CN110696028B - Ultra-precise micro-nano operating system controlled by artificial intelligence - Google Patents
Ultra-precise micro-nano operating system controlled by artificial intelligence Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/02—Sensing devices
- B25J19/021—Optical sensing devices
- B25J19/022—Optical sensing devices using lasers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1628—Programme controls characterised by the control loop
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1694—Programme controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
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Abstract
The invention discloses an artificial intelligent controlled ultra-precise micro-nano operating system, which comprises a micro-operation clamping mechanism and a control system; the micro-operation clamping mechanism comprises two laser sensors, two clamping pieces and a base, wherein the base is provided with two symmetrical and parallel linkage mechanisms and two telescopic mechanisms respectively arranged on the two linkage mechanisms, the two clamping pieces are respectively arranged on the two linkage mechanisms, the two laser sensors are respectively arranged at the sides of the outer side surfaces of the two clamping pieces, and the laser sensing heads of the laser sensors correspond to the clamping ends of the clamping pieces; the telescopic rods of the two telescopic mechanisms extend out to drive the two linkage mechanisms to drive the two clamping pieces to clamp the object, and when the telescopic rods of the two telescopic mechanisms retract to drive the two linkage mechanisms to drive the two clamping pieces to open and loosen the object. The control is simple, and the control precision and efficiency are high.
Description
Technical Field
The invention relates to the technical field of mechanical structures, in particular to a micro-operation clamping mechanism.
Background
In recent years, the development of micro-nano technology is very rapid. In the aspect of micro technology, micro operators, micro mechanical parts, micro pumps, micro motor systems, micro driving and other technologies are widely researched and focused by domestic and foreign scholars; in the aspect of nano technology, the development of nano materials, nano dynamics, nano biology, nano electronics and other technologies is extremely rapid. The micro-operation actuator, also called micro-operation tool, is a key component for realizing clamping, carrying, releasing and assembling of micro-objects. With the advent of various micro devices, micro-nano operation technology is increasingly applied to the fields of aerospace, optics, medical treatment, biology and the like.
For many micro-manipulation and micro-assembly tasks, the manipulated object tends to be dimensionally trans-dimensioned, irregular in appearance. When such an object to be operated (for example, hollow glass beads, single-mode optical fibers, etc.) is operated by using a multi-degree-of-freedom micromanipulator composed of a precise micromanipulator and a micro-motion stage, the precise micromanipulator is required to have the properties of large stroke, translational clamping and high resolution. Otherwise, when the micro-operation task is performed, the precise micro-operation mechanism with different measuring ranges needs to be replaced, the clamped object and the tail end clamping arm part are easy to generate relative sliding due to component force along the central axis direction of the precise micro-operation mechanism, the efficiency and the precision of the micro-operation process are affected, and the control of the precise micro-operation mechanism is more complicated, so that a research and development personnel develops a new ultra-precise micro-operation clamping mechanism based on the improvement of the defect research.
Disclosure of Invention
The invention aims to solve the defects of the technology, and discloses a micro-operation clamping mechanism which is simple to control and has high control precision and efficiency.
The micro-operation clamping mechanism comprises two laser sensors, two clamping pieces and a base, wherein the base is provided with two symmetrical and parallel linkage mechanisms and two telescopic mechanisms respectively arranged on the two linkage mechanisms, the two clamping pieces are respectively arranged on the two linkage mechanisms, the two laser sensors are respectively arranged at the side of the outer side surfaces of the two clamping pieces, and a laser sensing head of the laser sensor corresponds to the clamping ends of the clamping pieces; the telescopic rods of the two telescopic mechanisms extend out to drive the two linkage mechanisms to drive the two clamping pieces to clamp the object, and when the telescopic rods of the two telescopic mechanisms retract to drive the two linkage mechanisms to drive the two clamping pieces to open and loosen the object.
