CN211343699U - Planar three-degree-of-freedom precision positioning platform - Google Patents
Planar three-degree-of-freedom precision positioning platform Download PDFInfo
- Publication number
- CN211343699U CN211343699U CN201922215282.8U CN201922215282U CN211343699U CN 211343699 U CN211343699 U CN 211343699U CN 201922215282 U CN201922215282 U CN 201922215282U CN 211343699 U CN211343699 U CN 211343699U
- Authority
- CN
- China
- Prior art keywords
- flexible
- unit
- spring piece
- voice coil
- spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Control Of Position Or Direction (AREA)
Abstract
The utility model provides a three degree of freedom precision positioning platforms in plane. The positioning platform comprises a base, a movable platform, a transmission mechanism and four voice coil motors, wherein the movable platform, the transmission mechanism and the four voice coil motors are positioned on the base; the transmission mechanism comprises four flexible branched chains, each flexible branched chain comprises three flexible P units and one flexible R unit, and translation along the X axis and the Y axis and rotation around the Z axis are realized through the structural design of the flexible P units, the connection design of the flexible P units, the structural design of the flexible R units and the connection design of the flexible P units. Compared with the prior art, the utility model solves the contradiction between the motion range, the motion rigidity and the motion precision of the transmission mechanism, and the positioning platform has large motion range, high output rigidity and high motion precision; meanwhile, the problem of insufficient thrust of the voice coil motor can be effectively solved, and the requirement of the driving force peak value of the voice coil motor is reduced due to the addition of the redundant driving branched chain.
Description
Technical Field
The utility model relates to a precision positioning technical field, in particular to three degree of freedom precision positioning platforms in plane.
Background
The transmission mechanism is always the basis for realizing the functions of mechanical equipment, and the precision transmission mechanism is one of the key technologies which need to be urgently developed in the field of modern precision engineering.
The traditional rigid mechanism depends on a kinematic pair to transmit force and displacement, and the motion precision of micron or below is difficult to achieve due to inevitable gaps, friction and abrasion among components. The flexible parallel mechanism transmits force and displacement through the elastic deformation of the structure, and completely eliminates idle stroke and mechanical friction in the transmission process of the kinematic pair, so that extremely high displacement resolution and repeated positioning precision can be obtained.
At present, piezoelectric ceramics are mostly adopted to drive a planar three-degree-of-freedom precision positioning platform, and although the planar three-degree-of-freedom precision positioning platform has higher motion precision, the deformation characteristic of the piezoelectric ceramics only can provide a micron-sized motion range, so that the application range of the precision motion platform is severely limited.
In order to solve the problem, chinese patent CN109848932A discloses a precision motion platform driven by a voice coil motor and driven by a flexible reed, where the positioning platform has a millimeter-scale or even centimeter-scale motion range, but the output force of the voice coil motor is limited, so that the output stiffness of the precision positioning platform is relatively low, the response speed and the anti-interference capability of the platform during motion are relatively poor, and meanwhile, the mechanism is very easy to vibrate in a high-speed motion situation, which affects the motion precision and efficiency of the mechanism.
Chinese patent CN202448118U discloses a double-translational long-stroke parallel precision positioning platform, which comprises two layers of compliant mechanism plates, wherein each layer of compliant mechanism plate comprises two split bodies arranged in parallel, and each split body consists of three composite leaf spring type flexible hinges. This positioning platform has higher output rigidity, need choose the great voice coil motor of drive power for use in order to reach centimeter grade's displacement, has not only increased the volume of mechanism, and the long-time during operation also can lead to the mechanism to generate heat seriously. Meanwhile, the mechanism only has two translational degrees of freedom, and the rotation of the tail end platform cannot be adjusted.
SUMMERY OF THE UTILITY MODEL
To the above-mentioned technical current situation, the utility model provides a precision positioning platform can realize the translation of plane two degrees of freedom and along planar rotation to big motion range, high output rigidity and high motion accuracy have.
