CN204320632U - A kind of single excitation ultrasonic elliptical vibratory microfabrication workbench - Google Patents

A kind of single excitation ultrasonic elliptical vibratory microfabrication workbench Download PDF

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Publication number
CN204320632U
CN204320632U CN201420763722.8U CN201420763722U CN204320632U CN 204320632 U CN204320632 U CN 204320632U CN 201420763722 U CN201420763722 U CN 201420763722U CN 204320632 U CN204320632 U CN 204320632U
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China
Prior art keywords
workbench
ultrasonic
elliptical
vibration
modal transducer
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Withdrawn - After Issue
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CN201420763722.8U
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Chinese (zh)
Inventor
伯洁
殷振
曹自洋
郭丽华
汪帮富
杨建锋
李艳
陈玉荣
吴程红
柏永婷
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Suzhou University of Science and Technology
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Suzhou University of Science and Technology
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Abstract

The utility model discloses a kind of single excitation ultrasonic elliptical vibratory microfabrication workbench, comprise vibration-isolating platform, transverse shifting workbench, vertically move workbench, housing unit, the single-excitation ultrasonic oval vibration energy converter be placed in housing unit, ultrasonic power, elliptical vibration modal transducer and be arranged on the small-sized workbench of elliptical vibration modal transducer front end.Described housing unit comprises front apron, sleeve and backboard; Described single-excitation ultrasonic oval vibration energy converter comprises bolt and is set in back shroud, piezoelectric ceramic piece, electrode slice and the front shroud on bolt successively, and back shroud, piezoelectric ceramic piece, electrode slice and front shroud are connected compression by bolt by back shroud and front shroud; Described elliptical vibration modal transducer is arranged on the front end of front shroud, for the composite construction of straight beam and cant beam, the longitudinal ultrasonic vibration that single-excitation ultrasonic oval vibration energy converter produces can be converted to the vertical curved composite ultrasonic elliptical vibratory of elliptical vibration modal transducer end and small-sized workbench by this elliptical vibration modal transducer, and then drives the workpiece on small-sized workbench to carry out ultrasonic elliptical vibratory.