Further preferably, the middle part of the top surface of the base is provided with an upright post, and the two linkage mechanisms are respectively arranged on two corresponding side surfaces of the upright post; the two linkage mechanisms comprise a first connecting rod, a second connecting rod, a third connecting rod, a fourth connecting rod, a fifth connecting rod, a sixth connecting rod and a seventh connecting rod, one end of the first connecting rod is hinged with the side surface of the top end of the upright post, and the other end of the first connecting rod is hinged with one end of the second connecting rod; one end of a connecting rod III at the other end of the connecting rod II is hinged; the other end of the connecting rod III is hinged with the side surface of the connecting rod V; one end of the connecting rod five is hinged with the top surface end part of the base, and the other end of the connecting rod five is hinged with the lower side surface end part of the connecting rod seven; one end of the connecting rod six is also hinged with the top surface end part of the base, and the other end of the connecting rod six is hinged with the lower side surface end part of the connecting rod seven; one end of the connecting rod IV is hinged with the middle part of the connecting rod II, and the other end of the connecting rod IV is hinged with the top surface of the base; the bottom ends of the two clamping pieces are respectively arranged at the other end part of the connecting rod seven, the telescopic mechanism is arranged below the connecting rod one, the top end of the telescopic rod of the telescopic mechanism is in contact with the lower side surface of the connecting rod one, and the other ends of the connecting rod three and four and the other end of the connecting rod two are spaced from the top surface of the base.
Further preferably, the second connecting rod is a second connecting rod with a 7-shaped section, and the fourth connecting rod is arranged in a recess of the second 7-shaped connecting rod.
Further preferably, each hinge is connected by a flexible hinge.
Further preferably, the flexible hinge is formed by connecting flexible sheets, and the flexible sheets, the connecting rods, the base and the clamping pieces are combined into an integral structure.
Further preferably, the device further comprises a base, and the upright posts and the base are fixed on the side face of the base.
Further preferably, the bottom end of the telescopic mechanism is fixed in a groove on the top surface of the base.
Further preferably, the top surface of the base has a recess, and the recess is located at the positions of the other ends of the third and fourth links and the other end of the second link of the linkage mechanism.
Further preferably, the two clamping pieces are obliquely arranged and symmetrical to each other.
Further preferably, the telescopic mechanism adopts a piezoelectric ceramic actuator, the top end of a telescopic rod of the piezoelectric ceramic actuator is abutted against a bulge on the lower side surface of the connecting rod, and the top end of the telescopic rod of the telescopic mechanism is embedded into a concave of the bulge.
The micro-operation clamping mechanism is designed to better complete micro-operation and micro-assembly tasks, so that laser detection is arranged at the clamping piece to perform on-line detection on the position and clamping force information of the tail end clamping arm of the precise micro-operation mechanism in the clamping process, and damage to the tail end clamping arm or an operated object when the precise micro-operation mechanism is used for clamping the micro-object is avoided.
On the other hand, the requirements of degree-of-freedom pose adjustment and precise positioning control are met, and the micro-motion platform is required to have the characteristics of decoupling of output displacement, large stroke, high resolution and multiple degrees of freedom.
The invention discloses an artificially intelligent controlled ultra-precise micro-nano operating system which is a system with symmetrical left-right structure. To simplify the model, a half system model of the micro-operated clamping mechanism is built. The laser emitted by the laser sensor irradiates the surface of the clamping piece, so that the output displacement q of the clamping piece is obtained, and a dynamics equation of a half system model of the micro-operation clamping mechanism is designed as follows:
wherein M (q) is the mass,
g (q) is a gravity term, τ is a control moment, τ is a coriolis force, centrifugal force d Is an external moment. For convenience of description, the variables are simplified: m (q) is abbreviated as M, < >>
Abbreviated as C, G (q) is abbreviated as G.
And (3) making: m=m 0 +E M ，C＝C 0 +E C ，G＝G 0 +E G, wherein M0 Is of nominal mass, C 0 For nominal Golgi force, centrifugal force, G 0 Is the nominal gravity term. The method for identifying the parameters comprises the following steps of: nominal mass M 0 Nominal coriolis force, centrifugal force C 0 Nominal gravity term G 0 。E M 、E C and EG Respectively M (q),
And modeling errors for G (q).
