CN1306247C - Macro/micro driven large travel high-speed nano-precision plane positioning system - Google Patents
Macro/micro driven large travel high-speed nano-precision plane positioning system Download PDFInfo
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- CN1306247C CN1306247C CNB2005100102862A CN200510010286A CN1306247C CN 1306247 C CN1306247 C CN 1306247C CN B2005100102862 A CNB2005100102862 A CN B2005100102862A CN 200510010286 A CN200510010286 A CN 200510010286A CN 1306247 C CN1306247 C CN 1306247C
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Abstract
The present invention discloses a macro/micro dual driven large travel high-speed nanometer-level precision plane positioning system, which relates to a plane positioning system. The purpose of the present invention is to solve the problems that the stroke, the speed/the acceleration and the precision of the existing high-speed high precision positioning system have respective defects and component parts are independent. An X axis flexible hinge 17 is arranged between an X axis micromotion platform 19 and an X axis macromotion platform 16 of the present invention, an X axis piezoelectric ceramic 18 is arranged in the X axis micromotion platform 19, and a cushioning hinge 29 is arranged between an inner guide plate 28 and an outer guide plate 30. One end of a Y axis piezoelectric ceramic 24 is connected with a Y axis micromotion platform 23, and two bearings 34 are respectively connected with the inner guide plate 28 and the outer guide plate 30 on a Y axis macro/micromotion platform 8 in a rolling mode. The system of the present invention meets requirements of centimeter-level moving range and high speed and high acceleration, and reaches to the nanometer-level positioning precision. The working range of the present invention is 25mm*25mm; the resolution is 10 nm; the repeated positioning precision is between-20 nm and +20 nm; the maxim speeds of X axis and Y axis are separately at 50 m/s2 and 100 m/s2.
Description
Technical field:
The present invention relates to a kind of plane positioning system.
Background technology:
Fields such as integrated circuit (IC) encapsulation, MEMS (micro electro mechanical system) (MEMS) manufacturing are urgent day by day to the needs of big stroke (cm level), high-speed (m/s level) and high precision (μ m to nm level) positioning system.But the problem that exists is at present: 1, the plane positioning system of traditional cascaded structure XY worktable mode, because upper platform is as the operating load of basic unit's platform, increased the movement inertia of basic unit's platform greatly, limited the speed and the acceleration of total system, system works efficient is low.2, the plane positioning system of existing parallel-connection structure XY worktable mode, only adopt single driving elements such as electric rotating machine+ball-screw, linear electric motors or voice coil motor, though can reach the range of movement of big stroke, its precision only can satisfy micron or submicron order requirement.3, the bearing accuracy of microdrive such as piezoelectric ceramics can reach nanoscale, but stroke is little, can only reach tens microns to microns up to a hundred; The motion platform that piezo-electric motor drives, though can realize big stroke, high-resolution exercise performance, its movement velocity is low.
