CN109889088B - Linear driving device based on full-piezoelectric ceramic driving - Google Patents
Linear driving device based on full-piezoelectric ceramic driving Download PDFInfo
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- CN109889088B CN109889088B CN201910213788.7A CN201910213788A CN109889088B CN 109889088 B CN109889088 B CN 109889088B CN 201910213788 A CN201910213788 A CN 201910213788A CN 109889088 B CN109889088 B CN 109889088B
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Abstract
A linear driving device based on full piezoelectric ceramic driving relates to a linear driving device. The invention solves the problems of small driving motion stroke range and low positioning precision of the traditional piezoelectric ceramic. The amplifier comprises a first-stage amplifier, macro-motion piezoelectric ceramics, a second-stage amplifier, a base, four flexible guides, four cantilevers, a guide support frame and a micro-motion piezoelectric ceramics, wherein the first-stage amplifier is vertically arranged, the macro-motion piezoelectric ceramics are vertically arranged in the first-stage amplifier, the second-stage amplifier is horizontally arranged in the middle of the first-stage amplifier in a penetrating mode and fixedly connected with the first-stage amplifier through two linking blocks, each flexible guide is fixedly arranged on the base through one crossbeam, the flexible guides are arranged above and below each linking block, the fixed ends of the flexible guides and the crossbeams are fixedly arranged into a whole, the four flexible guides are arranged in a pairwise opposite and parallel mode, the guide support frame is provided with the four cantilevers, each cantilever of. The invention is used for full piezoelectric ceramic large-stroke linear driving.
Description
Technical Field
The invention relates to a linear driving device, in particular to a linear driving device based on full-piezoelectric ceramic driving.
Background
The piezoelectric ceramic is widely applied to the field of precision engineering by virtue of the characteristics of high rigidity, high resolution and high frequency response. However, due to the limitations of the working principle and the process level of the piezoelectric ceramics, the output displacement is only 0.1% -0.2% of the total length of the ceramic material, so the maximum motion stroke of the conventionally used piezoelectric ceramic stack is only 200um generally. This severely limited the use of ceramics in large stroke applications. Although the voice coil motor based on the electromagnetic principle and the ultrasonic motor based on the friction principle can realize the millimeter-scale stroke range and the micron-scale positioning precision, and become one of the choices of precise engineering drive, the linear motor has a complex structure, and the resolution and the dynamic performance are not comparable to those of piezoelectric ceramics.
In conclusion, the conventional piezoelectric ceramic has small driving motion stroke range and low positioning precision.
Disclosure of Invention
The invention provides a linear driving device based on full piezoelectric ceramic drive, aiming at solving the problems of small driving motion stroke range and low positioning precision of the existing piezoelectric ceramic.
The technical scheme adopted by the invention for solving the technical problems is as follows:
the linear driving device based on full piezoelectric ceramic drive comprises a base 1, a secondary bridge amplifier 2, a grating displacement sensor 5, a guide support frame 6 and four flexible guiders 3, and further comprises micro piezoelectric ceramic 4, wherein the secondary bridge amplifier comprises a first-stage amplifier 2-1, a second-stage amplifier 2-2, macro piezoelectric ceramic 2-3 and two link blocks 2-4, the first-stage amplifier 2-1 and the second-stage amplifier 2-2 are both of quadrilateral frame structures, the first-stage amplifier 2-1 is vertically arranged, the macro piezoelectric ceramic 2-3 is vertically arranged in the first-stage amplifier 2-1, the upper end and the lower end of the first-stage amplifier 2-1 are displacement input ends of the first-stage amplifier, the middle parts of two sides of the first-stage amplifier 2-1 are displacement output ends of the first-stage amplifier, the two ends of a second-stage amplifier 2-2 are second-stage amplifier displacement input ends, the middle parts of the two sides of the second-stage amplifier 2-2 are second-stage amplifier displacement output ends, the middle parts of the two sides of a first-stage amplifier 2-1 are symmetrically provided with two linking blocks 2-4, the second-stage amplifier 2-2 is horizontally arranged in the middle part of the first-stage amplifier 2-1 in a penetrating way and is fixedly connected with the first-stage amplifier 2-1 through the two linking blocks 2-4, the side wall of the second-stage bridge amplifier is fixedly arranged on a base 1, each flexible guider 3 is fixedly arranged on the base 1 through a cross beam, a flexible guider 3 is arranged above and below each linking block 2-4, the fixed end of each flexible guider 3 and the cross beam are fixedly arranged into a whole, four flexible guiders 3 are arranged in a pairwise opposite and parallel way, each cantilever of the guide support frame 6 is fixedly connected with the output end of a corresponding flexible guide 3, a micro-motion piezoelectric ceramic 4 is arranged between the middle part of the front side of the second-stage amplifier 2-2 and the guide support frame 6, and the grating displacement sensor 5 is arranged on the upper part of the base 1.
