CN110421553B - Three-degree-of-freedom macro-micro motion parallel structure device and control method - Google Patents
Three-degree-of-freedom macro-micro motion parallel structure device and control method Download PDFInfo
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- CN110421553B CN110421553B CN201910807905.2A CN201910807905A CN110421553B CN 110421553 B CN110421553 B CN 110421553B CN 201910807905 A CN201910807905 A CN 201910807905A CN 110421553 B CN110421553 B CN 110421553B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J13/00—Controls for manipulators
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/003—Programme-controlled manipulators having parallel kinematics
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1656—Programme controls characterised by programming, planning systems for manipulators
- B25J9/1664—Programme controls characterised by programming, planning systems for manipulators characterised by motion, path, trajectory planning
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Abstract
The invention discloses a three-degree-of-freedom macro-micro motion parallel structure device and a control method, wherein the device comprises a mechanical body part, a detection part and a control part; the mechanical body part comprises an air floatation platform, a platform static base, a micro platform, a macro-motion branched chain driving macro-motion of the micro platform and a micro-motion branched chain driving precise micro-motion of the micro platform, the detection part comprises a grating displacement sensor, a spectrum confocal displacement sensor and a short Cheng Ji light ranging sensor, and the control part comprises a voice coil motor servo amplifier, a linear precise unit servo amplifier, a motion control card, a data acquisition card and a computer. The macro-motion of the voice coil linear motor guarantees track tracking and motion range, the micro-motion driven by the linear precise driving unit realizes high-precision positioning control, macro-motion and micro-motion integration solves the contradiction between large stroke and high precision, and high-precision positioning control is realized in a larger working space.
Description
Technical Field
The invention relates to the field of precise positioning, in particular to a three-degree-of-freedom macro-micro motion parallel structure device and a control method.
Background
Along with the development of scientific technology, precision manufacturing, precision measurement and precision positioning technologies take an increasingly important role in scientific research fronts and industrial production. In IC manufacturing, a high-speed, high-precision processing and high-speed scanning detection large-stroke precision positioning platform is required. In the biomedical field, the handling and transferring processes of biological cells require miniaturized precision positioning platforms compared with the injection, cutting, fusion and other series of micro-operations. The series mechanism has low precision, large accumulated error and low rigidity, and does not meet the requirement of high-precision operation. In order to meet the high-precision positioning requirement, the concept of a parallel mechanism is provided. The parallel driving mode has the characteristics of high rigidity, high load, quick response and the like.
In order to solve the contradiction of large-stroke high precision, a platform with millimeter-scale stroke and nanometer-scale positioning precision is urgently needed, and a macro-micro combined driving platform with a parallel structure is a feasible scheme obtained by researchers, but the scheme needs to ensure that the motion resolution of a macro-motion platform is within the range of positioning precision of a micro-motion platform, so that higher requirements are put forward on various performances of the macro-motion platform.
Disclosure of Invention
In order to overcome the defects and shortcomings in the prior art, the invention provides a three-degree-of-freedom macro-micro motion parallel structure device and a control method.
In order to achieve the above purpose, the invention adopts the following technical scheme:
a three-degree-of-freedom macro-micro motion parallel structure device comprises a mechanical body part, a detection part and a control part;
the mechanical body part comprises an air floating platform, a platform static base, a micro platform, a macro-motion branched chain driving the micro platform to macro-move and a micro-motion branched chain driving the micro platform to precisely micro-move;
the macro-moving branched chain consists of three voice coil linear motors with the same specification, and the three voice coil linear motors are circumferentially arranged on the platform static base and mutually form 120 degrees;
the micro-motion branched chain comprises a micro-motion transmission shaft; one end of the micro-motion transmission shaft is connected with the micro-motion platform, and the other end of the micro-motion transmission shaft is connected with the voice coil linear motor;
the detection part comprises a grating displacement sensor arranged on the macro-motion branched chain, a spectrum confocal displacement sensor arranged on the micro-motion branched chain and a short Cheng Ji light ranging sensor arranged on the static base of the platform;
the control part is respectively connected with the detection part, the macro-movement branched chain and the micro-movement branched chain.
