CN104505128A - Two-freedom-degree, large-travel and large-load micro-positioning platform - Google Patents
Two-freedom-degree, large-travel and large-load micro-positioning platform Download PDFInfo
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- CN104505128A CN104505128A CN201410828412.4A CN201410828412A CN104505128A CN 104505128 A CN104505128 A CN 104505128A CN 201410828412 A CN201410828412 A CN 201410828412A CN 104505128 A CN104505128 A CN 104505128A
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Abstract
The invention discloses a two-freedom-degree, large-travel and large-load micro-positioning platform which comprises an upper platform and a lower platform. The lower platform is provided with a base. The upper platform comprises a central movable platform. The movable platform is connected with the base through four flexible standing columns. The four flexible standing columns are distributed at four corners below the movable platform. Each flexible standing column is formed by serially connecting two flexible hook hinges. Each flexible hook hinge is formed by two coplanar circular flexible hinges in a penetration manner. Each of two adjacent movable blocks of four movable blocks is driven by a voice coil motor to move in a translation manner. The two-freedom-degree, large-travel and large-load micro-positioning platform has the advantages that the voice coil motors are used as drivers, and large-travel motion range and submicron-level resolution are provided; the movable platform and the base are connected through the flexible standing columns, and the radial rigidity of the positioning platform is quite large.
Description
Technical field
The invention belongs to precision positioning technology field, particularly a kind ofly drive the large load mini positioning platform of Long Distances of flexure hinge mechanism based on voice coil motor, be applicable to MEMS (micro electro mechanical system) manufacture, biomedicine, micro-/to receive the precision positioning occasions such as operation, laser scanning.
Background technology
Current piezoelectric ceramic driven mini positioning platform comparative maturity, be widely used in micro-/receive processing with measurement mechanism in.But existing mini positioning platform work space is micron order, and scanning probe microscopy, scanning beam photoetching etc. need grade work space; Existing two degrees of freedom mini positioning platform load-bearing capacity is very limited, limits the application of mini positioning platform.For current problem demanding prompt solution, the Precision Position Location System designing the large load of a kind of Novel two-freedom-degree Long Distances is of great practical significance.
Summary of the invention
The present invention provides a kind of two degrees of freedom Long Distances large load mini positioning platform for solving in known technology the technical matters that exists.
The technical scheme that the present invention takes for the technical matters existed in solution known technology is: the large load mini positioning platform of a kind of two degrees of freedom Long Distances, comprise upper mounting plate and lower platform, described lower platform is provided with pedestal, is provided with back-up block in four bights of described pedestal, described upper mounting plate comprises the fixed block that a moving platform arranged between two parties and four points are located at four bights, described moving platform is connected by four flexible side chains with four described fixed blocks, each described flexible side chain comprises one and is arranged on movable block between adjacent two described fixed blocks and three parallel flexible structures between two parties, described movable block and described moving platform are by a described parallel flexible anatomical connectivity, described movable block be positioned at two described fixed blocks of its both sides respectively by a described parallel flexible anatomical connectivity, described flat shape flexible structure is formed by two rectangular flexible hinge parallel connections, four described fixed blocks and four described back-up blocks affixed respectively, described moving platform is connected by four flexible legs with described pedestal, and four described flexible legs are distributed in four bights below described moving platform, each described flexible legs is connected by two flexible hook hinge and is formed, and each described flexible hook hinge is by two coplanar circular flexible hinge intersecting shape one-tenth, two in four described movable blocks adjacent described movable blocks are respectively driven by a voice coil motor does translation, and described voice coil motor is fixed on described pedestal.
Described moving platform adopts " returning " character form structure.
The advantage that the present invention has and good effect are: adopt voice coil motor as driver, provide Long Distances range of movement and other resolution of submicron order; Adopt flexible legs to connect moving platform and pedestal, make the radial rigidity of locating platform very large; In addition, adopt flexure hinge mechanism as gear train, have without friction, exempt from the advantages such as lubrication, high precision; Can be used as micro-/receive the auxiliary positioning platform of operating system, realize microfeed and precision positioning.
