CN106920578A - Two-dimensional constant force mechanism and the locating platform with the mechanism - Google Patents
Two-dimensional constant force mechanism and the locating platform with the mechanism Download PDFInfo
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- CN106920578A CN106920578A CN201610843953.3A CN201610843953A CN106920578A CN 106920578 A CN106920578 A CN 106920578A CN 201610843953 A CN201610843953 A CN 201610843953A CN 106920578 A CN106920578 A CN 106920578A
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- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
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- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B3/00—Details of movements not otherwise provided for
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Abstract
The invention discloses a kind of two-dimensional constant force mechanism and the locating platform with the mechanism, constant force output is provided for the assigned direction in two dimensional surface, power conducting piece including power input, power output end and for connecting both and conduction power, also include pedestal, power conducting piece is included in a first direction to the first conducting piece of power output end conduction power and in a second direction to the second conducting piece of power output end conduction power；Power input is accordingly respectively arranged at one end of the first conducting piece and the second conducting piece, and power input is respectively by that can produce the first flexible hinge of negative stiffness and the second flexible hinge of positive rigidity can be produced to be connected on pedestal；First flexible hinge and the parallel connection of the second flexible hinge and the quasi- zero stiffness system of composition.Using two-dimensional constant force mechanism of the invention and the locating platform with the mechanism, constant force output, two degree-of-freedom motion are realized, and positioning precision is high, simple structure.
Description
Technical field
The present invention relates to a kind of constant force mechanisms, particularly a kind of direction output constant force that can be specified in two dimensional surface
Two-dimensional constant force mechanism.The invention further relates to the locating platform with the constant force mechanisms, it belongs to the precision in precision mechanical system
Locating platform, is mainly used in microoperation technology (such as scanning probe microscopy), bioengineering (cell infusion), accurate typesetting
Fields such as (3D printings).
Background technology
Precisely locating platform technology based on compliant mechanism is to replace traditional chain pipe fitting and then reality using flexible hinge
The motion of existing part and positioning, with zero friction, zero abrasion, small impact, simple structure, cheap and compatible by force etc. excellent
Point, has a wide range of applications in miniature operation, alignment system.
Constant force mini positioning platform is device emerging in the last few years, and constant force platform technology is set by platform structure
Meter makes it have the characteristic of output constant force or constant moment of force in certain stroke range.By the object that mini positioning platform is carried
Or mechanism is the features such as have small volume, precise structure, therefore the ability of the power that withstands shocks is smaller, and non-constant force platform is in movement
During the power that produces be change, therefore the object for being carried can be had certain impact power, and its accurate structure is produced
Certain influence.Research with fields such as micro mechanical system and bioengineering is goed deep into, to micro- behaviour in experiment and process of manufacture
Make, the demand of the constant force of locating platform is also more and more stronger.
In recent years, lot of domestic and international units and research institution are devoted to constant force microoperation, micro- positioning based on compliant mechanism
Systematic research.If Guangbo Hao, John Mullins and Kevin Cronin are in article " Simplified
modelling and development of a bi-directionally adjustable constant-force
A kind of constant force clamp based on flexible hinge is proposed in compliant gripper ".Yi-Ho Chen and Chao-Chieh Lan
Article " the An Adjustable delivered on Journal of Mechanical Design magazines in 2012
Design one kind is based in Constant-Force Mechanism for Adaptive End-Effector Operations "
The one-dimensional mechanism of constant force of flexible hinge.But these designs are still in conceptual phase, and practical application is not put into.
Research for bistable state beam is increasingly ripe, and related patent of invention also has a lot.Such as, Chinese patent
CN101561556B proposes a kind of fully flexible MEMS optical switch by the bistability of bistable state beam；Chinese patent
CN103198922A proposes a kind of comb electric capacity Precise Assembling Method by using bistable state beam bistability.But these patents are sent out
Bright used as switch using the bistability of bistable state beam, can not be using it in bistable state transfer process
There is the property that bending deformation produces negative stiffness.
Patent of invention about constant force mechanisms also has a lot, and such as United States Patent (USP) US6920936B2 and US7677540B1 are utilized
The structure of spring and cam is designed a kind of one-dimensional constance force output mechanism of proposition by the profile to cam.Chinese patent
CN103438141A proposes a kind of adjustable constant force device using devices such as stage clip and sliding blocks.It is readily apparent that these inventions are special
The constant force device that profit is proposed all is made up of traditional motion transfer components connection.Gap, abrasion due to these parts etc.
