CN102297177A - Pneumatic servo actuator - Google Patents
Pneumatic servo actuator Download PDFInfo
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- CN102297177A CN102297177A CN2011101951439A CN201110195143A CN102297177A CN 102297177 A CN102297177 A CN 102297177A CN 2011101951439 A CN2011101951439 A CN 2011101951439A CN 201110195143 A CN201110195143 A CN 201110195143A CN 102297177 A CN102297177 A CN 102297177A
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- guide rail
- air
- float guide
- bellows
- pneumatic servo
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Abstract
The invention relates to a pneumatic servo actuator, in particular to a pneumatic servo actuator which adopts a bellows as an actuating element and simultaneously is provided with a frictionless air floating guide rail, which belongs to the technical field of industrial automatic instruments and systems. The pneumatic servo actuator comprises the actuating element, the air floating guide rail, a displacement sensor, an object stage and a mechanism body; the actuating element is the bellows; the bellows is the actuating element of the pneumatic servo actuator, and the air floating guide rail comprises an air floating guide rail rotor and an air floating guide rail stator; the displacement sensor comprises a reading head and a grating ruler; the connection relationship is that: one end of the bellows is sealed and is connected with the air floating guide rail rotor, and the other end of the bellows is fixed on the mechanism body; a bellows air inlet hole is arranged on the mechanism body; the object stage is arranged on the air floating guide rail rotor; the bottom end of the air floating guide rail stator is fixed on the mechanism body; when the air floating guide rail works normally, the air floating guide rail rotor has frictionless motion; the grating ruler is fixed on the side surface of the object stage; and the reading head is fixed on one side of the mechanism body, and is over against the grating ruler.
Description
Technical field
The present invention relates to a kind of pneumatic servo actuator, relate in particular to and a kind ofly have the pneumatic servo actuator of friction-free air floating guide rail simultaneously as executive component, belong to industrial process measurement and control instrument and systems technology field with bellows.
Background technique
The composition form of pneumatic servo system is as broad as long with general servo-system, and its each link not necessarily is pneumatic entirely, but actuator must be pneumatic.In pneumatic servo system, the general normal employing piston type cylinder of actuator, main inner cavity pressure promotes piston motion during cylinder operation, but because the compressibility of gas and the influence of traditional cylinder interior piston and factors such as inner core, bar and port frictional force, the strong nonlinearity and the low rigidity that have caused pneumatic servo system, realization is relatively more difficult to the Satisfactory Control of pneumatic servo system, and control accuracy is not high, so far in industrial application and immature.
Summary of the invention
The objective of the invention is for solve the problem of the frictional force that pneumatic servo actuator exists in movement process, propose a kind of pneumatic servo actuator.
To achieve these goals, the present invention is achieved through the following technical solutions:
A kind of pneumatic servo actuator, it comprises executive component, air-float guide rail, displacement transducer, object table and mechanism body; Executive component is a bellows; Bellows is the executive component of pneumatic servo actuator, and actuator provides implementation capacity to pneumatic servo; Air-float guide rail is made up of air-float guide rail mover and air-float guide rail stator, is used for eliminating the frictional force of pneumatic servo actuator movement process; Displacement transducer is made up of read head and grating chi, is the station acquisition device of pneumatic servo actuator, is used for pneumatic servo actuator moving displacement is gathered and fed back; Its annexation is: bellows one end is shut, and is connected with the air-float guide rail mover, and the other end is fixed on the mechanism body, and mechanism body is provided with the bellows inlet hole; Object table is installed on the air-float guide rail mover; The bottom of air-float guide rail stator is fixed on the mechanism body; When the air-float guide rail proper functioning, the air-float guide rail mover does not have frictional movement; The grating chi is fixed on the side of object table; Read head is fixed on a side of mechanism body, and relative with the grating chi;
Its working procedure is: open source of the gas, gas is through filter, one tunnel gas of feeding certain pressure for to bellows through inlet hole gas that air-float guide rail stator inlet hole feeds certain pressure and another road second reduction valve through first reduction valve, the air-float guide rail proper functioning, bellows promotes air-float guide rail mover frictionless motion, drive is installed in object table on the air-float guide rail mover when moving together, read head can be read the scale variable quantity of the grating chi that moves with object table, and this variable quantity equals the displacement distance of object table.
Described line pipe preferable alloy material.
The gas pressure that described first reduction valve feeds for air-float guide rail stator inlet hole is 0.3～0.6Mpa; Second reduction valve is 0～1.0Mpa through inlet hole to the gas pressure that bellows feeds.
