CN112865481B - Magnetic suspension actuator with three-degree-of-freedom vibration isolation function - Google Patents
Magnetic suspension actuator with three-degree-of-freedom vibration isolation function Download PDFInfo
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K49/00—Dynamo-electric clutches; Dynamo-electric brakes
- H02K49/10—Dynamo-electric clutches; Dynamo-electric brakes of the permanent-magnet type
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/22—Rotating parts of the magnetic circuit
- H02K1/27—Rotor cores with permanent magnets
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K49/00—Dynamo-electric clutches; Dynamo-electric brakes
- H02K49/10—Dynamo-electric clutches; Dynamo-electric brakes of the permanent-magnet type
- H02K49/104—Magnetic couplings consisting of only two coaxial rotary elements, i.e. the driving element and the driven element
- H02K49/106—Magnetic couplings consisting of only two coaxial rotary elements, i.e. the driving element and the driven element with a radial air gap
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
- H02K2201/18—Machines moving with multiple degrees of freedom
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Abstract
The invention discloses a magnetic suspension actuator with three-degree-of-freedom vibration isolation function, which solves the problem of less degree of freedom of the actuator in the prior art, has three degrees of freedom and can effectively ensure the beneficial effect of actuating power, and the specific scheme is as follows: a magnetic suspension actuator with three-degree-of-freedom vibration isolation function comprises a stator base, wherein one end of the stator base is arranged in an open mode, an inner supporting piece is arranged on the inner side of the stator base, the inner supporting piece of the stator base is annularly provided with an outer wall, and a first space is arranged between the inner supporting piece and the outer wall; the suspension body comprises a plurality of groups of magnetizing permanent magnets which are connected in sequence, the groups of magnetizing permanent magnets are arranged in a first space of the stator base, each group of magnetizing permanent magnets comprises an axial magnetizing permanent magnet which is arranged along the axial direction of the stator base and a plurality of radial magnetizing permanent magnets which are arranged along the radial direction of the stator base, the radial magnetizing permanent magnets are connected with the axial magnetizing permanent magnets, and pure iron is arranged between every two adjacent radial magnetizing permanent magnets.
Description
Technical Field
The invention relates to the field of micro-vibration isolation, in particular to a magnetic suspension actuator with three-degree-of-freedom vibration isolation function.
Background
The statements in this section merely provide background information related to the present disclosure and may not necessarily constitute prior art.
During the operation of the spacecraft, when the on-board equipment works, micro-vibration with the amplitude of millimeter level, micron level or even nanometer level and the frequency of 0.01 Hz-150 Hz, such as flutter response caused by momentum wheel work, satellite attitude adjustment, sun wing rotation and the like, can be generated, and the existence of the micro-vibration causes that some precision instruments cannot work normally and affects the high-resolution earth observation precision and the result of scientific experiments. In addition, in the machining industry, along with the development of micro-nano technology, the machining precision of products gradually goes from micron level, submicron level to nanometer level, even sub-nanometer level, the limit of traditional machining is broken through, and researches in related fields such as ultra-precision machining, optical instruments, micro-electro-mechanical systems and ultrasonic motors are continuously promoted. But the micro-vibration in the environment becomes a bottleneck restricting the further development of the micro-nano technology. The traditional active vibration isolation method has a good effect on isolating macroscopic vibration, but cannot isolate vibration with millimeter-scale amplitude, 0.01-10 Hz frequency and frequency lower than 0.01 Hz. The magnetic suspension vibration isolation technology has the characteristics of non-contact, wide frequency band, large displacement and the like, and achieves good effect in the application of isolating space micro-amplitude vibration. However, the existing magnetic suspension actuator has a small degree of freedom, and 6-8 actuators are required to be controlled together to achieve the purpose in order to isolate micro-vibration with six degrees of freedom in space. In addition, the control stroke and the bearing capacity of the current magnetic suspension actuator are small, and the application requirement of large bearing capacity in a low-frequency environment is difficult to meet.
