CN102969935A - Three-freedom-degree revolving table - Google Patents
Three-freedom-degree revolving table Download PDFInfo
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- CN102969935A CN102969935A CN2012104924372A CN201210492437A CN102969935A CN 102969935 A CN102969935 A CN 102969935A CN 2012104924372 A CN2012104924372 A CN 2012104924372A CN 201210492437 A CN201210492437 A CN 201210492437A CN 102969935 A CN102969935 A CN 102969935A
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Abstract
The invention discloses a three-freedom-degree revolving table. The three-freedom-degree revolving table is composed of a stator assembly, a rotor, a tension apparatus and a base, wherein the stator assembly is arranged on the base, the rotor is arranged on the upper end of the stator assembly, and the tension apparatus is arranged between the rotor and the base. The three-freedom-degree revolving table is characterized in that the stator assembly comprises a stator cylinder, a stator disk and four groups of piezoelectric ceramic pieces; the stator cylinder and the four groups of piezoelectric ceramic pieces are arranged on the upper surface of the stator disk, and the four groups of piezoelectric ceramic pieces are uniformly distributed on the stator disk; the rotor is a cylinder block the bottom surface of which is processed to form a concave spherical surface; and the outer edge line of the upper end face of the stator cylinder contacts the concave spherical surface. Different electric signals are applied to the piezoelectric ceramic pieces so as to excite a material point on the top end face of the stator cylinder to do micro-amplitude elliptic motion; and the rotary motion at three freedom degrees of the revolving table is implemented by depending on the action of friction between the stator and the rotor.
Description
Technical field:
The present invention relates to a kind of Three Degree Of Freedom rotary table, belong to the multiple freedom degrees ultrasound technical field of motors.
Background technology:
The multiple freedom degrees ultrasound motor is a kind of inverse piezoelectric effect of utilizing piezoelectric, excite elastomer to produce micro breadth oscillation in supersonic range, and drive the novel small and special electric machine of revolution (straight line) motion of rotor (mover) on a plurality of degrees of freedom by the rubbing action between the stator and rotor (mover).The multiple freedom degrees ultrasound motor is as a class Novel ultrasonic motor that grows up recent years, have the diversification of motion, simple in structure, the advantage such as difficulty of processing is little, the welcome that used by engineering, but because existing multiple freedom degrees ultrasound motor still can't be broken through key technology problems, there is structural redundancy, oversize and drive the problems such as control is unstable, can't realizes preferably applying on the engineering.
Summary of the invention:
The object of the invention is to the technological deficiency that exists for existing multiple freedom degrees ultrasound motor, proposed a kind of simple in structure, be easy to processing, can realize the Three Degree Of Freedom rotary table of the new structure that rotatablely moves.
For solving the problems of the technologies described above, technical scheme of the present invention is as follows:
A kind of Three Degree Of Freedom rotary table, consisted of by stator module, mover, take-up device and base, described stator module is arranged on the base, described mover is arranged on described stator module upper end, between described mover and described base, described take-up device is set, it is characterized in that: described stator module comprises stator cylinder, stator disk and four groups of piezoelectric ceramic pieces, described stator cylinder and four groups of piezoelectric ceramic pieces are arranged on the upper surface of stator disk, and described four groups of piezoelectric ceramic pieces are distributed on the described stator disk; Described mover is the cylindrical piece that a bottom surface is processed to form concave spherical surface; The outer edge of the upper surface of described stator cylinder contacts with described concave spherical surface.
Described susceptor surface has been processed to form the pyrometric cone of a circle projection, is processed to form support slot in described stator disk bottom, and this support slot is positioned at the pitch circle place of the operation mode of stator disk, is used for nested described pyrometric cone.
Described take-up device is by being arranged on the first gim peg on the mover, being arranged on bearing on the base, being arranged on the second gim peg on the bearing and connecting the first gim peg and the second gim peg and the intermediate connector by the stator cylinder centre bore consist of.
