CN116884886B - Precise force position output device - Google Patents
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- CN116884886B CN116884886B CN202311141745.5A CN202311141745A CN116884886B CN 116884886 B CN116884886 B CN 116884886B CN 202311141745 A CN202311141745 A CN 202311141745A CN 116884886 B CN116884886 B CN 116884886B
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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Abstract
The application provides a precise force position output device, and relates to the technical field of precise equipment manufacturing. The device comprises a coarse movement unit, a damping unit and a micro movement unit; the coarse movement unit comprises a coarse movement motor and a transmission sliding table, and the transmission sliding table is in transmission connection with the coarse movement motor; the damping unit comprises a first connecting piece, a second connecting piece and an elastic connecting component, and the first connecting piece is fixedly connected with the transmission sliding table; the second connecting piece is fixedly connected with the output shaft; the elastic connecting component is arranged between the first connecting piece and the second connecting piece, and the rigidity of the elastic connecting component is adjustable; the micro-motion unit comprises a micro-motion motor, and the motion precision of the micro-motion motor is higher than that of the coarse motor; the micro motor is fixedly arranged on the second connecting piece, and the rotor of the micro motor is fixedly connected with the output shaft. The device has the advantages of larger pressurizing and moving range and higher output precision, can meet the application requirements in the fields of semiconductor packaging and the like, and is suitable for processes such as flip-chip bonding and the like.
Description
Technical Field
The application relates to the technical field of precision equipment manufacturing, in particular to a precision force position output device.
Background
In the precise manufacturing occasions such as flip chip bonding, the process actions such as constant pressure application and fine adjustment of bonding spacing are often involved, and the precise equipment used is required to realize accurate movement positioning, and the applied force is required to be ensured to be stable and controllable. In addition, in order to be compatible with various different processes, the effective force control range of the precision equipment is also continuously enlarged, for example, the bonding pressure required by hot-press bonding can be up to more than 400N, and the force control precision is required to be less than 1N; the lifting travel of chip transportation is tens of millimeters, and the distance between the chip and the substrate after bonding needs to be precisely controlled to be in the order of micrometers.
The force position output device in the prior art cannot meet the above requirements, so there is a need for a precise force position output device capable of switching between a pressure control mode and a position control mode, having a larger pressurizing or moving range and higher output precision, so as to meet the application requirements in the fields of semiconductor packaging and the like.
Disclosure of Invention
The application aims to provide a precise force position output device, which solves the technical problems of low force position output precision and small range of the force position output device in the prior art.
The application provides a precise force position output device which comprises a coarse movement unit, a damping unit and a micro movement unit; the coarse movement unit comprises a coarse movement motor and a transmission sliding table, and the transmission sliding table is in transmission connection with the coarse movement motor; the damping unit comprises a first connecting piece, a second connecting piece and an elastic connecting component, and the first connecting piece is fixedly connected with the transmission sliding table; the second connecting piece is fixedly connected with the output shaft; the elastic connecting component is arranged between the first connecting piece and the second connecting piece, and the rigidity of the elastic connecting component is adjustable; the micro-motion unit comprises a micro-motion motor, and the motion precision of the micro-motion motor is higher than that of the coarse motion motor; the micro motor is fixedly arranged on the second connecting piece, and a rotor of the micro motor is fixedly connected with the output shaft.
Further, the coarse motor is a linear motor or a servo motor, and the motion precision is millimeter or sub-millimeter; and/or the micro motor is a voice coil motor, and the motion precision is in a micron level.
Further, the elastic connection assembly comprises a damping cylinder and an extension spring, and the damping cylinder and the extension spring are arranged between the first connection piece and the second connection piece in parallel.
Further, the coarse movement unit further comprises a base, and the coarse movement motor is fixedly installed on the base.
Further, the coarse movement unit further comprises a balancing piece, the balancing piece is fixedly arranged on the base, and the power output end of the balancing piece is fixedly connected with the transmission sliding table; when the movement direction of the device forms an included angle with the horizontal direction, the balancing piece is used for balancing the gravity of the mover of the coarse movement motor, the transmission sliding table and the accessory of the transmission sliding table.