An artificial intelligent controller (abbreviated as AIC) based on a nominal model is designed, and the output displacement can accurately track a desired displacement track even if nonlinear hysteresis, external disturbance and the like exist in a micro-operation clamping mechanism. For this purpose, the displacement tracking error is defined as:
e(t)＝q d (t) -q (t) (3) wherein q d (t) is an ideal displacement signal; q (t) is the actual displacement signal.
Defining an error synthesis function as:
wherein Λ > 0.
Definition of the definition
Then->
Then is +.>
wherein ,
the AIC controller is designed as follows:
wherein ,KP ＞0，K i ＞0；τ m Is a control law based on a nominal model; τ r Is a robust term.
τ r ＝K r sgn(s) (7)
Drawings
FIG. 1 is a schematic diagram (one) of the overall structure of the embodiment;
FIG. 2 is a schematic diagram of the overall structure of the embodiment (II);
FIG. 3 is a schematic diagram of one-half of an embodiment;
FIG. 4 is a control system flow diagram;
FIG. 5 is a schematic diagram of an electrical system signal transfer process;
FIG. 6 is a displacement tracking diagram of the control system;
FIG. 7 (a) is a displacement error curve generated by the AIC controller;
fig. 7 (b) is a displacement error curve generated by the PID controller.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which are derived by a person skilled in the art based on the embodiments of the invention, fall within the scope of protection of the invention.
Examples:
as shown in fig. 1, the micro-operation clamping mechanism described in this embodiment includes two laser sensors 1, two clamping pieces 20 and a base 28, wherein the base 28 is provided with two symmetrical and parallel linkage mechanisms 2 and two telescopic mechanisms 3 respectively installed on the two linkage mechanisms 2, the two clamping pieces 20 are respectively installed on the two linkage mechanisms 3, the two laser sensors 1 are respectively installed at the side of the outer sides of the two clamping pieces 20, and the laser sensing heads of the laser sensors 1 correspond to the clamping ends of the clamping pieces 1; the telescopic rods of the two telescopic mechanisms extend out to drive the two linkage mechanisms to drive the two clamping pieces to clamp the object, and when the telescopic rods of the two telescopic mechanisms retract to drive the two linkage mechanisms to drive the two clamping pieces to open and loosen the object.
In order to better realize the requirements of multi-degree-of-freedom pose adjustment and precise positioning control, the micro-motion platform needs to have the characteristics of output displacement decoupling, large stroke, high resolution and multi-degree-of-freedom, and the micro-manipulator formed by the micro-manipulator and the micro-motion platform is reasonably and effectively designed according to the requirements of system structural design and real-time precise detection: the middle part of the top surface of the base 28 is provided with a stand column 283, and two linkage mechanisms 2 are respectively arranged on two corresponding side surfaces of the stand column 283; the two linkage mechanisms 2 comprise a first connecting rod 21, a second connecting rod 22, a third connecting rod 23, a fourth connecting rod 24, a fifth connecting rod 25, a sixth connecting rod 26 and a seventh connecting rod 27, wherein one end of the first connecting rod 21 is hinged with the side surface of the top end of the upright post, and the other end of the first connecting rod is hinged with one end of the second connecting rod 22; one end of a connecting rod III 23 at the other end of the connecting rod II 22 is hinged; the other end of the third connecting rod 23 is hinged with the side surface of the fifth connecting rod 25; one end of the fifth connecting rod 25 is hinged with the top surface end of the base, and the other end of the fifth connecting rod is hinged with one end of the lower side surface of the seventh connecting rod 27; one end of the connecting rod six 26 is also hinged with the top surface end part of the base 28, and the other end of the connecting rod six is hinged with the lower side surface end part of the connecting rod seven 27; one end of the fourth connecting rod 24 is hinged with the middle part of the second connecting rod 22, and the other end of the fourth connecting rod is hinged with the top surface of the base 28; the bottom ends of the two clamping pieces 20 are respectively arranged at the other end part of the connecting rod seven 27, the telescopic mechanism 3 is arranged below the connecting rod one, the top end of the telescopic rod of the telescopic mechanism 3 is in contact with the lower side surface of the connecting rod one 21, and the other ends of the connecting rod three 23, the connecting rod four 24 and the connecting rod two 22 are respectively spaced from the top surface of the base 28.
