CN211605113U - Micropositioner and motion device comprising micropositioner - Google Patents
Micropositioner and motion device comprising micropositioner Download PDFInfo
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- CN211605113U CN211605113U CN202020876271.4U CN202020876271U CN211605113U CN 211605113 U CN211605113 U CN 211605113U CN 202020876271 U CN202020876271 U CN 202020876271U CN 211605113 U CN211605113 U CN 211605113U
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- 230000005484 gravity Effects 0.000 claims abstract description 52
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000013461 design Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000001514 detection method Methods 0.000 description 3
- 238000005339 levitation Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 244000089486 Phragmites australis subsp australis Species 0.000 description 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
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Abstract
The utility model provides a sport device, include: a stage; the rotary base is positioned below the carrying platform, an annular upper concave cavity is formed in the upper surface of the rotary base, a lower concave cavity is formed in the lower surface of the rotary base, and the projections of the upper concave cavity and the lower concave cavity in the direction perpendicular to the upper surface of the rotary table are staggered; the rotary motor is accommodated in the annular upper concave cavity and comprises a rotary motor rotor and a rotary motor stator, the rotary motor stator is fixed relative to the rotary base, and the rotary motor rotor is fixed relative to the carrier; the vertical driving device is positioned in the lower cavity and is configured to drive the rotating platform to vertically move; the floating gravity compensation device is positioned in the lower concave cavity and can perform gravity compensation on the rotating platform; and the micro-motion base is provided with an upward-facing concave cavity, and the rotating base is positioned in the concave cavity and is vertically and slidably connected to the micro-motion base through the crossed roller guide rails. The utility model discloses a vertical size of telecontrol equipment is showing and is reducing, is showing vertical motion precision and the vertical direction precision that increases telecontrol equipment.
Description
Technical Field
The utility model relates to an integrated circuit equips the manufacturing field, and more specifically relates to a fine motion platform reaches telecontrol equipment including this fine motion platform, and this fine motion platform can provide vertical motion and the rotation function of high accuracy. The motion device comprising the micro-motion platform provides a high-precision and large-stroke horizontal motion function.
Background
In the field of detecting the thickness of a semiconductor silicon wafer film, a workpiece platform is required to be capable of completing the handover of the silicon wafer with a silicon wafer transmission system, and meanwhile, a 12-inch or 8-inch silicon wafer is required to be carried to complete 360-degree rotation and vertical movement, so that the detection of the thickness of the silicon wafer film is completed. Therefore, for the workpiece stage device applied to film thickness detection, the micro-motion stage generally provides motion in both the rotation direction and the vertical direction, and is a core component in the workpiece stage device. Along with the continuous improvement of the requirement on the yield, the film thickness detection precision is continuously improved, and the running speed, the acceleration and the performance of the workpiece table are also improved. This requires a work table having a design with a lighter weight, a flatter shape, and a higher motion accuracy. In US2004246012a1, a micro-stage solution in this field is proposed. The vertical moving platform is fixed on the vertical device, and the chuck unit is fixed on the vertical moving platform. And the vertical device drives the screw rod and the wedge-shaped block through the linear motor, and two reeds with the thickness of 0.5mm are used for providing reciprocating force so as to realize vertical motion. The invention has simpler structure, but has larger height dimension, difficult realization of flat design and poorer vertical motion precision.
In US6779278B1, another approach to the micro-stage in the field is proposed. The vertical moving platform (Z platform) is fixed on the vertical device, and the chuck is fixed on the vertical moving platform. And the vertical device is directly driven by the voice coil motor, the gravity compensation of the voice coil motor is realized by the spring, and the load of the voice coil motor is reduced. The invention has simple structure and small vertical size, and basically realizes the flat design. However, because the voice coil motor adopts the spring for gravity compensation, the vertical precision is difficult to realize high precision.
Therefore, in the field of device manufacturing of integrated circuits, a precision motion device capable of realizing a flat design and solving the problem of low vertical motion precision is required.
SUMMERY OF THE UTILITY MODEL
The utility model discloses a problem that fine motion platform height dimension is big on the left among the prior art is solved to accurate telecontrol equipment with flat structure, realizes the flat design of fine motion platform structure to solve the problem that vertical motion direction rigidity is low on the left and the vertical motion precision of fine motion platform is low on the left.
