CN102969935B - Three-freedom-degree revolving table - Google Patents
Three-freedom-degree revolving table Download PDFInfo
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- CN102969935B CN102969935B CN201210492437.2A CN201210492437A CN102969935B CN 102969935 B CN102969935 B CN 102969935B CN 201210492437 A CN201210492437 A CN 201210492437A CN 102969935 B CN102969935 B CN 102969935B
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Abstract
The invention discloses a three-freedom-degree revolving table. The three-freedom-degree revolving table is composed of a stator assembly, a rotor, a tension apparatus and a base, wherein the stator assembly is arranged on the base, the rotor is arranged on the upper end of the stator assembly, and the tension apparatus is arranged between the rotor and the base. The three-freedom-degree revolving table is characterized in that the stator assembly comprises a stator cylinder, a stator disk and four groups of piezoelectric ceramic pieces; the stator cylinder and the four groups of piezoelectric ceramic pieces are arranged on the upper surface of the stator disk, and the four groups of piezoelectric ceramic pieces are uniformly distributed on the stator disk; the rotor is a cylinder block the bottom surface of which is processed to form a concave spherical surface; and the outer edge line of the upper end face of the stator cylinder contacts the concave spherical surface. Different electric signals are applied to the piezoelectric ceramic pieces so as to excite a material point on the top end face of the stator cylinder to do micro-amplitude elliptic motion; and the rotary motion at three freedom degrees of the revolving table is implemented by depending on the action of friction between the stator and the rotor.
Description
technical field:
The present invention relates to a kind of Three Degree Of Freedom rotary table, belong to multiple freedom degrees ultrasound technical field of motors.
background technology:
Multiple freedom degrees ultrasound motor is a kind of inverse piezoelectric effect utilizing piezoelectric, elastomer is excited to produce micro breadth oscillation in supersonic range, and the novel small and special electric machine that the rubbing action passed through between stator and rotor (mover) drives rotor (mover) revolution in multiple degree of freedom (straight line) to move.Multiple freedom degrees ultrasound motor is as the class Novel ultrasonic motor grown up recent years, the advantage such as diversification, the structure with motion are simple, difficulty of processing is little, quite by the welcome of engineer applied, but because existing multiple freedom degrees ultrasound motor still cannot break through key technology problems, there is the problems such as structural redundancy, oversize and drived control be unstable, applying in engineering cannot be realized preferably.
summary of the invention:
The object of the invention is to the technological deficiency existed for existing multiple freedom degrees ultrasound motor, propose a kind of structure simple, be easy to processing, the Three Degree Of Freedom rotary table of the new structure of rotary motion can be realized.
For solving the problems of the technologies described above, technical scheme of the present invention is as follows:
A kind of Three Degree Of Freedom rotary table, be made up of stator module, mover, take-up device and base, described stator module is arranged on base, described mover is arranged on described stator module upper end, between described mover and described base, described take-up device is set, it is characterized in that: described stator module comprises stator cylinder, stator disk and four groups of piezoelectric ceramic pieces, described stator cylinder and four groups of piezoelectric ceramic pieces are arranged on the upper surface of stator disk, and four groups of described piezoelectric ceramic pieces are distributed on described stator disk; Described mover is the cylindrical piece that a bottom surface is processed to form concave spherical surface; The outer edge of the upper surface of described stator cylinder contacts with described concave spherical surface.
Described susceptor surface has been processed to form the protruding pyrometric cone of a circle, and bottom described stator disk, be processed to form support slot, this support slot is positioned at the pitch circle place of the operation mode of stator disk, for nested described pyrometric cone.
Described take-up device by the first gim peg be arranged on mover, the bearing be arranged on base, be arranged on the second gim peg on bearing and connect the first gim peg and the second gim peg and formed by the intermediate connector of stator cylinder centre bore.
The end face of described mover is provided with the first installing hole, and described base back surface is provided with the second installing hole, and the first described gim peg is positioned at the first described installing hole, and described bearing is positioned at the second described installing hole.