Beneficial effect
The present invention contrasts prior art, has the following advantages:
1,, make pneumatic servo actuator in movement process, not be subjected to effect of non-linear such as frictional force by bellows being installed in an end of object table; And bellows output displacement and incoming pressure are linear, easily control.
2, air-float guide rail forms one deck air film by the pressed gas of outside input between air-float guide rail stator and mover, make the air-float guide rail mover can not have friction, vibrationless smooth motion, thereby make pneumatic servo actuator obtain higher kinematic accuracy and Location accuracy.
Description of drawings
Fig. 1 is the overall structure figure of pneumatic servo of the present invention actuator;
Fig. 2 is the sectional structure chart of pneumatic servo of the present invention actuator;
Fig. 3 is an air-float guide rail structural drawing of the present invention;
Fig. 4 is the pneumatic circuit figure of pneumatic servo of the present invention actuator;
Fig. 5 is the connection diagram of VDC and grating chi in the pneumatic servo of the present invention actuator;
Among the figure, 1-metal bellows, 2-inlet hole, 3-air-float guide rail mover, 4-air-float guide rail stator, 5-air-float guide rail stator inlet hole, 6-grating chi, 7-read head, 8-mechanism body, 9-object table, 10-filter, 11-source of the gas, 12-first reduction valve, 13-second reduction valve, 14-DC electrical source.
Embodiment
The present invention will be further described below in conjunction with drawings and Examples.
A kind of pneumatic servo actuator in the present embodiment, its structure is formed as shown in Figure 1, comprises metal bellows 1, air-float guide rail mover 3, air-float guide rail stator 4, grating chi 6, read head 7, mechanism body 8, object table 9.Wherein, end central authorities of metal bellows 1 are provided with inlet hole 2.Air-float guide rail mover 3 and air-float guide rail stator 4 are formed air-float guide rail, and air-float guide rail stator one side is provided with inlet hole 5.
The annexation of above-mentioned constituent elements is:
Read head 7 and grating chi 6 are formed displacement transducer, and grating chi 6 is fixed on the side of object table 9.Read head 7 is fixed on a side of mechanism body 8, and relative with grating chi 6, and DC electrical source 14 provides operating voltage 14 for read head 7;
When pneumatic servo actuator worked, source of the gas 11 produced supply gas pressure and gives metal bellows air feed through second reduction valve 13 by the inlet hole 2 of bellows 1 through pneumatic filter 10, a tunnel; Another road first reduction valve 12 is given the air-float guide rail air feed by 4 inlet hole 6 on the air-float guide rail stator.
Preferably, the pressure of metal bellows 1 work is the 0.5Mpa adjustable pressure, and the working pressure of air-float guide rail is 0.4MPa, and the operating voltage of displacement transducer is 5V.
Open source of the gas 11, gas is through filter 10, provides the pressure of 0.4MPa through first reduction valve 12 to air-float guide rail, the air-float guide rail proper functioning, and air-float guide rail mover 3 can frictionless motion.
Simultaneously, source of the gas 11 provides the adjustable pressure of 0.5MPa for the inlet hole 2 of metal bellows 1 through second reduction valve 13, and DC electrical source 14 provides the operating voltage of 5V for displacement transducer read head 7.Metal bellows 1 inner chamber can extend when bearing air pressure, and drive air-float guide rail mover 3 and the object table 5 that is installed on the air-float guide rail mover 3 moves together, read head 7 is read the variable quantity with displacement transducer grating chi 6 scales of object table 9 motion, and promptly the distance that moves of object table 9 is 1.797mm.
Regulate second reduction valve 13, the pressure that changes input metal bellows 1 changes in the scope of 0～0.8Mpa, can obtain the corresponding displacement amount that displacement transducer records.
By said process, metal bellows 1 becomes displacement output with the pressure of input, and incoming pressure and output displacement are linear, as shown in Figure 5.This shows, in this course, avoided the disturbance of non-linear factor fully.
