CN104895913B - Two-freedom mobile decoupling flexure hinge mechanism - Google Patents
Two-freedom mobile decoupling flexure hinge mechanism Download PDFInfo
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- CN104895913B CN104895913B CN201510223680.8A CN201510223680A CN104895913B CN 104895913 B CN104895913 B CN 104895913B CN 201510223680 A CN201510223680 A CN 201510223680A CN 104895913 B CN104895913 B CN 104895913B
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Abstract
A kind of two-freedom mobile decoupling flexure hinge mechanism, the mechanism includes flexible hinge matrix and driving side chain, wherein flexible hinge matrix includes flexible hinge side chain and rigid connector, and rigid connector is included positioned at the terminal rigidity output stage of flexible hinge matrix center section and respectively positioned at the upper end of flexible hinge matrix upper and lower, left and right part, lower end, left end, right-hand member rigid platfor；The upper end, lower end, left end, right-hand member rigid platfor are connected by flexible hinge side chain with terminal rigidity output stage respectively, and upper end, lower end, left end, right-hand member rigid platfor are connected by flexible hinge side chain with the rigid matrix of flexible hinge matrix respectively.Terminal can be realized respectively to the decoupling between motion and power by the two-freedom mobile decoupling flexure hinge mechanism of the present invention, so as to be favorably improved the kinematic accuracy of two-freedom mobile decoupling flexure hinge mechanism.
Description
Technical field
The present invention relates to machine design and manufacture technical field, more particularly to the designing technique of high-precision transmission mechanism.
Background technology
The features such as micromotion mechanism has kinematic accuracy, high resolution, compact-sized, and range of movement is small, is widely used in
Micro-nano field operation, such as AFM, photo etched mask platform, smart steel stone turning, precision movement platform.It is a kind of frequent
Using to micromotion mechanism be flexible hinge, flexible hinge make use of elastomeric material micro-strain and its from the characteristic replied, and disappear
Except the idle running in transmission process and mechanical friction, high displacement resolution can be obtained.In view of flexible hinge there is motion nothing to rub
Wipe, abrasion, without lubrication, and with compact-sized, light and handy, manufacture the advantages that easy to assembly, therefore be widely used in micro-
In the design of motivation structure, referred to as flexure hinge mechanism.
Flexure hinge mechanism can be divided into series and parallel, tandem flexible hinge machine according to its structure composition feature
Structure is sequentially connected in series by flexible hinge and stiff connecting section and formed, and parallel flexure hinge mechanism is then by multiple series connection side chains and end
Hold platform is in parallel to form, two or more closed loop configurations at least be present.It is in parallel compared to tandem flexure hinge mechanism
Formula flexure hinge mechanism has higher rigidity, intrinsic frequency.What is more important, tandem flexure hinge mechanism are being moved through
Cheng Zhong, in addition to the free degree of the direction of motion, because the deformation of hinge can also produce the coupling error in other non-athletic directions, from
And the output campaign precision of mechanism is influenceed, further, since flexure hinge mechanism is driven using piezoelectric actuator mostly,
The actuator can only bear axial load, it is impossible to and transverse load moment of flexure is born, otherwise actuator can be caused damage, therefore due to
Respectively to motion and the coupling of load, non axial load can be produced in piezoelectric actuator terminal, cause the destruction of actuator.And
The design that connection formula flexure hinge mechanism passes through structure, it is possible to achieve respectively to motion almost decoupling, this gives the motion control band of mechanism
Great convenience is carried out, and more high-precision motion can be realized, therefore existing flexure hinge mechanism is all using parallel connection
Form is realized.In parallel flexure hinge mechanism, there are two kinds of forms of space peace face parallel flexible hinge mechanism, due to control
Flexure hinge mechanism needs to use two dimension, three-dimension flexible hinge, processing difficulties, and precision is difficult to ensure that, therefore at present using more
Be planar flexible linkage.
The mobile decoupling for realizing flexible hinge micromotion mechanism is the emphasis and difficult point of such mechanism design, takes means at present
It is addition decoupling-structure, but existing decoupling-structure form is complex, which increase the difficulty of mechanism process and assemble, to mechanism
Kinematic accuracy bring certain influence, and the quality of mechanism kinematic part can be increased, reduce its dynamic operation performance.Knot
The decoupling performance of the relatively simple decoupling-structure of structure is difficult to reach requirement again, therefore how design structure is simple, compact, decoupling
Flexure hinge mechanism excellent Ji, which is one, to be had challenge and is badly in need of solving for task.