Described intermediate connector is steel wire or extension spring.
The centre of sphere of the low-angle concave spherical surface on described mover is positioned at the upper surface centre position of base.
The motion control method of Three Degree Of Freedom rotary table of the present invention is: when applying the sinusoidal signal of phase difference 90 ° to the two group piezoelectric ceramic pieces (assuming that be numbered 1, No. 3) upper and relative a direction (being assumed to X-direction), stator disk is energized out B
11mode (1 pitch circle and 1 pitch diameter), stator cylinder is energized out swing along the X direction, and the particle of stator cylinder upper surface does elliptic motion a little along the X direction, the rotary motion of the deflection angle that to drive pressure mover thereon to do with Z axis be symmetry axis, move along X-direction, now mover does not have deflection angle in the Y-axis direction; In like manner, the Y-direction (namely placed the direction of two group piezoelectric ceramic pieces being numbered 2, No. 4) vertical with X-direction in same plane applies the above-mentioned signal of telecommunication, and stator disk also can be energized out B
11mode, stator cylinder swings along the Y direction, and upper surface particle does elliptic motion along the Y direction, and namely to drive mover to do take Z axis as symmetry axis, the rotary motion of deflection angle of moving along Y direction, and now mover does not have deflection angle in the X-axis direction; Apply when respectively selecting one group of piezoelectric ceramic in the x, y direction the sinusoidal signal that phase difference is 90 °, or apply sinwt, coswt ,-the sinwt ,-coswt signal of telecommunication respectively to four groups of piezoelectric ceramic, stator disk will be energized out B
12mode (1 pitch circle and 2 pitch diameters), stator cylinder is being energized out along the Z-direction perpendicular to XY plane the B that two-phase space quadrature is pi/2
3bending vibration modes, stator cylinder upper end is made to take Z axis as symmetry axis, do rotary oscillation around Z axis again simultaneously, namely two row over time and space all difference be that superposition forms the row ripple rotated in stator cylinder upper end surface for the standing wave of 90 °, therefore upper end particle does elliptic motion a little and drives mover to rotate around Z axis.
After adopting such scheme, Three Degree Of Freedom rotary table of the present invention can realize two degrees of freedom limited angle deflection rotary motion and one degree of freedom rotate freely motion, not only increase the positioning precision of motor, harsh technological requirement be there is no to the processing of motor simultaneously, be convenient to microminaturization.In addition, what the contact between the fixed and moving son of Three Degree Of Freedom rotary table of the present invention adopted is linear contact lay, reduces the frictional dissipation that friction-driven is brought to a certain extent, and has given full play to the sharpest edges of the linear contact lay under vibrating body.
Invention Three Degree Of Freedom rotary table, not only have conventional ultrasound motor without electromagnetic interference, the advantage such as structure is simple, response is fast, cut off self-lock, low-speed and large-torque, and can realize, without guide rail multi-degree-of-freedom motion platform and high-precision location thereof, thus having a wide range of applications in fields such as Aeronautics and Astronautics, medical treatment, robot, MEMS (micro electro mechanical system).
accompanying drawing illustrates:
Fig. 1 is the structure chart of Three Degree Of Freedom rotary table.
Fig. 2 is the Structure of mover figure of Three Degree Of Freedom rotary table.
Fig. 3 is the front view of mover.
Fig. 4 is the profile of mover along front view A-A face.
Fig. 5 is the stator member structure figure of Three Degree Of Freedom rotary table.
Fig. 6 is the front view of stator module.
Fig. 7 is the profile of stator module along front view A-A face.
Fig. 8 is the understructure figure of Three Degree Of Freedom rotary table.
Fig. 9 is the front view of base.
Figure 10 is the profile of base along front view A-A face.
Figure 11 is the take-up device schematic diagram of Three Degree Of Freedom rotary table.
Figure 12 be Three Degree Of Freedom rotary table in one-period along the fundamental diagram in X, Y direction.
Figure 13 is the schematic diagram that X-direction Three Degree Of Freedom rotary table rotates around Z axis.
Figure 14 is the schematic diagram that Y direction Three Degree Of Freedom rotary table rotates around Z axis.
Wherein: 1, mover, the 1.1, first installing hole, 1.2, concave spherical surface, 2, stator module, 2.1, stator disk, 2.2, stator cylinder, 2.3, piezoelectric ceramic piece, 2.4, support slot, 3, base, 3.1, pyrometric cone, the 3.2, second installing hole, 4, take-up device, 4.1, the first gim peg, 4.2, steel wire, 4.3, bearing, the 4.4, second gim peg.
embodiment:
Below in conjunction with accompanying drawing, the present invention is elaborated:
Three Degree Of Freedom rotary table of the present invention, as shown in Figure 1, comprises mover, stator module, take-up device and base, mover is arranged on stator module upper end, and base is arranged on stator module lower end, interlock on take-up device, lower even base, and run through stator module.Wherein, mover inner surface has been processed to form the centre of sphere and has been positioned at the RC low-angle concave spherical surface of base upper surface, and its upper surface has been processed to form through hole first installing hole, and structural representation as shown in Figure 2, the front view of mover as shown in Figure 3, mover along its front view A-A face profile as shown in Figure 4, stator module is by stator disk, stator cylinder and 4 groups of piezoelectric ceramic compositions, structural representation as shown in Figure 5, 4 groups of piezoelectric ceramic piece array distribution are on stator disk, stator cylinder lower end and stator disk are connected, its front view as shown in Figure 6, stator disk has been processed to form an annular small size support slot at the pitch circle place of operation mode overleaf, as shown in Figure 7, the outer edge of stator cylinder upper surface contacts with the low-angle concave spherical surface of mover, contact type belongs to linear contact lay, and the Contact of the rotor of traditional ultrasound electric machine is face contact, because each point vibration velocity on stator vibration face is inconsistent, face contact can reduce electric efficiency to a certain extent, increase frictional dissipation, therefore Three Degree Of Freedom rotary working platform of the present invention adopts and determines, linear contact lay friction-driven mover motion between mover, avoid the defect of face contact, there is the high efficiency of vibrational energy transmission and the consistency of friction-driven, the upper surface of base has been processed to form the protruding pyrometric cone of a circle, for being nested in the support slot of stator disk, closely cooperate with support slot, to be used for support stator assembly, in addition, base lower surface has been processed to form through hole second installing hole, and structural representation as shown in Figure 8, as shown in Figure 9, its profile along front view A-A face as shown in Figure 10 for the front view of base, take-up device is made up of two gim pegs, bearing and steel wires, wherein the first gim peg is arranged in the first installing hole of mover, bearing is arranged in the second installing hole of base, second gim peg is arranged on bearing, upper end and first gim peg of steel wire are connected, lower end and the second gim peg are connected, as shown in figure 11.
The present invention encourages the stator cylinder end face particle of Three Degree Of Freedom rotary table to carry out elliptic motion by applying the signal of telecommunication to the combination of different piezoelectric ceramic piece, certain precompression is produced under the effect of take-up device, between stator cylinder end face and mover low-angle concave spherical surface, interface produces rubbing action, can drive mover produce 2 degrees of freedom limited angle deflection rotary motion and 1 degree of freedom rotate freely motion.Supposing that four groups of piezoelectric ceramic pieces are arranged on XY plane, is Z axis along stator cylinder axial direction, and wherein 1, No. 3 piezoelectric ceramic piece is along X-direction setting and about Y-axis symmetry, and 2, No. 4 piezoelectric ceramic pieces are along Y direction setting and about X-axis symmetry.When to be applied to 1, No. 3 piezoelectric ceramic piece two-phase phase difference be respectively the sinusoidal excitation signal of telecommunication of 90 °, now 2, No. 4 piezoelectric ceramic pieces do not work, and vibration is produced B by stator disk
11mode, stator cylinder will swing along X-direction, and the particle of its upper surface forms elliptic motion, with mover sphere linear contact lay thus to drive mover to do take Z axis as symmetry axis, the rotary motion of deflection angle of moving along X-direction under the effect of precompression, now mover does not have deflection angle in the Y-axis direction, and deflection angle is in the X-axis direction relevant with the processing radian of concave spherical surface, as shown in figure 12.By exchanging the pumping signal being applied to 1, No. 3 piezoelectric ceramic piece, the direction of motion of mover can be changed.In like manner, when to be applied to 2, No. 4 piezoelectric ceramic piece two-phase phase differences be respectively the sinusoidal excitation signal of telecommunication of 90 °, now 1, No. 3 piezoelectric ceramic piece does not work, and vibration is also produced B by stator disk
11mode, stator cylinder will swing along Y direction, and the particle of its upper surface forms elliptic motion, with mover sphere linear contact lay thus to drive mover to do take Z axis as symmetry axis, the rotary motion of deflection angle of moving along Y direction under the effect of precompression, now mover does not have deflection angle in the X-axis direction, and identical with the angle deflected in X-direction in the angle of Y-axis upper slice deflection.By exchanging the pumping signal being applied to 2, No. 4 piezoelectric ceramic pieces, the direction of motion of mover can be changed.When be applied to respectively 1,2 or 2,3 or 3,4 or 4, No. 1 piezoelectric ceramic piece two-phase phase difference be 90 ° the sinusoidal excitation signal of telecommunication or respectively to 1,2,3, No. 4 piezoelectric ceramic piece apply sinwt, coswt ,-sinwt ,-coswt excitation electric signal time, stator disk is by vibration generation B
12operation mode, stator cylinder will produce B along Z-direction
3the flexural vibrations of mode, and to look from X-direction and Y direction are all B
3the flexural vibrations of mode, as shown in Figure 13,14, therefore stator cylinder upper end will be made to be that symmetry is taken out, done rotary oscillation around Z axis again simultaneously with Z axis, namely two row phase differences over time and space all differ is that superposition forms the row ripple rotated in stator cylinder upper end surface for the standing wave of 90 °, and therefore the particle elliptic motion done a little in upper end drives mover to do rotary motion around Z axis.Now, steel wire also will rotate along with mover, and the second gim peg adopts interference fit to be arranged in the endoporus of bearing, therefore along with steel wire rotates.
Above-mentioned is exactly structural design and the movement control mode of Three Degree Of Freedom rotary table of the present invention.
The present invention has following feature:
1, due to the structural redundancy of traditional piezoelectric vibrator multiple freedom degrees ultrasound motor, axial dimension is generally comparatively large, causes taking up room greatly, cannot meet application demand, and structure of the present invention is simple, axial dimension is little, processing technology requires low, has larger flexibility in motion process;
2, the present invention adopts cylindrical piece to carry out three-degree-of-freedom motion as mover, not only can realize without guide rail movement platform, and can realize high accuracy platform positioning function;
3. the compound motion of the present invention by adopting suitable energisation mode can obtain straight line and rotation;
4. the present invention adopts the type of drive of the linear contact lay determined between mover, achieves the efficient transmission of vibrational energy, avoids excessive wear and the energy loss of friction-driven.
Claims (6)
1. a Three Degree Of Freedom rotary table, by mover (1), stator module (2), base (3) and take-up device (4) are formed, described stator module (2) is arranged on base (3), described mover (1) is arranged on described stator module (2) upper end, between described mover (1) and described base (3), described take-up device is set, it is characterized in that: described stator module (2) comprises stator cylinder (2.2), stator disk (2.1) and four groups of piezoelectric ceramic pieces (2.3), described stator cylinder (2.2) and four groups of piezoelectric ceramic pieces (2.3) are arranged on the upper surface of stator disk (2.1), four groups of described piezoelectric ceramic pieces are distributed on described stator disk (2.1), described mover (1) is the cylindrical piece that a bottom surface is processed to form concave spherical surface (1.2), the outer edge of the upper surface of described stator cylinder (2.2) contacts with described concave spherical surface (1.2).
2. Three Degree Of Freedom rotary table as claimed in claim 1, it is characterized in that: described base (3) Surface Machining defines the pyrometric cone (3.1) of a circle projection, support slot (2.4) is processed to form in described stator disk (2.1) bottom, this support slot (2.4) is positioned at the pitch circle place of the operation mode of stator disk (2.1), for nested described pyrometric cone (3.1).
3. Three Degree Of Freedom rotary table as claimed in claim 1, is characterized in that: described take-up device (4) by the first gim peg (4.1) be arranged on mover, the bearing (4.3) be arranged on base, be arranged on the second gim peg (4.4) on bearing and connect the first gim peg (4.1) and the second gim peg (4.4) and formed by the intermediate connector of stator cylinder (2.2) centre bore.
4. Three Degree Of Freedom rotary table as claimed in claim 3, it is characterized in that: the end face of described mover (1) is provided with the first installing hole (1.1), described base (3) back side is provided with the second installing hole (3.2), described the first gim peg (4.1) is positioned at described the first installing hole (1.1), and described bearing is positioned at described the second installing hole (3.2).
5. Three Degree Of Freedom rotary table as claimed in claim 3, is characterized in that: described intermediate connector is steel wire (4.2) or extension spring.
6. Three Degree Of Freedom rotary table as claimed in claim 1, is characterized in that: the centre of sphere of the low-angle concave spherical surface (1.2) on mover (1) is positioned at the upper surface centre position of base (3).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210492437.2A CN102969935B (en) | 2012-11-27 | 2012-11-27 | Three-freedom-degree revolving table |
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| CN201210492437.2A CN102969935B (en) | 2012-11-27 | 2012-11-27 | Three-freedom-degree revolving table |
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| CN102969935A CN102969935A (en) | 2013-03-13 |
| CN102969935B true CN102969935B (en) | 2015-03-11 |
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| CN104022678B (en) * | 2014-06-25 | 2016-05-25 | 哈尔滨工业大学 | Partition excitation type Three-dof Ultrasonic Motor oscillator |
| CN107786120B (en) * | 2017-11-21 | 2023-05-19 | 吉林大学 | Piezoelectric rotary positioning platform with macro-micro hybrid motion characteristics and control method |
| CN115890275B (en) * | 2023-02-20 | 2023-07-14 | 中国机械总院集团宁波智能机床研究院有限公司 | Static pressure composite turntable and protection method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2707426Y (en) * | 2004-07-15 | 2005-07-06 | 天津大学 | Nanopositioning workbench with three degrees of freedom |
| CN1667934A (en) * | 2005-04-08 | 2005-09-14 | 清华大学 | Composite ultrasonic micromotor with slotted metal square column piezoelectric sheet |
| CN101162877A (en) * | 2007-08-30 | 2008-04-16 | 南京航空航天大学 | Round annular multiple freedom degrees ultrasound electric machine and electric excitation method thereof |
| CN202940749U (en) * | 2012-11-27 | 2013-05-15 | 南京航空航天大学 | Three-degree-of-freedom rotary table |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| TWI237618B (en) * | 2004-06-03 | 2005-08-11 | Ind Tech Res Inst | A long-distance nanometer positioning apparatus |
| DE102007005293A1 (en) * | 2007-01-29 | 2008-08-07 | Technische Universität Ilmenau | Device and method for micromechanical positioning and manipulation of an object |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2707426Y (en) * | 2004-07-15 | 2005-07-06 | 天津大学 | Nanopositioning workbench with three degrees of freedom |
| CN1667934A (en) * | 2005-04-08 | 2005-09-14 | 清华大学 | Composite ultrasonic micromotor with slotted metal square column piezoelectric sheet |
| CN101162877A (en) * | 2007-08-30 | 2008-04-16 | 南京航空航天大学 | Round annular multiple freedom degrees ultrasound electric machine and electric excitation method thereof |
| CN202940749U (en) * | 2012-11-27 | 2013-05-15 | 南京航空航天大学 | Three-degree-of-freedom rotary table |
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