CN110696028A - Ultra-precise micro-nano operating system controlled by artificial intelligence - Google Patents

Ultra-precise micro-nano operating system controlled by artificial intelligence Download PDF

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CN110696028A
CN110696028A CN201911097336.3A CN201911097336A CN110696028A CN 110696028 A CN110696028 A CN 110696028A CN 201911097336 A CN201911097336 A CN 201911097336A CN 110696028 A CN110696028 A CN 110696028A
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connecting rod
micro
base
hinged
telescopic
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CN110696028B (en
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马金玉
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Wenzhou Polytechnic
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Wenzhou Polytechnic
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B25J19/021—Optical sensing devices
    • B25J19/022—Optical sensing devices using lasers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1628—Programme controls characterised by the control loop
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1694—Programme controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manipulator (AREA)

Abstract

The invention discloses an ultra-precise micro-nano operating system controlled by artificial intelligence, which comprises a micro-operation clamping mechanism and a control system; the micro-operation clamping mechanism comprises two laser sensors, two clamping pieces and a base, wherein the base is provided with two symmetrical and parallel linkage mechanisms and two telescopic mechanisms respectively arranged on the two linkage mechanisms; the telescopic rods of the two telescopic mechanisms extend out to drive the two linkage mechanisms to enable the two clamping pieces to clamp the object, and when the telescopic rods of the two telescopic mechanisms retract to drive the two linkage mechanisms to enable the two clamping pieces to be opened and loosen the object, the object is clamped by the two clamping pieces. The control is simple, and the control precision and efficiency are high.

Description

Ultra-precise micro-nano operating system controlled by artificial intelligence
Technical Field
The invention relates to the technical field of mechanical structures, in particular to a micro-operation clamping mechanism.
Background
In recent years, the development of micro-nano technology is very rapid. In the aspect of micron technology, technologies such as micromanipulators, micromechanical parts, micropumps, micromotor systems, micro-drives and the like are widely researched and concerned by scholars at home and abroad; in the field of nanotechnology, the development of techniques such as nanomaterials, nanotechnology, nanobiology, nanoelectronics, and the like is extremely rapid. The micro-operation actuator is also called as a micro-operation tool and is a key component for realizing clamping, carrying, releasing and assembling of micro-objects. With the advent of various micro devices, micro-nano operating techniques are increasingly being applied to the fields of aerospace, optics, medical treatment, biology, and the like.
For many micro-manipulation and micro-assembly tasks, the manipulated objects tend to be dimensionally cross-scale and irregularly shaped. When a multi-degree-of-freedom micromanipulator consisting of a precise micromanipulator and a micro-motion platform is used for operating such an object to be operated (such as hollow glass beads, single-mode optical fibers and the like), the precise micromanipulator needs to have the performances of large stroke, translational clamping and high resolution. Otherwise, when the micro-operation task is performed, the precise micro-operation mechanisms with different ranges need to be replaced, the clamped object and the tail end clamping arm part are both easy to generate relative slippage due to component force along the direction of the central axis of the precise micro-operation mechanism, the efficiency and the precision of the micro-operation process are affected, and the control of the precise micro-operation mechanism becomes more complex, so that research and development personnel develop a novel ultra-precise micro-operation clamping mechanism based on the way of researching and improving the defects.
Disclosure of Invention
The invention aims to solve the defects of the prior art and provides a micro-operation clamping mechanism which is simple to control and has high control precision and efficiency.
The micro-operation clamping mechanism comprises two laser sensors, two clamping pieces and a base, wherein the base is provided with two symmetrical and parallel linkage mechanisms and two telescopic mechanisms respectively arranged on the two linkage mechanisms; the telescopic rods of the two telescopic mechanisms extend out to drive the two linkage mechanisms to enable the two clamping pieces to clamp the object, and when the telescopic rods of the two telescopic mechanisms retract to drive the two linkage mechanisms to enable the two clamping pieces to be opened and loosen the object, the object is clamped by the two clamping pieces.