Based on the advantages of high response speed, high resolution, high force density and the like of piezoelectric ceramics, the piezoelectric ceramics are widely used in micro-grippers; and the flexible amplifying mechanism with compact structure and high displacement resolution is widely used for the characteristics of the micro-gripper structure, so that the telescopic mechanism 3 adopts a piezoelectric ceramic actuator, the top end of a telescopic rod of the piezoelectric ceramic actuator is abutted against the protrusion 211 on the lower side surface of the first connecting rod 21, and the top end of the telescopic rod of the telescopic mechanism is embedded into the recess 2111 of the protrusion 211, so that the telescopic rod of the telescopic mechanism is more stable and reliable when the telescopic rod of the piezoelectric ceramic actuator is abutted and pushed up.
The piezoelectric ceramic bottom is fixedly connected to the base through the bolt locking mechanism, wherein laser of the laser sensor irradiates the outer sides of the top ends of the two clamping pieces and is used for collecting displacement of the top ends of the clamping pieces in real time, and therefore a high-precision control effect is achieved.
The two linkage mechanisms are of a bilateral symmetry structure, and all hinged positions in the linkage mechanisms are connected by adopting flexible hinges; the flexible hinge is formed by connecting flexible sheets, and the flexible sheets, the connecting rods, the base and the clamping sheets are mutually combined into an integrated structure. The novel portable electric power generation device is reasonable and reliable in structural design, and service performance is further improved.
When the clamping piece clamps an object, the telescopic rod of the piezoelectric ceramic actuator pushes upwards to enable the first connecting rod to rotate around the first flexible hinge, so that the first connecting rod is driven to pull the second connecting rod, and the third connecting rod, the fourth connecting rod, the fifth connecting rod, the sixth connecting rod and the seventh connecting rod are caused to be close to the side face direction of the upright post, so that the two clamping pieces are continuously folded to clamp the object; after the telescopic rod of the piezoelectric ceramic actuator is retracted to the original position, the two clamping pieces are opened and the object is loosened.
In this embodiment, the second link 22 is a second link with a 7-shaped cross section, and the fourth link 24 is disposed in a recess of the second 7-shaped link. The structure is reasonable in design, so that the multi-degree-of-freedom pose adjustment and precise positioning control performance are better.
In this embodiment, the base 4 is further included, and the upright 283 and the base 28 are fixed to the sides of the base.
In this embodiment, the bottom end of the telescopic mechanism 3 is fixed in the top recess 282 of the base 28. The positioning and fixing of the telescopic mechanism are firmer and more reliable.
In the present embodiment, the top surface of the base 28 has a recess 281, and the recess 281 is located at the positions of the other ends of the link three 23, the link four 24, and the other end of the link two 22 of the linkage mechanism 2. The concave connecting rod III, the connecting rod IV and the connecting rod II have enough movable space when in linkage, so that the design is more reasonable.
In this embodiment, the two clamping plates 20 are disposed obliquely and are symmetrical to each other. And the clamping force of the micro-operating mechanism is improved.
The invention discloses an artificially intelligent controlled ultra-precise micro-nano operating system which is a system with symmetrical left-right structure. To simplify the model, a half system architecture is built. Fig. 3 is a schematic diagram of a half structure of an embodiment, wherein laser light 101 emitted from a laser sensor 1 irradiates the surface of a holding sheet 20, so as to obtain an output displacement q of the holding sheet 20, and a dynamic model of the system is designed as follows:
wherein M (q) is the mass,
is God' sForce, centrifugal force, G (q) is the gravity term, τ is the control moment, τ d Is an external moment. />
And (3) making: m=m 0 +E M ，C＝C 0 +E C ，G＝G 0 +E G, wherein M0 Is of nominal mass, C 0 For nominal Golgi force, centrifugal force, G 0 Is a nominal gravity term; e (E) M 、E C and EG Respectively M (q),
And modeling errors for G (q).