Summary of the invention:
The objective of the invention is respectively has deficiency and problem independently separately for overcoming existing high-speed, high precision positioning system in stroke, speed/acceleration and precision, and the plane positioning system of the large travel high-speed nano-precision that a kind of macro/micro drives is provided.The present invention has the advantages that range is big, precision is high, can measure under high-speed condition.The present invention by X-axis linear voice coil motor (mover/stator) 1, X-axis motor base 2, X-axis guide rail 3, X-axis bilinear grating 4, X-axis grand/micromotion platform 5, Y-axis guide rail 6, Y-axis carrying platform 7, Y-axis be grand/micromotion platform 8, XY decoupler shaft guide rail 9, XY decoupler shaft mechanism 10, y-axis motor pedestal 11, Y-axis linear voice coil motor (mover/stator) 12, workbench 13, Y-axis bilinear grating 14 and pedestal 15 form; The stator of X-axis linear voice coil motor 1 is fixed on the X-axis motor base 2, X-axis motor base 2 is fixed on the pedestal 15, the stator of Y-axis linear voice coil motor 12 is fixed on the y-axis motor pedestal 11, y-axis motor pedestal 11 is fixed on the pedestal 15, the mover of X-axis linear voice coil motor 1 is grand with X-axis/and micromotion platform 5 fixedlys connected, the mover of Y-axis linear voice coil motor 12 is fixedlyed connected with an end of XY decoupler shaft mechanism 10, X-axis guide rail 3 and XY decoupler shaft guide rail 9 are separately fixed on the pedestal 15, X-axis is grand/and the lower end and the X-axis guide rail 3 of micromotion platform 5 be slidingly connected, the lower end of XY decoupler shaft mechanism 10 and XY decoupler shaft guide rail 9 are slidingly connected, the downside of Y-axis carrying platform 7 is grand with X-axis/and the upside of micromotion platform 5 fixedlys connected, Y-axis guide rail 6 is fixed on the upside of Y-axis carrying platform 7, Y-axis is grand/and the downside and the Y-axis guide rail 6 of micromotion platform 8 be slidingly connected, the upside of workbench 13 is fixed on Y-axis grand/micromotion platform 8, Y-axis is grand/and an end of micromotion platform 8 fixedlys connected with the other end of XY decoupler shaft mechanism 10, on the pedestal 15 in X-axis bilinear grating 4 is fixed on X-axis grand/micromotion platform 5 outsides, Y-axis bilinear grating 14 is fixed on the Y-axis carrying platform 7 of X-axis linear voice coil motor 1 one sides; X-axis is grand/and micromotion platform 5 is by X-axis macro-moving stage 16, X-axis flexible hinge 17, X-axis piezoelectric ceramics 18, X-axis micromotion platform 19, X-axis holding screw 20 and X-axis lock-screw 21 are formed, X-axis micromotion platform 19 is arranged on the centre of X-axis macro-moving stage 16, be provided with X-axis flexible hinge 17 between X-axis micromotion platform 19 and the X-axis macro-moving stage 16, X-axis piezoelectric ceramics 18 is arranged in the X-axis micromotion platform 19, one end of X-axis piezoelectric ceramics 18 is connected with X-axis micromotion platform 19, the other end of X-axis piezoelectric ceramics 18 and be arranged between the lock-screw 21 on the X-axis macro-moving stage 16 and be provided with holding screw 20, X-axis micromotion platform 19 is fixedlyed connected with Y-axis carrying platform 7; Y-axis is grand/and micromotion platform 8 is by Y-axis macro-moving stage 22, Y-axis micromotion platform 23, Y-axis piezoelectric ceramics 24, Y-axis holding screw 25, Y-axis lock-screw 26, Y-axis flexible hinge 27, interior guide plate 28, buffering hinge 29 and outer guide plate 30 are formed, one end of Y-axis macro-moving stage 22 is fixed with interior guide plate 28, be fixed with buffering hinge 29 between interior guide plate 28 and the outer guide plate 30, Y-axis micromotion platform 23 is arranged in the Y-axis macro-moving stage 22, be provided with Y-axis flexible hinge 27 between Y-axis micromotion platform 23 and the Y-axis macro-moving stage 22, Y-axis piezoelectric ceramics 24 is arranged in the Y-axis micromotion platform 23, one end of Y-axis piezoelectric ceramics 24 is connected with Y-axis micromotion platform 23, the other end of Y-axis piezoelectric