CN105880140A - Two-dimensional ultrasonic vibration platform based on flexure hinge structure - Google Patents
Two-dimensional ultrasonic vibration platform based on flexure hinge structure Download PDFInfo
- Publication number
- CN105880140A CN105880140A CN201610202687.6A CN201610202687A CN105880140A CN 105880140 A CN105880140 A CN 105880140A CN 201610202687 A CN201610202687 A CN 201610202687A CN 105880140 A CN105880140 A CN 105880140A
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- ultrasonic vibration
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- flexible hinge
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- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 238000003801 milling Methods 0.000 abstract description 10
- 230000004048 modification Effects 0.000 abstract 1
- 238000012986 modification Methods 0.000 abstract 1
- 230000008859 change Effects 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000005520 cutting process Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002173 cutting fluid Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B3/00—Methods or apparatus specially adapted for transmitting mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B3/02—Methods or apparatus specially adapted for transmitting mechanical vibrations of infrasonic, sonic, or ultrasonic frequency involving a change of amplitude
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Abstract
The invention discloses a two-dimensional ultrasonic vibration platform based on a flexure hinge structure. The two-dimensional ultrasonic vibration platform based on the flexure hinge structure comprises a two-freedom-degree movement decoupling flexible hinge platform body. The flexible hinge platform body comprises a square workbench arranged at the central position; four movement blocks are arranged around the square workbench and opposite to the four sides of the square workbench one by one; the inner side of each movement block is connected with one side of the square workbench opposite to the movement block through a rectangular flexible hinge of a parallel connection structure. The two ends of each movement block are connected with fixed blocks through rectangular flexible hinges of series connection structures. The fixed blocks are supported by supporting blocks which are fixed to a bearing plate. The supporting blocks are fixedly connected with the fixed blocks. Every two adjacent movement blocks in the four movement blocks are driven by two ultrasonic vibrators, and every two ultrasonic vibrators are perpendicularly arranged and supported by two supports; and the supports are fixed to the bearing plate. When micro milling is performed, and modification on a micro machine tool main shaft can be avoided by adopting the two-dimensional ultrasonic vibration platform based on the flexure hinge structure
Description
Technical field
The present invention relates to technical field, particularly relate to a kind of two dimensional ultrasonic vibration based on flexible hinge structure
Platform.
Background technology
In the every field of industry, the demand of high-accuracy micro parts is continuously increased, especially Aero-Space,
The fields such as biomedicine, telecommunications, environmental protection.Micro-cutting technology, the most micro-milling technology is at processing 3 D complex knot
The miniature parts aspect of structure has the advantage of its uniqueness, has become as the effective way processing small 3 D complex constitutional detail
Footpath.But the micro-Milling Process such as pottery, silicon, diamond, optical glass etc. for hard brittle material there is also cutter mill
Damage the problems such as serious, caloric value is big, surface quality is poor.For the processing of hard brittle material, some scholars propose ultrasonic
Vibrate the method combined with tradition manufacturing process.Current main application include ultrasonic wave added turning, ultrasonic wave added drilling,
Ultrasonic vibration aided grinding etc..Research shows that ultrasonic wave added processing significantly reduces cutting force relative to tradition processing, is beneficial to cutting fluid
Enter machining area reduction cutting temperature, beneficially plastic material chip breaking and reduction fragile material edge and collapse broken.Therefore, will be super
Acoustic vibration system milling micro-with the ultrasonic wave added that micro-Milling Process combines becomes the small parts machining of high hard brittle material
A kind of effective ways.
Main shaft precision, relative to tradition Milling Process, is had higher requirement by micro-Milling Process, therefore can not be as big machine
Bed is the same adds ultrasonic vibration system on machine tool chief axis.Therefore, for micro-Milling Process, design a kind of two-dimension vibration work
Platform can avoid the change to micro-machine tool chief axis.
Summary of the invention
The present invention solves technical problem present in known technology and a kind of two-dimensional ultrasound based on flexible hinge structure is provided
Vibration platen, when carrying out micro-Milling Process, uses this platform can avoid the change to micro-machine tool chief axis.
