CN202556075U - Perpendicular shaft macro and micro composite linear motion platform device - Google Patents
Perpendicular shaft macro and micro composite linear motion platform device Download PDFInfo
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- CN202556075U CN202556075U CN2012200784602U CN201220078460U CN202556075U CN 202556075 U CN202556075 U CN 202556075U CN 2012200784602 U CN2012200784602 U CN 2012200784602U CN 201220078460 U CN201220078460 U CN 201220078460U CN 202556075 U CN202556075 U CN 202556075U
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Abstract
The utility model discloses a perpendicular shaft macro and micro composite linear motion platform device which is characterized in that a macro-moved platform is guided by an air-floating guide rail and driven by a linear motor, and an optical grating ruler is adopted to detect position accuracy. The macro-moved platform drives a micro-moved platform. An integrated metal plate is cut and processed to form a frame, the micro-moved platform and flexible hinges which play the roles of connection and guide, and the frame is fixed on the macro-moved platform. Frictional resistance between the micro-moved platform and the macro-moved platform is eliminated by air-flotation. The micro-moved platform is connected with a frame body through the flexible hinges, and the flexible hinges are arranged symmetrically. By means of micro-elasticity bending deformation of materials, the perpendicular shaft macro and micro composite linear motion platform device can guarantee guide and motion of the micro-moved platform. A piezoelectric ceramic driver or a voice coil motor is used to provide power for the motion of the micro-moved platform, the displacement of the micro-moved platform is responded by a micro-moved sensor, and therefore accurate motion and displacement of the micro-moved platform can be achieved.
Description
Technical field
The utility model relates to the grand little composite straight line exemplary motion stage device of a kind of vertical axis.
Background technology
Grand little compound motion platform can be used in the feed system of ultraprecise processing.Grand motion platform is realized big stroke millimeter or micron-sized feeding, and micromotion platform is realized little stroke micron or nanoscale feeding.But the non-axisymmetrical surfaces of the compound processing precise optical element of macro/micromotion can repeat to process the various special-shaped element with complicated shape, for example: free-form surface lens/minute surface, micro mirror array, micro-cannelure array etc.
General grand little compound motion platform is on the basis of grand motion platform, typical case or special-purpose small micro motion platforms such as sharp knife servomechanism is installed, the experimental study that this micromotion platform can't be used to carry certain load or carry out grand little compound platform.
The utility model content
To the general little problem of grand little compound motion platform bearer amount, the purpose of the utility model provides the grand little composite straight line exemplary motion stage device of a kind of vertical axis.
For realizing above-mentioned purpose, the utility model is taked following technical scheme: macro-moving stage adopts air-float guide rail guiding, linear motor driving, grating chi detection position precision; Macro-moving stage drives micromotion platform.Framework around being gone out by bulk metal plate cutting processing, inner micromotion platform and rising is connected and the flexible hinge of guide effect, and frame fixation provides power by piezoelectric ceramic actuator or voice coil motor on macro-moving stage.Eliminate frictional resistance through air supporting between micromotion platform and the macro-moving stage.
The grand little composite straight line exemplary motion stage device of a kind of vertical axis that the utility model provides; Comprise base 1; It is carrying entire infrastructure, and air-float guide rail 2 is installed on the base 1, has elongated slot in the middle of the air-float guide rail length direction upper surface; Linear motor stator electric 3 is set in the air-float guide rail elongated slot, and grating scale 4 is equipped with in air-float guide rail 2 sides; Macro-moving stage 6 is installed on the air-float guide rail 2; Linear motor rotor 5 is installed in the macro-moving stage 6; Energising back linear motor stator electric 3 acts on the magnetic field of linear motor rotor 5, produces power drive macro-moving stage 6 and on air-float guide rail 2, moves, and the moving chi 15 of grating also is housed on the macro-moving stage 6; The moving chi 15 of grating acts in motion process with grating scale 4, detects the positional information of grand displacement; Four flexible hinges 10 and micromotion platform 11 that framework 7, I shape distribute are made through the line cutting by a bulk metal; Its middle frame 7 is fixed on the macro-moving stage 6; Piezoelectric ceramic actuator or voice coil motor 14 are housed between one side of one side of micromotion platform 11 and framework 7; The moving direction of micromotion platform 11 and macro-moving stage 6 is vertical each other, and the bottom of micromotion platform 11 is provided with some pores and air flue, through the gases at high pressure that spray in the hole; Make between micromotion platform and the macro-moving stage contact-making surface and form air film, to reduce or eliminate friction; Bearing table 12 is fixed on the micromotion platform 11 with following backing plate 13 together.Gapped between bearing table 12 and the framework 7, backing plate makes a little higher than framework all around of the height of bearing table, avoids contact friction.Between bearing table 12 and the framework 7 the fine motion sensor is housed, wherein the first fine motion sensor 8 is equipped with in the bearing table side, and frame facet is equipped with the second fine motion sensor 9, to detect the displacement of micromotion platform.
