CN110429868B - Low-rigidity magnetic suspension gravity compensator, driving device and six-degree-of-freedom micro-motion platform - Google Patents
Low-rigidity magnetic suspension gravity compensator, driving device and six-degree-of-freedom micro-motion platform Download PDFInfo
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- CN110429868B CN110429868B CN201910700755.5A CN201910700755A CN110429868B CN 110429868 B CN110429868 B CN 110429868B CN 201910700755 A CN201910700755 A CN 201910700755A CN 110429868 B CN110429868 B CN 110429868B
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Abstract
The invention discloses a low-rigidity magnetic suspension gravity compensator, a driving device and a six-degree-of-freedom micropositioner, belonging to the field of semiconductor manufacturing and assembling; the rotor structure consists of a magnet support and a plurality of pairs of permanent magnet array blocks arranged on the side wall of the magnet support in parallel; the stator structure consists of a stator base, a coil bracket and a central permanent magnet; the permanent magnet at the center of the stator receives magnetic attraction and magnetic repulsion in an air gap magnetic field generated by the rotor permanent magnet array block, so that gravity compensation of a rotor structure and a load is realized. Two groups of coils are arranged on the left and right of the groove of the coil support and on the upper and lower parts of the boss, and form a driving device with a rotor structure of the magnetic suspension gravity compensator to realize horizontal and vertical two-degree-of-freedom combined driving; four symmetrically arranged gravity compensators and a driving device form a six-freedom-degree micropositioner. The combined driving device realizes near-zero rigidity magnetic suspension of the rotor structure and the load in a wider motion range, and has simple structure and light weight.
Description
Technical Field
The invention belongs to the technical field related to semiconductor manufacturing and assembling, and particularly relates to a low-rigidity magnetic suspension gravity compensator, a driving device and a six-degree-of-freedom micro-motion platform.
Background
The wide use of chips makes people's life change from the world to the earth, but the photoetching machine for processing and manufacturing chips has great manufacturing difficulty and high precision, so that only a few companies can produce the chips, and the two most critical subsystems in the photoetching machine are an ultra-precise exposure optical system and an ultra-precise workpiece stage system which respectively represent the highest technical peak of ultra-precise optics and ultra-precise machinery. Therefore, the research of the next generation lithography machine technology is the leading topic of the current microelectronic technology.
In many precision processing apparatuses today, high positioning accuracy is required, and six-degree-of-freedom motion of a moving part is required to be realized, for example, a lithography machine for producing a chip, and in order to solve the contradiction between large stroke and high accuracy of a mask table under high-speed and high-acceleration motion conditions, a macro-micro combined driving strategy is usually adopted to realize large-range and high-accuracy motion control. Meanwhile, in the movement process of the mask table, in order to realize precise movement and positioning, how to isolate the vibration transmission between the micro-motion table and the foundation is also an important part.
The device comprises a laser interference measurement system, a capacitance displacement sensor, a micropositioner body and a six-degree-of-freedom driving motor, wherein the motor adopts three drivers which are arranged in a triangular manner for realizing horizontal and vertical driving for decoupling control, and a single horizontal driver adopts a mode that rotor magnetic steels are symmetrically arranged up and down on a horizontal driving coil. The structure has complex decoupling mode, needs more driving devices, is easy to generate assembly errors, has higher rigidity and can not effectively realize vibration isolation and inhibition between the foundation and the micropositioner. Therefore, how to realize the low-rigidity six-degree-of-freedom micro-motion stage is a technical problem which needs to be solved urgently at present.
Disclosure of Invention
Aiming at the defects or improvement requirements of the prior art, the invention provides a magnetic suspension gravity compensator with low rigidity, a driving device and a six-degree-of-freedom micropositioner, aiming at playing the role of the gravity compensator by the interaction of a permanent magnet at the center of a stator and magnets at two sides of a rotor so as to reduce the rigidity.