The control part comprises a data acquisition card, a computer, a motion control card, a voice coil motor servo amplifier and a linear precision unit servo amplifier;
the grating displacement sensor, the spectrum confocal displacement sensor and the short Cheng Jiguang distance measuring sensor acquire signals and input into the data acquisition card, the data acquisition card is connected with the computer, the computer is connected with the motion control card, and the motion control card outputs control signals to the voice coil motor servo amplifier and the linear precise unit servo amplifier to further drive the macro-moving branched chain and the micro-moving branched chain to move.
The micro-motion transmission shaft comprises a micro-motion transmission shaft base body, a flexible hinge and a micro-motion transmission shaft moving block, wherein the micro-motion transmission shaft base body is connected with the micro-motion transmission shaft moving block through the flexible hinge, one end of the micro-motion transmission shaft base body is connected with the voice coil linear motor through a fixed shaft, the motion of the voice coil linear motor is transmitted to the micro-motion transmission shaft, and the micro-motion transmission shaft moving block is connected with the micro-motion platform through a stepped shaft.
The voice coil linear motor comprises a guide rail, a voice coil linear motor sliding block, a voice coil linear motor push plate, a voice coil linear motor coil, a voice coil linear motor sleeve, a voice coil linear motor support plate and a voice coil linear motor bottom plate, wherein the voice coil linear motor bottom plate is fixed on a platform static base, the voice coil linear motor sliding block moves relative to the voice coil linear motor bottom plate on the guide rail under the pushing of the voice coil linear motor push plate and the voice coil linear motor coil, and the voice coil linear motor sliding block is connected with a fixed shaft.
The micro-motion transmission shaft comprises a micro-motion transmission shaft body, and is characterized in that a piezoelectric ceramic driver, a driver adjusting block and a driver fixing block are arranged on the micro-motion transmission shaft body, the tail end of the piezoelectric ceramic driver is connected with the driver adjusting block, the head end of the piezoelectric ceramic driver is connected with the driver fixing block, the driver adjusting block is fixed on the micro-motion transmission shaft body, and the driver adjusting block is fixed on a micro-motion transmission shaft moving block.
And the micro-motion transmission shaft matrix is provided with a balancing weight.
And a motor-grating ruler connecting block is further arranged on the voice coil linear motor sliding block.
And the micro-motion moving shaft moving block is fixed with a micro-motion detecting block, and when the micro-motion moving shaft moving block moves, the detecting block is driven to generate displacement relative to the spectrum confocal displacement sensor.
The micro-motion transmission shaft is manufactured by a metal plate warp cutting technology.
The control process of the three-degree-of-freedom macro-micro motion parallel structure device comprises the following steps:
the first step, initializing and resetting the corresponding sensor;
secondly, macro-motion positioning of the micro-motion platform is carried out, specifically: planning a motion track of the micro-motion platform, detecting position information of a macro-motion branched chain by using a grating displacement sensor, transmitting the position information to a data acquisition card, transmitting the position information to a computer, calculating the motion track by the computer, and then transmitting a track signal to a D/A conversion circuit of a motion control card to output to a voice coil linear motor servo amplifier to control the voice coil linear motor to generate corresponding motion;
the third step, the accurate positioning of the micro-motion platform is specifically: the spectral confocal displacement sensor for detecting the micro-motion branched chain transmits the position information to the data acquisition card, then transmits the position information to the computer, calculates a motion track by the computer, and then transmits a track signal to the D/A conversion circuit of the motion control card to be output to the linear precise unit servo amplifier so as to control the piezoelectric ceramic driver to generate corresponding motion;
and fourthly, under the driving positioning of the second step and the third step, the micro-motion platform only moves to the vicinity of a target positioning point due to the influences of factors such as temperature, deformation and friction, the distance information of three sides of the micro-motion platform is detected through short Cheng Ji light ranging sensors in three directions, the distance information is transmitted to a computer, the position of the current micro-motion platform is calculated through a related algorithm to obtain a control quantity, and finally the control information is transmitted to a motion control card to continuously carry out compensation control of the micro-motion platform, so that accurate positioning is finally realized.