The present invention solves that technical problem is adopted the technical scheme that present in known technology: a kind of based on flexible hinge
The two dimensional ultrasonic vibration platform of structure, including two-freedom mobile decoupling flexible hinge platform, the motion of described two-freedom solves
Coupling flexible hinge platform includes a square workbench being centrally located, described square workbench be provided around four
Moving mass, four described moving mass are the most relative with four limits of described square workbench, the inner side of described moving mass and with
One limit of its relative described square workbench is connected by the rectangular flexible hinge of a parallel-connection structure, described motion
The two ends of block are respectively connected with fixed block by the rectangular flexible hinge of a cascaded structure, and described fixed block uses a bracer to prop up
Support, described bracer is fixed on loading plate, and described bracer is affixed with described fixed block；Phase in four described moving mass
Two adjacent moving mass are driven by two Under Ultrasonic Vibration movers respectively, and two described Under Ultrasonic Vibration movers are mutually perpendicular to arrange, two
Described Under Ultrasonic Vibration mover is supported by two supports respectively, and described support is fixed on described loading plate.
Described supersonic vibration attached bag includes ultrasonic transducer and ultrasonic amplitude transformer, and described ultrasonic amplitude transformer uses flexible flange to support,
Described flexible flange is fixing on the bracket.
Away from being respectively provided with a buckstay outside two moving mass of described Under Ultrasonic Vibration mover in four described moving mass, described just
Property beam is parallel with relative described moving mass, and described buckstay is one-body molded with two the described fixed blocks being positioned at its two ends.
The present invention has the advantage that with good effect: by using the ultrasonic vibrator exciting string of orthogonal both direction
The two-freedom mobile decoupling flexible hinge that the rectangular flexible hinge of connection structure combines with the rectangular flexible hinge of parallel-connection structure
Platform, it is possible to achieve the supersonic vibration of both direction, when carrying out micro-Milling Process, uses this platform it can be avoided that to micro-
The change of machine tool chief axis, makes equipment change less.Ultrasonic amplitude transformer has circular section flexible hinge structure by employing
Flange clamps, and can reduce the change of the Under Ultrasonic Vibration mover frequency caused because of clamping.And present configuration is simple, can
Transplantability is strong and can regulate frequency of vibration and the vibration amplitude of workbench according to demand, applied widely.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention；
Fig. 2 is the front view of the present invention；
Fig. 3 is the top view of the present invention；
Fig. 4 is the supersonic vibration minor structure schematic diagram of the present invention；
Fig. 5 is the left view of Fig. 4.
In figure: 1, loading plate；2, support；3, bracer is propped up；4, two-freedom mobile decoupling flexible hinge platform；5、
Under Ultrasonic Vibration mover；6, square workbench；7, fixed block；8, the rectangular flexible hinge of parallel-connection structure；9, moving mass；
10, the rectangular flexible hinge of cascaded structure；11, buckstay；12, ultrasonic transducer；13, ultrasonic amplitude transformer；14、
Pre-stressed bolt；15, back shroud；16, piezoelectric ceramic piece；17, electrode 18, flexible flange.
Detailed description of the invention
For the summary of the invention of the present invention, feature and effect can be further appreciated that, hereby enumerate following example, and coordinate accompanying drawing
Describe in detail as follows:
Refer to Fig. 1～Fig. 4, a kind of two dimensional ultrasonic vibration platform based on flexible hinge structure, move including two-freedom
Decoupling flexible hinge platform 4, described two-freedom mobile decoupling flexible hinge platform 4 includes a square being centrally located
Workbench 6, described square workbench 6 be provided around four moving mass 9, four described moving mass 9 and described pros
Four limits of shape workbench 6 are relative one by one, the inner side of described moving mass 9 and described square workbench 6 corresponding thereto
One limit is connected by the rectangular flexible hinge 8 of a parallel-connection structure, and the two ends of described moving mass 9 are respectively by a series connection
The rectangular flexible hinge 10 of structure is connected with fixed block 7, and described fixed block 7 uses a bracer 3 to support, described bracer
3 are fixed on loading plate 1, and described bracer 3 is affixed with described fixed block 7.