Further, the balancing piece is one of a balancing cylinder, a mechanical spring, an air spring, a balancing hydraulic cylinder or a balancing motor.
Further, the coarse movement unit further comprises a linear guide rail, and the linear guide rail is arranged on one of the base and the transmission sliding table; the other one of the base and the transmission sliding table is provided with a sliding groove; the transmission sliding table is connected with the base in a sliding manner through the sliding groove and the linear guide rail.
Further, the device also comprises a guide unit, wherein the guide unit comprises a guide shaft sleeve, and the guide shaft sleeve is sleeved outside the output shaft and fixedly connected with the transmission sliding table.
Further, the guide shaft sleeve is an air-float shaft sleeve, and a set gap is arranged between the air-float shaft sleeve and the output shaft.
Further, the device also includes a first displacement sensor, a second displacement sensor, and a force sensor; the first displacement sensor is used for detecting the displacement of the transmission sliding table; the second displacement sensor is used for detecting the displacement of the output shaft relative to the transmission sliding table; the force sensor is used for detecting the output force of the device.
Further, the number of the force sensors is plural, and the plural force sensors are uniformly arranged along the circumferential direction of the output shaft.
Further, the device also comprises a control unit, wherein the control unit comprises an upper computer, a motion controller, a coarse motion driver, a micro motion driver, a proportional valve and a pressure switch; the upper computer is connected with the motion controller, and is used for interacting with an operator and sending a motion instruction to the motion controller; the motion controller is respectively connected with the coarse motion driver, the micro motion driver, the proportional valve, the pressure switch, the first displacement sensor, the second displacement sensor and the force sensor; the motion controller is used for generating and sending corresponding instruction signals to the coarse motion driver, the micro motion driver and the proportional valve according to the measured values fed back by the first displacement sensor, the second displacement sensor, the force sensor and the pressure switch and an internal motion control algorithm after receiving the motion instruction sent by the upper computer; the coarse movement driver and the micro movement driver are used for outputting corresponding working currents to enable the coarse movement motor and the micro movement motor to move after receiving the instruction signals; the proportional valve is used for adjusting the air pressure in the damping cylinder after receiving the command signal.
The precise force position output device provided by the application can generate the following beneficial effects:
according to the precise force position output device provided by the application, the first connecting piece of the damping unit is fixedly arranged on the transmission sliding table of the coarse movement unit, and the second connecting piece is fixedly connected with the output shaft; the rotor of the micro motor of the micro unit is fixedly connected with the output shaft. When the device works, the coarse motor of the coarse movement unit can drive the accessory parts such as the transmission sliding table, the damping unit, the micro movement unit, the output shaft and the like to move in a larger travel range, and meanwhile, the output range is larger; the micro motor of the micro unit can finely adjust the position and the output force of the output shaft on the basis of the movement of the coarse motor, so that the control precision of the output position and the output force can be improved. And moreover, the rigidity of the elastic connecting component of the damping unit is adjustable, and the integral equivalent rigidity coefficient of the damping unit and the output shaft can be adjusted by adjusting the rigidity of the elastic connecting component, so that the deformation of the output shaft can be controlled by adjusting the equivalent rigidity coefficient, and the output precision can be further improved. Namely, the precise force position output device provided by the application has the advantages of larger pressurizing and moving range and higher output precision, can meet the application requirements in the fields of semiconductor packaging and the like, and is suitable for processes such as flip chip bonding and the like.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present application, and that other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a precision force position output device according to an embodiment of the present application;
FIG. 2 is a schematic diagram of a coarse movement unit in the precise force position output device according to the embodiment of the present application;
FIG. 3 is a schematic diagram of a damping unit in a precision force output device according to an embodiment of the present application;
FIG. 4 is a schematic diagram of a micro-motion unit in the precision force output device according to the embodiment of the present application;
FIG. 5 is a control architecture diagram of a precision force position output device according to an embodiment of the present application;
FIG. 6 is an external force analysis model of the precision force position output device according to the embodiment of the present application;
FIG. 7 is a diagram illustrating an internal stress analysis model of a precision force position output device according to an embodiment of the present application.
