CN107181424A - String based on Piezoelectric Driving and mixed connection formula three-freedom degree precision driving platform - Google Patents
String based on Piezoelectric Driving and mixed connection formula three-freedom degree precision driving platform Download PDFInfo
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- CN107181424A CN107181424A CN201710375800.5A CN201710375800A CN107181424A CN 107181424 A CN107181424 A CN 107181424A CN 201710375800 A CN201710375800 A CN 201710375800A CN 107181424 A CN107181424 A CN 107181424A
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- flexible hinge
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- upper strata
- hinge structure
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- 238000006073 displacement reaction Methods 0.000 claims abstract description 35
- 230000005611 electricity Effects 0.000 claims description 6
- 230000003321 amplification Effects 0.000 claims description 4
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims 1
- 238000003754 machining Methods 0.000 abstract description 5
- 238000005516 engineering process Methods 0.000 description 4
- 230000033001 locomotion Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000008602 contraction Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
- H02N2/062—Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
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Abstract
The present invention relates to a kind of string based on Piezoelectric Driving and mixed connection formula three-freedom degree precision driving platform, belong to precision actuation field.Including upper and lower two layers of driver element, upper strata driver element includes upper strata bridge-type flexible hinge structure for amplifying A, upper strata bridge-type flexible hinge structure for amplifying B, A type piezoelectric stack I, A types piezoelectric stack II, and X-axis, the straight-line displacement of Y direction can be achieved；Lower floor's driver element includes upper plate, lower floor's bridge type flexible hinge structure for amplifying, lower plate, Type B piezoelectric stack, arch support, and the straight-line displacement of Z-direction can be achieved.Advantage is：The accurate displacement in exportable tri- directions of X, Y, Z, and small volume, compact conformation, control are simply, positioning precision is high, stable and reliable in work, can be applied to the fields such as precise and ultraprecise machining, MEMS, micromanipulation.Displacement output is stable, load output is big, can realize the high precision displacement in small stroke.
Description
Technical field
The present invention relates to precision actuation field, more particularly to a kind of string based on Piezoelectric Driving and mixed connection formula Three Degree Of Freedom essence
Close driving platform.It can be applied to the science and technology fields such as precise and ultraprecise machining, micromanipulation, MEMS.
Background technology
Piezoelectric driving technology as a kind of new type of drive, with its positioning precision height, High power output, response it is rapid,
The advantages of without magnetic interference, efficiency high, is gradually applied in numerous precision actuation platforms, is particularly subject to micro-robot, micro-
The concern in the fields such as operation, precise and ultraprecise machining.The piezoelectric drive platform that presently, there are be generally single-degree-of-freedom or two from
Still there is large development space by spending, and on physical dimension microminaturization direction.Driving platform has that the free degree is few, structure chi
The problems such as very little excessive, functional reliability is poor, positioning precision is not enough.Therefore a kind of multiple degrees of freedom is designed, the piezoelectricity of compact conformation drives
Moving platform is significant for promoting the application and research of piezoelectric drive platform.
The content of the invention
It is an object of the invention to provide a kind of string based on Piezoelectric Driving and mixed connection formula three-freedom degree precision driving platform,
Solve the above mentioned problem of prior art presence.Present invention employs upper and lower two layers of the driver element in structure being series relationship,
Wherein lower floor's driver element realizes the precision linear displacement of Z-direction, and upper strata driver element is by being parallel relationship in structure
Bridge type flexible hinge structure for amplifying, realizes the precision linear displacement of X-axis, Y direction, and whole driving platform can realize three simultaneously
The coupled motions in individual direction.
The above-mentioned purpose of the present invention is achieved through the following technical solutions：
String based on Piezoelectric Driving and mixed connection formula three-freedom degree precision driving platform, including upper strata driver element, lower floor's driving list
Member, the upper strata driver element passes through connecting bolt A1, connecting bolt B2, connecting bolt C3, connecting bolt D4 and attaching nut
A7, attaching nut B8, attaching nut C13, attaching nut D14 and lower floor's driver element are fastenedly connected；The upper strata driver element
It is integrated, including top substrate layer 5, ' S ' shape flexible hinge 14, upper strata bridge-type flexible hinge structure for amplifying A17, upper layer bridge
Formula flexible hinge structure for amplifying B18, A type piezoelectric stack I 18 and A types piezoelectric stack II 20, the A types piezoelectric stack I 18, A types
Piezoelectric stack II 20 is separately mounted to upper strata bridge-type flexible hinge structure for amplifying A17, upper strata bridge-type flexible hinge structure for amplifying B18
Inside, be used as driving platform power source；The upper strata bridge-type flexible hinge structure for amplifying A17, upper strata bridge-type flexible hinge
Structure for amplifying B18 is symmetrical along upper strata driver element diagonal, by the position of A types piezoelectric stack I 18 and A types piezoelectric stack II 20
Connected article carrying platform is transferred to after moving output amplification, X-axis, the displacement of Y direction are produced respectively；The article carrying platform is made
For the displacement output end of whole driving platform, one group of ' S ' shape flexible hinge 15 is connected to respectively in X-axis, Y direction；The S-shaped
Article carrying platform is pushed back to initial position by flexible hinge 15 after the contraction of the dead electricity of A types piezoelectric stack I, II 18,20.
Described lower floor's driver element is integrated, including upper plate 6, lower floor's bridge type flexible hinge structure for amplifying 9, under
Plate 10, Type B piezoelectric stack 11, arch support 12, the Type B piezoelectric stack 9 are arranged on lower floor's bridge type flexible hinge structure for amplifying 9
Inside, is used as the power source of lower floor's driver element；Lower floor's bridge type flexible hinge structure for amplifying is in decussate texture, works as Type B
When piezoelectric stack 9 extends, lower floor's bridge type flexible hinge structure for amplifying is promoted to produce the displacement of four direction, it is amplified to be transferred to
In arch support 12；The connection upper plate 6 of arch support 12 and lower plate 10, and amplify from lower floor's bridge type flexible hinge structure for amplifying
9 displacements passed over, promote the upper plate 6 of lower floor's driver element to produce Z-direction displacement；The upper plate 6 drives lower floor single
The Z-direction displacement that member is produced is transferred to upper strata driver element.
The beneficial effects of the present invention are：The accurate displacement in exportable tri- directions of X, Y, Z, and small volume, compact conformation,
Control is simple, and positioning precision is high, stable and reliable in work, can be applied to precise and ultraprecise machining, MEMS, micromanipulation
Deng field.Present invention driving platform has the advantages that displacement output stabilization, load output are big, can realize high-precision in small stroke
Spend displacement.The present invention is significant for the development in the fields such as China's precise and ultraprecise machining, and it is in accurate and superfinishing
The various fields such as close processing, MEMS, micromanipulation must have broad application prospects.
Brief description of the drawings
Accompanying drawing described herein is used for providing a further understanding of the present invention, constitutes the part of the application, this hair
Bright illustrative example and its illustrate to be used to explain the present invention, do not constitute inappropriate limitation of the present invention.
Fig. 1 is overall structure diagram of the invention；
Fig. 2 is overlooking the structure diagram of the invention.
1st, connecting bolt A；2nd, connecting bolt B；3rd, connecting bolt C；4th, connecting bolt D；5th, top substrate layer；6th, upper plate；7、
Attaching nut A；8th, attaching nut B；9th, lower floor's bridge type flexible hinge enlarger；10th, lower floor's pedestal；11st, Type B piezoelectric stack；
12nd, arch support；13rd, attaching nut C；14th, attaching nut D；15th, ' S ' shape flexible hinge；16th, article carrying platform；17th, upper layer bridge
Formula flexible hinge enlarger A；18th, A types piezoelectric stack I；19th, upper strata bridge-type flexible hinge enlarger B；20th, A types piezo stack
Heap II.
Embodiment
The detailed content and its embodiment of the present invention is further illustrated below in conjunction with the accompanying drawings.
Referring to shown in Fig. 1 and Fig. 2, simultaneously the driving of mixed connection formula three-freedom degree precision is flat for the string of the invention based on Piezoelectric Driving
Platform, including upper strata driver element, lower floor's driver element, the upper strata driver element pass through connecting bolt A1, connecting bolt B2, company
Connecting bolt C3, connecting bolt D4 and attaching nut A7, attaching nut B8, attaching nut C13, attaching nut D14 and lower floor drive
Unit is fastenedly connected；The upper strata driver element is integrated, including top substrate layer 5, ' S ' shape flexible hinge 14, upper strata
Bridge type flexible hinge structure for amplifying A17, upper strata bridge-type flexible hinge structure for amplifying B18, A type piezoelectric stack I 18 and A type piezo stacks
Heap II 20, the A types piezoelectric stack I 18, A types piezoelectric stack II 20 are separately mounted to upper strata bridge-type flexible hinge structure for amplifying
A17, upper strata bridge-type flexible hinge structure for amplifying B18 inside, are used as the power source of driving platform；The upper strata bridge-type flexible hinge
Chain structure for amplifying A17, upper strata bridge-type flexible hinge structure for amplifying B18 are symmetrical along upper strata driver element diagonal, by A type pressures
Electricity is transferred to connected article carrying platform after stacking the displacement output amplification of I 18 and A types piezoelectric stack II 20, and X is produced respectively
The displacement of axle, Y direction；The article carrying platform connects respectively as the displacement output end of whole driving platform in X-axis, Y direction
One group of ' S ' shape flexible hinge 15 is connect；The S-shaped flexible hinge 15 will be carried after the contraction of the dead electricity of A types piezoelectric stack I, II 18,20
Thing platform pushes back to initial position.
Described lower floor's driver element is integrated, including upper plate 6, lower floor's bridge type flexible hinge structure for amplifying 9, under
Plate 10, Type B piezoelectric stack 11, arch support 12, the Type B piezoelectric stack 9 are arranged on lower floor's bridge type flexible hinge structure for amplifying 9
Inside, is used as the power source of lower floor's driver element；Lower floor's bridge type flexible hinge structure for amplifying is in decussate texture, works as Type B
When piezoelectric stack 9 extends, lower floor's bridge type flexible hinge structure for amplifying is promoted to produce the displacement of four direction, it is amplified to be transferred to
In arch support 12；The connection upper plate 6 of arch support 12 and lower plate 10, and amplify from lower floor's bridge type flexible hinge structure for amplifying
9 displacements passed over, promote the upper plate 6 of lower floor's driver element to produce Z-direction displacement；The upper plate 6 drives lower floor single
The Z-direction displacement that member is produced is transferred to upper strata driver element.
Referring to shown in Fig. 1 and Fig. 2, specific work process of the invention is as follows：
Article carrying platform X-axis, the realization of Y direction displacement：When applying voltage to A types piezoelectric stack I 18, A types piezoelectric stack I 18
Piezoelectric stack extends, and output displacement is moving article carrying platform 16 along Y-axis through upper strata bridge-type flexible hinge structure for amplifying A17 amplification pushers
Move in direction；When the dead electricity of A types piezoelectric stack I 18 returns back to initial length, article carrying platform 16 is flexible in ' S ' shape being attached thereto
Initial position is returned back under the elastic reaction of hinge.When applying voltage to A types piezoelectric stack II 20, the load of upper strata driver element
Thing platform will be moved in the X-axis direction, and its motion process is consistent with along Y direction motion process.
The realization of article carrying platform Z-direction displacement：When applying voltage to Type B piezoelectric stack 11, based on inverse piezoelectric effect,
Type B piezoelectric stack 11 extends, and promotes lower floor's bridge type flexible hinge structure for amplifying 9 to be deformed upon along Z-direction first, lower floor's bridge-type
Flexible hinge structure for amplifying 9 is transferred to the arch support 12 being attached thereto after deformation is amplified, the arch support 12 is by deformation
Upper plate 6 is promoted to produce the displacement along Z-direction after amplifying again, while upper plate 6 promotes the upper strata being fastenedly connected therewith to drive list
Member, drives article carrying platform 16 to produce Z-direction displacement.
The preferred embodiment of the present invention is the foregoing is only, is not intended to limit the invention, for the technology of this area
For personnel, the present invention can have various modifications and variations.All any modification, equivalent substitution and improvements made for the present invention etc.,
It should be included in the scope of the protection.
Claims (2)
1. a kind of string based on Piezoelectric Driving and mixed connection formula three-freedom degree precision driving platform, it is characterised in that：Driven including upper strata
Moving cell, lower floor's driver element, the upper strata driver element pass through connecting bolt A（1）, connecting bolt B（2）, connecting bolt C
（3）, connecting bolt D（4）With attaching nut A（7）, attaching nut B（8）, attaching nut C（13）, attaching nut D（14）With lower floor
Driver element is fastenedly connected；The upper strata driver element includes top substrate layer（5）, ' S ' shape flexible hinge（14）, upper strata bridge-type it is soft
Property hinge structure for amplifying A（17）, upper strata bridge-type flexible hinge structure for amplifying B（19）, A types piezoelectric stack I（18）With A type piezo stacks
Heap II（20）, the upper strata bridge-type flexible hinge structure for amplifying A（17）, upper strata bridge-type flexible hinge structure for amplifying B（19）Along upper
Layer driver element diagonal is symmetrical, the A types piezoelectric stack I（18）With A types piezoelectric stack II（20）It is separately mounted to
Layer bridge type flexible hinge structure for amplifying A（17）, upper strata bridge-type flexible hinge structure for amplifying B（19）Inside, be used as driving platform
Power source；The upper strata bridge-type flexible hinge structure for amplifying A（17）, upper strata bridge-type flexible hinge structure for amplifying B（19）By A types
Piezoelectric stack I（18）With A types piezoelectric stack II（20）Displacement output amplification after pass to connected article carrying platform（16）,
X-axis, the displacement of Y direction are produced respectively；The article carrying platform（16）As the displacement output end of whole driving platform, X-axis,
Y direction connects one group of ' S ' shape flexible hinge respectively（15）；' S ' the shape flexible hinge（15）In A types piezoelectric stack I（18）
With A types piezoelectric stack II（20）Article carrying platform is pushed back to initial position by dead electricity after shrinking.