The end face of described mover is provided with the first installing hole, is provided with the second installing hole in described base back surface, and described the first gim peg is positioned at described the first installing hole, and described bearing is positioned at described the second installing hole.
Described intermediate connector is steel wire or extension spring.
The centre of sphere of the low-angle concave spherical surface on the described mover is positioned at the upper surface centre position of base.
The motion control method of Three Degree Of Freedom rotary table of the present invention is: when give upper in a direction (being assumed to directions X) and relative two groups of piezoelectric ceramic pieces (supposition is numbered 1, No. 3) when applying the sinusoidal signal of 90 ° of phase differences, stator disk is energized out B
11Mode (1 pitch circle and 1 pitch diameter), stator cylinder is energized out the swing along directions X, and the particle of stator cylinder upper surface is done a little elliptic motion along directions X, drive to press rotatablely moving of deflection angle that thereon mover does take Z axis as symmetry axis, moves along X-direction, this moment, mover did not have deflection angle in Y direction; In like manner, apply the above-mentioned signal of telecommunication in the same plane Y-direction vertical with directions X (namely having placed the direction of two groups of piezoelectric ceramic pieces that are numbered 2, No. 4), stator disk also can be energized out B
11Mode, stator cylinder swings along Y-direction, and the upper surface particle does elliptic motion along Y-direction, namely drives rotatablely moving of deflection angle that mover does take Z axis as symmetry axis, moves along Y direction, and this moment, mover did not have deflection angle in X-direction; Be 90 ° sinusoidal signal when on X, Y-direction, respectively selecting one group of piezoelectric ceramic to apply phase difference, perhaps to four groups of piezoelectric ceramic apply respectively sinwt, coswt ,-sinwt ,-the coswt signal of telecommunication, stator disk will be energized out B
12Mode (1 pitch circle and 2 pitch diameters), stator cylinder is being energized out the B that the two-phase space quadrature is pi/2 along the Z-direction perpendicular to the XY plane
3Bending vibration modes, so that the stator cylinder upper end is take Z axis as symmetry axis, simultaneously do rotary oscillation around Z axis again, namely two be listed in that all to differ on time and the space be that 90 ° standing wave forms the capable ripple of rotation in stator cylinder upper end surface stack, so the elliptic motion driving mover that the upper end particle is done a little rotates around Z axis.
After adopting such scheme, Three Degree Of Freedom rotary table of the present invention can realize two degrees of freedom limited angle deflection rotatablely move and one degree of freedom rotate freely motion, not only improved the positioning accuracy of motor, simultaneously the processing of motor do not had harsh technological requirement, be convenient to microminaturization.In addition, what the contact between fixed, the mover of Three Degree Of Freedom rotary table of the present invention was adopted is the line contact, has reduced to a certain extent the frictional dissipation that friction-driven is brought, and has given full play to the sharpest edges of the line contact under the vibrating body.
Invention Three Degree Of Freedom rotary table, not only have the conventional ultrasound motor without electromagnetic interference, simple in structure, the advantages such as response is fast, cut off self-lock, low-speed and large-torque, and can realize without guide rail multi-degree-of-freedom motion platform and high-precision location thereof, thereby have a wide range of applications in fields such as Aeronautics and Astronautics, medical treatment, robot, MEMS (micro electro mechanical system).
Description of drawings:
Fig. 1 is the structure chart of Three Degree Of Freedom rotary table.
Fig. 2 is the Structure of mover figure of Three Degree Of Freedom rotary table.
Fig. 3 is the front view of mover.
Fig. 4 is that mover is along the profile of front view A-A face.
Fig. 5 is the stator module structure chart of Three Degree Of Freedom rotary table.
Fig. 6 is the front view of stator module.
Fig. 7 is that stator module is along the profile of front view A-A face.
Fig. 8 is the understructure figure of Three Degree Of Freedom rotary table.
Fig. 9 is the front view of base.
Figure 10 is that base is along the profile of front view A-A face.
Figure 11 is the take-up device schematic diagram of Three Degree Of Freedom rotary table.
Figure 12 be the Three Degree Of Freedom rotary table in one-period along the fundamental diagram on X, the Y direction.
Figure 13 is the schematic diagram that X-direction Three Degree Of Freedom rotary table rotates around Z axis.
Figure 14 is the schematic diagram that Y direction Three Degree Of Freedom rotary table rotates around Z axis.
Wherein: 1, mover, the 1.1, first installing hole, 1.2, concave spherical surface, 2, stator module, 2.1, stator disk, 2.2, stator cylinder, 2.3, piezoelectric ceramic piece, 2.4, support slot, 3, base, 3.1, pyrometric cone, the 3.2, second installing hole, 4, take-up device, 4.1, the first gim peg, 4.2, steel wire, 4.3, bearing, the 4.4, second gim peg.
Embodiment:
Below in conjunction with accompanying drawing, the present invention is elaborated:
Three Degree Of Freedom rotary table of the present invention as shown in Figure 1, comprises mover, stator module, take-up device and base, mover is arranged on the stator module upper end, and base is arranged on the stator module lower end, interlock on the take-up device, lower even base, and run through stator module.Wherein, the mover inner surface has been processed to form the centre of sphere and has been positioned at the RC low-angle concave spherical surface of base upper surface, and its upper surface has been processed to form through hole the first installing hole, and structural representation as shown in Figure 2, the front view of mover as shown in Figure 3, mover is along the profile of its front view A-A face as shown in Figure 4; Stator module is by stator disk, stator cylinder and 4 groups of piezoelectric ceramic form, structural representation as shown in Figure 5,4 groups of piezoelectric ceramic piece array distribution are on stator disk, stator cylinder lower end and stator disk are connected, its front view as shown in Figure 6, stator disk has been processed to form the small size support slot of an annular at the pitch circle place of overleaf operation mode, as shown in Figure 7, the outer edge of stator cylinder upper surface contacts with the low-angle concave spherical surface of mover, contact type belongs to the line contact, and contact is the face contact between the rotor of traditional ultrasound electric machine, because the each point vibration velocity on the stator vibration face is inconsistent, the face contact can reduce electric efficiency to a certain extent, increase frictional dissipation, it is fixed that Three Degree Of Freedom rotary working platform therefore of the present invention adopts, the line contact friction drives the mover motion between the mover, has avoided the defective of face contact, has the high efficiency of vibrational energy transmission and the consistency of friction-driven; The upper surface of base has been processed to form the pyrometric cone of a circle projection, be used for being nested in the support slot of stator disk, closely cooperate with support slot, to be used for the support stator assembly, in addition, base lower surface has been processed to form through hole second installing hole, and structural representation as shown in Figure 8, the front view of base as shown in Figure 9, it is along the profile of front view A-A face as shown in figure 10; Take-up device is comprised of two gim pegs, bearing and steel wires, wherein the first gim peg is installed in the first installing hole of mover, bearing is installed in the second installing hole of base, the second gim peg is installed on the bearing, the upper end of steel wire and the first gim peg are connected, lower end and the second gim peg are connected, as shown in figure 11.