The technical scheme of the utility model is that: a planar three-degree-of-freedom precision positioning platform comprises a base, a movable platform, a transmission mechanism and four voice coil motors, wherein the movable platform, the transmission mechanism and the four voice coil motors are positioned on the base;
the transmission mechanism comprises four identical flexible branched chains, and the flexible branched chains are distributed in a centrosymmetric manner by taking the movable platform as a center; each branched chain is correspondingly connected with one voice coil motor;
each flexible branched chain consists of three flexible P units and one flexible R unit with the same structure;
as shown in fig. 1, the flexible P unit includes a U-shaped bracket (i.e., composed of a bottom plate and two parallel side plates), a first connecting plate, a second connecting plate, and four spring leaves; the four spring pieces are respectively marked as a first spring piece, a second spring piece, a third spring piece and a fourth spring piece, wherein the first spring piece is completely the same as the second spring piece, and the third spring piece is completely the same as the fourth spring piece;
two ends of the first connecting plate are respectively connected with one ends of a first spring piece and a second spring piece, and the other ends of the first spring piece and the second spring piece are respectively connected with two sides of the opening end of the U-shaped bracket to form an approximate concave structure;
two ends of the second connecting plate are respectively connected with one ends of a third spring piece and a fourth spring piece, so that the third spring piece and the fourth spring piece are parallel to form a U-shaped structure, and the opening end of the U-shaped structure is fixed between two ends of the first connecting plate;
as shown in fig. 2, the flexible R unit is composed of two spring pieces with the same curvature, the two spring pieces are perpendicular to each other to form a triangular structure and are connected with the periphery of the movable platform;
in the flexible branched chain, two flexible P units (marked as a flexible P unit A and a flexible P unit B) are symmetrically distributed on two sides of a third flexible P unit (marked as a flexible P unit C), and second connecting plates of the flexible P unit A and the flexible P unit B are fixedly connected with two side plates of a U-shaped bracket of the flexible P unit C respectively; the bottom plate of the U-shaped support of the flexible P unit C is fixedly connected with the rotor of the corresponding voice coil motor, and the second connecting plate of the flexible P unit C is fixedly connected with the part, connected with the two spring pieces, of the flexible R unit through a connecting piece.
Preferably, the two side plates of the U-shaped bracket are bent inward at the open ends thereof to form a right angle, respectively, such that the first spring plate and the second spring plate are parallel to each other.
Preferably, the planar three-degree-of-freedom precision positioning platform further comprises a linear servo amplifier, the linear servo amplifier amplifies the instruction signal and then acts on the voice coil motor, and the linear servo amplifier can effectively reduce output ripples of the driver, so that the motion accuracy and the motion linearity of the voice coil motor are guaranteed.
Preferably, the planar three-degree-of-freedom precision positioning platform further comprises a movable platform displacement sensor for acquiring displacement signals generated by the movable platform. As an implementation manner, the displacement sensor includes a reflecting mirror and a laser displacement sensor, and is configured to reflect a laser signal emitted by the laser displacement sensor.
The utility model discloses in, flexible branch chain contains three flexible P unit and a flexible R unit, through connecting the design, and flexible P unit A that links to each other with the active cell when making the active cell move takes place to deform with flexible P unit B's spring leaf to restraint voice coil motor active cell along axial motion, and the spring leaf among the flexible P unit C does not take place to deform. By controlling the contraction and extension of the rotor in each voice coil motor, whether the spring plate in the flexible P unit C in the four branched chains deforms or not can be controlled, so that the motion of the movable platform on the plane is realized, and the specific control method is as follows:
along the surrounding direction taking the movable platform as the center, the four flexible branched chains are respectively marked as a first flexible branched chain, a second flexible branched chain, a third flexible branched chain and a fourth flexible branched chain; the voice coil motors corresponding to the voice coil motors are respectively marked as a first voice coil motor, a second voice coil motor, a third voice coil motor and a fourth voice coil motor;
the four voice coil motors are controlled as follows:
when the second voice coil motor and the fourth voice coil motor are controlled to extend and shorten respectively, in the process, the flexible P units A and the spring pieces in the flexible P units B in the second flexible branched chain and the fourth flexible branched chain are deformed and bent towards the X + direction, and the four spring pieces in the flexible P units C in the first flexible branched chain and the third flexible branched chain are also deformed and bent towards the X + direction, so that the rotors of the second voice coil motor and the fourth voice coil motor move along the X + direction. Similarly, when the second voice coil motor and the fourth voice coil motor are controlled to respectively shorten and extend, the platform can be translated along the X-direction.