Compared with the prior art, the invention has the following beneficial effects:
(1) The three-degree-of-freedom macro-micro integrated motion parallel mechanism device adopts the voice coil linear motor to drive the platform to perform macro motion, so that the defects of a ball screw or a motor reduction driver driven by a traditional servo motor are effectively avoided, the influence of factors such as additional friction, elastic deformation and gaps among mechanisms is reduced, and the positioning with high rigidity, no gap, high response speed and high precision can be realized;
(2) The invention adopts a macro/micro integrated dual driving mode, not only can give consideration to the characteristics of large travel and high running speed of a macro-motion part, but also has the characteristics of high-precision adjustment and positioning of a micro-motion part, and solves the contradiction between running travel and control precision.
(3) The micro-motion branched chain driven by the piezoelectric ceramic and matched with the flexible hinge has the characteristics of small volume, no friction, no clearance and high motion sensitivity, can eliminate assembly errors and dimensional errors, and is suitable for a precise positioning operation environment.
(4) According to the parallel structure platform, the high-precision angular contact ball bearing is adopted on the revolute pair, and the purpose of eliminating the clearance of the rotary joint can be achieved by adjusting and eliminating the clearance; the high-precision linear guide rail with pre-tightening can eliminate translational joint clearance.
Drawings
FIG. 1 is a schematic general construction of the present invention;
FIG. 2 is a front view of the present invention;
FIG. 3 is a top view of the present invention;
FIG. 4 is a schematic view of the macro driving part structure of the present invention;
fig. 5 is a schematic view of the jog drive shaft and related parts of the present invention.
Detailed Description
The present invention will be described in further detail with reference to examples and drawings, but embodiments of the present invention are not limited thereto.
Examples
1-4, a three-degree-of-freedom macro-micro motion parallel structure device comprises a machine body part, a detection part and a control part;
the mechanical body part comprises an air floating platform 1, a platform static base 2 and a micro-motion platform 3, wherein the platform static base is arranged on the air floating platform, the micro-motion platform is arranged on the platform static base, the micro-motion platform and the platform static base are triangular, three sides of the platform static base can be used for positioning and mounting of macro-motion branched chains, the micro-motion platform is provided with three shaft assembly holes along a diagonal line, the three shaft assembly holes are respectively connected with a stepped shaft 14 to realize three-degree-of-freedom motion, the macro-motion branched chains are connected with the micro-motion branched chains, the micro-motion branched chains are connected with the micro-motion platform through the shaft assembly holes, and the micro-motion platform is connected with a driving branched chain through high-precision angular contact ball bearings.
The macro-motion branched chain driving the macro-motion platform consists of three identical audio linear motors, wherein the three voice coil linear motors are arranged in a circle and form 120 degrees with each other, and the motion directions of the three voice coil linear motor sliding blocks are triangular.
As shown in FIG. 4, the voice coil linear motor 8 is composed of a boss 8-1, a guide rail 8-2, a voice coil linear motor slider 8-3, a voice coil linear motor push plate 8-4, a voice coil linear motor coil 8-5, a voice coil linear motor sleeve 8-6, a voice coil linear motor support plate 8-7 and a voice coil linear motor bottom plate 8-8, the voice coil linear motor bottom plate is fixed on a platform static base, the voice coil linear motor slider moves relative to the voice coil linear motor bottom plate on the guide rail under the pushing of the voice coil linear motor push plate and the voice coil linear motor coil, a motor-grating ruler connecting block 9 is arranged on the voice coil linear motor slider, a grating ruler 10-1 is fixed on the platform static base, a grating detection head 10-2 is connected with a motor-grating ruler, and the voice coil linear motor slider, a grating detection head of a grating displacement sensor and a fixed shaft 20 are connected into a whole.
As shown in fig. 5, the micro-motion transmission shaft 6 is processed into a micro-motion transmission shaft base 6-1, a flexible hinge 6-2 and a micro-motion transmission shaft moving block 6-3 by a metal plate wire cutting technology, a stepped hole is respectively processed on the micro-motion transmission shaft base and the micro-motion transmission shaft moving block and is used for being in transition fit with an outer ring of a bearing 16, the bearing is fastened by a bearing end cover 15, an inner ring of the bearing at the end of the transmission shaft base is in interference fit with a fixed shaft 20, the motion of a voice coil linear motor can be transmitted to the micro-motion transmission shaft, the inner ring of the bearing at the end of the micro-motion transmission shaft moving block is in interference fit with one end of a stepped shaft 14, and the other end of the stepped shaft is in interference fit with a matching hole of a micro-motion platform.
The micro-motion transmission shaft matrix shown in fig. 5 is provided with a piezoelectric ceramic driver 12, a driver adjusting block 11 and a driver fixing block 13, the tail end of the piezoelectric ceramic driver is connected with the driver adjusting block, the head end of the piezoelectric ceramic driver is connected with the driver fixing block, the piezoelectric ceramic driver is connected with the linear precision unit servo amplifier, the driver adjusting block is fixed on the micro-motion transmission shaft matrix, the driver fixing block is fixed on the micro-motion transmission shaft moving block, the driver adjusting block can adjust pretightening force, and the influence of gaps on the precision of the piezoelectric ceramic driver can be eliminated.
The micro-motion transmission shaft matrix shown in fig. 5 is provided with a balancing weight 7 which is used for keeping the micro-motion transmission shaft horizontal, reducing the abrasion on one side of the bearing and prolonging the service life.
The detection part comprises a grating displacement sensor 10, a spectrum confocal displacement sensor 19 and a short Cheng Ji optical ranging sensor 4, wherein the grating displacement sensor is synchronous with the motion of a voice coil linear motor sliding block and is used for detecting the displacement of a macro-moving part branched chain, the spectrum confocal displacement sensor is connected with a micro-motion transmission shaft and is used for detecting the displacement of the micro-motion branched chain, three short Cheng Ji optical ranging sensors are respectively fixed on a platform static base in a triangular circumference arrangement and are used for detecting the position information of the micro-motion platform, and the information of each sensor is received by a data acquisition card 25;
the spectral confocal displacement sensor of the detection part is clamped on a sensor fixing block 18, the sensor fixing block is fixed on a micro-motion transmission shaft base body, a micro-motion detection block 17 is fixed on the micro-motion transmission shaft moving block, and when the micro-motion transmission shaft moving block is driven by a piezoelectric ceramic driver to move, the detection block is also driven to generate displacement relative to the spectral confocal displacement sensor.
The control part comprises a voice coil linear motor servo amplifier 21, a linear precision unit servo amplifier 22, a data acquisition card 25, a motion control card 23 and a computer 24.
The voice coil linear motor servo amplifier drives the voice coil linear motor to move, and the linear precision unit servo amplifier drives the piezoelectric ceramic driver to move.
The computer receives the information of the data acquisition card, obtains control signals after calculation processing, and respectively sends the control signals to the voice coil linear motor servo amplifier and the linear precision unit servo amplifier through the motion control card to further drive the voice coil linear motor servo amplifier and the piezoelectric ceramic driver to move.
The control process of the three-degree-of-freedom macro-micro integrated motion parallel mechanism device comprises the following steps:
the method comprises the following steps that firstly, a grating displacement sensor for detecting linear displacement of a linear motor sliding block, a spectral confocal displacement sensor for detecting micro displacement of a linear precise driving unit and a short Cheng Ji optical ranging sensor for detecting a micro platform are used for detecting zero positions of a movable platform in reference to zero points, and initialization reset operation is carried out;
secondly, macro-motion positioning of the micro-motion platform is specifically as follows: planning a motion track of a moving platform, detecting position information of a linear motor sliding block by using a grating displacement sensor, transmitting the position information to a data acquisition card and then transmitting the position information to a computer, calculating the motion track by the computer, and then transmitting a track signal to a D/A conversion circuit of a motion control card to output to a voice coil linear motor servo amplifier to control the voice coil linear motor to generate corresponding motion;
the third step, the accurate positioning of the micro-motion platform is specifically: the spectral confocal displacement sensor for detecting the precise driving unit transmits the position information to the data acquisition card and then to the computer, the computer calculates the motion track, and then the D/A conversion circuit for transmitting the track signal to the motion control card outputs the track signal to the linear precise unit servo amplifier to control the piezoelectric ceramic driver to generate corresponding motion;
and fourthly, under the driving positioning of the second step and the third step, the micro-motion platform only moves to the vicinity of a target positioning point due to the influences of factors such as temperature, deformation and friction, the distance information of three sides of the micro-motion platform is detected through short Cheng Ji light ranging sensors in three directions, the distance information is transmitted to a computer, the position of the current micro-motion platform is calculated through a related algorithm to obtain a control quantity, and finally the control information is transmitted to a motion control card to continuously carry out compensation control of the micro-motion platform, so that accurate positioning is finally realized.