The control objective of the system is to design an artificial intelligent controller (abbreviated as AIC) based on a nominal model, and the output displacement can accurately track the expected displacement track even if the micro-operation clamping mechanism has uncertainty such as nonlinear hysteresis, external disturbance and the like. For this purpose, the displacement tracking error is defined as:
e(t)＝q d (t)-q(t) (3)
wherein ,qd (t) is an ideal displacement signal; q (t) is the actual displacement signal.
Defining an error synthesis function as:
wherein Λ > 0.
Definition of the definition
Then->
Then from formula (4)
wherein ,
the AIC controller is designed as follows:
wherein ,KP ＞0，K i ＞0；τ m Is a control law based on a nominal model; τ r Is a robust term.
τ r ＝K r sgn(s) (7)
A flow chart of the control system of the micro-operating gripping mechanism is shown in fig. 4. Ideal displacement signal q d And (t) and the actual displacement signal q (t) are subtracted to obtain an error signal e (t), the error signal is input into the AIC controller to obtain a control signal tau of the AIC controller and acts on the micro-operation clamping mechanism of the physical object to obtain the actual displacement of the micro-operation clamping mechanism, and the actual displacement is fed back and output to form closed loop control.
Fig. 5 is a schematic diagram of an electrical system signaling process. The digital quantity signal tau output by the AIC controller enters an analog output card PCI 6229 to be changed into an analog quantity signal, and the analog quantity signal is output to a voltage amplifier to obtain amplified voltage u, so that an electric control effect of controlling large voltage by small voltage is obtained. Then the micro-operation clamping mechanism acts and generates displacement, the laser displacement sensor measures the actual displacement of the micro-clamp, and an analog quantity signal obtained by the laser displacement sensor is changed into a digital quantity signal through the analog acquisition card PCI 6229, and the digital quantity signal is fed back to the AIC controller, so that closed-loop control is formed.
The aim of the control is to enable the output displacement q of the control system under disturbance to track the ideal displacement q d High-precision track tracking is realized. Considering that PID controllers are the most widely used controllers in current industrial applications, AIC controllers will perform on a variety of performance indicators andthe PID controller performs the comparison. The parameter selections for both controllers are shown in table 1.
Table 1 controller parameter selection
In order to further observe the tracking capability of the AIC controller, let the system track a periodic sinusoidal signal with a frequency of 1Hz and an amplitude of 120 μm, the experimental results are shown in fig. 6, fig. 7 (a) and fig. 7 (b).
Referring to fig. 6, both aic and PID controllers can implement tracking of sinusoidal signals. Referring to fig. 7 (a) and 7 (b), the error generated by the PID controller fluctuates synchronously with the track signal, and the maximum error reaches 1 μm, in comparison, the error fluctuation generated by the AIC controller is much smaller than the error of the PID controller, and is in a substantially stable state. Therefore, the comprehensive control performance of the AIC controller is higher than that of the PID controller, and the precise control of the micro-operation clamping mechanism is realized.
The present invention is not limited to the above-described preferred embodiments, and any person who can obtain other various products under the teaching of the present invention, however, any change in shape or structure of the product is within the scope of the present invention, and all the products having the same or similar technical solutions as the present application are included.
