CN109866074A - A kind of variable element three-D ultrasonic vibration processing device and processing method - Google Patents

A kind of variable element three-D ultrasonic vibration processing device and processing method Download PDF

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Publication number
CN109866074A
CN109866074A CN201910167097.8A CN201910167097A CN109866074A CN 109866074 A CN109866074 A CN 109866074A CN 201910167097 A CN201910167097 A CN 201910167097A CN 109866074 A CN109866074 A CN 109866074A
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China
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ultrasonic vibration
amplitude transformer
variable element
dimensional
vibration
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王桂莲
王晓
吕秉锐
李彬
刘利
刘振忠
周海波
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Tianjin University of Technology
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Tianjin University of Technology
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Abstract

The invention discloses a kind of variable element three-D ultrasonic vibration processing devices, comprising: lathe shell comprising the first vertical wall and first level wall;Ultrasonic vibration installation is arranged in the first level wall upper support seat comprising the second vertical wall and the second horizontal wall, and second vertical wall and second horizontal wall vertically connect;Main shaft is rotatably supported in first vertical wall, and workpiece is placed in one end;One-dimensional vibrating arm is rotatably supported in second horizontal wall;Two-dimension vibration bar, one end rotatably pass perpendicularly through second vertical wall, and offer multiple skewed slots through the two-dimension vibration bar thereon;Tool heads are fixed on one end of the two-dimension vibration bar;Two amplitude transformers are vertically connected by bolt, the elliptical orbit of generation is reliable, and working frequency is higher, and the present invention also provides a kind of variable element three-D ultrasonic vibration processing methods.

Description

A kind of variable element three-D ultrasonic vibration processing device and processing method
Technical field
The present invention relates to a kind of variable element three-D ultrasonic vibration processing device and processing methods, belong to field of machining.
Background technique
Since modern age, science and technology is rapidly developed, and people are higher and higher for the required precision of part, and traditional machining is aobvious So be no longer satisfied its processing request, reactive ion etching (RIE) technology, LIGA technology, the micro- texture technology of laser surface, table The advanced machining technologies such as face blasting technology, pressure lithography, ultrasonic vibration just come into being, and ultrasonic vibration assistance processing method is not required to Will equipment costly, the requirement to processing environment and rapidoprint is low, has compared with other texture processing methods obvious excellent Gesture strengthens manufacture field in various difficult-to-machine materials and surface finishing and has application.Processing, raising material including difficult-to-machine material Expect surface finishing reinforcing, the processing of weak rigid structural member etc. of mechanical property.By to the scratch on piece surface, microcosmic injustice Etc. being processed, it is able to suppress the generation of burr, microfissure, improves part processing quality, improves the functionality of workpiece surface.
It is divided according to the driving frequency of ultrasonic vibration auxiliary machining device and the principle of driving, ultrasonic vibration auxiliary Processing unit (plant) is broadly divided into resonance type and two kinds of off-resonance type.Resonance type ultrasonic vibration auxiliary machining device is that people are initially use Be also apply more extensive elliptical vibration processing unit (plant), using piezoelectric ceramics excitation energy converter high-frequency resonance state, lead to The amplification for crossing amplitude transformer obtains reasonable amplitude, and working frequency is higher;Off-resonance type ultrasonic vibration auxiliary machining device, Its working principle is that using each axis of piezoelectric ceramics direct drive unit, to realize ultrasonic vibration.Ultrasonic vibration auxiliary is added Tooling is set, and the working frequency of off-resonance type device is relatively low, and the advantage of Ultrasonic machining technology is not embodied completely;Resonance type dress The working frequency set is higher, and main cutting force when cutting can be significantly reduced in machining improves to a certain extent Processing efficiency and machining accuracy.However the research of scholar is concentrated mainly on off-resonance type, it is less to the research of resonance type device, because This, research resonance type device is necessary.
Northwestern Univ USA professor Ehmann proposes a kind of two-dimentional resonance type elliptical vibration auxiliary cutting device of V-arrangement, Vibration in both direction is amplified and be combined together by flexible hinge headstock moves cutter according to elliptical orbit.However the dress Setting the oscillation trajectory at point of a knife is not the synthesis using two longitudinal resonances, but the structure by adjusting energy converter meticulously and Size can be with so that the normal direction of device position of tool tip and tangential vibrations mode have biggish amplitude under some vibration frequency Comparatively ideal ellipse is obtained, the parameter of the elliptic motion of device synthesis is non-adjustable, and direction of vibration is fixed and two are changed The phase difference of energy device vibration is fixed, and limits the application of the type device.Jilin University devises a set of rectilinear Two-dimentional resonance type elliptical vibration auxiliary cutting device, and the realization means of the Parameter adjustable of cutter elliptical vibration track are carried out It discusses.But limited resonant frequency is only rested on, can not achieve and change amplitude is continuously adjusted by frequency, to change ellipse Oscillation trajectory.In addition, the movement of two vertical direction can generate coupling, to influence the precision of elliptical vibration track.Day real name This English of the society of Gu Wu university two proposes a kind of device of three-dimensional resonance type elliptical vibration assisted machining.But the three of this English of society two The generation of dimension elliptical vibration auxiliary machining device point of a knife elliptic motion is two extensional vibrations and a bending vibration based on knife bar The synthesis of dynamic resonance.The elongation of energy converter bar and the bending of vertical direction are synthesized according to certain rules, sky is produced at point of a knife Between three-dimensional elliptical oscillation trajectory.Due to the integral multiple of the driving signal frequency when piezoelectric patches and the high order mode intrinsic frequency of knife bar Resonance could be generated when close, so the difficult design of knife bar, it is difficult to obtain required high order mode;The frequency of three-dimensional elliptical movement Rate and other elliptic motion parameters depend on the nonlinear structural dynamics parameter of knife bar, it is difficult to which autonomous control lacks flexible.
