CN204906223U - Accurate little positioning system of giant magnetostrictive driven two -degree -of -freedom - Google Patents

Accurate little positioning system of giant magnetostrictive driven two -degree -of -freedom Download PDF

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Publication number
CN204906223U
CN204906223U CN201520536124.1U CN201520536124U CN204906223U CN 204906223 U CN204906223 U CN 204906223U CN 201520536124 U CN201520536124 U CN 201520536124U CN 204906223 U CN204906223 U CN 204906223U
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China
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displacement transducer
flexible hinge
super
wire
freedom
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CN201520536124.1U
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Chinese (zh)
Inventor
喻曹丰
王传礼
张辉
冒鹏飞
魏本柱
杨娇艳
鲍焱
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Anhui University of Science and Technology
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Anhui University of Science and Technology
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Abstract

The utility model discloses an accurate little positioning system of giant magnetostrictive driven two -degree -of -freedom relates to automation equipment technical field. Including base, flexible hinge platform, dog, anchor clamps, data collection card, wire, programme -controlled electric current source, displacement sensor, giant magnetostrictive driver and probe power. Can realize two -degree -of -freedom synchro control, have super high displacement resolution ratio characteristic, can realize that closed -loop control reaches precision positioning.

Description

The accurate micro-positioning of the two degrees of freedom that ultra-magnetic telescopic drives
Technical field
The utility model relates to technical field of automation equipment, is specifically related to the accurate micro-positioning of two degrees of freedom that a kind of ultra-magnetic telescopic drives.
Background technology
In the urgent need to high-precision location technology in the fields such as large scale integrated circuit, space technology, precision optical machinery, Precision Machining.In traditional high-accuracy position system, the piezoelectric ceramic actuator that adopts more as feed system, but because of piezoelectric ceramic actuator have that operating voltage is high, actuating force is little, the delayed shortcoming such as large, make the positioning precision of navigation system be difficult to improve.
Giant magnetostrictive material is a kind of novel magnetostriction functional material, can produce up to 1500 ~ 2000ppm strain value high under downfield drives; The thrust that the ultra-magnetic telescopic bar that diameter is about 10mm can produce about 2000N is large; Energy conversion efficiency is up to about 70%; Response frequency reaches as high as 2000Hz; And its Magnetostriction not time to time change, without tired, without overheating failure problem.
Super-magnetostrictive drive is a kind of magnetic-machine transducer utilizing the magnetostrictive effect of giant magnetostrictive material to be made, can be applicable to that precision valve controls, delicate flow controls, the feed system of Digit Control Machine Tool and precision machine tool, there is the excellent specific properties such as nano-grade displacement accuracy, fast response time, High power output, structure are simple.
The locating platform that ultra-magnetic telescopic drives adopts super-magnetostrictive drive as a kind of precision positioning device of drive system.Compared with adopting the locating platform of conventional piezoelectric ceramic driver, the locating platform adopting ultra-magnetic telescopic to drive has fast response time, and control precision is high, bear the excellent properties such as load is large.But super-magnetostrictive drive has saturation nonlinearity, hysteresis characteristic, make the hysterisis error of its output displacement reach as high as about 20%, the requirement of precision positioning can not be met.
At present, mostly the detent mechanism that ultra-magnetic telescopic drives is to improve from structure, the such as patent of application number 200610150582.7 proposes the micro-displacement mechanism that a kind of giant magnetostrictive material drives, utilize lever principle, enlarger is set between magnetostrictive rod and take-off lever, realizes micrometric displacement and amplify; Also the such as patent of application number 201110446226.0 proposes a kind of magnetostriction type linear actuator of linear convergent rate, adopt two radial row's winding layer numbers different, around to identical excitation coil, mutual series connection, make two sections, the front and back deformation of magnetostrictive rod inconsistent, the linearity after superposition is better than traditional approach.
But solve the magnetic hysteresis nonlinear problem of locating platform that ultra-magnetic telescopic drives, only improving from structure, fundamentally can not solve the problem of lack accuracy by setting up new mechanism or new construction.
Utility model content
For the deficiencies in the prior art, the utility model discloses the accurate micro-positioning of two degrees of freedom that a kind of ultra-magnetic telescopic drives, when can solve the drive system utilizing super-magnetostrictive drive as locating platform at present, the simple problem adopting the mode of modified node method fundamentally can not improve its positioning precision.