Inherent defect, these constant force mechanisms are difficult to realize to be accurately positioned, or could realize degree of precision by extremely complex structure
Positioning.
United States Patent (USP) US005649454A is designed a kind of one-dimensional perseverance of proposition by the arrangement to flexible hinge
Force mechanisms.Chinese patent CN101614613B is proposed a kind of using submissive slide block mechanism, slider-crank mechanism and pressure sensor
Experimental device for compliant slide block constant force mechanism, can provide the constance force output of one degree of freedom.CN102537610B is by by flexibility
Bar, rigid rod consolidate with guide pad and to form compound rod and realize constant force in order, and then propose a kind of Submissive constant-force support mechanism, its
Essence is also a kind of one-dimensional constant force mechanisms.It is clear that above-mentioned flexible constant force mechanisms all simply realize one-dimensional constant force
It is oriented to displacement.
The existing constant force device based on compliant mechanism can only all realize one-dimensional constant force movement, and this is in actual application
In be far from being enough.For example, when carrying out cell infusion and operating, if objective table can only the movement of direction be cannot be effective
Complete injection.And other constant force mechanisms (such as US7677540B1, US6920936B2, CN103438141A) are using biography mostly
System connector is attached, and abrasion can be produced when having gap and work due to traditional connectors, therefore difficult to realize high-precision
The positioning of degree, and the structure of this kind of design is all more complicated, be difficult manufacture and cost is higher.
The purpose of the present invention is a kind of new two-dimentional defeated with constant force aiming at the shortcoming design of above-mentioned prior art
The high accuracy platform for going out, can meet real work requirement.
The content of the invention
In view of the above mentioned problem that prior art is present, it is an object of the invention to provide a kind of two-dimensional constant force mechanism and with this
The locating platform of mechanism, can realize that two constant force of the free degree are exported and high-precision positioning.
To achieve these goals, the invention provides a kind of two-dimensional constant force mechanism, for specifying in two dimensional surface
Direction provides constant force output, including power input, power output end and the power conducting piece for connecting both and conduction power, also
Including pedestal, and,
The power conducting piece include in a first direction to the power output end conduction power the first conducting piece and
To the second conducting piece of the power output end conduction power in second direction；
The power input is accordingly respectively arranged at one end of first conducting piece and second conducting piece, described
Power input is respectively by that can produce the first flexible hinge of negative stiffness and the second flexible hinge of positive rigidity can be produced to be connected to
On the pedestal；
First flexible hinge and second flexible hinge parallel connection and the quasi- zero stiffness system of composition.
Preferably, first flexible hinge is a bistable mechanism；First flexible hinge is in parallel to be located at two
One end is formed between second flexible hinge to fix, and the cantilever beam mechanism of other end activity；The power input clamping is solid
It is scheduled between two movable ends of the cantilever beam mechanism.
Preferably, the bistable mechanism is bistable state beam, second flexible hinge is thin walled beam.
Preferably, first conducting piece and second conducting piece are also made up of thin walled beam, and it is mutually between the two
Right angle is set.
Preferably, first conducting piece and second conducting piece have two mobile terminals respectively, and by office
Constituted in two straight sections of the power output end opposite sides, it is overall to be distributed in " ten " font；The power input is provided with four
Mobile terminal individual and that first conducting piece and second conducting piece are respectively correspondingly fixed on by the cantilever beam mechanism.
Preferably, constituting the thin walled beam of first conducting piece and second conducting piece for four and being parallel to each other.
Preferably, being additionally provided with the spacing dress limited the stroke range of the power input on the pedestal
Put.
It is described the invention discloses a kind of locating platform, including above-mentioned two-dimensional constant force mechanism, cushion block, upper mounting plate, base
Upper mounting plate is fixedly connected by the cushion block with the power output end, and the base is fixedly connected with the pedestal, the base
On be fixedly installed motor and displacement transducer, the output end of the motor is connected to provide with the power input
Power gives the two-dimensional constant force mechanism, and institute's displacement sensors detect the two-dimensional constant force by measuring the displacement of the upper mounting plate
The distance of mechanism's movement.