The patent CN106953551A magnetic suspension gravity compensator solves the problem that the device structure is complex when the current air spring gravity compensator is applied to a vacuum environment, and develops the magnetic suspension gravity compensator with the advantages of simple structure, small force fluctuation, high force density, low loss and the like by utilizing the magnetic suspension technology. However, the gravity compensator has only 1 degree of freedom, is usually used for compensating the moving mass and is used as an auxiliary support of the suspension support part, and cannot replace the function of the magnetic suspension actuator in the low-frequency micro-vibration isolation control. In addition, heating problems are introduced by energizing the coil windings after long periods of operation.
Patent CN106917844A "active vibration isolation device with high thrust" proposes an active vibration isolation device with high thrust based on halbach permanent magnet array, which adopts the principle of linear motor to make the electrified coil in strong magnetic field generate larger thrust to offset with gravity, so as to achieve the purpose of vibration reduction. Although the device has larger output force than the design with the same volume, the device has larger volume and can only realize single-degree-of-freedom vibration isolation. In addition, the active and passive hybrid vibration isolation is adopted, so that the non-contact characteristic of the magnetic suspension technology is not fully utilized, and the nonlinearity is strong.
Patent CN107740842A "magnetic suspension low frequency vibration absorber" has designed a magnetic suspension low frequency vibration absorber to realizing isolation and control, promotion to microwave vibration under the heavy load and bearing mechanical structure low frequency anti-vibration performance to the low frequency resonance problem that brings because mechanical system inertia mismatch, has solved the defect that traditional rubber sensor is poor to the low frequency control effect, and self-adaptation regulation excitation coil current value realizes that isolator damping is adjusted and control. However, in order to adapt to vibration isolation control in different directions, the vibration absorber needs to utilize a symmetrical conversion installation mode, and in practical application, the vibration absorber still has limitations and cannot realize simultaneous control of multiple degrees of freedom.
The patent CN103453062A "zero-stiffness magnetic suspension active vibration isolator and six-degree-of-freedom vibration isolation system formed by the same" proposes a zero-stiffness magnetic suspension actuator composed of a permanent magnet passive vibration isolation unit, an active vibration isolation unit and a safety limit component. The vibration isolator can apply control force in the horizontal direction and the vertical direction, has zero rigidity in the horizontal direction and quasi-zero rigidity in the vertical direction, and can bear certain load. Six degrees of freedom low-frequency vibration can be isolated only by adopting the combined action of the six vibration isolators. However, the vibration isolator is complex in structure, large in mass and relatively small in effective load carrying capacity, and the number of adopted magnets is large.
Furthermore, there are scholars both at home and abroad that propose a magnetic levitation actuator with 2 degrees of freedom (1. rongjiang L, Fei Y, Xingke M, et al. research on the 2-coarse-of-free electromagnetic actuator in space [ J ]. Advances in Mechanical Engineering,2018,10(1): 168401781775026.2. Ravaud R, lemarquad G, lemang V, et al. analytical calculation of the magnetic field created by magnetic actuators [ J ]. IEEE Magnetics on Magnetics,2008,44 (1988): 1982. 1989), but the more and more the number of the actuators are commonly used in realizing vibration isolation, the more the control of the spatial coupling, the more the control of the spatial control is complicated.
Therefore, in the prior art, the magnetic suspension actuator can only realize the motion with 2 degrees of freedom, and cannot have more degrees of freedom, so that the problem of low control precision exists.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a magnetic suspension actuator with a three-degree-of-freedom vibration isolation function, effectively overcomes the defects of low degree of freedom, insufficient magnetic induction intensity and the like of the conventional magnetic suspension actuator, can be used for micro-vibration isolation in a ground 1g gravity field, and meets the micro-vibration isolation control requirement in an extremely low frequency band range and the structural requirement of a small-size and high-integration magnetic suspension vibration isolation system.
In order to achieve the purpose, the invention is realized by the following technical scheme:
a magnetic suspension actuator with three-degree-of-freedom vibration isolation function comprises:
the stator comprises a stator base, wherein one end of the stator base is arranged in an open manner, an inner supporting piece is arranged on the inner side of the stator base, the inner supporting piece in the stator base is annularly provided with an outer wall, and a first space is arranged between the inner supporting piece and the outer wall;
the suspension body comprises a plurality of groups of magnetizing permanent magnets which are sequentially connected, the groups of magnetizing permanent magnets are arranged in a first space of the stator base, each group of magnetizing permanent magnets comprises an axial magnetizing permanent magnet which is arranged along the axial direction of the stator base and a plurality of radial magnetizing permanent magnets which are arranged along the radial direction of the stator base, the radial magnetizing permanent magnets are connected with the axial magnetizing permanent magnets, pure iron is arranged between every two adjacent radial magnetizing permanent magnets, and one side of the last group of magnetizing permanent magnets is provided with the axial magnetizing permanent magnet;
wherein, the ring direction of each group permanent magnet that magnetizes all sets up vertical direction drive coil through stator base inboard, the outside, and each group permanent magnet that magnetizes encircles the inboard support piece in through stator base and sets up the horizontal direction drive coil.
