CN111313763B - Gravity compensator with low rigidity and large suspension force - Google Patents
Gravity compensator with low rigidity and large suspension force Download PDFInfo
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- CN111313763B CN111313763B CN202010235162.9A CN202010235162A CN111313763B CN 111313763 B CN111313763 B CN 111313763B CN 202010235162 A CN202010235162 A CN 202010235162A CN 111313763 B CN111313763 B CN 111313763B
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Abstract
The invention discloses a gravity compensator with low rigidity and large suspension force, wherein a stator part comprises a stator inner ring permanent magnet, a coil and a stator outer ring permanent magnet, a rotor part comprises a rotor inner ring permanent magnet and a rotor outer ring permanent magnet, the stator inner ring permanent magnet, the rotor inner ring permanent magnet, the coil, the rotor outer ring permanent magnet and the stator outer ring permanent magnet are sequentially arranged from inside to outside and provided with gaps, and the stator part and the rotor part interact to generate the suspension force. Because the inner ring and the outer ring of the stator both comprise three layers of permanent magnets in the axial direction, the magnetic field intensity is increased, and the suspension force generated by the gravity compensator is large; meanwhile, the magnetizing directions of the upper layer and the lower layer of the three layers of permanent magnets are opposite, so that the magnetic field is more uniform, the suspension force is close to linear, the suspension rigidity is reduced, the gravity of the load can be effectively compensated, the positioning of the bearing table is realized, and the influence of an internal disturbance source and an external disturbance source on the load is reduced.
Description
Technical Field
The invention relates to the technical field of gravity compensators, in particular to a gravity compensator with low rigidity and large suspension force.
Background
With the continuous development of modern industry, ultra-precision machining plays an increasingly important role in numerous fields such as machinery, electronics, light industry, national defense and the like, and a solid foundation is laid for the development of electronic information technology and industry by taking the ultra-precision machining technology as a supporting semiconductor device. As a representative of ultra-precision processing techniques, a lithography machine plays a crucial role in the development of semiconductor technology. However, the silicon wafer bearing table of the lithography machine is interfered by external noise of an internal power device in the exposure process, so that the positioning precision of the silicon wafer bearing table is influenced. The gravity compensation device is a novel passive mechanism which is provided for solving the problem, and can realize the positioning of the silicon wafer bearing table by compensating the gravity of the load; meanwhile, the influence of internal and external disturbance sources on the load is reduced by reducing the bearing rigidity of the gravity compensation device.
Chinese patent publication No. CN106997155A discloses a low-rigidity magnetic suspension gravity compensator and a micro-motion stage structure, which includes a mover structure and a stator structure, wherein the mover structure includes an outer permanent magnet array ring, an inner permanent magnet array ring and a mover support frame; the stator structure comprises a coil support accommodated in the annular groove and a stator permanent magnet ring embedded on the coil support, and low-rigidity magnetic suspension is generated by means of interaction of a magnetic field between the rotor and the stator. However, the magnetic suspension gravity compensator has low suspension force and high suspension rigidity. There is a need in the art to develop a gravity compensator having a lower suspension stiffness and a greater suspension force.
Disclosure of Invention
The invention aims to provide a gravity compensator with low rigidity and large suspension force, which is used for solving the problems in the prior art, effectively compensating the gravity of a load, realizing the positioning of a bearing table and reducing the influence of an internal disturbance source and an external disturbance source on the load.
In order to achieve the purpose, the invention provides the following scheme:
the invention provides a gravity compensator with low rigidity and large suspension force, which comprises a stator part and a rotor part, the stator part comprises a stator fixing structure, a stator inner ring permanent magnet, a coil and a stator outer ring permanent magnet, the stator inner ring permanent magnet, the coil and the stator outer ring permanent magnet are all fixed on the stator fixing structure, the mover part comprises a mover fixing structure, a mover inner ring permanent magnet and a mover outer ring permanent magnet, the rotor inner ring permanent magnet and the rotor outer ring permanent magnet are both fixed on the rotor fixing structure, the stator inner ring permanent magnet, the rotor inner ring permanent magnet, the coil, the rotor outer ring permanent magnet and the stator outer ring permanent magnet are coaxially arranged from inside to outside in sequence, gaps are formed among the stator inner ring permanent magnet, the rotor inner ring permanent magnet, the coil, the rotor outer ring permanent magnet and the stator outer ring permanent magnet, and the stator portion and the rotor portion interact to generate suspension force.
Preferably, the stator inner ring permanent magnet and the stator outer ring permanent magnet both comprise three layers of permanent magnets which are sequentially stacked from top to bottom, and the stator inner ring permanent magnet comprises a first stator inner ring permanent magnet, a second stator inner ring permanent magnet and a third stator inner ring permanent magnet which are sequentially stacked from top to bottom; the stator outer ring permanent magnet comprises a first stator outer ring permanent magnet, a second stator outer ring permanent magnet and a third stator outer ring permanent magnet which are sequentially overlapped from top to bottom; the first stator inner ring permanent magnet, the second stator inner ring permanent magnet, the third stator inner ring permanent magnet, the first stator outer ring permanent magnet, the second stator outer ring permanent magnet, the third stator outer ring permanent magnet, the coil, the rotor inner ring permanent magnet and the rotor outer ring permanent magnet are all in a circular ring column structure.