Preferably, institute's displacement sensors are laser displacement sensor.
Preferably, the motor is voice coil motor.
Compared with prior art, the beneficial effect of two-dimensional constant force mechanism of the invention and the locating platform with the mechanism exists
In：By setting flexible hinge, constant force output, simple structure, it is easy to processing and fabricating, compared to existing using tradition are realized
Driving parts realize the patented invention of constant force output, due to using flexible hinge connection transmission motion, overcoming traditional transmission zero
Part has the shortcomings that friction, gap and impact, positioning precision is reached nanoscale；By setting respectively in a first direction
First conducting piece and the second conducting piece of active force are conducted in upper and second direction, the parallel-connection structure of platform is realized, realized
The two degree-of-freedom motion of platform, and then realize the two-dimensional constant force output of platform.
Brief description of the drawings
Fig. 1 is the structural representation of two-dimensional constant force mechanism of the invention；
Fig. 2 is the partial structural diagram of two-dimensional constant force mechanism of the invention；
Fig. 3 is the structural representation of the thin walled beam of two-dimensional constant force mechanism of the invention；
Fig. 4 is that the thin walled beam of two-dimensional constant force mechanism of the invention occurs the curve of the power and displacement produced during elastic deformation
Figure；
Fig. 5 is that the bistable state beam of two-dimensional constant force mechanism of the invention occurs the curve of the power and displacement produced during bending deformation
Figure；
Fig. 6 is the reaction force and the curve map of displacement of the quasi- zero stiffness system of two-dimensional constant force mechanism of the invention；
Schematic diagram when Fig. 7 is the working condition of two-dimensional constant force mechanism of the invention；
Fig. 8 is the structural representation of the two-dimensional constant force mechanism with stopping means of the invention；
Schematic diagram when Fig. 9 is the working condition of the two-dimensional constant force mechanism with stopping means of the invention；
Figure 10 is the decomposing schematic representation of locating platform of the invention；
Figure 11 is the structural representation of locating platform of the invention.
Description of reference numerals：1- two-dimensional constant forces mechanism；2- pedestals；3- power inputs；4- power output ends；The flexible hinges of 5- first
Chain；The flexible hinges of 6- second；The conducting pieces of 7- first；The conducting pieces of 8- second；9- stopping means；10- cushion blocks；11- upper mounting plates；12-
Base；13- motors；14- displacement transducers.
Specific embodiment
Below in conjunction with the accompanying drawings with specific embodiment to two-dimensional constant force mechanism of the invention and the locating platform with the mechanism
It is described in further detail, but it is not as a limitation of the invention.
As shown in figure 1, the invention provides a kind of two-dimensional constant force mechanism 1, being carried for the assigned direction in two dimensional surface
For constant force output, including power input 3, power output end 4 and the power conducting piece for connecting both and conduction power, also include
Pedestal 2, and,
Power conducting piece is included in a first direction to the first conducting piece 7 of the conduction power of power output end 4 and in second party
Upwards to the second conducting piece 8 of the conduction power of power output end 4；
Power input 3 is accordingly respectively arranged at one end of the first conducting piece 7 and the second conducting piece 8, and power input 3 is distinguished
By that can produce the first flexible hinge 5 of negative stiffness and the second flexible hinge 6 of positive rigidity can be produced to connect on the base 2；
First flexible hinge 5 and the parallel connection of the second flexible hinge 6 and the quasi- zero stiffness system of composition.
The output of constant force, simple structure are realized by setting flexible hinge, it is easy to processing and fabricating, and compared to tradition
Driving parts cannot realize high accuracy positioning due to having the shortcomings that friction, gap and impact, two dimension of the invention is permanent
The flexible hinge that force mechanisms are used overcomes disadvantages mentioned above, positioning precision is reached nanoscale.In addition, by first party
The first conducting piece and the second conducting piece are set up to second party, the motion of both direction is realized, the perseverance of two dimension is realized
Power is exported.
As shown in Fig. 2 the first flexible hinge 5 is a bistable mechanism, the first flexible hinge 5 is in parallel be located at two it is second soft
Property hinge 6 between formed one end fix, and the other end activity cantilever beam mechanism.Power input 3 is clamped to two cantilevers
Between the movable end of beam mechanism, after power input 3 is applied force to, the activity end motion of cantilever beam mechanism and by active force
Export power output end 4.
