CN104895913A - Two-freedom degree motion-decoupling flexible hinge mechanism - Google Patents
Two-freedom degree motion-decoupling flexible hinge mechanism Download PDFInfo
- Publication number
- CN104895913A CN104895913A CN201510223680.8A CN201510223680A CN104895913A CN 104895913 A CN104895913 A CN 104895913A CN 201510223680 A CN201510223680 A CN 201510223680A CN 104895913 A CN104895913 A CN 104895913A
- Authority
- CN
- China
- Prior art keywords
- flexible hinge
- side chain
- matrix
- piezoelectric actuator
- displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
The invention discloses a two-freedom degree motion-decoupling flexible hinge mechanism. The mechanism comprises a flexible hinge matrix and a driving branched chain. The flexible hinge matrix comprises flexible hinge branched chains and a rigid connection member. The rigid connection member comprises a terminal rigid output platform located in the middle of the flexible hinge matrix, and upper, lower, left and right rigid platforms respectively located at upper, lower, left and right parts of the flexible hinge matrix. The upper, lower, left and right rigid platforms are respectively connected to the terminal rigid output platform by the flexible hinge branched chains and are respectively connected to the rigid matrix of the flexible hinge matrix by the flexible hinge branched chains. The two-freedom degree motion-decoupling flexible hinge mechanism realizes decoupling of motion and forces of the terminal along all directions and is conducive to improvement of a motion precision.
Description
Technical field
The present invention relates to machine design and manufacture technical field, refer more particularly to the designing technique of highi degree of accuracy driving mechanism.
Background technique
Micromotion mechanism has kinematic accuracy, resolution is high, compact structure, and the features such as range of movement is little, are widely used in micro-nano field operation, as atom force microscope, photo etched mask platform, the turning of smart steel stone, precision movement platform etc.The micromotion mechanism often used is a flexible hinge, and flexible hinge make use of elastic material micro-strain and from the characteristic of replying, eliminates the idle running in transmission process and mechanical friction, can obtain high displacement resolution.Consider that flexible hinge has fortune motive friction-free, wearing and tearing, without the need to lubrication, and there is compact structure, light and handy, manufacture the advantages such as easy to assembly, be therefore widely used in, in the design of micromotion mechanism, being called flexure hinge mechanism.
Flexure hinge mechanism can be divided into tandem and parallel according to its structure compositing characteristic, tandem flexure hinge mechanism is in series successively by flexible hinge and stiff connecting section, parallel flexure hinge mechanism is then formed by multiple series connection side chain is in parallel with terminal platform, at least there is two or more closed loop configuration.Compared to tandem flexure hinge mechanism, parallel flexure hinge mechanism has higher rigidity, natural frequency.What is more important, tandem flexure hinge mechanism is in movement process, except the degrees of freedom of moving direction, because the distortion of hinge also can produce the coupling error in other non-athletic directions, thus affect the output movement precision of mechanism, in addition, because flexure hinge mechanism adopts piezoelectric actuator to drive mostly, this actuator can only bear thrust load, lateral load moment of flexure can not be born, otherwise can cause damage to actuator, therefore due to each to motion and the coupling of load, non axial load can be produced in piezoelectric actuator terminal, cause the destruction of actuator.Parallel flexure hinge mechanism is by the design of structure, can realize each to the intimate decoupling zero of motion, this brings great convenience to the motion control of mechanism, and can realize more high-precision motion, and therefore existing flexure hinge mechanism all adopts parallel form to realize.In parallel flexure hinge mechanism, have living space and plane parallel flexible hinge mechanism two kinds of forms, need to use two dimension, three-dimension flexible hinge, processing difficulties owing to controlling flexure hinge mechanism, precision is difficult to ensure, what therefore use was at present more is planar flexible linkage.
The mobile decoupling realizing flexible hinge micromotion mechanism is the Focal point and difficult point of such mechanism design, means are taked to be add decoupling-structure at present, but existing decoupling-structure form is comparatively complicated, which increase the difficulty of mechanism's processing and assembling, certain impact is brought on the kinematic accuracy of mechanism, and the quality of mechanism kinematic parts can be increased, reduce its dynamic operation performance.The decoupling performance of the comparatively simple decoupling-structure of structure is difficult to again reach requirement, and therefore how project organization is simple, compact, and the flexure hinge mechanism of decoupling performance excellence is having challenge and being badly in need of solution of a task.
Summary of the invention
Given this, the object of the invention is to the shortcoming overcoming prior art, provide one and have high-precision plane two-freedom mobile decoupling flexible hinge micromotion mechanism, it is compact that this mechanism has decoupling zero, respectively to mobile decoupling, feature that kinematic accuracy is high.
In order to realize this object, the technological scheme that the present invention takes is as follows.
A kind of two-freedom mobile decoupling flexure hinge mechanism, described mechanism comprises flexible hinge matrix and drives side chain, and wherein flexible hinge matrix comprises flexible hinge side chain and rigid connector,
Rigid connector comprises the terminal rigidity output stage being positioned at flexible hinge matrix intermediate portion and the upper end laying respectively at flexible hinge matrix upper and lower, left and right part, lower end, left end, right-hand member rigid platfor;
Described upper end, lower end, left end, right-hand member rigid platfor are connected with terminal rigidity output stage respectively by flexible hinge side chain, and upper end, lower end, left end, right-hand member rigid platfor are connected respectively by the rigid matrix of flexible hinge side chain with flexible hinge matrix.