For two-dimentional resonance type elliptical vibration auxiliary machining device, there is scholar to cutter elliptical vibration track at present The realization means of Parameter adjustable are discussed, and can adapt to the requirement of some different shaped faces and processing conditions, but for complexity The motion profile in type face does not still adapt to, and three-dimensional elliptical vibration assistance processing method can just make up this disadvantage, however Scholar is equally less to the research of resonance type three-dimensional elliptical vibration device, and elliptical vibration track is difficult to autonomous control, and current is total to Vibration shape three-dimensional elliptical vibration processing device is far from satisfying the demand made to three-dimensional elliptical vibration machining deeper into research.Cause This, proposes that a kind of variable element three-dimensional resonance ultrasonic vibrating machining device is necessary.
Summary of the invention
The present invention has designed and developed a kind of variable element three-D ultrasonic vibration processing device, by two-dimentional ladder amplitude transformer It opens up skewed slot and one-dimensional amplitude transformer forms rectilinear three-dimensional vibrating mechanism, workpiece is processed, improve the processing essence of workpiece Degree.
The present invention has also designed and developed a kind of variable element three-D ultrasonic vibration processing method, by changing in process The amplitude and phase difference of the input signal of one-dimensional vibrating arm and two-dimension vibration bar, can adapt to the process requirements of different workpieces, mention High manufacturing accuracy.
Technical solution provided by the invention are as follows:
A kind of variable element three-D ultrasonic vibration processing device, comprising:
Lathe shell comprising the first vertical wall and first level wall, and first vertical wall and first water Planomural vertically connects;
Ultrasonic vibration installation is arranged on the first level wall;
Support base comprising the second vertical wall and the second horizontal wall, and second vertical wall and second level Wall vertically connects;
Wherein, second vertical wall is fixedly connected on the first level wall;
Main shaft is rotatably supported in first vertical wall, and workpiece is placed in one end;
One-dimensional vibrating arm is rotatably supported in second horizontal wall;
Two-dimension vibration bar, one end rotatably passes perpendicularly through second vertical wall, and offers multiple run through thereon The skewed slot of the two-dimension vibration bar;
Tool heads are fixed on one end of the two-dimension vibration bar;
Wherein, the two-dimension vibration bar is vertical with the one-dimensional vibrating arm connect, the main shaft and the two-dimension vibration bar It rotates coaxially, the tool heads carry out matching processing to the workpiece.
Preferably, the one-dimensional vibrating arm includes:
One-dimensional amplitude transformer, one end offer the first threaded hole, for connecting with the two-dimension vibration bar;
First transducer is connect by the first pretension bolt with the other end of the one-dimensional amplitude transformer.
Preferably, the two-dimension vibration bar includes:
Two-dimentional amplitude transformer, one end offer first through hole, and the other end is connected by the second pretension bolt and second transducer It connects, is offered in the middle part of the two dimension amplitude transformer multiple up and down through the skewed slot of the two-dimentional amplitude transformer;
Wherein, the first bolt from bottom to top sequentially pass through the first through hole and first threaded hole, by described two Dimension amplitude transformer and the one-dimensional amplitude transformer vertically connect.
Preferably, the first transducer and the second transducer are PZT (piezoelectric transducer).
Preferably, the axial angle between the skewed slot and the two-dimentional amplitude transformer is acute angle.
Preferably, the angle is greater than 25 °, less than 50 °.
Preferably, the displacement excitation amplitude curve of the one-dimensional amplitude transformer is F (t)=0.01sin125600t, described The displacement excitation amplitude curve of two-dimentional amplitude transformer is F (t)=0.01cos125600t.
Step 1: installation equipment, and workpiece to be processed is fixed in tool heads, workpiece, tool heads and ultrasound vibration Anti- electrical circuit is formed between dynamic device;
Step 2: machined parameters are arranged according to the attribute of workpiece to be processed, work pieces process is carried out;
Step 3: changing the amplitude and phase difference of the input signal of one-dimensional vibrating arm and two-dimension vibration bar, obtain tool heads To the space oscillations track of different parameters, to adapt to the process requirements of different workpieces.