According to the magnetic suspension actuator with the three-degree-of-freedom vibration isolation function, the vertical driving coil is located in the circumferential direction of the radial magnetizing permanent magnet, and the setting height of the vertical driving coil is the same as the width of the radial magnetizing permanent magnet.
In the magnetic suspension actuator with the three-degree-of-freedom vibration isolation function, the horizontal driving coil is located on the inner side of the axial magnetizing permanent magnet, and the setting height of the horizontal driving coil is the same as the width of the axial magnetizing permanent magnet.
According to the magnetic suspension actuator with the three-degree-of-freedom vibration isolation function, the clamping groove is formed in the outer wall of the stator base and used for installing one part of the vertical driving coil, and the other part of the vertical driving coil is installed through the inner supporting piece of the stator base.
According to the magnetic suspension actuator with the three-degree-of-freedom vibration isolation function, the suspension body comprises three groups of magnetizing permanent magnets, the first group of magnetizing permanent magnets are connected with the floater platform, and the last group of magnetizing permanent magnets are fixedly connected with the axial magnetizing permanent magnets on the side parts of the radial magnetizing permanent magnets to form a Halbach (Halbach) array.
In the magnetic suspension actuator with the three-degree-of-freedom vibration isolation function, the vertical driving coils and the horizontal driving coils are arranged in a staggered manner, and 4 groups of horizontal driving coils and 3 groups of vertical and horizontal driving coils are arranged from one end to the other end of the stator base;
horizontal direction drive coil and vertical horizontal direction drive coil set up in turn, cooperate Halbach (Halbach) array like this, can form 8 magnetic circuit, all design has the coil in every magnetic circuit, the performance of the permanent magnet that magnetizes can obtain abundant utilization, after circular telegram for each coil, the effect of coil cutting magnetic induction production lorentz force, through the size and the direction that change circular telegram electric current, can change the size and the direction of actuator output power.
In the magnetic suspension actuator with the three-degree-of-freedom vibration isolation function, the vertical driving coil is annular, and the horizontal driving coil comprises two groups of semi-annular coils.
According to the magnetic suspension actuator with the three-degree-of-freedom vibration isolation function, from one end to the other end of the stator base, the arrangement direction of the two half annular coils in the horizontal driving coil positioned in the middle is perpendicular to the arrangement direction of the driving coil in the outer horizontal direction.
According to the magnetic suspension actuator with the three-degree-of-freedom vibration isolation function, the magnetizing directions of the two adjacent axial magnetizing permanent magnets are opposite, and the magnetizing strengths are the same.
According to the magnetic suspension actuator with the three-degree-of-freedom vibration isolation function, the magnetizing directions of two adjacent radial magnetizing permanent magnets in each group of magnetizing permanent magnets are opposite, and the magnetizing strengths are the same.
The beneficial effects of the invention are as follows:
1) the magnetic suspension actuator is arranged by adopting the sequentially alternate magnetic circuit arrangement, so that the magnet assembly can form a plurality of magnetic field loops, the performance of the magnetizing permanent magnet is fully utilized, and the Halbach array is further enhanced.
2) The three-degree-of-freedom magnetic suspension actuator can generate acting forces along the x direction, the y direction and the z direction respectively by using limited volume and space, and compared with the actuator with the same volume and mass, the three-degree-of-freedom magnetic suspension actuator has high force dimensionality and large actuating force; the installation layout space of the three actuators can be compressed, and the functions of the three actuators can be realized by using one actuator.
3) The magnetic field of the three-degree-of-freedom magnetic suspension actuator is constant, the coils are independent, the respective degrees of freedom are not interfered with each other, the actuating forces are mutually decoupled, and each degree of freedom can be controlled independently.