In one embodiment, the first stage amplifier 2-1 and the second stage amplifier 2-2 are both bridge amplifiers in a rectangular configuration.
In one embodiment, the resolution of the output displacement of the two-stage bridge amplifier is less than the stroke of the micro-motion piezoelectric ceramic 4.
In one embodiment, the flexible guide 3 is a spring-leaf structure formed by connecting a plurality of layers of quadrilateral structures.
In one embodiment, the flexible guide 3 has a fixed end at both sides of one end of the flexible guide 3 and an output end at the middle of one end of the flexible guide 3.
In one embodiment, the grating displacement sensor 5 is mounted on the output end of the flexible guide 3 located at the upper left.
Compared with the prior art, the invention has the following beneficial effects:
according to the linear driving device based on full piezoelectric ceramic driving, output displacement of macro piezoelectric ceramic is output by the output end of the second-stage amplification mechanism after passing through the first-stage amplification mechanism and the second-stage amplification mechanism, so that hundreds of times of displacement amplification is realized, and the displacement output by the second-stage amplification mechanism can reach millimeter level;
the linear driving device based on full piezoelectric ceramic driving is provided with micro piezoelectric ceramic at the output end of a secondary bridge amplifier, and the stroke of the micro piezoelectric ceramic is larger than the resolution of the output displacement of the secondary bridge amplifier, so that the resolution of the linear driving device based on full piezoelectric ceramic driving is equal to that of a micro ceramic piece;
the linear driving device based on full piezoelectric ceramic driving utilizes the amplification mechanism to realize the piezoelectric ceramic stroke amplification, and simultaneously introduces the micro-motion piezoelectric ceramic to ensure the high resolution of the linear driving device;
the invention is provided with the flexible guider, the fixed end of the guider is fixed on the base, and the output end of the guider is connected with the output end of the secondary bridge type mechanism through the guide support frame, so that the natural frequency of the linear driving device is improved, and the capability of the linear driving device for resisting loads in the non-moving direction is increased.
Drawings
FIG. 1 is a perspective view of the overall structure of a linear driving device based on full piezoelectric ceramic driving according to the present invention;
fig. 2 is a perspective exploded view of the overall structure of the linear driving device based on the full-piezoelectric ceramic drive of the invention.
Detailed Description
The first embodiment is as follows: as shown in fig. 1-2, the linear driving device based on full piezoelectric ceramic driving of the present embodiment includes a base 1, a secondary bridge amplifier 2, a grating displacement sensor 5, a guiding support frame 6, and four flexible guides 3, and further includes a micro-motion piezoelectric ceramic 4, the secondary bridge amplifier includes a first-stage amplifier 2-1, a second-stage amplifier 2-2, a macro-motion piezoelectric ceramic 2-3, and two link blocks 2-4, the first-stage amplifier 2-1 and the second-stage amplifier 2-2 are both of a quadrilateral frame structure, the first-stage amplifier 2-1 is vertically disposed, the macro-motion piezoelectric ceramic 2-3 is vertically disposed in the first-stage amplifier 2-1, the upper end and the lower end of the first-stage amplifier 2-1 are displacement input ends of the first-stage amplifier, the middle parts of two sides of a first-stage amplifier 2-1 are first-stage amplifier displacement output ends, two ends of a second-stage amplifier 2-2 are second-stage amplifier displacement input ends, the middle parts of two sides of the second-stage amplifier 2-2 are second-stage amplifier displacement output ends, two linking blocks 2-4 are symmetrically arranged in the middle parts of two sides of the first-stage amplifier 2-1, the second-stage amplifier 2-2 is horizontally arranged in the middle part of the first-stage amplifier 2-1 in a penetrating manner and is fixedly connected with the first-stage amplifier 2-1 through the two linking blocks 2-4, the side wall of the second-stage bridge amplifier is fixedly arranged on a base 1, each flexible guide 3 is fixedly arranged on the base 1 through a cross beam, one flexible guide 3 is respectively arranged above and below each linking block 2-4, and the fixed end of each flexible guide 3 is fixedly, the four flexible guides 3 are arranged in parallel in a pairwise opposite mode, four cantilevers are arranged on the guide support frame 6, each cantilever of the guide support frame 6 is fixedly connected with the output end of the corresponding flexible guide 3, a micro-motion piezoelectric ceramic 4 is arranged between the middle of the front side of the second-stage amplifier 2-2 and the guide support frame 6, and the grating displacement sensor 5 is arranged on the upper portion of the base 1.