Description

A kind of single excitation ultrasonic elliptical vibratory microfabrication workbench
Technical field
The utility model is designed into hard crisp Micrometer-Nanometer Processing Technology field of waiting difficult-to-machine material, especially relates to a kind of microfabrication workbench utilizing list excitation ultrasonic elliptical vibratory to carry out secondary process.
Background technology
The efficient high-quality high reliability processing of hard crisp difficult-to-machine material remains a difficult problem so far in the world.The characteristic feature of hard brittle material is that fragility is high, fracture toughness is low, elastic limit and intensity are closely, add man-hour, the load of bearing when material exceedes elastic limit, will rupture failure be there is, form crackle and pit at machined surface, have a strong impact on its surface quality, working (machining) efficiency and reliability of material.In order to solve a processing difficult problem for this kind of material, manufacture field, various countries numerous and confused development of new cutter material, developing new process equipment, test new processing method, try hard to improve working (machining) efficiency and the process reliability of such material.
In order to solve the Ultraprecision Machining problem of hard brittle material in the effective mode of low cost, ultrasonic vibration is applied in processing processing, study widely both at home and abroad confirmed ultrasonic vibrating machining at raising material removing rate, improve machined surface quality and machining accuracy, reduce workpiece surface damage and extend in wheel life etc. and show certain superiority.In order to give full play to the advantage of ultrasonic vibrating machining, dissimilar two dimensional ultrasonic vibration process technology is successively proposed by Japan and Chinese scholar.A kind of two dimensional ultrasonic vibration auxiliary machining device for large-sized structural parts processing that the people such as Zhao Bo in 2007 propose, the ultrasonic vibration in two directions is applied on workpiece respectively by two generators, although showed excellent performance in all many-sides such as working (machining) efficiency and crudy, but this technology work in-process also exists works as load, the phenomenon of vibration velocity instability during the change such as temperature machining condition, and the instability of vibration velocity will cause the resonant frequency in Ultrasonic machining to be drifted about, vibration amplitude reduces, working (machining) efficiency reduces, crudy instability waits series of problems, and the adjustment of its resonant condition relates to mating of two supersonic generators and transducer and workpiece, implement more difficult.
In order to overcome the deficiency existed in above-mentioned ultrasonic vibrating machining technology and ultrasonic elliptical vibratory technology, the utility model utilizes novel single excitation ultrasonic elliptical vibratory technology, provide a kind of microfabrication workbench, realize the ultrasonic elliptical vibratory of workbench and microscale workpieces, this technique improves the job stability of ultrasonic elliptical vibratory system, applied widely, stable performance, easy and simple to handle, working (machining) efficiency and the crudy of hard brittle material micro parts can be improved further.
Summary of the invention
The utility model provides a kind of novel list excitation ultrasonic elliptical vibratory microfabrication workbench, object is to overcome the deficiency existed in existing ultrasonic vibration workbench, simplifies the structure of ultrasonic elliptical vibratory system, reduces the cost, reduces control difficulty, raising system works stability, the working (machining) efficiency improving hard brittle material micro parts and crudy.
A kind of single excitation ultrasonic elliptical vibratory microfabrication workbench, comprises vibration-isolating platform, by the transverse shifting workbench of bolt-connection above vibration-isolating platform, above transverse shifting workbench, vertically moves workbench, housing unit, the single-excitation ultrasonic oval vibration energy converter be placed in housing unit, elliptical vibration modal transducer, the small-sized workbench being arranged on elliptical vibration modal transducer front end and ultrasonic power by bolt-connection.Below elliptical vibration modal transducer end, be provided with supplemental support, between elliptical vibration modal transducer end and supplemental support, be provided with rolling support body.Described housing unit is vertically moving above workbench by bolt-connection, and described housing unit comprises front apron, sleeve and backboard; Described single-excitation ultrasonic oval vibration energy converter entirety is in cylinder, it comprises bolt and is set in back shroud, piezoelectric ceramic piece, electrode slice and the front shroud on bolt successively, front shroud is provided with the ring flange connected with housing unit, back shroud, piezoelectric ceramic piece, electrode slice and front shroud are connected compression by bolt by back shroud and front shroud, constitute the energy conversion part of single-excitation ultrasonic oval vibration energy converter, the ultrasonic electric signal that ultrasonic-frequency power supply exports can be converted to the longitudinal ultrasonic vibration of single-excitation ultrasonic oval vibration energy converter.
Described elliptical vibration modal transducer and front shroud are made into the front end that is integrally provided in front shroud, or the welding of elliptical vibration modal transducer is arranged on the front end of front shroud.Elliptical vibration modal transducer comprises the composite construction of straight beam and cant beam formation, straight beam and cant beam are rectangle perpendicular to the cross section of its central axis, the central axis of straight beam and the central axes of single-excitation ultrasonic oval vibration energy converter, one end of straight beam connects with the front shroud of ultrasonic transducer, and the other end overhangs; The side of one end of cant beam and the front shroud displaced central axis line of ultrasonic transducer connects, the middle part of the other end and straight beam connects, the central axis of cant beam becomes 0-90 degree angle with the central axis of straight beam, and straight beam and cant beam are arc transition with the connection place of ultrasonic transducer front shroud and connect.The geometric centre axes of cant beam is parallel with plane to be processed with the plane that the geometric centre axes of straight beam is formed.
The sub-assembly that elliptical vibration modal transducer is formed after being arranged on single-excitation ultrasonic oval vibration energy converter front end is called single excitation ultrasonic elliptical vibratory transducer, to be the object of straight beam and cant beam composite construction be elliptical vibration modal transducer in order to change the mode of oscillation of single excitation ultrasonic elliptical vibratory transducer, make its longitudinal vibration mode frequency and flexural vibration mode frequency close to or equal; Due to the existence of oblique beam structure, the longitudinal ultrasonic vibration that single-excitation ultrasonic oval vibration energy converter produces is after being delivered to cant beam, a part of extensional vibration component and a part of flexural vibrations component is decomposed at cant beam root, the extensional vibration component decomposed when cant beam and after flexural vibrations component is delivered to straight beam, with the extensional vibration phase compound that straight beam is propagated, finally formed at straight beam end and there is the extensional vibration component of certain phase difference and the ultrasonic elliptical vibratory of flexural vibrations component compound.
Small-sized workbench connects the front end being arranged on elliptical vibration modal transducer by welding, joint bolt or press plate mechanism; After ultrasonic vibrational energy is delivered to elliptical vibration modal transducer end from single-excitation ultrasonic oval vibration energy converter, be converted to the vertical curved composite ultrasonic elliptical vibratory of extensional vibration and the flexural vibrations compound with certain phase difference, be namely converted to the vertical curved composite ultrasonic elliptical vibratory of elliptical vibration modal transducer end; And drive small-sized workbench to do ultrasonic elliptical vibratory together with elliptical vibration modal transducer end, and then the workpiece on small-sized workbench is driven to carry out ultrasonic elliptical vibratory.
Single-excitation ultrasonic oval vibration energy converter is placed in housing unit, the ring flange of single-excitation ultrasonic oval vibration energy converter is arranged in the fovea superior seam of sleeve, front apron is arranged on the opposite side of ring flange, fixation is risen to whole single-excitation ultrasonic oval vibration energy converter, backboard is arranged on the other end that sleeve does not have seam, prevent the foreign material such as dust, iron filings from entering in housing unit, affect single-excitation ultrasonic oval vibration energy converter service behaviour; Compare the ultrasonic vibration Work platform system that existing document is introduced, this list encourages ultrasonic elliptical vibratory microfabrication workbench to have, and power capacity is large, energy conversion efficiency is high, structure is simple, easy to manufacture, cost is low, the rigidity of structure is large, control-driven system is simple and vibrate the advantages such as stable work in work is stable.
Further, described single-excitation ultrasonic oval vibration energy converter only has one group of extensional vibration piezoelectric ceramic piece.
Further, described single-excitation ultrasonic oval vibration energy converter only needs a road ultrasonic electric signal excitation.
Further, the operating frequency range of described single-excitation ultrasonic oval vibration energy converter is 18kHz-40kHz.
The utility model have employed mechanical oscillation MODAL TRANSFORMATION OF A mechanism and the extensional vibration of single-excitation ultrasonic oval vibration energy converter conversion is decomposed into the extensional vibration of straight beam, the extensional vibration of cant beam and flexural vibrations component, finally synthesize vertical curved composite ultrasonic elliptical vibratory at straight beam end, simplify the overall structure of single excitation ultrasonic elliptical vibratory workbench, greatly reduce the complexity of vibrational system, reduce manufacture, assembly difficulty and production cost; This utility model only needs a road control circuit and ultrasonic-frequency power supply to encourage in addition, control difficulty is low, avoid the complicated ultrasonic-frequency power supply development cost that two-phase or multiphase ultrasonic vibration is compounded to form elliptical vibration transducer, simplify control circuit and ultrasonic-frequency power supply structure, reduce control circuit and ultrasonic-frequency power supply cost, be easy to realize the integrated of control circuit and ultrasonic-frequency power supply, improve system works reliability, stable work in work, has a extensive future.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the top view of the utility model structural representation.
Fig. 3 is the front view of single excitation ultrasonic elliptical vibratory transducer in the utility model.
Fig. 4 is the top view of single excitation ultrasonic elliptical vibratory transducer in the utility model.
Fig. 5 is application example schematic diagram of the present utility model.
Number in the figure illustrates: 1. bolt, 2. back shroud, 3. piezoelectric ceramic piece, 4. electrode slice, 5. front shroud, 6. ring flange, 7. elliptical vibration modal transducer, 8. small-sized workbench, 9. front apron, 10. sleeve, 11. backboards, 12. ultrasonic-frequency power supplies, 13. vertically move workbench, 14. transverse shifting workbenches, 15. vibration-isolating platforms, 16. supplemental support, 17. rolling support bodies.
Detailed description of the invention
Shown in composition graphs 1,2,3,4, a kind of single excitation ultrasonic elliptical vibratory microfabrication workbench, comprises vibration-isolating platform 15, by the transverse shifting workbench 14 of bolt-connection above vibration-isolating platform 15, by bolt-connection vertically moving workbench 13, housing unit, the single-excitation ultrasonic oval vibration energy converter be placed in housing unit, ultrasonic-frequency power supply 12, elliptical vibration modal transducer 7 and being arranged on the small-sized workbench 8 of elliptical vibration modal transducer 7 front end above transverse shifting workbench 14.Below elliptical vibration modal transducer 7 end, be provided with supplemental support 16, between elliptical vibration modal transducer 7 end and supplemental support 16, be provided with rolling support body 17.Described housing unit is vertically moving above workbench 13 by bolt-connection, and transverse shifting workbench 14 is 100mm with the impulse stroke vertically moving workbench 13.