Accompanying drawing explanation
Fig. 1 is perspective view of the present invention;
Fig. 2 is upper mounting plate planar structure schematic diagram of the present invention;
Fig. 3 is lower platform perspective view of the present invention;
Fig. 4 is flexible hook hinge schematic diagram of the present invention;
Fig. 5 is flexible stereo structural representation of the present invention.
In figure: 1-moving platform, 2-movable block, 3-parallel flexible structure, 4-bolt, 5-upper mounting plate, 6-contiguous block, 7-voice coil motor, 8-support, 9-pilot hole, 10-lower platform, 11-fixed block, 12-flexible legs, 13-threaded hole, 14-pedestal, the flexible hook hinge of 15-, 16-back-up block.
Embodiment
For summary of the invention of the present invention, Characteristic can be understood further, hereby exemplify following examples, and coordinate accompanying drawing to be described in detail as follows:
Refer to Fig. 1 ~ Fig. 5, the large load mini positioning platform of a kind of two degrees of freedom Long Distances, comprises upper mounting plate 5 and lower platform 10, and described lower platform 10 is provided with pedestal 14, is provided with back-up block 16 in four bights of described pedestal 14, described upper mounting plate 5 comprises the fixed block 11 that a moving platform 1 arranged between two parties and four points are located at four bights, described moving platform 1 is connected by four flexible side chains with four described fixed blocks 11, each described flexible side chain comprises one and is arranged on movable block 2 between adjacent two described fixed blocks 11 and three parallel flexible structures 3 between two parties, described movable block 2 is connected by a described parallel flexible structure 3 with described moving platform 1, described movable block 3 is respectively connected by a described parallel flexible structure 3 with two that are positioned at its both sides described fixed blocks 11, described flat shape flexible structure 3 is formed by two rectangular flexible hinge parallel connections.
Four described fixed blocks 11 and four described back-up blocks 16 affixed respectively, described moving platform 1 is connected by four flexible legs 12 with described pedestal 14, and four described flexible legs 12 are distributed in four bights below described moving platform 1; Each described flexible legs 12 is connected by two flexible hook hinge 15 and is formed, and each described flexible hook hinge 15 is become by two coplanar circular flexible hinge intersecting shape.
Two in four described movable blocks 2 adjacent described movable blocks 2 are respectively driven by a voice coil motor 7 does translation, and described voice coil motor 7 is fixed on described pedestal 14.
In the present embodiment, in order to increase the natural frequency of mini positioning platform, described moving platform adopts " returning " character form structure.
In the present invention, two voice coil motors are separately fixed on two supports 8, and two supports 8 are fixed on pedestal 14, and voice coil motor 7 is connected by contiguous block 6 with movable block 2.Moving platform 1 is provided with the through hole connecting flexible legs 12, and pedestal 14 is provided with the pilot hole 9 of whole locating platform, the threaded hole 13 of mounting bracket 8; Flexible legs 12 upper end is provided with the threaded hole 13 installing moving platform.Support 8 is provided with two through holes for the through hole and two fixed supports 8 of installing voice coil motor 7.Contiguous block 6 is provided with the through hole connecting voice coil motor 7 and movable block 2.Fixed block 11 is provided with the through hole connecting back-up block 16, is connected with pedestal 14 for upper mounting plate 5.
Described upper mounting plate 5 and described lower platform 10 are fixedly connected to form mini positioning platform body by bolt 4.Flexible hook hinge 15 has natural two-dimentional decoupling zero function, and four flexible legs 12 are parallel on moving platform 1.Controlling electric signal by computer export drives voice coil motor 7 to produce power output according to the movement locus of specifying, and by overcoming the elastic force of flexible side chain and flexible hook hinge 15, the displacement realizing moving platform 1 exports.Only give voice coil motor 7 input electrical signal, moving platform 1 is just along one-dimensional square to moving.By controlling the input electrical signal of two voice coil motors 7, moving platform 1 can realize the plane motion of arbitrary form, such as circus movement.