ceramics 24 and be arranged between the Y-axis lock-screw 26 on the Y-axis macro-moving stage 22 and be provided with Y-axis holding screw 25, workbench 13 is fixed on the Y-axis micromotion platform 23; XY decoupler shaft mechanism 10 is by XY decoupler shaft pull bar 31, spring 32, regulating arm 33, two bearings 34, stationary shaft 35, movable axis 36, regulate arm axle 37 and securing cover plate 38 compositions, one end of securing cover plate 38 is fixed on the XY decoupler shaft pull bar 31, the lower end of regulating arm axle 37 is fixed on the XY decoupler shaft pull bar 31, the upper end of regulating arm axle 37 is fixed on the securing cover plate 38, one end of regulating arm 33 is arranged on to be regulated on the arm axle 37, be provided with spring 32 between the other end of regulating arm 33 and the XY decoupler shaft pull bar 31, stationary shaft 35 is fixed between XY decoupler shaft pull bar 31 and the securing cover plate 38, movable axis 36 is fixed on the regulating arm 33, two bearings 34 are separately fixed on stationary shaft 35 and the movable axis 36, two bearings 34 are grand with Y-axis respectively/and interior guide plate 28 on the micromotion platform 8 rolls with outer guide plate 30 and is connected, and XY decoupler shaft pull bar 31 is fixedlyed connected with the mover of Y-axis linear voice coil motor 12; X-axis bilinear grating 4 by X-axis grand/low-light grid 39, X-axis Optical grating base 40 and the grand grating 41 of X-axis form, X-axis is grand/low-light grid 39 are fixed on the upper end of X-axis Optical grating base 40, the grand grating 41 of X-axis is fixed on the downside in the X-axis Optical grating base 40; Y-axis bilinear grating 14 by Y-axis Optical grating base 42, Y-axis grand/low-light grid 43 and the grand grating 44 of Y-axis form, Y-axis is grand/low-light grid 43 are fixed on the top in the Y-axis Optical grating base 42, the grand grating 44 of Y-axis is fixed on the bottom in the Y-axis Optical grating base 42.The invention has the beneficial effects as follows: adopt linear voice coil motor directly to drive macro-moving stage, shortcomings such as the inertia of having avoided adopting the ball-screw transmission link to bring is big, backhaul gap and insufficient rigidity.It is affixed with piezoelectric ceramics and micromotion platform to apply pretightning force, makes the micromotion platform gapless linear move.Because the spring in the XY decoupler shaft mechanism has certain pretightning force, make and to remain tight the contact between the guide plate and two bearings at work, guaranteed the rigidity of Y direction simultaneously, and the buffering hinge with certain flexibility slows down the impact of worktable high frequency motion to the directions X of guide rail, thereby has realized the no gap decoupling zero of plane Descartes's worktable.Adopt the good linear voice coil motor of mechanical characteristic as grand driver, piezoelectric ceramics is installed as microdrive in the micromotion platform on macro-moving stage, the positioning error of high frequency dynamic compensating system; Accurate linear grating adopts the double-counting mode to feed back the position signalling of grand/micromotion platform output terminal, realizes the Full Closed-loop Position control of positioning system.Thereby system had both satisfied the requirement of range of movement with high speed, the high acceleration of centimetre-sized, had reached nano level bearing accuracy again.Working range of the present invention is 25mm * 25mm, and resolution is 10nm, and repetitive positioning accuracy is ± 20nm that X-axis and Y-axis peak acceleration are respectively 50m/s
2And 100m/s
2
Description of drawings:
Fig. 1 is an one-piece construction synoptic diagram of the present invention, Fig. 2 be X-axis grand/structural representation of micromotion platform 5, Fig. 3 be Y-axis grand/structural representation of micromotion platform 8, Fig. 4 is the structural representation of XY decoupler shaft mechanism 10, Fig. 5 is the structural representation of X-axis bilinear grating 4, Fig. 6 is the structural representation of Y-axis bilinear grating 14, Fig. 7 be the A of Fig. 4 to view, Fig. 8 is the B-B cut-open view of Fig. 7.