Preferably, the middle part of the top surface of the base is provided with an upright post, and the two linkage mechanisms are respectively arranged on two corresponding side surfaces of the upright post; the two linkage mechanisms comprise a first connecting rod, a second connecting rod, a third connecting rod, a fourth connecting rod, a fifth connecting rod, a sixth connecting rod and a seventh connecting rod, one end of the first connecting rod is hinged with the side face of the top end of the upright post, and the other end of the first connecting rod is hinged with one end of the second connecting rod; one end of the connecting rod III at the other end of the connecting rod II is hinged; the other end of the connecting rod III is hinged with the side face of the connecting rod V; one end of the connecting rod V is hinged with the end part of the top surface of the base, and the other end of the connecting rod V is hinged with one end part of the lower side surface of the connecting rod VII; one end of the connecting rod six is also hinged with the end part of the top surface of the base, and the other end of the connecting rod six is hinged with one end part of the lower side surface of the connecting rod seven; one end of the connecting rod II is hinged with the middle part of the connecting rod II, and the other end of the connecting rod II is hinged with the top surface of the base; the bottom of two holding pieces sets up respectively at another tip of connecting rod seven, and telescopic machanism locates the below of connecting rod one, and telescopic link top and the downside of connecting rod one of telescopic machanism are contradicted, and the other end of connecting rod three, connecting rod four and the other end of connecting rod two all have the interval with the top surface of base.
Preferably, the second connecting rod is a second connecting rod with a 7-shaped cross section, and the fourth connecting rod is arranged in the recess of the second connecting rod with a 7-shaped cross section.
Preferably, each hinge joint is connected by a flexible hinge.
More preferably, the flexible hinge is connected by a flexible sheet, and the flexible sheet, the links, the base, and the clamping piece are integrated with each other.
Further preferably, still include the base, stand and base are all fixed in the side of base.
Further preferably, the bottom end of the telescopic mechanism is fixed in a groove on the top surface of the base.
Further preferably, the top surface of the base is provided with a recess, and the recess is positioned at the other ends of the third connecting rod, the fourth connecting rod and the second connecting rod of the linkage mechanism.
Further preferably, the two clamping pieces are obliquely arranged and are symmetrical to each other.
Preferably, the telescopic mechanism adopts a piezoelectric ceramic actuator, the top end of a telescopic rod of the piezoelectric ceramic actuator is abutted against the protrusion on the lower side face of the connecting rod, and the top end of the telescopic rod of the telescopic mechanism is embedded into the concave of the protrusion.
The micro-operation clamping mechanism designed by the invention is used for better completing micro-operation and micro-assembly tasks, so that laser detection is arranged at a clamping piece to perform online detection on the position and clamping force information of the tail end clamping arm of the precise micro-operation mechanism in the clamping process, and the tail end clamping arm or an operated object is prevented from being damaged when the precise micro-operation mechanism is used for clamping a tiny object.
On the other hand, the requirements of freedom degree pose adjustment and precision positioning control are met, and the micro-motion platform needs to have the characteristics of output displacement decoupling, large stroke, high resolution and multiple degrees of freedom.
The invention relates to an ultraprecise micro-nano operating system which is controlled by the inventor in an industrial and intelligent manner, which is a system with symmetrical left and right structures. To simplify the model, a one-half system model of the micro-manipulation gripping mechanism is built. Laser emitted by a laser sensor irradiates the surface of the clamping sheet so as to obtain the output displacement q of the clamping sheet, and a kinetic equation of a half system model of the micro-operation clamping mechanism is designed into the following form:
Figure BSA0000194602500000031
wherein M (q) is mass,
Figure BSA0000194602500000032
is the Copeng force, centrifugal force, G (q) is the gravity term, tau is the control moment, taudIs an external moment. For convenience of presentation, the variables are simplified: m (q) is abbreviated as M,
Figure BSA0000194602500000033
abbreviated as C, G (q) is abbreviated as G.
Order: m is M0+EM，C＝C0+EC，G＝G0+EG, wherein M0Is nominal mass, C0Nominal Coud force, centrifugal force, G0Is a nominal gravity term. The method for identifying the parameters obtains: nominal mass M0Nominal coriolis force, centrifugal force C0Nominal gravity term G0。EM、EC and EGAre respectively M (q),And modeling error of G (q).
An artificial intelligence controller (abbreviated as AIC) based on a nominal model is designed, so that the output displacement can accurately track the expected displacement track even if the micro-operation clamping mechanism has uncertainty such as non-linear hysteresis, external disturbance and the like. For this reason, the displacement tracking error is defined as:
e(t)＝qd(t) -q (t) (3) wherein qd(t) is an ideal displacement signal; q (t) is the actual displacement signal.