Claims (10)
1. An artificially intelligent controlled ultra-precise micro-nano operating system is characterized by comprising a micro-operation clamping mechanism and a control system;
the micro-operation clamping mechanism comprises two laser sensors, two clamping pieces and a base, wherein the base is provided with two symmetrical and parallel linkage mechanisms and two telescopic mechanisms respectively arranged on the two linkage mechanisms, the two clamping pieces are respectively arranged on the two linkage mechanisms, the two laser sensors are respectively arranged at the sides of the outer side surfaces of the two clamping pieces, and a laser sensing head of each laser sensor corresponds to the clamping end of each clamping piece; the telescopic rods of the two telescopic mechanisms extend to drive the two linkage mechanisms to drive the two clamping pieces to clamp the object, and when the telescopic rods of the two telescopic mechanisms retract to drive the two linkage mechanisms to drive the two clamping pieces to open and loosen the object;
establishing a half system model of the micro-operation clamping mechanism; the laser emitted by the laser sensor irradiates the surface of the clamping piece, so that the output displacement q of the clamping piece is obtained, and a dynamics equation of a half system model of the micro-operation clamping mechanism is designed as follows:
wherein M (q) is the mass,
g (q) is a gravity term, τ is a control moment, τ is a coriolis force, centrifugal force d Is an external moment; for convenience of description, the variables are simplified: m (q) is abbreviated as M, < >>
Abbreviated as C, G (q) is abbreviated as G; τ is the output of the controller; τ d Is an external disturbance;
and (3) making: m=m 0 +E M ，C＝C 0 +E C ，G＝G 0 +E G, wherein M0 Is of nominal mass, C 0 For nominal Golgi force, centrifugal force, G 0 Is a nominal gravity term; the method for identifying the parameters comprises the following steps of: nominal mass M 0 Nominal coriolis force, centrifugal force C 0 Nominal gravity term G 0 ；E M 、E C and EG Respectively M (q),
And modeling error of G (q);
the control system is used for designing an artificial intelligent controller based on a nominal model, which is abbreviated as AIC, and the displacement tracking error is defined as follows:
e(t)＝q d (t)-q(t) (3)
wherein ,qd (t) is an ideal displacement signal; q (t) is an actual displacement signal, and hereinafter q (t) is abbreviated as q, q is d (t) is abbreviated as q d ；
Defining an error synthesis function s, hereinafter e (t) is abbreviated as e, s is an abbreviation of s (t), and both represent the same meaning:
wherein Λ > 0;
definition of the definition
Then->
Then from formula (4)
wherein ,
the AIC controller is designed as follows:
τ r ＝K r sgn(s) (7)
wherein the coefficient K P ＞0，K i ＞0，K r ＞0；τ m Is a control law based on a nominal model; τ r Is a robust term.
2. The artificial intelligence controlled ultra-precise micro-nano operating system according to claim 1, wherein the micro-operation clamping mechanism is further: the middle part of the top surface of the base is provided with an upright post, and the two linkage mechanisms are respectively arranged on two corresponding side surfaces of the upright post; the two linkage mechanisms comprise a first connecting rod, a second connecting rod, a third connecting rod, a fourth connecting rod, a fifth connecting rod, a sixth connecting rod and a seventh connecting rod, one end of the first connecting rod is hinged with the side surface of the top end of the upright post, and the other end of the first connecting rod is hinged with one end of the second connecting rod; one end of a connecting rod III at the other end of the connecting rod II is hinged; the other end of the connecting rod III is hinged with the side surface of the connecting rod V; one end of the connecting rod five is hinged with the top surface end part of the base, and the other end of the connecting rod five is hinged with the lower side surface end part of the connecting rod seven; one end of the connecting rod six is also hinged with the top surface end part of the base, and the other end of the connecting rod six is hinged with the lower side surface end part of the connecting rod seven; one end of the connecting rod IV is hinged with the middle part of the connecting rod II, and the other end of the connecting rod IV is hinged with the top surface of the base; the bottom ends of the two clamping pieces are respectively arranged at the other end part of the connecting rod seven, the telescopic mechanism is arranged below the connecting rod one, the top end of the telescopic rod of the telescopic mechanism is in contact with the lower side surface of the connecting rod one, and the other ends of the connecting rod three and four and the other end of the connecting rod two are spaced from the top surface of the base.
3. The artificial intelligence controlled ultra-precise micro-nano operating system of claim 2, wherein the micro-operation clamping mechanism is further: the second connecting rod is a second connecting rod with a 7-shaped section, and the fourth connecting rod is arranged in the concave of the second 7-shaped connecting rod.
4. The artificial intelligence controlled ultra-precise micro-nano operating system of claim 2, wherein the micro-operation clamping mechanism is further: all the hinged parts are connected by adopting flexible hinges.