Preferably, in the step 3, synthesising law of the workpiece to be processed in tri- directions X, Y, Z are as follows:
Wherein, ω1For the vibration frequency in tri- directions X, Y, Z, A1、A2、A3The respectively amplitude in tri- directions X, Y, Z, α1、 α2、α3The respectively phase difference in tri- directions X, Y, Z
It preferably, further include keeping ultrasonic vibration installation parameter constant, to the workpiece in processing in the step 3 Carry out cooling provision.
Detailed description of the invention
Fig. 1 is variable element three-D ultrasonic vibration processing device schematic diagram of the present invention.
Fig. 2 is three-dimensional amplitude transformer structural schematic diagram of the present invention.
Fig. 3 is the structural schematic diagram of variable element three-D ultrasonic vibration processing device of the present invention.
Fig. 4 is the main view of one-dimensional amplitude transformer of the present invention.
Fig. 5 is the left view of one-dimensional amplitude transformer of the present invention.
Fig. 6 is the main view of two-dimentional amplitude transformer of the present invention.
Fig. 7 is the top view of two-dimentional amplitude transformer of the present invention.
Fig. 8 is the left view of two-dimentional amplitude transformer of the present invention.
Fig. 9 is energy converter electromechanics isoboles of the present invention.
Figure 10 is L-type network static matching principle figure of the present invention.
Figure 11 is circuit diagram of the present invention.
Figure 12 is modal displacement Fig. 1 of the present invention.
Figure 13 is node axonometric drawing 1 of the present invention.
Figure 14 is modal displacement Fig. 2 of the present invention.
Figure 15 is node axonometric drawing 2 of the present invention.
Figure 16 is the surface topography map of workpiece 1 of the present invention.
Figure 17 is the surface topography map of workpiece 2 of the present invention.
Specific embodiment
Present invention will be described in further detail below with reference to the accompanying drawings, to enable those skilled in the art referring to specification text Word can be implemented accordingly.
As shown in Fig. 1-17, the present invention provides a kind of variable element ultrasonic vibrating machining device, and mechanical part is a kind of vertical The processing unit (plant) of formula, amplitude transformer works independently in both direction, and composition is bolted in one-dimensional amplitude transformer and two-dimentional amplitude transformer Three-dimensional amplitude transformer;Include: one-dimensional amplitude transformer 200, two-dimentional amplitude transformer 100, main shaft 300, lathe shell 400, ultrasonic vibration installation, Three-dimensional amplitude transformer 500, the first match circuit 610, the first load circuit 620, the second load circuit 710 and the second match circuit 720。
Lathe shell 400 is L-type structure, and the horizontal wall including vertical wall and perpendicular connection passes perpendicularly through in week in week 300 Vertical wall and what can be rotated be supported in vertical wall, one end passes through ring flange 310 and chuck 320 and the workpiece 330 to be processed Row connection.
In the horizontal wall of lathe shell 400, it is connected with workbench 410, slide carriage 420 and support base in turn from bottom to top 430, support base 430 is inverted L-type structure, including horizon bar and vertical bar.
Ultrasonic vibration installation includes sound system and vibration device, wherein sound system is fixed on support base 430, vibration On the slide carriage 420 that dynamic device is mounted on by the dovetail configuration of 430 bottom of support base.
One end of two-dimension vibration bar passes perpendicularly through vertical bar, is connected with tool heads 510 in one end towards vertical wall, two dimension Vibrating arm is vertical with one-dimensional vibrating arm to be connect to form three-dimensional vibrating mechanism, wherein workpiece 330, main shaft 300, two-dimension vibration bar and Tool heads 510 are coaxial arrangement.
Two-dimension vibration bar includes two-dimentional amplitude transformer 100 and passes through the second transducer that the second pretension bolt 160 is connect with it, One-dimensional vibrating arm includes one-dimensional amplitude transformer 200 and passes through the first transducer that the first pretension bolt 240 is connect with it.
First transducer successively includes: the ceramic mechanism 220 of front shroud 210, first and back shroud 230 from bottom to top;The Two energy converters successively include: the ceramic mechanism 140 of front shroud 130, second and back shroud 150 from left to right.
The structure of three-dimensional amplitude transformer is as shown in Fig. 2, three-dimensional amplitude transformer 500 is by a stepped one-dimensional amplitude transformer 200 The two-dimentional amplitude transformer 100 of the step type to oblique notch with one forms, and two amplitude transformers are in 90 °.By in the small of one-dimensional amplitude transformer 200 End face processes a threaded hole, while milling out two symmetrical planes, plane and skewed slot in the small end face of two-dimentional amplitude transformer 100 120 directions are vertical, and the heart processes one through-hole in the planes.Two-dimentional amplitude transformer 100 is placed in horizontal position, one-dimensional amplitude transformer A is disposed vertically in the plane that two-dimentional amplitude transformer b is milled out, and two amplitude transformers are in 90 °, is bolted.