Fig. 3 shows the structural representation of thin walled beam, and the full-size that thin walled beam refers generally to section is much smaller than longitudinal size
Beam.
Fig. 4 shows the relation curve between the power that thin walled beam produces when deforming upon and displacement, and Fig. 5 shows bistable
Relation curve of the state beam when bending deformation occurs between the power that produces and displacement.When power input 3 is subject to active force, bistable
State beam and thin walled beam are that one end can be with activity, and the other end is fixed on pedestal 2, and now bistable state beam and thin walled beam can be used
Flexural cantilever model.Be can be seen that with the increase of displacement from the curve of Fig. 4, the reaction force increase that thin walled beam is produced absorbs energy
Amount, potential energy increase.Bistable state beam being can be seen that from the curve of Fig. 5 and bending deformation occurring at point B, before reaching D points, its is anti-
Active force reduces with the increase of displacement, and as displacement increases, potential energy reduces, and releases energy.
In the present embodiment, bistable mechanism is bistable state beam, using bistable state beam as negative rigidity mechanism, the second flexible hinge
Chain 6 is thin walled beam, using thin walled beam as positive rigidity mechanism.As shown in figure 1, bistable state beam is obliquely installed relative to thin walled beam.
In the present embodiment, the first conducting piece 7 and the second conducting piece 8 are also made up of thin walled beam, and are mutually between the two straight
Angle is set.Said structure is simple, and can realize two degree-of-freedom motion.After active force is applied on a direction wherein, example
As in a first direction, the first conducting piece 7 can conduction power to power output end 4, and with the setting at a right angle of the first conducting piece 7
The second conducting piece 8 now also serve as positive rigidity mechanism.That is, what is be connected between power input 3 and pedestal 2 is second soft
The thin walled beam of property hinge 6 (e.g., thin walled beam) and the second conducting piece of composition 8 now is connected to power as positive rigidity mechanism
The first flexible hinge 5 (bistable state beam) between input 3 and pedestal 2 as negative rigidity mechanism, positive rigidity mechanism and negative stiffness
Mechanism collectively constitutes quasi- zero stiffness system and exports constant force.
Fig. 6 shows the reaction force and the curve map of displacement of the quasi- zero stiffness system of two-dimensional constant force mechanism of the invention.
Positive rigidity mechanism and negative rigidity mechanism are arranged in parallel, its power and displacement curve are overlapped mutually, between point B and point D, accurate zero is firm
The power of degree system does not change with the change of displacement, and now the rigidity of whole mechanism is zero, exports constant force.
Fig. 7 shows the structural representation when power input applies directed force F.Two-dimensional constant force mechanism moves in the y-direction,
Active force is transmitted to power output end 4 by the first conducting piece 7 on y directions, and the second conducting piece 8 on x directions occurs elastic deformation,
Produce positive rigidity, and isolated the motion in y directions, it is not produced influence to the motion in x directions.Of course, it is possible to first
The power input 3 of any one in the conducting piece 8 of conducting piece 7 and second applies active force, it is also possible to while in the He of the first conducting piece 7
The power input 3 of the second conducting piece 8 applies active force, and constant force can be exported in corresponding power output end 4.
As shown in figure 1, the first conducting piece 7 and the second conducting piece 8 have two mobile terminals respectively, and it is defeated in power by office
Two straight sections for going out 4 opposite sides of end are constituted, overall to be distributed in " ten " font；Power input 3 is provided with four and corresponds to respectively
Ground is fixed on the mobile terminal of the first conducting piece 7 and the second conducting piece 8 by cantilever beam mechanism.Two-dimensional constant force structure of the invention is adopted
With symmetrical structure, stability is increased.
In the present embodiment, the thin walled beam of the first conducting piece 7 and the second conducting piece 8 is constituted for four and is parallel to each other.Certainly,
If the structural parameters of the thin walled beam of two-dimensional constant force mechanism are changed, quantity can also be changed accordingly, as long as its
Entirety meets the requirement of quasi- zero stiffness system.