The content of the invention
In consideration of it, the shortcomings that it is an object of the invention to overcome prior art, there is provided one kind has high-precision plane
Two-freedom mobile decoupling flexible hinge micromotion mechanism, the mechanism is compact with decoupling, respectively high to mobile decoupling, kinematic accuracy
Feature.
In order to realize this purpose, the technical scheme that the present invention takes is as follows.
A kind of two-freedom mobile decoupling flexure hinge mechanism, the mechanism include flexible hinge matrix and driving side chain,
Wherein flexible hinge matrix includes flexible hinge side chain and rigid connector,
Rigid connector is included positioned at the terminal rigidity output stage of flexible hinge matrix center section and respectively positioned at soft
The upper end of property hinge base body upper and lower, left and right part, lower end, left end, right-hand member rigid platfor；
The upper end, lower end, left end, right-hand member rigid platfor pass through flexible hinge side chain and terminal rigidity output stage respectively
Connection, and upper end, lower end, left end, right-hand member rigid platfor pass through flexible hinge side chain and the rigid base of flexible hinge matrix respectively
Body connects.
Especially, the flexible hinge side chain includes multiple flexible hinge units being arranged parallel to.
The connection terminal rigidity output stage and upper end, lower end, left end, the flexible hinge side chain bag of right-hand member rigid platfor
Include 3 flexible hinge being arranged parallel to units：Connection upper end, lower end, left end, right-hand member rigid platfor and the flexible hinge
The flexible hinge side chain of the rigid matrix of matrix includes 2 flexible hinge units being arranged parallel to.
Wherein, the flexible hinge unit is rectangular flexible hinge-unit.
The driving side chain includes the first driving side chain and the second driving side chain of mutually perpendicular direction driving, the first driving
Side chain bag seals the first piezoelectric actuator and the first actuator connector, and the second driving side chain includes the second piezoelectric ceramic actuator
Device and the second actuator connector, wherein,
First driving side chain the first piezoelectric actuator by the first actuator connector be connected to upper end, lower end,
One in left end, right-hand member rigid platfor；
Second piezoelectric actuator of the second driving side chain is connected to and the first actuating by the second actuator connector
Another rigid platfor of the rigid platfor phase orthogonal direction of device connector connection.
Especially, the first driving side chain also includes first flange disk, the first pull pressure sensor and the first friction top,
Second driving side chain also includes second flange disk, the second pull pressure sensor and the second friction top, wherein,
First pull pressure sensor and the first piezoelectric actuator are coaxial, and the first piezoelectricity is connected to by first flange disk
The tail end of ceramic actuator, the other end of the first pull pressure sensor are fixedly connected with the first friction top, the first friction top spiral shell
Tether the one end for being connected to flexible hinge matrix；
Second pull pressure sensor and the second piezoelectric actuator are coaxial, and the second piezoelectricity is connected to by second flange disk
The tail end of ceramic actuator, the other end of the second pull pressure sensor are fixedly connected with the second friction top, the second friction top spiral shell
Tether the other end for being connected to flexible hinge matrix.
In addition, there is gap between the end of the first friction top or the second friction top and the flexible hinge matrix being attached thereto,
For applying axial pretightening load to the first piezoelectric actuator or the second piezoelectric actuator by the bolt.
It is in system and measuring basis that the two-freedom mobile decoupling flexure hinge mechanism, which also includes displacement to survey, the displacement
Measuring system includes measuring the first displacement measurement system and second displacement measuring system of the displacement on two orthogonal directions respectively,
Wherein,
First displacement measurement system is fixed on one end of the flexible hinge matrix, including the first displacement transducer and first
Mounting seat, the measurement direction of first displacement transducer are parallel with the axis direction of first piezoelectric actuator；
Second displacement measuring system is fixed on mutually being hung down with the first displacement measurement system installation end for the flexible hinge matrix
Nogata to one end, including second displacement sensor and the second mounting seat, the measurement direction of the second displacement sensor and institute
The axis direction for stating the second piezoelectric actuator is parallel；
Measuring basis is fixedly attached to the terminal rigidity output stage of the flexible hinge matrix, has two end faces, the
End face is vertical with the measurement direction of the first displacement transducer, and second end face is vertical with the measurement direction of second displacement sensor.