Preferably, the upper end surface of the first stator inner ring permanent magnet and the upper end surface of the first stator outer ring permanent magnet are positioned on the same plane, and the lower end surface of the first stator inner ring permanent magnet and the lower end surface of the first stator outer ring permanent magnet are positioned on the same plane; the upper end surface of the second stator inner ring permanent magnet and the upper end surface of the second stator outer ring permanent magnet are positioned on the same plane, and the lower end surface of the second stator inner ring permanent magnet and the lower end surface of the second stator outer ring permanent magnet are positioned on the same plane; the upper end surface of the third stator inner ring permanent magnet and the upper end surface of the third stator outer ring permanent magnet are positioned on the same plane, and the lower end surface of the third stator inner ring permanent magnet and the lower end surface of the third stator outer ring permanent magnet are positioned on the same plane; the upper end surface of the rotor inner ring permanent magnet and the upper end surface of the rotor outer ring permanent magnet are positioned on the same plane, and the lower end surface of the rotor inner ring permanent magnet and the lower end surface of the rotor outer ring permanent magnet are positioned on the same plane; the upper end surface of the rotor inner ring permanent magnet is lower than the upper end surface of the second stator inner ring permanent magnet, and the lower end surface of the rotor inner ring permanent magnet is higher than the lower end surface of the second stator inner ring permanent magnet; the upper end face of the coil is lower than the upper end face of the rotor inner ring permanent magnet, and the lower end face of the coil is higher than the lower end face of the rotor inner ring permanent magnet.
Preferably, the first stator inner ring permanent magnet and the first stator outer ring permanent magnet are both magnetized by radiating from inside to outside, the third stator inner ring permanent magnet and the third stator outer ring permanent magnet are both magnetized by radiating from outside to inside, the magnetizing direction of the second stator inner ring permanent magnet is from bottom to top, the magnetizing direction of the second stator outer ring permanent magnet is from top to bottom, the mover inner ring permanent magnet and the mover outer ring permanent magnet are both magnetized by radiating from inside to outside, and the equivalent magnetizing direction of the coil is from bottom to top.
Preferably, the first stator inner ring permanent magnet and the first stator outer ring permanent magnet are both subjected to outside-in radiation magnetization, the third stator inner ring permanent magnet and the third stator outer ring permanent magnet are subjected to inside-out radiation magnetization, the magnetization direction of the second stator inner ring permanent magnet is from top to bottom, the magnetization direction of the second stator outer ring permanent magnet is from bottom to top, the mover inner ring permanent magnet and the mover outer ring permanent magnet are subjected to outside-in radiation magnetization, and the equivalent magnetization direction of the coil is from top to bottom.
Preferably, the inner diameters of the first stator inner ring permanent magnet, the second stator inner ring permanent magnet and the third stator inner ring permanent magnet are the same, the outer diameters of the first stator inner ring permanent magnet, the second stator inner ring permanent magnet and the third stator inner ring permanent magnet are the same, the inner diameters of the first stator outer ring permanent magnet, the second stator outer ring permanent magnet and the third stator outer ring permanent magnet are the same, the outer diameters of the first stator outer ring permanent magnet, the second stator outer ring permanent magnet and the third stator outer ring permanent magnet are the same, the heights of the first stator inner ring permanent magnet, the third stator inner ring permanent magnet, the first stator outer ring permanent magnet and the third stator outer ring permanent magnet are the same, and the heights of the rotor inner ring permanent magnet and the rotor outer ring permanent magnet are the same.
Preferably, the inner diameters of the first stator inner ring permanent magnet, the second stator inner ring permanent magnet and the third stator inner ring permanent magnet are all 5.5mm, the outer diameters of the first stator inner ring permanent magnet, the second stator inner ring permanent magnet and the third stator inner ring permanent magnet are all 10mm, the inner diameters of the first stator outer ring permanent magnet, the second stator outer ring permanent magnet and the third stator outer ring permanent magnet are all 46mm, the outer diameters of the first stator outer ring permanent magnet, the second stator outer ring permanent magnet and the third stator outer ring permanent magnet are all 48.5mm, the heights of the first stator inner ring permanent magnet, the third stator inner ring permanent magnet, the first stator outer ring permanent magnet and the third stator outer ring permanent magnet are all 8mm, the heights of the second stator inner ring permanent magnet and the second stator outer ring permanent magnet are both 30 mm;
the inner diameter of the rotor inner ring permanent magnet is 19mm, the outer diameter of the rotor inner ring permanent magnet is 23mm, the inner diameter of the rotor outer ring permanent magnet is 33mm, the outer diameter of the rotor outer ring permanent magnet is 37mm, and the heights of the rotor inner ring permanent magnet and the rotor outer ring permanent magnet are both 18 mm;
the internal diameter of coil is 26mm, the external diameter of coil is 31mm, the height of coil is 14 mm.
Preferably, the stator fixing structure comprises a stator baffle, a baffle ring, a bottom plate, a central shaft fixed on the bottom plate, a stator shell and a coil support; the baffle ring, the first stator inner ring permanent magnet, the second stator inner ring permanent magnet and the third stator inner ring permanent magnet are all sleeved on the central shaft, the baffle ring is arranged at the upper end of the first stator inner ring permanent magnet, and the inner walls of the baffle ring, the first stator inner ring permanent magnet, the second stator inner ring permanent magnet and the third stator inner ring permanent magnet are all attached to the outer wall of the central shaft; the coil is embedded on the outer wall of the coil bracket; the outer wall of the first stator outer ring permanent magnet, the outer wall of the second stator outer ring permanent magnet and the outer wall of the third stator outer ring permanent magnet are both attached to the inner wall of the stator shell, the first stator outer ring permanent magnet and the upper end of the second stator outer ring permanent magnet are both fixed through the stator baffle plate between the stator baffle plate and the stator shell, and the lower end of the third stator outer ring permanent magnet and the lower end of the stator shell are both fixed on the bottom plate.
