CN204413769U - A kind of three-D ultrasonic vibration ELID internal grinding experimental provision - Google Patents
A kind of three-D ultrasonic vibration ELID internal grinding experimental provision Download PDFInfo
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Abstract
一种三维超声振动ELID内圆磨削实验装置，包括机架（8），机架（8）上设有工作台（9），工作台（9）上设有三维超声振动刀具系统和ELID在线修整装系统（10），三维超声振动刀具系统正上方设有机床主轴系统。本实用新型通过在机床工作台左侧的ELID在线修整装置和主轴下方的三维超声振动刀具系统,从而在实现三维超声振动磨削的同时,可根据需求进行砂轮ELID在线修整,形成一种多工艺复合的高效镜面加工技术,解决了硬脆材料的难加工特性，推进了其在国防、航空航天等高技术领域中的应用。
A three-dimensional ultrasonic vibration ELID internal grinding experimental device, including a frame (8), a worktable (9) is provided on the frame (8), and a three-dimensional ultrasonic vibration tool system and an ELID online tool system are provided on the worktable (9). The trimming system (10) is provided with a machine tool spindle system just above the three-dimensional ultrasonic vibrating tool system. The utility model uses the ELID on-line dressing device on the left side of the machine tool workbench and the three-dimensional ultrasonic vibration tool system under the main shaft, so as to realize three-dimensional ultrasonic vibration grinding and at the same time, the ELID online dressing of the grinding wheel can be carried out according to the requirements, forming a multi-process The composite high-efficiency mirror processing technology solves the difficult-to-process characteristics of hard and brittle materials, and promotes its application in high-tech fields such as national defense and aerospace.
Description
技术领域 technical field
本实用新型属于硬脆材料精密超精密加工技术领域，尤其涉及一种三维超声振动ELID内圆磨削实验装置。 The utility model belongs to the technical field of precision ultra-precision machining of hard and brittle materials, in particular to a three-dimensional ultrasonic vibration ELID internal grinding experimental device.
背景技术 Background technique
工程陶瓷、光学玻璃等硬脆材料具有高硬度、高强度、高脆性、耐磨损、耐腐蚀、化学稳定性好等特点，广泛应用于光学仪器、半导体、汽车、航空航天、机械等领域。但到目前为止，硬脆材料的加工仍然是一个难题。因为硬脆材料一个最突出的特点就是脆性高，断裂韧性低，弹性极限与强度非常接近。加工时，当材料承受的载荷超过弹性极限,就会发生断裂破坏，在已加工表面形成裂纹和凹坑，严重影响其表面质量和性能。针对硬脆材料的难加工特性，硬脆材料超声磨削技术、ELID磨削技术、磁性抛光技术、弹性发射加工技术等复合加工技术研究应运而生，目前技术成熟度、效率较高和应用较多的公认为ELID磨削技术和超声磨削技术。ELID磨削技术的主要优点是可以采用细、微磨粒获得粗糙度极低的纳米加工表面，但ELID磨削技术的缺点是砂轮易堵塞、加工效率低、成本较高及金刚石砂轮上剥落的非导电氧化物容易擦伤工件等，因此如何能减少砂轮堵塞、减少脱落的氧化膜对磨削表面的损伤、获得更高的效率等问题一直是该领域研究的主要问题，也成为ELID磨削技术进一步提高的瓶颈。 Hard and brittle materials such as engineering ceramics and optical glass have the characteristics of high hardness, high strength, high brittleness, wear resistance, corrosion resistance, and good chemical stability, and are widely used in optical instruments, semiconductors, automobiles, aerospace, machinery and other fields. But so far, the processing of hard and brittle materials is still a difficult problem. Because one of the most prominent features of hard and brittle materials is high brittleness, low fracture toughness, and the elastic limit is very close to the strength. During processing, when the load on the material exceeds the elastic limit, fracture damage will occur, and cracks and pits will be formed on the processed surface, seriously affecting its surface quality and performance. In view of the difficult-to-machine characteristics of hard and brittle materials, research on composite processing technologies such as ultrasonic grinding technology for hard and brittle materials, ELID grinding technology, magnetic polishing technology, and elastic emission processing technology has emerged as the times require. Most of them are recognized as ELID grinding technology and ultrasonic grinding technology. The main advantage of ELID grinding technology is that fine and micro abrasive grains can be used to obtain a nano-machined surface with extremely low roughness, but the disadvantages of ELID grinding technology are that the grinding wheel is easy to block, the processing efficiency is low, the cost is high, and the diamond grinding wheel is peeled off. Non-conductive oxides are easy to scratch the workpiece, so how to reduce the clogging of the grinding wheel, reduce the damage of the peeled oxide film to the grinding surface, and obtain higher efficiency have always been the main issues in this field of research, and have also become ELID grinding. The bottleneck of further technological improvement.
