CN110336485B - Piezoelectric impact driven two-dimensional parallel cross-scale precision positioning platform - Google Patents
Piezoelectric impact driven two-dimensional parallel cross-scale precision positioning platform Download PDFInfo
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- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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Abstract
The invention discloses a piezoelectric impact driven two-dimensional parallel cross-scale precision positioning platform, which comprises a rotor, a flexible support, a base and a piezoelectric driver, wherein the two-dimensional micro-motion platform is fixed above a base, a magnet is fixed in the center of the base and penetrates through a through hole of the rotor, small balls at the four corners of the rotor are in friction coupling with a wear-resistant layer at the lowest layer of a flat plate, a ferromagnetic layer at the lower layer of the flat plate is attracted by the magnet to form pre-pressure between the ferromagnetic layer and the rotor, and the flat plate two-dimensional parallel cross-scale precision motion is realized under the action of sawtooth wave voltage of the. The piezoelectric precise positioning platform has the advantages of compact structure, convenient control, high displacement resolution, high response speed and large movement stroke, and can further improve the application effect of the piezoelectric precise positioning platform in STM, AFM and other microscopic systems.
Description
Technical Field
The invention belongs to the technical field of piezoelectric precision driving micro-displacement platform equipment, and particularly relates to a piezoelectric impact driving two-dimensional parallel cross-scale precision positioning platform.
Background
The rapid development of micro-nano technology relates to more and more occasions for performing precision positioning operation on a micro object, such as electrical characteristic test of a transistor in semiconductor manufacturing, mechanical property characterization of a nano structure in material science, carrying and assembling of elements in a micro electro mechanical system, capturing and injecting of cells in biomedical engineering and the like, and the occasions often require a precision positioning platform to be installed in a narrow space to realize multi-degree-of-freedom cooperative motion of displacement resolution more than submicron and cross-scale travel more than millimeter. At present, the most applied is a micro-motion platform based on a piezoelectric driver and a flexible hinge, and the two-dimensional parallel micro-motion platforms proposed by patent numbers CN101887761B and CN102962683B have the advantages of compact structure, high displacement resolution and the like, but the problem is that even if a displacement amplification mechanism is adopted, the motion range of the platform still cannot reach the millimeter level. The simplest measure for further improving the motion range is to adopt an impact driving principle, and the patent numbers CN108696179A and CN107104608A adopt a piezoelectric driver and a stator of a flexible hinge to impact and drive a sliding block to realize the cross-scale precision motion. Therefore, a compact structure is designed by combining a micro-motion platform and an impact driving principle to realize multi-degree-of-freedom trans-scale precision motion, and the application effect of the piezoelectric precision positioning platform in STM, AFM and other microscopic systems is improved.
Disclosure of Invention
The invention aims to solve the problems and provides a piezoelectric impact driven two-dimensional parallel-connection trans-scale precision positioning platform, which combines the micro-motion platform and the impact driving principle and improves the friction force coupling and pre-pressure applying mode so as to realize two-dimensional parallel-connection trans-scale precision motion.
The purpose of the invention can be realized by the following technical scheme:
a piezoelectric impact driven two-dimensional parallel cross-scale precision positioning platform comprises a micro-motion platform, a base, a flat plate and a magnet, wherein the micro-motion platform consists of a rotor, a flexible support, a base and a piezoelectric driver;
the rotor is arranged at the central position of the micro-motion platform and is connected with the base through four groups of flexible supports, and the piezoelectric driver is arranged between the flexible supports and the base and pushes the rotor to displace in XY directions;
the micro-motion platform is fixed above the base through the base, a through hole is formed in the center of the rotor, and the magnet is fixed in the center of the base and penetrates through the through hole of the rotor;
four small balls are symmetrically arranged at four corners of the rotor;
the flat plate at least comprises two layers, the lowest layer is a wear-resistant layer and is in friction coupling with the small ball of the rotor, and the lower layer is a ferromagnetic layer and is attracted by the magnet to form pre-pressure between the flat plate and the rotor.
Further, the number of the piezoelectric drivers is at least two.
Furthermore, the whole micro-motion platform is square, and each group of flexible supports comprises hinge structures which are vertical to each other;
the piezoelectric actuator is a piezoelectric ceramic stack, and a contact position of the piezoelectric actuator and the base is provided with a set screw for adjusting the pretightening force of the piezoelectric actuator;
the whole rotor is square, a through hole in the center of the rotor is circular, and counter bores are symmetrically arranged at four corners of the rotor and are respectively fixed with small balls through epoxy glue.
Furthermore, the base is wholly square, bosses are arranged at four corners of the upper surface, counter bores are arranged at the center of the upper surface, the base of the micro-motion platform is fixedly installed on the bosses of the base through screws, the magnet is cylindrical, and the bottom of the micro-motion platform is fixedly connected in the counter bores at the center of the base through epoxy glue.
The invention has the beneficial effects that:
(1) four small balls symmetrically distributed on the rotor and the wear-resistant layer of the flat plate form frictional coupling in the X direction and the Y direction, point-surface frictional contact improves the contact stability between the rotor and the flat plate, the symmetrical layout improves the consistency of the frictional force of the four small balls, and the irregular rotation of the flat plate caused by unbalanced moment is eliminated;
(2) the pre-pressure between the flat plate and the rotor is formed by adopting magnetic attraction, the magnet is fixed in the center of the base, the ferromagnetic layer moves along with the flat plate, the stability of the magnetic attraction in the working process is improved, the magnet penetrates through the through hole of the rotor, the distance between the magnet and the ferromagnetic layer is reduced, the pre-pressure between the flat plate and the rotor is improved, and the through hole of the rotor reduces the mass of the rotor, so that the inherent frequency of the micro-motion platform is improved.
Drawings
The invention is described in further detail below with reference to the figures and specific embodiments.
Fig. 1 is an exploded view of the present invention.
Fig. 2 is a side view of the present invention.
Fig. 3 is a top view of the present invention.
FIG. 4 is a schematic diagram showing the displacement of the micro-motion stage in the X direction according to the present invention.
FIG. 5 is a schematic view of the vibration mode of the micro-motion platform of the present invention.
FIG. 6 shows the test results of the step motion of the two-dimensional parallel cross-scale precision positioning platform according to the present invention.
FIG. 7 shows the result of the two-dimensional parallel cross-scale precision positioning platform of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1-3, a piezoelectric impact driven two-dimensional parallel cross-scale precision positioning platform comprises a micro-motion platform 1, a base 2, a flat plate 3 and a magnet 4, wherein the micro-motion platform 1 is composed of a mover 5, a flexible support 6, a base 7 and a piezoelectric driver 8;
the rotor 5 is arranged at the central position of the micro-motion platform 1 and is connected with the base 7 through four groups of flexible supports 6, and the piezoelectric driver 8 is arranged between the adjacent flexible supports 6 and the base 7 and pushes the rotor 5 to realize XY-direction displacement;
the micro-motion platform 1 is fixed above the base 2 through a base 7, a through hole is formed in the center of the rotor 5, and the magnet 4 is fixed in the center of the base 2 and penetrates through the through hole of the rotor 5;
four small balls 9 are symmetrically arranged at four corners of the rotor 5;
the flat plate 3 at least comprises two layers, the lowest layer is a wear-resistant layer 11 and is in frictional coupling with the small balls 9 of the rotor 5, and the next lower layer is a ferromagnetic layer 12 and is attracted by a magnet to form pre-pressure between the flat plate 3 and the rotor 5;
the number of the piezoelectric drivers 8 is at least two, the piezoelectric drivers are arranged in the orthogonal direction, and the piezoelectric drivers respectively push the rotor 5 to perform XY-direction displacement;
the whole micro-motion platform 1 is square, and each group of flexible supports 6 comprises hinge structures which are perpendicular to each other;
the piezoelectric driver 8 is a piezoelectric ceramic stack, and a fastening screw 10 is arranged at the contact position of the piezoelectric driver 8 and the base 7 and used for adjusting the pre-tightening force of the piezoelectric driver 8;
the whole mover 5 is square, a through hole in the center is circular, and counter bores are symmetrically arranged at four corners of the mover 5 and are respectively fixed with small balls 9 through epoxy glue;
the whole base 2 is square, four corners of the upper surface are provided with bosses 13, the center of the upper surface is provided with a counter bore 14, the base 7 of the micro-motion platform 1 is fixedly mounted on the bosses 13 of the base 2 through screws, the magnet 4 is cylindrical, and the bottom of the magnet is fixedly connected in the counter bore 14 at the center of the base 2 through epoxy glue.
One specific implementation of this embodiment includes the following steps:
taking the motion in the X direction as an example, one end of a piezoelectric driver 8 of the micro-motion platform 1 in the X direction is fixed on a base 7, and the other end of the piezoelectric driver applies thrust to a flexible support 6 in the X direction under the action of voltage, so that a mover 5 is pushed to realize displacement in the X direction; the magnet 4 is fixed in the center of the base 2 and arranged below the flat plate 3 through the through hole of the mover 5, the flat plate 3 is attached to the four small balls 9 of the mover 5 due to the attraction of the ferromagnetic layer 12 by the magnet 4 and forms pre-pressure between the flat plate 3 and the mover 5; the piezoelectric driver 8 in the X direction drives the rotor 5 to generate sawtooth wave displacement in the X direction under the action of sawtooth wave voltage, the wear-resistant layer 11 of the flat plate 3 and the small balls 9 of the rotor 5 generate frictional coupling due to pre-pressure, stick-slip stepping motion of the flat plate 3 in the X direction is formed under the action of low-frequency sawtooth waves, and slip smooth motion of the flat plate 3 in the X direction is formed under the action of high-frequency sawtooth waves;
the piezoelectric drivers 8 in the XY directions respectively and independently generate displacements of the rotor 5 in the XY directions, the wear-resistant layer 11 of the flat plate 3 and the small balls 9 of the rotor 5 can respectively generate frictional coupling in the XY directions, and the flat plate 3 forms stick-slip or slip-slip motion in the XY directions under the impact driving action, so that the two-dimensional parallel cross-scale motion of the precision positioning platform is realized;
as shown in fig. 4 and 5, under typical material dimensions, the piezoelectric driver 8 of the micro-motion platform 1 can push the mover 5 to generate a single-degree-of-freedom displacement of 5 μm, and the natural vibration frequency of the micro-motion platform 1 is as high as 11530Hz, which means that the precision positioning platform has a high displacement output capability and a wide working frequency range;
as shown in FIGS. 6 and 7, the prototype test results show that the plate 3 can form stick-slip step motion under the action of the sawtooth wave below 100Hz, the step displacement of the plate 3 in the XY direction under the action of the sawtooth wave below 50Hz is about 3 μm, the plate 3 can form slip continuous motion under the action of the sawtooth wave above 100Hz, and the motion speed of the plate 3 in the XY direction under the action of the sawtooth wave above 500Hz is about 1.8m/s, which indicates that the precision positioning platform can realize both high-resolution step motion and rapid-response continuous motion.
In the description herein, references to the description of "one embodiment," "an example," "a specific example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing is merely exemplary and illustrative of the present invention and various modifications, additions and substitutions may be made by those skilled in the art to the specific embodiments described without departing from the scope of the invention as defined in the following claims.
Claims (2)
1. The utility model provides a parallelly connected accurate positioning platform of scale of striding of piezoelectricity impact drive two dimension which characterized in that: the micro-motion platform comprises a rotor, a flexible support, a base and a piezoelectric driver;
the rotor is arranged at the central position of the micro-motion platform and connected with the base through four groups of flexible supports, the piezoelectric drivers are arranged between the flexible supports and the base, the number of the piezoelectric drivers is at least two, the piezoelectric drivers are arranged in the orthogonal direction, and the piezoelectric drivers are respectively used for pushing the rotor to perform XY-direction displacement;
the base is integrally square, bosses are arranged at four corners of the upper surface, a counter bore is arranged at the center of the upper surface, the base of the micro-motion platform is fixedly arranged on the bosses of the base through screws, the magnet is cylindrical, and the bottom of the magnet is fixedly connected in the counter bore at the center of the base through epoxy glue;
the micro-motion platform is fixed above the base through the base, a through hole is formed in the center of the rotor, and the magnet is fixed in the center of the base and penetrates through the through hole of the rotor;
four small balls are symmetrically arranged at four corners of the rotor;
the flat plate at least comprises two layers, the lowest layer is a wear-resistant layer and is in friction coupling with the small ball of the rotor, and the lower layer is a ferromagnetic layer and is attracted by the magnet to form pre-pressure between the flat plate and the rotor.
2. The piezoelectric impact driven two-dimensional parallel-connection trans-scale precision positioning platform according to claim 1, characterized in that: the whole micro-motion platform is square, and each group of flexible supports comprises hinge structures which are vertical to each other;
the piezoelectric actuator is a piezoelectric ceramic stack, and a contact position of the piezoelectric actuator and the base is provided with a set screw for adjusting the pretightening force of the piezoelectric actuator;
the whole rotor is square, a through hole in the center of the rotor is circular, and counter bores are symmetrically arranged at four corners of the rotor and are respectively fixed with small balls through epoxy glue.
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| CN112838786B (en) * | 2019-11-22 | 2024-06-18 | 北京大学 | Linear motor with precise driving and positioning functions |
| CN111451791B (en) * | 2020-03-24 | 2021-09-24 | 天津大学 | Two-degree-of-freedom swing platform based on stick-slip principle |
| CN112067850B (en) * | 2020-08-27 | 2022-05-24 | 华中科技大学 | Two-dimensional nanometer positioning platform |
| CN112994512B (en) * | 2021-02-03 | 2022-03-22 | 哈尔滨工业大学 | Two-degree-of-freedom motion platform based on bending composite piezoelectric actuator |
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| CN107517022A (en) * | 2017-08-04 | 2017-12-26 | 上海交通大学 | A kind of ultrasound electric machine with two degrees of freedom based on three PZT (piezoelectric transducer) combined-stators |
| CN108962336A (en) * | 2018-05-22 | 2018-12-07 | 郑州轻工业学院 | A kind of two-dimensional parallel flexible micro platform based on Piezoelectric Driving |
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- 2019-07-10 CN CN201910620375.0A patent/CN110336485B/en active Active
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| US4752711A (en) * | 1985-03-29 | 1988-06-21 | Canon Kabushiki Kaisha | Vibration wave motor |
| WO2015055153A1 (en) * | 2013-10-18 | 2015-04-23 | 上海交通大学 | Piezo ceramic planar motor and driving method thereof |
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