In two-dimentional amplitude transformer 100, multiple skewed slots 120 through two-dimentional amplitude transformer 100, phase between adjacent skewed slot are offered It is mutually parallel.
Since horn,stepped is simple to manufacture, when area coefficient is identical, the amplification coefficient of horn,stepped is maximum, So one-dimensional amplitude transformer 200 of the invention uses horn,stepped form.In view of the structure and energy converter of three-dimensional amplitude transformer Installation the problems such as, process a threaded hole in the small end face of one-dimensional amplitude transformer 200 and two-dimentional amplitude transformer 100 connect and compose three Amplitude transformer 500 is tieed up, a threaded hole is processed in the large end face of one-dimensional amplitude transformer 200 and is connect with first transducer, such as Fig. 4-5 institute Show
The amplitude transformer mode of oblique notching realizes the mechanism of two-dimensional elliptic vibration, firstly, it is incident theoretical based on elastic wave, work as longitudinal wave When incident homogeneous prismatic member, bar will do extensional vibration along axial direction.When homogeneous prismatic member of the longitudinal wave incidence with skewed slot, due to The effect of skewed slot not only has direct stress on skewed slot and air contact surfaces, and there are one shear stress, in order to offset on contact surface not Due stress needs a longitudinal wave reflection and goes out to be unloaded, but shear stress increases, and must also to offset shear stress It must one shear wave of reflection.Since the axis of reflected P-wave and reflection wave and bar has certain inclination angle, so reflected P-wave and anti- Penetrating shear wave can be in two component of axially and radially generation of bar, and wherein the axial component of bar makes bar do extensional vibration, radial component Bar is set to do bending vibration.
Therefore, oblique due to amplitude transformer by applying simple harmonic oscillation excitation in the direction perpendicular to amplitude transformer section Single simple harmonic oscillation can be motivated the simple harmonic oscillation being converted into two orthogonal directions to motivate by the presence of slot, as long as Design suitable angle of bevel and position, so that it may so that extensional vibration and bending vibration match, and then realize vertical-curved compound vibration It is dynamic, to obtain elliptical trajectory in output end face particle.
According to the structure of one-dimensional amplitude transformer 200, two-dimension vibration is realized in such a way that amplitude transformer is oblique notched, it is contemplated that three-dimensional The installation of amplitude transformer mills out two symmetrical planes in the small end face of two-dimentional amplitude transformer 100, and plane and the direction of skewed slot 120 are hung down Directly, the heart processes one through-hole in the planes.Furthermore, it is contemplated that the installation of two-dimentional amplitude transformer 100 and energy converter, in amplitude transformer Large end face process a threaded hole, as shown in figs 6-8.
Electric loading frequency modulation method utilizes the inverse piezoelectric effect of piezo-electric crystal, influences to be by adjusting the electric loading of piezo-electric crystal System parameter, to change the resonance frequency of piezoelectric vibrator.Electric loading can flexibly be changed on connected load frequency modulation law theory, passed through Match circuit reaches the performance of PZT (piezoelectric transducer) most preferably, thus obtain compared with the adjustable multi-frequency transducers of multi-frequency, therefore this Variable element is realized using the method for connected load frequency modulation.
When designing PZT (piezoelectric transducer), it is usually reduced to electro-mechanical equivalent circuit, such as Fig. 9, wherein in parallel branch C0It is the static equivalent capacity of PZT (piezoelectric transducer), the R in series arm1To include the equivalent resistance including loading and being lost, L1、 C1It is the dynamic inductance and capacitor of PZT (piezoelectric transducer), L respectively1、C1And R1It is the function of frequency.By the electricity for adjusting piezo-electric crystal Load to influence system parameter: change dynamic electric resistor changes the rigidity of energy converter, change dynamic inductance is equivalent to change matter Amount, change capacitor are equivalent to change coefficient of elasticity, to change the resonance frequency of piezoelectric vibrator.Because dynamic inductance and capacitor become When changing smaller, matching inductance value is substantially unchanged;When energy converter dynamic electric resistor changes, the variation of matching inductance is it is obvious that be in The trend now risen, it is contemplated that the design of match circuit, therefore change piezoelectric vibrator by the way of through change dynamic inductance Resonance frequency.
Can match circuit highly effective and safe work to the performance of PZT (piezoelectric transducer), the effect of Ultrasonic machining and ultrasonic device Equal influences are very big, it is therefore desirable to design reasonable match circuit, go on smoothly Ultrasonic machining.Since L-type network theory pushes away It leads simply, it can flexible modulation L2、C2, it is easier to reach resonance compared with other matching ways, active resistance can have a greater change, can It is adjusted to be close with signal source, ideal matching condition can be reached.Therefore this selection L-type network static matching way, it is static Matching principle figure is as shown in Figure 10, by the parameter value of energy converter electro-mechanical equivalent circuit part in figure, calculates system resonance frequency Rate value is substituted into the perfect match condition of string inductance and capacitor, can be in the hope of L2、C2Parameter, to complete L-type network static The design of match circuit.