Claims (2)
1. a pneumatic servo actuator is characterized in that: comprise executive component, air-float guide rail, displacement transducer, object table (9) and mechanism body (8); Executive component is a bellows; Bellows is the executive component of pneumatic servo actuator, and actuator provides implementation capacity to pneumatic servo; Air-float guide rail is made up of air-float guide rail mover (3) and air-float guide rail stator (4), is used for eliminating the frictional force of pneumatic servo actuator movement process; Displacement transducer is made up of read head (7) and grating chi (6), is the station acquisition device of pneumatic servo actuator, is used for pneumatic servo actuator moving displacement is gathered and fed back;
Its annexation is: bellows one end is shut, and is connected with air-float guide rail mover (3), and the other end is fixed on the mechanism body (8), and mechanism body (8) is provided with bellows inlet hole (2); Object table (9) is installed on the air-float guide rail mover (3); The bottom of air-float guide rail stator (4) is fixed on the mechanism body; When the air-float guide rail proper functioning, the no frictional movement of air-float guide rail mover (3); Grating chi (6) is fixed on the side of object table (9); Read head (7) is fixed on a side of mechanism body, and relative with grating chi (6);
Its working procedure is: open source of the gas (11), gas is through filter (10), one the tunnel feeds gas for air-float guide rail stator inlet hole (5) through first reduction valve (12), simultaneously, another road second reduction valve (13) feeds gas through inlet hole (2) to bellows, the air-float guide rail proper functioning, bellows promotes air-float guide rail mover (3) frictionless motion, drive is installed in object table (9) on the air-float guide rail mover (3) when moving together, read head (7) can be read the scale variable quantity with the grating chi (6) of object table (9) motion, and this variable quantity equals the displacement distance of object table (9).
2. a kind of pneumatic servo according to claim 1 actuator, it is characterized in that: bellows is a metal material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110195143 CN102297177B (en) | 2011-07-13 | 2011-07-13 | Pneumatic servo actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110195143 CN102297177B (en) | 2011-07-13 | 2011-07-13 | Pneumatic servo actuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102297177A true CN102297177A (en) | 2011-12-28 |
| CN102297177B CN102297177B (en) | 2013-10-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110195143 Expired - Fee Related CN102297177B (en) | 2011-07-13 | 2011-07-13 | Pneumatic servo actuator |
Country Status (1)
| Country | Link |
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| CN (1) | CN102297177B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110076734A (en) * | 2019-05-20 | 2019-08-02 | 青岛理工大学 | Pneumatic bellows drive ultra-precise two-dimensional positioning platform |
| CN110174047A (en) * | 2018-10-25 | 2019-08-27 | 山东理工大学 | A kind of back pressure type U-tube gas electric transducer |
| CN111120149A (en) * | 2019-12-13 | 2020-05-08 | 内蒙航天动力机械测试所 | Servo actuator stroke detection device |
| CN111895917A (en) * | 2020-08-19 | 2020-11-06 | 中国科学院力学研究所 | Method for detecting deformation of high-enthalpy-resistant gas medium compensator |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5347914A (en) * | 1991-10-21 | 1994-09-20 | Matsushita Electric Industrial Co., Ltd. | Traverse apparatus |
| DE202005014215U1 (en) * | 2005-09-09 | 2006-03-09 | Morawski, Jerzy Henryk | Linear guide for transmitting of transverse forces for standard cylinders of all types has slide unit detachably connected to piston rod of standard cylinder by means of driver-angle piece |
| CN101275594A (en) * | 2007-03-31 | 2008-10-01 | 费斯托合资公司 | Fluid power arrangement |
| CN101290021A (en) * | 2008-06-10 | 2008-10-22 | 胡书彬 | Bellows power cylinder |
-
2011
- 2011-07-13 CN CN 201110195143 patent/CN102297177B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5347914A (en) * | 1991-10-21 | 1994-09-20 | Matsushita Electric Industrial Co., Ltd. | Traverse apparatus |
| DE202005014215U1 (en) * | 2005-09-09 | 2006-03-09 | Morawski, Jerzy Henryk | Linear guide for transmitting of transverse forces for standard cylinders of all types has slide unit detachably connected to piston rod of standard cylinder by means of driver-angle piece |
| CN101275594A (en) * | 2007-03-31 | 2008-10-01 | 费斯托合资公司 | Fluid power arrangement |
| CN101290021A (en) * | 2008-06-10 | 2008-10-22 | 胡书彬 | Bellows power cylinder |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110174047A (en) * | 2018-10-25 | 2019-08-27 | 山东理工大学 | A kind of back pressure type U-tube gas electric transducer |
| CN110076734A (en) * | 2019-05-20 | 2019-08-02 | 青岛理工大学 | Pneumatic bellows drive ultra-precise two-dimensional positioning platform |
| CN111120149A (en) * | 2019-12-13 | 2020-05-08 | 内蒙航天动力机械测试所 | Servo actuator stroke detection device |
| CN111895917A (en) * | 2020-08-19 | 2020-11-06 | 中国科学院力学研究所 | Method for detecting deformation of high-enthalpy-resistant gas medium compensator |
| CN111895917B (en) * | 2020-08-19 | 2021-08-31 | 中国科学院力学研究所 | Method for detecting deformation of high-enthalpy-resistant gas medium compensator |
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| Publication number | Publication date |
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| CN102297177B (en) | 2013-10-30 |
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