Particularly, the present invention solves the above problems by providing an exercise device comprising: exercise apparatus comprising:
a stage;
the rotary base is positioned below the carrier, an annular upper concave cavity is formed in the upper surface of the rotary base, a lower concave cavity is formed in the lower surface of the rotary base, and projections of the upper concave cavity and the lower concave cavity in the projection direction perpendicular to the upper surface of the rotary base are mutually staggered;
a rotary motor housed within the annular upper cavity, the rotary motor including a rotary motor mover and a rotary motor stator, the rotary motor stator being fixed relative to the rotating base, the rotary motor mover being fixed relative to the stage;
a vertical drive device located within the lower cavity and configured to drive the rotating base to move vertically;
a floating gravity compensation device located within the lower cavity and configured to gravity compensate the rotating base; and
a micro-motion base to which the rotating base is vertically slidably connected relative to the micro-motion base by cross roller guide rails.
In one embodiment, the micro-motion base has an upwardly facing cavity, and the rotating base is located within the cavity and is vertically slidably connected to an inner periphery of the cavity by the cross roller rail.
In one embodiment, the vertical drive device and the floating gravity compensation device are integral with one another and are located within the lower cavity.
In one embodiment, the lower cavity comprises a plurality of lower cavities, and the vertical drive device and the floating gravity compensation device are located in different lower cavities.
In one embodiment, the floating gravity compensation device is a magnetic floating gravity compensation device.
In one embodiment, a vertical position measuring device is disposed within the annular upper cavity and is secured to the rotating base.
In one embodiment, the periphery of the micro-motion platform is provided with a vertical position measuring device.
In one embodiment, the plurality of lower cavities includes a central cavity and a peripheral cavity, the planar position of the central cavity being surrounded by the annular upper cavity and being configured to receive the vertical drive; the peripheral cavity is located at the periphery of the annular upper cavity and is used for accommodating the floating gravity compensation device.
In one embodiment, the lower cavity comprises three or four peripheral cavities, each of which accommodates one floating gravity compensation device.
In one embodiment, the structure in which the vertical drive device and the floating gravity compensation device are integrated with each other comprises:
the outer surface of the voice coil motor stator is sleeved with an inner magnetic ring; and
the outer surface of the voice coil motor rotor is sleeved with an outer magnetic ring.
The utility model also provides a sports device, a serial communication port, sports device includes:
the micro-motion stage;
the Y-direction moving plate is provided with the micro-motion platform;
the X-direction moving plate is arranged on the X-direction moving plate in a sliding manner along the Y direction;
the X-direction moving plate is arranged on the X base in a sliding mode along the X direction. The parts for realizing the rotational motion and the vertical motion in the prior art motion devices capable of realizing the multi-dimensional motion are generally overlapped with each other, so that the motion devices are large in vertical dimension. Compared with the prior art, the utility model discloses a vertical size of telecontrol equipment is showing and is reducing, and through the application of gravity compensation device and the cross roller guide rail that floats, is showing vertical motion precision and the vertical guide precision that increases telecontrol equipment.
Drawings
Fig. 1 is a perspective view of a micropositioner according to the present invention.
Fig. 2 is a cross-sectional view of a micropositioner according to the present invention.
Fig. 3 is a perspective view of the exercise apparatus according to the present invention.
Fig. 4 is another embodiment of the layout of a magnetic levitation gravity compensation device according to the present invention.
Fig. 5 shows a magnetic levitation gravity compensation device according to another embodiment of the present invention.
Detailed Description
The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings so that the objects, features and advantages of the invention can be more clearly understood. It should be understood that the embodiments shown in the drawings are not intended as limitations on the scope of the invention, but are merely illustrative of the true spirit of the technical solution of the invention.
In the following description, for the purposes of illustrating various disclosed embodiments, certain specific details are set forth in order to provide a thorough understanding of the various disclosed embodiments. One skilled in the relevant art will recognize, however, that the embodiments may be practiced without one or more of the specific details. In other instances, well-known devices, structures and techniques associated with this application may not be shown or described in detail to avoid unnecessarily obscuring the description of the embodiments.
Throughout the specification and claims, the word "comprise" and variations thereof, such as "comprises" and "comprising," are to be understood as an open, inclusive meaning, i.e., as being interpreted to mean "including, but not limited to," unless the context requires otherwise.
Reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment. Thus, the appearances of the phrases "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
As used in this specification and the appended claims, the singular forms "a", "an", and "the" include plural referents unless the context clearly dictates otherwise. It should be noted that the term "or" is generally employed in its sense including "and/or" unless the context clearly dictates otherwise.
In the following description, for the sake of clarity, the structure and operation of the present invention will be described with the aid of directional terms, but the terms "front", "rear", "left", "right", "outer", "inner", "outer", "inward", "upper", "lower", etc. should be understood as words of convenience and not as words of limitation.
A micropositioner 100 according to the present invention will now be described with reference to the accompanying drawings. As shown in fig. 1 and 2, the micropositioner 100 includes a stage 105, a rotating base 102, a vertical motion device 108, a floating gravity compensation device 106, and a micropositioner base 101.
In the embodiment shown in fig. 2, the stage 105 may be, for example, a vacuum chuck, and the wafer is held by providing vents in the stage 105 and forming a vacuum below the vents. It should be understood, however, that the stage 105 may hold the wafer on the stage by other means, such as by electrostatic attraction.
The rotating base 102 is disposed below the stage 105, and can drive the stage 105 to move vertically. As shown in fig. 1 and 2, the rotating base 102 has a substantially rectangular parallelepiped shape, specifically, a rectangular parallelepiped shape having a substantially square horizontal cross section. It should be understood, however, that the shape of the rotating base 102 is not limited to the above shape, but may be arbitrarily set as desired. The micro-motion base 101 is positioned below the rotating base 102, and the rotating base 102 can vertically move relative to the micro-motion base 101.
An annular cavity is provided in the upper surface of the rotating base 102 for receiving a rotating motor 109, a rotating bearing 110, and a rotation measuring device 107. A lower cavity is provided in the lower surface of the rotating base 102 for receiving a vertical drive 108. The projections of the annular recess and the lower recess in the direction perpendicular to the upper surface of the rotating base 102 are offset from each other so that the annular recess and the lower recess can be disposed at the same vertical height, thereby enabling a significant reduction in the vertical dimension of the rotating base 102. This configuration of the rotating base 102 effectively reduces the vertical height of the overall exercise apparatus.
The rotating base 102 has a circular face 1024 on its upper surface surrounded by the inner circumferential wall of the annular cavity. A gap is provided between the circular surface 1024 and the stage 105, so that the stage 105 can rotate with respect to the rotating base 102.
The rotary electric machine 109 includes a rotary electric machine mover and a rotary electric machine stator. The rotary motor mover is fixed to the stage 105, and the rotary motor stator is fixed to the rotary base 102, thereby driving the stage 105 to perform a rotary motion with respect to the rotary base 102. The inner ring of the rotary bearing 110 is fixed to the rotary base 102, and the outer ring of the rotary bearing 110 is fixed to the rotary motor mover, thereby providing guidance for the rotational movement of the stage 105. A rotation measuring device 107, preferably a grating scale, is fixed on the rotating base 102 for providing information on the rotational position of the stage 105.
A lower cavity is provided on the lower surface of the rotating base 102. The lower cavity includes a floating gravity compensation device cavity 1024d and a vertical drive device cavity 1024 e. In the embodiment shown in fig. 1-2, four corner positions between the outer peripheral profile of the rotating base 102 and the annular cavity are respectively provided with a floating gravity compensation device cavity 1024d for accommodating the floating gravity compensation device 106. A vertical drive device cavity 1024e is formed in the center of the lower surface of the rotating base 102 at a position corresponding to the area surrounded by the inner circumferential wall of the annular cavity.
In the illustrated embodiment, the vertical drive 108 is a voice coil motor for driving the rotating base 102 together with the stage 105 to move vertically relative to the fine motion base 101. As shown in FIG. 2, vertical drive 108 is located within vertical drive cavity 1024e on the lower surface of rotating base 102 and carries rotating base 102. In this embodiment, the vertical drive 108 includes a voice coil motor mover 1082 and a voice coil motor stator 1081. The voice coil motor stator 1081 is fixed on the micro-motion base 101, the voice coil motor mover 1082 is sleeved on the voice coil motor stator 1081 and can move vertically relative to the voice coil motor stator 1081, and the voice coil motor mover 1082 is fixedly connected with the rotary base 102 to drive the rotary base 102 to move vertically.