The present invention applies the signal of telecommunication by the combination to different piezoelectric ceramic pieces and encourages the stator cylinder end face particle of Three Degree Of Freedom rotary table to carry out elliptic motion, under the effect of take-up device, produce certain precompression, generation of interfaces rubbing action between stator cylinder end face and the mover low-angle concave spherical surface, can drive mover produce 2 degrees of freedom limited angle deflection rotatablely move and 1 degree of freedom rotate freely motion.Supposing that four groups of piezoelectric ceramic pieces are arranged on the XY plane, is Z axis along the stator cylinder axial direction, and wherein 1, No. 3 piezoelectric ceramic piece is along X-direction setting and symmetrical about Y-axis, and 2, No. 4 piezoelectric ceramic pieces are along Y direction setting and symmetrical about X-axis.When to impose on respectively 1, No. 3 piezoelectric ceramic piece two-phase phase difference be 90 ° the sinusoidal excitation signal of telecommunication, this moment, 2, No. 4 piezoelectric ceramic pieces were not worked, and stator disk is with generation of vibration B
11Mode, stator cylinder will swing along X-direction, and the particle of its upper surface forms elliptic motion, drive rotatablely moving of deflection angle that mover does take Z axis as symmetry axis, moves along X-direction thereby under the effect of precompression, contact with mover sphere line, this moment, mover did not have deflection angle in Y direction, and the deflection angle on X-direction is relevant with the processing radian of concave spherical surface, as shown in figure 12.Impose on the pumping signal of 1, No. 3 piezoelectric ceramic piece by exchange, can change the direction of motion of mover.In like manner, when to impose on respectively 2, No. 4 piezoelectric ceramic piece two-phase phase differences be 90 ° the sinusoidal excitation signal of telecommunication, this moment, 1, No. 3 piezoelectric ceramic piece was not worked, and stator disk is also with generation of vibration B
11Mode, stator cylinder will swing along Y direction, and the particle of its upper surface forms elliptic motion, drive rotatablely moving of deflection angle that mover does take Z axis as symmetry axis, moves along Y direction thereby under the effect of precompression, contact with mover sphere line, this moment, mover did not have deflection angle in X-direction, and in the angle of Y-axis upper slice deflection with identical in the angle of X-direction deflection.Impose on the pumping signal of 2, No. 4 piezoelectric ceramic pieces by exchange, can change the direction of motion of mover.When impose on respectively 1,2 or 2,3 or 3,4 or 4, No. 1 piezoelectric ceramic piece two-phase phase difference be 90 ° the sinusoidal excitation signal of telecommunication or respectively to 1,2,3, No. 4 piezoelectric ceramic piece apply sinwt, coswt ,-sinwt ,-during the excitation electric signal of coswt, stator disk is with generation of vibration B
12Operation mode, stator cylinder will produce B along Z-direction
3The flexural vibrations of mode, and to look from X-direction and Y direction all are B
3The flexural vibrations of mode, shown in Figure 13,14, therefore will be so that take out take Z axis as symmetry the stator cylinder upper end, do rotary oscillation around Z axis again simultaneously, namely two to be listed in that phase difference on time and the space all differs be that 90 ° standing wave forms the capable ripple of rotation in the stack of stator cylinder upper end surface, so the elliptic motion driving mover that the upper end particle is done is a little done rotatablely moving around Z axis.At this moment, steel wire also will be along with mover rotates, and the second gim peg is to adopt interference fit to be installed in the endoporus of bearing, therefore along with the steel wire rotation.
Above-mentioned is exactly structural design and the movement control mode of Three Degree Of Freedom rotary table of the present invention.
The present invention has following characteristics:
1, owing to the structural redundancy of traditional piezoelectric vibrator multiple freedom degrees ultrasound motor, axial dimension is generally larger, and it is large to cause taking up room, can't satisfy application demand, and the present invention is simple in structure, axial dimension is little, processing technology requires low, has larger flexibility in the motion process;
2, the present invention adopts cylindrical piece to carry out three-degree-of-freedom motion as mover, not only can realize without the guide rail movement platform, and can realize the high accuracy platform positioning function;
3. the present invention is by adopting suitable energisation mode can obtain the compound motion of straight line and rotation;
4. the present invention adopts the type of drive of the line contact of deciding between the mover, has realized the efficient transmission of vibrational energy, has avoided excessive wear and the energy loss of friction-driven.
Claims (6)
1. Three Degree Of Freedom rotary table, by mover (1), stator module (2), base (3) and take-up device (4) consist of, described stator module (2) is arranged on the base (3), described mover (1) is arranged on described stator module (2) upper end, between described mover (1) and described base (3), described take-up device is set, it is characterized in that: described stator module (2) comprises stator cylinder (2.2), stator disk (2.1) and four groups of piezoelectric ceramic pieces (2.3), described stator cylinder (2.2) and four groups of piezoelectric ceramic pieces (2.3) are arranged on the upper surface of stator disk (2.1), and described four groups of piezoelectric ceramic pieces are distributed on the described stator disk (2.1); Described mover (1) is the cylindrical piece that a bottom surface is processed to form concave spherical surface (1.2); The outer edge of the upper surface of described stator cylinder (2.2) contacts with described concave spherical surface (1.2).
2. Three Degree Of Freedom rotary table as claimed in claim 1, it is characterized in that: described base (3) Surface Machining has formed the pyrometric cone (3.1) of a circle projection, be processed to form support slot (2.4) in described stator disk (2.1) bottom, this support slot (2.4) is positioned at the pitch circle place of the operation mode of stator disk (2.1), is used for nested described pyrometric cone (3.1).
3. Three Degree Of Freedom rotary table as claimed in claim 1 is characterized in that: described take-up device (4) is by being arranged on the first gim peg (4.1) on the mover, being arranged on bearing (4.3) on the base, being arranged on the second gim peg (4.4) on the bearing and connecting the first gim peg (4.1) and the second gim peg (4.2) and the intermediate connector by stator cylinder (2.2) centre bore consist of.
4. Three Degree Of Freedom rotary table as claimed in claim 3, it is characterized in that: the end face of described mover (1) is provided with the first installing hole (1.1), be provided with the second installing hole (3.2) at described base (3) back side, described the first gim peg (4.1) is positioned at described the first installing hole (1.1), and described bearing is positioned at described the second installing hole (3.2).
5. Three Degree Of Freedom rotary table as claimed in claim 3, it is characterized in that: described intermediate connector is steel wire (4.2) or extension spring.
6. Three Degree Of Freedom rotary table as claimed in claim 1, it is characterized in that: the centre of sphere of the low-angle concave spherical surface (1.2) on the mover (1) is positioned at the upper surface centre position of base (3).
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN104022678A (en) * | 2014-06-25 | 2014-09-03 | 哈尔滨工业大学 | Partitioning stimulation type oscillator for three-degree-of-freedom ultrasonic motor |
CN107786120A (en) * | 2017-11-21 | 2018-03-09 | 吉林大学 | Piezoelectricity rotation positioning platform and control method with grand microring array kinetic characteristic |
CN115890275A (en) * | 2023-02-20 | 2023-04-04 | 中国机械总院集团宁波智能机床研究院有限公司 | Static pressure composite rotary table and protection method thereof |
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CN101162877A (en) * | 2007-08-30 | 2008-04-16 | 南京航空航天大学 | Round annular multiple freedom degrees ultrasound electric machine and electric excitation method thereof |
WO2008092824A2 (en) * | 2007-01-29 | 2008-08-07 | Technische Universität Ilmenau | Device and method for the micromechanical positioning and handling of an object |
CN202940749U (en) * | 2012-11-27 | 2013-05-15 | 南京航空航天大学 | Three-degree-of-freedom rotary table |
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US20050269915A1 (en) * | 2004-06-03 | 2005-12-08 | Industrial Technology Research Institute | Long-stroke, high-resolution nanopositioning mechanism |
CN2707426Y (en) * | 2004-07-15 | 2005-07-06 | 天津大学 | Nanopositioning workbench with three degrees of freedom |
CN1667934A (en) * | 2005-04-08 | 2005-09-14 | 清华大学 | Composite ultrasonic micromotor with slotted metal square column piezoelectric sheet |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN104022678A (en) * | 2014-06-25 | 2014-09-03 | 哈尔滨工业大学 | Partitioning stimulation type oscillator for three-degree-of-freedom ultrasonic motor |
CN107786120A (en) * | 2017-11-21 | 2018-03-09 | 吉林大学 | Piezoelectricity rotation positioning platform and control method with grand microring array kinetic characteristic |
CN115890275A (en) * | 2023-02-20 | 2023-04-04 | 中国机械总院集团宁波智能机床研究院有限公司 | Static pressure composite rotary table and protection method thereof |
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