CN211125041U

CN211125041U - Ultra-precision machining positioning platform

Info

Publication number: CN211125041U
Application number: CN201921597976.6U
Authority: CN
Inventors: 毛文亮
Original assignee: Gansu Institute of Mechanical and Electrical Engineering
Current assignee: Gansu Institute of Mechanical and Electrical Engineering
Priority date: 2019-09-25
Filing date: 2019-09-25
Publication date: 2020-07-28
Anticipated expiration: 2029-09-25

Abstract

The utility model discloses an ultra-precision machining positioning platform, which comprises a base, Y is installed to base upper end middle part symmetry to the guide rail, and Y is to installing Y to guide rail permanent magnet array along Y to Y guide rail upper end middle part, Y is to guide rail top both ends fixed mounting has Y to guide rail stator coil winding, sliding connection Y is to guide rail slide on the Y to the guide rail, and Y is to guide rail slide inboard corresponding Y to guide rail permanent magnet array and install Y to guide rail permanent magnet array, Y is to guide rail slide inboard circular bead department symmetry and installs Y to slide stator coil winding. The utility model has the advantages of reasonable design in structure, the utility model discloses the application of linear electric motor that constitutes permanent magnet array and stator coil winding in ultra-precise fine motion positioning platform can make the workstation be nanometer fine motion and small rotation along the X, Y, Z axle, realizes the ultra-precise fine motion location of 6 degrees of freedom of workstation, has advantages such as reaction rate is fast, sensitivity is high, the location is accurate and simple structure.

Description

Ultra-precision machining positioning platform

Technical Field

The utility model relates to a positioning platform specifically is an ultra-precision machining positioning platform.

Background

The conventional ultra-precision machining micro-motion positioning platform has various forms such as piezoelectric ceramic driven flexible hinge guide, air floating type, magnetic suspension type and the like, wherein the magnetic suspension type precision micro-motion platform has structural forms such as LL shape, TU shape, three-point type, multilayer stack and the like.

In the prior art, the piezoelectric ceramic driven flexible hinge guide micro-motion platform cannot meet the requirement of large stroke high precision, although large stroke high precision positioning can be realized by adopting a two-stage driving mechanism of a guide rail and a flexible hinge, two-stage control is continuously switched, the control difficulty is increased, the positioning speed and the positioning precision are reduced, the air floating type micro-motion platform needs an air pressure device and is complex in structure, the stability of magnetic suspension LL shapes and TU shapes is poor, a certain height difference exists between two one-dimensional platforms designed in a multi-layer stack structure in the vertical direction, the distances between guide surfaces and between the platforms and the guide surfaces are often larger, and Abbe errors are difficult to control.

Disclosure of Invention

An object of the utility model is to provide an ultra-precision machining positioning platform to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme:

the utility model provides an ultra-precision machining positioning platform, includes the base, base upper end middle part symmetry installs Y to the guide rail, and Y is to Y to guide rail upper end middle part along Y to installing Y to guide rail permanent magnet array, Y is to guide rail top both ends fixed mounting has Y to guide rail stator coil winding, sliding connection Y is to guide rail slide on the Y to the guide rail, and Y is to guide rail slide inboard correspondence Y to guide rail permanent magnet array and install Y to guide rail permanent magnet array, Y is to guide rail slide inboard circular bead department symmetry and installs Y to guide rail stator coil winding, be connected with the X to the guide rail between the Y to the guide rail slide, and X is to guide rail upper end middle part along X to install X to guide rail permanent magnet array, X is to guide rail top both ends fixed mounting has X to guide rail stator coil winding, sliding connection X is to guide rail slide on the X to the guide rail, and, the other end of the flexible hinge is fixedly connected with a workbench, an X-direction sliding plate permanent magnet array is arranged on the inner side of the X-direction guide rail sliding plate corresponding to the X-direction guide rail permanent magnet array, and X-direction sliding plate stator coil windings are symmetrically arranged on shoulders on the inner side of the X-direction guide rail sliding plate.