2. the string according to claim 1 based on Piezoelectric Driving and mixed connection formula three-freedom degree precision driving platform, its feature
It is：Described lower floor's driver element includes upper plate（6）, lower floor's bridge type flexible hinge structure for amplifying（9）, lower plate（10）, Type B pressure
Electricity is stacked（11）, arch support（12）, the Type B piezoelectric stack（11）Installed in lower floor's bridge type flexible hinge structure for amplifying（9）
Inside, is used as the power source of lower floor's driver element；Lower floor's bridge type flexible hinge structure for amplifying is in decussate texture, works as Type B
Piezoelectric stack（9）During elongation, lower floor's bridge type flexible hinge structure for amplifying is promoted to produce the displacement of four direction, amplified transmission
To arch support（12）On；The arch support（12）Connect upper plate（6）And lower plate（10）, and amplify from lower floor's bridge type flexible hinge
Chain structure for amplifying（9）The displacement passed over, promotes the upper plate of lower floor's driver element（6）Produce Z-direction displacement；The upper plate
（6）The Z-direction displacement that lower floor's driver element is produced is transferred to upper strata driver element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710375800.5A CN107181424A (en) | 2017-05-25 | 2017-05-25 | String based on Piezoelectric Driving and mixed connection formula three-freedom degree precision driving platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710375800.5A CN107181424A (en) | 2017-05-25 | 2017-05-25 | String based on Piezoelectric Driving and mixed connection formula three-freedom degree precision driving platform |
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| Publication Number | Publication Date |
|---|---|
| CN107181424A true CN107181424A (en) | 2017-09-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710375800.5A Pending CN107181424A (en) | 2017-05-25 | 2017-05-25 | String based on Piezoelectric Driving and mixed connection formula three-freedom degree precision driving platform |
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| CN (1) | CN107181424A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108726106A (en) * | 2018-06-11 | 2018-11-02 | 广东科学技术职业学院 | A kind of piezoelectric stack driving feeding pedestal |
| CN109502542A (en) * | 2018-10-23 | 2019-03-22 | 广东工业大学 | A kind of multi-degree-of-freedom nanometer locating platform based on compliant parallel mechanism |
| CN109768733A (en) * | 2019-01-30 | 2019-05-17 | 吉林大学 | A kind of rotation piezoelectric rotary driver twice |
| CN109831116A (en) * | 2019-03-26 | 2019-05-31 | 合肥工业大学 | A kind of Linear piezoelectric motor driven by synthesizing square wave |
| CN110762271A (en) * | 2018-07-26 | 2020-02-07 | 长春隆美科技发展有限公司 | Piezoelectric stack driving type normally closed microfluidic valve |
| CN114477070A (en) * | 2022-02-11 | 2022-05-13 | 宁波大学 | Double-four-rod piezoelectric micromotion platform with rotation output characteristic |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202406060U (en) * | 2011-12-06 | 2012-08-29 | 浙江大学 | Multi-freedom-degree micro-operator driven by multi-polarized type piezoelectric driver |
-
2017
- 2017-05-25 CN CN201710375800.5A patent/CN107181424A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202406060U (en) * | 2011-12-06 | 2012-08-29 | 浙江大学 | Multi-freedom-degree micro-operator driven by multi-polarized type piezoelectric driver |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108726106A (en) * | 2018-06-11 | 2018-11-02 | 广东科学技术职业学院 | A kind of piezoelectric stack driving feeding pedestal |
| CN110762271A (en) * | 2018-07-26 | 2020-02-07 | 长春隆美科技发展有限公司 | Piezoelectric stack driving type normally closed microfluidic valve |
| CN109502542A (en) * | 2018-10-23 | 2019-03-22 | 广东工业大学 | A kind of multi-degree-of-freedom nanometer locating platform based on compliant parallel mechanism |
| CN109768733A (en) * | 2019-01-30 | 2019-05-17 | 吉林大学 | A kind of rotation piezoelectric rotary driver twice |
| CN109768733B (en) * | 2019-01-30 | 2023-12-22 | 吉林大学 | Twice-rotation piezoelectric rotary driver |
| CN109831116A (en) * | 2019-03-26 | 2019-05-31 | 合肥工业大学 | A kind of Linear piezoelectric motor driven by synthesizing square wave |
| CN109831116B (en) * | 2019-03-26 | 2020-01-03 | 合肥工业大学 | Linear piezoelectric motor driven by synthesized square wave |
| CN114477070A (en) * | 2022-02-11 | 2022-05-13 | 宁波大学 | Double-four-rod piezoelectric micromotion platform with rotation output characteristic |
| CN114477070B (en) * | 2022-02-11 | 2024-07-09 | 宁波大学 | Double four-bar piezoelectric micro-motion platform with rotation output characteristic |
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Application publication date: 20170919 |
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