Two moving mass 9 adjacent in four described moving mass 9 are driven by two Under Ultrasonic Vibration movers 5, described in two respectively
Under Ultrasonic Vibration mover 5 is mutually perpendicular to arrange, two described Under Ultrasonic Vibration movers 5 are supported by two supports 2 respectively, described support 2
It is fixed on described loading plate 1.
In the present embodiment, described Under Ultrasonic Vibration mover 5 includes ultrasonic transducer 12 and ultrasonic amplitude transformer 13, described ultrasonic change
Width bar 13 uses flexible flange 18 to support, and described flexible flange 18 is fixed on described support 2.At described ultrasonic amplitude of fluctuation
Being provided for gripping the flexible flange 18 of Under Ultrasonic Vibration mover 5 on bar 13, described flexible flange 18 can reduce because of folder
Hold and cause the change of Under Ultrasonic Vibration mover frequency.Described flexible flange 18 is connected with described ticker support 2 by bolt,
Described ticker support 2 lower end is bolted with described loading plate 1.Described ultrasonic transducer 12 uses sandwich to tie
Structure, is made up of pre-stressed bolt 14, back shroud 15, piezoelectric ceramic piece 16 and electrode 17.Described ultrasonic amplitude transformer 13
Use the ladder-type structure with chamfering circle.
In the present embodiment, away from each outside two moving mass 9 of described Under Ultrasonic Vibration mover 5 in four described moving mass 9
Being provided with a buckstay 11, described buckstay 11 is parallel with relative described moving mass 9, described buckstay 11 be positioned at it
Two described fixed blocks 7 at two ends are one-body molded.Buckstay 11 is for strengthening the rigidity of whole flexible hinge platform.
During working platform, ultrasonic-frequency power supply is connected with described electrode 17 by wire, and described ultrasonic transducer 12 is by high-frequency electrical
Circulation changes high-frequency mechanical vibration into, and high-frequency mechanical vibration carries out Amplitude amplification by described ultrasonic amplitude transformer 13.Described ultrasonic
High-frequency mechanical vibration is delivered to described two-freedom mobile decoupling flexible hinge platform 4 by horn 13, makes described two freely
The square workbench 6 of degree mobile decoupling flexible hinge platform 4 carries out high-frequency mechanical vibration.By regulation ultrasonic-frequency power supply
Power and frequency can regulate amplitude and the frequency of square workbench 6 vibration.
Although the preferred embodiments of the present invention being described above in conjunction with accompanying drawing, but the invention is not limited in above-mentioned
Detailed description of the invention, above-mentioned detailed description of the invention is only schematically, is not restrictive, this area general
Logical technical staff is under the enlightenment of the present invention, in the case of without departing from present inventive concept and scope of the claimed protection,
Can be to make a lot of form, within these belong to protection scope of the present invention.
Claims (3)
1. a two dimensional ultrasonic vibration platform based on flexible hinge structure, it is characterised in that include that two-freedom motion solves
Coupling flexible hinge platform, described two-freedom mobile decoupling flexible hinge platform includes the square work being centrally located
Platform, described square workbench be provided around four moving mass, four described moving mass and described square workbench
Four limits are relative one by one, and a limit of the inner side of described moving mass and described square workbench corresponding thereto passes through one also
The rectangular flexible hinge of connection structure is connected, the two ends of described moving mass respectively by the rectangular flexible hinge of a cascaded structure with
Fixed block is connected, and described fixed block uses block supports, and described bracer is fixed on loading plate, described bracer with
Described fixed block is affixed；Two moving mass adjacent in four described moving mass are driven by two Under Ultrasonic Vibration movers respectively, and two
Individual described Under Ultrasonic Vibration mover is mutually perpendicular to arrange, two described Under Ultrasonic Vibration movers are supported by two supports respectively, described support
It is fixed on described loading plate.
Two dimensional ultrasonic vibration platform based on flexible hinge structure the most according to claim 1, it is characterised in that institute
Stating supersonic vibration attached bag and include ultrasonic transducer and ultrasonic amplitude transformer, described ultrasonic amplitude transformer uses flexible flange to support, described
Flexible flange is fixing on the bracket.