Although be described the preferred embodiments of the present invention by reference to the accompanying drawings above; but the present invention is not limited to above-mentioned embodiment; above-mentioned embodiment is only schematic; be not restrictive; those of ordinary skill in the art is under enlightenment of the present invention; do not departing under the ambit that present inventive concept and claim protect, can also make a lot of form, these all belong within protection scope of the present invention.
Claims (2)
1. the large load mini positioning platform of two degrees of freedom Long Distances, is characterized in that, comprise upper mounting plate and lower platform, described lower platform is provided with pedestal, is provided with back-up block in four bights of described pedestal, described upper mounting plate comprises the fixed block that a moving platform arranged between two parties and four points are located at four bights, described moving platform is connected by four flexible side chains with four described fixed blocks, each described flexible side chain comprises one and is arranged on movable block between adjacent two described fixed blocks and three parallel flexible structures between two parties, described movable block and described moving platform are by a described parallel flexible anatomical connectivity, described movable block be positioned at two described fixed blocks of its both sides respectively by a described parallel flexible anatomical connectivity, described flat shape flexible structure is formed by two rectangular flexible hinge parallel connections, four described fixed blocks and four described back-up blocks affixed respectively, described moving platform is connected by four flexible legs with described pedestal, and four described flexible legs are distributed in four bights below described moving platform, each described flexible legs is connected by two flexible hook hinge and is formed, and each described flexible hook hinge is by two coplanar circular flexible hinge intersecting shape one-tenth, two in four described movable blocks adjacent described movable blocks are respectively driven by a voice coil motor does translation, and described voice coil motor is fixed on described pedestal.
2. the large load mini positioning platform of two degrees of freedom Long Distances according to claim 1, is characterized in that, described moving platform adopts " returning " character form structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201410828412.4A CN104505128B (en) | 2014-12-26 | 2014-12-26 | Two-freedom-degree, large-travel and large-load micro-positioning platform |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410828412.4A CN104505128B (en) | 2014-12-26 | 2014-12-26 | Two-freedom-degree, large-travel and large-load micro-positioning platform |
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| CN104505128A true CN104505128A (en) | 2015-04-08 |
| CN104505128B CN104505128B (en) | 2017-04-26 |
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Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105345760A (en) * | 2015-11-23 | 2016-02-24 | 清华大学 | Large-stroke two-dimensional servo platform and measuring method with optical gratings |
| CN105345759A (en) * | 2015-11-23 | 2016-02-24 | 清华大学 | Two-dimensional nanometer servo platform |
| CN105643604A (en) * | 2016-03-25 | 2016-06-08 | 西安电子科技大学 | Four-freedom-degree micro motion soft system |
| CN105880140A (en) * | 2016-03-31 | 2016-08-24 | 天津大学 | Two-dimensional ultrasonic vibration platform based on flexure hinge structure |
| CN106195556A (en) * | 2016-09-22 | 2016-12-07 | 中国工程物理研究院总体工程研究所 | A kind of XY θ plane three-freedom precision positioning platform |
| CN106251909A (en) * | 2016-08-19 | 2016-12-21 | 天津大学 | A kind of high accuracy, big stroke freedom degree parallel connection mini positioning platform |
| CN106272364A (en) * | 2016-10-31 | 2017-01-04 | 山东大学 | A kind of symmetric parallel directly drives mobile decoupling high-precision servo platform |
