CN203747692U - Precise adjustment control system for micro power - Google Patents

Precise adjustment control system for micro power Download PDF

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Publication number
CN203747692U
CN203747692U CN201420093305.7U CN201420093305U CN203747692U CN 203747692 U CN203747692 U CN 203747692U CN 201420093305 U CN201420093305 U CN 201420093305U CN 203747692 U CN203747692 U CN 203747692U
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China
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yoke
magnetic
magnetic circuit
micro
quiet
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CN201420093305.7U
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Chinese (zh)
Inventor
徐爱群
于海阔
吴立军
葛丁飞
段福斌
杨礼康
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Zhejiang Lover Health Science and Technology Development Co Ltd
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Zhejiang Lover Health Science and Technology Development Co Ltd
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Abstract

The utility model discloses a precise adjustment control system for micro power, which comprises a micro power device and a micro power control system. The micro power device comprises a magnetic circuit I composed of a giant magnetostrictive thin sheet, a permanent magnet, a static yoke I and a static yoke II and a magnetic circuit II composed of a permanent magnet, a static yoke I, a static yoke II and a moving yoke; air gaps are arranged in the magnetic circuit II; magnetic force adjusting devices are respectively arranged in the magnetic circuit I and the magnetic circuit II; a piezoelectric ceramic thin sheet is arranged on the giant magnetostrictive thin sheet of the magnetic circuit I; the moving yoke of the magnetic circuit II is fixed via a ball screw rising and falling table driven by a stepper motor; the micro power control system comprises a sensor set, and a signal amplifier, a signal comprehensive analysis controller, a computer, a signal generator, a power amplifier, an digital-analog converter and a driving power supply connected sequentially via signals; the signal amplifier is respectively connected with the sensor set; the driving power supply is electrically connected with the piezoelectric ceramic thin sheet; and the signal comprehensive analysis controller is connected with the stepper motor via a stepper motor driver.

Description

The fine adjustment control system of microkinetic
Technical field
The present invention relates to the adjusting control field of power, relate in particular to the fine adjustment control system of microkinetic.
Background technology
Current, the development of MEMS (micro electro mechanical system) is very rapid, but also has some technical bottlenecks.One of subject matter that micro electro mechanical system (MEMS) technology faces is exactly micro-mounting technology.Most of MEMS (micro electro mechanical system) are comprised of the micro parts of different materials and different processing methods, along with the continuous microminiaturization of part, the processing of micro-system, assemble more and more difficult.In the damage of the processes such as transportation, processing and assembling of part, mechanical failure and thermal deformation damage and have accounted for very large proportion, when especially Mechanical Contact power or the highstrung part of heat are operated, these parts will produce distortion or broken being subject to less active force or heat, had a strong impact on the Quality and yield of product, also made its production cost greatly improve.
For addressing these problems, researcher has proposed the multiple microkinetic based on the single principle of difference and has produced form, as made relevant microkinetic member based on electrostatic force, electromagnetic force, piezoelectric activity, thermal expansion and marmem characteristic etc., but each member has the limitation of himself.If in conjunction with the advantage of multiple principle, the microkinetic member of making composite construction will have more wide prospect.
Giant magnetostrictive material (Giant Ma gnetostrictive Material, is called for short GMM) under the effect of electromagnetic field, pressure, can produce larger volume or length variations, can realize high-power, expeditiously the conversion between electromagnetic energy and mechanical energy.Especially when medium and low frequency (5Hz-20kHz), have that large stroke, high-power, low-voltage driving, bearing capacity are strong, an advantage of the aspect such as non-contact measurement and control.During piezoelectric ceramic (PZT) work, by voltage, driven, when it keeps elongation state, consumed energy, does not produce fever phenomenon hardly, can reduce the impact of member heating on operating accuracy itself.Therefore, the operating characteristic of integrated GMM and PZT, can improve the performance of simple function material, expands the range of application of composite component, for the research of microkinetic member provides a kind of new thinking.The current domestic report that there is not yet the microkinetic member of this aspect, also has no micro-power process for accurately of the microkinetic member being coupled based on giant magnetostrictive material and piezoceramic material.For the development in microkinetic member is studied of the composite component that promotes giant magnetostrictive material and piezoceramic material, be badly in need of now a kind of micro-power process for accurately and control system of the microkinetic member being coupled based on giant magnetostrictive material and piezoceramic material.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of fine adjustment control system of microkinetic simple in structure.