4) The three-degree-of-freedom magnetic suspension actuator can be independently applied to vibration isolation control occasions requiring three degrees of freedom and can also be applied to precision positioning occasions requiring three degrees of freedom.
5) When the three-degree-of-freedom magnetic suspension actuator is applied to the occasions requiring six-degree-of-freedom vibration isolation control, the function can be realized by only 2 actuators, and the function of the six-degree-of-freedom vibration isolation control can be realized by eight actuators of the currently and commonly applied single-degree-of-freedom actuator.
6) The three-degree-of-freedom magnetic suspension actuator has the characteristic of flexible parameters, and the design parameters of the three degrees of freedom can be flexibly adjusted according to actual requirements.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate exemplary embodiments of the invention and together with the description serve to explain the invention and not to limit the invention.
Fig. 1 is a schematic diagram of a magnetic suspension actuator with three-degree-of-freedom vibration isolation function according to the present invention.
Fig. 2 is an exploded schematic view of a suspension body in a magnetic suspension actuator with three-degree-of-freedom vibration isolation function according to the present invention.
Fig. 3 is a schematic diagram of the assembly of a suspension body in a magnetic suspension actuator with three-degree-of-freedom vibration isolation function according to the present invention.
Fig. 4 is a schematic diagram of a magnetic suspension magnetic field simulation of a magnetic suspension actuator with three-degree-of-freedom vibration isolation function according to the first embodiment of the present invention.
Fig. 5 is a schematic diagram of magnetic suspension magnetic field simulation of a magnetic suspension actuator with three-degree-of-freedom vibration isolation function according to the second embodiment of the invention.
Fig. 6 is an exploded view of the driving coils of the stator base of the magnetic suspension actuator with three-degree-of-freedom vibration isolation function according to the present invention.
FIG. 7 is a schematic diagram of the assembly of a stator base in a magnetic suspension actuator with three-degree-of-freedom vibration isolation function according to the present invention.
FIG. 8 is a schematic longitudinal cross-sectional view of a stator base of a magnetic suspension actuator with three-degree-of-freedom vibration isolation function according to the present invention.
In the figure: the spacing or dimensions between each other are exaggerated to show the location of the various parts, and the schematic is shown only schematically.
Wherein: 1-a floater platform, 2-a first axial magnetizing permanent magnet, 3-a first radial magnetizing permanent magnet, 4-a first pure iron, 5-a second radial magnetizing permanent magnet, 6-a second axial magnetizing permanent magnet, 7-a third radial magnetizing permanent magnet, 8-a second pure iron, 9-a fourth radial magnetizing permanent magnet, 10-a third axial magnetizing permanent magnet, 11-a fifth radial magnetizing permanent magnet, 12-a third pure iron, 13-a sixth radial magnetizing permanent magnet, 14-a fourth axial magnetizing permanent magnet, 15-a stator base, 16-a first horizontal driving coil, 17-a first vertical driving coil, 18-a second vertical driving coil, 19-a second horizontal driving coil, 20-a third vertical driving coil, 21-fourth vertical direction drive coil, 22-third horizontal direction drive coil, 23-fifth vertical direction drive coil, 24-sixth vertical direction drive coil, 25-fourth horizontal direction drive coil, 26-inner support, 27-outer wall.
Detailed Description
It is to be understood that the following detailed description is exemplary and is intended to provide further explanation of the invention as claimed. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the invention. As used herein, the singular forms "a", "an", and/or "the" are intended to include the plural forms as well, unless the invention expressly state otherwise, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof;
for convenience of description, the words "up", "down", "left" and "right" in the present invention, if any, merely indicate correspondence with the directions of up, down, left and right of the drawings themselves, and do not limit the structure, but merely facilitate the description of the invention and simplify the description, rather than indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the invention.
Term interpretation section: the terms "mounted," "connected," "fixed," and the like in the present invention are to be understood in a broad sense, and for example, the terms "mounted," "connected," and "fixed" may be fixed, detachable, or integrated; the two components can be connected mechanically or electrically, directly or indirectly through an intermediate medium, or connected internally or in an interaction relationship, and the terms used in the present invention should be understood as having specific meanings to those skilled in the art.