In the embodiment shown in fig. 2, the voice coil motor stator 1081 has a cylindrical hollow structure. Voice coil motor active cell 1082 is cylindrical, and is equipped with central through-hole and ring cavity on the lower surface, and this ring cavity is used for holding voice coil motor stator 1081's cylinder wall, and when microscope carrier 105 is the vacuum adsorption formula microscope carrier, this central through-hole provides installation space for the vacuum line. It is understood that the vertical device 108 may alternatively be provided as other linear movement devices, such as hydraulic movement devices, without departing from the scope of the present invention.
As shown in fig. 1-2, the micro-motion base 101 has a cavity with an upward opening, and the rotating base 102 is located in the cavity and is vertically slidably connected to the inner periphery of the cavity. It should be understood that the micro mount 101 may be provided in other forms. For example, a bracket is provided on the micro base 101, and the rotating base 102 is vertically slidably connected to the bracket.
In the prior art, the vertical device realizes vertical motion by driving the screw rod and the wedge block through the linear motor, and gravity compensation is realized through the spring, so that the horizontal deviation of the vertical motion is relatively small. And the utility model discloses in, vertical drive arrangement 108 realizes through voice coil motor, and gravity compensation realizes through floating installation, and the horizontal migration of vertical guide is great relatively, is difficult to realize the vertical guide of high accuracy through conventional guide rail. Thus, in the illustrated embodiment, vertical guides 104a-104d are configured as cross roller guides with one of the guide mover and the guide stator being fixed to the rotating base 102 and the other being fixed to the micro-motion base 101, thereby providing a highly rigid guide for the vertical motion of the stage 105, ensuring accuracy of the vertical motion.
In this embodiment, four sets of floating gravity compensation devices 106 are respectively disposed in the floating gravity compensation device cavities 1024d in the four corners of the rotating base 102, so as to provide gravity compensation for the vertical voice coil motor and improve the vertical motion accuracy. The floating gravity compensation device 106 may be an air-floating gravity compensation device or a magnetic-floating gravity compensation device.
Fig. 2 illustrates the floating gravity compensation device 106 by way of example, which includes: an inner magnetic ring support 1062, an inner magnetic ring 1061, an outer magnetic ring 1063, and an outer magnetic ring seat 1064. The inner magnetic ring 1061 is sleeved on the inner magnetic ring support 1062. While the inner magnet ring support 1062 contacts the top of the floating gravity compensation device cavity 1024d and carries the rotating base 102. The outer magnetic ring seat 1064 has a cylindrical shape, and the outer magnetic ring 1063 is embedded in an inner surface of the outer magnetic ring seat 1064. An annular gap is formed between the inner magnet ring 1061 and the outer magnet ring 1063. The magnetic pole direction of the inner magnet ring 1061 is upward in the axial direction (Z direction), and the magnetic pole direction of the outer magnet ring 1063 is outward in the radial direction. It should be understood, however, that the magnetic pole direction of the inner magnet ring 1061 may be axially downward, while the magnetic pole direction of the outer magnet ring 1062 is radially inward. The inner ring support 1061 can be pushed up by the magnetic force between the inner and outer rings 1061, 1063, thereby applying an upward lifting force to the top surface of the floating gravity compensation device cavity 1024d, such that the lifting force is substantially equal to the gravity of the rotating base 102 and other devices carried by the rotating base 102, such as the rotating table motor and the stage.
An example of an air flotation gravity compensation device is not shown in the drawings. The apparatus applies an upward lifting force to the top surface of the floating gravity compensation device cavity 1024d using pressurized air such that the lifting force is substantially equal to the weight of the rotating base 102 and other devices carried by the rotating base 102, such as the rotating table motor and the stage.
