CN109831116A - A kind of Linear piezoelectric motor driven by synthesizing square wave - Google Patents
A kind of Linear piezoelectric motor driven by synthesizing square wave Download PDFInfo
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- CN109831116A CN109831116A CN201910230966.7A CN201910230966A CN109831116A CN 109831116 A CN109831116 A CN 109831116A CN 201910230966 A CN201910230966 A CN 201910230966A CN 109831116 A CN109831116 A CN 109831116A
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Abstract
The Linear piezoelectric motor that the invention discloses a kind of to be driven by synthesizing square wave.Including stator mechanism, mover mechanism and pedestal；Stator mechanism includes stator, and stator is laminar stator cantilever beam oscillator, is respectively equipped with stator piezoelectric patches on two sides；Mover mechanism includes mover and sliding equipment；Mover is laminar mover cantilever beam oscillator, and one side is equipped with mover piezoelectric patches；Sliding equipment includes cooperation sliding block and line slide rail, and mover is set on sliding block；Mover cantilever vibrator and stator cantilever beam oscillator are at right angles adjacent；A side of stator is equipped with contact foot；When work, stator piezoelectric patches and mover piezoelectric patches synthesize square wave voltage signal by sine wave and motivate, the output machinery waveform approximate square waves of stator cantilever oscillator and mover cantilever vibrator；In one cycle, when contact foot is contacted with mover cantilever vibrator, along line slide rail one step pitch of linear movement, high frequency periodic repeats the stiction driving mover between, realizes macroscopical linear directional movement of motor.
Description
Technical field
The invention belongs to precision actuations and field of locating technology, specifically, it is related to a kind of being driven by synthesizing square wave
Linear piezoelectric motor.
Background technique
Piezo-electric motor converts electrical energy into mechanical energy using the inverse piezoelectric effect of piezoelectric ceramics.Since its size is small, torque
Greatly, the advantages that precision high, low speed performance is good, without electromagnetic interference has extensively in fields such as space flight, guided missile, robot and precision instruments
Wealthy application prospect.Linear piezoelectric motor has the characteristics that direct linear movement output, cuts off self-lock, and has been supplied in precision at present
Positioning system, bio-inert instrument, mobile phone camera, in motorcar electric remote-control light reflecting mirror.
Piezo-electric motor, which is divided into, can be divided into mode of resonance piezo-electric motor and anharmonic vibration shape piezo-electric motor.What Zheng Wencan et al. was developed
A kind of linear piezoelectric ultrasonic motor indulged curved vibration mode and realize standing wave drive with thin plate in plane vibration, resonant frequency are
43.2kHz, optimum preload 7N, it is 41.7 mm/s that when input voltage is 9V, model machine speed, which can reach maximum value, maximum defeated
Thrust is about 1N out, and this motor belongs to mode of resonance piezo-electric motor, is driven by single harmonic, the friction between stator and mover
Power drive moves mover, and in resonant state, frequency is high for work, and speed is fast.Because being driven by single harmonic, stator driving mover
Process be it is progressive, there are force of sliding friction between stator and mover, serious wear, the service life is short.Nanjing Aero-Space University
Zhang Sheng et al. a kind of S type linear piezoelectric motor based on looper principle was proposed in 2012, which is in driving voltage
100V, driving frequency are speed 25 under 20Hz, precision is up to 0.6.Looper motor by two case bit locations and
One driving unit realizes stepping, it is known that, looper motor during driving between two case bit locations and fixed support body only
There are stiction, the movement of motor realizes stepping by the collective effect of stiction and driving unit.Theoretically, looper
Sliding friction is not present in motor in the process of running, fretting wear is not present, efficiency is very high, and the service life is long.But it is general next
Saying looper motor all is work under quasi-static, that is, is worked in non-resonant condition, and frequency is relatively low, low in one timing frequency of step pitch
It is low to will lead to speed.Meanwhile such piezo-electric motor needs two case bit locations and a driving unit timed delivery to replace
Movement, says that difficulty is bigger from the angle of control, and more complicated circuit is needed to realize effective control.
Summary of the invention
The present invention is for the fretting wear of mode of resonance piezo-electric motor is serious and anharmonic vibration shape piezo-electric motor working frequency low velocity
Low disadvantage provides a kind of can work and makes motor speed fast in resonant state but also overcome fretting wear major defect
The Linear piezoelectric motor that novel linear piezo-electric motor-is driven by synthesizing square wave.This motor improves ultrasonic motor serious wear
The shortcomings that, there is advantage more fireballing than anharmonic vibration shape piezo-electric motor.