As a further aspect of the present invention: and a Y-direction laser interferometer is arranged at the upper end of the base corresponding to the Y-direction guide rail, and an X-direction laser interferometer is arranged at the upper end of the base corresponding to the X-direction guide rail.

As a further aspect of the present invention: the Y-direction guide rail forms an H-shaped rail structure through the Y-direction guide rail sliding plate and the X-direction guide rail.

As a further aspect of the present invention: the cross sections of the Y-direction guide rail and the X-direction guide rail are both T-shaped.

Compared with the prior art, the beneficial effects of the utility model are that:

the utility model has the advantages of reasonable design in structure, the utility model discloses the application of linear electric motor that constitutes permanent magnet array and stator coil winding in ultra-precise fine motion positioning platform can make the workstation be nanometer fine motion and small rotation along the X, Y, Z axle, realizes the ultra-precise fine motion location of 6 degrees of freedom of workstation, has advantages such as reaction rate is fast, sensitivity is high, the location is accurate and simple structure.

Drawings

Fig. 1 is a structural diagram of an ultra-precision machining positioning platform.

FIG. 2 is a drawing showing the connection between the table and the X-direction rail sliding plate in the positioning stage for ultra-precision machining.

Fig. 3 is a structure diagram of a flexible hinge in an ultra-precision machining positioning platform.

Fig. 4 is a cross-sectional view of a guide rail in an ultra-precision machining positioning platform.

Fig. 5 is a cross-sectional view of a guide rail sliding plate in the ultra-precision machining positioning platform.

In the figure: the X-direction guide rail comprises a Y-direction guide rail stator coil winding 1, a Y-direction guide rail sliding plate 2, a Y-direction sliding plate permanent magnet array 3, a Y-direction guide rail permanent magnet array 4, a Y-direction guide rail 5, a Y-direction laser interferometer 7, a base 8, an X-direction guide rail permanent magnet array 9, an X-direction sliding plate permanent magnet array 10, an X-direction guide rail sliding plate 11, a workbench 12, an X-direction guide rail stator coil winding 13, a flexible hinge 14, an X-direction sliding plate stator coil winding 15 and an X-direction guide rail 16.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1 to 5, in an embodiment of the present invention, an ultra-precision machining positioning platform includes a base 8, a Y-direction guide rail 5 is symmetrically installed at a middle portion of an upper end of the base 8, a Y-direction guide rail permanent magnet array 4 is installed at a middle portion of an upper end of the Y-direction guide rail 5 along a Y direction, Y-direction guide rail stator coil windings 1 are fixedly installed at two ends of a top portion of the Y-direction guide rail 5, a Y-direction guide rail sliding plate 2 is slidably connected to the Y-direction guide rail 5, a Y-direction sliding plate permanent magnet array 3 is installed at an inner side of the Y-direction guide rail sliding plate 2 corresponding to the Y-direction guide rail permanent magnet array 4, Y-direction sliding plate stator coil windings are symmetrically installed at a shoulder portion of the inner side of the Y-direction guide rail sliding plate 2, an X-direction guide rail 16 is connected between the Y-direction guide rail sliding plates 2, the X-direction guide rail 16 is connected with an X-direction guide rail sliding plate 11 in a sliding mode, a flexible hinge 14 is installed at the upper end of the X-direction guide rail sliding plate 11, the other end of the flexible hinge 14 is fixedly connected with a workbench 12, an X-direction sliding plate permanent magnet array 10 is installed on the inner side of the X-direction guide rail sliding plate 11 corresponding to the X-direction guide rail permanent magnet array 9, and an X-direction sliding plate stator coil winding 15 is symmetrically installed on the shoulder of the inner side of the X-direction guide.

The upper end of the base 8 is provided with a Y-direction laser interferometer 7 corresponding to the Y-direction guide rail, and the upper end of the base 8 is provided with an X-direction laser interferometer 17 corresponding to the X-direction guide rail 16.

The Y-guide rail 5 has an H-shaped rail structure formed by the Y-guide rail slide 2 and the X-guide rail 16.

The Y-guide rail 5 and the X-guide rail 16 are both T-shaped in cross section.

The utility model discloses a theory of operation is:

the utility model relates to an ultra-precision machining positioning platform, when Y is to two sets of Y on the 2 slide of guide rail to slide stator coil winding circular telegram, interact with Y on the Y to guide rail 5 to slide permanent magnet array 4, constitute suction type linear electric motor, when changing two sets of Y on the 2 slide of Y to guide rail to slide stator coil winding circular telegram electric current, can change Y to guide rail permanent magnet array 4's magnetic force, from this control workstation 12 does fine motion Δ Z along the Z axle, or does the fine motion thetax, thetay along X, Y axle; when two groups of Y-direction guide rail stator coil windings 6 at two ends of a Y-direction guide rail 5 are electrified, the Y-direction guide rail stator coil windings interact with a Y-direction sliding plate permanent magnet array 3 below a Y-direction guide rail sliding plate 2, and a suction type linear motor and a repulsion type linear motor are respectively formed at two ends, so that the workbench 12 can be controlled to do horizontal micro motion delta Y along a Y axis or do micro rotation theta Z around a Z axis; when two groups of X-direction guide rail stator coil windings 13 at two ends of the X-direction guide rail 16 are electrified, the two groups of X-direction guide rail stator coil windings interact with the X-direction guide rail permanent magnet array 9 below the X-direction guide rail sliding plate 11, and two ends of the X-direction guide rail permanent magnet array form a suction type linear motor and a repulsion type linear motor respectively, so that the workbench 12 can be controlled to do horizontal micro motion delta X along the X axis. X, Y A permanent magnet eddy current damper is also arranged on the guide rail sliding plate to realize the control of displacement and rotation angle of the worktable along X, Y axes, 2 glass ceramics reflectors are arranged on the lower surface of the worktable 12, and the 2 glass ceramics reflectors and the X, Y directional laser interferometer measure the displacement and rotation angle of X, Y axes in real time.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. The utility model provides an ultra-precision machining positioning platform, includes base (8), its characterized in that, base (8) upper end middle part symmetry is installed Y to guide rail (5), and Y installs Y to guide rail permanent magnet array (4) to guide rail (5) upper end middle part along Y, Y has Y to guide rail stator coil winding (1) to guide rail (5) top both ends fixed mounting, sliding connection Y is to guide rail slide (2) on Y to guide rail (5), and Y installs Y to guide rail permanent magnet array (3) to guide rail slide (2) inboard corresponding Y to guide rail permanent magnet array (4), Y is to guide rail slide (2) inboard circular bead department symmetry and installs Y to guide rail stator coil winding, be connected with X between Y to guide rail slide (2) to guide rail (16), and X is to guide rail (16) upper end middle part along X to install X to guide rail permanent magnet array (9), x is to guide rail stator coil winding (13) to X fixed mounting in guide rail (16) top both ends, sliding connection X is to guide rail slide (11) on X to guide rail (16), and flexible hinge (14) are installed to X to guide rail slide (11) upper end, and flexible hinge (14) other end fixed connection workstation (12), X is to guide rail slide (11) inboard and to the X and to guide rail permanent magnet array (9) and install X and to slide permanent magnet array (10), X is to guide rail slide (11) inboard circular bead department symmetry and installs X and to slide stator coil winding (15).

2. The ultra-precision machining positioning platform as claimed in claim 1, wherein a Y-direction laser interferometer (7) is mounted on the upper end of the base (8) corresponding to the Y-direction guide rail, and an X-direction laser interferometer (17) is mounted on the upper end of the base (8) corresponding to the X-direction guide rail (16).

3. The ultra-precision machining positioning platform as claimed in claim 1, characterized in that the Y-direction guide rail (5) forms an H-shaped rail structure through the Y-direction guide rail sliding plate (2) and the X-direction guide rail (16).

4. The ultra-precision machining positioning platform as claimed in claim 1, wherein the cross-sectional shapes of the Y-direction guide rail (5) and the X-direction guide rail (16) are both T-shaped.