Especially, described flexible hinge side chain comprises multiple flexible hinge unit arranged that is parallel to each other.
The flexible hinge side chain of described connection terminal rigidity output stage and upper end, lower end, left end, right-hand member rigid platfor comprises 3 flexible hinge unit arranged that are parallel to each other; The flexible hinge side chain of the rigid matrix of described connection upper end, lower end, left end, right-hand member rigid platfor and flexible hinge matrix comprises 2 flexible hinge unit arranged that are parallel to each other.
Wherein, described flexible hinge unit is rectangular flexible hinge-unit.
Described driving side chain comprises first of mutually perpendicular direction driving and drives side chain and second to drive side chain, first drives side chain to comprise the first piezoelectric actuator and the first actuator connecting head, second drives side chain to comprise the second piezoelectric actuator and the second actuator connecting head, wherein
First piezoelectric actuator of the first driving side chain is connected to one in upper end, lower end, left end, right-hand member rigid platfor by the first actuator connecting head;
Second drives the second piezoelectric actuator of side chain to be connected to another rigid platfor of the rigid platfor phase orthogonal direction be connected with the first actuator connecting head by the second actuator connecting head.
Especially, described first drives side chain also to comprise the first flange plate, the first pull pressure sensor and the first friction top, and second drives side chain also to comprise the second flange plate, the second pull pressure sensor and the second friction top, wherein,
First pull pressure sensor is coaxial with the first piezoelectric actuator, the tail end of the first piezoelectric actuator is connected to by the first flange plate, the other end of the first pull pressure sensor is fixedly connected with the first friction top, the first friction top one end being bolted to flexible hinge matrix;
Second pull pressure sensor is coaxial with the second piezoelectric actuator, the tail end of the second piezoelectric actuator is connected to by the second flange plate, the other end of the second pull pressure sensor is fixedly connected with the second friction top, the second friction top the other end being bolted to flexible hinge matrix.
In addition, there is gap, for applying axial pretightening load by described bolt to the first piezoelectric actuator or the second piezoelectric actuator between the first friction top or the second friction top and the end of flexible hinge matrix that is attached thereto.
Described two-freedom mobile decoupling flexure hinge mechanism also comprises displacement measurement system and measuring basis, and described displacement measurement system comprises the first displacement measurement system and second shift measurement system of measuring the displacement on two orthogonal directions respectively, wherein,
First displacement measurement system is fixed on one end of described flexible hinge matrix, comprises the first displacement transducer and the first fitting seat, and the direction of measurement of described first displacement transducer is parallel with the axial direction of described first piezoelectric actuator;
Second shift measurement system be fixed on described flexible hinge matrix with the one end in the first perpendicular direction of displacement measurement system mounting end, comprise second displacement sensor and the second fitting seat, the direction of measurement of described second displacement sensor is parallel with the axial direction of described second piezoelectric actuator;
Measuring basis is fixedly attached to the terminal rigidity output stage of described flexible hinge matrix, and have two end faces, the first end face is vertical with the direction of measurement of the first displacement transducer, and the second end face is vertical with the direction of measurement of second displacement sensor.
Described in two-freedom mobile decoupling flexure hinge mechanism of the present invention, displacement transducer is laser displacement sensor.
By adopting two-freedom mobile decoupling flexure hinge mechanism of the present invention, following Advantageous Effects can be obtained.
1, the motion parts of two-freedom mobile decoupling flexure hinge mechanism flexible hinge matrix of the present invention takes symmetrical parallel-connection structure form, there is compact structure, the advantage that rigidity is high, and this structural type can ensure terminal respectively to the decoupling zero between motion and power, thus contribute to the kinematic accuracy improving two-freedom mobile decoupling flexure hinge mechanism.
2. this invention takes the texturing unit of rectangular flexible hinge-unit mechanism as a whole, rectangular flexible hinge-unit easy processing, machining accuracy is high, and can realize than other form flexible hinge unit more compact structure.
3. in two-freedom mobile decoupling flexure hinge mechanism of the present invention, what the flexible hinge side chain affixed with flexible hinge substrate terminals platform adopted is that multiple rectangular flexible hinge-unit combines, what the flexible hinge side chain affixed with input end rigid platfor adopted is that multiple rectangular flexible hinge-unit combines, this multiple hinge-unit is arranged in parallel formed side chain than taking single flexible hinge-unit and has larger flexural rigidity and larger lateral flexibility, the stroke in mechanism kinematic direction can be increased like this, increase the rigidity in non-athletic direction simultaneously, contribute to the impact improving mechanism's opposing external load disturbance, ensure high kinematic accuracy.
4. in two-freedom mobile decoupling flexure hinge mechanism of the present invention, pull pressure sensor is fixedly installed in the tail end of piezoelectric actuator, can avoid like this increasing heavy moving parts because pull pressure sensor being fixedly installed in actuator front end, thus the dynamic operation performance of reducing mechanism, simultaneously can the axial stand under load of Real-Time Monitoring actuator, the monitoring applied for pretightening force and dynamics Controlling are provided convenience.
Accompanying drawing explanation
Fig. 1 is the perspective view of two-freedom mobile decoupling flexure hinge mechanism in the specific embodiment of the invention.
Fig. 2 is the perspective view of the flexible hinge matrix of two-freedom mobile decoupling flexure hinge mechanism in the specific embodiment of the invention.
Embodiment
Below in conjunction with accompanying drawing, the present invention is elaborated.
First component title in reference character is described.
1 flexible hinge matrix;
2 first piezoelectric actuators;
3 first actuator connecting heads;
4 first pull pressure sensor;
5 first flange plate;
6 first friction tops;
7 second piezoelectric actuators;
8 second actuator connecting heads;
9 second pull pressure sensor;
10 second flange plate;
11 second friction tops;
12 first fitting seats;
13 first laser displacement sensors;
14 measure pedestal;
15 second fitting seats;
16 second laser displacement sensors;
1-1 terminal rigidity output stage;
1-2 flexible hinge side chain;
1-3 flexible hinge side chain;
1-4 flexible hinge side chain;
1-5 flexible hinge side chain;
1-6 upper end rigid platfor;
1-7 flexible hinge side chain;
1-8 flexible hinge side chain;
1-9 left end rigid platfor;
1-10 flexible hinge side chain;
1-11 flexible hinge side chain;
1-12 right-hand member rigid platfor;
1-13 flexible hinge side chain;
1-14 flexible hinge side chain;
1-15 lower end rigid platfor;
1-16 flexible hinge side chain;
1-17 flexible hinge side chain;
1-18 rigid matrix.
The example embodiment that following discloses are detailed.But concrete structure disclosed herein and function detail are only the objects for describing example embodiment.
But should be appreciated that, the present invention is not limited to disclosed concrete example embodiment, but covers all modifications, equivalent and the alternative that fall within the scope of the disclosure.In the description to whole accompanying drawing, identical reference character represents identical element.
Should be appreciated that, term "and/or" as used in this comprises one or morely relevant lists any of item and all combinations simultaneously.Should be appreciated that in addition, when parts or unit are called as " connection " or " coupling " to another parts or unit, it can be directly connected or coupled to miscellaneous part or unit, or also can there is intermediate member or unit.In addition, other words being used for describing relation between parts or unit should be understood according to identical mode (such as, " between " to " directly ", " adjacent " to " direct neighbor " etc.).
As shown in Figure 1, two-freedom mobile decoupling flexure hinge mechanism of the present invention, described mechanism comprises flexible hinge matrix 1 and drives side chain, and wherein flexible hinge matrix 1 comprises multiple flexible hinge side chain and rigid connector,
Rigid connector comprises the terminal rigidity output stage 1-1 being positioned at flexible hinge matrix 1 intermediate portion and the upper end rigid platfor 1-6 laying respectively at flexible hinge matrix upper and lower, left and right part, lower end rigid platfor 1-15, left end rigid platfor 1-9 and right-hand member rigid platfor 1-12;
Described upper end rigid platfor 1-6, lower end rigid platfor 1-15, left end rigid platfor 1-9 are connected with terminal rigidity output stage 1-1 respectively by flexible hinge side chain with right-hand member rigid platfor 1-12, and upper end rigid platfor 1-6, lower end rigid platfor 1-15, left end rigid platfor 1-9 are connected with the rigid matrix 1-18 of flexible hinge matrix respectively by flexible hinge side chain with right-hand member rigid platfor 1-12.
Therefore, the motion parts of two-freedom mobile decoupling flexure hinge mechanism flexible hinge matrix of the present invention takes symmetrical parallel-connection structure form, there is compact structure, the advantage that rigidity is high, and this structural type can ensure terminal respectively to the decoupling zero between motion and power, thus contribute to the kinematic accuracy improving two-freedom mobile decoupling flexure hinge mechanism.
In the specific embodiment of the present invention, described flexible hinge side chain comprises multiple flexible hinge unit arranged that is parallel to each other.
Especially, the flexible hinge side chain of described connection terminal rigidity output stage and upper end, lower end, left end, right-hand member rigid platfor comprises three flexible hinge unit arranged that are parallel to each other; The flexible hinge side chain of the rigid matrix of described connection upper end, lower end, left end, right-hand member rigid platfor and flexible hinge matrix comprises three flexible hinge unit arranged that are parallel to each other.
On the other hand, two-freedom mobile decoupling flexure hinge mechanism of the present invention takes the texturing unit of rectangular flexible hinge-unit mechanism as a whole, rectangular flexible hinge-unit easy processing, machining accuracy is high, and can realize than other form flexible hinge unit more compact structure.
