CN207039486U - String based on Piezoelectric Driving and mixed connection formula three-freedom degree precision driving platform - Google Patents
String based on Piezoelectric Driving and mixed connection formula three-freedom degree precision driving platform Download PDFInfo
- Publication number
- CN207039486U CN207039486U CN201720587267.4U CN201720587267U CN207039486U CN 207039486 U CN207039486 U CN 207039486U CN 201720587267 U CN201720587267 U CN 201720587267U CN 207039486 U CN207039486 U CN 207039486U
- Authority
- CN
- China
- Prior art keywords
- flexible hinge
- amplifying
- hinge structure
- bridge
- upper strata
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
A kind of string based on Piezoelectric Driving and mixed connection formula three-freedom degree precision driving platform are the utility model is related to, belongs to precision actuation field.Including upper and lower two layers of driver element, upper strata driver element includes upper strata bridge-type flexible hinge structure for amplifying A, upper strata bridge-type flexible hinge structure for amplifying B, A type piezoelectric stack I, A types piezoelectric stack II, and the straight-line displacement of X-axis, Y direction can be achieved；Lower floor's driver element includes upper plate, lower floor's bridge type flexible hinge structure for amplifying, lower plate, Type B piezoelectric stack, arch support, and the straight-line displacement of Z-direction can be achieved.Advantage is：The accurate displacement in exportable tri- directions of X, Y, Z, and small volume, compact-sized, control are simply, positioning precision is high, stable and reliable in work, can be applied to the fields such as precise and ultraprecise machining, MEMS, micromanipulation.Displacement output is stable, load output is big, can realize the high precision displacement in small stroke.
Description
Technical field
Precision actuation field is the utility model is related to, simultaneously mixed connection formula three is free for more particularly to a kind of string based on Piezoelectric Driving
Spend precision actuation platform.It can be applied to the science and technology fields such as precise and ultraprecise machining, micromanipulation, MEMS.
Background technology
Piezoelectric driving technology as a kind of new type of drive, with its positioning precision height, High power output, response it is rapid,
Gradually it is applied in numerous precision actuation platforms without the advantages that magnetic interference, efficiency high, is particularly subject to micro-robot, micro-
The concern in the fields such as operation, precise and ultraprecise machining.The piezoelectric drive platform that presently, there are be mostly single-degree-of-freedom or two from
By spending, and still there is large development space on physical dimension microminaturization direction.Driving platform has that the free degree is few, structure chi
The problems such as very little excessive, functional reliability is poor, positioning precision is insufficient.Therefore a kind of multiple degrees of freedom is designed, compact-sized piezoelectricity drives
Moving platform is significant for promoting the application and research of piezoelectric drive platform.
The content of the invention
The purpose of this utility model is to provide a kind of string based on Piezoelectric Driving and the driving of mixed connection formula three-freedom degree precision
Platform, solves above mentioned problem existing for prior art.The utility model is employed in structure as upper and lower two layers of series relationship
Driver element, wherein lower floor's driver element realize the precision linear displacement of Z-direction, and upper strata driver element is by being simultaneously in structure
The bridge type flexible hinge structure for amplifying of connection relation, the precision linear displacement of X-axis, Y direction is realized, it is whole to drive platform be same
The coupled motions in tri- directions of Shi Shixian.
Above-mentioned purpose of the present utility model is achieved through the following technical solutions：
String based on Piezoelectric Driving and mixed connection formula three-freedom degree precision driving platform, including upper strata driver element, lower floor's drive
Moving cell, the upper strata driver element pass through connecting bolt A1, connecting bolt B2, connecting bolt C3, connecting bolt D4 and connection
Nut A7, attaching nut B8, attaching nut C13, attaching nut D14 and lower floor's driver element are fastenedly connected；The upper strata driving
Unit is integrated, including top substrate layer 5, ' S ' shape flexible hinge 15, upper strata bridge-type flexible hinge structure for amplifying A17, on
Layer bridge type flexible hinge structure for amplifying B18, A type piezoelectric stack I 18 and A types piezoelectric stack II 20, the A types piezoelectric stack I 18,
A types piezoelectric stack II 20 is separately mounted to upper strata bridge-type flexible hinge structure for amplifying A17, upper strata bridge-type flexible hinge structure for amplifying
B18 inside, the power source as driving platform；The upper strata bridge-type flexible hinge structure for amplifying A17, upper strata bridge-type flexible hinge
Chain structure for amplifying B18 is symmetrical along upper strata driver element diagonal, by A types piezoelectric stack I 18 and A types piezoelectric stack II 20
Connected article carrying platform is transferred to after displacement output amplification, produces the displacement of X-axis, Y direction respectively；The article carrying platform
As the displacement output end of whole driving platform, one group of ' S ' shape flexible hinge 15 is connected to respectively in X-axis, Y direction；The S
Article carrying platform is pushed back to initial position by shape flexible hinge 15 after the contraction of the dead electricity of A types piezoelectric stack I, II 18,20.
Described lower floor's driver element is integrated, including upper plate 6, lower floor's bridge type flexible hinge structure for amplifying 9, under
Plate 10, Type B piezoelectric stack 11, arch support 12, the Type B piezoelectric stack 9 are arranged on lower floor's bridge type flexible hinge structure for amplifying 9
Inside, the power source as lower floor's driver element；Lower floor's bridge type flexible hinge structure for amplifying is in decussate texture, works as Type B
When piezoelectric stack 11 extends, lower floor's bridge type flexible hinge structure for amplifying is promoted to produce the displacement of four direction, amplified transmission
To arch support 12；The arch support 12 connects upper plate 6 and lower plate 10, and amplifies from lower floor's bridge type flexible hinge amplification knot
The displacement that structure 9 passes over, the upper plate 6 of lower floor's driver element is promoted to produce Z-direction displacement；The upper plate 6 drives lower floor
Z-direction displacement is transferred to upper strata driver element caused by unit.
The beneficial effects of the utility model are：The accurate displacement in exportable tri- directions of X, Y, Z, and small volume, structure
Simply, positioning precision is high, stable and reliable in work for compact, control, can be applied to precise and ultraprecise machining, MEMS, shows
The fields such as microoperation.The utility model driving platform has the advantages that displacement output is stable, load output is big, can realize small row
High precision displacement in journey.Development of the utility model for fields such as China's precise and ultraprecise machinings is significant,
It must have broad application prospects in various fields such as precise and ultraprecise machining, MEMS, micromanipulations.
Brief description of the drawings
Accompanying drawing described herein is used for providing further understanding to of the present utility model, forms the part of the application,
Illustrative example of the present utility model and its illustrate be used for explain the utility model, do not form to improper limit of the present utility model
It is fixed.
Fig. 1 is overall structure diagram of the present utility model；
Fig. 2 is overlooking the structure diagram of the present utility model.
1st, connecting bolt A；2nd, connecting bolt B；3rd, connecting bolt C；4th, connecting bolt D；5th, top substrate layer；6th, upper plate；7、
Attaching nut A；8th, attaching nut B；9th, lower floor's bridge type flexible hinge enlarger；10th, lower floor's pedestal；11st, Type B piezoelectric stack；
12nd, arch support；13rd, attaching nut C；14th, attaching nut D；15th, ' S ' shape flexible hinge；16th, article carrying platform；17th, upper layer bridge
Formula flexible hinge enlarger A；18th, A types piezoelectric stack I；19th, upper strata bridge-type flexible hinge enlarger B；20th, A types piezo stack
Heap II.
Embodiment
Detailed content and its embodiment of the present utility model are further illustrated below in conjunction with the accompanying drawings.
Referring to shown in Fig. 1 and Fig. 2, simultaneously mixed connection formula three-freedom degree precision drives the string of the present utility model based on Piezoelectric Driving
Platform, including upper strata driver element, lower floor's driver element, the upper strata driver element by connecting bolt A1, connecting bolt B2,
Connecting bolt C3, connecting bolt D4 and attaching nut A7, attaching nut B8, attaching nut C13, attaching nut D14 and lower floor drive
Moving cell is fastenedly connected；The upper strata driver element is integrated, including top substrate layer 5, ' S ' shape flexible hinge 15, on
Layer bridge type flexible hinge structure for amplifying A17, upper strata bridge-type flexible hinge structure for amplifying B18, A type piezoelectric stack I 18 and A type piezoelectricity
II 20 are stacked, the A types piezoelectric stack I 18, A types piezoelectric stack II 20 are separately mounted to upper strata bridge-type flexible hinge structure for amplifying
A17, upper strata bridge-type flexible hinge structure for amplifying B18 inside, the power source as driving platform；The upper strata bridge-type flexible hinge
Chain structure for amplifying A17, upper strata bridge-type flexible hinge structure for amplifying B18 are symmetrical along upper strata driver element diagonal, by A type pressures
Electricity is transferred to connected article carrying platform after stacking the displacement output amplification of I 18 and A types piezoelectric stack II 20, produces X respectively
The displacement of axle, Y direction；Displacement output end of the article carrying platform as whole driving platform, connects respectively in X-axis, Y direction
One group of ' S ' shape flexible hinge 15 is connect；The S-shaped flexible hinge 15 will carry after the contraction of the dead electricity of A types piezoelectric stack I, II 18,20
Thing platform pushes back to initial position.