Preferably, the mover fixed knot constructs including roof, mover inner circle support, mover outer lane support, mover inner circle baffle and mover outer lane baffle, mover inner circle support with the upper end of mover outer lane support all with roof fixed connection, mover inner circle permanent magnet inlays to be established on the outer wall of mover inner circle support, the lower extreme of mover inner circle permanent magnet with the lower extreme of mover inner circle support is all fixed on the mover inner circle baffle, mover outer lane permanent magnet inlays to be established on the inner wall of mover outer lane support, the lower extreme of mover outer circle permanent magnet with the lower extreme of mover outer lane support is all fixed on the mover outer lane baffle.
Compared with the prior art, the invention has the following technical effects:
the invention adopts a stator inner ring permanent magnet, a rotor inner ring permanent magnet, a coil, a rotor outer ring permanent magnet and a stator outer ring permanent magnet which are arranged from inside to outside in sequence, and through the interaction of the stator part and the rotor part, the suspension force is generated by the interaction of the magnetic fields between the rotor part and the stator part. Because the permanent magnet on the inner ring of the stator and the permanent magnet on the outer ring of the stator are respectively arranged into an upper layer, a middle layer and a lower layer, the magnetic field intensity is increased, and the suspension force generated by the gravity compensator is large; meanwhile, the magnetizing directions of the upper and lower layers of permanent magnets of the stator inner ring permanent magnet and the stator outer ring permanent magnet are opposite, and after the upper and lower layers of permanent magnets are coupled with the rotor inner ring permanent magnet and the rotor outer ring permanent magnet, a uniform magnetic field can be realized in a certain range, so that the suspension rigidity is low, the gravity of a load can be effectively compensated, when a rotor fixing structure of the gravity compensator is connected with the bearing table, the positioning of the bearing table can be realized, and the influence of internal and external disturbance sources on the load is reduced.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required in the embodiments will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic view of a low stiffness and high levitation force gravity compensator of the present invention;
FIG. 2 is a schematic view of a stator portion of the present invention;
FIG. 3 is a partial schematic view of a mover in the present invention;
fig. 4 is a schematic view of an arrangement and a magnetizing direction of a stator part and a mover part according to a first embodiment of the present invention (right half of fig. 1);
fig. 5 is a schematic diagram of an equivalent coil current model of a second stator inner ring permanent magnet and a mover inner ring permanent magnet according to a first embodiment of the invention;
FIG. 6 is a graph of the levitation force of the present invention;
FIG. 7 is a graph of suspension stiffness in the present invention;
FIG. 8 is a graph showing the relationship between the levitation force and the current applied to the coil in the present invention;
wherein: the stator comprises a stator baffle 1, a stator shell 2, a first stator outer ring permanent magnet 3, a second stator outer ring permanent magnet 4, a third stator outer ring permanent magnet 5, a bottom plate 6, a coil 7, a coil support 8, a baffle ring 9, a first stator inner ring permanent magnet 10, a second stator inner ring permanent magnet 11, a third stator inner ring permanent magnet 12, a central shaft 13, a rotor outer ring baffle 14, a rotor inner ring baffle 15, a rotor outer ring permanent magnet 16, a rotor inner ring permanent magnet 17, a rotor outer ring support 18, a rotor inner ring support 19 and a top plate 20.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without inventive effort based on the embodiments of the present invention, are within the scope of the present invention.
The invention aims to provide a gravity compensator with low rigidity and large suspension force, which is used for solving the problems in the prior art, effectively compensating the gravity of a load, realizing the positioning of a bearing table and reducing the influence of an internal disturbance source and an external disturbance source on the load.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Example one
As shown in fig. 1-8: the embodiment provides a gravity compensator with low rigidity and large suspension force, which comprises a stator part and a rotor part, wherein the stator part comprises a stator fixing structure, a stator inner ring permanent magnet, a coil 7 and a stator outer ring permanent magnet, the stator inner ring permanent magnet, the coil 7 and the stator outer ring permanent magnet are all fixed on the stator fixing structure, the rotor part comprises a rotor fixing structure, the rotor inner ring permanent magnet 17 and the rotor outer ring permanent magnet 16 are fixed on a rotor fixing structure, the rotor inner ring permanent magnet 17 is arranged on the inner side of the rotor outer ring permanent magnet 16, the stator inner ring permanent magnet, the rotor inner ring permanent magnet 17, the coil 7, the rotor outer ring permanent magnet 16 and the stator outer ring permanent magnet are coaxially arranged from inside to outside in sequence, gaps are formed among the stator inner ring permanent magnet, the rotor inner ring permanent magnet 17, the coil 7, the rotor outer ring permanent magnet 16 and the stator outer ring permanent magnet, and the stator part and the rotor part interact to generate suspension force. In the embodiment, a stator inner ring permanent magnet, a rotor inner ring permanent magnet 17, a coil 7, a rotor outer ring permanent magnet 16 and a stator outer ring permanent magnet which are arranged in sequence from inside to outside are adopted, and through the interaction between the stator part and the rotor part, the magnetic field interaction between the rotor part and the stator part is utilized to generate the suspension force. Because the permanent magnet on the inner ring of the stator and the permanent magnet on the outer ring of the stator are respectively arranged into an upper layer, a middle layer and a lower layer, the magnetic field intensity is increased, and the suspension force generated by the gravity compensator is large; meanwhile, because the magnetizing directions of the upper and lower layers of permanent magnets of the stator inner ring permanent magnet and the stator outer ring permanent magnet are opposite, after the upper and lower layers of permanent magnets are mutually coupled with the rotor inner ring permanent magnet 17 and the rotor outer ring permanent magnet 16, a relatively uniform magnetic field can be realized in a certain range, and thus the suspension rigidity is low. Not only can carry out effective compensation to the gravity of load, when gravity compensator's active cell fixed knot constructs and is connected with the plummer moreover, can realize the location to the plummer to reduce the influence of inside and outside disturbance source to the load.