Reference numerals illustrate:
100-coarse movement unit; 110-a base; 120-coarse motor; 130-a transmission sliding table; 140-linear guide rails; 150-balancing a cylinder;
200-a damping unit; 210-a first connector; 220-a second connector; 230-damping cylinder; 240-stretching a spring; 250-a first housing;
300-output shaft;
400-micro-motion unit; 410-a micromotor; 420-a second housing;
500-guiding units; 510-a guide sleeve; 520-mounting rack; 530-a third housing;
610-a first displacement sensor; 620-a second displacement sensor; 630-force sensor;
700-working panel;
810-an upper computer; 820-motion controller; 830—coarse drive; 840-a jog drive; 850-proportioning valve; 860-pressure switch.
Detailed Description
In order that the above objects, features and advantages of the application will be readily understood, a more particular description of the application will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the application.
The present embodiment provides a precision force position output device, as shown in fig. 1 to 3, which includes a coarse movement unit 100, a damping unit 200, and a fine movement unit 400; the coarse movement unit 100 comprises a coarse movement motor 120 and a transmission sliding table 130, and the transmission sliding table 130 is in transmission connection with the coarse movement motor 120; the damping unit 200 comprises a first connecting piece 210, a second connecting piece 220 and an elastic connecting component, wherein the first connecting piece 210 is fixedly connected with the transmission sliding table 130; the second connecting member 220 is fixedly connected with the output shaft 300; the elastic connection assembly is arranged between the first connection piece 210 and the second connection piece 220, and the rigidity of the elastic connection assembly is adjustable; the micro-motion unit 400 includes a micro-motion motor 410, and the motion accuracy of the micro-motion motor 410 is higher than that of the coarse motor 120; the micro motor 410 is fixedly installed on the second connecting member 220, and a mover of the micro motor 410 is fixedly connected to the output shaft 300.
In the precise force position output device provided in this embodiment, the first connecting piece 210 of the damping unit 200 is fixedly arranged on the transmission sliding table 130 of the coarse movement unit 100, and the second connecting piece 220 is fixedly connected with the output shaft 300; the mover of the micro motor 410 of the micro unit 400 is fixedly connected with the output shaft 300. When in operation, the coarse motor 120 of the coarse movement unit 100 can drive the transmission sliding table 130, the damping unit 200, the micro movement unit 400, the output shaft 300 and other accessories to move in a larger stroke range, and meanwhile, the output range is larger; the micro motor 410 of the micro unit 400 can finely adjust the position and the output force of the output shaft 300 based on the movement of the coarse motor 120, so that the control accuracy of the output position and the output force can be improved. Moreover, the rigidity of the elastic connection component of the damping unit 200 is adjustable, and the equivalent rigidity coefficient of the whole of the damping unit and the output shaft 300 can be adjusted by adjusting the rigidity of the elastic connection component, so that the deformation of the output shaft 300 can be controlled by adjusting the equivalent rigidity coefficient, and the output precision can be further improved. That is, the precise force position output device provided in this embodiment can have a larger pressurizing and moving range and a higher output precision, can meet the application requirements in the fields of semiconductor packaging and the like, and is suitable for processes such as flip chip bonding and the like.
Specifically, in the present embodiment, the coarse motor 120 is a linear motor, and the motion accuracy is in the millimeter level or the sub-millimeter level. The linear motor can realize a large-stroke and high-precision motion, and therefore, the output shaft 300 can be driven to realize a high-precision motion in a large stroke range and a large force application range. Further, the coarse motor 120 may be a coreless linear motor. Of course, in other embodiments of the present application, the coarse motor 120 may be a servo motor, which drives the driving sliding table 130 to move through a screw nut.
Specifically, in the present embodiment, the micro motor 410 is a voice coil motor, and the motion accuracy is in the micrometer scale. When the voice coil motor is electrified and works, the rotor of the voice coil motor can move relative to the stator along the axial direction of the output shaft 300 without friction, so that high-precision dynamic fine adjustment of the driving force or the driving position is realized.