In order to solve the problems of the technologies described above, the invention provides a kind of fine adjustment control system of microkinetic, comprise oligodynamic device and microkinetic control system; Described oligodynamic device comprises the magnetic circuit I that ultra-magnetic telescopic thin slice, permanent magnet, quiet yoke I and quiet yoke II form, and the magnetic circuit II becoming with mobile yoke piece by permanent magnet, quiet yoke I, quiet yoke II; Described ultra-magnetic telescopic thin slice and permanent magnet are parallel to each other, and the two ends of described ultra-magnetic telescopic thin slice and permanent magnet clamp by quiet yoke I and quiet yoke II respectively; One end of described quiet yoke I and quiet yoke II arranges mobile yoke, between described quiet yoke I and quiet yoke II and mobile yoke, is provided with air gap; In described magnetic circuit I and magnetic circuit II, be respectively arranged with magnetic force adjusting; The magnetic force adjusting of described magnetic circuit I is the piezoelectric ceramic thin sheet that is separately positioned on the positive and negative two sides of ultra-magnetic telescopic thin slice; The magnetic force adjusting of described magnetic circuit II is for passing through stepper motor driven ball-screw lifting platform; Described microkinetic control system comprises driving power, transducer group and the signal amplifier being connected by signal successively, set signalling comprehensive controller, computer, signal generator, power amplifier, digital to analog converter and driving power; Transducer group comprises the micro-displacement sensor being arranged on air gap, and the Micro-force sensor and the magnetic circuit II that are separately positioned on mobile yoke are picked up magnetic coil, and the temperature sensor, strain gauge and the magnetic circuit I that are separately positioned on ultra-magnetic telescopic thin slice are picked up magnetic coil; Described signal amplifier picks up magnetic coil and magnetic circuit II with Micro-force sensor, micro-displacement sensor, temperature sensor, strain gauge, magnetic circuit I respectively and picks up magnetic coil signal and be connected; Described driving power is electrically connected to piezoelectric ceramic thin sheet, and described set signalling comprehensive controller is connected with stepping motor by stepper motor driver.
Improvement as the fine adjustment control system to microkinetic of the present invention: be provided with photoelectrical coupler between described computer and signal generator.
The using method of the fine adjustment control system of microkinetic of the present utility model is as follows: comprise and all adopt the air gap that closed loop feedback regulates to regulate method and voltage-regulation method; Described air gap adjusting method is by forming feedback loop to the sample detecting of real-time micro-power; Described voltage-regulation method is picked up magnet ring generation in magnetic circuit induced current by detecting forms feedback loop.
Further, described air gap regulates method step as follows: 1) given default micro-power value F 1, by required micro-power value F 1be input in computer and store as reference point; 2) mobile yoke resets, and gas length is adjusted to maximum; 3) piezoelectric ceramic thin sheet is applied to a constant drive voltage; 4) closed loop feedback regulates the gas length of oligodynamic device.