Two dimensional ultrasonic vibration platform based on flexible hinge structure the most according to claim 1, it is characterised in that four
Away from being respectively provided with a buckstay outside two moving mass of described Under Ultrasonic Vibration mover in individual described moving mass, described buckstay with
Relative described moving mass is parallel, and described buckstay is one-body molded with two the described fixed blocks being positioned at its two ends.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610202687.6A CN105880140B (en) | 2016-03-31 | 2016-03-31 | A kind of two dimensional ultrasonic vibration platform based on flexible hinge structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610202687.6A CN105880140B (en) | 2016-03-31 | 2016-03-31 | A kind of two dimensional ultrasonic vibration platform based on flexible hinge structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105880140A true CN105880140A (en) | 2016-08-24 |
| CN105880140B CN105880140B (en) | 2018-07-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610202687.6A Expired - Fee Related CN105880140B (en) | 2016-03-31 | 2016-03-31 | A kind of two dimensional ultrasonic vibration platform based on flexible hinge structure |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106733571A (en) * | 2016-12-09 | 2017-05-31 | 天津大学 | Single excitation longitudinal bending complex vibration ultrasonic transducer |
| CN107042198A (en) * | 2017-01-18 | 2017-08-15 | 皮钧 | A kind of two dimensional ultrasonic vibration processing unit (plant) based on guide wire |
| CN107350139A (en) * | 2017-08-03 | 2017-11-17 | 河南理工大学 | Integrated ultrasonic transduction amplitude changing method and system with vibration rejection function for flange |
| CN107470995A (en) * | 2017-09-08 | 2017-12-15 | 天津科技大学 | A kind of shake table for precision ultrasonic processing |
| CN107694892A (en) * | 2017-11-17 | 2018-02-16 | 杭州成功超声设备有限公司 | A kind of bar type ultrasonic system structure of super high power |
| CN108176574A (en) * | 2017-12-19 | 2018-06-19 | 天津工业大学 | A kind of more amplitude piezoelectric ultrasonic transducers of series composite structure double frequency |
| CN108466069A (en) * | 2018-05-21 | 2018-08-31 | 深圳市瑞德森智能设备有限责任公司 | Workbench and mechanical processing machine |
| CN109530198A (en) * | 2019-01-10 | 2019-03-29 | 河北工业大学 | A kind of submissive shaking platform of two dimension that wedge shape pre-tightens |
| CN110369248A (en) * | 2019-07-16 | 2019-10-25 | 东北大学 | A kind of varied angle two dimensional ultrasonic vibration auxiliary tooling platform based on flexible hinge |
| CN111482347A (en) * | 2020-04-15 | 2020-08-04 | 南京航空航天大学 | Ultrasonic vibration platform for machining large parts and operation process thereof |
| CN111604249A (en) * | 2020-04-15 | 2020-09-01 | 南京航空航天大学 | Large-amplitude ultrasonic vibration platform and operation process thereof |
| CN112713327A (en) * | 2020-12-22 | 2021-04-27 | 宁波格劳博智能工业有限公司 | Full-automatic recovery workstation of waste earthen bowl body residual material of lithium battery anode material |
| CN113522709A (en) * | 2021-06-18 | 2021-10-22 | 天津大学 | Detachable two-dimensional ultrasonic vibration platform based on flexible hinge structure |
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| CN104625172A (en) * | 2015-01-09 | 2015-05-20 | 天津大学 | Supersonic-vibration-assisted micro-milling system |
| CN104993735A (en) * | 2015-07-21 | 2015-10-21 | 安徽理工大学 | Two-degree-of-freedom precision micro positioning system and two-degree-of-freedom precision micro positioning method for giant magnetostrictive actuation |
| CN204906223U (en) * | 2015-07-21 | 2015-12-23 | 安徽理工大学 | Accurate little positioning system of giant magnetostrictive driven two -degree -of -freedom |