Defining an error synthesis function as:
Figure BSA0000194602500000041
wherein, Λ is more than 0.
Definition of
Figure BSA0000194602500000042
Then
Figure BSA0000194602500000043
Is obtained by the formula (4)
Figure BSA0000194602500000044
wherein ,
Figure BSA0000194602500000045
the AIC controller is designed as follows:
Figure BSA0000194602500000046
wherein ,KP＞0，Ki＞0；τmIs a control law based on a nominal model; tau isrIs a robust term.
Figure BSA0000194602500000047
τr＝Krsgn(s) (7)
Drawings
FIG. 1 is a schematic view (one) of the overall structure of the embodiment;
FIG. 2 is the overall structure diagram of the embodiment (II);
FIG. 3 is a schematic diagram of a half structure of the embodiment;
FIG. 4 is a control system flow diagram;
FIG. 5 is a schematic diagram of an electrical system signaling process;
FIG. 6 is a displacement tracking diagram of the control system;
FIG. 7(a) is a displacement error curve generated by the AIC controller;
FIG. 7(b) is a displacement error curve generated by the PID controller.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments that can be derived by one of ordinary skill in the art from the embodiments given herein are intended to be within the scope of the present invention.
Example (b):
as shown in fig. 1, the micro-operation clamping mechanism described in this embodiment includes two laser sensors 1, two clamping pieces 20 and a base 28, two linkage mechanisms 2 that are symmetrical and arranged side by side and two telescopic mechanisms 3 that are respectively installed on the two linkage mechanisms 2 are installed on the base 28, the two clamping pieces 20 are respectively installed on the two linkage mechanisms 3, the two laser sensors 1 are respectively installed at the lateral sides of the outer side surfaces of the two clamping pieces 20, and laser sensing heads of the laser sensors 1 correspond to clamping ends of the clamping pieces 1; the telescopic rods of the two telescopic mechanisms extend out to drive the two linkage mechanisms to enable the two clamping pieces to clamp the object, and when the telescopic rods of the two telescopic mechanisms retract to drive the two linkage mechanisms to enable the two clamping pieces to be opened and loosen the object, the object is clamped by the two clamping pieces.
In order to better meet the requirements of multi-degree-of-freedom pose adjustment and precision positioning control, the micro-motion platform needs to have the characteristics of output displacement decoupling, large stroke, high resolution and multi-degree-of-freedom, and the micro-motion platform reasonably and effectively carries out system structure design and real-time precision detection on a micro-operator consisting of a micro-operator and the micro-motion platform: the middle part of the top surface of the base 28 is provided with an upright post 283, and the two linkage mechanisms 2 are respectively arranged on two corresponding side surfaces of the upright post 283; the two linkage mechanisms 2 comprise a first connecting rod 21, a second connecting rod 22, a third connecting rod 23, a fourth connecting rod 24, a fifth connecting rod 25, a sixth connecting rod 26 and a seventh connecting rod 27, one end of the first connecting rod 21 is hinged with the side face of the top end of the upright column, and the other end of the first connecting rod 21 is hinged with one end of the second connecting rod 22; one end of a connecting rod III 23 at the other end of the connecting rod II 22 is hinged; the other end of the connecting rod III 23 is hinged with the side surface of the connecting rod V25; one end of the connecting rod five 25 is hinged with the top surface end part of the base, and the other end of the connecting rod five 25 is hinged with one end part of the lower side surface of the connecting rod seven 27; one end of the link six 26 is also hinged with the top end of the base 28, and the other end is hinged with one end of the lower side surface of the link seven 27; one end of the fourth connecting rod 24 is hinged with the middle part of the second connecting rod 22, and the other end is hinged with the top surface of the base 28; the bottom of two holding pieces 20 sets up respectively in another tip of seven 27 connecting rods, and telescopic machanism 3 locates the below of connecting rod one, and telescopic link top and the downside of connecting rod 21 of telescopic machanism 3 are contradicted, and there is the interval in the other end of connecting rod three 23, connecting rod four 24 and the other end of connecting rod two 22 and the top surface of base 28.
