CN114161215B - Full-flexible impact-resistant overload-resistant dynamic mass compensation micro-positioning device - Google Patents

Full-flexible impact-resistant overload-resistant dynamic mass compensation micro-positioning device Download PDF

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Publication number
CN114161215B
CN114161215B CN202111606328.4A CN202111606328A CN114161215B CN 114161215 B CN114161215 B CN 114161215B CN 202111606328 A CN202111606328 A CN 202111606328A CN 114161215 B CN114161215 B CN 114161215B
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platform
compliant
mass
base
rigid
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CN114161215A (en
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范世珣
羊鹏
谭若愚
何强
谢馨
范大鹏
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National University of Defense Technology
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/001—Arrangements compensating weight or flexion on parts of the machine
    • B23Q11/0017—Arrangements compensating weight or flexion on parts of the machine compensating the weight of vertically moving elements, e.g. by balancing liftable machine parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

The invention discloses a full-compliant shock-resistant overload-resistant dynamic mass compensation micro-positioning device which comprises a compliant lever mechanism, a moving platform, a mass balance weight platform, a base, a plurality of guide rail sliding block assemblies, a driver and a sensor, wherein the compliant lever mechanism is fixed on the base, the moving platform and the mass balance weight platform are respectively connected with two sides of the base through the plurality of guide rail sliding block assemblies, and the translational degree of freedom in one direction is reserved; the left end and the right end of the flexible lever mechanism are fixedly connected with the motion platform and the mass balance weight platform respectively to form a fully flexible and flexible mass compensation micro-positioning system; the sensor is used for monitoring the displacement of the motion platform relative to the base in real time, so that the driver completes the driving action. The invention has the advantages of simple structure, simple and convenient operation, high positioning precision, large movement range and the like.

Description

Full-flexible impact-resistant overload-resistant dynamic mass compensation micro-positioning device
Technical Field
The invention mainly relates to the technical field of precise micro-positioning, in particular to a full-compliant impact-overload-resistant dynamic mass compensation micro-positioning device.
Background
With the continuous expansion of the disciplines in the fields of precision machining, space communication, optical engineering, aerospace and the like, the precision micro-positioning technology is widely applied, and the application occasions and environments of the precision micro-positioning technology become more and more various and complex.
The precise micro-positioning technology is one of basic key technologies of micro-actuation, micro-measurement and micro-manufacturing, can meet the requirements of high positioning precision, high dynamic performance, high resolution and strong stability, and can normally work under complex, extreme or severe environmental conditions to become a key factor for wider and deeper application. In the field of aerospace, for example, the working environment of the micro positioning system is usually coupled by many physical fields such as strong vibration, strong impact overload, high and low temperature, vacuum, high and low pressure, and the like.
In the prior art, a driving device with high output or a supporting transmission structure with high rigidity is usually adopted to resist strong vibration and strong impact overload, but the problem brought about is that the driving device with high output has long-time high-power output, so that the system has serious heating, high power consumption and positioning accuracy cannot be simultaneously considered; or the high-rigidity supporting transmission structure limits the working stroke of the micro-positioning motion platform, so that the system can only achieve the accurate positioning of a nanometer or submicron level.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: aiming at the technical problems in the prior art, the invention provides the full-compliant impact-overload-resistant dynamic mass compensation micro-positioning device which is simple in structure, simple and convenient to operate, high in positioning accuracy and large in movement range.
In order to solve the technical problem, the invention adopts the following technical scheme:
a full-compliant impact-overload-resistant dynamic mass compensation micro-positioning device comprises a compliant lever mechanism, a motion platform, a mass balance weight platform, a base, a plurality of sets of guide rail sliding block assemblies, a driver and a sensor, wherein the compliant lever mechanism is fixed on the base, and the motion platform and the mass balance weight platform are respectively connected with two sides of the base through the plurality of sets of guide rail sliding block assemblies and keep the translational degree of freedom in one direction; the left end and the right end of the compliant lever mechanism are fixedly connected with the motion platform and the mass balance weight platform respectively to form a fully-compliant mass compensation micro-positioning system; the sensor is used for monitoring the displacement of the motion platform relative to the base in real time, so that the driver completes the driving action.
As a further improvement of the invention: the flexible lever mechanism comprises a rigid fulcrum beam, a flexible deflection beam, a rigid retainer, a flexible correction beam and a rigid connecting block, the rigid fulcrum beam is fixedly connected with the base, the middle part of the rigid fulcrum beam is connected with the middle part of the rigid retainer through the flexible deflection beam, and the flexible deflection beam is perpendicular to the rigid fulcrum beam; the two flexible straightening beams are arranged at two ends of the rigid retainer and are respectively connected with a rigid connecting block connected with the motion platform and a rigid connecting block connected with the mass balance weight platform.
As a further improvement of the invention: the flexible straightening beam is vertical to the rigid retainer.
As a further improvement of the invention: and a rigid fulcrum beam of the flexible lever mechanism is fixed on the base.
As a further improvement of the invention: the rigid retainer is of an inverted triangular structure and is embedded between the compliant deflection beam and the compliant correction beam.
As a further improvement of the invention: the left end and the right end of the compliant lever mechanism are fixedly connected with the motion platform and the mass balance weight platform respectively and are arranged in an up-and-down symmetrical mode.
As a further improvement of the invention: when bearing strong overload or large impact in the working direction, the motion platform and the mass counterweight platform transmit force to the base through the compliant lever mechanism, and the driver does not need to work; when micro positioning is needed in the working direction, the driver drives the motion platform to do linear motion, and meanwhile, the mass balance weight platform does linear motion opposite to that of the motion platform.
As a further improvement of the invention: and mounting hole positions of the compliant lever mechanisms are arranged on two sides of the base, and clamping grooves and screw fixing holes of the compliant lever mechanisms are arranged.
As a further improvement of the invention: the motion platform is provided with a motion platform through groove, the mass balance weight platform is provided with a balance weight platform through groove for placing a flexible correcting beam of the flexible lever mechanism, and the mass balance weight platform is provided with a clamping groove and a screw fixing hole position which are fixedly connected with the rigid connecting block.
As a further improvement of the invention: the motion platform is provided with a stand column, and the stand column is connected with a driving unit of the driver through a through groove of the base.
Compared with the prior art, the invention has the advantages that:
1. the full-compliant impact overload resistant dynamic mass compensation micro-positioning device has the characteristics of simple structure, simplicity and convenience in operation and high positioning precision, utilizes the characteristics of strong anti-stretching deformation capability of the compliant beam in the axial direction of the beam and weak anti-bending deflection deformation capability in the radial direction of the beam, simultaneously combines a dynamic mass compensation method to resist impact overload, can ensure large working stroke and high movement precision, and has the characteristics of strong impact overload resistance capability, simple and compact structure, high positioning precision, large movement range and the like.
2. The invention relates to a full-compliant impact overload resistant dynamic mass compensation micro-positioning device, which adopts a dynamic mass compensation method to carry out equal-size compensation on the inertia force of a moving platform under the condition of impact overload through a mass balance weight platform and transmit the inertia force to a base through a compliant lever mechanism without a driver to do work.
3. According to the full-flexible impact-overload-resistant dynamic mass compensation micro-positioning device, the characteristics that the flexible beam is strong in anti-stretching deformation capability in the axial direction of the beam and weak in anti-bending deformation capability in the radial direction of the beam are utilized, so that under the action of impact overload, the motion platform and the mass balance weight platform are kept motionless relative to the base, and under the action of the driving force of the driver, the motion platform and the mass balance weight platform move oppositely relative to the base; namely, under the condition that the micro-positioning system works, the impact overload can still be effectively resisted, and the positioning precision and the dynamic performance are not influenced.
Drawings
Fig. 1 is a schematic diagram of the structural principle of the device of the present invention.
Fig. 2 is a schematic diagram of the installation principle of the mass balance platform in a specific application example of the invention.
FIG. 3 is a schematic diagram of the structure of a compliant lever mechanism in a specific application example of the present invention.
Fig. 4 is a schematic diagram of the working principle of the invention under different working conditions in a specific application example.
Illustration of the drawings:
1. a motion platform; 101. a motion platform through groove; 102. a column; 2. a compliant lever mechanism; 201. a rigid fulcrum beam; 202. a compliant yaw beam; 203. a rigid cage; 204. a compliant corrective beam; 205. a rigid connecting block; 3. a guide rail slider group; 301. a linear guide rail; 302. a precision slide block; 4. a base; 401. mounting hole sites; 5. a driver; 6. a sensor; 7. a mass counterweight platform; 701. a mass counterweight platform through slot; 702. a bolt; 703. and (4) balancing the lead block.
Detailed Description
The invention will be described in further detail below with reference to the drawings and specific examples.
As shown in fig. 1 and fig. 2, the fully compliant impact overload resistant dynamic mass compensation micro-positioning device of the present invention comprises a compliant lever mechanism 2, a motion platform 1, a mass counterweight platform 7, a base 4, a plurality of sets of guide rail sliding block assemblies 3, a driver 5 and a sensor 6; the rigid fulcrum beam 201 of the compliant lever mechanism 2 is fixed on the base 4, and the motion platform 1 and the mass counterweight platform 7 are respectively connected with two sides of the base 4 through the multiple sets of guide rail sliding block assemblies 3, so that the translational degree of freedom in one direction is reserved; the left end and the right end of the flexible lever mechanism 2 are fixedly connected with the motion platform 1 and the mass balance weight platform 7 respectively, and are symmetrically arranged up and down to form a fully flexible and flexible mass compensation micro-positioning system;
by adopting the device, when strong overload or large impact is borne in the working direction, the motion platform 1 and the mass counterweight platform 7 transmit force to the base 4 through the compliant lever mechanism 2, and the driver 5 does not need to work.
By adopting the device, when micro-motion positioning is needed in the working direction, the driver 5 drives the motion platform 1 to do linear motion, and the mass balance weight platform 7 does reverse linear motion with the motion platform 1.
As shown in fig. 3 and 4, in a specific application example, the compliant lever mechanism 2 includes a rigid fulcrum beam 201, a compliant deflection beam 202, a rigid retainer 203, a compliant correction beam 204, and a rigid connection block 205, where the rigid fulcrum beam 201 is fixedly connected to the base 4, a middle portion of the rigid fulcrum beam 201 and a middle portion of the rigid retainer 203 are connected by the compliant deflection beam 202, and the compliant deflection beam 202 is perpendicular to the rigid fulcrum beam 201; two flexible correction beams 204 are arranged at two ends of the rigid retainer 203 and are respectively connected with a rigid connecting block 205 of the motion platform 1 and a rigid connecting block 205 of the mass balance weight platform 7.
In a preferred embodiment, the flexible straightening beam 204 is further perpendicular to the rigid retainer 203.
In a specific application example, the rigid retainer 203 of the compliant lever mechanism 2 is designed to be an inverted triangle structure and is embedded between the compliant yaw beam 202 and the compliant correction beam 204, so as to reduce the overall size and installation space of the compliant lever mechanism 2.
In a specific application example, mounting hole positions 401 of the compliant lever mechanism 2 are arranged on two sides of the base 4, and a clamping groove and a screw fixing hole of the rigid fulcrum beam 201 are arranged.
In a specific application example, the motion platform 1 is provided with a motion platform through groove 101, the mass counterweight platform 7 is provided with a counterweight platform through groove 701 for placing the flexible straightening beam 204 and the flexible straightening beam 207 of the compliant lever mechanism 2, and the flexible straightening beam are connected through a bolt 702 and provided with a clamping groove and a bolt fixing hole position which are fixedly connected with the rigid connecting blocks 205 and 206.
In a specific application example, a column 102 is disposed on the moving platform 1, and the column 102 is connected with a driving unit of the driver 5 through a through slot of the base 4.
In a specific application example, as shown in fig. 2, the mass balance platform 7 is U-shaped, and is provided with a slot position in which a balance weight lead 703 can be placed and a bolt connection hole, and the number and weight of the balance weight lead 703 can be freely matched to adapt to the motion platform 1 and loads carried by the motion platform 1 with different weight requirements.
In a specific application example, the guide rail slider assembly 3 comprises a linear guide rail 301 and a precision slider 302, and the precision slider 302 moves on the linear guide rail 301.
It can be known from the working principles shown in fig. 4 (a), (b), (c), and (d) under various working conditions that the fully compliant impact-resistant overload-resistant dynamic mass compensation micro-positioning device utilizes the characteristics of the compliant beam that the flexible beam has strong anti-stretching deformation capability in the axial direction of the beam and weak anti-bending deflection deformation capability in the radial direction of the beam, and simultaneously combines the dynamic mass compensation method to resist impact overload and ensure large working stroke and high positioning accuracy.
In the full-flexible impact-overload-resistant dynamic mass compensation micro-positioning device, the characteristics that the flexible beam has strong anti-stretching deformation capability in the axial direction of the beam and has weak anti-bending deformation capability in the radial direction of the beam are utilized, so that under the action of impact overload, the motion platform 1 and the mass balance weight platform 7 are kept motionless relative to the base 4, and under the action of the driving force of the driver 5, the motion platform 1 and the mass balance weight platform 7 move oppositely relative to the base 4; namely, under the condition that the micro-positioning system works, the anti-impact overload can still be effectively realized, and the positioning precision and the dynamic performance are not influenced.
In a specific application example, the sensor 6 may select an inductive micro-displacement position detection sensor according to actual needs, and is arranged between the base 4 and the motion platform 1, and the micro-displacement sensor is used for monitoring the displacement of the motion platform 1 relative to the base 4 in real time and feeding back the displacement to the control unit, so that the driver 5 outputs corresponding actions.
In a specific application example, the connection between the moving platform 1 and the mass counterweight platform 7 and the base 4 may be implemented by selecting a ball screw, an air-floating guide rail, a magnetic-levitation guide rail, a compliant mechanism, and other structural forms according to actual needs.
In a specific application example, the sensor 6 (position detection sensor) may select a capacitive micro-displacement sensor, a grating scale, a photodetector or other micro-displacement position detection sensors according to actual needs.
In a specific application example, the motion platform 1, the mass balance weight platform 7 and the base 4 can be made of stainless steel, titanium alloy or aluminum alloy according to actual needs.
The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above-mentioned embodiments, and all technical solutions belonging to the idea of the present invention belong to the protection scope of the present invention. It should be noted that modifications and adaptations to those skilled in the art without departing from the principles of the present invention may be apparent to those skilled in the relevant art and are intended to be within the scope of the present invention.

Claims (9)

1. The full-compliant impact-resistant overload-resistant dynamic mass compensation micro-positioning device is characterized by comprising a compliant lever mechanism (2), a moving platform (1), a mass balance weight platform (7), a base (4), a plurality of sets of guide rail sliding block assemblies (3), a driver (5) and a sensor (6), wherein the compliant lever mechanism (2) is fixed on the base (4), the moving platform (1) and the mass balance weight platform (7) are respectively connected with two sides of the base (4) through the plurality of sets of guide rail sliding block assemblies (3), and the translational degree of freedom in one direction is reserved; the left end and the right end of the flexible lever mechanism (2) are fixedly connected with the motion platform (1) and the mass balance weight platform (7) respectively to form a fully flexible and flexible mass compensation micro-positioning system; the sensor (6) is used for monitoring the displacement of the motion platform (1) relative to the base (4) in real time, so that the driver (5) completes the driving action;
the flexible lever mechanism (2) comprises a rigid fulcrum beam (201), a flexible deflection beam (202), a rigid retainer (203), a flexible correction beam (204) and a rigid connecting block (205), wherein the rigid fulcrum beam (201) is fixedly connected with the base (4), the middle part of the rigid fulcrum beam (201) is connected with the middle part of the rigid retainer (203) through the flexible deflection beam (202), and the flexible deflection beam (202) is perpendicular to the rigid fulcrum beam (201); the two flexible correcting beams (204) are arranged at two ends of the rigid retainer (203) and are respectively connected with a rigid connecting block (205) connected with the moving platform (1) and a rigid connecting block (205) of the mass counterweight platform (7).
2. The fully compliant impact overload resistant dynamic mass compensating micropositioning device of claim 1, wherein the compliant beam (204) is perpendicular to the rigid cage (203).
3. The fully compliant impact overload resistant motion quality compensated micropositioning device of claim 1, wherein the rigid fulcrum beams (201) of the compliant lever mechanism (2) are fixed to the base (4).
4. The fully compliant impact overload resistant dynamic mass compensating micropositioning device of claim 1, wherein the rigid retainer (203) is of inverted triangular construction and is embedded between a compliant yaw beam (202) and a compliant correction beam (204).
5. The fully compliant impact overload resistant dynamic mass compensation micropositioning device according to any one of claims 1 to 4, wherein the left and right ends of the compliant lever mechanism (2) are fixedly connected with the motion platform (1) and the mass counterweight platform (7) respectively and are arranged in an up-and-down symmetrical manner.
6. The fully compliant impact and overload resistant dynamic mass compensation micropositioning device according to any one of claims 1 to 4, wherein when subjected to a strong overload or a large impact in the working direction, the motion platform (1) and mass counterweight platform (7) transmit forces to the base (4) through the compliant lever mechanism (2), and the actuator (5) does not need to work; when micro positioning is needed in the working direction, the driver (5) drives the motion platform (1) to do linear motion, and meanwhile, the mass counterweight platform (7) does linear motion opposite to that of the motion platform (1).
7. The fully compliant impact overload resistant dynamic mass compensation micropositioning device according to any one of claims 1 to 4, wherein mounting hole sites (401) of the compliant lever mechanisms (2) are provided on both sides of the base (4), and clamping grooves and screw fixing holes of the compliant lever mechanisms (2) are provided.
8. The fully compliant impact-overload-resistant dynamic mass compensation micropositioning device according to any one of claims 1 to 4, wherein a motion platform through slot (101) is provided on the motion platform (1), a counterweight platform through slot (701) is provided on the mass counterweight platform (7) for placing a compliant correction beam (204) of a compliant lever mechanism (2), and a slot and a screw fixing hole site fixedly connected with a corresponding rigid connection block (205) are respectively provided on the motion platform (1) and the mass counterweight platform (7).
9. The fully compliant impact-overload-resistant motion-mass-compensated micropositioning device according to any one of claims 1 to 4, wherein the motion platform (1) is provided with a column (102), the column (102) being connected to the drive unit of the drive (5) through a through slot of the base (4).
CN202111606328.4A 2021-12-26 2021-12-26 Full-flexible impact-resistant overload-resistant dynamic mass compensation micro-positioning device Active CN114161215B (en)

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CN104709475B (en) * 2015-03-26 2020-06-05 北京航空航天大学 Lever counter weight type gravity compensation device
CN105291090B (en) * 2015-10-30 2017-03-22 清华大学 Parallel type macro-micro high-precision movement platform
CN107246870B (en) * 2017-06-01 2019-10-15 中国人民解放军国防科学技术大学 A kind of difference structure stabilized platform based on flexible cable transmission
CN108044463B (en) * 2017-11-13 2019-05-03 华中科技大学 A kind of one-dimensional variable force grinding and polishing apparatus integrating main passive compliance and control method

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