As shown in Figure 8 and Figure 9, in order that two-dimensional constant force mechanism is directly entered constant force stroke, that is, after applying active force, two are made
Dimension constant force mechanisms figure 6 illustrates point B and point D between move, can before work to two-dimensional constant force mechanism apply preload, load
Lotus direction is the driving direction of two-dimensional constant force mechanism, makes bistable state beam that flexing to occur and enters negative stiffness state.Therefore, on pedestal 2
It is additionally provided with the stopping means 9 limited the stroke range of power input.For example, can be set in two-dimensional constant force mechanism
Spacing hole, limited post is set in the fixing device below two-dimensional constant force mechanism, by the cooperation of spacing hole and limited post, makes two
Dimension constant force mechanisms can only be moved in constant force stroke range.
As shown in Figure 10 and Figure 11, two-dimensional constant force mechanism 1, pad the invention discloses a kind of locating platform including above-mentioned
Block 10, upper mounting plate 11, base 12, upper mounting plate 11 are fixedly connected by cushion block 10 with power output end 4, and base 12 is fixed with pedestal 2
Connection, is fixedly installed motor 13 and displacement transducer 14, output end and the power input 3 of motor 13 on base 12
To provide power to two-dimensional constant force mechanism 1, displacement transducer 14 is by non-contact measurement upper mounting plate 11 on x and y directions for connection
Displacement with detect two-dimensional constant force mechanism 1 move distance.
In the present embodiment, displacement transducer 14 is laser displacement sensor.
In the present embodiment, motor 13 is voice coil motor.
Above example is only exemplary embodiment of the invention, is not used in the limitation present invention, protection scope of the present invention
It is defined by the claims.Those skilled in the art can make respectively in essence of the invention and protection domain to the present invention
Modification or equivalent are planted, this modification or equivalent also should be regarded as being within the scope of the present invention.
Claims (10)
1. two-dimensional constant force mechanism, constant force output, including the output of power input, power are provided for the assigned direction in two dimensional surface
End and the power conducting piece for connecting both and conduction power, it is characterised in that also including pedestal, and,
The power conducting piece is included in a first direction to the first conducting piece of the power output end conduction power and second
To the second conducting piece of the power output end conduction power on direction；
The power input is accordingly respectively arranged at one end of first conducting piece and second conducting piece, and the power is defeated
Enter end be connected to by the first flexible hinge that can produce negative stiffness and the second flexible hinge that positive rigidity can be produced respectively it is described
On pedestal；
First flexible hinge and second flexible hinge parallel connection and the quasi- zero stiffness system of composition.
2. two-dimensional constant force mechanism according to claim 1, it is characterised in that first flexible hinge is a bistable state machine
Structure；First flexible hinge one end that formed between two second flexible hinges in parallel is fixed, and the other end is movable
Cantilever beam mechanism；The power input is clamped between two movable ends of the cantilever beam mechanism.
3. two-dimensional constant force mechanism according to claim 2, it is characterised in that the bistable mechanism is bistable state beam, institute
The second flexible hinge is stated for thin walled beam.
4. two-dimensional constant force mechanism according to claim 1, it is characterised in that first conducting piece and second conduction
Part is also made up of thin walled beam, and mutually setting at a right angle between the two.
5. two-dimensional constant force mechanism according to claim 2, it is characterised in that first conducting piece and second conduction
Part has two mobile terminals respectively, and is in integrally in two straight sections composition of the power output end opposite sides by office
" ten " font is distributed；The power input is provided with four and respectively correspondingly by the cantilever beam mechanism is fixed on described
The mobile terminal of one conducting piece and second conducting piece.
6. two-dimensional constant force mechanism according to claim 4, it is characterised in that constitute first conducting piece and described second
The thin walled beam of conducting piece is four and is parallel to each other.
7. two-dimensional constant force mechanism according to claim 6, it is characterised in that be additionally provided with the pedestal defeated to the power
Enter the stopping means that the stroke range at end is limited.
8. locating platform, it is characterised in that including the two-dimensional constant force mechanism any one of claim 1-7, cushion block, upper flat
Platform, base, the upper mounting plate are fixedly connected by the cushion block with the power output end, and the base is fixed with the pedestal and connected
Connect, motor and displacement transducer are fixedly installed on the base, the output end of the motor is input into the power
To provide power to the two-dimensional constant force mechanism, institute's displacement sensors are detected by measuring the displacement of the upper mounting plate for end connection
The distance of the two-dimensional constant force mechanism movement.