As shown in fig. 3, the horizontal movement apparatus 200 includes: a Y-direction moving plate 209, an X-direction moving plate 204 and an X base 207. The micro-motion stage 100 is disposed on a Y-direction motion plate 209, two Y- direction rails 201a and 201b and a Y-direction linear motor 202 are disposed on an X-direction motion plate 204, and the Y-direction motion plate 209 is fixedly connected to sliders of the Y-direction rails 201 so as to be capable of sliding along the two Y-direction rails 201. Two Y-direction guide rails 201 are provided on the X-direction moving plate in parallel to each other in the Y-direction, specifically, on both sides of the upper surface of the X-direction moving plate, and a Y-direction linear motor 202 is provided between the two Y- direction guide rails 201a and 201b to drive the Y-direction moving plate 209 to move along the two Y- direction guide rails 201a and 201 b. However, it should be understood that the two Y- guide rails 201a and 201b and the Y-direction linear motor 202 may be arranged in other manners as long as the Y-direction moving plate 209 can be driven to move along the Y-direction guide rail 201. In the illustrated embodiment, a Y-position measuring device 203, preferably a grating scale, is also provided on the side edge of the Y-motion plate 209. It should be understood that the Y-position measuring device 203 may be disposed at any position as long as it can acquire a moving signal of the Y-moving plate 209 in the Y direction. Two X-direction guide rails 208a and 208b and an X-direction linear motor 205 are provided on the X base 207, and the X-direction moving plate 204 is fixedly connected to the slider of the X-direction guide rail 208 so as to be slidable along the two X-direction guide rails 208. Two X-direction guide rails 208 are provided on the X-base in parallel to each other in the X-direction, specifically, on both sides of the upper surface of the X-base, and an X-direction linear motor 205 is provided between the two X-direction guide rails 208a and 208b to drive the X-direction moving plate 204 to move along the two X-direction guide rails 208a and 208 b. However, it should be understood that the X-directional guide rails 208a and 208b and the X-directional linear motor 205 may be arranged in other manners as long as the X-directional moving plate 204 can be driven to move along the X-directional guide rails 208a and 208 b. Wherein the X-direction guide rails 208a and 208b and the X-direction guide rails 'sliders and the Y- direction guide rails 201a and 201b and the Y-direction guide rails' sliders may also be formed of cross roller guides, respectively. In the above embodiment, 4 floating gravity compensation devices 106 are arranged at four corners of the rotating base 102. But a triangular layout, preferably a 120 deg. equiangular layout, may be used as in the embodiment shown in figure 4. That is, three floating gravity compensation device cavities 1024d are disposed on the rotating base 102, and are respectively used for accommodating the floating gravity compensation devices.
Fig. 5 shows a further variant embodiment of the invention. In the two embodiments, the solution that the voice coil motor and the floating gravity compensation device 106 are two separate devices is adopted, wherein the voice coil motor is arranged at the center of the rotating base 102, the rotating base and the stage 105 are pushed along the Z-axis direction, and gravity compensation is provided for the voice coil motor by the floating gravity compensation device 106 (arranged in a quadrangle or a triangle) arranged at the periphery. In the present embodiment, the floating gravity compensation device 106 in the form of a voice coil motor and a magnetic levitation gravity compensation device is integrated and disposed at the center of the rotating base 102. As shown in fig. 5, the voice coil motor stator 5011 is externally fitted with an inner magnetic ring 5012, and the motor coil 5013 is externally fitted with an outer magnetic ring 5014. Therefore, the integrated structure can be used for generating a suspension force through the magnetic force between the inner magnetic ring 5012 and the outer magnetic ring 5014 and compensating the gravity of the voice coil motor, and can also be used for generating a Lorentz force through a coil cutting magnetic field and providing a driving force for vertical movement of the rotating table and the carrying platform 105 which move along the Z direction.
While the preferred embodiments of the present invention have been described in detail above, it should be understood that aspects of the embodiments can be modified, if necessary, to employ aspects, features and concepts of the various patents, applications and publications to provide yet further embodiments.
These and other changes can be made to the embodiments in light of the above detailed description. In general, in the claims, the terms used should not be construed to be limited to the specific embodiments disclosed in the specification and the claims, but should be construed to include all possible embodiments along with the full scope of equivalents to which such claims are entitled.
Claims (11)
1. A micropositioner, comprising:
a stage;
the rotary base is positioned below the carrier, an annular upper concave cavity is formed in the upper surface of the rotary base, a lower concave cavity is formed in the lower surface of the rotary base, and projections of the upper concave cavity and the lower concave cavity in the direction perpendicular to the upper surface of the rotary base are mutually staggered;
a rotary motor housed within the annular upper cavity, the rotary motor including a rotary motor mover and a rotary motor stator, the rotary motor stator being fixed relative to the rotating base, the rotary motor mover being fixed relative to the stage;
a vertical drive device located within the lower cavity and configured to drive the rotating base to move vertically;
a floating gravity compensation device located within the lower cavity and configured to gravity compensate the rotating base; and
a micro-motion base to which the rotating base is vertically slidably connected relative to the micro-motion base by cross roller guide rails.