近年来兴起的超声磨削技术，它可以减小加工过程中的磨削力，增加临界磨削深度，从而提高生产效率，是一种很有发展前途的新方法。如一维轴向超声振动磨削可以实现加工表面质量的显著提高；一维径向超声辅助磨削可以实现材料去除率的大幅度提高，但是会导致砂轮磨损的增加和表面粗糙度的轻微增加。在此基础上，为了充分发挥超声振动磨削的优点，各国学者先后提出了不同类型的二维超声振动磨削技术。但尽管二维超声振动磨削技术具有优越的综合加工性能，但是目前其仍存在一定的技术难题。例如存在着当负载、温度切削条件等变化时振速不稳定，以及材料加工效率显著提高而表面粗糙度没有明显变化，加工过程中磨削速度较低等现象。 The ultrasonic grinding technology that has emerged in recent years can reduce the grinding force during processing, increase the critical grinding depth, and thus improve production efficiency. It is a promising new method. For example, one-dimensional axial ultrasonic vibration grinding can achieve a significant improvement in the quality of the machined surface; one-dimensional radial ultrasonic-assisted grinding can achieve a substantial increase in material removal rate, but it will lead to an increase in grinding wheel wear and a slight increase in surface roughness. On this basis, in order to give full play to the advantages of ultrasonic vibration grinding, scholars from various countries have proposed different types of two-dimensional ultrasonic vibration grinding technology. However, although the two-dimensional ultrasonic vibration grinding technology has superior comprehensive processing performance, it still has certain technical difficulties. For example, when the load, temperature and cutting conditions change, the vibration speed is unstable, and the material processing efficiency is significantly improved while the surface roughness does not change significantly, and the grinding speed is low during processing.
实用新型内容 Utility model content
本实用新型为了解决现有技术中的不足之处，提供一种超声磨削加工技术与ELID磨削技术复合、加工效率高、砂轮不易堵塞且可以实现砂轮在线修整的镜面磨削的三维超声振动ELID内圆磨削实验装置。 In order to solve the deficiencies in the prior art, the utility model provides a three-dimensional ultrasonic vibration for mirror grinding of ultrasonic grinding processing technology combined with ELID grinding technology, high processing efficiency, not easy to block the grinding wheel, and can realize online dressing of the grinding wheel ELID internal grinding experimental device.
为解决上述技术问题，本实用新型采用如下技术方案：一种三维超声振动ELID内圆磨削实验装置，包括机架8，机架8上设有工作台9，工作台9上设有三维超声振动刀具系统和ELID在线修整装系统10，三维超声振动刀具系统正上方设有机床主轴系统。 In order to solve the above technical problems, the utility model adopts the following technical scheme: a three-dimensional ultrasonic vibration ELID internal grinding experimental device, including a frame 8, a worktable 9 is arranged on the frame 8, and a three-dimensional ultrasonic Vibrating tool system and ELID online trimming system 10, the machine tool spindle system is arranged directly above the three-dimensional ultrasonic vibrating tool system.
所述三维超声振动刀具系统包括多通道超声波发生器7、圆形夹具12、X向超声振动机构5、Y向超声振动机构6和Z向超声振动机构40，圆形夹具12、X向超声振动机构5和Y向超声振动机构6设在工作台9上，Z向超声振动机构40设在工作台9下方，圆形夹具12顶部用于夹紧工件3的卡盘4； The three-dimensional ultrasonic vibration tool system includes a multi-channel ultrasonic generator 7, a circular clamp 12, an X-direction ultrasonic vibration mechanism 5, a Y-direction ultrasonic vibration mechanism 6 and a Z-direction ultrasonic vibration mechanism 40, a circular clamp 12, and an X-direction ultrasonic vibration mechanism. The mechanism 5 and the Y-direction ultrasonic vibration mechanism 6 are arranged on the worktable 9, the Z-direction ultrasonic vibration mechanism 40 is arranged under the worktable 9, and the top of the circular fixture 12 is used to clamp the chuck 4 of the workpiece 3;
X向超声振动机构5包括同轴向设置的X向超声振动换能器14和X向振动变幅杆15，X向振动变幅杆15通过X向变幅杆保持架16固定到工作台9上； The X-direction ultrasonic vibration mechanism 5 includes an X-direction ultrasonic vibration transducer 14 and an X-direction vibration horn 15 arranged coaxially, and the X-direction vibration horn 15 is fixed to the workbench 9 through the X-direction horn holder 16 superior;
Y向超声振动机构6包括安装箱35和采用紧固螺栓32设在安装箱35顶部的Y向变幅杆保持架31，Y向变幅杆保持架31上垂直设有Y向振动变幅杆33，Y向振动变幅杆33下端设有位于安装箱35内的Y向超声振动换能器34； The Y-direction ultrasonic vibration mechanism 6 includes a mounting box 35 and a Y-direction horn holder 31 mounted on the top of the installation case 35 with fastening bolts 32, and a Y-direction vibration horn is vertically arranged on the Y-direction horn holder 31. 33. The lower end of the Y-direction vibration horn 33 is provided with a Y-direction ultrasonic vibration transducer 34 located in the installation box 35;
Z向超声振动机构40包括同轴向设置的Z向超声振动换能器18和Z向振动变幅杆19，Z向振动变幅杆19通过Z向变幅杆保持架17固定到工作台9上； The Z-direction ultrasonic vibration mechanism 40 includes a Z-direction ultrasonic vibration transducer 18 and a Z-direction vibration horn 19 arranged coaxially, and the Z-direction vibration horn 19 is fixed to the workbench 9 through a Z-direction horn holder 17 superior;
X向振动变幅杆15、Y向振动变幅杆33和Z向振动变幅杆19的动力输出端分别通过双头螺柱13与圆形夹具12连接； The power output ends of the X-direction vibration horn 15, the Y-direction vibration horn 33 and the Z-direction vibration horn 19 are respectively connected to the circular clamp 12 through the stud 13;
多通道超声波发生器7分别通过电缆与X向超声振动换能器14、Y向超声振动换能器34和Z向超声振动换能器18连接。 The multi-channel ultrasonic generator 7 is respectively connected to the X-direction ultrasonic vibration transducer 14 , the Y-direction ultrasonic vibration transducer 34 and the Z-direction ultrasonic vibration transducer 18 through cables.