In the embodiment, the stator inner ring permanent magnet and the stator outer ring permanent magnet respectively comprise three layers of permanent magnets which are sequentially overlapped from top to bottom, and the stator inner ring permanent magnet comprises a first stator inner ring permanent magnet 10, a second stator inner ring permanent magnet 11 and a third stator inner ring permanent magnet 12 which are sequentially overlapped from top to bottom; the stator outer ring permanent magnet comprises a first stator outer ring permanent magnet 3, a second stator outer ring permanent magnet 4 and a third stator outer ring permanent magnet 5 which are sequentially overlapped from top to bottom; the first stator inner ring permanent magnet 10, the second stator inner ring permanent magnet 11, the third stator inner ring permanent magnet 12, the first stator outer ring permanent magnet 3, the second stator outer ring permanent magnet 4, the third stator outer ring permanent magnet 5, the coil 7, the rotor inner ring permanent magnet 17 and the rotor outer ring permanent magnet 16 are all in a circular ring column structure, and the first stator inner ring permanent magnet 10, the second stator inner ring permanent magnet 11, the third stator inner ring permanent magnet 12, the first stator outer ring permanent magnet 3, the second stator outer ring permanent magnet 4, the third stator outer ring permanent magnet 5, the rotor inner ring permanent magnet 17 and the rotor outer ring permanent magnet 16 are all annular permanent magnets.
In this embodiment, the stator fixing structure further includes a stator baffle 1, a baffle ring 9, a bottom plate 6, a central shaft 13 fixed on the bottom plate 6 by bolts, a stator housing 2, and a coil support 8; the baffle ring 9, the first stator inner ring permanent magnet 10, the second stator inner ring permanent magnet 11 and the third stator inner ring permanent magnet 12 are all sleeved on the central shaft 13, the baffle ring 9 is arranged at the upper end of the first stator inner ring permanent magnet 10, the baffle ring 9 is used for fixing the stator inner ring permanent magnet on the central shaft 13, and the inner walls of the baffle ring 9, the first stator inner ring permanent magnet 10, the second stator inner ring permanent magnet 11 and the third stator inner ring permanent magnet 12 are all attached to the outer wall of the central shaft 13; the coil 7 is embedded on the outer wall of the coil support 8, and the upper end face of the coil 7 and the upper end face of the coil support 8 are positioned on the same plane; first stator outer lane permanent magnet 3, the outer wall of second stator outer lane permanent magnet 4 and third stator outer lane permanent magnet 5 all sets up with the inner wall laminating of stator shell 2, the upper end of first stator outer lane permanent magnet 3 and the upper end of stator shell 2 are located the coplanar, bolt fastening is passed through in the upper end of stator baffle 1 at the upper end of stator shell 2, the upper end of first stator outer lane permanent magnet 3 and second stator outer lane permanent magnet 4 all is fixed between stator baffle 1 and stator shell 2 through stator baffle 1, the lower extreme of third stator outer lane permanent magnet 5 and the lower extreme of stator shell 2 all fix in the recess on bottom plate 6, the lower extreme of third stator outer lane permanent magnet 5 and the lower extreme of stator shell 2 all are located the coplanar, the lower extreme of stator shell 2 passes through the bolt and is fixed with bottom plate 6.
In this embodiment, the mover fixing structure further includes a top plate 20, a mover inner ring support 19, a mover outer ring support 18, a mover inner ring baffle 15, and a mover outer ring baffle 14, upper ends of the mover inner ring support 19 and the mover outer ring support 18 are both fixedly connected to the top plate 20 through bolts, a mover inner ring permanent magnet 17 is embedded on an outer wall of the mover inner ring support 19, an upper end portion of the mover inner ring permanent magnet 17 contacts the mover inner ring support 19, a lower end of the mover inner ring permanent magnet 17 and a lower end of the mover inner ring support 19 are both fixed in a groove on the mover inner ring baffle 15, a lower end of the mover inner ring permanent magnet 17 and a lower end of the mover inner ring support 19 are located on the same plane, a lower end of the mover inner ring support 19 is fixedly connected to the mover inner ring baffle 15 through bolts, a mover outer ring permanent magnet 16 is embedded on an inner wall of the mover outer ring support 18, a portion of the mover outer ring permanent magnet 16 contacts the mover outer ring support 18, the lower end of the rotor outer ring permanent magnet 16 and the lower end of the rotor outer ring support 18 are both fixed in a groove on the rotor outer ring baffle 14, the lower end of the rotor outer ring permanent magnet 16 and the lower end of the rotor outer ring support 18 are located on the same plane, and the lower end of the rotor outer ring support 18 is fixedly connected with the rotor outer ring baffle 14 through a bolt.