Based on the advantages of high response speed, high resolution, high force density and the like, the piezoelectric ceramic is widely used in the micro-gripper; and the flexible amplifying mechanism with compact structure and high displacement resolution is widely used for the characteristics of the structure of the micro-gripper, so that the telescopic mechanism 3 adopts a piezoelectric ceramic actuator, the top end of a telescopic rod of the piezoelectric ceramic actuator is abutted against the protrusion 211 on the lower side surface of the first connecting rod 21, and the top end of the telescopic rod of the telescopic mechanism is embedded into the recess 2111 of the protrusion 211, so that the abutting and pushing of the piezoelectric ceramic actuator is more stable and reliable.
The bottom of the piezoelectric ceramic is fixedly connected to the base through a bolt locking mechanism, wherein laser of the laser sensor irradiates the outer sides of the top ends of the two clamping pieces and is used for collecting displacement of the top ends of the clamping pieces in real time, and therefore a high-precision control effect is obtained.
The two linkage mechanisms are in a bilateral symmetry structure, and all hinged parts in the linkage mechanisms are connected by flexible hinges; the flexible hinge is connected by flexible sheets, and the flexible sheets, the connecting rods, the base and the clamping sheets are mutually combined into an integral structure. It makes structural design reasonable reliable, further promotes performance.
When the clamping pieces clamp an object, the telescopic rod of the piezoelectric ceramic actuator is pushed upwards, so that the first connecting rod rotates around the first flexible hinge, the second connecting rod is driven to pull the second connecting rod, the third connecting rod, the fourth connecting rod, the fifth connecting rod, the sixth connecting rod and the seventh connecting rod are all close to the side face of the stand column, and the two clamping pieces are continuously closed to clamp the object; after the telescopic rod of the piezoelectric ceramic actuator retracts to the original position, the two clamping pieces are opened and the object is loosened.
In this embodiment, the second connecting rod 22 is a second connecting rod with a 7-shaped cross section, and the fourth connecting rod 24 is disposed in the recess of the second connecting rod with a 7-shaped cross section. The multi-freedom-degree pose adjusting and precise positioning control device is reasonable in structural design, and enables multi-freedom-degree pose adjustment and precise positioning control performance to be better.
In this embodiment, the base 4 is further included, and the upright 283 and the base 28 are fixed on the side of the base.
In this embodiment, the bottom end of the telescoping mechanism 3 is secured within a top surface recess 282 of the base 28. The positioning and fixing of the telescopic mechanism are firmer and more reliable.
In this embodiment, the top surface of the base 28 has a recess 281, and the recess 281 is located at the other end of the link three 23, the link four 24 and the link two 22 of the linkage mechanism 2. The concave structure enables the connecting rod three, the connecting rod four and the connecting rod two to have enough moving space when being linked, and the design is more reasonable.
In this embodiment, the two clamping pieces 20 are disposed in an inclined manner and are symmetrical to each other. The clamping force of the micro-operating mechanism is improved.
The invention relates to an ultraprecise micro-nano operating system which is controlled by the inventor in an industrial and intelligent manner, which is a system with symmetrical left and right structures. To simplify the model, a one-half system architecture is built. Fig. 3 is a schematic diagram of a half structure of an embodiment, a laser 101 emitted by a laser sensor 1 is irradiated onto the surface of a holding sheet 20, so as to obtain an output displacement q of the holding sheet 20, and a dynamic model of the system is designed as follows:
Figure BSA0000194602500000071
wherein M (q) is mass,
Figure BSA0000194602500000072
is the Copeng force, centrifugal force, G (q) is the gravity term, tau is the control moment, taudIs an external moment.
Order: m is M0+EM，C＝C0+EC，G＝G0+EG, wherein M0Is nominal mass, C0Nominal Coud force, centrifugal force, G0Is a nominal gravity term; eM、EC and EGAre respectively M (q),
Figure BSA0000194602500000073
And modeling error of G (q).
The control target of the system is to design an artificial intelligence controller (abbreviated as AIC) based on a nominal model, and the output displacement can accurately track the expected displacement track even under the uncertain conditions of nonlinear hysteresis, external disturbance and the like of a micro-operation clamping mechanism. For this reason, the displacement tracking error is defined as:
e(t)＝qd(t)-q(t) (3)
wherein ,qd(t) is an ideal displacement signal; q (t) is the actual displacement signal.
Defining an error synthesis function as:
Figure BSA0000194602500000081
wherein, Λ is more than 0.