所述X向振动变幅杆15、Y向振动变幅杆33和Z向振动变幅杆19中的任意两个为纵弯复合振动变幅杆36，X向超声振动换能器14、Y向超声振动换能器34和Z向超声振动换能器18中的任意两个为纵向超声振动换能器37，每个纵弯复合振动变幅杆36对应与一个纵向超声振动换能器37连接。 Any two of the X-direction vibration horn 15, the Y-direction vibration horn 33 and the Z-direction vibration horn 19 are longitudinal bending compound vibration horns 36, and the X-direction ultrasonic vibration transducers 14, Y Any two of the ultrasonic vibration transducers 34 and the Z-direction ultrasonic vibration transducers 18 are longitudinal ultrasonic vibration transducers 37, and each longitudinal bending compound vibration horn 36 corresponds to a longitudinal ultrasonic vibration transducer 37 connect.
机床主轴系统包括垂直设置的机床主轴1和设在机床主轴1下端的砂轮2，机床主轴1的中心线与卡盘4的中心线重合。 The machine tool spindle system includes a vertically arranged machine tool spindle 1 and a grinding wheel 2 arranged at the lower end of the machine tool spindle 1 , the centerline of the machine tool spindle 1 coincides with the centerline of the chuck 4 .
所述的ELID在线修整装系统包括ELID电源11、磁力吸盘25、固定套筒27和支撑轴28，磁力吸盘25吸附在工作台9上，固定套筒27下端与磁力吸盘25顶部连接，磁力吸盘25侧部设有用于移动磁力吸盘25的手柄26，支撑轴28插设在固定套筒27内并通过径向设置的销钉24连接，支撑轴28上设有阴极支撑架29和阳极固定板20，阴极支撑架29通过螺纹与支撑轴28配合，阴极支撑架29端部通过橡胶隔离套22设置有半铜环电极23，半铜环电极23与ELID电源11的阴极连接；阳极固定板20通过两个设置有内螺纹的绝缘夹板30固定在支撑轴28上，阳极固定板20的端部设置有与ELID电源11的阳极连接的阳极碳刷21，在进行砂轮2在线修整时，阳极碳刷21与机床主轴1上的导电零件压接，半铜环电极23的轴心线与砂轮2的轴心线平行。 Described ELID online trimming system comprises ELID power supply 11, magnetic chuck 25, fixed sleeve 27 and support shaft 28, and magnetic chuck 25 is adsorbed on the workbench 9, and the lower end of fixed sleeve 27 is connected with magnetic chuck 25 top, and magnetic chuck The side of 25 is provided with a handle 26 for moving the magnetic chuck 25, the support shaft 28 is inserted in the fixed sleeve 27 and connected by the pin 24 provided radially, the support shaft 28 is provided with a cathode support frame 29 and an anode fixed plate 20 , the cathode support frame 29 cooperates with the support shaft 28 through threads, and the end of the cathode support frame 29 is provided with a half-copper ring electrode 23 through a rubber isolation sleeve 22, and the half-copper ring electrode 23 is connected to the cathode of the ELID power supply 11; the anode fixing plate 20 passes through Two insulating splints 30 provided with internal threads are fixed on the support shaft 28. The end of the anode fixing plate 20 is provided with an anode carbon brush 21 connected to the anode of the ELID power supply 11. When the grinding wheel 2 is trimmed online, the anode carbon brush 21 is crimped with the conductive part on the machine tool spindle 1, and the axis line of the half copper ring electrode 23 is parallel to the axis line of the grinding wheel 2.
采用上述技术方案，多通道超声波发生器同时向X向超声振动换能器、Y向超声振动换能器和Z向超声振动换能器发出具有一定相位差的同频超声激励信号。 By adopting the above technical scheme, the multi-channel ultrasonic generator simultaneously sends ultrasonic excitation signals of the same frequency with a certain phase difference to the X-direction ultrasonic vibration transducer, the Y-direction ultrasonic vibration transducer and the Z-direction ultrasonic vibration transducer.
X向振动变幅杆、Y向振动变幅杆和Z向振动变幅杆在各自变幅杆的节点处与保持架连接。 The X-direction vibration horn, the Y-direction vibration horn and the Z-direction vibration horn are connected to the cage at nodes of the respective horns.
X向振动变幅杆、Y向振动变幅杆和Z向振动变幅杆分别发出径向、轴向和切向振动，促使工件做三维超声振动。三维超声振动轨迹为空间椭圆。 The X-direction vibration horn, the Y-direction vibration horn and the Z-direction vibration horn emit radial, axial and tangential vibrations respectively, so as to promote three-dimensional ultrasonic vibration of the workpiece. The three-dimensional ultrasonic vibration trajectory is a space ellipse.