Cadre's wider width of above-mentioned each flexible hinge 10, and the hinge width is narrower, each two end of doing is the hinge position.Therefore the elastic bending deflection of the stressed generation of material concentrates on narrower hinge, and a cadre does not have distortion.The profile at hinge position is that the circular arc of symmetry is excessive, concentrates to avoid stress.
The bottom shape of above-mentioned macro-moving stage 6 and air-float guide rail 2 surface engagement have pore and air flue on the contact-making surface of macro-moving stage 6 and air-float guide rail 2, and pressure-air sprays from the hole, between air-float guide rail 2 and macro-moving stage 6, forms air film.
Above-mentioned bearing table 12 areas are beneficial to carry various instruments to carry out grand little compound research greater than micromotion platform 11.
Air-float guide rail supporting macro-moving stage, linear electric motors provide the driving force of grand motion, optical grating ruler measurement movement position information.
Micromotion platform is connected with the framework entity through flexible hinge.Flexible hinge is symmetrically distributed, and through the micro-elastic bending deflection of material, guarantees the guiding of micromotion platform and moves.
The power that piezoelectric ceramic actuator or voice coil motor provide micromotion platform to move, the displacement of fine motion sensor sensing micromotion platform.Thereby realize the high precision displacement and the location of micromotion platform.
Through gas membrane micromotion platform and macro-moving stage are isolated, avoid two planes directly to contact, reduce or eliminate frictional resistance.
Micromotion platform connects bearing table through backing plate, and bearing table and area are suitable with the macro-moving stage area, and promptly size is bigger, makes things convenient for the Installation Research instrument.
The utility model has the following advantages owing to adopt above technical scheme:
1) through air-float guide rail supporting macro-moving stage, linear electric motors provide the driving force of grand motion, optical grating ruler measurement movement position information.Have the advantages that bearing capacity is strong, kinematic accuracy is high, movement velocity is fast, acceleration is big;
2) direction of motion of micromotion platform is vertical with the direction of motion of macro-moving stage.
3) micromotion platform is connected with the framework entity through flexible hinge.Flexible hinge is symmetrically distributed, and through the micro-elastic bending deflection of material, guarantees the guiding of micromotion platform and moves.The power that piezoelectric ceramic actuator or voice coil motor provide micromotion platform to move, the displacement of fine motion sensor sensing micromotion platform.Thereby realize the high precision displacement and the location of micromotion platform;
4) through gas membrane micromotion platform and macro-moving stage are isolated, avoid two planes directly to contact, reduce or eliminate frictional resistance;
5) micromotion platform connects bearing table through backing plate, and bearing table and area are suitable with the macro-moving stage area, and promptly size is bigger, makes things convenient for the Installation Research instrument.
Description of drawings
Fig. 1 is the utility model schematic representation of apparatus.
Fig. 2 is the micromotion platform structural representation of the utility model device.
Wherein: 1 base, 2 air-float guide rail 3 linear motor stator electrics, 4 grating scale 5 linear motor rotors, 6 macro-moving stage 7 frameworks, 8 first fine motion sensor 9 second fine motion sensors, 10 flexible hinge 11 micromotion platforms, 12 bearing table 13 backing plates, 14 piezoelectric ceramic actuators or voice coil motor 15 gratings move chi.
The specific embodiment
Below in conjunction with accompanying drawing the utility model is done detailed description further:
As shown in Figure 1, the utility model comprises base 1, is carrying entire infrastructure.Air-float guide rail 2 is installed on the base.Have elongated slot in the middle of the air-float guide rail length direction upper surface, the stator 3 of linear electric motors is set in the air-float guide rail elongated slot.Grating scale 4 is equipped with in the air-float guide rail side.The bottom shape of macro-moving stage 6 and air-float guide rail surface engagement have pore and air flue on the contact-making surface of macro-moving stage and air-float guide rail, pressure-air sprays from the hole, between air-float guide rail and macro-moving stage, form air film, to reduce or eliminate friction.Linear motor rotor 5 is housed in the macro-moving stage.The stator of energising back linear electric motors and the magnetic field effect of mover produce the power drive macro-moving stage and on air-float guide rail, move.The moving chi 15 of grating also is housed on the macro-moving stage, and moving chi of grating and scale act in motion process, detect the positional information of grand displacement.Four flexible hinges 10 and the micromotion platform 11 that go out through the line cutting processing that framework 7, I shape distribute by a bulk metal.Piezoelectric ceramic actuator or voice coil motor 14 are housed between one side of micromotion platform and the framework.After the energising, piezoelectric ceramic actuator or voice coil motor promote micromotion platform and move.The moving direction of micromotion platform and macro-moving stage is vertical each other.Cadre's wider width of each flexible hinge 10, and the hinge width is narrower.Each two end of doing is the hinge position.Therefore the elastic bending deflection of the stressed generation of material concentrates on narrower hinge, and a cadre does not have distortion.The profile at hinge position is that the circular arc of symmetry is excessive, concentrates to avoid stress.The bottom of micromotion platform is provided with some spileholes and air flue, through the gases at high pressure that spray in the hole, makes between micromotion platform and the macro-moving stage contact-making surface and forms air film, to reduce or eliminate friction.Bearing table 12 is fixed on the micromotion platform through backing plate 13.Backing plate makes a little higher than framework all around of the height of bearing table, avoids contact friction.Bearing table makes the enlarged areas of micromotion platform, is beneficial to carry various instruments to carry out grand little compound research.Fine motion sensor 8 and 9 are housed, to detect the displacement of micromotion platform between bearing table limit and the framework.