Specifically, in the present embodiment, the output shaft 300 is provided with a mechanical mounting interface of the voice coil motor for fixedly connecting with a mover of the voice coil motor. Preferably, the mechanical mounting interface of the voice coil motor may be disposed at a central position of the output shaft 300 in the axial direction. So set up, the force application position of voice coil motor to output shaft 300 is located output shaft 300's middle part, and output shaft 300 is difficult for crooked, is favorable to guaranteeing its motion accuracy.
In particular, in the present embodiment, the micro-motion unit 400 may further include a cooling element for cooling the micro-motion motor 410. By arranging the cooling element, active cooling can be provided for the micro motor 410, and heating and temperature rising of the micro motor 410 in the continuous working process can be effectively restrained, so that the movement precision of the micro motor can be ensured. Further, the cooling element may be a fan, but of course, the cooling element may also be other heat dissipating or refrigerating elements.
Specifically, in the present embodiment, as shown in fig. 3, the elastic connection assembly includes a damping cylinder 230 and an extension spring 240, and the damping cylinder 230 and the extension spring 240 are disposed in parallel between the first connection member 210 and the second connection member 220 to achieve variable damping adjustment and small-range force level adjustment. By controlling the extension amount of the air rod of the damping cylinder 230, the output force of the damping cylinder 230 can be controlled, and the equivalent stiffness of the whole elastic connection assembly can be adjusted, so that the output pressure and displacement of the output shaft 300 can be adjusted, the elastic connection assembly can be made to be in proper stiffness, and the force applied by the micro-motion unit 400 can be transferred to the working panel 700 through the output shaft 300 in an equal proportion. Furthermore, in this arrangement, the preload of the extension spring 240 is provided by the weight of the damping cylinder 230 and the underlying unit, allowing the extension spring 240 to operate in the linear elastic region at all times. The free length and the rigidity of the extension spring 240 are calculated and determined according to the size of the selected damping cylinder 230 and the variation range of the working load.
More specifically, in the present embodiment, the damping cylinder 230 and the tension spring 240 may be provided in plurality, and preferably, the plurality of damping cylinders 230 and the plurality of tension springs 240 are staggered and uniformly provided in the circumferential direction. By the arrangement, the stress of the first connecting piece 210 and the stress of the second connecting piece 220 are balanced along the circumferential direction, so that accurate and stable force transmission can be ensured.
It should be noted that, in other embodiments of the present application, the elastic connection assembly may be an air spring, and a flexible connection with variable stiffness between the coarse unit 100 and the output shaft 300 can be achieved. Further, the number of the air springs may be plural, and the plural air springs may be uniformly disposed around the axis of the output shaft 300.
Specifically, in the present embodiment, as shown in fig. 2, the coarse movement unit 100 further includes a base 110, and the coarse movement motor 120 is fixedly mounted on the base 110. In this arrangement, base 110 serves as a mounting carrier for coarse motor 120.
Specifically, in this embodiment, the coarse movement unit 100 further includes a balance member, the balance member is fixedly mounted on the base 110, and a power output end of the balance member is fixedly connected with the transmission sliding table 130; when the movement direction of the device forms an included angle with the horizontal direction, the balancing piece is used for balancing the gravity of the mover of the coarse motor 120, the transmission sliding table 130 and the accessory of the transmission sliding table 130. In this arrangement, when the movement direction of the device is a vertical direction or a non-zero angle with the horizontal direction, the balance member balances the gravity of the mover of the coarse motor 120, the transmission sliding table 130, and the accessory of the transmission sliding table 130, thereby avoiding the influence of gravity on the force position control. Moreover, when the driving direction of the coarse motor 120 is opposite to the gravity direction, the balancing member can reduce the continuous thrust of the coarse motor 120, thereby reducing the heating temperature rise of the coarse motor 120 and further improving the movement accuracy of the device.
More specifically, in the present embodiment, as shown in fig. 2, the balancing member is a balancing cylinder 150, the balancing cylinder 150 is mounted on the base 110, and the air rod of the balancing cylinder 150 is connected with the driving sliding table 130. Of course, in other embodiments of the present application, the balancing member may be a mechanical spring, an air spring, a balancing hydraulic cylinder or a balancing motor, so long as it can provide a force for balancing the weight of the mover of the coarse movement motor 120, the driving sliding table 130 and the accessories thereof, and the specific form of the balancing member is not limited by the present application.