For realizing above object, the utility model is achieved by the following technical programs: the accurate micro-positioning of the two degrees of freedom that a kind of ultra-magnetic telescopic drives.Comprise base, flexible hinge platform, block, fixture, data collecting card, wire, programmable current source, displacement transducer, super-magnetostrictive drive and probe power;
Described flexible hinge platform is provided with X to driver mounting groove and Y-direction driver mounting groove, described X is positioned at the adjacent dual-side of flexible hinge platform to driver mounting groove and Y-direction driver mounting groove, and described flexible hinge platform is fixed by screws on base;
Described data collecting card is connected with programmable current source by wire, is responsible for sending control signal;
Described data collecting card is connected with displacement transducer by wire, is responsible for gathering the displacement signal measured by displacement transducer;
Described programmable current source is connected with super-magnetostrictive drive through wire, is responsible for super-magnetostrictive drive and provides drive current;
Described probe power is connected with displacement transducer through wire, is responsible for displacement transducer and provides power supply.
Wherein, described super-magnetostrictive drive comprises super-magnetostrictive drive one and super-magnetostrictive drive two; Described super-magnetostrictive drive one is fixed in the Y-direction driver mounting groove of flexible hinge platform; Described super-magnetostrictive drive two is fixed on the X of flexible hinge platform in driver mounting groove.
Wherein, described displacement transducer comprises displacement transducer one and displacement transducer two; Described displacement transducer one is fixed on flexible hinge platform by fixture one; Described displacement transducer two is fixed on flexible hinge platform by fixture two.
Wherein, described block comprises block one and block two; Described block one is fixed on flexible hinge platform, contacts with the contact of displacement transducer one; Described block two is fixed on flexible hinge platform, contacts with the contact of displacement transducer two.
Wherein, also computer is comprised; Described computer is connected with data collecting card by wire, is responsible for processing the data collected, and sends control signal in data collecting card.
Wherein, described wire comprises data wire and power line.
The utility model discloses the accurate micro-positioning of two degrees of freedom that a kind of ultra-magnetic telescopic drives, adopt two super-magnetostrictive drives as the drive system of accurate mini positioning platform, under ensureing that locating platform has the prerequisite of the excellent specific properties such as fast response time, load are large, precise hard_drawn tuhes, realize two degrees of freedom Synchronization Control;
Adopt flexure hinge mechanism, the output displacement of super-magnetostrictive drive is amplified, also there is the displacement resolution characteristic of superelevation while ensureing that there is mechanical friction, gapless characteristic, autokinesis high characteristic;
Adopt the displacement of displacement transducer Real-Time Monitoring locating platform, and feed back in the middle of computer by data collecting card, adopt the error between the elimination of correlated error backoff algorithm with desired displacement, realize closed-loop control, reach the requirement of precision positioning.
Accompanying drawing explanation
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only embodiments more of the present utility model, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is overall structure schematic diagram of the present utility model;
Fig. 2 is the structural representation of flexible hinge platform in the utility model;
Fig. 3 is the structural representation of data collecting card in the utility model;
Fig. 4 is the structural representation of programmable current source in the utility model;
Fig. 5 is the structural representation of probe power in the utility model;
Fig. 6 is the structural representation of super-magnetostrictive drive one in the utility model;
Fig. 7 is the structural representation of super-magnetostrictive drive two in the utility model;
Fig. 8 is the structural representation of displacement transducer one in the utility model;
Fig. 9 is the structural representation of displacement transducer two in the utility model.
In figure 1, computer, 2, data wire, 3, first wire, 4, probe power, 5, first power line, 6, second source line, 7, 3rd power line, 8, 4th power line, 9, fixture one, 10, displacement transducer one, 11, block one, 12, base, 13, flexible hinge platform, 14, fixture two, 15, displacement transducer two, 16, block two, 17, super-magnetostrictive drive one, 18, super-magnetostrictive drive two, 19, second wire, 20, privates, 21, privates, 22, 5th wire, 23, 6th wire, 24, programmable current source, 25, 7th wire, 26, 8th wire, 27, data collecting card, 131, X to driver mounting groove, 132, working region, 133, flexure hinge mechanism, 134, Y-direction driver mounting groove, 271, input port one, 272, input port two, 273, output port one, 274, output port two, 241, control port one, 242, current source positive pole one, 243, current source negative pole one, 244, control port two, 245, current source positive pole two, 246, current source negative pole two, 41, positive source one, 42, power cathode one, 43, positive source two, 44, power cathode two, 171, coil electrode one, 172, coil negative pole one, 181, coil electrode two, 182, coil negative pole two, 101, displacement transducer signal line one, 102, displacement transducer positive source one, 103, displacement transducer power cathode one, 151, displacement transducer signal line two, 152, displacement transducer positive source two, 153, displacement transducer power cathode two.
Embodiment
For making the object of the utility model embodiment, technical scheme and advantage clearly, below in conjunction with the accompanying drawing in the utility model embodiment, technical scheme in the utility model embodiment is clearly and completely described, obviously, described embodiment is the utility model part embodiment, instead of whole embodiments.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the every other embodiment obtained under creative work prerequisite, all belong to the scope of the utility model protection.
As shown in Figures 1 to 9, the accurate micro-positioning of the two degrees of freedom that a kind of ultra-magnetic telescopic described in the utility model embodiment drives.Comprise base, flexible hinge platform, block, fixture, data collecting card, wire, programmable current source, displacement transducer, super-magnetostrictive drive and probe power;
Described flexible hinge platform is provided with X to driver mounting groove and Y-direction driver mounting groove, described X is positioned at the adjacent dual-side of flexible hinge platform to driver mounting groove and Y-direction driver mounting groove, and described flexible hinge platform is fixed by screws on base;
Described data collecting card is connected with programmable current source by wire, is responsible for sending control signal;
Described data collecting card is connected with displacement transducer by wire, is responsible for gathering the displacement signal measured by displacement transducer;
Described programmable current source is connected with super-magnetostrictive drive through wire, is responsible for super-magnetostrictive drive and provides drive current;
Described probe power is connected with displacement transducer through wire, is responsible for displacement transducer and provides power supply.
Wherein, described super-magnetostrictive drive comprises super-magnetostrictive drive one and super-magnetostrictive drive two; Described super-magnetostrictive drive one is fixed in the Y-direction driver mounting groove of flexible hinge platform; Described super-magnetostrictive drive two is fixed on the X of flexible hinge platform in driver mounting groove.
Wherein, described displacement transducer comprises displacement transducer one and displacement transducer two; Described displacement transducer one is fixed on flexible hinge platform by fixture one; Described displacement transducer two is fixed on flexible hinge platform by fixture two.
Wherein, described block comprises block one and block two; Described block one is fixed on flexible hinge platform, contacts with the contact of displacement transducer one; Described block two is fixed on flexible hinge platform, contacts with the contact of displacement transducer two.
Wherein, also computer is comprised; Described computer is connected with data collecting card by wire, is responsible for processing the data collected, and sends control signal in data collecting card.
Wherein, described wire comprises data wire and power line.
Computer 1 is connected with data collecting card 27 by data wire 2, is responsible for processing the data collected, and sends control signal in data collecting card 27; The output port 1 of data collecting card 27 is connected with the control port 1 of programmable current source 24 through the 7th wire 25; The output port 2 274 of data collecting card 27 is connected with the control port 2 244 of programmable current source 24 through the 8th wire 26, is responsible for sending the control signal after machine 1 process as calculated; The input port 1 of data collecting card 27 is connected with the displacement transducer signal line 2 151 of displacement transducer 2 15 through the 6th wire 23, is responsible for gathering the displacement signal measured by displacement transducer 2 15; The input port 2 272 of data collecting card 27 is connected with the displacement transducer signal line 1 of displacement transducer 1 through the first wire 3; Be responsible for gathering the displacement signal measured by displacement transducer 1; The current source positive pole 1 of programmable current source 24 is connected with the coil electrode 1 of super-magnetostrictive drive 1 through the 5th wire 22; The current source negative pole 1 of programmable current source 24 is connected with the coil negative pole 1 of super-magnetostrictive drive 1 through privates 21, is responsible for super-magnetostrictive drive 1 and provides drive current; The current source positive pole 2 245 of programmable current source 24 is connected with the coil electrode 2 181 of super-magnetostrictive drive 2 18 through the 3rd line 20; The current source negative pole 2 246 of programmable current source 24 is connected with the coil negative pole 2 182 of super-magnetostrictive drive 2 18 through the second wire 19, is responsible for super-magnetostrictive drive 2 18 and provides drive current; The positive source 1 of probe power 4 is connected with the displacement transducer positive source 2 152 of displacement transducer 2 15 through the first power line 5; The power cathode 1 of probe power 4 is connected with the displacement transducer power cathode 2 153 of displacement transducer 2 15 through second source line 6, is responsible for displacement transducer 2 15 and provides power supply; The positive source 2 43 of probe power 4 is connected with the displacement transducer positive source 1 of displacement transducer 1 through the 3rd power line 7; The power cathode 2 44 of probe power 4 is connected with the displacement transducer power cathode 1 of displacement transducer 1 through the 4th power line 8, is responsible for displacement transducer 1 and provides power supply; Super-magnetostrictive drive 1 is fixed in the Y-direction driver mounting groove 131 of flexible hinge platform 13, is responsible for flexible hinge platform 13 and provides Y-direction actuating force; Super-magnetostrictive drive 2 18 is fixed on the X of flexible hinge platform 13 in driver mounting groove 134, and being responsible for flexible hinge platform 13 provides X to actuating force;