| CN106328213A (en) * | 2016-10-27 | 2017-01-11 | 北京航空航天大学 | Two-axis micro-motion platform based on flexible hinge |
| CN106920578A (en) * | 2016-09-22 | 2017-07-04 | 澳门大学 | Two-dimensional constant force mechanism and the locating platform with the mechanism |
| CN108389603A (en) * | 2018-04-03 | 2018-08-10 | 中国科学院宁波材料技术与工程研究所 | A kind of double composite and flexible parallelogram lindages |
| CN108776239A (en) * | 2018-03-30 | 2018-11-09 | 天津大学 | A kind of two-freedom probe feed mechanism |
| CN109765842A (en) * | 2019-01-17 | 2019-05-17 | 湖北工程学院 | A kind of micro-positioning table |
| CN110211627A (en) * | 2019-05-14 | 2019-09-06 | 江南大学 | High-precision large-stroke table space translation precisely locating platform effective greatly |
| CN112720461A (en) * | 2020-12-09 | 2021-04-30 | 大连理工大学 | Two-degree-of-freedom motion decoupling compliant mechanism capable of realizing high precision, large stroke and high frequency response |
| CN114473543A (en) * | 2022-04-18 | 2022-05-13 | 北京航空航天大学杭州创新研究院 | Six-degree-of-freedom precision motion platform based on flexible mechanism |
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| CN105345760A (en) * | 2015-11-23 | 2016-02-24 | 清华大学 | Large-stroke two-dimensional servo platform and measuring method with optical gratings |
| CN105345760B (en) * | 2015-11-23 | 2017-03-29 | 清华大学 | Big stroke two-dimensional nano servo platform and the measuring method using grating |
| CN105643604A (en) * | 2016-03-25 | 2016-06-08 | 西安电子科技大学 | Four-freedom-degree micro motion soft system |
| CN105880140A (en) * | 2016-03-31 | 2016-08-24 | 天津大学 | Two-dimensional ultrasonic vibration platform based on flexure hinge structure |
| CN105880140B (en) * | 2016-03-31 | 2018-07-27 | 天津大学 | A kind of two dimensional ultrasonic vibration platform based on flexible hinge structure |
| CN106251909B (en) * | 2016-08-19 | 2019-08-02 | 天津大学 | A kind of high-precision, big stroke freedom degree parallel connection mini positioning platform |
| CN106251909A (en) * | 2016-08-19 | 2016-12-21 | 天津大学 | A kind of high accuracy, big stroke freedom degree parallel connection mini positioning platform |
| CN106920578A (en) * | 2016-09-22 | 2017-07-04 | 澳门大学 | Two-dimensional constant force mechanism and the locating platform with the mechanism |
| CN106195556B (en) * | 2016-09-22 | 2017-12-29 | 中国工程物理研究院总体工程研究所 | A kind of XY θ plane three-freedom precision positioning platforms |
| CN106195556A (en) * | 2016-09-22 | 2016-12-07 | 中国工程物理研究院总体工程研究所 | A kind of XY θ plane three-freedom precision positioning platform |
| CN106328213A (en) * | 2016-10-27 | 2017-01-11 | 北京航空航天大学 | Two-axis micro-motion platform based on flexible hinge |
| CN106272364A (en) * | 2016-10-31 | 2017-01-04 | 山东大学 | A kind of symmetric parallel directly drives mobile decoupling high-precision servo platform |
| CN108776239A (en) * | 2018-03-30 | 2018-11-09 | 天津大学 | A kind of two-freedom probe feed mechanism |
| CN108389603A (en) * | 2018-04-03 | 2018-08-10 | 中国科学院宁波材料技术与工程研究所 | A kind of double composite and flexible parallelogram lindages |
| CN108389603B (en) * | 2018-04-03 | 2023-09-01 | 中国科学院宁波材料技术与工程研究所 | Double-composite flexible parallel four-bar mechanism |
| CN109765842A (en) * | 2019-01-17 | 2019-05-17 | 湖北工程学院 | A kind of micro-positioning table |
| CN110211627A (en) * | 2019-05-14 | 2019-09-06 | 江南大学 | High-precision large-stroke table space translation precisely locating platform effective greatly |
| CN110211627B (en) * | 2019-05-14 | 2023-12-22 | 江南大学 | High-precision large-stroke large-effective table top space translational precision positioning platform |
| CN112720461A (en) * | 2020-12-09 | 2021-04-30 | 大连理工大学 | Two-degree-of-freedom motion decoupling compliant mechanism capable of realizing high precision, large stroke and high frequency response |
| CN114473543A (en) * | 2022-04-18 | 2022-05-13 | 北京航空航天大学杭州创新研究院 | Six-degree-of-freedom precision motion platform based on flexible mechanism |
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