The linear driving device based on the full-piezoelectric ceramic driving is a driving device with millimeter-scale stroke and nanometer-scale precision; the linear driving device based on full piezoelectric ceramic driving utilizes the amplification mechanism to realize the piezoelectric ceramic stroke amplification, and simultaneously introduces the micro-motion piezoelectric ceramic to ensure the high resolution of the linear driving device.
In order to increase the natural frequency of the system and increase the ability of the driver to resist non-moving direction loads, the invention arranges a flexible guider 3 in the system; the basic principle of the flexible guider 3 is that a flexible parallelogram structure is formed by elastic reeds, the guiding is realized by utilizing the translation effect of the parallelogram mechanism under a small stroke, and a multilayer quadrilateral form is adopted for reducing the rigidity of the flexible guider 3 in the moving direction. The fixed end of the flexible guider 3 is fixed on the base, and the output end of the flexible guider 3 is connected with the output end of the secondary bridge amplifier through a guide support frame 6.
The second embodiment is as follows: as shown in fig. 1 and 2, the first-stage amplifier 2-1 and the second-stage amplifier 2-2 of the present embodiment are each a bridge amplifier having a rectangular structure. According to the design, the output displacement of the macro-motion piezoelectric ceramic is output by the output end of the second-stage amplification mechanism after passing through the first-stage amplification mechanism and the second-stage amplification mechanism, the hundred-time amplification of the displacement is realized, and the displacement output by the second-stage amplification mechanism can reach the millimeter level. Other components and connections are the same as those in the first embodiment.
The third concrete implementation mode: as shown in fig. 1 and 2, the resolution of the output displacement of the second-stage bridge amplifier of the present embodiment is smaller than the stroke of the micro-motion piezoelectric ceramic 4. By the design, the resolution of the whole linear driving device can be equal to that of the micro-motion ceramic plate. Other components and connection relationships are the same as those in the first or second embodiment.
The fourth concrete implementation mode: as shown in fig. 1 and 2, the flexible guide 3 according to the present embodiment is an elastic spring structure formed by connecting a plurality of layers of quadrangular structures. By the design, the natural frequency of the system can be improved, the capacity of resisting loads in the non-movement direction of the linear driving device is increased, and the rigidity of the flexible guide device 3 in the movement direction can be reduced by the multilayer quadrilateral structure. Other components and connection relationships are the same as those in the third embodiment.
The fifth concrete implementation mode: as shown in fig. 1 and 2, both sides of one end of the flexible guide 3 of the present embodiment are fixed ends of the flexible guide 3, and the middle of one end of the flexible guide 3 is an output end of the flexible guide 3. By the design, the natural frequency of the system can be improved, the capacity of the linear driving device for resisting loads in the non-moving direction is increased, and meanwhile, the flexible guider 3 is conveniently connected with the four cantilevers of the guide supporting frame 6. Other components and connection relationships are the same as those in the fourth embodiment.
The sixth specific implementation mode: as shown in fig. 1, the grating displacement sensor 5 of the present embodiment is mounted on the output end of the flexible guide 3 located at the upper left. The design has compact structure, can realize the closed-loop control of the linear driving device and realize the real-time feedback of the output displacement of the linear driving device. Other components and connection relationships are the same as those in the first, second, fourth or fifth embodiment.
The seventh embodiment: as shown in fig. 1 and 2, the guide support frame 6 of the present embodiment includes a support frame main body 6-1 and four suspension arms 6-2, the support frame main body 6-1 is i-shaped, and two suspension arms 6-2 are connected to two ends of each i-shaped cross beam of the support frame main body 6-1 in an arc transition manner. By the design, the natural frequency of the system can be improved, the capacity of the linear driving device for resisting loads in the non-moving direction is increased, and meanwhile, the flexible guider 3 is conveniently connected with the four cantilevers of the guide supporting frame 6. Other components and connection relations are the same as those of the sixth embodiment.
