them coil produced thrust with corresponding permanent magnet; And another coil produces pulling force with corresponding permanent magnet; Drive thereby form a kind of push-pull type, it makes a concerted effort can drive the deflection of spiral beam for unidirectional actuating force; And the transmission through the spiral beam, make drive block realize the one-dimensional scanning motion of this direction.Employing coil-permanent magnet driver not only can drive, and can carry out position and velocity pick-up, thereby can also realize driving more accurately through FEEDBACK CONTROL, and promptly this driver both can carry out the open loop driving and also can carry out the closed loop driving.Scanning system shown in Figure 1 has only the electromagnetic driver of X axle and Y axle, thereby can only drive the spiral beam and do the deflection in the plane, makes probe do the scanning in the plane; Scanning system shown in Figure 3 in the plane is arranged (X axle and Y direction) driver (this driver by planar drive coil 5-1 and over against permanent magnet 6 constitute); Also have Z-direction electromagnetic driver (this driver by planar drive coil 5-2 and over against another permanent magnet constitute); Thereby can drive the spiral beam do in the plane with the plane outside the deflection of (Z-direction); Make probe make 3-D scanning, (figure is last only to have drawn a permanent magnet, and another permanent magnet is outside the plane of scanning motion).
The realization of the resonance kind of drive: this centrosymmetric spiral sweep system has identical resonance mode at the x of quadrature direction of principal axis with y direction of principal axis (or two diagonals); Its resonance frequency is same certain value; When the current signal that applies in a pair of drive coil of this direction is the oscillator signal (like sine or cosine signal) of same frequency; Coil drive power will make scanning system generation resonance, produce the one dimension vibration (being the one-dimensional scanning motion) of large amplitude.If ignore damping force, then resonant drive can realize the vibration that amplitude increases progressively in time, and this vibration is synthetic through two dimension, can be used to realize helical scanning.Having under the vibration damping situation, can compensate damping through external signal, thus the vibratory drive of realization undamped or specific damping characteristic.
The realization of multiple scan mode: when the x direction of principal axis applies identical drive signal (like sine or cosine signal) with two pairs of coils on the y direction of principal axis, scanning block is done the linear scanning campaign of the diagonal of 45.A pair of coil on the x direction of principal axis applies quick sweep signal (sinusoidal signal higher like frequency), and a pair of coil on the y direction of principal axis is when applying slow scanning signal (sinusoidal signal lower like frequency), and scanning block is done the motion of raster pattern flat scanning.A pair of coil on the x direction of principal axis applies sinusoidal drive signals; And a pair of coil on the y direction of principal axis is when applying the cosine drive signal; Scanning block is done circular scanning campaign (being rotation sweep), if sweep radius increasing or decreasing in time then can be realized helical scanning.Several kinds of scan modes of this scanning system are referring to table 1.
Table one scan system drive mode and scan mode
| Numbering | X axle drive signal | Y axle drive signal | Z axle drive signal | The |
| 1 | Sinusoidal with frequently | Sinusoidal with frequently | / | + 45 ° of |
| 2 | With frequency cosine | With frequency cosine | / | -45 ° of |
| 3 | High frequency sinusoidal (cosine) | Low frequency sinusoidal (cosine) | / | The raster pattern flat scanning |
| 4 | Sinusoidal with frequently | With frequency cosine | / | |
| 5 | It is sinusoidal to become amplitude | Become amplitude cosine | / | Spiral |
| 6 | High frequency sinusoidal (cosine) | Low frequency sinusoidal (cosine) | The linear step inlet signal | The quadrature 3- |
| 7 | It is sinusoidal to become amplitude | Become amplitude cosine | The linear step inlet signal | Three-dimensional cylindrical coordinates scanning |
| 8 | It is sinusoidal to become amplitude | Become amplitude cosine | Non-linear stairstep signal | The scanning of three-dimensional ball coordinate |
The realization of uniform planar scanning: when carrying out snail scanning, usually hope to realize evenly (dot matrix) scanning, promptly the time of staying of drive block each point (tiny area) on the plane is identical.The uniformity of helical scanning in the tangential depends on the rotation sweep linear velocity, according to analysis, if scanning angle is directly proportional with the square root of time, then can realize at the uniform velocity rotation sweep, thereby can realize the scan uniformity of tangential.Helical scanning uniformity radially depends on pitch; The helix of uniform pitch can realize that track while scan is radially uniformity (be trajectory radially by the pitch five equilibrium); According to analysis, have only radial velocity to be directly proportional and then can realize the helix of uniform pitch with tangential velocity.Figure 10 is the dot chart that evenly scans, and as a comparison, Fig. 9 has provided the dot chart of non-homogeneous scanning, and in general, evenly scanning lattice is that rectilinear scanner hopes to obtain.
Other driver and type of drive: driver that other is possible or type of drive comprise that static driven, Piezoelectric Driving, magnetostriction driving, photoproduction stress drive and heat drive; The similar of static driven and coil-permanent magnet driver wherein; Adopt the interactional bipolar polarization active force that separates; And photoproduction stress drive, heat driving and magnetostriction type of drive and Piezoelectric Driving similar, the mode that adopts expansion or blockage effect to make body stress produces driving action.All these structures all can realize driving and the sensing effect simultaneously, thereby can realize the FEEDBACK CONTROL of moving.
Static driven mode: adopt the scanning system of static driven mode as shown in Figure 4; Electrostatic actuator is made up of stationary electrode 10 and moving electrode 9, adopts comb structure, and wherein moving electrode 9 is fixed on the terminal outside of spiral beam through an insulating barrier 9-1; 10 of fixed electrodes are fixed on fixed border 7 inboards through another insulating barrier 10-1; Relative with moving electrode 9 positions, both cooperate formation comb electrode structure, through on two electrodes, applying voltage; Then will produce electrostatic attraction or repulsion between the electrode, this active force drives the spiral beam and produces deflection.Comb structure can increase battery lead plate area and the linearity of improving driver, and electrostatic actuator is very responsive to electrode gap distance, and the requirement on machining accuracy of electrode is very high, thereby generally is used for MEMS (MEMS).
Piezoelectric Driving mode: adopt the scanning system of Piezoelectric Driving mode as shown in Figure 5; (one side that is beam is a piezoelectric material layer 11 to adopt piezoelectric to be made into double-material beam at the end of spiral beam; Another side is the non-piezoelectric material layer) structure, layer of surface electrode 11-1 and 11-2 are arranged, (certainly respectively on the tow sides of piezoelectric material layer 11; The non-piezoelectric material layer that can utilize conduction is as a battery lead plate); When applying voltage on two battery lead plates, electric field makes and produces internal stress in the piezoelectric, and then realizes the deflection driven of beam through double-material beam effect (because the asymmetry of material layer produces stress gradient in beam).Adopting the benefit of piezoelectricity double-material beam Drive Structure is the processing of having avoided accurate hinge, and actuating force is evenly distributed on long double-material beam, avoids stress to concentrate and stress rupture better.The shortcoming of Piezoelectric Driving is to need to make double-material beam, and needs higher supply voltage usually.
Magnetostriction type of drive: adopt the scanning system of magnetostriction type of drive as shown in Figure 6; Adopt magnetostrictive material to make one deck magnetostrictive material layer 12 in the outside of the end of spiral beam 3, become the double-material beam structure, with the fixing horseshoe type electromagnet 13 of the medial surface of the frame 7 that is relatively fixed of magnetostrictive material layer 12; This electromagnet is made up of iron core 13-1 and coil 13-2; To produce magnetic field during 13 energisings of horseshoe type electromagnet, this action of a magnetic field makes it produce flexible deformation in magnetostrictive material layer 12; Because the double-material beam effect, spiral beam 3 will produce corresponding deflection.Magnetic telescopic driver belongs to noncontact field effect type of drive, but also can adopt the contact type of drive of closed magnetic circuit, the similar Piezoelectric Driving of this type of drive.Owing to need electromagnet, the volume of magnetic telescopic driver is relatively large, but the actuating force that produces is also bigger.
Photoproduction stress drive mode: adopt the scanning system of photoproduction stress drive mode as shown in Figure 7; Lateral surface at the end of spiral beam adopts photoproduction stress material (photosensitive phase-change material) to make photoproduction stress material layer 14; Form the double-material beam structure, at the photoproduction stress material layer 14 frame 7 medial surface stationary plane light sources 15 (like light-emitting diode face battle array) that are relatively fixed, the light action that area source 15 produces is in photoproduction stress material layer 14; Make it produce internal stress, drive spiral beam 3 and produce corresponding deflection.The advantage of photoproduction stress drive mode is that noncontact drives, and the response time very short (submicrosecond magnitude), but the actuating force that produces is less relatively.
Hot type of drive: adopt the scanning system of hot type of drive as shown in Figure 8; End at spiral beam 3 adopts thermal strain material (material that coefficient of thermal expansion is big or marmem) to make thermal strain material layer 16; Form the double-material beam structure; But the centre at thermal strain material layer 16 and spiral beam material accompanies semiconductor electric heating lamella 17, and this electrothermal semiconductor lamella 17 simultaneously heats and another side refrigeration it under the function of current, thereby makes double-material beam simultaneously produce the swelling heat strain; And the strain of another side contraction heat drives 3 deflections of spiral beam.Though hot driving can be adopted asymmetric arbitrarily thermal strain type of drive, but the heat that the semiconductor thermoelectric sheet provides drives the distinct advantages with efficient height and bi-directional drive.In addition, marmem is a kind of hot phase-change material with reversible large deformation, can produce bigger thermal stress or strain, and therefore hot type of drive can produce bigger actuating force, but the response time relatively long (millisecond magnitude).
Claims (9)
1. harmonic drive rotary scanning system, said system adopts rotational symmetric spiral beam to form to amplify drive mechanism, and said amplification drive mechanism is realized the amplification of movement travel through static leverage and dynamic resonance effect; It is characterized in that:
Said system comprises centre-driven piece, spiral beam, driver and fixed border;
Said centre-driven piece is positioned at the center of whole system; Said spiral beam adopts one of 2,3,4,6 or 8 mode to arrange respectively; The top of spiral beam is fixedly connected on respectively on the centre-driven piece; And circumference evenly distributes in centre-driven piece upper edge in the fixed position of spiral beam; And is pivot with identical helix length with the centre-driven piece, evenly be centered around the centre-driven piece around; The end of spiral beam through by spiral beam bulk material directly the turning joint and the fixed border of processing fix, and on every spiral beam near the terminal position installation of driver, the spiral beam is driven and locatees;
Said driver adopts electromagnetic driver, electrostatic actuator, piezoelectric actuator, magnetic telescopic driver, photoproduction stress drive device or electro;
Said centre-driven piece is through center mounting hole scanning constant head, and the spiral beam amplifies the movement travel of driver, and passes motion to probe;
The depth-to-width ratio of said spiral beam is 5-20: 1.
2. harmonic drive rotary scanning system according to claim 1; It is characterized in that: the tracer rotation system of 4 spiral beams of said employing is the harmonic drive rotary scanning system of quadrature drive, is that two identical four the overlapping of spiral girder construction combine up and down and adopt the tracer rotation system of 8 spiral beams.
3. harmonic drive rotary scanning system according to claim 1; It is characterized in that: said driver adopts electromagnetic driver; Constitute by drive coil and permanent magnet; Drive coil is fixedly mounted on the lateral surface position of every spiral beam near end, and permanent magnet is installed in the position of fixed border medial surface over against drive coil, and permanent magnet constitutes the electromagnetic driver of voice coil motor type with drive coil; Said every spiral beam adopts and is positioned at the installed surface that is parallel to the plane of scanning motion and perpendicular to two electromagnetic drivers realization 3-D scannings of this installed surface direction.
4. harmonic drive rotary scanning system according to claim 1; It is characterized in that: said driver adopts the electrostatic actuator of comb electrode structure; Form by stationary electrode and moving electrode; Moving electrode is fixed on the lateral surface position of every spiral beam near end, and stationary electrode is fixed on the relative position of fixed border medial surface, and stationary electrode and moving electrode cooperate formation comb electrode structure.
5. harmonic drive rotary scanning system according to claim 1; It is characterized in that: said driver adopts piezoelectric actuator; This piezoelectric actuator constitutes by being fixed on the piezoelectric patches of every spiral beam near terminal position, and piezoelectric patches is flattened on the lateral surface of spiral beam, and piezoelectric patches and spiral beam constitute the double-material beam structure; Under the voltage effect, deflect, thereby drive the spiral beam.
6. harmonic drive rotary scanning system according to claim 1; It is characterized in that: said driver adopts magnetic telescopic driver; This driver constitutes by being fixed on the magnetostriction sheet and the corresponding electromagnet that is fixed on the fixed border medial surface with the magnetostriction sheet of every spiral beam near terminal position, thereby makes the magnetostriction sheet produce the deflection that flexible stress drives the spiral beam through the magnetic force of electromagnet.
7. harmonic drive rotary scanning system according to claim 1; It is characterized in that: said driver adopts photoproduction stress drive device; Be manufactured with photoproduction stress material layer at every spiral beam near terminal position, photoproduction stress material layer and spiral beam constitute the double-material beam structure, on the opposite of photoproduction stress material layer the area source that is fixed on the fixed border are arranged; The light action that area source produces makes photoproduction stress material layer produce internal stress in the photoproduction stress material, drives the spiral beam and produces corresponding deflection.
8. harmonic drive rotary scanning system according to claim 1; It is characterized in that: said driver adopts electro; Be manufactured with the thermal strain material layer at every spiral beam near terminal position, thermal strain material layer and spiral beam constitute the double-material beam structure, between thermal strain material layer and spiral beam, accompany semiconductor electric heating lamella; This electrothermal semiconductor lamella makes the thermal strain material layer simultaneously heat and another side refrigeration under the function of current; Thereby make the spiral beam simultaneously produce the swelling heat strain, and the strain of another side contraction heat drive the deflection of spiral beam.
9. harmonic drive rotary scanning system according to claim 1 is characterized in that: said spiral beam adopts the width gradual change structure, and width subtracts narrow gradually with the length increase from end to top.
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| JPH07261111A (en) * | 1994-03-17 | 1995-10-13 | Ricoh Co Ltd | Noncontact bearing type polygon scanner |
| JP3056108B2 (en) * | 1997-02-25 | 2000-06-26 | 米沢日本電気株式会社 | Stand type scanner |
| CN101527762A (en) * | 2008-03-04 | 2009-09-09 | 深圳华为通信技术有限公司 | Digital photo frame and three-dimensional image display method for same |
-
2010
- 2010-03-15 CN CN2010101242298A patent/CN101808181B/en not_active Expired - Fee Related
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| Publication number | Publication date |
|---|---|
| CN101808181A (en) | 2010-08-18 |
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