Displacement transducer is laser displacement sensor described in the two-freedom mobile decoupling flexure hinge mechanism of the present invention.
By using the two-freedom mobile decoupling flexure hinge mechanism of the present invention, following Advantageous effect can be obtained
Fruit.
1st, the motion parts of two-freedom mobile decoupling flexure hinge mechanism flexible hinge matrix of the invention take pair
The parallel-connection structure form of title, there is the advantages of compact-sized, rigidity is high, and this structure type can ensure terminal respectively to fortune
The dynamic decoupling between power, so as to be favorably improved the kinematic accuracy of two-freedom mobile decoupling flexure hinge mechanism.
2. this invention takes deformation unit of the rectangular flexible hinge-unit as integrated model, rectangular flexible hinge-unit
Handling ease, machining accuracy is high, and can realize than other forms flexible hinge unit more compact construction.
3. in two-freedom mobile decoupling flexure hinge mechanism of the present invention, with affixed soft of flexible hinge substrate terminals platform
Property hinge side chain combines using multiple rectangular flexible hinge-units, the flexible hinge side chain affixed with input rigid platfor
Combined using multiple rectangular flexible hinge-units, the formed side chain ratio of this multiple hinge-units parallel arrangements takes list
Individual flexible hinge unit has bigger bending stiffness and bigger lateral flexibility, can so increase mechanism kinematic direction
Stroke, while increase the rigidity in non-athletic direction, the influence of mechanism resistance external applied load disturbance is favorably improved, ensures high motion
Precision.
4. in two-freedom mobile decoupling flexure hinge mechanism of the present invention, pull pressure sensor is fixedly installed in piezoelectricity pottery
The tail end of porcelain actuator, it can so avoid because pull pressure sensor is fixedly installed in into actuator front end increase moving component matter
Amount, so as to the dynamic operation performance of reducing mechanism, while the axial stand under load of actuator can be monitored in real time, apply for pretightning force
Monitoring and dynamics Controlling are provided convenience.
Brief description of the drawings
Fig. 1 is the perspective view of two-freedom mobile decoupling flexure hinge mechanism in the specific embodiment of the invention.
Fig. 2 is the flexible hinge matrix of two-freedom mobile decoupling flexible hinge machine spoon in the specific embodiment of the invention
Perspective view.
Embodiment
Below in conjunction with the accompanying drawings, the present invention is elaborated.
Illustrate the parts title in reference first.
1 flexible hinge matrix；
2 first piezoelectric actuators；
3 first actuator connectors；
4 first pull pressure sensor；
5 first flange disks；
6 first friction tops；
7 second piezoelectric actuators；
8 second actuator connectors；
9 second pull pressure sensor；
10 second flange disks；
11 second friction tops；
12 first mounting seats；
13 first laser displacement transducers；
14 measurement pedestals；
15 second mounting seats；
16 second laser displacement transducers；
1-1 terminal rigidity output stages；
1-2 flexible hinge side chains；
1-3 flexible hinge side chains；
1-4 flexible hinge side chains；
1-5 flexible hinge side chains；
1-6 upper ends rigid platfor；
1-7 flexible hinge side chains；
1-8 flexible hinge side chains；
1-9 left end rigid platfors；
1-10 flexible hinge side chains；
1-11 flexible hinge side chains；
1-12 right-hand member rigid platfors；
1-13 flexible hinge side chains；
1-14 flexible hinge side chains；
1-15 lower ends rigid platfor；
1-16 flexible hinge side chains；
1-17 flexible hinge side chains；
1-18 rigid body matrixes.
The detailed example embodiment of following discloses.However, concrete structure disclosed herein and function detail merely for the sake of
The purpose of example embodiment is described.
It should be appreciated, however, that the present invention is not limited to disclosed particular exemplary embodiment, but covering falls into disclosure model
Enclose interior all modifications, equivalent and alternative.In the description to whole accompanying drawings, identical reference represents identical member
Part.
It will also be appreciated that term "and/or" includes any of one or more related list items as used in this
With all combinations.It will further be appreciated that when part or unit are referred to as " connecting " or during " coupled " to another part or unit, it
Miscellaneous part or unit are can be directly connected or coupled to, or there may also be intermediate member or unit.In addition, for describing
Between part or unit other words of relation should understand in the same fashion (for example, (' between " to " directly between：
" adjacent " is to " direct neighbor " etc.).