The above is only a preferred embodiment of the present invention, and it should be noted that: it will be apparent to those skilled in the art that various modifications and equivalents can be made without departing from the spirit of the invention, and it is intended that all such modifications and equivalents fall within the scope of the invention as defined in the claims.
Claims (7)
1. The utility model provides a linear drive device based on full piezoceramics drive, linear drive device based on full piezoceramics drive includes base (1), second grade bridge amplifier (2), grating displacement sensor (5), direction support frame (6) and four flexible director (3), its characterized in that: the linear driving device based on full piezoelectric ceramic driving further comprises micro-motion piezoelectric ceramic (4), the secondary bridge amplifier comprises a first-stage amplifier (2-1), a second-stage amplifier (2-2), macro-motion piezoelectric ceramic (2-3) and two link blocks (2-4), the first-stage amplifier (2-1) and the second-stage amplifier (2-2) are of quadrilateral frame structures, the first-stage amplifier (2-1) is vertically arranged, the macro-motion piezoelectric ceramic (2-3) is vertically arranged in the first-stage amplifier (2-1), the upper end and the lower end of the first-stage amplifier (2-1) are displacement input ends of the first-stage amplifier, the middle parts of two sides of the first-stage amplifier (2-1) are displacement output ends of the first-stage amplifier, and the two ends of the second-stage amplifier (2-2) are displacement input ends of the second-stage amplifier, the middle parts of two sides of a second-stage amplifier (2-2) are displacement output ends of the second-stage amplifier, the middle parts of two sides of a first-stage amplifier (2-1) are symmetrically provided with two linking blocks (2-4), the second-stage amplifier (2-2) is horizontally arranged in the middle of the first-stage amplifier (2-1) in a penetrating way and fixedly connected with the first-stage amplifier (2-1) through the two linking blocks (2-4), the side wall of the second-stage bridge amplifier is fixedly arranged on a base (1), each flexible guider (3) is fixedly arranged on the base (1) through a cross beam, the upper part and the lower part of each linking block (2-4) are respectively provided with one flexible guider (3), the fixed end of each flexible guider (3) is fixedly integrated with the cross beam, the four flexible guiders (3) are arranged in a pairwise opposite and parallel manner, four cantilevers (6-2) are arranged on a, each cantilever (6-2) of the guide support frame (6) is fixedly connected with the output end of a corresponding flexible guider (3), a micro-motion piezoelectric ceramic (4) is arranged between the middle part of the front side of the second-stage amplifier (2-2) and the guide support frame (6), and the grating displacement sensor (5) is arranged on the upper part of the base (1).
2. The linear drive device based on the full-piezoelectric ceramic drive according to claim 1, wherein: the first-stage amplifier (2-1) and the second-stage amplifier (2-2) are both bridge amplifiers with rectangular structures.
3. The linear driving device based on the full-piezoelectric ceramic drive according to claim 1 or 2, wherein: the resolution of the output displacement of the secondary bridge amplifier is smaller than the stroke of the micro-motion piezoelectric ceramic (4).
4. The linear drive device based on the full-piezoelectric ceramic drive according to claim 3, wherein: the flexible guide (3) is an elastic reed structure formed by connecting a plurality of layers of quadrilateral structures.
5. The linear drive device based on the full-piezoelectric ceramic drive according to claim 4, wherein: the two sides of one end of the flexible guider (3) are fixed ends of the flexible guider (3), and the middle of one end of the flexible guider (3) is an output end of the flexible guider (3).
6. The linear drive device based on full piezoelectric ceramic drive according to claim 1, 2, 4 or 5, wherein: the grating displacement sensor (5) is arranged on the output end of the flexible guider (3) positioned on the upper left.
7. The linear drive device based on the full-piezoelectric ceramic drive according to claim 6, wherein: the guide support frame (6) comprises a support frame main body (6-1) and four cantilevers (6-2), the support frame main body (6-1) is I-shaped, and two cantilevers (6-2) are connected to the two ends of each I-shaped cross beam of the support frame main body (6-1) in a circular arc transition mode.
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| CN109889088B true CN109889088B (en) | 2020-06-09 |
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| US20150277103A1 (en) * | 2014-04-01 | 2015-10-01 | Luzhong Yin | Microelectromechanical displacement structure and method for controlling displacement |
| CN106788271A (en) * | 2016-11-22 | 2017-05-31 | 哈尔滨工业大学 | Two grades of bridge amplifiers of hybrid hinge formula that a kind of rigidity is strengthened |
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