5. The artificial intelligence controlled ultra-precise micro-nano operating system according to claim 4, wherein the micro-operation clamping mechanism is further: the flexible hinge is formed by connecting flexible sheets, and the flexible sheets, the connecting rods, the base and the clamping sheets are mutually combined into an integrated structure.
6. The artificial intelligence controlled ultra-precise micro-nano operating system of claim 2, wherein the micro-operation clamping mechanism is further: still include the base, stand and base are all fixed in the side of base.
7. The artificial intelligence controlled ultra-precise micro-nano operating system of claim 2, wherein the micro-operation clamping mechanism is further: the bottom of telescopic machanism is fixed in the top surface recess of base.
8. The artificial intelligence controlled ultra-precise micro-nano operating system of claim 2, wherein the micro-operation clamping mechanism is further: the top surface of the base is provided with a concave, and the concave is positioned at the positions of the other ends of the third connecting rod and the fourth connecting rod and the other end of the second connecting rod of the linkage mechanism.
9. The artificial intelligence controlled ultra-precise micro-nano operating system according to claim 1, wherein the micro-operation clamping mechanism is further: the two clamping sheets are obliquely arranged and are symmetrical to each other.
10. The artificially controlled ultra-precise micro-nano operating system according to any one of claims 1 to 9, wherein the micro-operation clamping mechanism is further: the telescopic mechanism adopts a piezoelectric ceramic actuator, the top end of a telescopic rod of the piezoelectric ceramic actuator is abutted against a bulge on the lower side surface of the connecting rod, and the top end of the telescopic rod of the telescopic mechanism is embedded into a bulge concave.
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| CN112029646A (en) * | 2020-07-19 | 2020-12-04 | 温州职业技术学院 | Piezoelectric ceramic driven micro-nano operating mechanism |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07153788A (en) * | 1993-11-26 | 1995-06-16 | Toshiba Corp | Equipment and method for wire clamping and wire-bonding equipment |
| CN101710229A (en) * | 2009-12-07 | 2010-05-19 | 天津大学 | Two-translation and one-rotation precision positioning workbench for nanoimprint lithography system |
| WO2015113998A1 (en) * | 2014-01-28 | 2015-08-06 | Katholieke Universiteit Leuven | Positioning motor and method of operation |
| JP2016197970A (en) * | 2015-04-06 | 2016-11-24 | 有限会社メカノトランスフォーマ | Actuator |
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| CN104993735B (en) * | 2015-07-21 | 2017-04-12 | 安徽理工大学 | Two-degree-of-freedom precision micro positioning system and two-degree-of-freedom precision micro positioning method for giant magnetostrictive actuation |
| US9868217B2 (en) * | 2015-09-04 | 2018-01-16 | Univeristy Of Maryland | All-elastomer 3-axis contact resistive tactile sensor arrays and micromilled manufacturing methods thereof |
| CN108297086B (en) * | 2018-03-29 | 2021-09-14 | 天津大学 | Asymmetric two-stage displacement amplification flexible micro-operation mechanism |
| CN109249416B (en) * | 2018-09-30 | 2022-01-18 | 重庆大学 | Micro clamp with clamping jaw being fiber Bragg grating and clamping force self-sensing function |
| CN109909976B (en) * | 2019-03-18 | 2021-12-24 | 天津大学 | Symmetrical space stereo micro-manipulator with three-stage motion amplifying mechanism |
-
2019
- 2019-10-30 CN CN201911097336.3A patent/CN110696028B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07153788A (en) * | 1993-11-26 | 1995-06-16 | Toshiba Corp | Equipment and method for wire clamping and wire-bonding equipment |
| CN101710229A (en) * | 2009-12-07 | 2010-05-19 | 天津大学 | Two-translation and one-rotation precision positioning workbench for nanoimprint lithography system |
| WO2015113998A1 (en) * | 2014-01-28 | 2015-08-06 | Katholieke Universiteit Leuven | Positioning motor and method of operation |
| JP2016197970A (en) * | 2015-04-06 | 2016-11-24 | 有限会社メカノトランスフォーマ | Actuator |
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