As shown in figure 1, the two-freedom mobile decoupling flexure hinge mechanism of the present invention, the mechanism include flexible hinge base
Body 1 and driving side chain, wherein flexible hinge matrix 1 include multiple flexible hinge side chains and rigid connector,
Rigid connector includes the terminal rigidity output stage 1-1 and difference position positioned at the center section of flexible hinge matrix 1
Upper end rigid platfor 1-6, lower end rigid platfor 1-15, left end rigid platfor in flexible hinge matrix upper and lower, left and right part
1-9 and right-hand member rigid platfor 1-12；
The upper end rigid platfor 1-6, lower end rigid platfor 1-15, left end rigid platfor 1-9 and right-hand member rigid platfor 1-
12 are connected by flexible hinge side chain with terminal rigidity output stage 1-1 respectively, and upper end rigid platfor 1-6, lower end are rigidly put down
Platform 1-15, left end rigid platfor 1-9 and right-hand member rigid platfor 1-12 pass through flexible hinge side chain and flexible hinge matrix respectively
Rigid matrix 1-18 connections.
Therefore, the motion parts of two-freedom mobile decoupling flexure hinge mechanism flexible hinge matrix of the invention take
Symmetrical parallel-connection structure form, has the advantages of compact-sized, rigidity is high, and this structure type can ensure terminal respectively to
Decoupling between motion and power, so as to be favorably improved the kinematic accuracy of two-freedom mobile decoupling flexure hinge mechanism.
In the embodiment of the present invention, the flexible hinge side chain includes multiple flexible hinges being arranged parallel to
Chain element.
Especially, the connection terminal rigidity output stage and upper end, lower end, left end, the flexible hinge of right-hand member rigid platfor
Chain side chain includes three flexible hinge units being arranged parallel to：The connection upper end, lower end, left end, right-hand member rigid platfor
Include two flexible hinge units being arranged parallel to the flexible hinge side chain of the rigid matrix of flexible hinge matrix.
On the other hand, two-freedom mobile decoupling flexure hinge mechanism of the invention takes rectangular flexible hinge-unit work
It is high for the deformation unit of integrated model, rectangular flexible hinge-unit handling ease, machining accuracy, and can realize than other shapes
Formula flexible hinge unit more compact construction.
In addition, the flexible hinge side chain affixed with the firm bodyguard output stage of flexible hinge substrate terminals is using multiple rectangles
The combination of flexible hinge unit, it is also with what the affixed flexible hinge side chain of upper end, lower end, left end, right-hand member rigid platfor used
Multiple rectangular flexible hinge-unit combinations, the formed side chain ratio of this multiple hinge-units parallel arrangements take single flexible to cut with scissors
Chain element has bigger bending stiffness and bigger lateral flexibility, can so increase the stroke in mechanism kinematic direction, together
The rigidity in the non-athletic directions of Shi Zengjia, the influence of mechanism resistance external applied load disturbance is favorably improved, ensures high kinematic accuracy.
Specifically, as shown in Fig. 2 the major part of flexible hinge matrix 1 is by flexible hinge side chain and rigid connector
Formed, presented on the axisymmetric structure types of XY.The center section of flexible hinge matrix 1 is terminal rigidity output stage 1-
1, be connected in terminal rigidity output stage 1-1 up, down, left and right part identical flexible hinge side chain 1-2,1-3,
1-4 with l-50 flexible hinge side chain 1-2 are by three identical rectangular flexible hinge unit institute groups that are vertical parallel and being equally spaced
Into being connected with upper end rigid platfor 1-6 in flexible hinge side chain 1-2 upper end, upper end rigid platfor 1-6 left and right ends difference
Flexible hinge side chain 1-7 and 1-8 symmetrically are connected with, flexible hinge side chain 1-7 and 1-8 are by two identical and horizontal parallel cloth
The rectangular flexible hinge-unit put is formed, and their other end is respectively and fixedly connected with rigid matrix 1-18；Flexible hinge side chain
1-3 is made up of three horizontal parallels and the identical rectangular flexible hinge unit that is equally spaced, flexible hinge side chain 1-3's
The affixed right left end rigid platfor 1-9 of left end, left end rigid platfor 1-9 upper and lower ends are respectively symmetrically connected with flexible hinge side chain
1-10 and 1-11, flexible hinge side chain 1-10 and 1-11 are by two rectangular flexible hinge lists that are identical and being arranged in parallel vertically
Member is formed, and their other end is respectively and fixedly connected with rigid matrix 1-18；Flexible hinge side chain 1-4 by three horizontal parallels and
The identical rectangular flexible hinge unit being equally spaced is formed, and right-hand member rigidity is connected with flexible hinge side chain 1-4 right-hand member
Platform 1-12, right-hand member rigid platfor 1-12 upper and lower ends are respectively symmetrically connected with flexible hinge side chain 1-13 and 1-14, flexible
Hinge side chain 1-13 and 1-14 are made up of two rectangular flexible hinge-units that are identical and being arranged in parallel vertically, they
The other end is respectively and fixedly connected with rigid matrix 1-18；Flexible hinge side chain 1-5 is by three phases that are vertical parallel and being equally spaced
Formed with rectangular flexible hinge-unit, be connected with lower end rigid platfor 1-15 in flexible hinge side chain 1-5 lower end, lower end is firm
Mild-natured 1-15 left and right ends are respectively symmetrically connected with flexible hinge side chain 1-16 and 1-17, flexible hinge side chain 1-16 and 1-
17 all by two identical and the rectangular flexible hinge-units of horizontal parallel arrangement are formed, their other end be respectively and fixedly connected with
On rigid matrix 1-18.