Further say, described step 2) concrete steps are as follows: computer sends reset instruction to set signalling comprehensive controller, the instruction that set signalling comprehensive controller sends according to computer produces corresponding pulse signal to stepper motor driver, control step electric machine rotation, drive the motion of ball-screw lifting platform, ball-screw lifting platform drives mobile yoke to move to increasing gas length direction, when mobile yoke moves to origin position, stop stepping motor sending and drive signal, mobile yoke is realized reset; The concrete steps of described step 3) are as follows: by computer, send instruction, this instruction is sent into driving power through photoelectrical coupler, signal generator, power amplifier, digital to analog converter, the driving voltage being produced by driving power is controlled piezoelectric ceramic thin sheet and is produced strain, and drive ultra-magnetic telescopic thin slice to produce corresponding strain, and then in the change occurring by magnetic flux in magnetic circuit I drive magnetic circuit II there is corresponding change in magnetic flux, makes the suffered micro-power value of mobile yoke become auxiliary micro-power value F 2; The concrete steps of described step 4) are as follows: computer sends operating instruction to set signalling comprehensive controller, the instruction that set signalling comprehensive controller sends according to computer, produce pulse signal to stepper motor driver, the corresponding step angle of stepper motor driver control step electric machine rotation, stepping motor drives the displacement L of a unit length of ball-screw lifting platform rising, and the motion of ball-screw lifting platform drives mobile yoke to move L length to reducing gas length direction; After set signalling comprehensive controller sends pulse signal, Micro-force sensor detects the suffered real-time micro-power value F of mobile yoke 2, the analog signal detecting, after signal amplifier amplifies, is converted to digital signal and is sent to set signalling comprehensive controller by analog to digital converter, the more real-time micro-power value F of set signalling comprehensive controller 2with default micro-power value F 1size: if real-time micro-power value F 2with default micro-power value F 1between difference be less than or equal to permissible error value, set signalling comprehensive controller sends a signal to computer, prompting task completes; Otherwise, continue execution step 4).
In described step step 3), auxiliary micro-power value F 3be less than default micro-power value F 1.
Improvement as the fine adjustment control system to microkinetic of the present invention: the step of described voltage-regulation method is as follows: 1. given default micro-power value F 1, by required micro-power value F 1be input in computer and store as reference point; 2. regulate initial gas length, for piezoelectric ceramic thin sheet carries out micro-power adjusting, provide auxiliary micro-power N: 3. regulate on oligodynamic device and act on the driving voltage value V to piezoelectric ceramic thin sheet, until real-time micro-power value F 2with given default micro-power value F 1between difference stop while being less than or equal to the error amount of permission.
Improvement as the fine adjustment control system to microkinetic of the present invention: described step concrete steps are 2. as follows: first computer is according to default micro-power value F 1calculate needed auxiliary micro-power value; Then computer sends operating instruction to set signalling comprehensive controller, the instruction that set signalling comprehensive controller sends according to computer, produce pulse signal to stepper motor driver, control step driven by motor ball-screw lifting platform moves, thereby gas length is changed; Described step concrete steps are 3. as follows: computer sends an instruction, this instruction is sent into after driving power through photoelectrical coupler, signal generator, power amplifier, digital to analog converter, by driving power, produce corresponding driving voltage and control piezoelectric ceramic thin sheet generation strain, and drive ultra-magnetic telescopic thin slice to produce corresponding strain, and then in the change occurring by magnetic flux in magnetic circuit I drive magnetic circuit II there is corresponding change in magnetic flux, and the suffered micro-power value of mobile yoke is also changed; Execute after this instruction real-time micro-power value F that transducer detects 2after signal amplifier amplification and analog to digital converter conversion, by set signalling comprehensive controller, read, set signalling comprehensive controller reads real-time micro-power value signal and compares with default micro-power value, until real-time micro-power value F 2with given default micro-power value F 1between difference while being less than or equal to the error amount of permission, set signalling comprehensive controller sends a signal to computer prompted task and completes, otherwise to computer transmitted signal, 3. prompting continues execution step.
Improvement as the fine adjustment control system to microkinetic of the present invention: describedly pick up magnet ring to detect the course of work of micro-power as follows: when the magnetic flux high frequency in magnetic circuit I and magnetic circuit II changes, pick up and in magnet ring, produce induced current, set signalling comprehensive controller reads sensor current signal, by calculating the variable quantity of magnetic flux, and then calculate the size of the suffered micro-power of mobile yoke.