本实用新型的机床主轴下端与砂轮相连接，并带动砂轮做上下、左右进给运动和旋转运动。ELID在线修整装系统设在工作台左侧，当砂轮需要进行ELID在线修整时，可通过上下移动手柄，使ELID在线修整装系统移动至机床主轴处，进行砂轮的ELID在线修整。三维超声振动刀具系统设在工作台上，三维超声振动刀具系统通过双头螺柱与圆形夹具相连接，另一端通过X向变幅杆保持架、Z向变幅杆保持架和Y向变幅杆保持架与工作台固定连接，以实现工件的三维超声振动磨削。 The lower end of the main shaft of the machine tool of the utility model is connected with the grinding wheel, and drives the grinding wheel to perform up-and-down, left-right feed motion and rotational motion. The ELID online dressing system is located on the left side of the workbench. When the grinding wheel needs to be ELID online dressing, the ELID online dressing system can be moved to the main shaft of the machine tool by moving the handle up and down to perform ELID online dressing of the grinding wheel. The three-dimensional ultrasonic vibrating tool system is set on the workbench. The three-dimensional ultrasonic vibrating tool system is connected to the circular fixture through a double-ended stud, and the other end is passed through the X-direction horn cage, the Z-direction horn cage and the Y-direction variable pole. The rod holder is fixedly connected with the worktable to realize the three-dimensional ultrasonic vibration grinding of the workpiece.
当机床主轴带动砂轮对工件做内圆磨削时，X向超声振动换能器、Y向超声振动换能器和Z向超声振动换能器分别与X向振动变幅杆、Y向振动变幅杆和Z向振动变幅杆将多通道超声波发生器传输的有一定相位差的同频三激励超声信号分别转换为三个同频频机械振荡。由于X向振动变幅杆、Y向振动变幅杆和Z向振动变幅杆分别分布在砂轮的径向、轴向和切向，当三个同频机械振荡通过X向振动变幅杆、Y向振动变幅杆和Z向振动变幅杆施加到圆形夹具上时，圆形夹具带动工件做三个不同方向的机械振动，最终叠加为三维超声振动。圆形夹具通过卡盘夹紧工件。X向振动变幅杆、Y向振动变幅杆和Z向振动变幅杆中的任意两个可以用一个纵弯复合振动变幅杆代替。纵弯复合振动变幅杆开有斜槽，其端部设有纵向超声振动换能器，使其能够在单激励下形成纵弯复合振动，从而实现二维超声椭圆振动。同时另外一个X向振动变幅杆（Y向振动变幅杆或Z向振动变幅杆）在一定相位差的同频超声激励信号激励下产生纵向振动。这样最终促使工件做三维超声振动。 When the spindle of the machine tool drives the grinding wheel to perform internal grinding on the workpiece, the X-direction ultrasonic vibration transducer, Y-direction ultrasonic vibration transducer and Z-direction ultrasonic vibration transducer are respectively connected with the X-direction vibration horn and the Y-direction vibration transducer. The horn and the Z-direction vibration horn convert the same-frequency three-excitation ultrasonic signals with a certain phase difference transmitted by the multi-channel ultrasonic generator into three same-frequency mechanical oscillations. Since the X-direction vibration horn, the Y-direction vibration horn and the Z-direction vibration horn are respectively distributed in the radial, axial and tangential directions of the grinding wheel, when three mechanical vibrations of the same frequency pass through the X-direction vibration horn, When the Y-direction vibration horn and the Z-direction vibration horn are applied to the circular fixture, the circular fixture drives the workpiece to perform mechanical vibrations in three different directions, and finally superimposed into three-dimensional ultrasonic vibration. The circular fixture clamps the workpiece through the chuck. Any two of the X-direction vibration horn, the Y-direction vibration horn and the Z-direction vibration horn can be replaced by a longitudinal-bending composite vibration horn. The longitudinal-bending compound vibration horn has a chute, and its end is equipped with a longitudinal ultrasonic vibration transducer, so that it can form a longitudinal-bending compound vibration under a single excitation, thereby realizing two-dimensional ultrasonic elliptical vibration. At the same time, another X-direction vibration horn (Y-direction vibration horn or Z-direction vibration horn) generates longitudinal vibration under the excitation of the same frequency ultrasonic excitation signal with a certain phase difference. This eventually causes the workpiece to undergo three-dimensional ultrasonic vibration.
用销钉连接固定套筒和支撑轴，操作者可通过销钉调节支撑轴的高度。固定套筒27底部设有磁力吸盘，并设有手柄，通过手柄的上下移动可实现磁力吸盘与工作台的相对移动与固定。支撑轴上设有阴极支撑架和阳极固定板。支撑轴设置有外螺纹，阴极支撑架通过螺纹与支撑轴配合，阴极支撑架端部设置有阴极电解装置，使用者可通过转动阴极支撑架来调节半铜环电极和橡胶隔离套的高度，橡胶隔离套可起到绝缘作用。阳极固定板通过两个设置有内螺纹的绝缘夹板固定在支撑轴上。阳极固定板和两个绝缘夹板采用塑料材质做成，可以保证阳极的绝缘性能。阳极固定板的一端设置有与ELID电源阳极连接的阳极碳刷，在进行ELID砂轮在线修整时阳极碳刷可与机床主轴上的导电零件压接，保证砂轮带有正电，半铜环电极的轴心线与砂轮的轴心线平行。 Connect the fixed sleeve and the support shaft with pins, and the operator can adjust the height of the support shaft through the pins. The bottom of the fixed sleeve 27 is provided with a magnetic sucker and a handle, and the relative movement and fixing of the magnetic sucker and the workbench can be realized by moving the handle up and down. A cathode supporting frame and an anode fixing plate are arranged on the supporting shaft. The support shaft is provided with external threads, the cathode support frame is matched with the support shaft through threads, and the end of the cathode support frame is provided with a cathode electrolysis device. The user can adjust the height of the semi-copper ring electrode and the rubber isolation sleeve by rotating the cathode support frame. The isolation sleeve can play an insulating role. The anode fixing plate is fixed on the support shaft through two insulating splints provided with internal threads. The anode fixing plate and the two insulation splints are made of plastic material, which can ensure the insulation performance of the anode. One end of the anode fixing plate is provided with an anode carbon brush connected to the anode of the ELID power supply. During the on-line dressing of the ELID grinding wheel, the anode carbon brush can be crimped with the conductive parts on the machine tool spindle to ensure that the grinding wheel is positively charged, and the semi-copper ring electrode The axis line is parallel to the axis line of the grinding wheel.