As described in the background art, the prior art has a problem of low degree of freedom of the actuator, and in order to solve the above technical problem, the present invention provides a magnetic suspension actuator with a three-degree-of-freedom vibration isolation function.
In an exemplary embodiment of the present invention, referring to fig. 1, a magnetic levitation actuator having a three-degree-of-freedom vibration isolation function includes:
the stator comprises a stator base, wherein one end of the stator base is arranged in an open manner, an inner supporting piece is arranged on the inner side of the stator base, the inner supporting piece in the stator base is annularly provided with an outer wall, and a first space is arranged between the inner supporting piece and the outer wall;
the suspension body comprises a plurality of groups of magnetizing permanent magnets which are sequentially connected, the groups of magnetizing permanent magnets are arranged in a first space of the stator base, each group of magnetizing permanent magnets comprises an axial magnetizing permanent magnet which is arranged along the axial direction of the stator base and a plurality of radial magnetizing permanent magnets which are arranged along the radial direction of the stator base, the radial magnetizing permanent magnets are connected with the axial magnetizing permanent magnets, pure iron is arranged between every two adjacent radial magnetizing permanent magnets, and one side of the last group of magnetizing permanent magnets is provided with the axial magnetizing permanent magnet;
wherein, the ring direction of each group permanent magnet that magnetizes all sets up vertical direction drive coil through stator base inboard, the outside, and each group permanent magnet that magnetizes encircles the inboard support piece in through stator base and sets up the horizontal direction drive coil.
Furthermore, the axial magnetizing permanent magnet and the radial magnetizing permanent magnet are both annular magnetizing permanent magnets, and a neodymium iron boron magnetizing permanent magnet with the model number of N50 is adopted, the remanence of the neodymium iron boron magnetizing permanent magnet is 1.45T, and the coercive force of the neodymium iron boron magnetizing permanent magnet is 907000A/m.
The axial magnetizing permanent magnet, the radial magnetizing permanent magnet and the pure iron are bonded together through high-performance metal glue, and the first axial magnetizing permanent magnet is directly connected with the floater platform 1.
The vertical direction driving coil is positioned in the circumferential direction of the radial magnetizing permanent magnet, and the setting height of the vertical direction driving coil is the same as the width of the radial magnetizing permanent magnet; the horizontal driving coil is positioned on the inner side of the axial magnetizing permanent magnet, and the setting height of the horizontal driving coil is the same as the width of the axial magnetizing permanent magnet.
The suspension body comprises three groups of magnetizing permanent magnets, the first group of magnetizing permanent magnets are connected with the floater platform, and the last group of magnetizing permanent magnets are fixedly connected with axial magnetizing permanent magnets on the side parts of the radial magnetizing permanent magnets to form a Halbach (Halbach) array.
Furthermore, the vertical-direction drive coils and the horizontal-direction drive coils are arranged in a staggered mode, and 4 groups of horizontal-direction drive coils and 3 groups of vertical-direction drive coils are arranged from one end to the other end of the stator base;
the horizontal direction drive coil and the vertical horizontal direction drive coil are arranged in turn and alternately, so that 8 magnetic loops can be formed by matching with a Halbach (Halbach) array.
Specifically, a first pure iron 4 is fixed between a first radial magnetizing permanent magnet 3 and a second radial magnetizing permanent magnet 5, a second pure iron 8 is fixed between a third radial magnetizing permanent magnet 7 and a fourth radial magnetizing permanent magnet 9, and a third pure iron 12 is fixed between a fifth radial magnetizing permanent magnet 11 and a sixth radial magnetizing permanent magnet 13.
Referring to fig. 2 and 3, the second axial magnetizing permanent magnet 6, the third axial magnetizing permanent magnet 10 and the fourth axial magnetizing permanent magnet 14 are respectively and sequentially fixedly connected with the adjacent radial magnetizing permanent magnet combinations. It can be known from fig. 4 and 5 that 8 magnetic loops can be formed by arranging a plurality of groups of magnetizing permanent magnets, each magnetic loop is provided with a coil, the performance of the magnetizing permanent magnets can be fully utilized, after the coils are electrified, the coils cut magnetic induction to generate the action of lorentz force, and the magnitude and direction of the output force of the actuator can be changed by changing the magnitude and direction of the electrified current.