In order to achieve the above object, according to one aspect of the present invention, there is provided a low-rigidity magnetic suspension gravity compensator, including a rotor structure and a stator structure, wherein the rotor structure includes a rotor permanent magnet array block and a rotor magnet support, and the stator structure includes a stator base, a stator central permanent magnet and a stator coil support;
the rotor permanent magnet array block comprises a plurality of pairs of rotor permanent magnets, and each pair of rotor permanent magnets are respectively arranged on two opposite side walls of a groove formed by the rotor magnet support in parallel;
the middle of the stator coil bracket is provided with a hollow cubic groove for mounting the stator center permanent magnet;
the stator center permanent magnet is arranged in an air gap magnetic field generated by the rotor permanent magnet array block, so that the rotor permanent magnet array block applies magnetic attraction and magnetic repulsion to the stator center permanent magnet to realize gravity compensation of the rotor structure and the load.
Preferably, the magnetizing directions of the adjacent two mover permanent magnets on each sidewall of the groove formed by the mover magnet frame are sequentially rotated by 90 °.
Preferably, a rotor structure of the magnetic suspension gravity compensator bears a load with a preset mass, so that a working interval of the rotor structure is within a preset range of a zero stiffness point, and near-zero stiffness magnetic suspension of the rotor structure and the load is realized.
Preferably, the stator center permanent magnet is a cube.
According to another aspect of the present invention, there is provided a drive arrangement comprising a magnetically levitated gravity compensator mover structure as defined in any of the above, said drive arrangement further comprising: two sets of coils;
the two groups of coils comprise a horizontal coil group and a vertical coil group, the horizontal coil group and the vertical coil group are both positioned in an air gap magnetic field generated by the rotor permanent magnet array block, the horizontal coil group is installed in an annular groove of the stator coil support, and the vertical coil group is installed on a boss of the stator coil support and is respectively used for providing driving forces in the horizontal direction and the vertical direction.
Preferably, the horizontal coil set includes a first horizontal coil and a second horizontal coil, and the vertical coil set includes a first vertical coil and a second vertical coil;
the first horizontal coil and the second horizontal coil are respectively installed in the square-shaped grooves on the left side and the right side of the stator coil support, and the first vertical coil and the second vertical coil are respectively installed on the upper side and the lower side of the stator coil support boss.
Preferably, the cross sections of the first horizontal coil, the second horizontal coil, the first vertical coil and the second vertical coil are all square.
Preferably, the driving force borne by the rotor structure can be controlled by passing current to the horizontal coil group and the vertical coil group, so that the driving of the rotor structure and the load in a working interval is realized.
According to another aspect of the present invention, there is provided a six-degree-of-freedom micropositioner comprising four magnetic suspension gravity compensators as described in any one of the above paragraphs and four driving devices as described in any one of the above paragraphs, wherein each magnetic suspension gravity compensator is fixed on the stator base by rotating 90 ° in sequence after being matched with each driving device.
In general, compared with the prior art, the above technical solution contemplated by the present invention can achieve the following beneficial effects:
1. according to the low-rigidity magnetic suspension gravity compensator, the plurality of pairs of rotor permanent magnet array blocks are arranged in parallel on two opposite side walls of the groove formed by the rotor magnet support, so that the permanent magnet at the center of the stator is subjected to magnetic attraction and magnetic repulsion in an air gap magnetic field generated by the rotor permanent magnet array blocks, and gravity compensation of a rotor structure and a load is realized.
2. The rotor structure of the magnetic suspension gravity compensator comprises a plurality of permanent magnets adopting Halbach magnet structures, the magnetizing directions of the two adjacent permanent magnets rotate by 90 degrees in sequence, the magnetic field radial components of air gap magnetic fields generated by the permanent magnet array blocks on the two sides of the rotor structure have the characteristic of approximate linear change in the middle, so that when the rotor structure displaces within a certain working range, the magnetic field radial components of the central permanent magnet of the stator change slightly, and the near-zero rigidity magnetic suspension of the rotor structure and a load is easy to realize.
3. The magnetic suspension gravity compensator with the six-degree-of-freedom micro-motion platform structure has very low vertical rigidity, so that the micro-motion platform structure has good vibration damping and vibration isolation effects, the load of the gravity compensator is less influenced by the vibration disturbance of a foundation, and the magnetic suspension gravity compensator can be suitable for working conditions needing vibration isolation or vibration damping, such as vacuum, ultra-precision machining equipment, high-magnification micro fields and the like.