In the fine adjustment control system of microkinetic of the present invention, can carry out air gap and regulate method and two kinds of methods of voltage-regulation method oligodynamic device to be carried out to the adjusting of fine motion; And by be provided with transducer group on oligodynamic device, can carry out the instant detection of microkinetic, microkinetic is adjusted timely, and the signal amplifier that the connected mode of transmitting by signal successively connects, set signalling comprehensive controller, computer, signal generator, power amplifier, digital to analog converter and driving power can carry out the accurate output of power source.By the photoelectrical coupler arranging between computer and signal generator, can effectively completely cut off the interference between computer and magnetic field.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in further detail.
Fig. 1 is the structure principle chart of oligodynamic device of the present invention;
Fig. 2 is a kind of regulation and control system structural representation of microkinetic;
Fig. 3 is the FB(flow block) of microkinetic process for accurately 1;
Fig. 4 is the FB(flow block) of microkinetic process for accurately 2.
Embodiment
Embodiment 1, Fig. 1 have provided a kind of fine adjustment control system of microkinetic, comprise oligodynamic device and microkinetic control system.
Oligodynamic device is magnetic force oligodynamic device, comprises ultra-magnetic telescopic thin slice 1, quiet yoke 4, permanent magnet 3 and mobile yoke 6.Quiet yoke 4 is divided into separate quiet yoke I and quiet yoke II, between quiet yoke I and quiet yoke II, interconnects respectively by ultra-magnetic telescopic thin slice 1 and the permanent magnet 3 being parallel to each other; With respect to one end of quiet yoke I and quiet yoke II, mobile yoke 6 is set respectively; By forming magnetic circuit I between ultra-magnetic telescopic thin slice 1, quiet yoke I, permanent magnet 3 and quiet yoke II, the magnetic circuit II that mobile yoke 6, quiet yoke II, permanent magnet 3 and quiet yoke I form; In magnetic circuit II, between mobile yoke 6 and quiet yoke II and quiet yoke I, air gap 5 is set.
On mobile yoke 6 and ultra-magnetic telescopic thin slice 1, be respectively arranged with magnetic force adjusting; The ball screw of magnetic force adjusting on mobile yoke 6 for being controlled by signal synthesis controller, it comprises 16 segmentation stepper motor drivers, stepping motor, ball-screw lifting platform; By the output of control step motor accurately of 16 segmentation stepper motor drivers, then convert the output of stepping motor to displacement by ball-screw lifting platform, fine adjustment moves the size of air gap 5 between yoke 6 and quiet yoke II and quiet yoke I; Through the adjusting to air gap 5 sizes, can change the size of mobile yoke 6 suffered magnetic force.And magnetic force adjusting on ultra-magnetic telescopic thin slice 1 is piezoelectric ceramic thin sheet, piezoelectric ceramic thin sheet is just covering respectively ultra-magnetic telescopic thin slice 1, anti-two sides, when in use, only need to just cover respectively ultra-magnetic telescopic thin slice 1, on the piezoelectric ceramic thin sheet on anti-two sides, electrode is set, just can make piezoelectric ceramic thin sheet produce strain by electrode power supply, and then do corresponding strain with ultra-magnetic telescopic thin slice 1, thereby the magnetic flux in magnetic circuit I is changed, corresponding the changing of magnetic flux in magnetic circuit II, finally make the suffered micro-power of mobile yoke 6 change.