在进行砂轮的ELID在线修整时，ELID电源阳极通过阳极碳刷与机床主轴上的导电零件压接，ELID电源阴极与半铜环电极连接。当磨削液进入半铜环电极与砂轮表面之间的间隙后，在电流的作用下，砂轮的金属基体作为阳极被电解，使砂轮中的磨粒露出表面，形成一定的磨粒高度和容屑空间。同时，在砂轮表面逐渐形成一层钝化膜，阻止电解过程的继续进行，使砂轮不会过快损耗。当砂轮表面的磨粒磨损后，钝化膜将会被工件材料刮擦去除，电解继续进行，可对砂轮表面进一步修整。 When performing ELID on-line dressing of the grinding wheel, the anode of the ELID power supply is crimped with the conductive parts on the machine tool spindle through the anode carbon brush, and the cathode of the ELID power supply is connected to the half-copper ring electrode. When the grinding fluid enters the gap between the semi-copper ring electrode and the surface of the grinding wheel, under the action of the current, the metal matrix of the grinding wheel is electrolyzed as an anode, so that the abrasive grains in the grinding wheel are exposed to the surface, forming a certain abrasive grain height and capacity. crumb space. At the same time, a passivation film is gradually formed on the surface of the grinding wheel to prevent the electrolysis process from continuing, so that the grinding wheel will not be worn out too quickly. When the abrasive grains on the surface of the grinding wheel are worn away, the passivation film will be scraped and removed by the workpiece material, and the electrolysis will continue to further repair the surface of the grinding wheel.
综上所述，本实用新型通过在机床工作台左侧的ELID在线修整装系统和主轴下方的三维超声振动刀具系统,从而在实现三维超声振动磨削的同时,可根据需求进行砂轮ELID在线修整,形成一种多工艺复合的高效镜面加工技术,解决了硬脆材料的难加工特性，推进了其在国防、航空航天等高技术领域中的应用。 In summary, the utility model uses the ELID online dressing system on the left side of the machine tool table and the three-dimensional ultrasonic vibration tool system under the main shaft, so that the grinding wheel can be ELID on-line dressing according to requirements while realizing three-dimensional ultrasonic vibration grinding. , forming a multi-process compound high-efficiency mirror processing technology, which solves the difficult-to-process characteristics of hard and brittle materials, and promotes its application in high-tech fields such as national defense and aerospace.
附图说明 Description of drawings
图1为本实用新型的结构示意图； Fig. 1 is the structural representation of the utility model;
图2为三维超声振动刀具系统的俯视图； Fig. 2 is the top view of the three-dimensional ultrasonic vibrating tool system;
图3为Y向超声振动机构的剖视图； Fig. 3 is a sectional view of the Y-direction ultrasonic vibration mechanism;
图4为ELID在线修整装系统的结构示意图。 Fig. 4 is a schematic diagram of the structure of the ELID online trimming system.
图5为纵弯复合振动变幅杆和纵向超声振动换能器的结构示意图。 Fig. 5 is a structural schematic diagram of a longitudinal-bending composite vibration horn and a longitudinal ultrasonic vibration transducer.
具体实施方式 Detailed ways
如图1-图5所示，本实用新型的一种三维超声振动ELID内圆磨削实验装置，包括机架8，机架8上设有工作台9，工作台9上设有三维超声振动刀具系统和ELID在线修整装系统10，三维超声振动刀具系统正上方设有机床主轴系统。 As shown in Fig. 1-Fig. 5, a kind of three-dimensional ultrasonic vibration ELID internal grinding experiment device of the present utility model comprises frame 8, and workbench 9 is arranged on frame 8, and three-dimensional ultrasonic vibration is arranged on workbench 9 Tool system and ELID online trimming system 10, a machine tool spindle system is arranged directly above the three-dimensional ultrasonic vibration tool system.