Described lower floor's driver element is integrated, including upper plate 6, lower floor's bridge type flexible hinge structure for amplifying 9, under
Plate 10, Type B piezoelectric stack 11, arch support 12, the Type B piezoelectric stack 11 are arranged on lower floor's bridge type flexible hinge structure for amplifying
Inside 9, the power source as lower floor's driver element；Lower floor's bridge type flexible hinge structure for amplifying is in decussate texture, works as Type B
When piezoelectric stack 9 extends, lower floor's bridge type flexible hinge structure for amplifying is promoted to produce the displacement of four direction, it is amplified to be transferred to
In arch support 12；The arch support 12 connects upper plate 6 and lower plate 10, and amplifies from lower floor's bridge type flexible hinge structure for amplifying
9 displacements passed over, the upper plate 6 of lower floor's driver element is promoted to produce Z-direction displacement；The upper plate 6 drives lower floor single
Z-direction displacement is transferred to upper strata driver element caused by member.
Referring to shown in Fig. 1 and Fig. 2, specific work process of the present utility model is as follows：
Article carrying platform X-axis, the realization of Y direction displacement：When applying voltage to A types piezoelectric stack I 18, A type piezo stacks
The piezoelectric stack of heap I 18 extends, and output displacement is moving article carrying platform 16 through upper strata bridge-type flexible hinge structure for amplifying A17 amplification pushers
Moved along Y direction；When the dead electricity of A types piezoelectric stack I 18 returns back to initial length, article carrying platform 16 is in ' S ' being attached thereto
Initial position is returned back under the elastic reaction of shape flexible hinge.When applying voltage to A types piezoelectric stack II 20, upper strata driving is single
The article carrying platform of member will move in the X-axis direction, and its motion process is consistent with along Y direction motion process.
The realization of article carrying platform Z-direction displacement：When applying voltage to Type B piezoelectric stack 11, based on inverse piezoelectric effect,
Type B piezoelectric stack 11 extends, and promotes lower floor's bridge type flexible hinge structure for amplifying 9 to be deformed upon along Z-direction first, lower floor's bridge-type
Flexible hinge structure for amplifying 9 is transferred to the arch support 12 being attached thereto after deformation is amplified, the arch support 12 is by deformation
Upper plate 6 is promoted to produce the displacement along Z-direction after amplifying again, while upper plate 6 promotes the upper strata being fastenedly connected therewith to drive list
Member, article carrying platform 16 is driven to produce Z-direction displacement.
Preferred embodiment of the present utility model is the foregoing is only, is not limited to the utility model, for ability
For the technical staff in domain, the utility model can have various modifications and variations.All any modifications made to the utility model,
Equivalent substitution, improvement etc., should be included within the scope of protection of the utility model.
Claims (2)
1. a kind of string based on Piezoelectric Driving and mixed connection formula three-freedom degree precision driving platform, it is characterised in that：Driven including upper strata
Moving cell, lower floor's driver element, the upper strata driver element pass through connecting bolt A（1）, connecting bolt B（2）, connecting bolt C
（3）, connecting bolt D（4）With attaching nut A（7）, attaching nut B（8）, attaching nut C（13）, attaching nut D（14）With lower floor
Driver element is fastenedly connected；The upper strata driver element includes top substrate layer（5）, ' S ' shape flexible hinge（15）, upper strata bridge-type it is soft
Property hinge structure for amplifying A（17）, upper strata bridge-type flexible hinge structure for amplifying B（19）, A types piezoelectric stack I（18）With A type piezo stacks
Heap II（20）, the upper strata bridge-type flexible hinge structure for amplifying A（17）, upper strata bridge-type flexible hinge structure for amplifying B（19）Along upper
Layer driver element diagonal is symmetrical, the A types piezoelectric stack I（18）With A types piezoelectric stack II（20）It is separately mounted to
Layer bridge type flexible hinge structure for amplifying A（17）, upper strata bridge-type flexible hinge structure for amplifying B（19）Inside, as driving platform
Power source；The upper strata bridge-type flexible hinge structure for amplifying A（17）, upper strata bridge-type flexible hinge structure for amplifying B（19）By A types
Piezoelectric stack I（18）With A types piezoelectric stack II（20）Displacement output amplification after pass to connected article carrying platform（16）,
The displacement of X-axis, Y direction is produced respectively；The article carrying platform（16）As the displacement output end of whole driving platform, X-axis,
Y direction connects one group of ' S ' shape flexible hinge respectively（15）；' S ' the shape flexible hinge（15）In A types piezoelectric stack I（18）
With A types piezoelectric stack II（20）Article carrying platform is pushed back into initial position after dead electricity contraction.