Specifically, in the present embodiment, as further shown in fig. 2, the coarse movement unit 100 further includes a linear guide rail 140, the linear guide rail 140 is disposed on the base 110, the transmission sliding table 130 is provided with a sliding slot, and the transmission sliding table 130 is slidably connected to the base 110 through the sliding slot and the linear guide rail 140. Thus, the linear guide 140 plays a role in guiding the driving slide 130.
It should be noted that, in other embodiments of the present application, the linear guide 140 may also be disposed on the driving sliding table 130, and the base 110 is provided with a chute, so that the chute plays a guiding role on the driving sliding table 130.
Specifically, in this embodiment, as shown in fig. 4, the device further includes a guiding unit 500, where the guiding unit 500 includes a guiding sleeve 510, and the guiding sleeve 510 is sleeved outside the output shaft 300 and is fixedly connected with the driving sliding table 130. In this arrangement, the guide sleeve 510 limits the output shaft 300 in the circumferential direction of the output shaft 300, so that the output shaft 300 can be ensured to move accurately in the axial direction.
Specifically, in the present embodiment, the guide sleeve 510 is an air-floating sleeve, and a set gap is provided between the air-floating sleeve and the output shaft 300. Preferably, the air bearing sleeve is an air bearing sleeve with high radial rigidity. When the device is operated, an air film is formed between the air floatation shaft sleeve and the output shaft 300, so that the motion friction of the output shaft 300 is eliminated, and the output shaft 300 can move axially or rotate around the axis to a designated position with low friction or without friction; at the same time, good radial rigidity of the output shaft 300 can be maintained, and radial deflection of the output shaft 300 is ensured to be within an allowable range.
Specifically, in this embodiment, as shown in fig. 4, the guiding unit 500 further includes a mounting rack 520, the inner side of the mounting rack 520 is connected to the guiding shaft sleeve 510, and the outer side is fixedly connected to the driving sliding table 130.
More specifically, in this embodiment, the guiding unit 500 may be an air bearing, the inner ring of the air bearing forms the guiding sleeve 510, and the outer ring of the air bearing forms the mounting frame 520.
Specifically, in the present embodiment, as shown in fig. 2 and 4, the apparatus further includes a first displacement sensor 610, a second displacement sensor 620, and a force sensor 630; the first displacement sensor 610 is used for detecting the displacement of the transmission sliding table 130; the second displacement sensor 620 is configured to detect a displacement of the output shaft 300 relative to the transmission sliding table 130, where the displacement reflects a displacement fine adjustment amount of the damping unit 200 and the micro-motion unit 400 based on the adjustment of the coarse motion unit 100; the force sensor 630 is used to detect the output force of the device. By providing the first displacement sensor 610 and the second displacement sensor 620, the displacement of the output shaft 300 relative to the base 110 can be obtained according to the feedback values of the first displacement sensor 610 and the second displacement sensor 620, so that the distance between the chip and the substrate can be accurately controlled in the bonding process, and the bonded distance between the chip and the substrate is ensured to meet the process requirement range. By providing the force sensor 630, the pressure applied to the chip by the acquisition device can be detected in real time, and accordingly, the bonding pressure can be adjusted through the coarse movement unit 100, the damping unit 200, the micro movement unit 400 and the like, so that the force control precision requirement is achieved, and the chip and the substrate are not damaged.
More specifically, in the present embodiment, as shown in fig. 2 and 4, the first displacement sensor 610 may employ a grating scale, the scale grating is mounted on the base 110, and the reading head is mounted on the driving sliding table 130 and moves along with the driving sliding table 130. The second displacement sensor 620 may be a laser sensor, the body of which is mounted on the driving sliding table 130, and the laser reflection ranging surface may be disposed on the guiding unit 500. Of course, in other embodiments of the present application, neither the first displacement sensor 610 nor the second displacement sensor 620 is limited to the above-described form, as long as the first displacement sensor 610 is capable of measuring the relative displacement of the transmission slide 130 with respect to the base 110, and the second displacement sensor 620 is capable of measuring the relative displacement of the output shaft 300 with respect to the transmission slide 130.