Definition of
Figure BSA0000194602500000082
Then
Figure BSA0000194602500000083
Is obtained by the formula (4)
Figure BSA0000194602500000084
wherein ,
Figure BSA0000194602500000085
the AIC controller is designed as follows:
Figure BSA0000194602500000086
wherein ,KP＞0，Ki＞0；τmIs a control law based on a nominal model; tau isrIs a robust term.
Figure BSA0000194602500000087
τr＝Krsgn(s) (7)
The flow chart of the control system of the micro-operation clamping mechanism is shown in figure 4. Ideal displacement signal qdAnd (t) subtracting the actual displacement signal q (t) to obtain an error signal e (t), inputting the error signal into the AIC controller to obtain a control signal tau of the AIC controller, acting on the physical object micro-operation clamping mechanism to obtain the actual displacement of the micro-operation clamping mechanism, and feeding back and outputting the actual displacement to form closed-loop control.
Fig. 5 is a schematic diagram of an electrical system signaling process. The digital quantity signal tau output by the AIC controller enters an analog output card PCI 6229 to be changed into an analog quantity signal, the analog quantity signal is output to a voltage amplifier to obtain an amplified voltage u, and therefore the electric control effect of controlling large voltage by small voltage is obtained. Then the micro-operation clamping mechanism acts and generates displacement, the laser displacement sensor measures the actual displacement of the micro-clamper, an analog quantity signal obtained by the laser displacement sensor is changed into a digital quantity signal through an analog acquisition card PCI 6229, and the digital quantity signal is fed back to the AIC controller, thereby forming closed-loop control.
The control aims to enable the output displacement q of the control system under the interference to track the ideal displacement qdAnd high-precision track tracking is realized. Given that PID controllers are the most widely used controllers in current industrial applications, AIC controllers will compare with PID controllers over a number of performance metrics. The parameter selection for both controllers is shown in table 1.
TABLE 1 controller parameter selection
Figure BSA0000194602500000091
In order to observe the trajectory tracking ability of the AIC controller deeply, the system is made to track a periodic sinusoidal signal with a frequency of 1Hz and an amplitude of 120 μm, and the experimental results are shown in fig. 6, 7(a) and 7 (b).
Both AIC and PID controllers can achieve tracking of sinusoidal signals, see fig. 6. Referring to fig. 7(a) and 7(b), the error generated by the PID controller fluctuates synchronously with the track signal, the maximum error reaches 1 μm, and in comparison, the fluctuation of the error generated by the AIC controller is much smaller than the error of the PID controller and is in a substantially stable state. Therefore, the comprehensive control performance of the AIC controller is higher than that of a PID controller, and the precise control of the micro-operation clamping mechanism is realized.
The present invention is not limited to the above-mentioned preferred embodiments, and any other products in various forms can be obtained by anyone in the light of the present invention, but any changes in the shape or structure thereof, which have the same or similar technical solutions as those of the present application, fall within the protection scope of the present invention.

Claims (10)

1. An ultra-precise micro-nano operating system controlled by artificial intelligence is characterized by comprising a micro-operation clamping mechanism and a control system;
the micro-operation clamping mechanism comprises two laser sensors, two clamping pieces and a base, wherein the base is provided with two symmetrical and parallel linkage mechanisms and two telescopic mechanisms respectively arranged on the two linkage mechanisms; the telescopic rods of the two telescopic mechanisms extend out to drive the two linkage mechanisms to enable the two clamping pieces to clamp the object, and when the telescopic rods of the two telescopic mechanisms retract to drive the two linkage mechanisms to enable the two clamping pieces to be opened and the object to be loosened;
establishing a half system model of the micro-operation clamping mechanism; laser emitted by a laser sensor irradiates the surface of the clamping sheet so as to obtain the output displacement q of the clamping sheet, and a kinetic equation of a half system model of the micro-operation clamping mechanism is designed into the following form:
Figure FSA0000194602490000011
wherein M (q) is mass,
Figure FSA0000194602490000012
is the Copeng force, centrifugal force, G (q) is the gravity term, tau is the control moment, taudIs an external moment; for convenience of presentation, the variables are simplified: m (q) is abbreviated as M,c, G (q) G; tau is the output torque of the controller; tau isdExternal interference;
order: m is M0+EM，C＝C0+EC，G＝G0+EG, wherein M0Is nominal mass, C0Nominal Coud force, centrifugal force, G0Is a nominal gravity term; tong (Chinese character of 'tong')The method for identifying the parameters obtains: nominal mass M0Nominal coriolis force, centrifugal force C0Nominal gravity term G0；EM、EC and EGAre respectively M (q),
Figure FSA0000194602490000014
And modeling error of G (q);
the control system is designed with an artificial intelligence controller (abbreviated as AIC) based on a nominal model, and displacement tracking errors are defined as follows:
e(t)＝qd(t)-q(t) (3)
wherein ,qd(t) is an ideal displacement signal; q (t) is an actual displacement signal (q (t) will be abbreviated as q hereinafter, and q will be abbreviated as q hereinafterdAbbreviation of (t) qd)。
Define the error synthesis function as (e for the following e (t)):
Figure FSA0000194602490000021
wherein, Λ is more than 0.