Those skilled in that art should be understood that in embodiment of above that connection upper end, lower end, left end and right-hand member are rigid
The flexible hinge side chain of platform and terminal output rigid platfor includes three flexible hinge units being arranged parallel to；And even
Connecting the flexible hinge side chain of the rigid matrix of end, lower end, left end, right-hand member rigid platfor and flexible hinge matrix includes two phases
The flexible hinge unit being mutually arranged in parallel, this is only merely an example, and those skilled in that art are in technical solution of the present invention
Enlightenment under, can use other quantity flexible hinge unit, to realize close technique effect.
As shown in figure 1, the driving side chain bag seals the first driving side chain and the second driving branch of mutually perpendicular direction driving
Chain, the first driving side chain include the first piezoelectric actuator 2 and the first actuator connector 3, and the second driving side chain includes the
Two piezoelectric actuators 7 and the second actuator connector 8.
In addition, in the specific embodiment of the invention, the first driving side chain also includes first flange disk 5, first and drawn
The friction top 6 of pressure sensor 4 and first, the second driving side chain also include second flange disk 10, the second pull pressure sensor 9 and the
Two friction tops 11.
Specifically, the left side that the first piezoelectric actuator 2 passes through the first actuator connector 3 and flexible hinge matrix 1
End rigid platfor 1-9 is fixedly connected, and the first pull pressure sensor 4 passes through the piezoelectric actuator 2 of first flange disk 5 and first
Tail end is fixedly connected, and the axis of the axis of the first pull pressure sensor 4 and the first piezoelectric actuator 2 keeps conllinear, and first
The other end of pull pressure sensor 4 is fixedly connected with the first friction top 6, and the both ends of the first friction top 6 are bolted to soft
The left end of property hinge base body 1, must be left between the first friction top 6 and the left end of flexible hinge matrix 1 it is certain between
Gap, apply certain axial pretightening load to the first piezoelectric actuator 2 will pass through tools for bolts ' pretension.
The lower end rigid platfor that second piezoelectric actuator 7 passes through the second actuator connector 8 and flexible hinge matrix 1
1-15 is fixedly connected, and the second pull pressure sensor 9 is fixed by the tail end of second flange disk 10 and the second piezoelectric actuator 7
The axis of connection, the axis of the second pull pressure sensor 9 and the second piezoelectric actuator 7 keeps conllinear, and the second pressure passes
The other end of sensor 9 is fixedly connected with the second friction top 11, and the both ends of the second friction top 11 are bolted to flexible hinge
The downside end of matrix 1, the second friction top 11 and the downside of flexible hinge matrix 1 must leave certain gap between carrying portion, with
It will pass through tools for bolts ' pretension and apply certain axial pretightening load to the second piezoelectric actuator 7.
In addition, in the embodiment of the invention, the two-freedom mobile decoupling flexure hinge mechanism also includes
Displacement measurement system and measuring basis, the displacement measurement system include measuring first of the displacement on two orthogonal directions respectively
Displacement measurement system and second displacement measuring system, wherein,
First displacement measurement system is fixed on one end of the flexible hinge matrix, including the first displacement transducer 13 and
One mounting seat 12, the measurement direction of first displacement transducer 13 and the axis direction of first piezoelectric actuator 2
It is parallel；
Second displacement measuring system is fixed on mutually being hung down with the first displacement measurement system installation end for the flexible hinge matrix
Nogata to one end, including the mounting seat 15 of second displacement sensor 16 and second, the measurement side of the second displacement sensor 16
To parallel with the axis direction of second piezoelectric actuator 7；
Measuring basis 14 is fixedly attached to the terminal rigidity output stage of the flexible hinge matrix, has two end faces,
First end face is vertical with the measurement direction of the first displacement transducer 13, second end face and the measurement direction of second displacement sensor 16
Vertically.
Especially, institute's displacement sensors are laser displacement sensor.
Specifically, as shown in Fig. 2 the first mounting seat 12 is secured by bolts in the right part of flexible hinge matrix 1,
Be installed with first laser displacement transducer 13 in first mounting seat 12, the measurement direction of first laser displacement transducer 13 with
The axis direction keeping parallelism of first piezoelectric actuator 2, measuring basis 14 are fixedly installed in the terminal of flexible hinge matrix 1
On rigid output stage 1-1, measure the right side of pedestal 14 and kept with the measurement direction of the first laser displacement transducer 13
Hang down impossible.Second mounting seat 15 is bolted the upper end for being installed on flexible hinge matrix 1, fixed in the second mounting seat 15
Second laser displacement transducer 16, the measurement direction of second laser displacement transducer 16 and the second piezoelectric actuator are installed
7 axis direction keeping parallelism, measure the upper surface of pedestal 14 and protected with the measurement direction of the second laser displacement transducer 16
Hold vertical.
Therefore, the operation principle of two-freedom mobile decoupling flexure hinge mechanism of the invention is：The mechanism can be real
Two-freedom motion in existing X/Y plane, in order to illustrate its working method, makes the terminal rigidity output stage 1- of flexible hinge matrix 1
1 central point is the origin of coordinates, and the axial direction of the first piezoelectric actuator 2 is X-axis, the second piezoelectric actuator 7
Axis direction is Y-axis.Because the process that mechanism X moves with Y-axis is identical with control principle, said here so that X-axis is moved as an example
The operation principle of bright mechanism.
First of all for the reliable of the output displacement precision and motion ensured in the course of work of the first piezoelectric actuator 2
Property, it is necessary to apply certain axial pretightening load to the first piezoelectric actuator 2, the axial pretightening load is by the first pressure
The tools for bolts ' pretension at the tight both ends of lid 6 is realized, is sensed according to the prefastening load size of required application, while by observing the first pressure
The axial load size that device 4 measures, tightens or unclamps the bolt at the both ends of the first pretension lid 6, and the piezoelectric ceramics of constantly regulate first causes
The axial pretightening magnitude of load of dynamic device 2, until prefastening load value needed for reaching.
, can be with obtaining means flexible hinge matrix 1 by the finite element analysis to mechanism after the design of mechanism is completed
Displacement relation between left end rigid platfor 1-9 and terminal rigidity output stage 1-1, so as to rigidly defeated according to mechanism terminal
Exceed the X axis displacement realized needed for platform 1-1, obtain the required X provided of left end rigid platfor 1-9 to input displacement, the displacement
Amount is to realize displacement output valve needed for the first piezoelectric actuator 2.
Next, according to the displacement output valve, the first piezoelectric actuator 2 passes through its driver control and interior position
Under displacement sensor closed-loop measuring, the displacement needed for accurate output.After the first piezoelectric actuator 2 extends, promote flexible
The left end rigid platfor 1-9 of hinge base body 1 is moved along the X direction, due to flexible hinge side chain 1-10 and 1-11 X to flexibility very
Greatly, therefore the elastic deformation of X-direction can be taken place along with left end rigid platfor 1-9, and flexible hinge side chain 1-3 X to
Rigidity is very big, therefore hardly deforms, therefore left end rigid platfor 1-3 motion can be almost fully transmitted into end
Rigid output stage 1-1 is held, flexible hinge the side chain 1-2 and 1-5 with terminal rigidity output stage 1-1 Joints are in X-direction
Flexibility is very big, therefore the elastic deformation of X-direction can occur with terminal rigidity output stage 1-1, with terminal rigidity output stage
The flexible hinge side chain 1-4 of 1-1 Joints X is very big to rigidity, therefore hardly deforms, and flexible hinge side chain 1-4 will
Terminal rigidity output stage 1-1 motion is almost fully transmitted to right-hand member rigid platfor 1-12, consolidates with right-hand member rigid platfor 1-12
The flexible hinge side chain 1-13 and 1-14 connect X to flexibility it is very big, therefore X can be taken place along with right-hand member rigid platfor 1-12
The elastic deformation in direction.After flexible hinge side chain 1-5 is along X to elastic deformation, can on the rigid platfor 1-15 of lower end produce X to
Drink load, but due to flexible hinge side chain 1-5 X to rigidity very little, flexible hinge side chain 1-16 and 1-17 X to rigidity
It is very big, thus lower end rigid platfor 1-15 hardly take place along X to deformation, therefore mechanism X to motion, to second
Piezoelectric ceramic actuator 7 influences very small, can also realize the excellent mobile decoupling performance of mechanism.