In this embodiment, the first stator inner ring permanent magnet 10 and the first stator outer ring permanent magnet 3 are both magnetized by radiation from inside to outside, the third stator inner ring permanent magnet 12 and the third stator outer ring permanent magnet 5 are both magnetized by radiation from outside to inside, the magnetizing direction of the second stator inner ring permanent magnet 11 is from bottom to top, the magnetizing direction of the second stator outer ring permanent magnet 4 is from top to bottom, the mover inner ring permanent magnet 17 and the mover outer ring permanent magnet 16 are both magnetized by radiation from inside to outside, and the equivalent magnetizing direction of the coil 7 is from bottom to top.
In this embodiment, the upper side and the lower side are upward along the axial direction of the permanent magnet or the coil, and the lower side and the upper side are upward along the axial direction of the permanent magnet or the coil.
In this embodiment, the upper end surface of the first stator inner ring permanent magnet 10 and the upper end surface of the first stator outer ring permanent magnet 3 are located on the same plane, and the lower end surface of the first stator inner ring permanent magnet 10 and the lower end surface of the first stator outer ring permanent magnet 3 are located on the same plane; the upper end surface of the second stator inner ring permanent magnet 11 and the upper end surface of the second stator outer ring permanent magnet 4 are positioned on the same plane, and the lower end surface of the second stator inner ring permanent magnet 11 and the lower end surface of the second stator outer ring permanent magnet 4 are positioned on the same plane; the upper end surface of the third stator inner ring permanent magnet 12 and the upper end surface of the third stator outer ring permanent magnet 5 are positioned on the same plane, and the lower end surface of the third stator inner ring permanent magnet 12 and the lower end surface of the third stator outer ring permanent magnet 5 are positioned on the same plane; the upper end surface of the rotor inner ring permanent magnet 17 and the upper end surface of the rotor outer ring permanent magnet 16 are positioned on the same plane, and the lower end surface of the rotor inner ring permanent magnet 17 and the lower end surface of the rotor outer ring permanent magnet 16 are positioned on the same plane; the upper end surface of the rotor inner ring permanent magnet 17 is lower than the upper end surface of the second stator inner ring permanent magnet 11, and the lower end surface of the rotor inner ring permanent magnet 17 is higher than the lower end surface of the second stator inner ring permanent magnet 11; the upper end surface of the coil 7 is lower than the upper end surface of the mover inner ring permanent magnet 17, and the lower end surface of the coil 7 is higher than the lower end surface of the mover inner ring permanent magnet 17.
In this embodiment, the inner diameters of the first stator inner ring permanent magnet 10, the second stator inner ring permanent magnet 11 and the third stator inner ring permanent magnet 12 are the same, the outer diameters of the first stator inner ring permanent magnet 10, the second stator inner ring permanent magnet 11 and the third stator inner ring permanent magnet 12 are the same, the inner diameters of the first stator outer ring permanent magnet 3, the second stator outer ring permanent magnet 4 and the third stator outer ring permanent magnet 5 are the same, the outer diameters of the first stator outer ring permanent magnet 3, the second stator outer ring permanent magnet 4 and the third stator outer ring permanent magnet 5 are the same, the heights of the first stator inner ring permanent magnet 10, the third stator inner ring permanent magnet 12, the first stator outer ring permanent magnet 3 and the third stator outer ring permanent magnet 5 are the same, and the heights of the mover inner ring permanent magnet 17 and the mover outer ring permanent magnet 16 are the same.
In the embodiment, the inner diameters of the first stator inner ring permanent magnet 10, the second stator inner ring permanent magnet 11 and the third stator inner ring permanent magnet 12 are all 5.5mm, the outer diameters of the first stator inner ring permanent magnet 10, the second stator inner ring permanent magnet 11 and the third stator inner ring permanent magnet 12 are all 10mm, the inner diameters of the first stator outer ring permanent magnet 3, the second stator outer ring permanent magnet 4 and the third stator outer ring permanent magnet 5 are all 46mm, the outer diameters of the first stator outer ring permanent magnet 3, the second stator outer ring permanent magnet 4 and the third stator outer ring permanent magnet 5 are all 48.5mm, the heights of the first stator inner ring permanent magnet 10, the third stator inner ring permanent magnet 12, the first stator outer ring permanent magnet 3 and the third stator outer ring permanent magnet 5 are all 8mm, and the heights of the second stator inner ring permanent magnet 11 and the second stator outer ring permanent magnet 4 are all 30 mm; the inner diameter of the rotor inner ring permanent magnet 17 is 19mm, the outer diameter of the rotor inner ring permanent magnet 17 is 23mm, the inner diameter of the rotor outer ring permanent magnet 16 is 33mm, the outer diameter of the rotor outer ring permanent magnet 16 is 37mm, and the heights of the rotor inner ring permanent magnet 17 and the rotor outer ring permanent magnet 16 are both 18 mm; the inner diameter of the coil 7 is 26mm, the outer diameter of the coil 7 is 31mm, and the height of the coil 7 is 14 mm.