The dashed lines in fig. 1 indicate the wiring relationship between the individual devices, and the directional arrows indicate the direction of transmission of the detection and control signal streams.
In the embodiment, an SPFO-B type automatic inflatable balance vibration isolation platform is adopted, the specification is 750mm multiplied by 500mm, the vibration isolation effect is strong, the inherent vibration isolation frequency is 1Hz, the platform flatness is less than 0.05mm/m < 2 >, and the amplitude is less than 1.2um.
The voice coil linear motor adopts a T-VC85-L30 motor of Japanese horizontal and vertical company, the motor is suitable for a high-frequency short-stroke motion system, the stroke of the motor of the model is 30mm, the motion resolution is less than 0.5um, the performance requirement of macro-motion transmission of the device is met, the motor is directly driven, the cogging effect is avoided, the response is high, the rotor and the stator are not contacted, and the total friction between the devices is effectively reduced. The motor adopts a transverse-Sichuan VC II-03 series motor driver, has a self-tuning function, can automatically match rotational inertia and parameters, and can realize the compatibility of existing networks.
The piezoelectric ceramic driver adopts a PI company model P-840.3 piezoelectric ceramic driver, the maximum stroke is 45um, the peak thrust is 1000N, the resonance frequency is 10KHz, and the sub-nanometer resolution is realized; the piezoelectric ceramic actuator is all-ceramic insulating, lubrication is not needed during use, and abrasion is not caused; the driver geometry was 12mm by 68mm. The electric control unit is a PI company E-503 piezoelectric ceramic controller.
The embodiment adopts a German Miiridium IFS-2405-0.3 spectral confocal sensor which is specially designed for measurement tasks with high precision requirements, and the sensor has extremely high sensitivity, larger installation inclination angle and installation distance, so that the sensor can be used for various application occasions; the sensor detects linear measuring range of 0.3mm and resolution of 10nm; the grating displacement sensor adopts an ISA 2320 grating sensor of Italy GIVI MISEER company, the effective detection stroke is 120mm, and the resolution is 0.5um.
The short-range laser displacement sensor adopts a German Siker OD5-25T01 measuring head, the measuring range is 25+/-1 mm, the resolution is 20nm, and the measuring head adopts an advanced measuring algorithm and various diameter light spots, and has high reliability and high measuring precision.
The high-precision rotary bearing can be a precision angular contact ball bearing of the Japanese NSK company, and the model is 7900-A5-NSK precision angular contact ball bearing.
The embodiments described above are preferred embodiments of the present invention, but the embodiments of the present invention are not limited to the embodiments described above, and any other changes, modifications, substitutions, combinations, and simplifications that do not depart from the spirit and principles of the present invention should be made in the equivalent manner, and are included in the scope of the present invention.
Claims (7)
1. The three-degree-of-freedom macro-micro motion parallel structure device is characterized by comprising a mechanical body part, a detection part and a control part;
the mechanical body part comprises an air floating platform, a platform static base, a micro platform, a macro-motion branched chain driving the micro platform to macro-move and a micro-motion branched chain driving the micro platform to precisely micro-move;
the macro-moving branched chain consists of three voice coil linear motors with the same specification, and the three voice coil linear motors are circumferentially arranged on the platform static base and mutually form 120 degrees;
the micro-motion branched chain comprises a micro-motion transmission shaft; one end of the micro-motion transmission shaft is connected with the micro-motion platform, and the other end of the micro-motion transmission shaft is connected with the voice coil linear motor;
the micro-motion transmission shaft comprises a micro-motion transmission shaft base body, a flexible hinge and a micro-motion transmission shaft moving block, wherein the micro-motion transmission shaft base body is connected with the micro-motion transmission shaft moving block through the flexible hinge, one end of the micro-motion transmission shaft base body is connected with the voice coil linear motor through a fixed shaft to transmit the motion of the voice coil linear motor to the micro-motion transmission shaft, and the micro-motion transmission shaft moving block is connected with the micro-motion platform through a stepped shaft;
the detection part comprises a grating displacement sensor arranged on the macro-motion branched chain, a spectrum confocal displacement sensor arranged on the micro-motion branched chain and a short Cheng Ji light ranging sensor arranged on the static base of the platform;
the control part is respectively connected with the detection part, the macro-movement branched chain and the micro-movement branched chain;
the micro-motion transmission shaft moving block is fixed with a micro-motion detection block, and when the micro-motion movement shaft moving block moves, the detection block is driven to generate displacement relative to the spectrum confocal displacement sensor;
the voice coil linear motor comprises a guide rail, a voice coil linear motor sliding block, a voice coil linear motor push plate, a voice coil linear motor coil, a voice coil linear motor sleeve, a voice coil linear motor support plate and a voice coil linear motor bottom plate, wherein the voice coil linear motor bottom plate is fixed on a platform static base, the voice coil linear motor sliding block moves relative to the voice coil linear motor bottom plate on the guide rail under the pushing of the voice coil linear motor push plate and the voice coil linear motor coil, and the voice coil linear motor sliding block is connected with a fixed shaft.
2. The three-degree-of-freedom macro-micro motion parallel structure device according to claim 1, wherein the control part comprises a data acquisition card, a computer, a motion control card, a voice coil motor servo amplifier and a linear precision unit servo amplifier;
the grating displacement sensor, the spectrum confocal displacement sensor and the short Cheng Jiguang distance measuring sensor acquire signals and input into the data acquisition card, the data acquisition card is connected with the computer, the computer is connected with the motion control card, and the motion control card outputs control signals to the voice coil motor servo amplifier and the linear precise unit servo amplifier to further drive the macro-moving branched chain and the micro-moving branched chain to move.
3. The three-degree-of-freedom macro-micro motion parallel structure device according to claim 1, wherein a piezoelectric ceramic driver, a driver adjusting block and a driver fixing block are arranged on the micro-motion transmission shaft base body, the tail end of the piezoelectric ceramic driver is connected with the driver adjusting block, the head end of the piezoelectric ceramic driver is connected with the driver fixing block, the driver adjusting block is fixed on the micro-motion transmission shaft base body, and the driver adjusting block is fixed on the micro-motion transmission shaft moving block.
4. The three-degree-of-freedom macro-micro motion parallel structure device according to claim 1, wherein a balancing weight is arranged on the micro motion transmission shaft base body.
5. The three-degree-of-freedom macro-micro motion parallel structure device according to claim 4, wherein the voice coil linear motor sliding block is further provided with a motor-grating ruler connecting block.
6. The three degree of freedom macro-micro motion parallel structure device of claim 1 wherein the micro motion transmission shaft is fabricated by a metal plate wire cutting technique.
7. A control method of the three-degree-of-freedom macro-micro motion parallel structure device according to any one of claims 1 to 6, comprising:
the first step, initializing and resetting the corresponding sensor;
secondly, macro-motion positioning of the micro-motion platform is carried out, specifically: planning a motion track of the micro-motion platform, detecting position information of a macro-motion branched chain by using a grating displacement sensor, transmitting the position information to a data acquisition card, transmitting the position information to a computer, calculating the motion track by the computer, and then transmitting a track signal to a D/A conversion circuit of a motion control card to output to a voice coil linear motor servo amplifier to control the voice coil linear motor to generate corresponding motion;
the third step, the accurate positioning of the micro-motion platform is specifically: the spectral confocal displacement sensor for detecting the micro-motion branched chain transmits the position information to the data acquisition card, then transmits the position information to the computer, calculates a motion track by the computer, and then transmits a track signal to the D/A conversion circuit of the motion control card to be output to the linear precise unit servo amplifier so as to control the piezoelectric ceramic driver to generate corresponding motion;
and fourthly, under the driving positioning of the second step and the third step, the micro-motion platform only moves to the vicinity of a target positioning point due to the influences of factors such as temperature, deformation and friction, the distance information of three sides of the micro-motion platform is detected through short Cheng Ji light ranging sensors in three directions, the distance information is transmitted to a computer, the position of the current micro-motion platform is calculated through a related algorithm to obtain a control quantity, and finally the control information is transmitted to a motion control card to continuously carry out compensation control of the micro-motion platform, so that accurate positioning is finally realized.
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003207719A (en) * | 2002-01-16 | 2003-07-25 | Yamato Tekkosho:Kk | Automatic stage tracking device for microscope with image processing function |
| CN101221273A (en) * | 2008-01-30 | 2008-07-16 | 哈尔滨工业大学 | Parallel type macro-micro-driven high-precision heavy-caliber optical grating split joint device |
| CN103318839A (en) * | 2013-03-01 | 2013-09-25 | 广东工业大学 | Piezoelectric-ceramics-based high-speed high-precision macro-micro platform and switching method |
| CN104110561A (en) * | 2014-06-25 | 2014-10-22 | 华南理工大学 | Large-stroke planar three-degree-of-freedom precision positioning platform based on compliant mechanism |
| CN104317218A (en) * | 2014-10-11 | 2015-01-28 | 华南理工大学 | Precise micro-dynamic parallel locating system and method for micro-nano operation environment |
| CN104760039A (en) * | 2015-03-16 | 2015-07-08 | 华南理工大学 | Laser displacement sensor based parallel platform vibration detection control device and method |
| CN106313013A (en) * | 2016-10-25 | 2017-01-11 | 华南理工大学 | Macro-micro integrated motion high-precision parallel mechanism device and control method |
| CN108106547A (en) * | 2018-01-17 | 2018-06-01 | 华南理工大学 | The grand micro- compound alignment system of planar three freedom and method based on laser sensor |
| CN211103963U (en) * | 2019-08-29 | 2020-07-28 | 华南理工大学 | Three-degree-of-freedom macro and micro motion parallel structure device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7535193B2 (en) * | 2007-06-18 | 2009-05-19 | Xradia, Inc. | Five axis compensated rotating stage |
-
2019
- 2019-08-29 CN CN201910807905.2A patent/CN110421553B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003207719A (en) * | 2002-01-16 | 2003-07-25 | Yamato Tekkosho:Kk | Automatic stage tracking device for microscope with image processing function |
| CN101221273A (en) * | 2008-01-30 | 2008-07-16 | 哈尔滨工业大学 | Parallel type macro-micro-driven high-precision heavy-caliber optical grating split joint device |
| CN103318839A (en) * | 2013-03-01 | 2013-09-25 | 广东工业大学 | Piezoelectric-ceramics-based high-speed high-precision macro-micro platform and switching method |
| CN104110561A (en) * | 2014-06-25 | 2014-10-22 | 华南理工大学 | Large-stroke planar three-degree-of-freedom precision positioning platform based on compliant mechanism |
| CN104317218A (en) * | 2014-10-11 | 2015-01-28 | 华南理工大学 | Precise micro-dynamic parallel locating system and method for micro-nano operation environment |
| CN104760039A (en) * | 2015-03-16 | 2015-07-08 | 华南理工大学 | Laser displacement sensor based parallel platform vibration detection control device and method |
| CN106313013A (en) * | 2016-10-25 | 2017-01-11 | 华南理工大学 | Macro-micro integrated motion high-precision parallel mechanism device and control method |
| CN108106547A (en) * | 2018-01-17 | 2018-06-01 | 华南理工大学 | The grand micro- compound alignment system of planar three freedom and method based on laser sensor |
| CN211103963U (en) * | 2019-08-29 | 2020-07-28 | 华南理工大学 | Three-degree-of-freedom macro and micro motion parallel structure device |
Non-Patent Citations (2)
| Title |
|---|
| 徐祥和.电子精密机械设计.国防工业出版社,1986,1. * |
| 王驰.激光检测技术及应用.上海大学出版社,2016,7-9. * |
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