In addition, the combination of what the flexible hinge side chain affixed with flexible hinge substrate terminals rigidity output stage adopted is multiple rectangular flexible hinge-unit, with upper end, lower end, left end, what the affixed flexible hinge side chain of right-hand member rigid platfor adopted is also the combination of multiple rectangular flexible hinge-unit, this multiple hinge-unit is arranged in parallel formed side chain than taking single flexible hinge-unit and has larger flexural rigidity and larger lateral flexibility, the stroke in mechanism kinematic direction can be increased like this, increase the rigidity in non-athletic direction simultaneously, contribute to the impact improving mechanism's opposing external load disturbance, ensure high kinematic accuracy.
Specifically, as shown in Figure 2, the major component of flexible hinge matrix 1 is made up of flexible hinge side chain and rigid connector, presents about the axisymmetric structural type of XY.The intermediate portion of flexible hinge matrix 1 is terminal rigidity output stage 1-1, is connected to identical flexible hinge side chain 1-2,1-3,1-4 and 1-5 in upper and lower, the left and right part of terminal rigidity output stage 1-1.Flexible hinge side chain 1-2 is made up of three vertical parallel and identical rectangular flexible hinge unit that are that equidistantly arrange, upper end rigid platfor 1-6 is connected with in the upper end of flexible hinge side chain 1-2, the two ends, left and right of upper end rigid platfor 1-6 respectively symmetry are connected with flexible hinge side chain 1-7 and 1-8, the rectangular flexible hinge-unit that all identical by two and the horizontal parallel of flexible hinge side chain 1-7 with 1-8 is arranged formed, and their the other end is fixed on rigid matrix 1-18 respectively; Flexible hinge side chain 1-3 by three horizontal parallel and the identical rectangular flexible hinge unit equidistantly arranged formed, left end rigid platfor 1-9 is connected with at the left end of flexible hinge side chain 1-3, the two ends up and down of left end rigid platfor 1-9 respectively symmetry are connected with flexible hinge side chain 1-10 and 1-11, all identical by two and the rectangular flexible hinge-unit be vertically arranged in parallel of flexible hinge side chain 1-10 with 1-11 formed, and their the other end is fixed on rigid matrix 1-18 respectively; Flexible hinge side chain 1-4 by three horizontal parallel and the identical rectangular flexible hinge unit equidistantly arranged formed, right-hand member rigid platfor 1-12 is connected with at the right-hand member of flexible hinge side chain 1-4, the two ends up and down of right-hand member rigid platfor 1-12 respectively symmetry are connected with flexible hinge side chain 1-13 and 1-14, all identical by two and the rectangular flexible hinge-unit be vertically arranged in parallel of flexible hinge side chain 1-13 with 1-14 formed, and their the other end is fixed on rigid matrix 1-18 respectively; Flexible hinge side chain 1-5 is made up of three vertical parallel and identical rectangular flexible hinge unit that are that equidistantly arrange, lower end rigid platfor 1-15 is connected with in the lower end of flexible hinge side chain 1-5, the two ends, left and right of lower end rigid platfor 1-15 respectively symmetry are connected with flexible hinge side chain 1-16 and 1-17, the rectangular flexible hinge-unit that all identical by two and the horizontal parallel of flexible hinge side chain 1-16 with 1-17 is arranged formed, and their the other end is fixed on rigid matrix 1-18 respectively.
Those skilled in that art it should be understood that in above mode of execution, and the flexible hinge side chain connecting upper end, lower end, left end and right-hand member rigid platfor and terminal output rigid platfor comprises three flexible hinge unit arranged that are parallel to each other; And connect upper end, lower end, left end, right-hand member rigid platfor and flexible hinge matrix the flexible hinge side chain of rigid matrix comprise two flexible hinge unit arranged that are parallel to each other, this is only an example, those skilled in that art are under the enlightenment of technical solution of the present invention, the flexible hinge unit of other quantity can be used, realize close technique effect.
As shown in Figure 1, described driving side chain comprises first of mutually perpendicular direction driving and drives side chain and second to drive side chain, first driving side chain comprises the first piezoelectric actuator 2 and the first actuator connecting head 3, second drives side chain to comprise the second piezoelectric actuator 7 and the second actuator connecting head 8.
In addition, in the specific embodiment of the invention, described first driving side chain also comprises the first flange plate 5, first pull pressure sensor 4 and the first friction top 6, second drives side chain also to comprise the second flange plate 10, second pull pressure sensor 9 and the second friction top 11.
Specifically, first piezoelectric actuator 2 is fixedly connected with the left end rigid platfor 1-9 of flexible hinge matrix 1 by the first actuator connecting head 3, first pull pressure sensor 4 is fixedly connected with by the tail end of the first flange plate 5 with the first piezoelectric actuator 2, the axis of the first pull pressure sensor 4 and the axis of the first piezoelectric actuator 2 keep conllinear, the other end of the first pull pressure sensor 4 is fixedly connected with the first friction top 6, the two ends of the first friction top 6 are bolted the left end in flexible hinge matrix 1, certain gap must be left between first friction top 6 and flexible hinge matrix 1 left end, to apply certain axial pretightening load by tools for bolts ' pretension to the first piezoelectric actuator 2.
Second piezoelectric actuator 7 is fixedly connected with the lower end rigid platfor 1-15 of flexible hinge matrix 1 by the second actuator connecting head 8, second pull pressure sensor 9 is fixedly connected with by the tail end of the second flange plate 10 with the second piezoelectric actuator 7, the axis of the second pull pressure sensor 9 and the axis of the second piezoelectric actuator 7 keep conllinear, the other end of the second pull pressure sensor 9 is fixedly connected with the second friction top 11, the two ends of the second friction top 11 are bolted the downside end in flexible hinge matrix 1, certain gap must be left between second friction top 11 and flexible hinge matrix 1 downside end, to apply certain axial pretightening load by tools for bolts ' pretension to the second piezoelectric actuator 7.
In addition, in the embodiment of the invention, described two-freedom mobile decoupling flexure hinge mechanism also comprises displacement measurement system and measuring basis, described displacement measurement system comprises the first displacement measurement system and second shift measurement system of measuring the displacement on two orthogonal directions respectively, wherein
First displacement measurement system is fixed on one end of described flexible hinge matrix, comprises the first displacement transducer 13 and the first fitting seat 12, and the direction of measurement of described first displacement transducer 13 is parallel with the axial direction of described first piezoelectric actuator 2;
Second shift measurement system be fixed on described flexible hinge matrix with the one end in the first perpendicular direction of displacement measurement system mounting end, comprise second displacement sensor 16 and the second fitting seat 15, the direction of measurement of described second displacement sensor 16 is parallel with the axial direction of described second piezoelectric actuator 7;
Measuring basis 14 is fixedly attached to the terminal rigidity output stage of described flexible hinge matrix, has two end faces, and the first end face is vertical with the direction of measurement of the first displacement transducer 13, and the second end face is vertical with the direction of measurement of second displacement sensor 16.
Especially, institute's displacement sensors is laser displacement sensor.
Specifically, as shown in Figure 2, first fitting seat 12 is secured by bolts in the right part of flexible hinge matrix 1, first fitting seat 12 is installed with the first laser displacement sensor 13, the direction of measurement of the first laser displacement sensor 13 and the axial direction keeping parallelism of the first piezoelectric actuator 2, measuring basis 14 is fixedly installed on the terminal rigidity output stage 1-1 of flexible hinge matrix 1, and the right side measuring pedestal 14 keeps vertical with the direction of measurement of described first laser displacement sensor 13.Second fitting seat 15 is bolted the upper end portion being installed on flexible hinge matrix 1, second fitting seat 15 is installed with the second laser displacement sensor 16, the direction of measurement of the second laser displacement sensor 16 and the axial direction keeping parallelism of the second piezoelectric actuator 7, the upper-end surface measuring pedestal 14 keeps vertical with the direction of measurement of described second laser displacement sensor 16.
Therefore, the working principle of two-freedom mobile decoupling flexure hinge mechanism of the present invention is: described mechanism can realize the two-freedom motion in XY plane, in order to its working method is described, the central point making flexible hinge matrix 1 terminal rigidity output stage 1-1 is true origin, the axial direction of the first piezoelectric actuator 2 is X-axis, and the axial direction of the second piezoelectric actuator 7 is Y-axis.The process of moving due to mechanism X and Y-axis is identical with control principle, and the working principle of mechanism is described for X-axis motion here.
First in order to ensure the reliability of output displacement precision in the first piezoelectric actuator 2 working procedure and motion, need to apply certain axial pretightening load to the first piezoelectric actuator 2, this axial pretightening load is realized by the tools for bolts ' pretension at the first friction top 6 two ends, according to the prefastening load size of required applying, simultaneously by thrust load size that observation first pull pressure sensor 4 records, tighten or unclamp the bolt at the first pretension lid 6 two ends, the axial pretightening magnitude of load of continuous adjustment first piezoelectric actuator 2, until reach required prefastening load value.
After the design completing mechanism, by can obtain the displacement relation between the left end rigid platfor 1-9 of mechanism flexibility hinge base body 1 and terminal rigidity output stage 1-1 to the finite element analysis of mechanism, thus the X axis displacement that can realize needed for mechanism terminal rigidity output stage 1-1, the X obtaining providing needed for left end rigid platfor 1-9 is to input displacement, and this displacement amount is needed for the first piezoelectric actuator 2 and realizes displacement output value.
Next, according to this displacement output value, under the first piezoelectric actuator 2 passes through its driver control and internal displacement sensor closed-loop measuring, the displacement amount needed for accurately exporting.After the first piezoelectric actuator 2 extends, promote flexible hinge matrix 1 left end rigid platfor 1-9 to move along the X direction, because flexible hinge side chain 1-10 and 1-11 is very large to flexibility at X, therefore can along with left end rigid platfor 1-9 generation resiliently deformable along the X direction, and flexible hinge side chain 1-3 X to rigidity very large, therefore deform hardly, therefore the motion of left end rigid platfor 1-3 can be close to and be fully transmitted to terminal rigidity output stage 1-1, very large in the flexibility of X-direction with flexible hinge side chain 1-2 and 1-5 of terminal rigidity output stage 1-1 Joint, therefore can along with the resiliently deformable of terminal rigidity output stage 1-1 generation X-direction, very large to rigidity with the X of the flexible hinge side chain 1-4 of terminal rigidity output stage 1-1 Joint, therefore deform hardly, the motion of terminal rigidity output stage 1-1 is almost fully transmitted to right-hand member rigid platfor 1-12 by flexible hinge side chain 1-4, with affixed flexible hinge side chain 1-13 and 1-14 of right-hand member rigid platfor 1-12 X to flexibility very large, therefore can along with right-hand member rigid platfor 1-12 generation resiliently deformable along the X direction.Flexible hinge side chain 1-5 along X after resiliently deformable, can produce on the rigid platfor 1-15 of lower end X to load, but due to flexible hinge side chain 1-5 X to rigidity very little, flexible hinge side chain 1-16 and 1-17 X to rigidity very large, therefore lower end rigid platfor 1-15 occur hardly along X to distortion, therefore mechanism X to motion, affect very little on the second piezoelectric ceramic actuator 7, also namely can realize the mobile decoupling performance of mechanism's excellence.
When flexible hinge matrix 1 terminal rigidity output stage 1-1 X occurs after displacement, the measuring basis 14 on it can be driven to move together, now just can accurately measure terminal rigidity output stage 1-1 along X to moving displacement amount by the first laser displacement sensor 13, the displacement amount of this displacement amount and expection is contrasted, and using input displacement correction amount that the difference of displacement amount is used for the first piezoelectric actuator 2 driver as feedback quantity, thus realize the full closed loop control of integrated model motion, the moving displacement amount needed for mechanism's realization can be ensured.
It should be noted that; above-mentioned mode of execution is only the present invention's preferably embodiment; can not limiting the scope of the invention be understood as, not depart under concept thereof of the present invention, all protection scope of the present invention is belonged to modification to any minor variations that the present invention does.
Claims (9)
1. a two-freedom mobile decoupling flexure hinge mechanism, described mechanism comprises flexible hinge matrix and drives side chain, and wherein flexible hinge matrix comprises flexible hinge side chain and rigid connector,
Rigid connector comprises the terminal rigidity output stage being positioned at flexible hinge matrix intermediate portion and the upper end laying respectively at flexible hinge matrix upper and lower, left and right part, lower end, left end, right-hand member rigid platfor;
Described upper end, lower end, left end, right-hand member rigid platfor are connected with terminal rigidity output stage respectively by flexible hinge side chain, and upper end, lower end, left end, right-hand member rigid platfor are connected respectively by the rigid matrix of flexible hinge side chain with flexible hinge matrix.
2. according to the two-freedom mobile decoupling flexure hinge mechanism described in claim 1, it is characterized in that, described flexible hinge side chain comprises multiple flexible hinge unit arranged that is parallel to each other.
3. according to the two-freedom mobile decoupling flexure hinge mechanism described in claim 2, it is characterized in that, the flexible hinge side chain of described connection terminal rigidity output stage and upper end, lower end, left end, right-hand member rigid platfor comprises 3 flexible hinge unit arranged that are parallel to each other; The flexible hinge side chain of the rigid matrix of described connection upper end, lower end, left end, right-hand member rigid platfor and flexible hinge matrix comprises 2 flexible hinge unit arranged that are parallel to each other.
4. according to the two-freedom mobile decoupling flexure hinge mechanism described in claim 2, it is characterized in that, described flexible hinge unit is rectangular flexible hinge-unit.
5. according to the two-freedom mobile decoupling flexure hinge mechanism described in claim 1, it is characterized in that, described driving side chain comprises first of mutually perpendicular direction driving and drives side chain and second to drive side chain, first drives side chain to comprise the first piezoelectric actuator and the first actuator connecting head, second drives side chain to comprise the second piezoelectric actuator and the second actuator connecting head, wherein
First piezoelectric actuator of the first driving side chain is connected to one in upper end, lower end, left end, right-hand member rigid platfor by the first actuator connecting head;
Second drives the second piezoelectric actuator of side chain to be connected to another rigid platfor of the rigid platfor phase orthogonal direction be connected with the first actuator connecting head by the second actuator connecting head.
6. according to the two-freedom mobile decoupling flexure hinge mechanism described in claim 5, it is characterized in that, described first drives side chain also to comprise the first flange plate, the first pull pressure sensor and the first friction top, second drives side chain also to comprise the second flange plate, the second pull pressure sensor and the second friction top, wherein
First pull pressure sensor is coaxial with the first piezoelectric actuator, the tail end of the first piezoelectric actuator is connected to by the first flange plate, the other end of the first pull pressure sensor is fixedly connected with the first friction top, the first friction top one end being bolted to flexible hinge matrix;
Second pull pressure sensor is coaxial with the second piezoelectric actuator, the tail end of the second piezoelectric actuator is connected to by the second flange plate, the other end of the second pull pressure sensor is fixedly connected with the second friction top, the second friction top the other end being bolted to flexible hinge matrix.
7. according to the two-freedom mobile decoupling flexure hinge mechanism described in claim 6, it is characterized in that, there is gap, for applying axial pretightening load by described bolt to the first piezoelectric actuator or the second piezoelectric actuator between the first friction top or the second friction top and the end of flexible hinge matrix that is attached thereto.
8. according to the two-freedom mobile decoupling flexure hinge mechanism described in claim 5, it is characterized in that, described two-freedom mobile decoupling flexure hinge mechanism also comprises displacement measurement system and measuring basis, described displacement measurement system comprises the first displacement measurement system and second shift measurement system of measuring the displacement on two orthogonal directions respectively, wherein
First displacement measurement system is fixed on one end of described flexible hinge matrix, comprises the first displacement transducer and the first fitting seat, and the direction of measurement of described first displacement transducer is parallel with the axial direction of described first piezoelectric actuator;
Second shift measurement system be fixed on described flexible hinge matrix with the one end in the first perpendicular direction of displacement measurement system mounting end, comprise second displacement sensor and the second fitting seat, the direction of measurement of described second displacement sensor is parallel with the axial direction of described second piezoelectric actuator;
Measuring basis is fixedly attached to the terminal rigidity output stage of described flexible hinge matrix, and have two end faces, the first end face is vertical with the direction of measurement of the first displacement transducer, and the second end face is vertical with the direction of measurement of second displacement sensor.
9. according to Claim 8 described in two-freedom mobile decoupling flexure hinge mechanism, it is characterized in that, institute's displacement sensors is laser displacement sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510223680.8A CN104895913B (en) | 2015-05-04 | 2015-05-04 | Two-freedom mobile decoupling flexure hinge mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510223680.8A CN104895913B (en) | 2015-05-04 | 2015-05-04 | Two-freedom mobile decoupling flexure hinge mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104895913A true CN104895913A (en) | 2015-09-09 |
| CN104895913B CN104895913B (en) | 2017-11-14 |
Family
ID=54028790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510223680.8A Expired - Fee Related CN104895913B (en) | 2015-05-04 | 2015-05-04 | Two-freedom mobile decoupling flexure hinge mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104895913B (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105606847A (en) * | 2016-03-01 | 2016-05-25 | 清华大学 | Vibration station for transverse sensitivity calibration of piezoelectric acceleration sensor |
| CN105626677A (en) * | 2016-01-26 | 2016-06-01 | 江南大学 | Anti-tensile inner Lamina emergent torsion (LET) flexible hinge |
| CN106017915A (en) * | 2016-05-11 | 2016-10-12 | 清华大学 | Ball screw assembly precision retaining testing apparatus with characteristics of precise pre tightening and loading |
| CN106092563A (en) * | 2016-05-31 | 2016-11-09 | 清华大学 | Plane two degrees of freedom high frequency charger and test platform for ball screw assembly, |
| CN106763141A (en) * | 2017-03-01 | 2017-05-31 | 华侨大学 | Two-freedom flexible hinge with auto-lock function |
| CN106958590A (en) * | 2016-08-08 | 2017-07-18 | 哈尔滨工业大学 | The high-precision linear movement reference device of gas/solid combined type of multiple degrees of freedom decoupling driving |
| CN108278971A (en) * | 2018-02-06 | 2018-07-13 | 杨锦堂 | A kind of ultraprecise detection platform |
| CN110336485A (en) * | 2019-07-10 | 2019-10-15 | 合肥工业大学 | A kind of piezoelectric impact driving across scale precisely locating platform of two-dimensional parallel |
| CN110364221A (en) * | 2018-11-27 | 2019-10-22 | 广东工业大学 | A kind of two-freedom nanometer displacement locating platform in parallel based on flexible hinge |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030193266A1 (en) * | 2002-02-06 | 2003-10-16 | Jeff Moler | Apparatus for moving a pair of opposing surfaces in response to an electrical activation |
| CN103226287A (en) * | 2013-04-25 | 2013-07-31 | 河北工业大学 | Two-in-parallel parallel decoupling flexible microposition mechanism |
| CN103343867A (en) * | 2013-06-17 | 2013-10-09 | 北京航空航天大学 | Layered parallel connection two-degree-of-freedom precise positioning platform based on flexible beams |
| CN103486413A (en) * | 2013-10-11 | 2014-01-01 | 天津理工大学 | Three-freedom-degree decoupling large-stroke micro-positioning platform |
| CN103990998A (en) * | 2014-05-20 | 2014-08-20 | 广东工业大学 | Stiffness frequency adjustable two-dimensional micro-motion platform based on stress stiffening principle |
-
2015
- 2015-05-04 CN CN201510223680.8A patent/CN104895913B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030193266A1 (en) * | 2002-02-06 | 2003-10-16 | Jeff Moler | Apparatus for moving a pair of opposing surfaces in response to an electrical activation |
| CN103226287A (en) * | 2013-04-25 | 2013-07-31 | 河北工业大学 | Two-in-parallel parallel decoupling flexible microposition mechanism |
| CN103343867A (en) * | 2013-06-17 | 2013-10-09 | 北京航空航天大学 | Layered parallel connection two-degree-of-freedom precise positioning platform based on flexible beams |
| CN103486413A (en) * | 2013-10-11 | 2014-01-01 | 天津理工大学 | Three-freedom-degree decoupling large-stroke micro-positioning platform |
| CN103990998A (en) * | 2014-05-20 | 2014-08-20 | 广东工业大学 | Stiffness frequency adjustable two-dimensional micro-motion platform based on stress stiffening principle |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105626677A (en) * | 2016-01-26 | 2016-06-01 | 江南大学 | Anti-tensile inner Lamina emergent torsion (LET) flexible hinge |
| CN105606847A (en) * | 2016-03-01 | 2016-05-25 | 清华大学 | Vibration station for transverse sensitivity calibration of piezoelectric acceleration sensor |
| CN105606847B (en) * | 2016-03-01 | 2019-03-05 | 清华大学 | A kind of shake table towards the calibration of piezoelectric acceleration transducer cross sensitivity |
| CN106017915A (en) * | 2016-05-11 | 2016-10-12 | 清华大学 | Ball screw assembly precision retaining testing apparatus with characteristics of precise pre tightening and loading |
| CN106092563A (en) * | 2016-05-31 | 2016-11-09 | 清华大学 | Plane two degrees of freedom high frequency charger and test platform for ball screw assembly, |
| CN106958590A (en) * | 2016-08-08 | 2017-07-18 | 哈尔滨工业大学 | The high-precision linear movement reference device of gas/solid combined type of multiple degrees of freedom decoupling driving |
| CN106958590B (en) * | 2016-08-08 | 2019-02-05 | 哈尔滨工业大学 | The gas/solid combined type high-precision linear movement reference device of multiple degrees of freedom decoupling driving |
| CN106763141B (en) * | 2017-03-01 | 2023-03-10 | 华侨大学 | Two-degree-of-freedom flexible hinge with self-locking function |
| CN106763141A (en) * | 2017-03-01 | 2017-05-31 | 华侨大学 | Two-freedom flexible hinge with auto-lock function |
| CN108278971A (en) * | 2018-02-06 | 2018-07-13 | 杨锦堂 | A kind of ultraprecise detection platform |
| CN108278971B (en) * | 2018-02-06 | 2024-04-19 | 杨锦堂 | Ultra-precise detection platform |
| CN110364221A (en) * | 2018-11-27 | 2019-10-22 | 广东工业大学 | A kind of two-freedom nanometer displacement locating platform in parallel based on flexible hinge |
| CN110336485B (en) * | 2019-07-10 | 2020-12-11 | 合肥工业大学 | Piezoelectric impact driven two-dimensional parallel cross-scale precision positioning platform |
| CN110336485A (en) * | 2019-07-10 | 2019-10-15 | 合肥工业大学 | A kind of piezoelectric impact driving across scale precisely locating platform of two-dimensional parallel |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104895913B (en) | 2017-11-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104895913A (en) | Two-freedom degree motion-decoupling flexible hinge mechanism | |
| CN101862966B (en) | Two freedom-degree translational parallel decoupling micromotion platform | |
| Qin et al. | Design issues in a decoupled XY stage: Static and dynamics modeling, hysteresis compensation, and tracking control | |
| CN102446563A (en) | Three-degree-of-freedom microoperation orthogonal parallel operating platform used for ultraprecise location | |
| CN202428438U (en) | Six-freedom-degree parallel connection micro robot | |
| CN109676403B (en) | Large-stroke high-speed high-precision macro-micro composite motion platform | |
| CN109176420B (en) | Middle-mounted movable joint type flexible decoupling precision positioning structure | |
| CN107833594A (en) | A kind of two-dimentional Three Degree Of Freedom micromotion platform structure for being used for high accuracy positioning and measurement | |
| CN105006254A (en) | Large-stroke quick-response X-Y micro-motion workbench with double displacement magnification | |
| Xu et al. | Design, fabrication, and visual servo control of an XY parallel micromanipulator with piezo-actuation | |
| CN106881618A (en) | A kind of fast tool servo device of two-axle interlocking | |
| CN102623070A (en) | Precise two-degree of freedom micro-displacement positioning device | |
| CN103216711A (en) | Flexible micro-positioning platform | |
| CN109687757B (en) | Six-freedom-degree large-stroke non-coupling large-hollow series-parallel piezoelectric micro-motion platform | |
| CN102969031B (en) | Z-thetax-thetay three-degree-of-freedom nanoscale precision split worktable | |
| CN103486413A (en) | Three-freedom-degree decoupling large-stroke micro-positioning platform | |
| CN105643592B (en) | A kind of symmetrical decoupling single-freedom and flexible operating mechanism | |
| CN105904443A (en) | Two-degree-of-freedom flexible parallel mechanism for motion decoupling | |
| CN204966059U (en) | Little positioning table of three degrees of freedom | |
| CN108964512A (en) | A kind of across scale motion platform of inertia stick-slip formula | |
| Lv et al. | A parallel 3-DOF micro-nano motion stage for vibration-assisted milling | |
| CN102069201A (en) | Two-degree-of-freedom dynamic error counteracting device for free-form surface ultra-precision turning | |
| CN105006255A (en) | Three-degree-of-freedom micro-positioning workbench | |
| CN109622349B (en) | Two-dimensional ultrasonic vibration platform for micro-nano machining | |
| CN102708930B (en) | Three-dimensional decoupled micro-displacement stage with floating driver |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171114 |