三维超声振动刀具系统包括多通道超声波发生器7、圆形夹具12、X向超声振动机构5、Y向超声振动机构6和Z向超声振动机构40，圆形夹具12、X向超声振动机构5和Y向超声振动机构6设在工作台9上，Z向超声振动机构40设在工作台9下方，圆形夹具12顶部用于夹紧工件3的卡盘4； The three-dimensional ultrasonic vibration tool system includes a multi-channel ultrasonic generator 7, a circular fixture 12, an X-direction ultrasonic vibration mechanism 5, a Y-direction ultrasonic vibration mechanism 6 and a Z-direction ultrasonic vibration mechanism 40, a circular fixture 12, an X-direction ultrasonic vibration mechanism 5 The Y-direction ultrasonic vibration mechanism 6 is arranged on the workbench 9, the Z-direction ultrasonic vibration mechanism 40 is arranged below the workbench 9, and the top of the circular clamp 12 is used to clamp the chuck 4 of the workpiece 3;
X向超声振动机构5包括同轴向设置的X向超声振动换能器14和X向振动变幅杆15，X向振动变幅杆15通过X向变幅杆保持架16固定到工作台9上； The X-direction ultrasonic vibration mechanism 5 includes an X-direction ultrasonic vibration transducer 14 and an X-direction vibration horn 15 arranged coaxially, and the X-direction vibration horn 15 is fixed to the workbench 9 through the X-direction horn holder 16 superior;
Y向超声振动机构6包括安装箱35和采用紧固螺栓32设在安装箱35顶部的Y向变幅杆保持架31，Y向变幅杆保持架31上垂直设有Y向振动变幅杆33，Y向振动变幅杆33下端设有位于安装箱35内的Y向超声振动换能器34； The Y-direction ultrasonic vibration mechanism 6 includes a mounting box 35 and a Y-direction horn holder 31 mounted on the top of the installation case 35 with fastening bolts 32, and a Y-direction vibration horn is vertically arranged on the Y-direction horn holder 31. 33. The lower end of the Y-direction vibration horn 33 is provided with a Y-direction ultrasonic vibration transducer 34 located in the installation box 35;
Z向超声振动机构40包括同轴向设置的Z向超声振动换能器18和Z向振动变幅杆19，Z向振动变幅杆19通过Z向变幅杆保持架17固定到工作台9上； The Z-direction ultrasonic vibration mechanism 40 includes a Z-direction ultrasonic vibration transducer 18 and a Z-direction vibration horn 19 arranged coaxially, and the Z-direction vibration horn 19 is fixed to the workbench 9 through a Z-direction horn holder 17 superior;
X向振动变幅杆15、Y向振动变幅杆33和Z向振动变幅杆19的动力输出端分别通过双头螺柱13与圆形夹具12连接； The power output ends of the X-direction vibration horn 15, the Y-direction vibration horn 33 and the Z-direction vibration horn 19 are respectively connected to the circular clamp 12 through the stud 13;
多通道超声波发生器7分别通过电缆与X向超声振动换能器14、Y向超声振动换能器34和Z向超声振动换能器18连接。 The multi-channel ultrasonic generator 7 is respectively connected to the X-direction ultrasonic vibration transducer 14 , the Y-direction ultrasonic vibration transducer 34 and the Z-direction ultrasonic vibration transducer 18 through cables.
X向振动变幅杆15、Y向振动变幅杆33和Z向振动变幅杆19中的任意两个为纵弯复合振动变幅杆36，X向超声振动换能器14、Y向超声振动换能器34和Z向超声振动换能器18中的任意两个为纵向超声振动换能器37，每个纵弯复合振动变幅杆36对应与一个纵向超声振动换能器37连接。 Any two of the X-direction vibration horn 15, the Y-direction vibration horn 33, and the Z-direction vibration horn 19 are longitudinal bending composite vibration horns 36, and the X-direction ultrasonic vibration transducer 14 and the Y-direction ultrasonic Any two of the vibration transducer 34 and the Z-direction ultrasonic vibration transducer 18 are longitudinal ultrasonic vibration transducers 37 , and each longitudinal-bending composite vibration horn 36 is correspondingly connected to one longitudinal ultrasonic vibration transducer 37 .
机床主轴系统包括垂直设置的机床主轴1和设在机床主轴1下端的砂轮2，机床主轴1的中心线与卡盘4的中心线重合。 The machine tool spindle system includes a vertically arranged machine tool spindle 1 and a grinding wheel 2 arranged at the lower end of the machine tool spindle 1 , the centerline of the machine tool spindle 1 coincides with the centerline of the chuck 4 .
ELID在线修整装系统包括ELID电源11、磁力吸盘25、固定套筒27和支撑轴28，磁力吸盘25吸附在工作台9上，固定套筒27下端与磁力吸盘25顶部连接，磁力吸盘25侧部设有用于移动磁力吸盘25的手柄26，支撑轴28插设在固定套筒27内并通过径向设置的销钉24连接，支撑轴28上设有阴极支撑架29和阳极固定板20，阴极支撑架29通过螺纹与支撑轴28配合，阴极支撑架29端部通过橡胶隔离套22设置有半铜环电极23，半铜环电极23与ELID电源11的阴极连接；阳极固定板20通过两个设置有内螺纹的绝缘夹板30固定在支撑轴28上，阳极固定板20的端部设置有与ELID电源11的阳极连接的阳极碳刷21，在进行砂轮2在线修整时，阳极碳刷21与机床主轴1上的导电零件压接，半铜环电极23的轴心线与砂轮2的轴心线平行。 The ELID online trimming system includes an ELID power supply 11, a magnetic chuck 25, a fixed sleeve 27 and a support shaft 28, the magnetic chuck 25 is adsorbed on the workbench 9, the lower end of the fixed sleeve 27 is connected to the top of the magnetic chuck 25, and the side of the magnetic chuck 25 There is a handle 26 for moving the magnetic chuck 25, the support shaft 28 is inserted in the fixed sleeve 27 and connected by the pin 24 provided radially, the support shaft 28 is provided with a cathode support frame 29 and an anode fixed plate 20, the cathode support The frame 29 cooperates with the supporting shaft 28 through threads, and the end of the cathode support frame 29 is provided with a half-copper ring electrode 23 through a rubber spacer 22, and the half-copper ring electrode 23 is connected with the cathode of the ELID power supply 11; the anode fixing plate 20 is provided with two The insulating splint 30 with internal thread is fixed on the support shaft 28, and the end of the anode fixed plate 20 is provided with the anode carbon brush 21 connected with the anode of the ELID power supply 11, when carrying out the grinding wheel 2 on-line dressing, the anode carbon brush 21 and the machine tool The conductive parts on the main shaft 1 are crimped, and the axis line of the semi-copper ring electrode 23 is parallel to the axis line of the grinding wheel 2 .
多通道超声波发生器7同时向X向超声振动换能器14、Y向超声振动换能器34和Z向超声振动换能器18发出具有一定相位差的同频超声激励信号。 The multi-channel ultrasonic generator 7 simultaneously sends ultrasonic excitation signals of the same frequency with a certain phase difference to the X-direction ultrasonic vibration transducer 14 , the Y-direction ultrasonic vibration transducer 34 and the Z-direction ultrasonic vibration transducer 18 .
X向振动变幅杆15、Y向振动变幅杆33和Z向振动变幅杆19在各自变幅杆的节点处与保持架连接。 The X-direction vibration horn 15 , the Y-direction vibration horn 33 and the Z-direction vibration horn 19 are connected to the cage at nodes of the respective horns.
X向振动变幅杆15、Y向振动变幅杆33和Z向振动变幅杆19分别发出径向、轴向和切向振动，促使工件3做三维超声振动。三维超声振动轨迹为空间椭圆。 The X-direction vibration horn 15 , the Y-direction vibration horn 33 and the Z-direction vibration horn 19 emit radial, axial and tangential vibrations respectively, thereby prompting the workpiece 3 to perform three-dimensional ultrasonic vibration. The three-dimensional ultrasonic vibration trajectory is a space ellipse.
本实用新型的机床主轴1下端与砂轮2相连接，并带动砂轮2做上下、左右进给运动和旋转运动。ELID在线修整装系统10设在工作台9左侧，当砂轮2需要进行ELID在线修整时，可通过上下移动手柄26，使ELID在线修整装系统10移动至机床主轴1处，进行砂轮2的ELID在线修整。三维超声振动刀具系统设在工作台9上，三维超声振动刀具系统通过双头螺柱13与圆形夹具12相连接，另一端通过X向变幅杆保持架16、Z向变幅杆保持架17和Y向变幅杆保持架31与工作台9固定连接，以实现工件的三维超声振动磨削。 The lower end of the main shaft 1 of the machine tool of the utility model is connected with the grinding wheel 2, and drives the grinding wheel 2 to perform up-and-down, left-right feeding motion and rotational motion. The ELID online dressing system 10 is located on the left side of the workbench 9. When the grinding wheel 2 needs to be ELID online dressing, the ELID online dressing system 10 can be moved to the machine tool spindle 1 by moving the handle 26 up and down to perform ELID on the grinding wheel 2. Online trimming. The three-dimensional ultrasonic vibrating tool system is set on the workbench 9. The three-dimensional ultrasonic vibrating tool system is connected with the circular fixture 12 through the stud 13, and the other end is through the X-direction horn holder 16 and the Z-direction horn holder. 17 and the Y-direction horn holder 31 are fixedly connected with the worktable 9 to realize the three-dimensional ultrasonic vibration grinding of the workpiece.
当机床主轴1带动砂轮2对工件3做内圆磨削时，X向超声振动换能器14、Y向超声振动换能器34和Z向超声振动换能器18分别与X向振动变幅杆15、Y向振动变幅杆33和Z向振动变幅杆19将多通道超声波发生器7传输的有一定相位差的同频三激励超声信号分别转换为三个同频频机械振荡。由于X向振动变幅杆15、Y向振动变幅杆33和Z向振动变幅杆19分别分布在砂轮2的径向、轴向和切向，当三个同频机械振荡通过X向振动变幅杆15、Y向振动变幅杆33和Z向振动变幅杆19施加到圆形夹具12上时，圆形夹具12带动工件做三个不同方向的机械振动，最终叠加为三维超声振动。圆形夹具12通过卡盘4夹紧工件3。X向振动变幅杆15、Y向振动变幅杆33和Z向振动变幅杆19中的任意两个可以用一个纵弯复合振动变幅杆36代替。纵弯复合振动变幅杆36开有斜槽，其端部设有纵向超声振动换能器37，使其能够在单激励下形成纵弯复合振动，从而实现二维超声椭圆振动。同时另外一个X向振动变幅杆15（Y向振动变幅杆33或Z向振动变幅杆19）在一定相位差的同频超声激励信号激励下产生纵向振动。这样最终促使工件做三维超声振动。 When the machine tool spindle 1 drives the grinding wheel 2 to perform internal grinding on the workpiece 3, the X-direction ultrasonic vibration transducer 14, the Y-direction ultrasonic vibration transducer 34 and the Z-direction ultrasonic vibration transducer 18 are respectively in contact with the X-direction vibration amplitude The rod 15, the Y-direction vibration horn 33 and the Z-direction vibration horn 19 convert the same-frequency three-excitation ultrasonic signals with a certain phase difference transmitted by the multi-channel ultrasonic generator 7 into three same-frequency mechanical oscillations. Since the X-direction vibration horn 15, the Y-direction vibration horn 33 and the Z-direction vibration horn 19 are respectively distributed in the radial direction, axial direction and tangential direction of the grinding wheel 2, when three mechanical vibrations of the same frequency pass through the X-direction vibration When the horn 15, the horn 33 for vibration in the Y direction and the horn 19 for the vibration in the Z direction are applied to the circular fixture 12, the circular fixture 12 drives the workpiece to vibrate mechanically in three different directions, and finally superimposed into three-dimensional ultrasonic vibration . The circular clamp 12 clamps the workpiece 3 through the chuck 4 . Any two of the X-direction vibration horn 15 , the Y-direction vibration horn 33 and the Z-direction vibration horn 19 can be replaced by a longitudinal-bending composite vibration horn 36 . The longitudinal-bending compound vibration horn 36 is provided with a chute, and its end is provided with a longitudinal ultrasonic vibration transducer 37, so that it can form a longitudinal-bending compound vibration under a single excitation, thereby realizing two-dimensional ultrasonic elliptical vibration. At the same time, another X-direction vibration horn 15 (Y-direction vibration horn 33 or Z-direction vibration horn 19 ) generates longitudinal vibration under the excitation of the same-frequency ultrasonic excitation signal with a certain phase difference. This eventually causes the workpiece to undergo three-dimensional ultrasonic vibration.