The structure of microkinetic control system as shown in Figure 2, comprises signal amplifier, set signalling comprehensive controller, computer, signal generator, power amplifier, digital to analog converter and driving power that transducer group is connected with the connected mode of transmitting by signal successively.Transducer group comprises that Micro-force sensor, micro-displacement sensor, temperature sensor, strain gauge, magnetic circuit I are picked up magnetic coil and magnetic circuit II is picked up magnetic coil; Micro-displacement sensor is arranged on air gap 5; Micro-force sensor and magnetic circuit II are picked up magnetic coil and are separately positioned on mobile yoke 6; Temperature sensor, strain gauge and magnetic circuit I are picked up magnetic coil and are separately positioned on ultra-magnetic telescopic thin slice 1.Signal amplifier picks up magnetic coil and magnetic circuit II with Micro-force sensor, micro-displacement sensor, temperature sensor, strain gauge, magnetic circuit I respectively and picks up magnetic coil signal and be connected; By signal amplifier, Micro-force sensor, micro-displacement sensor, temperature sensor, strain gauge, magnetic circuit I being picked up to magnetic coil and magnetic circuit II picks up the analog signal that magnetic coil obtains and carries out relevant treatment; And between signal amplifier and set signalling comprehensive controller, be provided with analog to digital converter; By analog to digital converter, convert the sensor die analog signal after the processing through signal amplifier to digital signal that set signalling comprehensive controller can read, by set signalling comprehensive controller, undertaken after respective handling again, this signal is sent to computer, and computer is exported corresponding instruction according to the running status of current oligodynamic device; Because computer export is easily interfered, as magnetic field etc. disturbed etc., so be provided with photoelectrical coupler between computer and signal generator.Between above-described driving power and two piezoelectric ceramic thin sheets, by electrode 7, be electrically connected to respectively, set signalling comprehensive controller, by stepper motor driver and stepper motor driver, is done accurate motion by stepper motor driver Driving Stepping Motor and is connected.
The invention provides the process for accurately of two kinds of microkinetic:
Method one, air gap regulate method:
Figure 3 shows that the air gap that the present invention provides regulates the flow chart of sending out, air gap adjusting method adopts closed loop feedback to regulate, and by the sample detecting to real-time micro-power, forms feedback loop, and its concrete steps are as follows:
1) given default micro-power value F 1, by required micro-power value F 1be input in computer and store as reference point;
2) mobile yoke 6 resets, and air gap 5 length adjustment are to maximum:
By computer, send reset instruction to set signalling comprehensive controller, the instruction that set signalling comprehensive controller sends according to computer produces corresponding pulse signal to stepper motor driver, control step electric machine rotation, drive the motion of ball-screw lifting platform, the motion of ball-screw lifting platform drives mobile yoke 6 to move to increasing air gap 5 length directions, when mobile yoke 6 moves to origin position, by limit switch being set at origin position, when lifting platform touches limit switch, set signalling comprehensive controller is received after the signal of limit switch transmission, stop stepping motor sending and drive signal, mobile yoke 6 is realized and being resetted, now the suffered micro-power value of mobile yoke 6 is less than permissible error value ε, can ignore.
3) piezoelectric ceramic thin sheet is applied to a constant drive voltage:
By computer, send instruction, this instruction is sent into after driving power through photoelectrical coupler, signal generator, power amplifier, digital to analog converter, by driving power, produce driving voltage, driving voltage makes piezoelectric ceramic thin sheet produce strain, and drive ultra-magnetic telescopic thin slice 1 to produce corresponding strain, and then magnetic flux in magnetic circuit I is changed, because magnetic flux has continuity, so magnetic flux is corresponding in magnetic circuit II, change, make the suffered micro-power value of mobile yoke 6 become F 3(F 3for auxiliary micro-power value and
4) closed loop feedback regulates air gap 5 length of oligodynamic device:
Computer sends operating instruction to set signalling comprehensive controller, the instruction that set signalling comprehensive controller sends according to computer, produce 1 pulse signal to stepper motor driver, 1/16 step angle of stepper motor driver control step electric machine rotation, stepping motor drives the displacement L of a unit length of ball-screw lifting platform rising, and the motion of ball-screw lifting platform drives mobile yoke 6 to move L length to reducing air gap 5 length directions; After set signalling comprehensive controller sends pulse signal, Micro-force sensor detects the suffered real-time micro-power value F of mobile yoke 6 2, the analog signal detecting, after signal amplifier amplifies, is converted to digital signal and is sent to set signalling comprehensive controller by analog to digital converter, the more real-time micro-power value F of set signalling comprehensive controller 2with default micro-power value F 1size: if | F 1-F 2|≤ε (ε is permissible error value), set signalling comprehensive controller sends a signal to computer, and prompting task completes; Otherwise, continue execution step 4.
