CN201950226U - Two degrees of freedom dynamic error counteraction device for free curved surface ultra-precision turning - Google Patents
Two degrees of freedom dynamic error counteraction device for free curved surface ultra-precision turning Download PDFInfo
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- CN201950226U CN201950226U CN2010206666583U CN201020666658U CN201950226U CN 201950226 U CN201950226 U CN 201950226U CN 2010206666583 U CN2010206666583 U CN 2010206666583U CN 201020666658 U CN201020666658 U CN 201020666658U CN 201950226 U CN201950226 U CN 201950226U
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Abstract
The utility model relates to a two degrees of freedom dynamic error counteraction device for free curved surface ultra-precision turning, which belongs to the technical field of ultra-precision processing and complex curved surface optical part processing. The two degrees of freedom dynamic error counteraction device for free curved surface ultra-precision turning comprises a base, a left side plate, a right side plate, an upper cover plate, a front cover plate, a flexible hinge mechanism, a diamond cutter, piezoelectric executers, a capacitance displacement sensor installation seat and a capacitance displacement sensor, wherein the mechanism is in an integrated structure, is symmetric related to an yx plane, an X axis motion platform is a flexible hinge guide mechanism and is driven by the piezoelectric executer, a Z axis motion platform is arranged on the X axis motion platform, is connected in series with the flexible hinge guide mechanism by a lever enlarging mechanism and is synchronously driven by two piezoelectric executers, and the capacitance displacement sensor respectively detects displacement of an X axis and a Z axis. The two degrees of freedom dynamic error counteraction device for free curved surface ultra-precision turning has the advantages that motion between the X axis and the Z axis is decoupled without generating parasitic motion and has the advantages of high accuracy and middle-lower frequency or middle-high frequency response.
Description
Technical field
The utility model belongs to ultraprecise processing and complex-curved optical element processing technique field, relates to a kind of two-freedom dynamic error canceller of free form surface ultra-precise cutting.
Background technology
Utilize the dynamic error counteracting method, can promote the machining accuracy and the surface quality of existing super precision lathe.Up to now, the error counteracting of free form surface ultra-precise cutting mainly is at low frequency aberration (static or plan static error), also less at medium and low frequency or medium-high frequency dynamic error, and all be the error counteracting device that utilizes single-degree-of-freedom basically in these technical schemes.In the free form surface ultra-precise cutting, the cutter that is produced and the composition error of workpiece not only depend on the position coordinates of gyroaxis and translation shaft, but also factors such as dependence lathe temperature rise, this makes composition error have medium and low frequency or medium-high frequency behavioral characteristics and non-rotating symmetry; The composition error of cutter and workpiece not only has projection components on the Z axle, sizable projection components is also arranged on X-axis, and this makes existing single-degree-of-freedom error counteracting device be difficult to satisfy the active error counteracting requirement of actual free form surface ultra-precise cutting.
The dynamic error canceller of free form surface ultra-precise cutting, its main performance requirement is: (1) has medium and low frequency or medium-high frequency sound, high accuracy and suitable characteristics such as stroke; (2) motion between X-axis and Z axle must be independent, decoupling zero, and the error counteracting of X-axis or Z axle should not be on other the direction and produces additional or parasitic motion.
Although the precision at other is made the field, existing report about diaxon or multiaxial motion servomechanism installation, the dynamic error that can't be directly applied for the free form surface ultra-precise cutting is offset.These multiaxial motion servomechanism installations still do not satisfy the performance requirement of free form surface ultra-precise cutting dynamic error canceller, and its main defective is: be the motion coupling between (1) two axle, this makes that the driving control of these two axles is very difficult; (2) will produce additional or parasitic motion on the direction at other in the motion on certain, and in order to eliminate these additional or parasitic motions, have to apply on the direction of these generation hunt effects extra driving compensation, this will make the error counteracting Design of device make complexity, overall precision and bandwidth reduction.
Also be pointed out that: even the servo multiaxis super precision lathe of slide carriage is at a slow speed arranged, also be not suitable for medium and low frequency or medium-high frequency dynamic error and offset, this is main because the servo reciprocating frequency of slide carriage is too low at a slow speed.The existing multiaxis super precision lathe that slow axis servomotor is arranged, its reciprocating frequency also just can reach several hertz.
Summary of the invention
The utility model provides a kind of two-freedom dynamic error canceller of free form surface ultra-precise cutting, to solve the problem that the multiaxial motion servomechanism installation does not still satisfy free form surface ultra-precise cutting dynamic error canceller performance requirement.
The technical scheme that the utility model is taked is: left plate, right plate and front shroud are fixedlyed connected with pedestal, upper cover plate respectively, the two-freedom flexure hinge mechanism is connected with the pedestal positioning and fixing by bolt, diamond cutter is fixedlyed connected with the two-freedom flexure hinge mechanism, X to piezo actuator by X to U type piece respectively with the two-freedom flexure hinge mechanism in left column, on the right column U type groove, fixedly connected to the pretension screw with X; Z is to piezo actuator one, Z to piezo actuator two respectively by Z to U type piece one, Z is to U type piece two, with two the U type grooves of X in the two-freedom flexure hinge mechanism to the motion platform rear portion, with Z to pretension screw one, Z is fixedly connected to pretension screw two, sensor stand is fixedlyed connected with left side, two-freedom flexure hinge mechanism rear portion or right side, X is fixedlyed connected with the circular hole on the sensor stand to capacitance displacement sensor, its gauge head over against X to motion platform, Z X in capacitance displacement sensor and flexure hinge mechanism is fixedlyed connected to the circular hole at motion platform rear portion, its gauge head over against Z to motion platform.
A kind of embodiment of the present utility model is: the two-freedom flexure hinge mechanism is " H type " overall structure, be divided into left, center, right three parts, wherein the left column of left part respectively by connect on the flexible hinge, flexible hinge connects down and X leads left, and swing arm is hinged; The right column of right side part connects down by connection on the flexible hinge, flexible hinge respectively and X leads to the right, and swing arm is hinged; Mid portion be X to motion platform, its left end is hinged by upper left flexible hinge, lower-left flexible hinge and the X swing arm that leads left respectively, its right-hand member is hinged by upper right flexible hinge, bottom right flexible hinge and the X swing arm that leads to the right respectively; This X has on motion platform by line cutting at the Z that directly processes to motion.
A kind of embodiment of the present utility model is: described Z is hinged with its both sides and guiding swing arm by flexible hinge one, flexible hinge two, flexible hinge three, flexible hinge four to motion platform by Z, and hinged with the one group of lever enlarger in its rear portion by flexible hinge five, flexible hinge six, flexible hinge seven, flexible hinge eight to motion; The fulcrum of this group lever enlarger is respectively flexible hinge nine, the flexible hinge ten that can produce little rotation, and the input of lever enlarger is hinged by flexible hinge 11, flexible hinge 12 and lever enlarger respectively.
Described flexure hinge mechanism can produce the error compensation motion of X, Z both direction, utilizes the X-axis piezo actuator to drive the X-axis motion platform, and does not have the error compensation motion of lateral displacement by bistable flexible hinge targeting part realization X-axis; Utilize Z axial compression electric actuator to act on the input of lever enlarger respectively simultaneously, rely on Z, the straight-line displacement after amplifying accurately is delivered on the diamond cutter, thereby realize that the Z axle does not have the error compensation motion of lateral displacement to guiding mechanism guiding.The motion of X-axis and Z axle is decoupling zero, also can not produce friction and wear in the motion, can improve greatly kinematic accuracy and service life.
Described X-axis, two capacitance displacement sensors of Z axle are respectively applied for X-axis that detects flexure hinge mechanism and the micrometric displacement that the Z axle is produced, for the closed-loop control of X-axis piezo actuator and Z axial compression electric actuator provides feedback signal respectively.
The dynamic counteracting that the utility model rings by high accuracy on X-axis and Z axle, medium and low frequency or medium-high frequency, to suppress the composition error between cutter and the workpiece, remove the motion coupling between X-axis and the Z axle, X-axis or Z axis error are offset motion and are not produced hunt effect on other direction.
Advantage of the present utility model is: the as a whole formula structure of the flexure hinge mechanism of (1) two-freedom, do not have rigging error, have high accuracy; (2) on X-axis and Z axle, all utilized bistable flexure hinge mechanism, made it can on other axle, not produce any hunt effect; (3) motion between X-axis and Z axle is decoupling zero, is easy to control and implements.
The utility model not only can be realized the X-axis of super precision lathe and the ultraprecise medium and low frequency or the counteracting of medium-high frequency dynamic error of Z axle motion, can realize that also the ultra-precise cutting of free form surface is created.
Description of drawings
Fig. 1 is an external structure schematic diagram of the present utility model;
Fig. 2 is the three-dimensional structure schematic diagram of the utility model two-freedom flexure hinge mechanism;
Fig. 3 is the front view of the utility model two-freedom flexure hinge mechanism;
Fig. 4 is the vertical view of the utility model two-freedom flexure hinge mechanism;
Fig. 5 is the structural representation of the utility model pedestal fitting surface;
Fig. 6 is that the utility model drives and displacement detecting part-structure schematic diagram.
The specific embodiment
Left plate 4, right plate 6 and front shroud 3 are fixedlyed connected with pedestal 1, upper cover plate 5 respectively, two-freedom flexure hinge mechanism 12 is connected with pedestal 1 positioning and fixing by bolt, by 101,102,103 location of the face on the pedestal 1, diamond cutter 2 is fixedlyed connected with two-freedom flexure hinge mechanism 12, X to piezo actuator 11 by X to U type piece 10 respectively with two-freedom flexure hinge mechanism 12 in left column 1203, on the right column 1204 U type groove, fixedly connected to pretension screw 9 with X; Z is to piezo actuator 1, Z to piezo actuator 2 17 respectively by Z to U type piece 1, Z is to U type piece 2 18, with two the U type grooves of X in the two-freedom flexure hinge mechanism 12 to motion platform 1213 rear portions, with Z to pretension screw 1, Z is fixedly connected to pretension screw 2 19, sensor stand 7 is fixedlyed connected with left side, two-freedom flexure hinge mechanism 12 rear portions or right side, X is fixedlyed connected with the circular hole on the sensor stand 7 to capacitance displacement sensor 8, its gauge head over against X to motion platform 1213, Z X in capacitance displacement sensor 16 and flexure hinge mechanism 12 is fixedlyed connected to the circular hole at motion platform 1213 rear portions, its gauge head over against Z to motion platform 121301.
A kind of embodiment of the present utility model is: two-freedom flexure hinge mechanism 12 is " H type " overall structures, be divided into left, center, right three parts, wherein the left column 1203 of left part respectively by connect 1205 on the flexible hinge, flexible hinge connect down 1208 and the X swing arm 1201 that leads left hinged; The right column 1204 of right side part respectively by connect 1212 on the flexible hinge, flexible hinge connect down 1209 and the X swing arm 1202 that leads to the right hinged; Mid portion is that X is to motion platform 1213, its left end respectively by upper left flexible hinge 1206, lower-left flexible hinge and 1207 and the X swing arm 1201 that leads left hinged, its right-hand member is hinged by upper right flexible hinge 1211, bottom right flexible hinge 1210 and the X swing arm 1202 that leads to the right respectively; This X has on motion platform 1213 by line cutting at the Z that directly processes to motion.
Described Z is 121302 hinged by flexible hinge 1, flexible hinge 2 121304, flexible hinge 3 121307, flexible hinge 4 121308 and its both sides and guiding swing arm to motion platform 121301 by Z, and hinged with the one group of lever enlarger 121315 in its rear portion by flexible hinge 5 121305, flexible hinge 6 121306, flexible hinge 7 121309, flexible hinge 8 121312 to motion; The fulcrum of this group lever enlarger 121315 is respectively flexible hinge 9 121311, the flexible hinge 10 that can produce little rotation; The input of lever enlarger is hinged by flexible hinge 11, flexible hinge 12 and lever enlarger respectively, is used to guarantee that Z avoids the moment of flexure effect to piezo actuator 1, Z to piezo actuator 2 17.
X drives the X-axis motion platform to piezo actuator, and does not have the error compensation motion of lateral displacement by the bistable state guiding mechanism realization X-axis of being made up of the guiding swing arm.Utilize capacitance displacement sensor to detect the micrometric displacement that X-axis produced of two-freedom flexure hinge mechanism, for the closed-loop control of X-axis piezo actuator provides feedback signal.
Z axial compression electric actuator acts on the input of lever enlarger respectively simultaneously, the output of lever enlarger is connected to motion platform with Z by flexible hinge, and the bistable state guiding mechanism guiding that relies on Z to form to four guiding hinges, straight-line displacement after amplifying accurately is delivered on the diamond cutter, thereby realizes that the Z axle does not have the error compensation motion of lateral displacement.The micrometric displacement that the Z axle that utilizes Z axle capacitance displacement sensor to detect flexure hinge mechanism is produced is for the closed-loop control of Z axial compression electric actuator provides feedback signal.
The motion of X-axis and Z axle is decoupling zero, can not produce friction and wear in the motion, can improve greatly kinematic accuracy and service life.
Claims (3)
1. the two-freedom dynamic error canceller of a free form surface ultra-precise cutting, it is characterized in that: left plate, right plate and front shroud are fixedlyed connected with pedestal, upper cover plate respectively, the two-freedom flexure hinge mechanism is connected with the pedestal positioning and fixing by bolt, diamond cutter is fixedlyed connected with the two-freedom flexure hinge mechanism, X to piezo actuator by X to U type piece respectively with the two-freedom flexure hinge mechanism in left column, on the right column U type groove, fixedly connected to the pretension screw with X; Z is to piezo actuator one, Z to piezo actuator two respectively by Z to U type piece one, Z is to U type piece two, with two the U type grooves of X in the two-freedom flexure hinge mechanism to the motion platform rear portion, with Z to pretension screw one, Z is fixedly connected to pretension screw two, sensor stand is fixedlyed connected with left side, two-freedom flexure hinge mechanism rear portion or right side, X is fixedlyed connected with the circular hole on the sensor stand to capacitance displacement sensor, its gauge head over against X to motion platform, Z X in capacitance displacement sensor and flexure hinge mechanism is fixedlyed connected to the circular hole at motion platform rear portion, its gauge head over against Z to motion platform.
2. the two-freedom dynamic error canceller of a kind of free form surface ultra-precise cutting according to claim 1, it is characterized in that the two-freedom flexure hinge mechanism is " H type " overall structure, be divided into left, center, right three parts, wherein the left column of left part respectively by connect on the flexible hinge, flexible hinge connects down and X leads left, and swing arm is hinged; The right column of right side part connects down by connection on the flexible hinge, flexible hinge respectively and X leads to the right, and swing arm is hinged; Mid portion be X to motion platform, its left end is hinged by upper left flexible hinge, lower-left flexible hinge and the X swing arm that leads left respectively, its right-hand member is hinged by upper right flexible hinge, bottom right flexible hinge and the X swing arm that leads to the right respectively; This X has on motion platform by line cutting at the Z that directly processes to motion.
3. the two-freedom dynamic error compensation device of a kind of free form surface ultra-precise cutting according to claim 2 is characterized in that: the Z of X on motion platform is hinged with its both sides and guiding swing arm by flexible hinge one, flexible hinge two, flexible hinge three, flexible hinge four to motion platform by Z, and hinged with the one group of lever enlarger in its rear portion by flexible hinge five, flexible hinge six, flexible hinge seven, flexible hinge eight to motion; The fulcrum of this group lever enlarger is respectively flexible hinge nine, the flexible hinge ten that can produce little rotation, and the input of lever enlarger is hinged by flexible hinge 11, flexible hinge 12 and lever enlarger respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206666583U CN201950226U (en) | 2010-12-19 | 2010-12-19 | Two degrees of freedom dynamic error counteraction device for free curved surface ultra-precision turning |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206666583U CN201950226U (en) | 2010-12-19 | 2010-12-19 | Two degrees of freedom dynamic error counteraction device for free curved surface ultra-precision turning |
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| CN201950226U true CN201950226U (en) | 2011-08-31 |
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| CN2010206666583U Expired - Lifetime CN201950226U (en) | 2010-12-19 | 2010-12-19 | Two degrees of freedom dynamic error counteraction device for free curved surface ultra-precision turning |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102069201A (en) * | 2010-12-19 | 2011-05-25 | 吉林大学 | Two-degree-of-freedom dynamic error counteracting device for free-form surface ultra-precision turning |
| CN102371359A (en) * | 2011-11-03 | 2012-03-14 | 吉林大学 | Three-dimensional elliptical vibration cutting device |
| CN106920578A (en) * | 2016-09-22 | 2017-07-04 | 澳门大学 | Two-dimensional constant force mechanism and the locating platform with the mechanism |
-
2010
- 2010-12-19 CN CN2010206666583U patent/CN201950226U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102069201A (en) * | 2010-12-19 | 2011-05-25 | 吉林大学 | Two-degree-of-freedom dynamic error counteracting device for free-form surface ultra-precision turning |
| CN102069201B (en) * | 2010-12-19 | 2012-07-04 | 吉林大学 | Two-degree-of-freedom dynamic error counteracting device for free-form surface ultra-precision turning |
| CN102371359A (en) * | 2011-11-03 | 2012-03-14 | 吉林大学 | Three-dimensional elliptical vibration cutting device |
| CN106920578A (en) * | 2016-09-22 | 2017-07-04 | 澳门大学 | Two-dimensional constant force mechanism and the locating platform with the mechanism |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20110831 Effective date of abandoning: 20120704 |