In the embodiment, the first axial magnetizing permanent magnet 2, the second axial magnetizing permanent magnet 6, the third axial magnetizing permanent magnet 10 and the fourth axial magnetizing permanent magnet 14 have the same size parameters and the same magnetizing strength. The inner diameter of each axial magnetizing permanent magnet is 100mm, the outer diameter is 130mm, and the height is 20 mm.
Wherein the magnetizing directions of the second axial magnetizing permanent magnet 6 and the third axial magnetizing permanent magnet 10 are vertical and downward. The magnetizing directions of the first axial magnetizing permanent magnet 2 and the fourth axial magnetizing permanent magnet 14 are vertical upwards.
The first radial magnetizing permanent magnet 3, the third radial magnetizing permanent magnet 7 and the fifth radial magnetizing permanent magnet 11 have the same size parameters, the inner diameter is 100mm, the outer diameter is 110mm, the height is 20mm, and the magnetizing strengths are also the same.
The second radial magnetizing permanent magnet 5, the fourth radial magnetizing permanent magnet 9 and the sixth radial magnetizing permanent magnet 13 have the same size parameters, the inner diameter is 120mm, the outer diameter is 130mm, the height is 20mm, and the magnetizing strengths are also the same.
The magnetizing directions of the first radial magnetizing permanent magnet 3, the fourth radial magnetizing permanent magnet 9 and the fifth radial magnetizing permanent magnet 11 are horizontal leftward, and the magnetizing directions of the second radial magnetizing permanent magnet 5, the third radial magnetizing permanent magnet 7 and the sixth radial magnetizing permanent magnet 13 are horizontal rightward.
Further, the first pure iron 4, the second pure iron 8 and the third pure iron 12 have the same size parameters, and adopt DT4, the inner diameter is 110mm, the outer diameter is 120mm and the height is 20 mm.
In the present embodiment, as shown in fig. 6 and 7, the first horizontal-direction driving coil 16, the second horizontal-direction driving coil 19, the third horizontal-direction driving coil 22, and the fourth horizontal-direction driving coil 25 are provided as semicircular ring coils in consideration of the driving direction requirement in accordance with the magnetic-field distribution. The first vertical-direction driving coil 17, the second vertical-direction driving coil 18, the third vertical-direction driving coil 20, the fourth vertical-direction driving coil 21, the fifth vertical-direction driving coil 23, and the sixth vertical-direction driving coil are circular-ring-shaped coils 24.
The stator base is formed by cutting aluminum alloy material wires, the horizontal driving coils and the vertical driving coils are wound on an inner supporting piece and an outer wall of the stator base (shown in figure 8), the stator base is provided with a base, the inner supporting piece and the outer wall extend upwards from the base of the stator base, the outer wall is basically annular, a first horizontal driving coil 16, a first vertical driving coil 17, a second horizontal driving coil 19, a third vertical driving coil 20, a third horizontal driving coil 22, a fifth vertical driving coil 23 and a fourth horizontal driving coil 25 are sequentially arranged from one end of the inner supporting piece to the other end of the inner supporting piece, and the arrangement heights of two adjacent driving coils of the inner supporting piece are the same; therefore, the inner supporting piece has a set height, and the structure of the inner supporting piece is matched with the structural form of each driving coil wound on the inner supporting piece.
In addition, three clamping grooves are formed in the outer wall of the stator base, each clamping groove is used for winding a second vertical driving coil 18, a fourth vertical driving coil 21 and a sixth vertical driving coil 24, and the three driving coils are identical in arrangement diameter and larger than the arrangement diameter of a fifth vertical driving coil 23; the arrangement diameters of the three drive coils, the first vertical-direction drive coil 17, the third vertical-direction drive coil 20, and the fifth vertical-direction drive coil 23, are the same.
In the embodiment, the suspension body is positioned in the first space of the stator base, and the control stroke of the actuator is +/-2.5 mm.
It should be noted that 2 three-degree-of-freedom magnetic suspension actuators are arranged at set intervals and can be installed diagonally, the stator bases of the two magnetic suspension actuators are fixed on the lower plane, and the floater platform is fixed on the upper plane, so that spatial six-degree-of-freedom micro-vibration isolation can be realized.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. A magnetic suspension actuator with three-degree-of-freedom vibration isolation function is characterized by comprising:
the stator comprises a stator base, wherein one end of the stator base is arranged in an open manner, an inner supporting piece is arranged on the inner side of the stator base, the inner supporting piece in the stator base is annularly provided with an outer wall, and a first space is arranged between the inner supporting piece and the outer wall;
the suspension body comprises a plurality of groups of magnetizing permanent magnets which are sequentially connected, the groups of magnetizing permanent magnets are arranged in a first space of the stator base, each group of magnetizing permanent magnets comprises an axial magnetizing permanent magnet which is arranged along the axial direction of the stator base and a plurality of radial magnetizing permanent magnets which are arranged along the radial direction of the stator base, the radial magnetizing permanent magnets are connected with the axial magnetizing permanent magnets, pure iron is arranged between every two adjacent radial magnetizing permanent magnets, and one side of the last group of magnetizing permanent magnets is provided with the axial magnetizing permanent magnet;
the inner side and the outer side of the annular direction of each group of magnetizing permanent magnets are respectively provided with a vertical driving coil through a stator base, and the inner side of each group of magnetizing permanent magnets is internally provided with a horizontal driving coil through a stator base inner supporting piece;
the vertical direction driving coil is positioned in the annular direction of the radial magnetizing permanent magnet, and the setting height of the vertical direction driving coil is the same as the width of the radial magnetizing permanent magnet;
the horizontal driving coil is positioned on the inner side of the axial magnetizing permanent magnet, and the setting height of the horizontal driving coil is the same as the width of the axial magnetizing permanent magnet.
2. The magnetic levitation actuator with three-degree-of-freedom vibration isolation function as claimed in claim 1, wherein a slot is formed in an outer wall of the stator base for mounting a part of the vertical driving coil.
3. The magnetic suspension actuator with the three-degree-of-freedom vibration isolation function as claimed in claim 1, wherein the suspension body comprises three groups of magnetizing permanent magnets, the first group of magnetizing permanent magnets is connected with the floater platform, and the last group of magnetizing permanent magnets is fixedly connected with the axial magnetizing permanent magnets at the side parts of the radial magnetizing permanent magnets.
4. The magnetic levitation actuator with three-degree-of-freedom vibration isolation function as claimed in claim 3, wherein the vertical direction driving coils and the horizontal direction driving coils are arranged in a staggered manner, and 4 groups of horizontal direction driving coils and 3 groups of vertical and horizontal direction driving coils are arranged from one end to the other end of the stator base;
the horizontal direction drive coils and the vertical horizontal direction drive coils are alternately arranged in sequence.
5. The magnetic levitation actuator with three-degree-of-freedom vibration isolation function as recited in claim 1, wherein the vertical direction driving coil is annular, and the horizontal direction driving coil comprises two sets of semi-annular coils.
6. The magnetic levitation actuator with three-degree-of-freedom vibration isolation function as recited in claim 1, wherein two half-ring coils of the middle horizontal driving coil are arranged in a direction perpendicular to the arrangement direction of the outer horizontal driving coil from one end to the other end of the stator base.
7. The magnetic suspension actuator with the three-degree-of-freedom vibration isolation function as claimed in claim 1, wherein the magnetizing directions of two adjacent axial magnetizing permanent magnets are opposite, and the magnetizing strengths are the same.
8. The magnetic suspension actuator with the three-degree-of-freedom vibration isolation function as claimed in claim 1, wherein the two adjacent radial magnetizing permanent magnets in each group of magnetizing permanent magnets have opposite magnetizing directions and the magnetizing strengths are the same.
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| CN202110044758.5A CN112865481B (en) | 2021-01-13 | 2021-01-13 | Magnetic suspension actuator with three-degree-of-freedom vibration isolation function |
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| CN202110044758.5A CN112865481B (en) | 2021-01-13 | 2021-01-13 | Magnetic suspension actuator with three-degree-of-freedom vibration isolation function |
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| CN113944715A (en) * | 2021-11-09 | 2022-01-18 | 上海交通大学 | Multi-degree-of-freedom active and passive vibration isolator |
| CN115388115A (en) * | 2022-08-24 | 2022-11-25 | 福州大学 | High-damping quasi-zero-stiffness vibration isolator based on low-density metal rubber |
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