Described housing unit comprises front apron 9, sleeve 10 and backboard 11; Described single-excitation ultrasonic oval vibration energy converter entirety is in cylinder, it comprises bolt 1 and is set in back shroud 2, piezoelectric ceramic piece 3, electrode slice 4 and the front shroud 5 on bolt 1 successively, front shroud 5 is provided with the ring flange 6 connected with housing unit, back shroud 2, piezoelectric ceramic piece 3, electrode slice 4 and front shroud 5 are connected compression by bolt 1 by back shroud 2 and front shroud 5, constitute the energy conversion part of single-excitation ultrasonic oval vibration energy converter, the ultrasonic electric signal that ultrasonic-frequency power supply 12 can be exported is converted to the longitudinal ultrasonic vibration of single-excitation ultrasonic oval vibration energy converter.Single-excitation ultrasonic oval vibration energy converter only has one group of extensional vibration piezoelectric ceramic piece 3, piezoelectric ceramic transducer section diameter 30mm, and piezoelectric ceramic piece 3 is PZT-8, is of a size of: Ф 30 × Ф 15 × 5, the sheet number of piezoelectric ceramic piece 3 is 2.
Elliptical vibration modal transducer 7 and front shroud 5 are made into the front end that an one-piece parts is arranged on front shroud 5, elliptical vibration modal transducer 7 comprises the composite construction of straight beam and cant beam formation, straight beam and cant beam are rectangle perpendicular to the cross section of its central axis, the central axis of straight beam and the central axes of single-excitation ultrasonic oval vibration energy converter, one end of straight beam connects with the front shroud 5 of ultrasonic transducer, the other end overhangs, and the cross section length of side is 12 ×12mm, long 72mm; The side of one end of cant beam and the front shroud 5 displaced central axis line of ultrasonic transducer connects, and the central axis distance of the connection place distance front shroud 5 of cant beam central axis and front shroud 5 is 25mm, and the middle part of the other end and straight beam connects, and the cross section length of side is 12 ×12mm.The central axis of cant beam becomes 30 angles with the central axis of straight beam, and straight beam and cant beam are arc transition with the connection place of ultrasonic transducer front shroud 5 and connect, and transition arc radius is 5mm.The geometric centre axes of cant beam is parallel with plane to be processed with the plane that the geometric centre axes of straight beam is formed.
Small-sized workbench 8 is arranged on the front end of elliptical vibration modal transducer 7 by welding; After ultrasonic vibrational energy is delivered to elliptical vibration modal transducer 7 end from single-excitation ultrasonic oval vibration energy converter, be converted to the vertical curved composite ultrasonic elliptical vibratory of extensional vibration and the flexural vibrations compound with certain phase difference, be namely converted to the vertical curved composite ultrasonic elliptical vibratory of elliptical vibration modal transducer 7 end; And drive small-sized workbench 8 to do ultrasonic elliptical vibratory together with elliptical vibration modal transducer 7 end, and then drive the workpiece on small-sized workbench to carry out ultrasonic elliptical vibratory, the work top of small-sized workbench 8 is 12 ×12mm, workpiece can use paraffin or glue on the table bonding, screw or pressing plate also can be used to connect on the table.
Single-excitation ultrasonic oval vibration energy converter is placed in housing unit, the ring flange 6 of single-excitation ultrasonic oval vibration energy converter is arranged in the fovea superior seam of sleeve 10, and front apron 9 is arranged on the opposite side of ring flange 6, plays fixation to whole single-excitation ultrasonic oval vibration energy converter, backboard 11 is arranged on the other end that sleeve 10 does not have seam
Intrinsic frequency after single-excitation ultrasonic oval vibration energy converter and elliptical vibration modal transducer 7 connect is 19.84KHz, impedance is 83 ohm, dynamic electric resistor is 19 ohm, ultrasonic-frequency power supply 12 output voltage range is 0-400V, current range is 0-4A, output frequency is 19.84 ± 0.01KHz, and ultrasonic-frequency power supply 12 has automatic frequency tracking function in designated frequency range.
Shown in composition graphs 5, during operation, the electrode slice 4 of single-excitation ultrasonic oval vibration energy converter is connected with ultrasonic-frequency power supply 12, after the electrode slice 4 of single-excitation ultrasonic oval vibration energy converter accesses the signal of telecommunication of ultrasonic-frequency power supply 12 output, due to the inverse piezoelectric effect of piezoelectric ceramic piece 3, piezoelectric ceramic piece 3 will produce longitudinal ultrasonic vibration, namely the electric energy that ultrasonic-frequency power supply 12 exports is converted to longitudinal ultrasonic vibration by single-excitation ultrasonic oval vibration energy converter, and drive whole single-excitation ultrasonic oval vibration energy converter system to carry out longitudinal ultrasonic vibration, after ultrasonic vibrational energy is delivered to elliptical vibration modal transducer 7 end from single-excitation ultrasonic oval vibration energy converter, be converted to the vertical curved composite ultrasonic elliptical vibratory of extensional vibration and the flexural vibrations compound with certain phase difference, namely the vertical curved composite ultrasonic elliptical vibratory of elliptical vibration modal transducer 7 end is converted to, and drive small-sized workbench 8 to do ultrasonic elliptical vibratory together with elliptical vibration modal transducer 7 end.
After on-load voltage runs 10 minutes, single excitation ultrasonic elliptical vibratory microfabrication workbench reaches stable vibration state, now the regulated output voltage of ultrasonic-frequency power supply 12 is 220V, electric current is 1.35A, use laser doppler vibrometer to record ultrasonic elliptical vibratory length semiaxis amplitude and be respectively 14.3 microns and 5.2 microns, and by the dual trace oscilloscope with lissajouf figure calculation function, graphic operation is carried out to the signal that laser doppler vibrometer records, the ultrasonic elliptical vibratory track that axial ratio is 2.73 can be obtained, meet the requirement of ultrasonic elliptical vibratory microfabrication workbench completely.

Claims (6)

1. a single excitation ultrasonic elliptical vibratory microfabrication workbench, is characterized in that: this elliptical vibration processing work platform comprises vibration-isolating platform, by the transverse shifting workbench of bolt-connection above vibration-isolating platform, above transverse shifting workbench, vertically moves workbench, housing unit, the single-excitation ultrasonic oval vibration energy converter be placed in housing unit, elliptical vibration modal transducer, the small-sized workbench being arranged on elliptical vibration modal transducer front end and ultrasonic power by bolt-connection; Below elliptical vibration modal transducer end, be provided with supplemental support, between elliptical vibration modal transducer end and supplemental support, be provided with rolling support body; Described housing unit is vertically moving above workbench by bolt-connection, and housing unit comprises front apron, sleeve and backboard; Described single-excitation ultrasonic oval vibration energy converter entirety is in cylinder, it comprises bolt and is set in back shroud, piezoelectric ceramic piece, electrode slice and the front shroud on bolt successively, front shroud is provided with the ring flange connected with housing unit, back shroud, piezoelectric ceramic piece, electrode slice and front shroud are connected compression by bolt by back shroud and front shroud; Described elliptical vibration modal transducer is arranged on the front end of front shroud, described elliptical vibration modal transducer comprises the composite construction of straight beam and cant beam formation, straight beam and cant beam are rectangle perpendicular to the cross section of its central axis, the central axis of straight beam and the central axes of single-excitation ultrasonic oval vibration energy converter, one end of straight beam connects with the front shroud of ultrasonic transducer, and the other end overhangs; The side of one end of cant beam and the front shroud displaced central axis line of ultrasonic transducer connects, the middle part of the other end and straight beam connects, the central axis of cant beam becomes 0-90 degree angle with the central axis of straight beam, and straight beam and cant beam are arc transition with the connection place of ultrasonic transducer front shroud and connect.
2. single excitation ultrasonic elliptical vibratory microfabrication workbench according to claim 1, is characterized in that: described elliptical vibration modal transducer and front shroud are made into the front end that is integrally provided in front shroud.
3. single excitation ultrasonic elliptical vibratory microfabrication workbench according to claim 1, is characterized in that: described elliptical vibration modal transducer welding is arranged on front shroud front end.
4. the list excitation ultrasonic elliptical vibratory microfabrication workbench according to claim 1 or 2 or 3, is characterized in that: described small-sized workbench is arranged on the front end of elliptical vibration modal transducer by welding.
5. the list excitation ultrasonic elliptical vibratory microfabrication workbench according to claim 1 or 2 or 3, is characterized in that: also comprise joint bolt, for small-sized workbench being connected in the front end of elliptical vibration modal transducer.
6. the list excitation ultrasonic elliptical vibratory microfabrication workbench according to claim 1 or 2 or 3, it is characterized in that: also comprise press plate mechanism, described small-sized workbench is connected in the front end of elliptical vibration modal transducer by press plate mechanism.
CN201420763722.8U 2014-12-09 2014-12-09 A kind of single excitation ultrasonic elliptical vibratory microfabrication workbench Withdrawn - After Issue CN204320632U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104438029A (en) * 2014-12-09 2015-03-25 苏州科技学院 Single excitation ultrasonic elliptic vibration micro-machining working platform
CN108747345A (en) * 2018-06-02 2018-11-06 上海大学 A kind of assembly device for medical transducer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104438029A (en) * 2014-12-09 2015-03-25 苏州科技学院 Single excitation ultrasonic elliptic vibration micro-machining working platform
CN104438029B (en) * 2014-12-09 2016-08-24 苏州科技学院 A kind of single excitation ultrasonic elliptical vibratory microfabrication work platforms
CN108747345A (en) * 2018-06-02 2018-11-06 上海大学 A kind of assembly device for medical transducer

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AV01 Patent right actively abandoned

Granted publication date: 20150513

Effective date of abandoning: 20160824

C25 Abandonment of patent right or utility model to avoid double patenting