用销钉24连接固定套筒27和支撑轴28，操作者可通过销钉24调节支撑轴28的高度。固定套筒27底部设有磁力吸盘25，并设有手柄26，通过手柄26的上下移动可实现磁力吸盘25与工作台9的相对移动与固定。支撑轴28上设有阴极支撑架29和阳极固定板20。支撑轴28设置有外螺纹，阴极支撑架29通过螺纹与支撑轴28配合，阴极支撑架29端部设置有阴极电解装置，使用者可通过转动阴极支撑架29来调节半铜环电极23和橡胶隔离套22的高度，橡胶隔离套22可起到绝缘作用。阳极固定板20通过两个设置有内螺纹的绝缘夹板30固定在支撑轴28上。阳极固定板20和两个绝缘夹板30采用塑料材质做成，可以保证阳极的绝缘性能。阳极固定板20的一端设置有与ELID电源11阳极连接的阳极碳刷21，在进行ELID砂轮2在线修整时阳极碳刷21可与机床主轴上的导电零件压接，保证砂轮2带有正电，半铜环电极23的轴心线与砂轮2的轴心线平行。 The fixing sleeve 27 and the support shaft 28 are connected with the pin 24, and the operator can adjust the height of the support shaft 28 through the pin 24. The bottom of the fixed sleeve 27 is provided with a magnetic sucker 25 and a handle 26. The relative movement and fixation between the magnetic sucker 25 and the workbench 9 can be realized by moving the handle 26 up and down. A cathode support frame 29 and an anode fixing plate 20 are provided on the support shaft 28 . The support shaft 28 is provided with an external thread, and the cathode support frame 29 cooperates with the support shaft 28 through threads. The end of the cathode support frame 29 is provided with a cathode electrolysis device, and the user can adjust the semi-copper ring electrode 23 and the rubber ring by rotating the cathode support frame 29. The height of the spacer 22, the rubber spacer 22 can play an insulating role. The anode fixing plate 20 is fixed on the supporting shaft 28 through two insulating clamping plates 30 provided with internal threads. The anode fixing plate 20 and the two insulating splints 30 are made of plastic material, which can ensure the insulation performance of the anode. One end of the anode fixing plate 20 is provided with an anode carbon brush 21 connected to the anode of the ELID power supply 11. When the ELID grinding wheel 2 is being trimmed online, the anode carbon brush 21 can be crimped with the conductive parts on the machine tool spindle to ensure that the grinding wheel 2 is positively charged. , the axis of the semi-copper ring electrode 23 is parallel to the axis of the grinding wheel 2 .
在进行砂轮2的ELID在线修整时，ELID电源11阳极通过阳极碳刷21与机床主轴1上的导电零件压接，ELID电源11阴极与半铜环电极23连接。当磨削液进入半铜环电极23与砂轮2表面之间的间隙后，在电流的作用下，砂轮2的金属基体作为阳极被电解，使砂轮2中的磨粒露出表面，形成一定的磨粒高度和容屑空间。同时，在砂轮2表面逐渐形成一层钝化膜，阻止电解过程的继续进行，使砂轮2不会过快损耗。当砂轮2表面的磨粒磨损后，钝化膜将会被工件材料刮擦去除，电解继续进行，可对砂轮2表面进一步修整。 When performing ELID on-line dressing of the grinding wheel 2, the anode of the ELID power supply 11 is crimped with the conductive part on the machine tool spindle 1 through the anode carbon brush 21, and the cathode of the ELID power supply 11 is connected to the semi-copper ring electrode 23. When the grinding fluid enters the gap between the semi-copper ring electrode 23 and the surface of the grinding wheel 2, under the action of the current, the metal matrix of the grinding wheel 2 is electrolyzed as an anode, so that the abrasive grains in the grinding wheel 2 are exposed on the surface, forming a certain amount of grinding. Kernel height and crumb space. At the same time, a layer of passivation film is gradually formed on the surface of the grinding wheel 2 to prevent the electrolysis process from continuing, so that the grinding wheel 2 will not be worn out too quickly. When the abrasive grains on the surface of the grinding wheel 2 are worn away, the passivation film will be scraped and removed by the workpiece material, and the electrolysis continues, and the surface of the grinding wheel 2 can be further trimmed.
以上实施例仅用以说明而非限制本实用新型的技术方案，尽管参照上述实施例对本实用新型进行了详细说明，本领域的普通技术人员应当理解：依然可以对本实用新型进行修改或者等同替换，而不脱离本实用新型的精神和范围的任何修改或局部替换，其均应涵盖在本实用新型的权利要求范围当中。 The above embodiments are only used to illustrate and not limit the technical solutions of the present utility model. Although the present utility model has been described in detail with reference to the above embodiments, those of ordinary skill in the art should understand that the present utility model can still be modified or equivalently replaced. Any modification or partial replacement without departing from the spirit and scope of the present utility model shall fall within the scope of the claims of the present utility model.
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