In the present invention, as a preference, selection is static matching circuit, the matching process is only in single frequency point Upper effective, when the resonance frequency of PZT (piezoelectric transducer) changes, match circuit will lose impedance matching and resonance matching function.For With the PZT (piezoelectric transducer) of multiple resonant frequencies designed by the present invention, the match circuit of corresponding frequency is designed, each is made Match circuit and frequency are corresponding, and it is good can to guarantee that supersonic generator and energy converter can be realized in each working frequency in this way Good matching.It is selected as shown in figure 11 by switch using inductance element, capacity cell and switch self manufacture match circuit The access and disconnection of required matching element, with achieve the purpose that can matched well under different operating frequency.
The present invention also provides a kind of variable element three-dimensional resonance ultrasonic vibrating machining methods, total using above-mentioned variable element three-dimensional Shake ultrasonic vibrating machining device, processes to workpiece, specific as follows:
Variable element three-dimensional resonance ultrasonic vibrating machining method is according to surface to be machined requirement, by being mounted on lathe Vibration device makes with respect to the three-dimensional vibrating track for generating different frequency, different positions and pose between tool and workpiece, to improve processing effect Rate and processing quality.The processing unit (plant) is mainly by portions such as ultrasonic generator, match circuit, energy converter, load circuit and amplitude transformers It is grouped as, its working principle is that supersonic generator converts high frequency electrical signal, load electricity for the electric signal of 50~60Hz first Road can realize the multifrequency resonance of energy converter, the high frequency electrical signal and transducing that can be generated supersonic generator by match circuit The working frequency of device realizes matching, to make energy converter convert high frequency power electric signal to the mechanical oscillation of identical frequency, so After pass to three-dimensional amplitude transformer, three-dimensional amplitude transformer be formed by opening up skewed slot in two-dimentional ladder amplitude transformer with one-dimensional amplitude transformer it is vertical The extensional vibration that the three-dimensional vibrating mechanism of formula, the longitudinal direction generated by two-dimentional amplitude transformer and bending vibration and one-dimensional amplitude transformer generate It is overlapped, by amplitude transformer to the amplification of mechanical oscillation, and then obtains the three-dimensional vibrating track of demand.
Variable element three-D ultrasonic vibration processing device process operation step:
1, variable element three-dimensional resonance ultrasonic vibrating machining device needs to be mounted on lathe, and sound system is fixed on support base On, on the slide carriage that vibration device is mounted on by the dovetail configuration of support base bottom, support base is according to lathe reserved space ruler Very little design, the centre of gyration to guarantee mounted cutter height and main shaft is contour.In process, machine tool chief axis drives Workpiece does rotary motion about the z axis, and the circular motion of workpiece, driving of the device in machine slide are realized by the revolution of main shaft Under can be moved along lathe X-axis, Z axis, three-dimensional space of the tool under the driving of three-dimensional vibrating device in lathe does the height assisted Frequency elliptical vibration.
2, according to machined material attribute, suitable frequency is selected, the switch of load circuit is placed in corresponding frequency shelves Position, to change load circuit inductance parameters, is equivalent to the quality of change system, according toIt is found that can make be The intrinsic frequency of system changes, and so that tool is generated the space oscillations track of this frequency, wherein pnFor inherent circular frequency, unit is Rad/s, k are coefficient of elasticity, unit are as follows: N/m, m are quality, unit kg,.However, when resonance frequency changes, ultrasound Wave producer will lose impedance matching and resonance matching function, and then influence performance, the effect of Ultrasonic machining of PZT (piezoelectric transducer) And ultrasonic device can highly effective and safe work, it is therefore desirable to the switch of match circuit is placed in corresponding frequency gear, from And change the L of L-type matching network2、C2Parameter value, complete matching adjust, make ultrasonic system work well.Pass through load circuit With the selection of match circuit, the available frequencies omega for being adapted to different materials attribute1
3, according to the shape characteristic of workpiece to be machined and process requirements, by three-dimensional simple harmonic motion in tri- directions X, Y, Z Synthesising law, such as formulaIt is shown, wherein ω1For the vibration frequency in tri- directions X, Y, Z, A1、A2、A3 The respectively amplitude in tri- directions X, Y, Z, α1、α2、α3The respectively phase difference in tri- directions X, Y, Z;
Supersonic generator is adjusted, keeps the frequency in tri- directions X, Y, Z constant, is ω1.One-dimensional vibrating arm is single Under harmonic excitation, one-dimensional amplitude transformer will do extensional vibration along axial direction, adjust the supersonic generator signal in one-dimensional vibrating arm channel, Thus change the amplitude and phase difference of the input signal of one-dimensional vibrating arm, i.e. adjusting A2、α2Parameter, to control the defeated of Y-direction Enter signal;Two-dimension vibration bar is under single harmonic excitation, conversion due to flume structure to vibration mode, the stairstepping to oblique notch There are certain phase differences between bending vibration and the extensional vibration response of amplitude transformer small end, i.e. there are phase differences for X, Z-direction, and And there are corresponding relationship, i.e. A for the amplitude of bending vibration and extensional vibration1And A3Parameter there are corresponding relationship, adjust two-dimension vibration The supersonic generator signal in bar channel, thus change the amplitude and phase difference of the input signal of two-dimension vibration bar, i.e. change X, Z With the phase difference and A of Y-direction1、A3Parameter, the space oscillations track of different parameters can be obtained in tool, to adapt to difference The process requirements of workpiece when needing biggish removal amount, can use the biggish space tracking of amplitude in process.
4, the parameter constant in process, keeping supersonic generator gives cooling provision appropriate, make its not because Surface processing accuracy is influenced for the fuel factor in process.
5, each section power supply after processing is completed to the whole part to be processed of required machining area, is disconnected, will be completed and add The workpiece of work takes out from workbench, that is, completes the processing to the workpiece.
Variable element three-dimensional resonance ultrasonic vibrating machining device designed by the present invention needs to be mounted on machine tool, such as Fig. 3 Shown, sound system is fixed on support base 430, and vibration device is slipped by what the dovetail configuration of 430 bottom of support base was mounted on On plate 420, support base 430 is according to lathe reserved space size design, to guarantee mounted cutter height and main shaft The centre of gyration is contour.Mounted Three-dimension process systematic schematic diagram is as shown in figure 3, in process, machine tool chief axis 300 drives Workpiece 330 does rotary motion about the z axis, the circular motion of workpiece 330 is realized by the revolution of main shaft 300, device is in lathe It can be moved along lathe X-axis, Z axis under the driving of slide carriage, tool is under the driving of three-dimensional vibrating device in the three-dimensional space of lathe Do the high frequency elliptical vibration assisted.
In ultrasonic vibrating machining device, supersonic generator and energy converter convert electrical signals to high-frequency mechanical vibration Dynamic signal, is then passed to amplitude transformer, thus in luffing boom end output displacement signal, and then the ultrasound of implementation tool head adds Work.Therefore in this emulation, ultrasonic system is simplified, displacement signal directly is applied to amplitude transformer, observes luffing boom end Oscillation trajectory.
Embodiment 1
Step 1, parameter setting
Chute length is l=25mm, skewed slot axial position is d=48mm, angle of bevel is α=40 °, rectangle board width is H=6mm.
Step 2, transient dynamic analysis
In simulation software, displacement load is applied to luffing rod model large end face, carries out transient dynamic analysis.According to mould State analyzes result: two-dimentional amplitude transformer is flexural vibration mode in 19339Hz, is longitudinal vibration mode in 20505Hz;It is one-dimensional Amplitude transformer is longitudinal vibration mode in 19969Hz, so, it is 20000Hz that fetch bit, which moves driving frequency,.The displacement of two-dimentional amplitude transformer Excitation amplitude curve is F (t)=0.01cos125600t, the displacement excitation amplitude curve of one-dimensional amplitude transformer be F (t)= 0.01sin125600t extracts the displacement that the small end face node of amplitude transformer changes over time in the X, Y, Z direction, such as Figure 12 institute Show.In Figure 12, U1、U2、U3Respectively represent the displacement that small end face node changes over time in the X, Y, Z direction.It can be seen that work Having head in the motion profile of X, Y, Z-direction is a simple harmonic motion, so the displacement of small end face node is mainly in XYZ space It is interior.From the U in Figure 121、U2、U3Curve it can be seen that
(1) period of simple harmonic motion is about 5 × 10-5s;The frequency f of the simple harmonic quantity displacement excitation of input2It is taken as 20000hz, it can Obtain its period 5 × 10-5s.It can be concluded that the analytic solutions and FEM Numerical Simulation error in period are smaller, the period is demonstrated Correctness.
(2) displacement that the displacement peak swing of X-direction is 14 microns, the displacement peak swing of Y-direction is 5 microns, Z-direction Peak swing is 13 microns;The simple harmonic quantity displacement excitation amplitude of input is 10 microns.For the output displacement of X, Z-direction, amplitude is equal 1.5 times of amplification;For the output displacement of Y-direction, amplitude reduces 0.5 times.It follows that: two-dimentional amplitude transformer and one-dimensional luffing The displacement of bar has displacement loss when synthesis, but loss is smaller, meets design requirement.
Step 3, oscillation trajectory analysis
The displacement on the egress direction that X, Y, Z are changed over time in one cycle is extracted in simulation software, by it It imports in mapping software, the displacement of node is fitted using mapping software, draws the displacement curve of node, such as Figure 13 institute Show.In Figure 13, by the axonometric drawing of modal displacement curve, it can clearly find that displacement curve is the figure in XYZ space, it can To conclude that the track of modal displacement curve is substantially an ellipse in XYZ space.
Embodiment 2
Parameter setting
Chute length is l=25mm, skewed slot axial position is d=48mm, angle of bevel is α=30 °, rectangle board width is H=6mm.
Transient dynamic analysis
In simulation software, displacement load is applied to luffing rod model large end face, carries out transient dynamic analysis.According to mould State analyzes result: two-dimentional amplitude transformer is flexural vibration mode in 19342Hz, is longitudinal vibration mode in 20544Hz;It is one-dimensional Amplitude transformer is longitudinal vibration mode in 19969Hz, so, it is 20000hz that fetch bit, which moves driving frequency,.The displacement of two-dimentional amplitude transformer Excitation amplitude curve is F (t)=0.01cos125600t, the displacement excitation amplitude curve of one-dimensional amplitude transformer be F (t)= 0.01sin125600t
The displacement that the small end face node of amplitude transformer changes over time in the X, Y, Z direction is extracted, in Figure 14, U1、U2、 U3Respectively represent the displacement that small end face node changes over time in the X, Y, Z direction.It can be seen that tool heads are in X, Y, Z-direction Motion profile is the movement of a simple harmonic quantity, so the displacement of small end face node is mainly in XYZ space.From the U in Figure 141、 U2、U3Curve it can be seen that
(1), the period of simple harmonic motion is about 5 × 10-5s;The frequency f of the simple harmonic quantity displacement excitation of input220000hz is taken as, 5 × 10-5s of its period can be obtained.It can be concluded that the analytic solutions and FEM Numerical Simulation error in period are smaller, week is demonstrated The correctness of phase.
(2), the position that the displacement peak swing of X-direction is 10 microns, the displacement peak swing of Y-direction is 5 microns, Z-direction Moving peak swing is 9 microns;The simple harmonic quantity displacement excitation amplitude of input is 10 microns.For the output displacement of X, Z-direction, amplitude is equal 1 times of amplification;For the output displacement of Y-direction, amplitude reduces 0.5 times.It follows that: two-dimentional amplitude transformer and one-dimensional amplitude transformer Displacement have a displacement loss when synthesis, but lose smaller, meet design requirement.
The displacement on the egress direction that X, Y, Z are changed over time in one cycle is extracted in simulation software, by it It imports in mapping software, the displacement of node is fitted using mapping software, draws the displacement curve of node, such as Figure 15 institute Show.In Figure 15, by the axonometric drawing of modal displacement curve, it can clearly find that displacement curve is the figure in XYZ space, it can To conclude that the track of modal displacement curve is substantially an ellipse in XYZ space.
Processing method emulation
By the above embodiments 1 and 2 it is found that the device can generate space ellipse oscillation trajectory in tool heads, by changing Become vibration parameters, the form of the elliptical orbit of adjustable tool heads, and then influences the pattern on workpieces processing surface.Therefore, exist On the basis of embodiment 2, the input amplitude and phase difference in three directions are adjusted, processing rear surface emulation is carried out, obtains different Workpiece surface appearance structure.Basic parameter setting: amplitude transformer parameter be design example 2 in parameter, by simulation analysis it is found that When the displacement excitation amplitude curve of two-dimentional amplitude transformer is F (t)=0.01cos125600t, the displacement excitation amplitude of one-dimensional amplitude transformer Curve is F (t)=0.01sin125600t, and the displacement peak swing of X-direction is 10 μm, the displacement peak swing of Y-direction is 5 μ M, the displacement peak swing of Z-direction is 9 μm.Taking tool diameter is 2 μm;Workpiece rotational frequency 20r/s, radius of machining are 992 μm, every time Radius increases by 2.5 μm.
Embodiment 3
Workpiece 1 processes pattern emulation
The amplitude for taking X-direction is 0.2 μm, the amplitude of Y-direction is 0.2 μm, the amplitude of Z-direction is 0.5 μm, X, Y-direction Phase difference is 90 °, the phase difference of X, Z-direction is 0 °, Y, Z-direction phase difference be 90 °, the part workpiece surface shape after processing Looks, as shown in figure 16, it can be observed that workpiece surface has clearly, in periodic micro-structure.
Embodiment 4
Workpiece 2 processes pattern emulation
The amplitude for taking X-direction is 0.2 μm, the amplitude of Y-direction is 0.5 μm, the amplitude of Z-direction is 0.5 μm, X, Y-direction Phase difference is 30 °, the phase difference of X, Z-direction is 0 °, Y, Z-direction phase difference be 30 °, the part workpiece surface shape after processing Looks, as shown in figure 17, it can be observed that workpiece surface has clearly, in periodic micro-structure.
Comparative analysis
By two simulation examples, it can be concluded that, when vibration parameters change, elliptical orbit can change, workpiece Surface topography can also change.According to Figure 16 and Figure 17 it is found that the available more apparent periodically knot of workpiece surface Structure, the practicability for reflecting three-dimensional processing method is good, when the vibration parameters in tri- directions X, Y, Z change, accordingly Elliptical vibration track can change, and then influence the motion profile of tool, and the surface of workpiece is caused different processing shapes occur Looks, as shown in FIG. 16 and 17.
Although the embodiments of the present invention have been disclosed as above, but its is not only in the description and the implementation listed With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, the present invention is simultaneously unlimited In specific details and legend shown and described herein.

Claims (10)

1. a kind of variable element three-D ultrasonic vibration processing device characterized by comprising
Lathe shell comprising the first vertical wall and first level wall, and first vertical wall and the first level wall Vertical connection;
Ultrasonic vibration installation is arranged on the first level wall;
Support base comprising the second vertical wall and the second horizontal wall, and second vertical wall and second horizontal wall are hung down It is direct-connected to connect;
Wherein, second vertical wall is fixedly connected on the first level wall;
Main shaft is rotatably supported in first vertical wall, and workpiece is placed in one end;
One-dimensional vibrating arm is rotatably supported in second horizontal wall;
Two-dimension vibration bar, one end rotatably pass perpendicularly through second vertical wall, and offer thereon multiple through described The skewed slot of two-dimension vibration bar;
Tool heads are fixed on one end of the two-dimension vibration bar;
Wherein, the two-dimension vibration bar is vertical with the one-dimensional vibrating arm connect, and the main shaft and the two-dimension vibration bar are coaxial Rotation, the tool heads carry out matching processing to the workpiece.
2. variable element three-D ultrasonic vibration processing device according to claim 1, which is characterized in that the one-dimensional vibrating arm Include:
One-dimensional amplitude transformer, one end offer the first threaded hole, for connecting with the two-dimension vibration bar;
First transducer is connect by the first pretension bolt with the other end of the one-dimensional amplitude transformer.
3. variable element three-D ultrasonic vibration processing device according to claim 2, which is characterized in that the two-dimension vibration bar Include:
Two-dimentional amplitude transformer, one end offer first through hole, and the other end is connect by the second pretension bolt with second transducer, institute It states and offers multiple skewed slots for running through the two-dimentional amplitude transformer up and down in the middle part of two-dimentional amplitude transformer;
Wherein, the first bolt from bottom to top sequentially pass through the first through hole and first threaded hole, by it is described two dimension become Width bar and the one-dimensional amplitude transformer vertically connect.
4. variable element three-D ultrasonic vibration processing device according to claim 3, which is characterized in that the first transducer It is PZT (piezoelectric transducer) with the second transducer.
5. variable element three-D ultrasonic vibration processing device according to claim 3, which is characterized in that the skewed slot with it is described Axial angle is acute angle between two-dimentional amplitude transformer.
6. variable element three-D ultrasonic vibration processing device according to claim 5, which is characterized in that the angle is greater than 25 °, less than 50 °.
7. variable element three-D ultrasonic vibration processing device according to claim 3, which is characterized in that the one-dimensional amplitude transformer Displacement excitation amplitude curve be F (t)=0.01sin125600t, it is described two dimension amplitude transformer displacement excitation amplitude curve be F (t)=0.01cos125600t.
8. a kind of variable element three-D ultrasonic vibration processing method, which is characterized in that using described in claim 1-7 any one Variable element three-D ultrasonic vibration processing device characterized by comprising
Step 1: installation equipment, and workpiece to be processed is fixed in tool heads, workpiece, tool heads and ultrasonic vibration dress Anti- electrical circuit is formed between setting;
Step 2: machined parameters are arranged according to the attribute of workpiece to be processed, work pieces process is carried out;
Step 3: changing the amplitude and phase difference of the input signal of one-dimensional vibrating arm and two-dimension vibration bar, obtain tool heads not The space oscillations track of same parameter, to adapt to the process requirements of different workpieces.
9. variable element three-D ultrasonic vibration processing method according to claim 8, which is characterized in that in the step 3, Synthesising law of the workpiece to be processed in tri- directions X, Y, Z are as follows:
Wherein, ω1For the vibration frequency in tri- directions X, Y, Z, A1、A2、A3The respectively amplitude in tri- directions X, Y, Z, α1、α2、α3 The respectively phase difference in tri- directions X, Y, Z.
10. variable element three-D ultrasonic vibration processing method according to claim 9, which is characterized in that in the step 3 Kind, further include keeping ultrasonic vibration installation parameter constant, cooling provision is carried out to the workpiece in processing.
CN201910167097.8A 2019-03-06 2019-03-06 A kind of variable element three-D ultrasonic vibration processing device and processing method Pending CN109866074A (en)

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Application publication date: 20190611