Embodiment:
Embodiment one: (referring to the present embodiment of Fig. 1-Fig. 6) by X-axis linear voice coil motor (mover/stator) 1, X-axis motor base 2, X-axis guide rail 3, X-axis bilinear grating 4, X-axis is grand/micromotion platform 5, Y-axis guide rail 6, Y-axis carrying platform 7, Y-axis is grand/micromotion platform 8, XY decoupler shaft guide rail 9, XY decoupler shaft mechanism 10, y-axis motor pedestal 11, Y-axis linear voice coil motor (mover/stator) 12, workbench 13, Y-axis bilinear grating 14 and pedestal 15 are formed, the stator of X-axis linear voice coil motor 1 is fixed on the X-axis motor base 2, X-axis motor base 2 is fixed on the pedestal 15, the stator of Y-axis linear voice coil motor 12 is fixed on the y-axis motor pedestal 11, y-axis motor pedestal 11 is fixed on the pedestal 15, the mover of X-axis linear voice coil motor 1 is grand with X-axis/and micromotion platform 5 fixedlys connected, the mover of Y-axis linear voice coil motor 12 is fixedlyed connected with an end of XY decoupler shaft mechanism 10, X-axis guide rail 3 and XY decoupler shaft guide rail 9 are separately fixed on the pedestal 15, X-axis is grand/and the lower end and the X-axis guide rail 3 of micromotion platform 5 be slidingly connected, the lower end of XY decoupler shaft mechanism 10 and XY decoupler shaft guide rail 9 are slidingly connected, the downside of Y-axis carrying platform 7 is grand with X-axis/and the upside of micromotion platform 5 fixedlys connected, Y-axis guide rail 6 is fixed on the upside of Y-axis carrying platform 7, Y-axis is grand/and the downside and the Y-axis guide rail 6 of micromotion platform 8 be slidingly connected, the upside of workbench 13 is fixed on Y-axis grand/micromotion platform 8, Y-axis is grand/and an end of micromotion platform 8 fixedlys connected with the other end of XY decoupler shaft mechanism 10, on the pedestal 15 in X-axis bilinear grating 4 is fixed on X-axis grand/micromotion platform 5 outsides, Y-axis bilinear grating 14 is fixed on the Y-axis carrying platform 7 of X-axis linear voice coil motor 1 one sides; X-axis is grand/and micromotion platform 5 is by X-axis macro-moving stage 16, X-axis flexible hinge 17, X-axis piezoelectric ceramics 18, X-axis micromotion platform 19, X-axis holding screw 20 and X-axis lock-screw 21 are formed, X-axis micromotion platform 19 is arranged on the centre of X-axis macro-moving stage 16, be provided with X-axis flexible hinge 17 between X-axis micromotion platform 19 and the X-axis macro-moving stage 16, X-axis piezoelectric ceramics 18 is arranged in the X-axis micromotion platform 19, one end of X-axis piezoelectric ceramics 18 is connected with X-axis micromotion platform 19, the other end of X-axis piezoelectric ceramics 18 and be arranged between the lock-screw 21 on the X-axis macro-moving stage 16 and be provided with holding screw 20, X-axis micromotion platform 19 is fixedlyed connected with Y-axis carrying platform 7; Y-axis is grand/and micromotion platform 8 is by Y-axis macro-moving stage 22, Y-axis micromotion platform 23, Y-axis piezoelectric ceramics 24, Y-axis holding screw 25, Y-axis lock-screw 26, Y-axis flexible hinge 27, interior guide plate 28, buffering hinge 29 and outer guide plate 30 are formed, one end of Y-axis macro-moving stage 22 is fixed with interior guide plate 28, be fixed with buffering hinge 29 between interior guide plate 28 and the outer guide plate 30, Y-axis micromotion platform 23 is arranged in the Y-axis macro-moving stage 22, be provided with Y-axis flexible hinge 27 between Y-axis micromotion platform 23 and the Y-axis macro-moving stage 22, Y-axis piezoelectric ceramics 24 is arranged in the Y-axis micromotion platform 23, one end of Y-axis piezoelectric ceramics 24 is connected with Y-axis micromotion platform 23, the other end of Y-axis piezoelectric ceramics 24 and be arranged between the Y-axis lock-screw 26 on the Y-axis macro-moving stage 22 and be provided with Y-axis holding screw 25, workbench 13 is fixed on the Y-axis micromotion platform 23; XY decoupler shaft mechanism 10 is by XY decoupler shaft pull bar 31, spring 32, regulating arm 33, two bearings 34, stationary shaft 35, movable axis 36, regulate arm axle 37 and securing cover plate 38 compositions, one end of securing cover plate 38 is fixed on the XY decoupler shaft pull bar 31, the lower end of regulating arm axle 37 is fixed on the XY decoupler shaft pull bar 31, the upper end of regulating arm axle 37 is fixed on the securing cover plate 38, one end of regulating arm 33 is arranged on to be regulated on the arm axle 37, be provided with spring 32 between the other end of regulating arm 33 and the XY decoupler shaft pull bar 31, stationary shaft 35 is fixed between XY decoupler shaft pull bar 31 and the securing cover plate 38, movable axis 36 is fixed on the regulating arm 33, two bearings 34 are separately fixed on stationary shaft 35 and the movable axis 36, two bearings 34 are grand with Y-axis respectively/and interior guide plate 28 on the micromotion platform 8 rolls with outer guide plate 30 and is connected, and XY decoupler shaft pull bar 31 is fixedlyed connected with the mover of Y-axis linear voice coil motor 12; X-axis bilinear grating 4 by X-axis grand/low-light grid 39, X-axis Optical grating base 40 and the grand grating 41 of X-axis form, X-axis is grand/low-light grid 39 are fixed on the upper end of X-axis Optical grating base 40, the grand grating 41 of X-axis is fixed on the downside in the X-axis Optical grating base 40; Y-axis bilinear grating 14 by Y-axis Optical grating base 42, Y-axis grand/low-light grid 43 and the grand grating 44 of Y-axis form, Y-axis is grand/low-light grid 43 are fixed on the top in the Y-axis Optical grating base 42, the grand grating 44 of Y-axis is fixed on the bottom in the Y-axis Optical grating base 42.
Embodiment two: the termination of the X-axis piezoelectric ceramics 18 that is connected with X-axis micromotion platform 19 in (referring to Fig. 2) present embodiment is a spheroidal 51.Other composition is identical with embodiment one with annexation.
Embodiment three: the termination of the Y-axis piezoelectric ceramics 24 that is connected with Y-axis micromotion platform 23 in (referring to Fig. 3) present embodiment is a spheroidal 52.Other composition is identical with embodiment one with annexation.
Embodiment four: be simple beam structure between stationary shaft 35 and XY decoupler shaft pull bar 31 and the securing cover plate 38 in (referring to Fig. 7, Fig. 8) present embodiment, other composition is identical with embodiment one with annexation.
Embodiment five: be simple beam structure between movable axis 36 and the regulating arm 33 in (referring to Fig. 7, Fig. 8) present embodiment.Other composition is identical with embodiment one with annexation.
Principle of work: X-axis linear voice coil motor 1 and Y-axis linear voice coil motor 12 are as grand driver, and generation electromagnetic force in energising back promotes its mover and drives X-axis macro-moving stage 16 and grand the moving of XY decoupler shaft pull bar 31 generations respectively; The X-axis piezoelectric ceramics 18 and the Y-axis piezoelectric ceramics 24 that are integrated in X-axis macro-moving stage 16 and the Y-axis macro-moving stage 22 drive X-axis micromotion platform 19 and the 23 generation fine motions of Y-axis micromotion platform respectively as microdrive; Because the pretension of spring 32, eliminated the radial play of two bearings 34, guaranteed the rigidity of Y direction simultaneously, the buffering hinge 29 with certain flexibility slows down the impact of worktable high frequency motion to Y-axis guide rail 6 and XY decoupler shaft guide rail 9, thereby has realized the mobile decoupling of X, Y direction; Grand grating 41 of X-axis and the grand grating 44 of Y-axis detect the grand moving position signalling of X-axis macro-moving stage 16 and Y-axis macro-moving stage 22 output terminals respectively, and X-axis is grand/low-light grid 39 and Y-axis be grand/and low-light grid 43 detect the grand/fine motion position signalling of Y-axis carrying platform 7 and workbench 13 output terminals respectively.Macro-moving stage realize the big stroke of system, at a high speed, high acceleration micron order precision location, when entering the micromotion platform impulse stroke, start piezoelectric ceramics, with the positioning error of high frequency dynamic compensating system, realize nano level resolution and bearing accuracy.
Claims (5)
1, the plane positioning system of the large travel high-speed nano-precision that drives of a kind of macro/micro, it by X-axis linear voice coil motor (1), X-axis motor base (2), X-axis guide rail (3), X-axis bilinear grating (4), X-axis grand/micromotion platform (5), Y-axis guide rail (6), Y-axis carrying platform (7), Y-axis be grand/micromotion platform (8), XY decoupler shaft guide rail (9), XY decoupler shaft mechanism (10), y-axis motor pedestal (11), Y-axis linear voice coil motor (12), workbench (13), Y-axis bilinear grating (14) and pedestal (15) form; The stator of X-axis linear voice coil motor (1) is fixed on the X-axis motor base (2), X-axis motor base (2) is fixed on the pedestal (15), the stator of Y-axis linear voice coil motor (12) is fixed on the y-axis motor pedestal (11), y-axis motor pedestal (11) is fixed on the pedestal (15), the mover of X-axis linear voice coil motor (1) is grand with X-axis/and micromotion platform (5) fixedlys connected, the mover of Y-axis linear voice coil motor (12) is fixedlyed connected with an end of XY decoupler shaft mechanism (10), X-axis guide rail (3) and XY decoupler shaft guide rail (9) are separately fixed on the pedestal (15), X-axis is grand/and the lower end and the X-axis guide rail (3) of micromotion platform (5) be slidingly connected, the lower end of XY decoupler shaft mechanism (10) and XY decoupler shaft guide rail (9) are slidingly connected, the downside of Y-axis carrying platform (7) is grand with X-axis/and the upside of micromotion platform (5) fixedlys connected, Y-axis guide rail (6) is fixed on the upside of Y-axis carrying platform (7), Y-axis is grand/and the downside and the Y-axis guide rail (6) of micromotion platform (8) be slidingly connected, the upside of workbench (13) is fixed on Y-axis grand/micromotion platform (8), Y-axis is grand/and an end of micromotion platform (8) fixedlys connected with the other end of XY decoupler shaft mechanism (10), that X-axis bilinear grating (4) is fixed on X-axis is grand/pedestal (15) in micromotion platform (5) outside on, Y-axis bilinear grating (14) is fixed on the Y-axis carrying platform (7) of X-axis linear voice coil motor (1) one side; It is characterized in that X-axis grand/micromotion platform (5) is by X-axis macro-moving stage (16), X-axis flexible hinge (17), X-axis piezoelectric ceramics (18), X-axis micromotion platform (19), X-axis holding screw (20) and X-axis lock-screw (21) are formed, X-axis micromotion platform (19) is arranged on the centre of X-axis macro-moving stage (16), be provided with X-axis flexible hinge (17) between X-axis micromotion platform (19) and the X-axis macro-moving stage (16), X-axis piezoelectric ceramics (18) is arranged in the X-axis micromotion platform (19), one end of X-axis piezoelectric ceramics (18) is connected with X-axis micromotion platform (19), the other end of X-axis piezoelectric ceramics (18) and be arranged between the lock-screw (21) on the X-axis macro-moving stage (16) and be provided with holding screw (20), X-axis micromotion platform (19) is fixedlyed connected with Y-axis carrying platform (7); Y-axis is grand/and micromotion platform (8) is by Y-axis macro-moving stage (22), Y-axis micromotion platform (23), Y-axis piezoelectric ceramics (24), Y-axis holding screw (25), Y-axis lock-screw (26), Y-axis flexible hinge (27), interior guide plate (28), buffering hinge (29) and outer guide plate (30) are formed, one end of Y-axis macro-moving stage (22) is fixed with interior guide plate (28), be fixed with buffering hinge (29) between interior guide plate (28) and the outer guide plate (30), Y-axis micromotion platform (23) is arranged in the Y-axis macro-moving stage (22), be provided with Y-axis flexible hinge (27) between Y-axis micromotion platform (23) and the Y-axis macro-moving stage (22), Y-axis piezoelectric ceramics (24) is arranged in the Y-axis micromotion platform (23), one end of Y-axis piezoelectric ceramics (24) is connected with Y-axis micromotion platform (23), the other end of Y-axis piezoelectric ceramics (24) and be arranged between the Y-axis lock-screw (26) on the Y-axis macro-moving stage (22) and be provided with Y-axis holding screw (25), workbench (13) is fixed on the Y-axis micromotion platform (23); XY decoupler shaft mechanism (10) is by XY decoupler shaft pull bar (31), spring (32), regulating arm (33), two bearings (34), stationary shaft (35), movable axis (36), regulating arm axle (37) and securing cover plate (38) forms, one end of securing cover plate (38) is fixed on the XY decoupler shaft pull bar (31), the lower end of regulating arm axle (37) is fixed on the XY decoupler shaft pull bar (31), the upper end of regulating arm axle (37) is fixed on the securing cover plate (38), one end of regulating arm (33) is arranged on to be regulated on the arm axle (37), be provided with spring (32) between the other end of regulating arm (33) and the XY decoupler shaft pull bar (31), stationary shaft (35) is fixed between XY decoupler shaft pull bar (31) and the securing cover plate (38), movable axis (36) is fixed on the regulating arm (33), two bearings (34) are separately fixed on stationary shaft (35) and the movable axis (36), two bearings (34) interior guide plate (28) on/micromotion platform grand with Y-axis (8) respectively roll with outer guide plate (30) and are connected, and XY decoupler shaft pull bar (31) is fixedlyed connected with the mover of Y-axis linear voice coil motor (12); X-axis bilinear grating (4) by X-axis grand/low-light grid (39), X-axis Optical grating base (40) and the grand grating of X-axis (41) form, X-axis is grand/and low-light grid (39) are fixed on the upper end of X-axis Optical grating base (40), the grand grating of X-axis (41) be fixed in the X-axis Optical grating base (40) downside Y-axis bilinear grating (14) by Y-axis Optical grating base (42), Y-axis grand/low-light grid (43) and the grand grating of Y-axis (44) form, Y-axis is grand/and low-light grid (43) are fixed on the top in the Y-axis Optical grating base (42), and the grand grating of Y-axis (44) is fixed on the bottom in the Y-axis Optical grating base (42).
2, the plane positioning system of the large travel high-speed nano-precision that drives of macro/micro according to claim 1 is characterized in that the termination of the X-axis piezoelectric ceramics (18) that is connected with X-axis micromotion platform (19) is spheroidal (51).
3, the plane positioning system of the large travel high-speed nano-precision that drives of macro/micro according to claim 1 is characterized in that the termination of the Y-axis piezoelectric ceramics (24) that is connected with Y-axis micromotion platform (23) is spheroidal (52).
4, the plane positioning system of the large travel high-speed nano-precision of macro/micro driving according to claim 1 is characterized in that being between stationary shaft (35) and XY decoupler shaft pull bar (31) and the securing cover plate (38) simple beam structure.
5, the plane positioning system of the large travel high-speed nano-precision of macro/micro driving according to claim 1 is characterized in that being between movable axis (36) and the regulating arm (33) simple beam structure.
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| CNB2005100102862A CN1306247C (en) | 2005-08-26 | 2005-08-26 | Macro/micro driven large travel high-speed nano-precision plane positioning system |
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| CN107240422B (en) * | 2017-06-20 | 2019-09-10 | 南京工程学院 | A kind of Pneumatic precision positioning mechanism of piezoelectric micromotor bit shift compensation |
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| CN110133820B (en) * | 2019-05-17 | 2021-03-05 | 中国科学院国家天文台南京天文光学技术研究所 | Nanometer-scale precision displacement actuator of large-scale spliced mirror surface optical telescope |
| CN116884886B (en) * | 2023-09-06 | 2023-11-24 | 北京华卓精科科技股份有限公司 | Precise force position output device |
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