4. The six-degree-of-freedom micro-motion platform comprises a magnetic suspension gravity compensator and a driving device, wherein the driving device comprises a rotor structure of the magnetic suspension gravity compensator, a horizontal coil group and a vertical coil group, the horizontal coil group and the vertical coil group are both positioned in an air gap magnetic field generated by a rotor permanent magnet array block and used for providing driving forces in horizontal and vertical directions, and the driving device is simple in structure, low in rotor structure quality and wide in application range due to a combined driving mode.
5. Each driving device can provide driving force in the horizontal direction and the vertical direction, compared with the scheme that each driving device only provides one-direction driving force in the traditional structure, the combined driving mode effectively reduces the number of the required driving devices and the structural mass of the rotor, and the six-freedom-degree micropositioner formed by four symmetrically arranged gravity compensators and the driving devices effectively reduces the volume and the mass of the six-freedom-degree micropositioner.
Drawings
FIG. 1 is a three-dimensional schematic diagram of an overall structure of a six-degree-of-freedom micropositioner provided by an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a low-stiffness magnetic levitation gravity compensator provided by an embodiment of the invention;
FIG. 3 is a top view of a horizontal and vertical drive force distribution provided by an embodiment of the present invention;
fig. 4 is a three-dimensional view of a stator structure in a driving apparatus according to an embodiment of the present invention;
fig. 5 is a three-dimensional view of a mover structure in a driving apparatus according to an embodiment of the present invention;
fig. 6 is a schematic distribution diagram of permanent magnets and coils in a driving device according to an embodiment of the present invention;
fig. 7 is a schematic diagram of magnetization directions and magnetic induction line distribution of a rotor permanent magnet array block in a driving device according to an embodiment of the present invention;
FIG. 8 is a diagram of an equivalent current model of a center permanent magnet of a stator in a driving apparatus according to an embodiment of the present invention;
FIG. 9 is a schematic diagram of the force applied to the horizontal coil in the air gap magnetic field in the driving apparatus according to the embodiment of the present invention;
FIG. 10 is a schematic diagram of the force applied to the vertical coil in the air gap field in the driving apparatus according to the embodiment of the present invention;
fig. 11 is a diagram illustrating a relationship between a suspension force received by a mover structure and a vertical displacement in a driving apparatus according to an embodiment of the present invention;
the same reference numbers will be used throughout the drawings to refer to the same elements or structures, wherein:
1-a first drive device, 2-a second drive device, 3-a third drive device, 4-a fourth drive device, 12-a mover permanent magnet array block, 12-1-a mover first magnet, 12-2-a mover second magnet, 12-3-a mover third magnet, 12-4-a mover fourth magnet, 12-5-a mover fifth magnet, 12-6-a mover sixth magnet, 13-a mover magnet support, 21-a stator base, 22-1-a stator first vertical coil, 22-2-a stator second vertical coil, 23-a stator coil support, 24-a stator center permanent magnet, 25-1-a stator first horizontal coil, 25-2-a stator second horizontal coil.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
The invention provides a low-rigidity magnetic suspension gravity compensator, a driving device and a six-degree-of-freedom micro-motion platform, wherein a permanent magnet at the center of a stator is subjected to magnetic attraction and magnetic repulsion in an air gap magnetic field generated by a rotor permanent magnet array block to realize gravity compensation of a rotor structure and a load, and the magnetic suspension gravity compensator is matched with the driving device and then sequentially rotated by 90 degrees to be fixed on a base to form the six-degree-of-freedom micro-motion platform.
Fig. 2 is a schematic structural diagram of a magnetic suspension gravity compensator with low stiffness according to an embodiment of the present invention, where the magnetic suspension gravity compensator includes a rotor structure and a stator structure, the rotor structure includes a rotor permanent magnet array block 12 and a rotor magnet support 13, and the stator structure includes a stator base 21, a stator center permanent magnet 24, and a stator coil support 23;
the rotor permanent magnet array block 12 comprises a plurality of pairs of rotor magnets, and each pair of rotor magnets are respectively arranged on two opposite side walls of a groove formed by the rotor magnet support 13 in parallel; the middle of the stator coil bracket 23 is a hollow cubic groove for mounting a stator center permanent magnet 24; the stator center permanent magnet 24 is in the air gap magnetic field generated by the rotor permanent magnet array block 12, so that the rotor permanent magnet array block 12 applies magnetic attraction and magnetic repulsion to the stator center permanent magnet 24, and gravity compensation of the rotor structure and the load is realized.
In the embodiment of the present invention, the number of the mover magnets included in the mover permanent magnet array block 12 may be determined according to actual needs, and is preferably a rectangular parallelepiped permanent magnet, and the embodiment of the present invention is briefly described by taking 6 mover magnets as an example.
The rotor structure comprises a rotor permanent magnet array block 12 and a rotor magnet support 13, the left side and the right side of the rotor permanent magnet array block are respectively provided with six rotor permanent magnet array blocks, namely a first rotor magnet 12-1, a second rotor magnet 12-2, a third rotor magnet 12-3, a fourth rotor magnet 12-4, a fifth rotor magnet 12-5 and a sixth rotor magnet 12-6, a Halbach magnetizing mode is adopted, the magnetizing directions of two adjacent permanent magnets sequentially rotate by 90 degrees, the reference figure 5 is shown, the height of the superposed magnets on each side can be 40 millimeters, the thickness can also be 40 millimeters, the width can be 7.8 millimeters, the magnets on the left side and the right side are parallel, the distance can be 24.4 millimeters, and the magnetizing directions of the permanent magnet array blocks and the magnetic induction lines of a formed air gap magnetic field are distributed and referred to figure 7.
The rotor magnet array adopts the following arrangement mode, the height of the middle magnet in the three magnets on each side is greater than the heights of the upper magnet and the lower magnet and the center permanent magnet of the stator, so that the radial component of the magnetic field of the center permanent magnet of the stator is changed slightly when the center permanent magnet of the stator displaces in a certain working range.
In the embodiment of the invention, the working interval of the rotor structure can be within the preset range of the zero-rigidity point by adjusting the weight of the load, so that the near-zero-rigidity magnetic suspension of the rotor structure of the magnetic suspension gravity compensator in the working interval is realized.
The preset range can be determined according to actual needs, and the zero-stiffness point is within the working range as far as possible.
In another embodiment of the invention, a drive arrangement is provided comprising a mover structure of a magnetically levitated gravity compensator and two sets of coils.
In the embodiment of the present invention, referring to fig. 4, the mover structure of the magnetic levitation gravity compensator, the horizontal coil set and the vertical coil set form a driving device, the horizontal coil set includes a first horizontal coil 25-1 and a second horizontal coil 25-2, and the vertical coil set includes a first vertical coil 22-1 and a second vertical coil 22-2. The central permanent magnet 24 can be selected as a cube with the side length of 10 mm, the middle of the coil support 23 is a hollow cube groove for mounting the central permanent magnet 24, the horizontal coil group comprises a first horizontal coil 25-1 and a second horizontal coil 25-2 which are respectively mounted in the rectangular-square-shaped grooves on the left side and the right side of the coil support 23, and the vertical coil group comprises a first vertical coil 22-1 and a second vertical coil 22-2 which are respectively mounted on the upper side and the lower side of a boss of the coil support 23.
Wherein, the two groups of coils of the stator have square sections, and the section area can be selected to be 16 square millimeters.
The left-right distance between the first horizontal coil 25-1 and the second horizontal coil 25-2 can be selected to be 4 mm, and the up-down distance between the first vertical coil 22-1 and the second vertical coil 22-2 can be selected to be 8 mm.
The magnetic suspension gravity compensator and the driving device in the embodiment of the invention play the role of a low-rigidity gravity compensator and simultaneously provide driving forces in the horizontal direction and the vertical direction.
In the embodiment of the invention, as shown in fig. 6, the working range of the rotor structure can be within the preset range of the zero stiffness point by adjusting the weight of the load, and the magnitude of the driving force borne by the rotor structure is controlled by passing corresponding current to the stator coil, so that the rotor structure can move within the working range.
In the embodiment of the present invention, the permanent magnet array block 12 of the mover structure applies a magnetic attraction force and a magnetic repulsion force to the central permanent magnet 24 of the stator structure to implement gravity compensation of the mover structure. Referring to fig. 8, in the air gap magnetic field generated by the rotor permanent magnet array block 12, the equivalent current distribution of the two sides of the central permanent magnet is determined by the magnetizing direction of the uniformly magnetized central permanent magnet in the stator central permanent magnet 24, and since the magnetizing direction is parallel to the normal vector of the upper and lower surfaces, there is no equivalent current distribution in the upper and lower surfaces. Assuming that the length of the equivalent current model is L, the surface current density existing on the left side and the right side is I, the directions are opposite, and the vertical component B of the external magnetic field exists on the left side1yAnd a radial component B1xOn the right side, there is a vertical component B of the external magnetic field2yAnd a radial component B2xThe resulting suspension force densities at these two points are then:
F＝B1xIL+B2xIL (1)
it can be seen from formula (1) that the suspension force is related to the radial component of the magnetic field, when the stator structure moves in the working range, the magnetic fields on the left side and the right side of the permanent magnet also change, and the variation of the magnetic field generated on the left side is set as Δ B1xThe amount of change in the magnetic field generated on the right side is Δ B2xThen the levitation force density generated by the stator is:
F＝(B1x+△B1x)IL+(B2x+△B2x)IL (2)
as can be seen from equation (2), in order to achieve near-zero stiffness suspension, the suspension force density should remain constant, i.e., Δ B1x＝-△B2xI.e. the radial component of the external magnetic field should have a linear variation along the vertical direction. Referring to FIG. 11, it can be seen that a mover structure is selected to have [ -1, +1 ] within a vertical displacement range]When mm is used as the working range, the suspension force changes slightly, and the vertical rigidity is [ -30, +30 [ -30 [)]N/m, approximately zero stiffnessAnd (5) magnetically suspending.
In another embodiment of the present invention, as shown in fig. 1, a six-degree-of-freedom micropositioner is provided, which comprises four magnetic suspension gravity compensators, four driving devices and a stator base, wherein each magnetic suspension gravity compensator and each driving device are matched and then fixed on the stator base 21 by rotating 90 ° in sequence.
Referring to fig. 9 and 10, the first horizontal coil 25-1, the second horizontal coil 25-2, the first vertical coil 22-1, and the second vertical coil 22-2 mounted on the stator coil support 23 interact with the air gap magnetic field formed by the rotor permanent magnet array block 12 after being energized with current, so as to generate a corresponding driving force in the horizontal direction and a corresponding driving force in the vertical direction.
As shown in fig. 3, the first driving device 1, the second driving device 2, the third driving device 3, and the fourth driving device 4 are sequentially rotated by 90 ° and fixed on the stator base 21, each driving device provides driving forces in horizontal and vertical directions, and the horizontal driving forces of two adjacent driving devices are perpendicular to each other. For realizing out-of-plane driving of the micro-motion stage with six degrees of freedom, F is controlledz1、Fz2、Fz3、Fz4To realize Rx、RyZ-direction motion, by controlling F for in-plane driving of six-degree-of-freedom micropositionery1、Fx2、Fy3、Fx4To realize X, Y, RzThe movement of the direction.
The invention provides a low-rigidity magnetic suspension gravity compensator, a driving device and a six-degree-of-freedom micro-motion platform structure, which comprises four magnetic suspension gravity compensators, four driving devices and a stator base 21, wherein each magnetic suspension gravity compensator is matched with each driving device and then sequentially rotated by 90 degrees and fixed on the stator base 21. Each driving device can provide driving forces in the horizontal direction and the vertical direction, decoupling analysis is carried out on the force exerted by the four driving devices, control over the micro-motion table with six degrees of freedom can be achieved, vertical rigidity of each driving device is low, and isolation and inhibition of vibration transmission between the foundation and the micro-motion table are facilitated.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (7)
1. A low-rigidity magnetic suspension gravity compensator comprises a rotor structure and a stator structure, and is characterized in that the rotor structure comprises a rotor permanent magnet array block and a rotor magnet support, and the stator structure comprises a stator base, a stator center permanent magnet and a stator coil support;
the rotor permanent magnet array block comprises three pairs of rotor permanent magnets, each pair of rotor permanent magnets are respectively arranged on two opposite side walls of a groove formed by the rotor magnet support in parallel, and the magnetizing directions of the two adjacent rotor permanent magnets on each side wall sequentially rotate for 90 degrees; the three pairs of rotor permanent magnets are rotor first magnets (12-1), rotor second magnets (12-2), rotor third magnets (12-3), rotor fourth magnets (12-4), rotor fifth magnets (12-5) and rotor sixth magnets (12-6), wherein the magnetizing directions of the rotor second magnets (12-2) and the rotor fifth magnets (12-5) face the stator central permanent magnets, the magnetizing directions of the rotor first magnets (12-1) and the rotor third magnets (12-3) face the rotor second magnets (12-2), and the magnetizing directions of the rotor fourth magnets (12-4) and the rotor sixth magnets (12-6) face the rotor fifth magnets (12-5);
the middle of the stator coil bracket is provided with a hollow cubic groove for mounting a square stator center permanent magnet;
the stator center permanent magnet is arranged in an air gap magnetic field generated by the rotor permanent magnet array block, so that the rotor permanent magnet array block applies magnetic attraction and magnetic repulsion to the stator center permanent magnet to realize gravity compensation of the rotor structure and the load.
2. The magnetic levitation gravity compensator of claim 1, wherein a mover structure of the magnetic levitation gravity compensator carries a load of a predetermined mass thereon such that an operating region of the mover structure is within a predetermined range of a zero stiffness point to achieve near zero stiffness magnetic levitation of the mover structure.
3. A two-degree-of-freedom driving device is characterized by comprising the rotor structure of the magnetic suspension gravity compensator as claimed in claim 1 or 2, a stator coil support, a horizontal coil group and a vertical coil group, wherein the horizontal coil group and the vertical coil group are both positioned in an air gap magnetic field generated by the rotor permanent magnet array block, the horizontal coil group is installed in a zigzag groove at the left side and the right side of the stator coil support, and the vertical coil group is installed above and below bosses at the front side and the rear side of the stator coil support and is used for providing driving forces in the horizontal direction and the vertical direction respectively.
4. The two-degree-of-freedom driving apparatus according to claim 3, wherein the horizontal coil group includes a first horizontal coil and a second horizontal coil, and the vertical coil group includes a first vertical coil and a second vertical coil;
the first horizontal coil and the second horizontal coil are respectively installed in the square-shaped grooves on the left side and the right side of the stator coil support, and the first vertical coil and the second vertical coil are respectively installed on the upper side and the lower side of the stator coil support boss.
5. The two-degree-of-freedom driving device according to claim 4, wherein the first horizontal coil, the second horizontal coil, the first vertical coil and the second vertical coil are each square in cross section.
6. The driving device with two degrees of freedom according to any one of claims 3 to 5, wherein the driving force applied to the mover structure can be controlled by passing current through the horizontal coil assembly and the vertical coil assembly, so as to drive the mover structure and the load in the working space.
7. A six-degree-of-freedom micropositioner comprising four stator structures of a magnetic levitation gravity compensator according to claim 1 or 2 and four two-degree-of-freedom driving devices according to any one of claims 3 to 6, wherein the four two-degree-of-freedom driving devices are sequentially rotated by 90 ° and fixed on the stator base, and the four stator structures are arranged in one-to-one correspondence with the stator structures in the four two-degree-of-freedom driving devices in the manner according to claim 1 or 2.
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| CN110880888B (en) * | 2019-12-05 | 2023-05-30 | 哈尔滨工业大学 | Two-dimensional permanent magnet array type magnetic suspension gravity compensator |
| CN111313763B (en) * | 2020-03-30 | 2022-08-05 | 重庆大学 | Gravity compensator with low rigidity and large suspension force |
| CN111963624B (en) * | 2020-08-06 | 2022-03-01 | 哈尔滨工业大学 | Space six-degree-of-freedom magnetic suspension vibration isolation platform |
| CN112865481B (en) * | 2021-01-13 | 2021-11-16 | 青岛理工大学 | Magnetic suspension actuator with three-degree-of-freedom vibration isolation function |
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| CN106997155B (en) * | 2017-05-24 | 2018-06-12 | 华中科技大学 | A kind of magnetcisuspension suspension gravity compensator of Low rigidity and micropositioner structure |
| CN108386481B (en) * | 2018-03-05 | 2019-02-22 | 青岛理工大学 | Based on the High Linear magnetic suspended isolation device and actuator of Halbach permanent magnet array, method |
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