When the terminal rigidity output stage 1-1 of flexible hinge matrix 1 occur X to after displacement, measuring basis thereon can be driven
14 move together, now accurately measure terminal rigidity output stage 1-1 edges by the can of first laser displacement transducer 13
X to moving displacement amount, the displacement and expected displacement are contrasted, and is used the difference of displacement as feedback quantity
In the input displacement correction to the driver of the first piezoelectric actuator 2, so as to realize the closed-loop control of integrated model motion
System, it is ensured that mechanism realizes required moving displacement amount.
It should be noted that above-mentioned embodiment is only the preferable embodiment of the present invention, it is impossible to is understood as to this
The limitation of invention protection domain, under the premise of without departing from present inventive concept, to any minor variations that the present invention is done and modification
Belong to protection scope of the present invention.
Claims (7)
1. a kind of two-freedom mobile decoupling flexure hinge mechanism, the mechanism includes flexible hinge matrix and driving side chain, its
Middle flexible hinge matrix includes flexible hinge side chain and rigid connector,
Rigid connector includes being located at the terminal rigidity output stage of flexible hinge matrix center section and is located at flexible hinge respectively
The upper end of chain matrix upper and lower, left and right part, lower end, left end, right-hand member rigid platfor；
The upper end, lower end, left end, right-hand member rigid platfor are connected by flexible hinge side chain and terminal rigidity output stage respectively
Connect, and upper end, lower end, left end, right-hand member rigid platfor pass through flexible hinge side chain and the rigid matrix of flexible hinge matrix respectively
Connection；
The driving side chain includes the first driving side chain and the second driving side chain of mutually perpendicular direction driving, the first driving side chain
Including the first piezoelectric actuator and the first actuator connector, the second driving side chain include the second piezoelectric actuator and
Second actuator connector, wherein,
First driving side chain the first piezoelectric actuator by the first actuator connector be connected to upper end, lower end, left end,
One in right-hand member rigid platfor；
Second piezoelectric actuator of the second driving side chain is connected to by the second actuator connector to be connected with the first actuator
Another rigid platfor of the rigid platfor phase orthogonal direction of joint connection；
The first driving side chain also includes first flange disk, the first pull pressure sensor and the first friction top, the second driving branch
Chain also includes second flange disk, the second pull pressure sensor and the second friction top, wherein,
First pull pressure sensor and the first piezoelectric actuator are coaxial, and the first piezoelectric ceramics is connected to by first flange disk
The tail end of actuator, the other end of the first pull pressure sensor are fixedly connected with the first friction top, and first, which compresses cover bolt, connects
It is connected to one end of flexible hinge matrix；
Second pull pressure sensor and the second piezoelectric actuator are coaxial, and the second piezoelectric ceramics is connected to by second flange disk
The tail end of actuator, the other end of the second pull pressure sensor are fixedly connected with the second friction top, and second, which compresses cover bolt, connects
It is connected to the other end of flexible hinge matrix.
2. according to the two-freedom mobile decoupling flexure hinge mechanism described in claim 1, it is characterised in that the flexible hinge
Chain side chain includes multiple flexible hinge units being arranged parallel to.
3. according to the two-freedom mobile decoupling flexure hinge mechanism described in claim 2, it is characterised in that connection terminal is firm
Property output stage and upper end, lower end, left end, the flexible hinge side chain of right-hand member rigid platfor are arranged parallel to soft including 3
Property hinge-unit；Connect the flexible hinge of the rigid matrix of upper end, lower end, left end, right-hand member rigid platfor and flexible hinge matrix
Side chain includes 2 flexible hinge units being arranged parallel to.
4. according to the two-freedom mobile decoupling flexure hinge mechanism described in claim 2, it is characterised in that the flexible hinge
Chain element is rectangular flexible hinge-unit.
5. according to the two-freedom mobile decoupling flexure hinge mechanism described in claim 1, it is characterised in that the first friction top
Or second friction top and the flexible hinge matrix being attached thereto end between there is gap, for being made pottery by bolt to the first piezoelectricity
Porcelain actuator or the second piezoelectric actuator apply axial pretightening load.
6. according to the two-freedom mobile decoupling flexure hinge mechanism described in claim 1, it is characterised in that described two freely
Degree mobile decoupling flexure hinge mechanism also includes displacement measurement system and measuring basis, and the displacement measurement system includes surveying respectively
The first displacement measurement system and second displacement measuring system of the displacement on two orthogonal directions are measured, wherein,
First displacement measurement system is fixed on one end of the flexible hinge matrix, including the first displacement transducer and the first installation
Seat, the measurement direction of first displacement transducer are parallel with the axis direction of first piezoelectric actuator；
Second displacement measuring system be fixed on the flexible hinge matrix with the first perpendicular side of displacement measurement system installation end
To one end, including second displacement sensor and the second mounting seat, the measurement direction of the second displacement sensor and described the
The axis direction of two piezoelectric actuators is parallel；
Measuring basis is fixedly attached to the terminal rigidity output stage of the flexible hinge matrix, has two end faces, first end
Face is vertical with the measurement direction of the first displacement transducer, and second end face is vertical with the measurement direction of second displacement sensor.
7. according to the two-freedom mobile decoupling flexure hinge mechanism described in claim 6, it is characterised in that described first
Displacement sensor and second displacement sensor are laser displacement sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
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| CN105626677A (en) * | 2016-01-26 | 2016-06-01 | 江南大学 | Anti-tensile inner Lamina emergent torsion (LET) flexible hinge |
| CN105606847B (en) * | 2016-03-01 | 2019-03-05 | 清华大学 | A kind of shake table towards the calibration of piezoelectric acceleration transducer cross sensitivity |
| CN106017915A (en) * | 2016-05-11 | 2016-10-12 | 清华大学 | Ball screw assembly precision retaining testing apparatus with characteristics of precise pre tightening and loading |
| CN106092563A (en) * | 2016-05-31 | 2016-11-09 | 清华大学 | Plane two degrees of freedom high frequency charger and test platform for ball screw assembly, |
| CN106958590B (en) * | 2016-08-08 | 2019-02-05 | 哈尔滨工业大学 | The gas/solid combined type high-precision linear movement reference device of multiple degrees of freedom decoupling driving |
| CN106763141B (en) * | 2017-03-01 | 2023-03-10 | 华侨大学 | Two-degree-of-freedom flexible hinge with self-locking function |
| CN108278971B (en) * | 2018-02-06 | 2024-04-19 | 杨锦堂 | Ultra-precise detection platform |
| CN110364221B (en) * | 2018-11-27 | 2022-04-01 | 广东工业大学 | Parallel two-degree-of-freedom nanometer displacement positioning platform based on flexible hinge |
| CN110336485B (en) * | 2019-07-10 | 2020-12-11 | 合肥工业大学 | Piezoelectric impact driven two-dimensional parallel cross-scale precision positioning platform |
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| US6879087B2 (en) * | 2002-02-06 | 2005-04-12 | Viking Technologies, L.C. | Apparatus for moving a pair of opposing surfaces in response to an electrical activation |
| CN103226287B (en) * | 2013-04-25 | 2014-11-26 | 河北工业大学 | Two-in-parallel parallel decoupling flexible microposition mechanism |
| CN103343867B (en) * | 2013-06-17 | 2014-12-24 | 北京航空航天大学 | Layered parallel connection two-degree-of-freedom precise positioning platform based on flexible beams |
| CN103486413B (en) * | 2013-10-11 | 2016-02-10 | 天津理工大学 | Three freedom decoupling Long Distances mini positioning platform |
| CN103990998B (en) * | 2014-05-20 | 2017-01-25 | 广东工业大学 | Stiffness frequency adjustable two-dimensional micro-motion platform based on stress stiffening principle |
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