Displacement transducer 1 is fixed on flexible hinge platform 13 by fixture 1, is responsible for measuring the deformation quantity on flexible hinge platform 13Y direction; Displacement transducer 2 15 is fixed on flexible hinge platform 13 by fixture 2 14, is responsible for measuring the deformation quantity on flexible hinge platform 13X direction; Block 1 is fixed on flexible hinge platform 13, contacts with the contact of displacement transducer 1; Block 2 16 is fixed on flexible hinge platform 13, contacts with the contact of displacement transducer 2 15, plays the effect regulating displacement transducer zero-bit; Flexible hinge platform 13 is fixed by screws on base 12, and flexure hinge mechanism 133 and working region 132 are formed an entirety by flexible hinge platform 13, it is the working region of workbench, wherein flexure hinge mechanism 133 has displacement enlargement effect, and compared with traditional guide rail shifter, there is the characteristics such as mechanical friction, gapless, autokinesis height.
During work, the mobile route that workbench is desirable is set in computer 1, is calculated the current signal needing to export by related algorithm, and be sent to through data collecting card 27 in the control port of programmable current source 24; The corresponding current signal that controls of signal output that programmable current source 24 receives control port outputs in the drive coil of super-magnetostrictive drive 1 and super-magnetostrictive drive 2 18, produces the change of Magnetic control super-magnetostrictive drive 1 and super-magnetostrictive drive 2 18 power output; The flexure hinge mechanism part that the power output of super-magnetostrictive drive 1 and super-magnetostrictive drive 2 18 is loaded into flexible hinge platform 13 makes it to produce deformation, and then makes working region produce displacement; Displacement transducer 1 and displacement transducer 2 15 detect the displacement in flexible hinge platform 13Y, X both direction respectively, and feed back in the middle of computer 1 by data collecting card 27, and compared with desirable moving displacement by the algorithm of feedback regulation, the error between the mobile route of flexible hinge locating platform 13 and desirable mobile route is reduced.
The utility model discloses the accurate micro-positioning of two degrees of freedom that a kind of ultra-magnetic telescopic drives in sum, adopt two super-magnetostrictive drives as the drive system of accurate mini positioning platform, under ensureing that locating platform has the prerequisite of the excellent specific properties such as fast response time, load are large, precise hard_drawn tuhes, realize two degrees of freedom Synchronization Control; Adopt flexure hinge mechanism, the output displacement of super-magnetostrictive drive is amplified, also there is the displacement resolution characteristic of superelevation while ensureing that there is mechanical friction, gapless characteristic, autokinesis high characteristic; Adopt the displacement of displacement transducer Real-Time Monitoring locating platform, and feed back in the middle of computer by data collecting card, adopt the error between the elimination of correlated error backoff algorithm with desired displacement, realize closed-loop control, reach the requirement of precision positioning.
It should be noted that, in this article, the such as relational terms of first and second grades and so on is only used for an entity or operation to separate with another entity or operating space, and not necessarily requires or imply the relation that there is any this reality between these entities or operation or sequentially.And, term " comprises ", " comprising " or its any other variant are intended to contain comprising of nonexcludability, thus make to comprise the process of a series of key element, method, article or equipment and not only comprise those key elements, but also comprise other key elements clearly do not listed, or also comprise by the intrinsic key element of this process, method, article or equipment.When not more restrictions, the key element limited by statement " comprising ... ", and be not precluded within process, method, article or the equipment comprising described key element and also there is other identical element.
Above embodiment only in order to the technical solution of the utility model to be described, is not intended to limit; Although be described in detail the utility model with reference to previous embodiment, those of ordinary skill in the art is to be understood that: it still can be modified to the technical scheme described in foregoing embodiments, or carries out equivalent replacement to wherein portion of techniques feature; And these amendments or replacement, do not make the essence of appropriate technical solution depart from the spirit and scope of each embodiment technical scheme of the utility model.