Definition of
Figure FSA0000194602490000022
Then
Figure FSA0000194602490000023
Is obtained by the formula (4)
Figure FSA0000194602490000024
wherein ,
Figure FSA0000194602490000025
the AIC controller is designed as follows:
Figure FSA0000194602490000026
wherein ,KP＞0，Ki＞0；τmIs a control law based on a nominal model; tau isrIs a robust term.
Figure FSA0000194602490000027
τr＝Krsgn(s) (7)。
2. A micro-operation clamping mechanism as claimed in claim 1, wherein the middle part of the top surface of the base is provided with a column, and the two linkage mechanisms are respectively arranged on two corresponding side surfaces of the column; the two linkage mechanisms comprise a first connecting rod, a second connecting rod, a third connecting rod, a fourth connecting rod, a fifth connecting rod, a sixth connecting rod and a seventh connecting rod, one end of the first connecting rod is hinged with the side face of the top end of the upright post, and the other end of the first connecting rod is hinged with one end of the second connecting rod; one end of the connecting rod III at the other end of the connecting rod II is hinged; the other end of the connecting rod III is hinged with the side face of the connecting rod V; one end of the connecting rod V is hinged with the end part of the top surface of the base, and the other end of the connecting rod V is hinged with one end part of the lower side surface of the connecting rod VII; one end of the connecting rod six is also hinged with the end part of the top surface of the base, and the other end of the connecting rod six is hinged with one end part of the lower side surface of the connecting rod seven; one end of the connecting rod II is hinged with the middle part of the connecting rod II, and the other end of the connecting rod II is hinged with the top surface of the base; the bottom of two holding pieces sets up respectively at another tip of connecting rod seven, and telescopic machanism locates the below of connecting rod one, and telescopic link top and the downside of connecting rod one of telescopic machanism are contradicted, and the other end of connecting rod three, connecting rod four and the other end of connecting rod two all have the interval with the top surface of base.
3. The micro-manipulation gripping mechanism of claim 2, wherein the second link is a second link with a cross-sectional shape of 7-letter type, and the fourth link is disposed in a recess of the second link of 7-letter type.
4. A micro-actuated clamping mechanism according to claim 2 wherein each hinge is connected by a flexible hinge.
5. The micro-manipulator gripping mechanism according to claim 4, wherein the flexible hinge is connected by a flexible sheet, and the flexible sheet, each link, the base and the gripping piece are integrated with each other.
6. A micro-manipulating holding mechanism according to claim 2, further comprising a base, wherein the post and the base are fixed to the side of the base.
7. A micro-manipulating holding mechanism according to claim 2, wherein the bottom end of the telescoping mechanism is fixed in a recess in the top surface of the base.
8. A micro-manipulating holding mechanism according to claim 2, wherein the top surface of the base has a recess at the positions of the other ends of the third link, the fourth link and the second link of the linkage mechanism.
9. A micro-manipulating holding mechanism according to claim 2, wherein the two holding pieces are disposed obliquely and symmetrical to each other.
10. A micro-actuator as claimed in any one of claims 1 to 9, wherein the telescoping mechanism is a piezo-ceramic actuator, the top of the telescoping rod of the piezo-ceramic actuator abuts against a protrusion on a lower side of the link, and the top of the telescoping rod of the telescoping mechanism is inserted into a recess in the protrusion.
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