As shown in fig. 4, the gravity compensator is divided into five layers from inside to outside (corresponding to fig. 4 from left to right), the first, third and fifth layers are stator portions, and the second and fourth layers are mover portions. According to the magnetizing direction shown in fig. 4, the first layer of the first stator inner ring permanent magnet 10, the second stator inner ring permanent magnet 11 and the third stator inner ring permanent magnet 12 respectively apply an upward force to the second layer of the rotor inner ring permanent magnet 17, the first layer of the first stator inner ring permanent magnet 10, the second stator inner ring permanent magnet 11 and the third stator inner ring permanent magnet 12 respectively apply an upward force to the fourth layer of the rotor outer ring permanent magnet 16, the fifth layer of the first stator outer ring permanent magnet 3, the second stator outer ring permanent magnet 4 and the third stator outer ring permanent magnet 5 respectively apply an upward force to the second layer of the rotor inner ring permanent magnet 17, the fifth layer of the first stator outer ring permanent magnet 3, the second stator outer ring permanent magnet 4 and the third stator outer ring permanent magnet 5 respectively apply an upward force to the fourth layer of the rotor outer ring permanent magnet 16, that is, that the first layer and the fifth layer respectively apply an upward force to the second layer of the rotor outer ring permanent magnet 16, The four layers of the rotor part are provided with an upward force, the resultant force of the forces received by the second layer and the fourth layer is the total suspension force received by the rotor part, and the direction of the suspension force is always opposite to the gravity direction of the rotor part. When the current flowing through the coil 7 of the third layer is changed, the magnetic field distribution and the intensity of the whole gravity compensator are changed accordingly, so that the magnitude of the levitation force is changed, and finally the levitation position of the mover portion is changed, and therefore the levitation position of the mover portion can be adjusted by adjusting the magnitude of the current in the coil 7.
Fig. 5 is a schematic diagram of an equivalent coil current model of the second stator inner ring permanent magnet 11 and the mover inner ring permanent magnet 17, the magnetizing direction of the second stator inner ring permanent magnet 11 is upward along the axial direction, and according to the ampere current model, the second stator inner ring permanent magnet can be equivalent to a multilayer charged coil, and the charged equivalent current I can be calculated as follows:
where Br is the remanence, h is the thickness of the permanent magnet in the magnetizing direction (e.g., h is its axial height for the second stator inner ring permanent magnet 11; h is its radial thickness for the mover inner ring permanent magnet 17), n is the number of equivalent coil layers, μ 0 Is the permeability of a vacuum.
The electromagnetic force between each layer of coils can be calculated by:
in the formula (2), F a Representing the magnetic force between two layers of coils, I 1 And I 2 The current passed in the coil (for the permanent magnet, the current is the current passed after the permanent magnet is equivalent to the coil, and is calculated according to equation (1); for the coil 7, the actual current passed by the gravity compensator when it is in operation), L is a quantity related to the thickness of the permanent magnet, and K and E are related to K 2 Of the first and second type, r 1 And r 2 Respectively the radii of the two electrically powered coils.
The second stator inner ring permanent magnet 11 and the rotor inner ring permanent magnet 17 are respectively equivalent to n layers of coils, and the two layers of coils refer to a certain layer of the second stator inner ring permanent magnet 11 and a certain layer of the rotor inner ring permanent magnet 17, so that the magnetic force between each two layers of electrified equivalent coils can be obtained through the formula (2), and the magnetic forces between every two equivalent coils are superposed, so that the force between two permanent magnets or between the permanent magnets and the coil 7 can be obtained; and then the forces between every two permanent magnets or between the permanent magnets and the coil 7 are superposed to obtain the magnetic levitation force of the stator part acting on the rotor part. The magnitude of the magnetic levitation force is related to the residual magnetic strength Br of the permanent magnet and the size of the gap between the magnets, and under the same condition, the larger the residual magnetic strength Br of the permanent magnet is, the larger the generated levitation force is; the smaller the gap between the permanent magnets, the greater the levitative force because when the gap is smaller, the passing lines of magnetic induction within the gap will be denser, and therefore the greater the electromagnetic force generated. Meanwhile, the first stator inner ring permanent magnet 10, the third stator inner ring permanent magnet 12, the first stator outer ring permanent magnet 3, the third stator outer ring permanent magnet 5, the second stator outer ring permanent magnet 4 and the second stator inner ring permanent magnet 11 are symmetrically arranged in the structure, the magnetizing directions are opposite, the uniformity of the magnetic field can be increased while the magnetic field is enhanced, and therefore the large suspension force and the low suspension rigidity can be guaranteed.
Fig. 6 and 7 show the levitation force and the levitation stiffness calculated according to the parameters in the specific embodiment, and it can be seen that the levitation force remains substantially constant within ± 1mm when the current of the coil 7 is 0.8A, i.e. the levitation force is between 117.571N and 117.575N. By deriving the levitation force, the levitation stiffness can be obtained, which is less than 6N/m as can be seen from fig. 7. Because the suspension rigidity is low, the natural frequency of the system is low, and the vibration isolation performance is excellent. This is because the natural frequency is proportional to the stiffness when the mass is constant, i.e. it is
Therefore, when the rigidity is small, the natural frequency is also small, and the vibration isolation performance is better when the natural frequency is smaller, because the vibration isolation system has a wider vibration isolation bandwidth.
Fig. 8 shows the magnitude of the suspension force when the current in the coil 7 is 0.5A to 1.2A, and it can be seen from fig. 8 that different currents are fed into the coil 7, and the magnitude of the suspension force is different, so that the suspension force can be adjusted in real time when the load mass changes according to the property.
Example two
The difference between this embodiment and the first embodiment is: the first stator inner ring permanent magnet 10 and the first stator outer ring permanent magnet 3 are both radiated and magnetized from outside to inside, the third stator inner ring permanent magnet 12 and the third stator outer ring permanent magnet 5 are both radiated and magnetized from inside to outside, the magnetizing direction of the second stator inner ring permanent magnet 11 is from top to bottom, the magnetizing direction of the second stator outer ring permanent magnet 4 is from bottom to top, the mover inner ring permanent magnet 17 and the mover outer ring permanent magnet 16 are both radiated and magnetized from outside to inside, and the equivalent magnetizing direction of the coil 7 is from top to bottom.