Specifically, in the present embodiment, as shown in fig. 4, the number of force sensors 630 is plural, and the plurality of force sensors 630 are uniformly arranged in the circumferential direction of the output shaft 300. For example: the number of force sensors 630 may be three. By the arrangement, the uniformity of the pressure output by the device can be detected while the output pressure is detected.
Specifically, in the present embodiment, the damping unit 200 may further include a first housing 250, and the first connector 210, the second connector 220, and the damping cylinder 230 and the extension spring 240 of the damping unit 200 are all located in the first housing 250; the first housing 250 is fixedly mounted to the driving slipway 130. So arranged, the first housing 250 can protect the components located therein and also protect the components inside thereof from external interference, thereby ensuring movement accuracy.
Specifically, in this embodiment, the micro-motion unit 400 further includes a second housing 420, the voice coil motor is located in the second housing 420, and the stator of the voice coil motor is fixedly connected with the second housing 420; the second housing 420 is fixedly connected with the first housing 250, and both can transmit the acting force between the micro-motion unit 400 and the driving sliding table 130. So set up, second casing 420 can play the guard action to voice coil motor to can make voice coil motor's motion avoid suffering external interference, and then guarantee the motion precision of self and output shaft 300. Of course, in other embodiments of the present application, the second housing 420 may also be directly fixedly connected to the driving sliding table 130.
Specifically, in the present embodiment, as shown in fig. 1, the guiding unit 500 further includes a third housing 530, the mounting frame 520 of the guiding unit 500 is fixedly connected to the third housing 530, and the third housing 530 is fixedly mounted on the driving sliding table 130. So set up, third casing 530 can play the guard action to the direction air bearing in it to can make it avoid suffering the external interference, and then can guarantee the direction precision.
Specifically, in this embodiment, as shown in fig. 1, the apparatus further includes a working panel 700, and the force sensor 630 is disposed between the output shaft 300 and the working panel 700. The work panel 700 is used for final force or position output, and by fixedly mounting the tool to the work panel 700, the device can apply the pressure required by application to the stressed object in cooperation with the tool or move the tool to a specified position.
Specifically, in this embodiment, as shown in fig. 5, the apparatus further includes a control unit, where the control unit includes an upper computer 810, a motion controller 820, a coarse motion driver 830, a fine motion driver 840, a proportional valve 850, and a pressure switch 860; the upper computer 810 is connected with the motion controller 820, and the upper computer 810 is used for interacting with an operator and sending a motion instruction to the motion controller 820; motion controller 820 is coupled to coarse actuator 830, fine actuator 840, proportional valve 850, pressure switch 860, and first displacement sensor 610, second displacement sensor 620, and force sensor 630, respectively; the motion controller 820 is configured to generate and send corresponding command signals to the coarse motion driver 830, the micro motion driver 840 and the proportional valve 850 according to the measured values fed back by the first displacement sensor 610, the second displacement sensor 620, the force sensor 630 and the pressure switch 860 and an internal motion control algorithm after receiving the motion command sent by the upper computer 810; the coarse actuator 830 and the fine actuator 840 are configured to output corresponding operating currents to move the coarse motor 120 and the fine motor 410 after receiving the command signals; the proportional valve 850 is used to regulate the air pressure within the damping cylinder 230 upon receipt of a command signal.
In the precision force position output device provided in this embodiment, in a working state, a mechanical model of force analysis is shown in fig. 6 and 7, and the force meets the following relationship:
wherein,andh I the heights of the driving sliding table 130 and the working panel 700 with respect to the base 110 are shown, respectively, +.>Can be measured by a grating ruler, and the height difference between the inside and the outside is +.> h I As can be measured by means of a laser sensor,h I can be obtained by further calculation.
For the relative acting force between the shells, satisfy
Wherein the method comprises the steps ofIs the equivalent stiffness coefficient of the shell.
Acting force for the voice coil motor; />The acting force is the acting force of a linear motor; />The mass sum of the external moving elements of the device comprises a rotor of a linear motor, a transmission sliding table 130, various shells, a cylinder body of a damping cylinder 230, a stator of a voice coil motor, an air floatation shaft sleeve, a mounting frame 520 and the like; />The mass sum of the moving elements in the device comprises an air rod of the damping air cylinder 230, a rotor of a voice coil motor, an output shaft 300, a working panel 700 and the like. />To balance the forces of the cylinder 150, it remains substantially constant during normal operating conditions; />Environmental disturbance force and friction force applied to the outside of the device; />Acting force for damping cylinder 230; />To extend the force of the spring 240, it is satisfied that
Wherein the method comprises the steps ofIs the elastic stiffness coefficient of the extension spring 240.
For the environmental disturbance and friction forces to which the device is subjected, +.>The output force of the work panel 700 may be measured by the force sensor 630.
When the device is in the force control mode, the coarse motor 120 of the coarse unit 100 generates a first level output force, the damping cylinder 230 of the damping unit 200 generates a second level output force, and the voice coil motor of the micro unit 400 generates a third level output force. The output force range of the three-stage actuator is gradually reduced, and the adjustment resolution of the output force is gradually increased.
When the device is in the position control mode, the movement of the coarse motor 120 of the coarse unit 100, the damping cylinder 230 of the damping unit 200, and the voice coil motor of the micro unit 400 all change the position of the working panel 700. And when the actuators are in the zero positions, the positions of the tool are recorded as the zero positions of the tool, and the displacement of the tool relative to the zero positions of the tool is equal to the sum of the displacements of the three actuators relative to the respective zero positions.
Similarly, the displacement of the three actuators may be staged. According to the structural characteristics of the device, the coarse motor 120 and the damping cylinder 230 form a series motion structure, and the voice coil motor and the coarse motor form a parallel motion structure. The first stage displacement of the coarse motor 120 and the damping cylinder 230 is used to achieve a large stroke motion with millimeter or sub-millimeter precision by the control unit; the voice coil motor has good dynamic response characteristic, and the second-stage displacement is used for realizing micro-scale precision fine tuning movement.
Specifically, according to a mechanical model of the device, a state space equation of the device can be obtained:
the above state space equations describe the quantitative relationship between the displacement of the device and the input of the actuator. According to the specific physical model of the motor and the cylinder and the corresponding parameters, such as motor constant, resistance, cylinder diameter and the like, a force position control transfer function model of the device can be constructed, and a corresponding control method is designed.
In summary, in the precise force position output device provided in this embodiment, the coarse movement unit 100 uses a linear motor or a servo motor to realize a larger range of force position driving, the damping unit 200 uses a combination of the damping cylinder 230 and the extension spring 240 to realize flexible stiffness adjustment and a small range of force position adjustment, and the micro movement unit 400 uses a voice coil motor to realize dynamic fine adjustment of force position. The control unit receives the data of each sensor, realizes the precise adjustment of output force or output position in a hierarchical control mode, supports the switching between a force control mode and a position control mode, has a larger pressurizing or moving range and higher control precision, and is suitable for flip-chip bonding and other applications.
Finally, it is further noted that relational terms such as "first" and "second", and the like, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present application. Various modifications to the embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (12)
1. The utility model provides a precision force position output device which is characterized in that, include
The coarse movement unit (100), the coarse movement unit (100) comprises a coarse movement motor (120) and a transmission sliding table (130), and the transmission sliding table (130) is in transmission connection with the coarse movement motor (120);
the damping unit (200), the damping unit (200) comprises a first connecting piece (210), a second connecting piece (220) and an elastic connecting assembly, and the first connecting piece (210) is fixedly connected with the transmission sliding table (130); the second connecting piece (220) is fixedly connected with the output shaft (300); the elastic connecting component is arranged between the first connecting piece (210) and the second connecting piece (220), and the rigidity of the elastic connecting component is adjustable; and
a micro-motion unit (400), the micro-motion unit (400) comprising a micro-motion motor (410), the motion precision of the micro-motion motor (410) being higher than the motion precision of the coarse motion motor (120); the micro motor (410) is fixedly arranged on the second connecting piece (220), and a rotor of the micro motor (410) is fixedly connected to the output shaft (300).