Method two, voltage-regulation method:
Figure 4 shows that the flow chart of the voltage-regulation method that the present invention provides, voltage-regulation method also adopts closed loop feedback to regulate, and by detecting in magnetic circuit, picks up the induced current formation feedback loop that magnet ring produces, and its concrete steps are as follows:
1) given default micro-power value F 1, by required micro-power value F 1be input in computer and store as reference point;
2) regulate initial air gap 5 length, for piezoelectric ceramic thin sheet carries out micro-power adjusting, provide auxiliary micro-power N:
First computer is according to default micro-power value F 1calculate needed auxiliary micro-power value: N=F 1-F'+ δ, wherein F' is micro-power limiting value that piezoelectric ceramic thin sheet can regulate, the margin of operation value that δ is piezoelectric ceramic thin sheet adds auxiliary micro-power value can avoid piezoelectric ceramic thin sheet work to limiting condition δ; Then computer sends operating instruction to set signalling comprehensive controller, the instruction that set signalling comprehensive controller sends according to computer, produce pulse signal to stepper motor driver, control step driven by motor ball-screw lifting platform moves, thereby air gap 5 length are changed, in this process, Micro-force sensor Real-Time Monitoring moves the variation of the suffered micro-power value of yoke 6, as real-time micro-power value F 2meet | F 2during-N|≤ε (ε is permissible error value), fixing air gap 5 length.
3) regulate on oligodynamic device and act on the driving voltage value V to piezoelectric ceramic thin sheet, until real-time micro-power value F 2meet: | F 1-F 2| during≤ε, stop:
Computer sends an instruction, this instruction is through photoelectrical coupler, signal generator, power amplifier, digital to analog converter is sent into after driving power, by driving power, produce corresponding driving voltage, driving voltage makes piezoelectric ceramic thin sheet produce strain, and drive ultra-magnetic telescopic thin slice 1 to produce corresponding strain (direction that ultra-magnetic telescopic thin slice 1 produces strain is the direction that its internal magnetic flux is reduced), and then magnetic flux in magnetic circuit I is reduced, because magnetic flux has continuity, so corresponding increase of magnetic flux in magnetic circuit II, it is large that the suffered micro-power value of mobile yoke 6 also and then becomes, execute after this instruction, real-time micro-power value that transducer detects is after signal amplifier amplification and analog to digital converter conversion, by set signalling comprehensive controller, read, set signalling comprehensive controller reads real-time micro-power value signal and compares with default micro-power value, if | F 1-F 2|≤ε, set signalling comprehensive controller sends a signal to computer prompted task and completes, otherwise to computer transmitted signal, prompting continues execution step 3, in this feedback regulation process, the sample detecting frequency of micro-power value is very high, Micro-force sensor possibly cannot detect the real-time micro-power value under high frequency state, so adopt, pick up the sensor device that magnet ring detects as micro-power, picking up magnet ring, to detect the course of work of micro-power as follows: two are picked up magnet ring and install respectively on ultra-magnetic telescopic thin slice 1 and mobile yoke 6, correspond respectively to magnetic circuit I and magnetic circuit II, when the magnetic flux high frequency in two magnetic circuits changes, pick up and in magnet ring, have induced current and produce, set signalling comprehensive controller reads sensor current signal, by calculating the variable quantity of magnetic flux, and then calculate the size of mobile yoke 6 suffered micro-power.
Finally, it is also to be noted that, what more than enumerate is only two specific embodiments of the present invention.Obviously, the invention is not restricted to above embodiment, can also have many distortion.All distortion that those of ordinary skill in the art can directly derive or associate from content disclosed by the invention, all should think protection scope of the present invention.