2. The micropositioner of claim 1, wherein the micropositioner has an upwardly facing cavity, and the rotary base is located within the cavity and is vertically slidably connected to an inner periphery of the cavity by the cross roller rails.
3. A micropositioner according to claim 1 or 2, in which the vertical drive means and the floating gravity compensation means are integral with one another and located within the lower cavity.
4. The micropositioner of claim 1, wherein the lower cavity comprises a plurality of lower cavities, and wherein the vertical drive device and the floating gravity compensation device are each located in a different lower cavity.
5. The micropositioner of claim 1 or 4, wherein the floating gravity compensation device is a magnetic floating gravity compensation device.
6. The micropositioner of claim 1, wherein a vertical position measurement device is disposed within the annular upper cavity and is secured to the rotating base.
7. A micropositioner according to claim 1, characterized in that its periphery is provided with vertical position measuring means.
8. The micropositioner of claim 4, wherein the plurality of lower cavities includes a central cavity and a peripheral cavity, the planar position of the central cavity being surrounded by the annular upper cavity and configured to receive the vertical drive; the peripheral cavity is located at the periphery of the annular upper cavity and is used for accommodating the floating gravity compensation device.
9. The micropositioner of claim 7, wherein the lower cavity comprises three or four peripheral cavities, each of which houses one floating gravity compensation device.
10. The micropositioner of claim 3, wherein the structure in which the vertical drive and the floating gravity compensation device are integral with one another comprises:
the outer surface of the voice coil motor stator is sleeved with an inner magnetic ring; and
the outer surface of the voice coil motor rotor is sleeved with an outer magnetic ring.
11. An exercise device, comprising:
a micropositioner according to any one of claims 1 to 10;
the Y-direction moving plate is provided with the micro-motion platform;
the X-direction moving plate is arranged on the X-direction moving plate in a sliding manner along the Y direction;
the X-direction moving plate is arranged on the X base in a sliding mode along the X direction.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020876271.4U CN211605113U (en) | 2020-05-22 | 2020-05-22 | Micropositioner and motion device comprising micropositioner |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020876271.4U CN211605113U (en) | 2020-05-22 | 2020-05-22 | Micropositioner and motion device comprising micropositioner |
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| CN211605113U true CN211605113U (en) | 2020-09-29 |
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| CN202020876271.4U Active CN211605113U (en) | 2020-05-22 | 2020-05-22 | Micropositioner and motion device comprising micropositioner |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113038003A (en) * | 2021-02-26 | 2021-06-25 | 上海精测半导体技术有限公司 | Automatic focusing device and method, and detection device and method |
| CN114123852A (en) * | 2022-01-25 | 2022-03-01 | 上海隐冠半导体技术有限公司 | Micro-motion platform and motion device |
| CN114857429A (en) * | 2022-04-26 | 2022-08-05 | 深圳市大族机器人有限公司 | Positioning platform and positioning system |
| CN116954038A (en) * | 2023-09-19 | 2023-10-27 | 上海隐冠半导体技术有限公司 | Movable connecting assembly and macro-micro combined vertical positioning device |
-
2020
- 2020-05-22 CN CN202020876271.4U patent/CN211605113U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113038003A (en) * | 2021-02-26 | 2021-06-25 | 上海精测半导体技术有限公司 | Automatic focusing device and method, and detection device and method |
| CN113038003B (en) * | 2021-02-26 | 2023-11-14 | 上海精测半导体技术有限公司 | Automatic focusing device and method, and detection device and method |
| CN114123852A (en) * | 2022-01-25 | 2022-03-01 | 上海隐冠半导体技术有限公司 | Micro-motion platform and motion device |
| CN114857429A (en) * | 2022-04-26 | 2022-08-05 | 深圳市大族机器人有限公司 | Positioning platform and positioning system |
| CN116954038A (en) * | 2023-09-19 | 2023-10-27 | 上海隐冠半导体技术有限公司 | Movable connecting assembly and macro-micro combined vertical positioning device |
| CN116954038B (en) * | 2023-09-19 | 2023-12-08 | 上海隐冠半导体技术有限公司 | Movable connecting assembly and macro-micro combined vertical positioning device |
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