2. the string according to claim 1 based on Piezoelectric Driving and mixed connection formula three-freedom degree precision driving platform, its feature
It is：Described lower floor's driver element includes upper plate（6）, lower floor's bridge type flexible hinge structure for amplifying（9）, lower plate（10）, Type B pressure
Electricity stacks（11）, arch support（12）, the Type B piezoelectric stack（11）Installed in lower floor's bridge type flexible hinge structure for amplifying（9）
Inside, the power source as lower floor's driver element；Lower floor's bridge type flexible hinge structure for amplifying is in decussate texture, works as Type B
Piezoelectric stack（11）During elongation, lower floor's bridge type flexible hinge structure for amplifying is promoted to produce the displacement of four direction, amplified biography
It is handed to arch support（12）On；The arch support（12）Connect upper plate（6）And lower plate（10）, and amplify from lower floor's bridge type flexible
Hinge structure for amplifying（9）The displacement passed over, promote the upper plate of lower floor's driver element（6）Produce Z-direction displacement；On described
Plate（6）Z-direction displacement caused by lower floor's driver element is transferred to upper strata driver element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720587267.4U CN207039486U (en) | 2017-05-25 | 2017-05-25 | String based on Piezoelectric Driving and mixed connection formula three-freedom degree precision driving platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720587267.4U CN207039486U (en) | 2017-05-25 | 2017-05-25 | String based on Piezoelectric Driving and mixed connection formula three-freedom degree precision driving platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207039486U true CN207039486U (en) | 2018-02-23 |
Family
ID=61469649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720587267.4U Active CN207039486U (en) | 2017-05-25 | 2017-05-25 | String based on Piezoelectric Driving and mixed connection formula three-freedom degree precision driving platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207039486U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113193780A (en) * | 2021-05-31 | 2021-07-30 | 吉林大学 | Microminiature two-degree-of-freedom ultrasonic motor and driving method thereof |
-
2017
- 2017-05-25 CN CN201720587267.4U patent/CN207039486U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113193780A (en) * | 2021-05-31 | 2021-07-30 | 吉林大学 | Microminiature two-degree-of-freedom ultrasonic motor and driving method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107181424A (en) | String based on Piezoelectric Driving and mixed connection formula three-freedom degree precision driving platform | |
| CN109176420B (en) | Middle-mounted movable joint type flexible decoupling precision positioning structure | |
| CN201168876Y (en) | Three-freedom degree precision positioning worktable | |
| CN105931675B (en) | A kind of parallel xyz Three Degree Of Freedoms mini positioning platform | |
| CN105945935A (en) | Multi-unit linear driving three-range-of-motion loading robot | |
| CN207039486U (en) | String based on Piezoelectric Driving and mixed connection formula three-freedom degree precision driving platform | |
| CN207677649U (en) | The piezo-electric type precision linear driving device of exportable forward and reverse bidirectional-movement | |
| CN105643592B (en) | A kind of symmetrical decoupling single-freedom and flexible operating mechanism | |
| CN206894533U (en) | Piezo-electric type multiple degrees of freedom hybrid-driven driver | |
| CN108023500B (en) | Piezoelectric precise linear driving device capable of outputting forward and reverse bidirectional motion | |
| CN204316374U (en) | A kind of clamp formula piezoelectric motor | |
| CN109654333A (en) | A kind of space multistory formula three-dimensional large-stroke nanometer operating platform | |
| CN104377987B (en) | Clamping type piezoelectric motor | |
| CN101439476A (en) | Clamping mechanism for chucking appliance system | |
| CN104124891A (en) | Piezoelectric vibrator and precise displacement platform comprising same | |
| CN206340345U (en) | A kind of two-dimentional micro- accurate operation platform based on compliant mechanism | |
| CN102195516A (en) | S-shaped multi-pin clamped piezoelectric motor and operating mode thereof | |
| CN206004553U (en) | Linear piezoelectric toggle mechanism and linear piezoelectric executor | |
| CN100387508C (en) | Stepping omnibearing nano moving platform | |
| CN107040161A (en) | Piezo-electric type multiple degrees of freedom hybrid-driven driver | |
| CN209731109U (en) | Piezoelectric ceramics displacement driver | |
| CN106120900B (en) | A kind of multiple-unit connecting rod driving two mobility heavy-duty loader device people of plane | |
| CN109889088B (en) | Linear driving device based on full-piezoelectric ceramic driving | |
| CN204946549U (en) | One kind planar monolithic Grazing condition nano-positioning stage in parallel | |
| CN207743900U (en) | A kind of novel friction type linear piezoelectric actuator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |