CN103019046B - Six-freedom-degree magnetic levitation micropositioner based on multi-group individual drive decoupling control - Google Patents
Six-freedom-degree magnetic levitation micropositioner based on multi-group individual drive decoupling control Download PDFInfo
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- CN103019046B CN103019046B CN201210574176.9A CN201210574176A CN103019046B CN 103019046 B CN103019046 B CN 103019046B CN 201210574176 A CN201210574176 A CN 201210574176A CN 103019046 B CN103019046 B CN 103019046B
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Abstract
The invention discloses a six-freedom-degree magnetic levitation micropositioner based on multi-group individual drive decoupling control, belonging to semiconductor manufacturing equipment. The device comprises a micropositioner base, an objective table and three groups of individual drive devices which are arranged in an equilateral triangle and have same structures; each group of individual drives can generate horizontal and vertical driving forces and has the permanent magnet magnetic levitation gravity compensation function; a plane grating reading head and a plane grating ruler are fixedly installed corresponding to the central positions of the micropositioner base and the objective table; and three or more capacitance sensors are arranged at the edges of the micropositioner base, so as to realize the six-freedom-degree decoupling measurement. The device has the advantages of compact structure, easiness in machining and assembling, small heat generation quantity and large horizontal driving force, and is applicable to working requirements on high-speed high-acceleration motion of a working table of a photoetching machine and requirements on a strict constant temperature environment.
Description
Technical field
The invention belongs to semiconductor manufacturing equipment technical field, relate generally to a kind of six-freedom-degree magnetic suspension jiggle station based on many group drive uneoupled control.
Background technology
Litho machine is ultraprecise equipment crucial during great scale integrated circuit manufactures, and is also the guarantee that Moore's Law can obtain continuous verification simultaneously.The resolution of litho machine and alignment precision determine the minimum feature of integrated circuit (IC) chip, and to the continuous pursuit of minimum feature, more highdensity integrated circuit are achieved.In addition, for reducing the production cost of integrated circuit (IC) chip, the productive rate of litho machine is also the target that photoetching technique is pursued.Photo-etching machine work-piece platform technology, as one of the three large core technologies of litho machine, determines the resolution of litho machine, alignment precision and productive rate to a great extent.
Dual-stage technology is the mainstream technology means improving litho machine production efficiency at present, and for the speed improving work stage merely and acceleration, technical difficulty is lower, better effects if.Current representative products is Dutch ASML company based on the litho machine of TwinScan technology and dual-stage technology.
In litho machine, work stage is mainly divided into mask platform and silicon wafer stage, mask platform carrying photo mask board silicon wafer stage then carries silicon chip motion, for solving silicon chip and the contradiction of mask plate under high speed high acceleration moving condition between Long Distances and high precision, someone proposes the Driving technique of grand micro-combination.Namely mask platform and silicon wafer stage all adopt the compound motion control model of grand dynamic device carrying micropositioner, utilize that grand dynamic device realizes the Long Distances of micropositioner and micropositioner Six-freedom super-precision controls to compensate it, realize Long Distances under finally realizing the high speed high acceleration moving condition of silicon chip and mask plate and high-precision motion controls.Therefore the critical component of the final positioning precision of decision photo-etching machine work-piece platform is 6-freedom micro-motion platform.
The ultra-precision stage that current litho machine field uses mainly is divided into air supporting and magnetic over draft to support two kinds.Magnetic over draft support advantage is to be used in vacuum environment, is therefore the inevitable choice of deep ultraviolet and extreme ultraviolet lithography.The US Patent No. 6337484 of ASML company discloses a kind of version of six-freedom-degree magnetic suspension jiggle station, the Z-direction air supporting of this device adopts three gravity compensators to realize, and achieving horizontal and vertical mobile decoupling simultaneously, the program is the classical architecture of air supporting 6-freedom micro-motion platform.Tsing-Hua University Chinese patent CN101078889A discloses a kind of 6DOF micro displacement workbench, this device all adopts electromagnetic force Direct driver form in horizontal and vertical direction, mechanical friction and damping during work, adopt the electromagnetic drive mode based on lorentz principle simultaneously, namely electromagnetic force and input current are linear relationship, relative to three-phase alternating current control mode, there is the advantage of contral ripening, but Z-direction magnetic over draft support is continued to provide electromagnetic force to realize by three three electromagnetic drive units vertically arranged, namely the gravity compensation function that air supporting supports is not had, add unnecessary heat dissipation, this can have a negative impact to the harsh isoperibol of litho machine micropositioner work, therefore have much room for improvement.A & M university Won-jong Kim place, Texas seminar proposes a kind of six-freedom-degree magnetic suspension jiggle station, should be published in Precision Engineering magazine (31 volume 4 phase 337-350 pages in 2007) in achievement, title of article is Design and precision construction of novel magnetic-levitation-basedmulti-axis nano-scale positioning systems.This micropositioner is divided into Y type and Δ type two kinds of structures, adopt laser interferometer measurement horizontal shift, vertical deviation measured by three capacitive transducers, level and vertical driving all adopt three equivalent electromagnetic drivers, and share three permanent magnets, there is the advantage that structure is simply easy to control, but there is the defect that the little and stroke of driving force is difficult to expand.Tsing-Hua University Chinese patent CN101807010A discloses a kind of modified six-freedom-degree magnetic suspension jiggle station of such scheme, this device adopts cross-shaped configuration, cross frame is equipped with a two-freedom actuator, relative Won-jong Kim seminar 6-freedom micro-motion platform scheme, driving force increases to some extent, and X is to realizing two driving when moving with Y-direction, driving force crosses micropositioner center, six driver drives modes are identical, be easy to control, but still there is the uneven defect of Distribution of Magnetic Field that single permanent magnet brings, the difficulty of nonlinear Control is brought during extended-travel, and magnetic is floating still adopts electromagnetic mode, increase heat dissipation, it is more obvious when load quality increases, unfavorable to the isoperibol of micropositioner, have much room for improvement.