A kind of by synthesizing the Linear piezoelectric motor that square wave drives includes stator mechanism, mover mechanism and pedestal 1；
The stator mechanism includes stator 7 and stator seat 9；
The stator 7 includes laminar stator cantilever beam oscillator, and the top of stator cantilever beam oscillator is stator isosceles triangle
Piece 73, middle part are stator rectangular sheet, lower part is stator connection sheet；Stator diamond shape is offered on the stator isosceles triangle piece 73
Hole 74 is respectively equipped with stator piezoelectric patches 72 on the two sides of stator rectangular sheet；
The stator 7 is fixed on stator seat 9 by lower part stator connection sheet, and stator 7 is in vertical；The stator seat 9 is solid
Surely it is set on pedestal 1；
The mover mechanism includes mover 5 and sliding equipment；
The mover 5 includes laminar mover cantilever beam oscillator, and the top of mover cantilever beam oscillator is mover isosceles triangle
Piece 54, middle part are mover rectangular sheet, lower part is mover pedestal 52；Mover diamond hole is offered on mover isosceles triangle piece 54
55, the one side of mover rectangular sheet is equipped with mover piezoelectric patches 53, and the mover pedestal 52 is vertical at the one of mover rectangular sheet
Side lower makes between mover pedestal 52 and mover rectangular sheet at right angles；
The sliding equipment includes the sliding block 4 and line slide rail 3 of cooperation sliding；The mover 5 is set by the fixation of mover pedestal 52
In on sliding block 4, the line slide rail 3 is fixed on the one side of pedestal 1 by support frame 2, is made mover cantilever vibrator and is determined
Sub- cantilever beam oscillator is at right angles adjacent；
A side, which is equipped with, in the middle part of the stator cantilever beam oscillator adjacent with mover cantilever beam oscillator contacts foot 6；
The middle part of support frame as described above 2 and stator seat 9 are corresponding, are equipped with pre-tightening mechanism therebetween, real by the adjusting of pre-tightening mechanism
Contact foot 6 when now working on stator cantilever beam oscillator is contacted with mover cantilever vibrator；
When work, the stator piezoelectric patches 72 and mover piezoelectric patches 53 synthesize square wave voltage signal by sine wave and motivate, and stator is outstanding
The output machinery waveform approximate square waves of arm oscillator and mover cantilever vibrator；Stator cantilever oscillator can be along Y axis vibration, the vibration of mover cantilever
Son can be along X axis vibration；In one cycle, two groups of structures execute " fitting-driving-separation-reset " movement, in this process
Mover 5 executes fitting, separating action, and stator 6 executes driving, homing action；In one cycle, contact foot 6 is contacted with mover 5
When, along one step pitch of linear movement of line slide rail 3, high frequency periodic is repeated, is realized the stiction driving mover 5 between
Macroscopical linear directional of motor moves.
The technical solution further limited is as follows:
The preceding two ranks characteristic frequency ratio of the stator cantilever beam oscillator and the preceding two ranks characteristic frequency ratio of mover cantilever vibrator
It is identical, it is 1:3.
The stator mounting hole 71 of two or more kidney-shapeds is offered in the stator connection sheet, stator 7 is connected by lower part
The stator mounting hole 71 of on piece is fixed on the one side of upright block of inverted T-shaped block.
The stator seat 9 is inverted T-shaped block, opens up that there are two the kidney slots 92 penetrated through on the upright block of stator seat 9；Stator 7
It is fixed on the one side of upright block of stator seat 9 by lower part stator connection sheet；Inverted T-slot is offered on the pedestal 1,
The cooperation of stator seat 9 is set in the inverted T-slot of pedestal 1, and 92 inner bolt of kidney slot penetrated through by two is fixed；Stator seat 9
Horizontal block side, which offers, pre-tightens adjustment hole 91.
The contact foot 6 is short cylindrical, and middle part radially offers mounting groove 61, and contact foot 6 is installed on by mounting groove 61
Stator rectangular sheet a side top of the stator 7 adjacent with mover 5.