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| JP3144575U (en) * | 2008-06-23 | 2008-09-04 | 精研工業株式会社 | 2 axis plane moving stage |
| CN103817064A (en) * | 2014-02-28 | 2014-05-28 | 大连交通大学 | Two-dimension piezoelectric vibration platform |
| CN104505128A (en) * | 2014-12-26 | 2015-04-08 | 天津大学 | Two-freedom-degree, large-travel and large-load micro-positioning platform |
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Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106733571A (en) * | 2016-12-09 | 2017-05-31 | 天津大学 | Single excitation longitudinal bending complex vibration ultrasonic transducer |
| CN106733571B (en) * | 2016-12-09 | 2019-12-17 | 天津大学 | Single excitation longitudinal bending composite vibration ultrasonic transducer |
| CN107042198B (en) * | 2017-01-18 | 2019-05-31 | 皮钧 | A kind of two dimensional ultrasonic vibration processing unit (plant) based on guide wire |
| CN107042198A (en) * | 2017-01-18 | 2017-08-15 | 皮钧 | A kind of two dimensional ultrasonic vibration processing unit (plant) based on guide wire |
| CN107350139A (en) * | 2017-08-03 | 2017-11-17 | 河南理工大学 | Integrated ultrasonic transduction amplitude changing method and system with vibration rejection function for flange |
| CN107350139B (en) * | 2017-08-03 | 2022-07-08 | 汇专科技集团股份有限公司 | Integrated ultrasonic transduction amplitude changing method and system with vibration rejection function for flange |
| CN107470995A (en) * | 2017-09-08 | 2017-12-15 | 天津科技大学 | A kind of shake table for precision ultrasonic processing |
| CN107470995B (en) * | 2017-09-08 | 2023-11-24 | 天津科技大学 | Vibrating table for precise ultrasonic machining |
| CN107694892A (en) * | 2017-11-17 | 2018-02-16 | 杭州成功超声设备有限公司 | A kind of bar type ultrasonic system structure of super high power |
| CN108176574A (en) * | 2017-12-19 | 2018-06-19 | 天津工业大学 | A kind of more amplitude piezoelectric ultrasonic transducers of series composite structure double frequency |
| CN108466069A (en) * | 2018-05-21 | 2018-08-31 | 深圳市瑞德森智能设备有限责任公司 | Workbench and mechanical processing machine |
| CN109530198A (en) * | 2019-01-10 | 2019-03-29 | 河北工业大学 | A kind of submissive shaking platform of two dimension that wedge shape pre-tightens |
| CN109530198B (en) * | 2019-01-10 | 2024-04-09 | 河北工业大学 | Wedge-shaped pre-tightening two-dimensional compliant vibration platform |
| CN110369248A (en) * | 2019-07-16 | 2019-10-25 | 东北大学 | A kind of varied angle two dimensional ultrasonic vibration auxiliary tooling platform based on flexible hinge |
| CN111482347A (en) * | 2020-04-15 | 2020-08-04 | 南京航空航天大学 | Ultrasonic vibration platform for machining large parts and operation process thereof |
| CN111604249A (en) * | 2020-04-15 | 2020-09-01 | 南京航空航天大学 | Large-amplitude ultrasonic vibration platform and operation process thereof |
| CN111482347B (en) * | 2020-04-15 | 2021-08-10 | 南京航空航天大学 | Ultrasonic vibration platform for machining large parts and operation process thereof |
| CN112713327A (en) * | 2020-12-22 | 2021-04-27 | 宁波格劳博智能工业有限公司 | Full-automatic recovery workstation of waste earthen bowl body residual material of lithium battery anode material |
| CN113522709A (en) * | 2021-06-18 | 2021-10-22 | 天津大学 | Detachable two-dimensional ultrasonic vibration platform based on flexible hinge structure |
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Address after: 300350 Haijing garden, Haihe Education Park, Jinnan, Tianjin, 135, Tianjin University. Patentee after: Tianjin University Address before: 300072 Tianjin City, Nankai District Wei Jin Road No. 92, Tianjin University Patentee before: Tianjin University |
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Granted publication date: 20180727 Termination date: 20200331 |