Summary of the invention
The present invention is directed to the deficiency that above-mentioned prior art exists, propose a kind of six-freedom-degree magnetic suspension jiggle station based on many group drive uneoupled control, this device realizes the six degree of freedom drived control of micropositioner by the uneoupled control of three groups of drive arranged in equilateral triangle, often organizes drive and all can produce level and vertical driving force and have permanent magnet magnetic and float gravity compensation function; Reach that structure is simple, to be easy to the strong driving force of extended-travel and tangential movement magnetic field large, float mode at vertical employing permanent magnet magnetic, gravity compensation not heat production simultaneously, be conducive to the object that micropositioner keeps isoperibol.
The object of the present invention is achieved like this:
Based on a six-freedom-degree magnetic suspension jiggle station for many group drive uneoupled control, described micropositioner comprises micropositioner base and objective table, arranges the first drive, the second drive and the 3rd drive between in equilateral triangle, be fixedly mounted with plane grating read head at micropositioner base center position, and at objective table center correspondence plane of arrangement grating scale, place arranges three or more capacitive transducer at micropositioner base edge, the first described drive comprises the first drive mover magnet steel, first drive magnetic steel of stator I, first drive magnetic steel of stator II, first drive stator coil I and the first drive stator coil II, wherein the first drive mover magnet steel is packed on objective table bottom surface, first drive magnetic steel of stator I to be packed on micropositioner base top surface and to be positioned at immediately below the first drive mover magnet steel, first drive magnetic steel of stator II is packed on micropositioner base top surface and the outside staggered positions place be positioned at immediately below the first drive mover magnet steel, first drive stator coil I is packed on the first drive magnetic steel of stator II end face, first drive stator coil II is packed on the first drive magnetic steel of stator I end face, the second described drive is identical with the first drive with mounting means with the 3rd drive structure, the first described drive magnetic steel of stator I is contrary with the pole orientation of the first drive mover magnet steel, and the first drive magnetic steel of stator II is identical with the pole orientation of the first drive mover magnet steel.
The technology of the present invention advantage and beneficial effect have: micropositioner six degree of freedom drived control is realized by the three groups of drive uneoupled control arranged in equilateral triangle, often organize drive all can produce level and vertical driving force and there is permanent magnet magnetic and float gravity compensation function, three groups of drive structures are identical, there is easy processing, assemble simple advantage; Often the employing of group drive is contactless directly drives mode, without friction and mechanical damping, has high rigidity and high frequency sound advantage; Vertical employing permanent magnet magnetic buoyant weight force compensating mode, can reduce micropositioner heat dissipation, is beneficial to micropositioner and keeps isoperibol; Horizontal drive adopts left and right twin coil asymmetrical arrangement, and horizontal actuator force is large, is applicable to the job requirement of photo-etching machine work-piece platform level high speed high acceleration.
Accompanying drawing explanation
Fig. 1 is the general structure schematic diagram of 6-freedom micro-motion platform of the present invention;
Fig. 2 is three groups of drive distribution schematic diagrams of 6-freedom micro-motion platform of the present invention;
Fig. 3 is the magnet steel coil position schematic diagram of list group drive of the present invention;
Fig. 4 is the magnet steel loop construction schematic diagram of list group drive of the present invention;
Fig. 5 is 6-freedom micro-motion platform capacitance displacement sensor distribution schematic diagram of the present invention;
Fig. 6 is 6-freedom micro-motion platform plane grating chi installation site of the present invention schematic diagram;
Fig. 7 is list group drive horizontal and vertical drive principle figure of the present invention;
Fig. 8 is 6-freedom micro-motion platform driving force distributed schematic diagram of the present invention.
Piece number in figure: 1-micropositioner base; 2-objective table; 3A-first drive; 3B-second drive; 3C-the 3rd drive; 3A-1-first drive mover magnet steel; 3A-2-first drive magnetic steel of stator I; 3A-3-first drive magnetic steel of stator II; 3A-4-first drive stator coil I; 3A-5-first drive stator coil II; 4-capacitance displacement sensor; 5-plane grating read head; 6-plane grating chi.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present invention is described in detail.
A kind of six-freedom-degree magnetic suspension jiggle station based on many group drive uneoupled control, described micropositioner comprises micropositioner base 1 and objective table 2, between micropositioner base 1 and objective table 2, configure installation first drive 3A, the second drive 3B and the 3rd drive 3C in equilateral triangle, at micropositioner base 1 center position, be positioned at first, second and third drive 3A, 3B, 3C inside line is fixedly mounted with plane grating read head 5, and at objective table 2 center correspondence plane of arrangement grating scale 6, arrange more than three capacitance displacement sensors 4 in micropositioner base 1 edge, the first described drive 3A comprises the first drive mover magnet steel 3A-1, first drive magnetic steel of stator I 3A-2, first drive magnetic steel of stator II 3A-3, first drive stator coil I 3A-4 and the first drive stator coil II 3A-5, wherein the first drive mover magnet steel 3A-1 is packed on objective table 2 bottom surface, first drive magnetic steel of stator I 3A-2 to be packed on micropositioner base 1 end face and to be positioned at immediately below the first drive mover magnet steel 3A-1, first drive magnetic steel of stator II 3A-3 is packed on micropositioner base 1 end face and the outside staggered positions place be positioned at immediately below the first drive mover magnet steel 3A-1, first drive stator coil I 3A-4 is packed on the first drive magnetic steel of stator II 3A-3 end face, first drive stator coil II 3A-5 is packed on the first drive magnetic steel of stator I 3A-2 end face, the second described drive 3B is identical with the first drive 3A with mounting means with the 3rd drive 3C structure, the first described drive magnetic steel of stator I 3A-2 is contrary with the pole orientation of the first drive mover magnet steel 3A-1, and the first drive magnetic steel of stator II 3A-3 is identical with the pole orientation of the first drive mover magnet steel 3A-1.
Principle of work of the present invention is as follows:
Capacitance displacement sensor 4 for measuring the vertical deviation of objective table 2 relative to micropositioner base 1, three or more capacitance displacement sensor 4 can calculate objective table 2 center Z-direction displacement and around X-axis and swing offset RX and RY around Y-axis, plane grating read head 5 and plane grating chi 6 coordinate the X and Y-direction displacement and the swing offset around Z that can calculate objective table 2 center, because the first drive magnetic steel of stator II 3A-3 is packed in the outside staggered positions immediately below the first drive mover magnet steel 3A-1, so the magnetic field intensity being packed in the present position, inner side of the first drive stator coil I 3A-4 of the first drive magnetic steel of stator II 3A-3 end face is better than outside, the position of close first drive magnetic steel of stator I 3A-2 is inner side, the magnetic field of final formation is made a concerted effort identical with a magnetic field force induced direction, inner side, be the horizontal actuator force of the first drive 3A, the direction of this horizontal actuator force and size are controlled by the direction of current of the first drive stator coil I 3A-4 and size, vertical drive power Fv is realized by the electromagnetic force of the first drive stator coil II 3A-5, and direction and size are by the Current Control in this coil, first drive magnetic steel of stator I 3A-2 is contrary with the pole orientation of the first drive mover magnet steel 3A-1, and repulsion is therebetween in order to compensate the gravity of objective table, three horizontal actuator force Fh being mutually 120 ° of distributions synthesize the drived control that can realize three degree of freedom X, Y, RZ of objective table 2, and three vertical driving force Fv synthesis of arranging in equilateral triangle can realize the drived control of three degree of freedom Z, RX, RY of objective table 2.