Support frame as described above 2 is angle steel shape, and two or more sliding rail mounting holes 25, another side board are offered on the side plate of side
On symmetrically offer the adjustment holes 21 of two kidney-shapeds, the pre- tieholen 23 of a kidney-shaped is offered between two adjustment holes 21.
The pre-tightening mechanism includes screw rod 103, nut 101 and spring 102, and spring 102 is set on screw rod 103；It is described
Screw rod 103 passes through support frame 2 and stator seat 9, and the adjusting of pretightning force between stator 7 and mover 5 is realized by adjusting nut 101.
Advantageous effects of the invention embody in the following areas:
1. of the invention control stator using sine wave synthesis square wave, the output waveform of mover is square wave, to realize connecing for the two
Touching and leave all is mutation, is driven between stator and mover by stiction, is not present force of sliding friction, stator and mover it
Between do not wear, extend motor life.And ultrasonic motor is motivated by single harmonic signal, is contacted and is left between stator and mover
Be it is progressive, there are sliding force of sliding friction, serious wear, motor life is short.
2. Linear piezoelectric motor of the present invention is by harmonic and reactive detection square wave excitation, when the fundamental frequency driving voltage of stator and mover
The speed of motor is 6.62mm/s, tractive force 3.6N when respectively 140 V and 100V.The motor speed is far longer than disresonance
The speed of type piezo-electric motor is slightly less than the speed of ultrasonic motor.
For 3 Linear piezoelectric motors of the present invention when mover voltage is 200V, synthesis square wave drive efficiency is 12.2%, and
Sine wave drive efficiency is 7.6%, so motivating piezo-electric motor than single harmonic by synthesizing the Linear piezoelectric motor that square wave drives
It is high-efficient.
4 Linear piezoelectric motor structures of the present invention are simple, and small volume is easy to assembly, can be applied to lathe it is accurate into
To mechanism, the wear adjustment device of cutter.
Detailed description of the invention
Fig. 1 is schematic structural view of the invention.
Fig. 2 is the rear perspective view of Fig. 1.
Fig. 3 is Structure of mover schematic diagram.
Fig. 4 is stator structure schematic diagram.
Fig. 5 is the positional relationship perspective view of contact foot and stator, mover.
Fig. 6 is the positional relationship front view of contact foot and stator, mover.
Fig. 7 is support frame structure diagram.
Fig. 8 is stator base structural schematic diagram.
Fig. 9 is schematic diagram of base structure.
Figure 10 is pre-tightening mechanism structural schematic diagram.
Figure 11 is that line slide rail and sliding block show that structure is intended to.
Figure 12 is that approximate square waves of the invention synthesize schematic diagram.
Figure 13 is operation principle schematic diagram of the present invention.
Serial number in upper figure: pedestal 1, line slide rail 3, sliding block 4, mover 5, contact foot 6, stator 7, clamping plate 8, is determined support frame 2
Sub- pedestal 9, pre-tightening mechanism 10, adjustment hole 21, pre- tieholen 23, sliding rail mounting hole 25, through hole 51, mover pedestal 52, mover pressure
Electric piece 53, mover diamond hole 55, mounting groove 61, stator mounting hole 71, stator piezoelectric patches 72, is determined mover isosceles triangle piece 54
Sub- isosceles triangle piece 73, pre-tightens adjustment hole 91, kidney slot 92, nut 101, spring 102, screw rod 103 at stator diamond hole 74.
Specific embodiment
With reference to the accompanying drawing, the present invention is further described by embodiment.
Referring to Fig. 1 and Fig. 2, it is a kind of by synthesize the Linear piezoelectric motor that square wave drives include stator mechanism, mover mechanism and
Pedestal 1.
Referring to Fig. 1, stator mechanism includes stator 7 and stator seat 9.
Referring to Fig. 5, stator 7 includes laminar stator cantilever beam oscillator, and the top of stator cantilever beam oscillator is stator etc.
Lumbar triangle shape piece 73, middle part are stator rectangular sheet, lower part is stator connection sheet；Stator is offered on stator isosceles triangle piece 73
Diamond hole 74 is respectively equipped with stator piezoelectric patches 72 on the two sides of stator rectangular sheet.Kidney-shaped there are three being opened up in stator connection sheet
Stator mounting hole 71.Referring to Fig. 8, stator seat 9 is inverted T-shaped block, opens up that there are two the kidney-shapeds penetrated through on the upright block of stator seat 9
Hole 92.Referring to Fig. 9, inverted T-slot is offered on pedestal 1, stator seat 9 is coupled in the inverted T-slot of pedestal 1, and passes through two
The bolt of a perforation kidney slot 92 is fixed；The horizontal block side of stator seat 9, which offers, pre-tightens adjustment hole 91.Stator 7 passes through lower part
Stator mounting hole 71 and clamping plate 8 in connection sheet are fixedly installed on the one side of upright block of inverted T-shaped block, see Fig. 1, stator 7
In vertical；Stator seat 9 is fixedly installed on pedestal 1.
Mover mechanism includes mover 5 and sliding equipment.
Referring to Fig. 3, mover 5 includes laminar mover cantilever beam oscillator, and the top of mover cantilever beam oscillator is mover etc.
Lumbar triangle shape piece 54, middle part are mover rectangular sheet, lower part is mover pedestal 52；Mover is offered on mover isosceles triangle piece 54
Diamond hole 55 is equipped with mover piezoelectric patches 53 on the one side of mover rectangular sheet；Mover pedestal 52 is vertical at mover rectangular sheet
One side lower part, open up that there are four the through holes 51 being arranged symmetrically on mover pedestal, for mover to be mounted on sliding block 4.
Make between mover pedestal 52 and mover rectangular sheet at right angles.
The preceding two ranks characteristic frequency ratio of stator cantilever beam oscillator and the preceding two ranks characteristic frequency ratio of mover cantilever vibrator
It is identical, it is 1:3.
Referring to Figure 11, sliding equipment includes the sliding block 4 and line slide rail 3 of cooperation sliding.Referring to fig. 2, mover 5 passes through mover
Pedestal 52 is fixedly installed on sliding block 4, and line slide rail 3 is fixedly installed on the one side of pedestal 1 by support frame 2, makes mover
Cantilever vibrator and stator cantilever beam oscillator are at right angles adjacent.
Referring to Fig. 5, it is equipped in a side in the middle part of the stator cantilever beam oscillator adjacent with mover cantilever beam oscillator and contacts foot
6；Contact foot 6 is short cylindrical, and middle part radially offers mounting groove 61, and contact foot 6 is installed on adjacent with mover 5 by mounting groove 61
Stator 7 stator rectangular sheet a side top.
Referring to Fig. 5, the middle part of support frame 2 and stator seat 9 are corresponding, are equipped with pre-tightening mechanism therebetween, pass through pre-tightening mechanism
Contact foot of adjusting when realizing work on stator cantilever beam oscillator 6 contacted with mover cantilever vibrator.Referring to Figure 10, pre-tightening mechanism
Including screw rod 103, nut 101 and spring 102, spring 102 is sleeved on screw rod 103.Referring to Fig. 1 and Fig. 2, screw rod 103 passes through
The preload adjustment hole 91 on pre- tieholen 23 and stator seat 9 on support frame 2, adjusting nut 101, which is realized, adjusts stator 7 and mover 5
Between pretightning force, guarantee when work contact foot 6 with mover cantilever vibrator is tangent contacts.
Referring to Fig. 7, support frame 2 is angle steel shape, is opened up on the side plate of side there are four sliding rail mounting hole 25, on another side board
The adjustment hole 21 of two kidney-shapeds is symmetrically offered, the pre- tieholen 23 of a kidney-shaped is offered between two adjustment holes 21.Pass through adjusting
Mounting height of the support frame 2 on 1 vertical plane of pedestal contacts the contact position of foot 6 with mover cantilever vibrator to adjust.
Detailed description are as follows for the working principle of the invention:
The present invention is harmonic and reactive detection square wave Linear piezoelectric motor, and harmonic and reactive detection square wave is realized according to the Fourier transformation for being square wave.
Formula are as follows:
As can be seen that can be obtained by synthesis side by a series of sine-wave superimposeds that frequency ratio is 1:3:5:7 ... from formula
Wave.The output machine of elastomer can just be made by the characteristic frequency ratio of elastomer being adjusted to 1:3:5:7 for mechanical waveform ...
Tool waveform is square wave.In the present invention, it is the output machinery waveform square wave for making stator cantilever oscillator Yu mover cantilever vibrator, needs
To adjust its mechanical structure constantly to adjust the ratio between its each rank characteristic frequency.This workload is very big, so only will in the present invention
The preceding two ranks characteristic frequency ratio of mover and stator is adjusted to 1:3.As shown in figure 12, by two frequency ratios be 1:3, amplitude ratio 3:
1 sinusoidal waveform can synthesize approximate square waves waveform.
The method that the present invention takes increase and decrease material adjusts the intrinsic frequency of stator 7 and mover 5.Mover cantilever vibrator in Fig. 3
Upper end does the processing that narrows and forms isosceles triangle shape, there is mover diamond hole 55 at acute angle, guarantees that the first rank and second-order bending are shaken
Shape natural frequency ratio is 1:3.Stator cantilever oscillator upper end does the processing that narrows and forms isosceles triangle shape in Fig. 4, and there have at acute angle to be fixed
Sub- diamond hole 74 guarantees that the first rank and second-order bending vibration shape natural frequency ratio are 1:3.
The two-way frequency exported respectively by two signal generators by adder for the sinusoidal signal of 1:3 than being superimposed to obtain
Two-way approximate square waves, then two-way approximate square waves are applied to 72 He of stator piezoelectric patches after two power amplifiers amplify respectively
On mover piezoelectric patches 53.When work, stator piezoelectric patches 72 and mover piezoelectric patches 53 synthesize square wave voltage signal by sine wave and motivate,
The output machinery waveform approximate square waves of stator cantilever oscillator and mover cantilever vibrator.Stator cantilever beam oscillator can be moved along Y axis vibration
Sub- cantilever vibrator can be along X axis vibration.In one cycle, two groups of structures execute " fitting-driving-separation-reset " movement.One
In a period, when contact foot 6 is contacted with mover 5, the stiction driving mover 5 between moves linearly along line slide rail 3
One step pitch, high frequency periodic repeat, and realize macroscopical linear directional movement of motor.It is as shown in figure 13 in one cycle two
The movement that group structure is realized: (X-Y coordinate is in the horizontal plane)
Such as Figure 13 (1) initial time, mover cantilever vibrator is in X-axis negative direction, and stator cantilever oscillator is in Y-axis positive direction；
Such as Figure 13 (2) joint movement, mover cantilever vibrator is swung in X-axis positive direction, is connect with stator cantilever oscillator by contacting foot 6
Touching, there is therebetween pressure；
Such as Figure 13 (3) drive actions, stator cantilever oscillator swings in Y-axis negative direction, in the process, is driven by stiction
Mover 5 moves a step pitch along Y-axis negative direction；
Such as Figure 13 (4) separating action, mover cantilever vibrator swings in X-axis negative direction, separates with stator cantilever oscillator；
Such as Figure 13 (5) homing action, stator cantilever oscillator is swung in Y-axis positive direction, returns to initial position.
Claims (7)
1. a kind of Linear piezoelectric motor driven by synthesizing square wave, including stator mechanism, mover mechanism and pedestal (1), feature
It is:
The stator mechanism includes stator (7) and stator seat (9)；
The stator (7) includes laminar stator cantilever beam oscillator, and the top of stator cantilever beam oscillator is stator isoceles triangle
Shape piece (73), middle part are stator rectangular sheet, lower part is stator connection sheet；It is fixed to offer on the stator isosceles triangle piece (73)
Sub- diamond hole (74) is respectively equipped with stator piezoelectric patches (72) on the two sides of stator rectangular sheet；
The stator (7) is fixed on stator seat (9) by lower part stator connection sheet, and stator (7) is in vertical；The stator
Seat (9) is fixed on pedestal (1)；
The mover mechanism includes mover (5) and sliding equipment；
The mover (5) includes laminar mover cantilever beam oscillator, and the top of mover cantilever beam oscillator is mover isoceles triangle
Shape piece (54), middle part are mover rectangular sheet, lower part is mover pedestal (52)；Mover is offered on mover isosceles triangle piece (54)
The one side of diamond hole (55), mover rectangular sheet is equipped with mover piezoelectric patches (53), and the mover pedestal (52) is vertical at dynamic
The one side lower part of sub- rectangular sheet makes between mover pedestal (52) and mover rectangular sheet at right angles；
The sliding equipment includes the sliding block (4) and line slide rail (3) of cooperation sliding；The mover (5) passes through mover pedestal
(52) it being fixed on sliding block (4), the line slide rail (3) is fixed on the one side of pedestal (1) by support frame (2),
Keep mover cantilever vibrator and stator cantilever beam oscillator at right angles adjacent；
A side, which is equipped with, in the middle part of the stator cantilever beam oscillator adjacent with mover cantilever beam oscillator contacts foot (6)；
The middle part of support frame as described above (2) and stator seat (9) are corresponding, are equipped with pre-tightening mechanism therebetween, pass through the tune of pre-tightening mechanism
Contact foot (6) when section realizes work on stator cantilever beam oscillator is contacted with mover cantilever vibrator；
When work, the stator piezoelectric patches (72) and mover piezoelectric patches (53) synthesize square wave voltage signal by sine wave and motivate, fixed
The output machinery waveform approximate square waves of sub- cantilever vibrator and mover cantilever vibrator；Stator cantilever oscillator can be along Y axis vibration, and mover is outstanding
Arm oscillator can be along X axis vibration；In one cycle, two groups of structures execute " fitting-driving-separation-reset " movement, in this mistake
Mover (5) executes fitting, separating action in journey, and stator (6) executes driving, homing action；In one cycle, foot (6) is contacted
When contacting with mover (5), stiction driving mover (5) between is high along one step pitch of line slide rail (3) linear movement
Frequency is repeated cyclically, and realizes macroscopical linear directional movement of motor.