Claims (3)
1. grand little composite straight line exemplary motion stage device of vertical axis; It is characterized in that: this device comprises base (1); Air-float guide rail (2) is installed on the base (1); Have elongated slot in the middle of the air-float guide rail length direction upper surface, linear motor stator electric (3) is set in the air-float guide rail elongated slot, and grating scale (4) is equipped with in air-float guide rail (2) side; Macro-moving stage (6) is installed on the air-float guide rail (2); Mate each other on the bottom shape of macro-moving stage (6) and air-float guide rail (2) surface; On the contact-making surface of macro-moving stage (6) and air-float guide rail (2) pore and air flue are arranged; Pressure-air sprays from the hole, between air-float guide rail (2) and macro-moving stage (6), forms air film; Linear motor rotor (5) also is installed in the macro-moving stage (6), and linear motor stator electric (3) interacts with linear motor rotor (5), drives macro-moving stage (6) and goes up mobile at air-float guide rail (2); The moving chi (15) of grating also is housed on the macro-moving stage (6), and grating moves chi (15) and matees each other with grating scale (4); Four flexible hinges (10) that framework (7), I shape distribute and micromotion platform (11) are formed by a bulk metal cutting; Its middle frame (7) is installed on the macro-moving stage (6), and piezoelectric ceramic actuator or voice coil motor (14) are housed between one side of one side of micromotion platform (11) and framework (7); Micromotion platform (11) is vertical each other with the moving direction of macro-moving stage (6); The bottom of micromotion platform (11) is provided with some pores and air flue; Through the gases at high pressure that spray in the hole, make between micromotion platform (11) and macro-moving stage (6) contact-making surface and form air film; Together be fixed on behind the following connection backing plate (13) of bearing table (12) micromotion platform (11) above; Gapped between bearing table (12) and the framework (7); Between bearing table (12) and the framework (7) the fine motion sensor is housed also, wherein the first fine motion sensor (8) is equipped with in bearing table (12) side, and the second fine motion sensor (9) is equipped with in framework (7) side.
2. the grand little composite straight line exemplary motion stage device of vertical axis according to claim 1 is characterized in that: cadre's wider width of above-mentioned each flexible hinge (10), and the hinge width is narrower, each two end of doing is the hinge position; The profile at hinge position is that the circular arc of symmetry is excessive.
3. the grand little composite straight line exemplary motion stage device of vertical axis according to claim 1 is characterized in that: above-mentioned bearing table (12) area is greater than micromotion platform (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200784602U CN202556075U (en) | 2012-03-05 | 2012-03-05 | Perpendicular shaft macro and micro composite linear motion platform device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200784602U CN202556075U (en) | 2012-03-05 | 2012-03-05 | Perpendicular shaft macro and micro composite linear motion platform device |
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| Publication Number | Publication Date |
|---|---|
| CN202556075U true CN202556075U (en) | 2012-11-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2012200784602U Withdrawn - After Issue CN202556075U (en) | 2012-03-05 | 2012-03-05 | Perpendicular shaft macro and micro composite linear motion platform device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102528472A (en) * | 2012-03-05 | 2012-07-04 | 广东工业大学 | Vertical axis macro and micro motion composite liner motion platform device |
| CN106500587A (en) * | 2016-10-17 | 2017-03-15 | 广东工业大学 | A kind of grand micro- precise focusing device of white light interferometer Z axis and its focus adjustment method |
| CN108119540A (en) * | 2017-12-06 | 2018-06-05 | 哈尔滨工业大学 | A kind of high position stability shape measuring instrument track-type facilities of high-precision |
-
2012
- 2012-03-05 CN CN2012200784602U patent/CN202556075U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102528472A (en) * | 2012-03-05 | 2012-07-04 | 广东工业大学 | Vertical axis macro and micro motion composite liner motion platform device |
| CN102528472B (en) * | 2012-03-05 | 2015-04-29 | 广东工业大学 | Vertical axis macro and micro motion composite liner motion platform device |
| CN106500587A (en) * | 2016-10-17 | 2017-03-15 | 广东工业大学 | A kind of grand micro- precise focusing device of white light interferometer Z axis and its focus adjustment method |
| CN108119540A (en) * | 2017-12-06 | 2018-06-05 | 哈尔滨工业大学 | A kind of high position stability shape measuring instrument track-type facilities of high-precision |
| CN108119540B (en) * | 2017-12-06 | 2019-04-16 | 哈尔滨工业大学 | A kind of high position stability shape measuring instrument track-type facilities of high-precision |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20121128 Effective date of abandoning: 20150429 |