The principle and the implementation mode of the present invention are explained by applying specific examples in the present specification, and the above descriptions of the examples are only used to help understanding the method and the core idea of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (8)
1. The utility model provides a gravity compensator of low rigidity and big suspending power which characterized in that: the stator part comprises a stator fixing structure, a stator inner ring permanent magnet, a coil and a stator outer ring permanent magnet, the stator inner ring permanent magnet, the coil and the stator outer ring permanent magnet are all fixed on the stator fixing structure, the rotor part comprises a rotor fixing structure, a rotor inner ring permanent magnet and a rotor outer ring permanent magnet, the rotor inner ring permanent magnet and the rotor outer ring permanent magnet are all fixed on the rotor fixing structure, the stator inner ring permanent magnet, the rotor inner ring permanent magnet, the coil, the rotor outer ring permanent magnet and the stator outer ring permanent magnet are coaxially arranged from inside to outside in sequence, gaps are arranged among the stator inner ring permanent magnet, the rotor inner ring permanent magnet, the coil, the rotor outer ring permanent magnet and the stator outer ring permanent magnet, and the stator part and the rotor part interact to generate a suspension force;
the stator inner ring permanent magnet and the stator outer ring permanent magnet respectively comprise three layers of permanent magnets which are sequentially overlapped from top to bottom, and the stator inner ring permanent magnet comprises a first stator inner ring permanent magnet, a second stator inner ring permanent magnet and a third stator inner ring permanent magnet which are sequentially overlapped from top to bottom; the stator outer ring permanent magnet comprises a first stator outer ring permanent magnet, a second stator outer ring permanent magnet and a third stator outer ring permanent magnet which are sequentially overlapped from top to bottom; the first stator inner ring permanent magnet, the second stator inner ring permanent magnet, the third stator inner ring permanent magnet, the first stator outer ring permanent magnet, the second stator outer ring permanent magnet, the third stator outer ring permanent magnet, the coil, the rotor inner ring permanent magnet and the rotor outer ring permanent magnet are all in a circular ring column structure;
the first stator inner ring permanent magnet and the third stator inner ring permanent magnet are symmetrically arranged in structure and opposite in magnetizing direction, the first stator outer ring permanent magnet and the third stator outer ring permanent magnet are symmetrically arranged in structure and opposite in magnetizing direction, and the second stator outer ring permanent magnet and the second stator inner ring permanent magnet are symmetrically arranged in structure and opposite in magnetizing direction;
the upper end face of the rotor inner ring permanent magnet is lower than the upper end face of the second stator inner ring permanent magnet, and the lower end face of the rotor inner ring permanent magnet is higher than the lower end face of the second stator inner ring permanent magnet.
2. The low stiffness and high levitation force gravity compensator according to claim 1, wherein: the upper end surface of the first stator inner ring permanent magnet and the upper end surface of the first stator outer ring permanent magnet are positioned on the same plane, and the lower end surface of the first stator inner ring permanent magnet and the lower end surface of the first stator outer ring permanent magnet are positioned on the same plane; the upper end surface of the second stator inner ring permanent magnet and the upper end surface of the second stator outer ring permanent magnet are positioned on the same plane, and the lower end surface of the second stator inner ring permanent magnet and the lower end surface of the second stator outer ring permanent magnet are positioned on the same plane; the upper end surface of the third stator inner ring permanent magnet and the upper end surface of the third stator outer ring permanent magnet are positioned on the same plane, and the lower end surface of the third stator inner ring permanent magnet and the lower end surface of the third stator outer ring permanent magnet are positioned on the same plane; the upper end surface of the rotor inner ring permanent magnet and the upper end surface of the rotor outer ring permanent magnet are positioned on the same plane, and the lower end surface of the rotor inner ring permanent magnet and the lower end surface of the rotor outer ring permanent magnet are positioned on the same plane; the upper end face of the coil is lower than the upper end face of the rotor inner ring permanent magnet, and the lower end face of the coil is higher than the lower end face of the rotor inner ring permanent magnet.
3. The low stiffness and high levitation force gravity compensator according to claim 1, wherein: the first stator inner ring permanent magnet and the first stator outer ring permanent magnet are both radiated and magnetized from inside to outside, the third stator inner ring permanent magnet and the third stator outer ring permanent magnet are both radiated and magnetized from outside to inside, the magnetizing direction of the second stator inner ring permanent magnet is from bottom to top, the magnetizing direction of the second stator outer ring permanent magnet is from top to bottom, the mover inner ring permanent magnet and the mover outer ring permanent magnet are both radiated and magnetized from inside to outside, and the equivalent magnetizing direction of the coil is from bottom to top.
4. The low stiffness and high levitation force gravity compensator according to claim 1, wherein: the first stator inner ring permanent magnet and the first stator outer ring permanent magnet are both subjected to outside-in radiation magnetization, the third stator inner ring permanent magnet and the third stator outer ring permanent magnet are both subjected to inside-out radiation magnetization, the magnetization direction of the second stator inner ring permanent magnet is from top to bottom, the magnetization direction of the second stator outer ring permanent magnet is from bottom to top, the rotor inner ring permanent magnet and the rotor outer ring permanent magnet are both subjected to outside-in radiation magnetization, and the equivalent magnetization direction of the coil is from top to bottom.