2. a kind of Linear piezoelectric motor driven by synthesizing square wave according to claim 1, it is characterised in that: the stator is outstanding
The preceding two ranks characteristic frequency ratio of arm beam oscillator is identical with the preceding two ranks characteristic frequency ratio of mover cantilever vibrator, is 1:3.
3. a kind of Linear piezoelectric motor driven by synthesizing square wave according to claim 1, it is characterised in that: the stator connects
The stator mounting hole (71) of two or more kidney-shapeds is offered in contact pin, stator (7) passes through the stator installation in the connection sheet of lower part
Hole (71) is fixed on the one side of upright block of inverted T-shaped block.
4. a kind of Linear piezoelectric motor driven by synthesizing square wave according to claim 1, it is characterised in that: the stator seat
(9) it is inverted T-shaped block, opens up that there are two the kidney slots (92) penetrated through on the upright block of stator seat (9)；Stator (7) is fixed by lower part
Sub- connection sheet is fixed on the one side of the upright block of stator seat (9)；Inverted T-slot, stator seat are offered on the pedestal (1)
(9) cooperation is set in the inverted T-slot of pedestal (1), and kidney slot (92) inner bolt penetrated through by two is fixed；Stator seat (9)
Horizontal block side offer pre-tighten adjustment hole (91).
5. a kind of Linear piezoelectric motor driven by synthesizing square wave according to claim 1, it is characterised in that: the contact foot
It (6) is short cylindrical, middle part radially offers mounting groove (61), contacts foot (6) and is installed on and mover (5) phase by mounting groove (61)
Stator rectangular sheet a side top of adjacent stator (7).
6. a kind of Linear piezoelectric motor driven by synthesizing square wave according to claim 1, it is characterised in that: support frame as described above
(2) it is angle steel shape, two or more sliding rail mounting holes (25) is offered on the side plate of side, symmetrically offer two on another side board
The adjustment hole (21) of a kidney-shaped offers the pre- tieholen (23) of a kidney-shaped between two adjustment holes (21).
7. a kind of Linear piezoelectric motor driven by synthesizing square wave according to claim 1, it is characterised in that: the pretightening machine
Structure includes screw rod (103), nut (101) and spring (102), and spring (102) is set on screw rod (103)；The screw rod (103)
Across support frame (2) and stator seat (9), the tune of pretightning force between stator (7) and mover (5) is realized by adjusting nut (101)
Section.
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| CN112054714A (en) * | 2020-09-24 | 2020-12-08 | 南京工程学院 | Coupled mode type ultrasonic motor based on anisotropic eccentric constraint and oblique piezoelectric ceramics |
| CN113726216A (en) * | 2021-08-30 | 2021-11-30 | 合肥工业大学 | Non-same-frequency double-stator driving piezoelectric motor |
| WO2022143651A1 (en) * | 2020-12-31 | 2022-07-07 | 华为技术有限公司 | Piezoelectric motor, camera module, and electronic device |
| CN114785186A (en) * | 2022-05-11 | 2022-07-22 | 合肥工业大学 | Linear piezoelectric motor |
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| CN109831116B (en) | 2020-01-03 |
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