Claims (1)
1. the six-freedom-degree magnetic suspension jiggle station based on many group drive uneoupled control, it is characterized in that described micropositioner comprises micropositioner base (1) and objective table (2), between micropositioner base (1) and objective table (2), configure installation first drive (3A), the second drive (3B) and the 3rd drive (3C) in equilateral triangle; At micropositioner base (1) center position, be positioned at first, second and third drive (3A, 3B, 3C) inside line and be fixedly mounted with plane grating read head (5), and in objective table (2) center correspondence plane of arrangement grating scale (6), arrange more than three capacitance displacement sensors (4) in micropositioner base (1) edge; described the first drive (3A) comprises the first drive mover magnet steel (3A-1), first drive magnetic steel of stator I (3A-2), first drive magnetic steel of stator II (3A-3), first drive stator coil I (3A-4) and the first drive stator coil II (3A-5), wherein the first drive mover magnet steel (3A-1) is packed on objective table (2) bottom surface, first drive magnetic steel of stator I (3A-2) to be packed on micropositioner base (1) end face and to be positioned at immediately below the first drive mover magnet steel (3A-1), first drive magnetic steel of stator II (3A-3) is packed on micropositioner base (1) end face and the outside staggered positions place be positioned at immediately below the first drive mover magnet steel (3A-1), first drive stator coil I (3A-4) is packed on the first drive magnetic steel of stator II (3A-3) end face, first drive stator coil II (3A-5) is packed on the first drive magnetic steel of stator I (3A-2) end face, described the second drive (3B) is identical with the first drive (3A) with mounting means with the 3rd drive (3C) structure, the first described drive magnetic steel of stator I (3A-2) is contrary with the pole orientation of the first drive mover magnet steel (3A-1), and the first drive magnetic steel of stator II (3A-3) is identical with the pole orientation of the first drive mover magnet steel (3A-1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210574176.9A CN103019046B (en) | 2012-12-19 | 2012-12-19 | Six-freedom-degree magnetic levitation micropositioner based on multi-group individual drive decoupling control |
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| CN201210574176.9A CN103019046B (en) | 2012-12-19 | 2012-12-19 | Six-freedom-degree magnetic levitation micropositioner based on multi-group individual drive decoupling control |
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| CN103019046A CN103019046A (en) | 2013-04-03 |
| CN103019046B true CN103019046B (en) | 2015-03-11 |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103383526B (en) * | 2013-04-27 | 2015-09-30 | 清华大学 | The dynamic stacking workbench of a kind of thick essence |
| CN104847825B (en) * | 2014-02-14 | 2018-03-13 | 上海微电子装备（集团）股份有限公司 | Array magnetic suspension gravity compensator |
| CN104880911B (en) * | 2014-02-28 | 2018-01-30 | 上海微电子装备（集团）股份有限公司 | A kind of photo-etching machine work-piece platform and its vertical position initial method |
| CN105045042B (en) | 2015-04-23 | 2017-06-16 | 清华大学 | A kind of silicon wafer stage exposure area six-degree of freedom displacement measuring method |
| CN105425550A (en) * | 2016-01-14 | 2016-03-23 | 哈尔滨工业大学 | Moving coil gas-magnetism combined air-suspension double-workpiece-stage vector circular-arc exchange method and device based on staggered magnetic steel arrangement |
| CN108667263B (en) * | 2018-05-31 | 2019-06-28 | 华中科技大学 | A kind of load compensation mechanism and globular motor suitable for globular motor |
| CN112928891B (en) * | 2021-02-03 | 2023-02-21 | 复旦大学 | Six-degree-of-freedom magnetic levitation table device and control method thereof |
| CN117253844B (en) * | 2023-11-20 | 2024-03-08 | 季华实验室 | Six-degree-of-freedom arc-shaped magnetic levitation micro-motion stage and device transfer device |
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| CN101807010A (en) * | 2010-03-19 | 2010-08-18 | 清华大学 | Nano-precision six-freedom-degree magnetic suspension jiggle station and application |
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| CN102681364A (en) * | 2012-05-16 | 2012-09-19 | 华中科技大学 | Six-degree-of-freedom magnetic suspension micro-positioner |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7541699B2 (en) * | 2005-12-27 | 2009-06-02 | Asml Netherlands B.V. | Magnet assembly, linear actuator, planar motor and lithographic apparatus |
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| CN101978585A (en) * | 2008-04-18 | 2011-02-16 | 株式会社安川电机 | Multi-degree-of-freedom actuator and stage device |
| CN101807010A (en) * | 2010-03-19 | 2010-08-18 | 清华大学 | Nano-precision six-freedom-degree magnetic suspension jiggle station and application |
| CN102681364A (en) * | 2012-05-16 | 2012-09-19 | 华中科技大学 | Six-degree-of-freedom magnetic suspension micro-positioner |
Non-Patent Citations (2)
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| 六维磁悬浮纳米级精密工件台的研究;宋文荣 等;《微细加工技术》;20030331(第1期);15-21 * |
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