5. The low stiffness and high levitation force gravity compensator according to claim 1, wherein: the inner diameters of the first stator inner ring permanent magnet, the second stator inner ring permanent magnet and the third stator inner ring permanent magnet are the same, the outer diameters of the first stator inner ring permanent magnet, the second stator inner ring permanent magnet and the third stator inner ring permanent magnet are the same, the inner diameters of the first stator outer ring permanent magnet, the second stator outer ring permanent magnet and the third stator outer ring permanent magnet are the same, the outer diameters of the first stator outer ring permanent magnet, the second stator outer ring permanent magnet and the third stator outer ring permanent magnet are the same, the heights of the first stator inner ring permanent magnet, the third stator inner ring permanent magnet, the first stator outer ring permanent magnet and the third stator outer ring permanent magnet are the same, and the heights of the first stator inner ring rotor permanent magnet and the rotor outer ring permanent magnet are the same.
6. The low stiffness and high levitation force gravity compensator according to claim 1, wherein: the inner diameters of the first stator inner ring permanent magnet, the second stator inner ring permanent magnet and the third stator inner ring permanent magnet are all 5.5mm, the outer diameters of the first stator inner ring permanent magnet, the second stator inner ring permanent magnet and the third stator inner ring permanent magnet are all 10mm, the inner diameters of the first stator outer ring permanent magnet, the second stator outer ring permanent magnet and the third stator outer ring permanent magnet are all 46mm, the outer diameters of the first stator outer ring permanent magnet, the second stator outer ring permanent magnet and the third stator outer ring permanent magnet are all 48.5mm, the heights of the first stator inner ring permanent magnet, the third stator inner ring permanent magnet, the first stator outer ring permanent magnet and the third stator outer ring permanent magnet are all 8mm, the heights of the second stator inner ring permanent magnet and the second stator outer ring permanent magnet are both 30 mm;
the inner diameter of the rotor inner ring permanent magnet is 19mm, the outer diameter of the rotor inner ring permanent magnet is 23mm, the inner diameter of the rotor outer ring permanent magnet is 33mm, the outer diameter of the rotor outer ring permanent magnet is 37mm, and the heights of the rotor inner ring permanent magnet and the rotor outer ring permanent magnet are both 18 mm;
the internal diameter of coil is 26mm, the external diameter of coil is 31mm, the height of coil is 14 mm.
7. The low stiffness and high levitation force gravity compensator according to claim 1, wherein: the stator fixing structure comprises a stator baffle, a baffle ring, a bottom plate, a central shaft, a stator shell and a coil support, wherein the central shaft, the stator shell and the coil support are fixed on the bottom plate; the baffle ring, the first stator inner ring permanent magnet, the second stator inner ring permanent magnet and the third stator inner ring permanent magnet are all sleeved on the central shaft, the baffle ring is arranged at the upper end of the first stator inner ring permanent magnet, and the inner walls of the baffle ring, the first stator inner ring permanent magnet, the second stator inner ring permanent magnet and the third stator inner ring permanent magnet are all attached to the outer wall of the central shaft; the coil is embedded on the outer wall of the coil bracket; the outer wall of the first stator outer ring permanent magnet, the outer wall of the second stator outer ring permanent magnet and the outer wall of the third stator outer ring permanent magnet are both attached to the inner wall of the stator shell, the first stator outer ring permanent magnet and the upper end of the second stator outer ring permanent magnet are both fixed through the stator baffle plate between the stator baffle plate and the stator shell, and the lower end of the third stator outer ring permanent magnet and the lower end of the stator shell are both fixed on the bottom plate.
8. The low stiffness and high levitation force gravity compensator according to claim 1, wherein: the rotor fixed knot constructs still includes roof, active cell inner circle support, active cell outer lane support, active cell inner circle baffle and active cell outer lane baffle, active cell inner circle support with the upper end of active cell outer lane support all with roof fixed connection, active cell inner circle permanent magnet inlays to be established on the outer wall of active cell inner circle support, the lower extreme of active cell inner circle permanent magnet with the lower extreme of active cell inner circle support all fixes on the active cell inner circle baffle, active cell outer lane permanent magnet inlays to be established on the inner wall of active cell outer lane support, the lower extreme of active cell outer lane permanent magnet with the lower extreme of active cell outer lane support all fixes on the active cell outer lane baffle.
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| CN111734767B (en) * | 2020-06-29 | 2022-03-25 | 哈尔滨工业大学 | Air spring vibration isolator based on electromagnetic negative stiffness structure |
| CN111734777B (en) * | 2020-06-29 | 2022-03-29 | 哈尔滨工业大学 | Ultralow frequency vibration isolator based on vertical magnetization magnetic ring negative stiffness structure |
| CN111734778B (en) * | 2020-06-29 | 2022-03-29 | 哈尔滨工业大学 | Ultralow frequency air spring vibration isolator based on magnetic negative stiffness structure |
| CN111734775B (en) * | 2020-06-29 | 2022-03-29 | 哈尔滨工业大学 | Large-load ultralow-frequency air spring vibration isolator based on negative-stiffness magnetic spring |
| CN113044785B (en) * | 2021-03-25 | 2022-08-26 | 上海英华实业有限公司 | System for positioning, filling and conveying medicine bottles by utilizing magnetic suspension |
| CN115342158B (en) * | 2022-08-01 | 2023-04-28 | 哈尔滨工业大学 | Magnetic levitation gravity compensator with adjustable output and working method |
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