Claims (2)

1. the fine adjustment control system of microkinetic, comprises oligodynamic device and microkinetic control system; It is characterized in that: described oligodynamic device comprises the magnetic circuit I that ultra-magnetic telescopic thin slice, permanent magnet, quiet yoke I and quiet yoke II form, and the magnetic circuit II becoming with mobile yoke piece by permanent magnet, quiet yoke I, quiet yoke II;
Described ultra-magnetic telescopic thin slice and permanent magnet are parallel to each other, and the two ends of described ultra-magnetic telescopic thin slice and permanent magnet clamp by quiet yoke I and quiet yoke II respectively; One end of described quiet yoke I and quiet yoke II arranges mobile yoke, between described quiet yoke I and quiet yoke II and mobile yoke, is provided with air gap;
In described magnetic circuit I and magnetic circuit II, be respectively arranged with magnetic force adjusting; The magnetic force adjusting of described magnetic circuit I is the piezoelectric ceramic thin sheet that is separately positioned on the positive and negative two sides of ultra-magnetic telescopic thin slice; The magnetic force adjusting of described magnetic circuit II is for passing through stepper motor driven ball-screw lifting platform;
Described microkinetic control system comprises transducer group and the signal amplifier being connected by signal successively, set signalling comprehensive controller, computer, signal generator, power amplifier, digital to analog converter and driving power;
Transducer group comprises the micro-displacement sensor being arranged on air gap, and the Micro-force sensor and the magnetic circuit II that are separately positioned on mobile yoke are picked up magnetic coil, and the temperature sensor, strain gauge and the magnetic circuit I that are separately positioned on ultra-magnetic telescopic thin slice are picked up magnetic coil;
Described signal amplifier picks up magnetic coil and magnetic circuit II with Micro-force sensor, micro-displacement sensor, temperature sensor, strain gauge, magnetic circuit I respectively and picks up magnetic coil signal and be connected;
Described driving power is electrically connected to piezoelectric ceramic thin sheet, and described set signalling comprehensive controller is connected with stepping motor by stepper motor driver.
2. the fine adjustment control system of microkinetic according to claim 1, is characterized in that: between described computer and signal generator, be provided with photoelectrical coupler.
CN201420093305.7U 2014-03-03 2014-03-03 Precise adjustment control system for micro power Withdrawn - After Issue CN203747692U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103856102A (en) * 2014-03-03 2014-06-11 浙江科技学院 Micro-dynamic accurate regulation control system and method
CN104362896A (en) * 2014-10-15 2015-02-18 六安先锋电机有限公司 Precession type stepping motor
CN105397567A (en) * 2015-12-23 2016-03-16 王晶怡 Low-power-consumption accuracy on-line monitoring system in precision machining
CN108747585A (en) * 2018-07-05 2018-11-06 浙江机电职业技术学院 Machine tool chief axis clamping force on-line monitoring system
CN108747585B (en) * 2018-07-05 2024-04-16 浙江机电职业技术学院 Machine tool spindle clamping force on-line monitoring system

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103856102A (en) * 2014-03-03 2014-06-11 浙江科技学院 Micro-dynamic accurate regulation control system and method
CN104362896A (en) * 2014-10-15 2015-02-18 六安先锋电机有限公司 Precession type stepping motor
CN104362896B (en) * 2014-10-15 2018-03-23 六安源创电机制造科技有限公司 Enter ejector half stepper motor
CN105397567A (en) * 2015-12-23 2016-03-16 王晶怡 Low-power-consumption accuracy on-line monitoring system in precision machining
CN108747585A (en) * 2018-07-05 2018-11-06 浙江机电职业技术学院 Machine tool chief axis clamping force on-line monitoring system
CN108747585B (en) * 2018-07-05 2024-04-16 浙江机电职业技术学院 Machine tool spindle clamping force on-line monitoring system

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