9. locating platform according to claim 8, it is characterised in that institute's displacement sensors are laser displacement sensor.
10. locating platform according to claim 8, it is characterised in that the motor is voice coil motor.
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| CN108009380A (en) * | 2017-12-22 | 2018-05-08 | 湖南上势智能科技有限公司 | A kind of method for designing flexible parallel mechanism |
| CN109019503A (en) * | 2018-07-31 | 2018-12-18 | 江西理工大学 | A kind of two-dimentional constance force mini positioning platform based on compliant mechanism |
| CN109015544A (en) * | 2018-09-18 | 2018-12-18 | 安徽理工大学 | A kind of submissive zero stiffness constant force effect platform |
| CN109551465A (en) * | 2019-01-08 | 2019-04-02 | 华南理工大学 | A kind of passive flexible constant force mechanisms of high off-axis rigidity |
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| CN110010190A (en) * | 2019-04-30 | 2019-07-12 | 珠海澳大科技研究院 | Three-dimensional constant force parallel flexible mini positioning platform |
| CN110040680A (en) * | 2019-04-19 | 2019-07-23 | 西安交通大学 | The MEMS microgravity sensor chip with quasi- zero stiffness characteristic is preloaded based on electric heating |
| CN112223254A (en) * | 2020-08-21 | 2021-01-15 | 南京航空航天大学 | Parallel passive compliant device |
| CN113172511A (en) * | 2020-10-22 | 2021-07-27 | 吉首大学 | Robot polishing actuator based on constant force mechanism |
| CN116013402A (en) * | 2022-12-26 | 2023-04-25 | 齐鲁工业大学 | Two-dimensional micro-positioning platform |
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Cited By (14)
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|---|---|---|---|---|
| CN108009380A (en) * | 2017-12-22 | 2018-05-08 | 湖南上势智能科技有限公司 | A kind of method for designing flexible parallel mechanism |
| CN109019503A (en) * | 2018-07-31 | 2018-12-18 | 江西理工大学 | A kind of two-dimentional constance force mini positioning platform based on compliant mechanism |
| CN109015544A (en) * | 2018-09-18 | 2018-12-18 | 安徽理工大学 | A kind of submissive zero stiffness constant force effect platform |
| CN109551465A (en) * | 2019-01-08 | 2019-04-02 | 华南理工大学 | A kind of passive flexible constant force mechanisms of high off-axis rigidity |
| CN109551465B (en) * | 2019-01-08 | 2023-09-26 | 华南理工大学 | Passive flexible constant force mechanism with high off-axis rigidity |
| CN110040680A (en) * | 2019-04-19 | 2019-07-23 | 西安交通大学 | The MEMS microgravity sensor chip with quasi- zero stiffness characteristic is preloaded based on electric heating |
| CN110040680B (en) * | 2019-04-19 | 2021-09-03 | 西安交通大学 | MEMS microgravity sensor chip with quasi-zero rigidity characteristic based on electric heating preloading |
| CN110010190A (en) * | 2019-04-30 | 2019-07-12 | 珠海澳大科技研究院 | Three-dimensional constant force parallel flexible mini positioning platform |
| CN110010190B (en) * | 2019-04-30 | 2021-11-16 | 珠海澳大科技研究院 | Three-dimensional constant force parallel flexible micro-positioning platform |
| CN109953845A (en) * | 2019-04-30 | 2019-07-02 | 安徽理工大学 | Joint support device based on submissive constant moment of force mechanism |
| CN112223254A (en) * | 2020-08-21 | 2021-01-15 | 南京航空航天大学 | Parallel passive compliant device |
| CN113172511A (en) * | 2020-10-22 | 2021-07-27 | 吉首大学 | Robot polishing actuator based on constant force mechanism |
| CN116013402A (en) * | 2022-12-26 | 2023-04-25 | 齐鲁工业大学 | Two-dimensional micro-positioning platform |
| CN116013402B (en) * | 2022-12-26 | 2023-09-26 | 齐鲁工业大学 | Two-dimensional micro-positioning platform |
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| CN106920578B (en) | 2020-04-14 |
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