2. The precision force position output device according to claim 1, wherein the coarse motor (120) is a linear motor or a servo motor, and the motion precision is in millimeter level or sub millimeter level;
and/or, the micro motor (410) is a voice coil motor, and the motion precision is in the micron order.
3. The precision force position output device of claim 2, wherein the elastic connection assembly comprises a damping cylinder (230) and a tension spring (240), the damping cylinder (230) and the tension spring (240) being disposed in parallel between the first connection member (210) and the second connection member (220).
4. A precision force position output device according to claim 3, characterized in that the coarse movement unit (100) further comprises a base (110), the coarse movement motor (120) being fixedly mounted to the base (110).
5. The precise force position output device according to claim 4, wherein the coarse movement unit (100) further comprises a balance member, the balance member is fixedly mounted on the base (110), and a power output end of the balance member is fixedly connected with the transmission sliding table (130); when the movement direction of the device forms an included angle with the horizontal direction, the balancing piece is used for balancing the gravity of the rotor of the coarse movement motor (120), the transmission sliding table (130) and the accessory of the transmission sliding table (130).
6. The precision force position output device of claim 5, wherein the balancing member is one of a balancing cylinder (150), a mechanical spring, an air spring, a balancing hydraulic cylinder, or a balancing motor.
7. The precision force position output device of claim 4, wherein the coarse movement unit (100) further comprises a linear guide (140), the linear guide (140) being disposed on one of the base (110) and the drive slide (130); the other one of the base (110) and the transmission sliding table (130) is provided with a sliding groove; the transmission sliding table (130) is connected to the base (110) in a sliding manner through the sliding groove and the linear guide rail (140).
8. A precision force position output device according to claim 3, further comprising a guiding unit (500), wherein the guiding unit (500) comprises a guiding sleeve (510), and the guiding sleeve (510) is sleeved outside the output shaft (300) and fixedly connected with the transmission sliding table (130).
9. The precision force level output device of claim 8, wherein the guide sleeve (510) is an air bearing sleeve having a set gap between the air bearing sleeve and the output shaft (300).
10. The precision force bit output device of any of claims 3-9, further comprising a first displacement sensor (610), a second displacement sensor (620), and a force sensor (630); the first displacement sensor (610) is used for detecting the displacement of the transmission sliding table (130); the second displacement sensor (620) is used for detecting the displacement of the output shaft (300) relative to the transmission sliding table (130); the force sensor (630) is used to detect the output force of the device.
11. The precision force position output device according to claim 10, wherein the number of the force sensors (630) is plural, and the plural force sensors (630) are uniformly arranged along the circumferential direction of the output shaft (300).
12. The precision force bit output device of claim 10, further comprising a control unit including a host computer (810), a motion controller (820), a coarse motion driver (830), a fine motion driver (840), a proportional valve (850), and a pressure switch (860); the upper computer (810) is connected with the motion controller (820), and the upper computer (810) is used for interacting with an operator and sending a motion instruction to the motion controller (820);
the motion controller (820) is respectively connected with the coarse motion driver (830), the fine motion driver (840), the proportional valve (850), the pressure switch (860), the first displacement sensor (610), the second displacement sensor (620) and the force sensor (630);
the motion controller (820) is configured to generate and send corresponding command signals to the coarse motion driver (830), the micro motion driver (840) and the proportional valve (850) according to the measured values fed back by the first displacement sensor (610), the second displacement sensor (620), the force sensor (630), the pressure switch (860) and an internal motion control algorithm after receiving the motion command sent by the upper computer (810);
the coarse movement driver (830) and the fine movement driver (840) are used for outputting corresponding working currents to enable the coarse movement motor (120) and the fine movement motor (410) to move after receiving the command signals; the proportional valve (850) is configured to regulate an air pressure within the damping cylinder (230) upon receipt of the command signal.
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