Claims (6)

1. the accurate micro-positioning of the two degrees of freedom of ultra-magnetic telescopic driving, is characterized in that: comprise base, flexible hinge platform, block, fixture, data collecting card, wire, programmable current source, displacement transducer, super-magnetostrictive drive and probe power;
Described flexible hinge platform is provided with X to driver mounting groove and Y-direction driver mounting groove, described X is positioned at the adjacent dual-side of flexible hinge platform to driver mounting groove and Y-direction driver mounting groove, and described flexible hinge platform is fixed by screws on base;
Described data collecting card is connected with programmable current source by wire, is responsible for sending control signal;
Described data collecting card is connected with displacement transducer by wire, is responsible for gathering the displacement signal measured by displacement transducer;
Described programmable current source is connected with super-magnetostrictive drive through wire, is responsible for super-magnetostrictive drive and provides drive current;
Described probe power is connected with displacement transducer through wire, is responsible for displacement transducer and provides power supply.
2. the accurate micro-positioning of two degrees of freedom of ultra-magnetic telescopic driving as claimed in claim 1, is characterized in that: described super-magnetostrictive drive comprises super-magnetostrictive drive one and super-magnetostrictive drive two; Described super-magnetostrictive drive one is fixed in the Y-direction driver mounting groove of flexible hinge platform; Described super-magnetostrictive drive two is fixed on the X of flexible hinge platform in driver mounting groove.
3. the accurate micro-positioning of two degrees of freedom of ultra-magnetic telescopic driving as claimed in claim 1, is characterized in that: described displacement transducer comprises displacement transducer one and displacement transducer two; Described displacement transducer one is fixed on flexible hinge platform by fixture one; Described displacement transducer two is fixed on flexible hinge platform by fixture two.
4. the accurate micro-positioning of the two degrees of freedom that the ultra-magnetic telescopic as described in claim 1 or 3 drives, is characterized in that: described block comprises block one and block two; Described block one is fixed on flexible hinge platform, contacts with the contact of displacement transducer one; Described block two is fixed on flexible hinge platform, contacts with the contact of displacement transducer two.
5. the accurate micro-positioning of two degrees of freedom of ultra-magnetic telescopic driving as claimed in claim 1, is characterized in that: also comprise computer; Described computer is connected with data collecting card by wire, is responsible for processing the data collected, and sends control signal in data collecting card.
6. the accurate micro-positioning of two degrees of freedom of ultra-magnetic telescopic driving as claimed in claim 1, is characterized in that: described wire comprises data wire and power line.
CN201520536124.1U 2015-07-21 2015-07-21 Accurate little positioning system of giant magnetostrictive driven two -degree -of -freedom Withdrawn - After Issue CN204906223U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104993735A (en) * 2015-07-21 2015-10-21 安徽理工大学 Two-degree-of-freedom precision micro positioning system and two-degree-of-freedom precision micro positioning method for giant magnetostrictive actuation
CN105880140A (en) * 2016-03-31 2016-08-24 天津大学 Two-dimensional ultrasonic vibration platform based on flexure hinge structure
CN110696028A (en) * 2019-10-30 2020-01-17 温州职业技术学院 Ultra-precise micro-nano operating system controlled by artificial intelligence

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104993735A (en) * 2015-07-21 2015-10-21 安徽理工大学 Two-degree-of-freedom precision micro positioning system and two-degree-of-freedom precision micro positioning method for giant magnetostrictive actuation
CN104993735B (en) * 2015-07-21 2017-04-12 安徽理工大学 Two-degree-of-freedom precision micro positioning system and two-degree-of-freedom precision micro positioning method for giant magnetostrictive actuation
CN105880140A (en) * 2016-03-31 2016-08-24 天津大学 Two-dimensional ultrasonic vibration platform based on flexure hinge structure
CN105880140B (en) * 2016-03-31 2018-07-27 天津大学 A kind of two dimensional ultrasonic vibration platform based on flexible hinge structure
CN110696028A (en) * 2019-10-30 2020-01-17 温州职业技术学院 Ultra-precise micro-nano operating system controlled by artificial intelligence

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