When the first voice coil motor and the third voice coil motor are controlled to respectively extend and shorten, in the process, the spring pieces in the flexible P unit A and the flexible P unit B in the first flexible branched chain and the third flexible branched chain are deformed and bend towards the Y-direction, and meanwhile, the four spring pieces in the flexible P unit C in the second flexible branched chain and the fourth flexible branched chain are also deformed and bend towards the Y-direction, so that the platform is driven to translate along the Y-axis direction. Similarly, when the first voice coil motor and the third voice coil motor are controlled to respectively shorten and extend, the platform can be translated along the Y + direction.
When four voice coil motors are controlled to extend simultaneously, namely, the rotor of the first voice coil motor moves along the axial direction Y < - >, the rotor of the second voice coil motor moves along the axial direction X < + >, the rotor of the third voice coil motor moves along the axial direction Y < + >, and the rotor of the fourth voice coil motor moves along the axial direction X < - >. In the process, in the first flexible branched chain, not only the spring pieces in the flexible P unit A and the flexible P unit B deform towards the Y-direction, but also the spring piece in the flexible P unit C deforms and faces towards the X + direction; similarly, in the second flexible branched chain, not only the spring leaves in the flexible P unit a and the flexible P unit B deform towards the X + direction, but also the spring leaf in the flexible P unit C deforms and faces towards the Y + direction; similarly, in the third flexible branched chain, not only the third spring piece and the fourth spring piece in the flexible P unit a and the flexible P unit B deform in the Y + direction, but also the spring piece in the flexible P unit C deforms and faces in the X-direction; similarly, in the fourth flexible branched chain, not only the spring pieces in the flexible P unit a and the flexible P unit B deform toward the X-direction, but also the third spring piece and the fourth spring piece in the flexible P unit C deform and face the Y-direction; therefore, the elastic reeds in each flexible R unit rotate around the connecting part through the connecting piece, and the clockwise rotation of the movable platform on the XY plane is realized.
In a similar way, when the four voice coil motors are controlled and controlled to be shortened simultaneously, the anticlockwise rotation of the movable platform on the XY plane can be realized.
The utility model discloses a precision positioning platform's control process does: the controller sends an instruction signal to the voice coil motor to drive the rotor of the voice coil motor to reach specified displacement, the flexible branched chain of the transmission mechanism generates elastic deformation, and driving force and displacement are transmitted to the movable platform to enable the movable platform to move.
Preferably, the command signal is amplified by a linear servo amplifier and applied to the voice coil motor.
Preferably, the position and pose of the movable platform are measured by a displacement sensor, and are corrected in real time through a closed-loop control algorithm, so that the motion precision of the positioning platform is ensured.
The utility model discloses in, drive mechanism contains four flexible branch chains, and a voice coil motor is connected to every flexible branch chain, and every flexible branch chain contains three flexible P unit and a flexible R unit, through the structural design of flexible P unit, the connection design of each flexible P unit, the structural design of flexible R unit and with the connection design of flexible P unit realized moving the platform along X axle and the translation of Y axle and around the rotation of Z axle. Compared with the prior art, the utility model discloses following beneficial effect has:
(1) the positioning platform of the utility model is a flexible parallel positioning platform, realizes large-range gapless transmission through the elastic deformation of the flexible branched chain, has large translational motion range of the movable platform, can reduce parasitic motion, and can improve translational linearity; the rotation of the movable platform not only has a larger rotation range, but also has higher rotation precision;
(2) in the utility model, the flexible branched chain improves the output rigidity of the transmission mechanism and reduces the peak driving force of the voice coil motor;
(3) in the utility model, four flexible branched chains adopt an orthogonal arrangement mode, thereby realizing the translational decoupling of the planar flexible parallel mechanism;
(4) the utility model discloses in, move the platform and can realize the accurate motion of plane three degrees of freedom (along the translation of X axle and Y axle and around the rotation of Z axle), the monolithic structure of drive mechanism as an organic whole can adopt the line cutting technology integration machine-shaping, has reduced the influence of mechanical assembly error to mechanism motion precision.
Therefore, the utility model provides a contradiction between drive mechanism's motion range and motion rigidity and the motion precision, provide a neotype flexible parallelly connected positioning platform that has big motion range, high output rigidity and high motion precision.
Drawings
Fig. 1 is an overall structure diagram of the precision positioning platform according to the embodiment of the present invention.
Fig. 2 is a schematic view of the structure of the transmission mechanism in fig. 1.
Fig. 3 is a schematic view of the structure of the flexible branch in fig. 2.
Fig. 4 is a schematic diagram of the structure of the flexible P unit in the flexible branch chain.
FIG. 5 is a schematic diagram of the structure of the flexible R unit in the flexible branch chain.
FIG. 6 is a diagram of a control architecture of the stage.
The reference numerals in fig. 1 to 5 are: the laser displacement sensor comprises a transmission mechanism 1, a first laser displacement sensor 2, a first reflector 3, a first voice coil motor 4, a second laser displacement sensor 5, a second reflector 6, a second voice coil motor 7, a third laser displacement sensor 8, a third reflector 9, a third voice coil motor 10, a fourth voice coil motor 11, a base 12, a first flexible motion branch chain 13, a movable platform 14, a flexible P unit A15, a flexible P unit C16, a flexible P unit B17, a flexible R unit 18, a first spring leaf 19, a second spring leaf 20, a third spring leaf 21, a fourth spring leaf 22, a fifth spring leaf 23, a sixth spring leaf 24, a second flexible branch chain 25, a third flexible branch chain 26, a fourth flexible branch chain 27, a connecting piece 28, a U-shaped bracket 29, a first connecting plate 30 and a second connecting plate 31.
Detailed Description
The present invention will be described in further detail with reference to the following examples and drawings, which are not intended to limit the invention, but are intended to facilitate the understanding thereof.
As shown in fig. 1, the fine positioning stage includes a base 12, a movable stage 14 located on the base 12, a transmission mechanism 1, four voice coil motors, i.e., a first voice coil motor 4, a second voice coil motor 7, a third voice coil motor 10, and a fourth voice coil motor 11.
As shown in fig. 2, the transmission mechanism 1 includes four identical flexible branched chains, i.e., a first flexible branched chain 13, a second flexible branched chain 25, a third flexible branched chain 26, and a fourth flexible branched chain 27. Moreover, the four flexible branched chains are distributed in a centrosymmetric manner with the movable platform 14 as the center, and the four branched chains are distributed in a 90-degree orthogonal manner. Each flexible branched chain is correspondingly connected with one voice coil motor, namely, the first flexible branched chain 13 is connected with the first voice coil motor 4, the second flexible branched chain 25 is connected with the second voice coil motor 7, the third flexible branched chain 26 is connected with the third voice coil motor 10, and the fourth flexible branched chain 27 is connected with the fourth voice coil motor 11.
As shown in fig. 3, each flexible branch chain is composed of three flexible P units with identical structures, namely a flexible P unit a15, a flexible P unit B17, a flexible P unit C16 and a flexible R unit 18.
As shown in fig. 4, the flexible P unit is composed of a U-shaped bracket 29, a first connecting plate 30, a second connecting plate 31, and four spring pieces. The U-shaped bracket 29 is composed of a bottom plate and two parallel side plates, forming a U-shaped structure, in this embodiment, the two side plates are respectively bent inward at the open end of the U-shaped structure to form a right angle. The four spring pieces are respectively denoted as a first spring piece 19, a second spring piece 20, a third spring piece 21, and a fourth spring piece 22. The first spring plate 19 is identical to the second spring plate 20, and the third spring plate 21 is identical to the fourth spring plate 22.
Two ends of the first connecting plate 30 are respectively fixedly connected with one ends of a first spring piece 19 and a second spring piece 20, the other end of the first spring piece 19 is fixedly connected with one side of the opening end of the U-shaped bracket 29, the other end of the second spring piece 20 is fixedly connected with the other side of the opening end of the U-shaped bracket 29, and the first spring piece 19 and the second spring piece 20 are parallel to each other to form a concave structure.
The two ends of the second connecting plate 31 are respectively connected with one ends of the third spring piece 21 and the fourth spring piece 22, so that the third spring piece 21 and the fourth spring piece 22 are parallel to form a U-shaped structure, and the open end of the U-shaped structure is fixedly connected between the two ends of the first connecting plate 30.
As shown in fig. 5, the flexible R unit 18 is composed of two identical spring pieces, i.e., a fifth spring piece 23 and a sixth spring piece 24. The fifth spring plate 23 and the sixth spring plate 24 are perpendicular to each other to form a triangular structure. The flexible R units in each flexible branched chain are respectively arranged at four corners of the movable platform 14 and form a square structure with the movable platform.
As shown in FIG. 3, in the flexible branched chain, the flexible P unit A15 and the flexible P unit B17 are symmetrically distributed on two sides of the flexible P unit C16, and the second connecting plates 31 of the flexible P unit A15 and the flexible P unit B17 are fixedly connected with two side plates of the U-shaped bracket of the flexible P unit C16. In the flexible P unit C16, the bottom plate of the U-shaped bracket is fixedly connected with the rotor corresponding to the voice coil motor, and the second connecting plate 31 of the flexible P unit C16 is fixedly connected with the part of the flexible R unit 18, which is connected with the two spring leaves, through the connecting piece 28.
As shown in fig. 1, the precision positioning platform further includes three reflectors, i.e., a first reflector 3, a second reflector 6 and a third reflector 9, and three laser displacement sensors, i.e., a first laser displacement sensor 2, a second laser displacement sensor 5 and a third laser displacement sensor 8.
The precise positioning platform further comprises four linear servo amplifiers, which are not shown in fig. 1, and are used for amplifying command signals output to the four voice coil motors by the upper computer.
When the first voice coil motor 4 and the third voice coil motor 7 are controlled to extend and shorten respectively, in the process, the flexible P unit a15 in the first flexible branched chain 13 and the third flexible branched chain 26 and the spring pieces in the flexible P unit B17 deform and bend towards the Y-direction, and the four spring pieces in the flexible P unit C16 in the first flexible branched chain 13 and the third flexible branched chain 26 do not deform, so that the rotors of the first voice coil motor 4 and the third voice coil motor 10 move along the Y-direction, and the flexible R joint 18 in the first flexible branched chain 13 and the third flexible branched chain 26 moves along the Y-direction through the connecting piece 28, so that the movable platform 14 is driven to translate along the Y-axis direction. Similarly, when the first voice coil motor 13 and the third voice coil motor 26 are controlled to respectively shorten and extend, the platform can be translated along the Y + direction.
When the second voice coil motor 7 and the fourth voice coil motor 11 are controlled to extend and shorten respectively, in the process, the flexible P units a and B in the second flexible branched chain 25 and the fourth flexible branched chain 27 deform and bend towards the X + direction, and the four spring pieces in the flexible P units C in the second flexible branched chain 25 and the fourth flexible branched chain 27 do not deform, so that the movers of the second voice coil motor 7 and the fourth voice coil motor 11 move along the X + direction, and the flexible R units in the second flexible branched chain 25 and the fourth flexible branched chain 27 move along the X + direction through the connecting piece 28, so that the moving platform 14 is driven to translate along the Y + axis direction. Similarly, when the second voice coil motor 7 and the fourth voice coil motor 11 are controlled to respectively shorten and extend, the platform can be translated along the X-direction.
When the four voice coil motors are controlled to extend simultaneously, namely, the rotor of the first voice coil motor 13 moves along the axial Y-direction, the rotor of the second voice coil motor 7 moves along the axial X + direction, the rotor of the third voice coil motor 10 moves along the axial Y + direction, and the rotor of the fourth voice coil motor 11 moves along the axial X-direction. In the process, in the first flexible branched chain 13, not only the spring pieces in the flexible P unit a and the flexible P unit B deform in the Y-direction, but also the spring piece in the flexible P unit C deforms and faces in the X + direction; similarly, in the second flexible branched chain 25, not only the spring pieces in the flexible P unit a and the flexible P unit B deform toward the X + direction, but also the spring piece in the flexible P unit C deforms and faces toward the Y + direction; similarly, in the third flexible branched chain 26, not only the spring pieces in the flexible P unit a and the flexible P unit B deform in the Y + direction, but also the spring piece in the flexible P unit C deforms and faces in the X-direction; similarly, in the fourth flexible branched chain 27, not only the spring pieces in the flexible P unit a and the flexible P unit B deform in the X-direction, but also the spring piece in the flexible P unit C deforms and faces in the Y-direction; therefore, the elastic reeds in each flexible R unit rotate around the connection part through the connecting piece 28, and the clockwise rotation of the movable platform on the XY plane is realized.
In a similar way, when the four voice coil motors are controlled and controlled to be shortened simultaneously, the anticlockwise rotation of the movable platform on the XY plane can be realized.
The first reflector 3 and the first laser displacement sensor 2, the second reflector 6 and the first laser displacement sensor 5, the third reflector 9 and the first laser displacement sensor 8 are used for collecting displacement variation on three edges of the movable platform, and translation along an X axis and a Y axis and rotation around a Z axis at the central point of the movable platform can be obtained through pose calculation. The pose of the movable platform is corrected in real time through a closed-loop control algorithm, and the motion precision of the mechanism is guaranteed.
The control process of the precision positioning platform is shown in fig. 6, a controller sends out an instruction signal, the instruction signal is amplified by a linear servo amplifier and then acts on a voice coil motor, a rotor of the voice coil motor is driven to reach specified displacement, a flexible branched chain of a transmission mechanism generates elastic deformation, driving force and displacement are transmitted to a movable platform, and the movable platform generates planar three-degree-of-freedom precision motion. The laser displacement sensor is adopted to measure the pose of the movable platform, and the pose of the movable platform is corrected in real time through a closed-loop control algorithm, so that the motion precision of the positioning platform is ensured.
The above-mentioned embodiment is to the technical solution of the present invention has been described in detail, it should be understood that the above is only the specific embodiment of the present invention, not used for limiting the present invention, any modification, supplement or similar mode replacement etc. that the principle scope of the present invention is in should be included in the protection scope of the present invention.
Claims (5)
1. A planar three-degree-of-freedom precision positioning platform is characterized in that: the voice coil motor comprises a base, a movable platform, a transmission mechanism and four voice coil motors, wherein the movable platform, the transmission mechanism and the four voice coil motors are positioned on the base;
the transmission mechanism comprises four identical flexible branched chains, and the flexible branched chains are distributed in a centrosymmetric manner by taking the movable platform as a center; each branched chain is correspondingly connected with one voice coil motor;
each flexible branched chain consists of three flexible P units and one flexible R unit with the same structure;
the flexible P unit comprises a U-shaped bracket, a first connecting plate, a second connecting plate and four spring pieces, wherein the U-shaped bracket consists of a bottom plate and two parallel side plates; the four spring pieces are respectively marked as a first spring piece, a second spring piece, a third spring piece and a fourth spring piece, wherein the first spring piece is completely the same as the second spring piece, and the third spring piece is completely the same as the fourth spring piece;
two ends of the first connecting plate are respectively connected with one ends of a first spring piece and a second spring piece, and the other ends of the first spring piece and the second spring piece are respectively connected with two sides of the opening end of the U-shaped bracket to form an approximately concave structure;
two ends of the second connecting plate are respectively connected with one ends of a third spring piece and a fourth spring piece, so that the third spring piece and the fourth spring piece are parallel to form a U-shaped structure, and the opening end of the U-shaped structure is fixed between two ends of the first connecting plate;
the flexible R unit consists of two identical spring pieces, and the two spring pieces are mutually perpendicular to form a triangular structure and are connected with the periphery of the movable platform;
in the flexible branched chain, three flexible P units are respectively marked as a flexible P unit A, a flexible P unit B and a flexible P unit C, the flexible P units A and the flexible P units B are symmetrically distributed on two sides of the flexible P unit C, and second connecting plates of the flexible P units A and the flexible P units B are respectively fixedly connected with two side plates of a U-shaped support of the flexible P unit C; the bottom plate of the U-shaped support of the flexible P unit C is fixedly connected with the rotor of the corresponding voice coil motor, and the second connecting plate of the flexible P unit C is fixedly connected with the part, connected with the two spring pieces, of the flexible R unit through a connecting piece.
2. The planar three-degree-of-freedom precision positioning platform of claim 1, which is characterized in that: the two side plates of the U-shaped bracket are respectively bent inwards at the opening ends to form a right angle, so that the first spring piece and the second spring piece are parallel to each other.
3. The planar three-degree-of-freedom precision positioning platform of claim 1, which is characterized in that: the planar three-degree-of-freedom precision positioning platform further comprises a linear servo amplifier.
4. The planar three-degree-of-freedom precision positioning platform of claim 1, which is characterized in that: the planar three-degree-of-freedom precision positioning platform further comprises a movable platform displacement sensor.
5. The planar three-degree-of-freedom precision positioning platform of claim 4, wherein: the platform displacement sensor includes a mirror.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922215282.8U CN211343699U (en) | 2019-12-10 | 2019-12-10 | Planar three-degree-of-freedom precision positioning platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922215282.8U CN211343699U (en) | 2019-12-10 | 2019-12-10 | Planar three-degree-of-freedom precision positioning platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211343699U true CN211343699U (en) | 2020-08-25 |
Family
ID=72103367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922215282.8U Active CN211343699U (en) | 2019-12-10 | 2019-12-10 | Planar three-degree-of-freedom precision positioning platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211343699U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110905909A (en) * | 2019-12-10 | 2020-03-24 | 中国科学院宁波材料技术与工程研究所 | Planar three-degree-of-freedom precision positioning platform, and use method and control method thereof |
-
2019
- 2019-12-10 CN CN201922215282.8U patent/CN211343699U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110905909A (en) * | 2019-12-10 | 2020-03-24 | 中国科学院宁波材料技术与工程研究所 | Planar three-degree-of-freedom precision positioning platform, and use method and control method thereof |
| CN110905909B (en) * | 2019-12-10 | 2023-09-12 | 中国科学院宁波材料技术与工程研究所 | Planar three-degree-of-freedom precision positioning platform, and use method and control method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108561700B (en) | Three-degree-of-freedom ultrasonic vibration auxiliary machining precision positioning platform | |
| CN109909976B (en) | Symmetrical space stereo micro-manipulator with three-stage motion amplifying mechanism | |
| CN101844307B (en) | Redundancy-driven three-degree-of-freedom parallel mechanism | |
| CN101862966A (en) | Two-degree of freedom translation parallel decoupling micromotion platform | |
| CN107464586A (en) | A kind of big stroke mini positioning platform of Three Degree Of Freedom of driving force decoupling | |
| CN110905909A (en) | Planar three-degree-of-freedom precision positioning platform, and use method and control method thereof | |
| CN110138266A (en) | A kind of Inchworm type piezoelectric actuator | |
| CN111667878A (en) | Large-stroke high-speed high-precision XY parallel decoupling micro-positioning platform | |
| CN209774584U (en) | Planar three-degree-of-freedom fully-flexible parallel positioning platform | |
| CN211343699U (en) | Planar three-degree-of-freedom precision positioning platform | |
| CN103411106A (en) | Nested rhombus-shaped amplification two-dimensional precise locating platform | |
| CN109584947B (en) | Three-degree-of-freedom large-stroke high-precision micro-positioning platform based on bridge type amplification mechanism | |
| CN102756366A (en) | Space decoupling three-dimensional motion parallel micro-motion mechanism | |
| CN110010190B (en) | Three-dimensional constant force parallel flexible micro-positioning platform | |
| CN102354050B (en) | Micro angular swing control reflecting mirror followed by flexible auxiliary arm with superhigh angular sensitivity and high frequency response | |
| CN110065926B (en) | Two-degree-of-freedom scott-russell flexible micro-nano positioning platform | |
| CN102069201A (en) | Two-degree-of-freedom dynamic error counteracting device for free-form surface ultra-precision turning | |
| CN102879879A (en) | Large-stroke and high-precision reconfigurable series-parallel mechanism of mirror bracket | |
| CN106229012A (en) | A kind of big displacement high frequency sound Three Degree Of Freedom Piezoelectric Driving precisely locating platform | |
| CN105174210A (en) | Three-degree-of-freedom micro-positioning platform based on symmetrical double compliant hinge | |
| CN100432491C (en) | Multifunction microdriving interface module | |
| CN110421553B (en) | Three-degree-of-freedom macro-micro motion parallel structure device and control method | |
| CN110086374B (en) | Inchworm type precise rotation micro-driver based on compliant mechanism | |
| CN201950226U (en) | Two degrees of freedom dynamic error counteraction device for free curved surface ultra-precision turning | |
| CN115046636A (en) | Compact high-stability phase-shifting scanning device based on piezoelectric ceramic drive |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |