CN110912445B - Giant magnetostrictive precise micro-displacement actuator with four-stage amplification function - Google Patents
Giant magnetostrictive precise micro-displacement actuator with four-stage amplification function Download PDFInfo
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- H—ELECTRICITY
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- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
Abstract
The invention belongs to the field of giant magnetostrictive actuators, and particularly relates to a giant magnetostrictive precise micro-displacement actuator with a four-stage amplification function. The upper side and the lower side of the mixing amplification mechanism are respectively provided with a cover plate, the left side and the right side of the mixing amplification mechanism are provided with input ends of wedge-shaped amplifiers, and the input ends of the wedge-shaped amplifiers are in contact with the output ends of the wedge-shaped amplifiers on the cover plates to form the wedge-shaped amplifiers; the diamond amplifying mechanism arranged in the middle of the mixing amplifying mechanism is connected with the micro-lever input bent arm; the micro-lever amplifying mechanism consists of a micro-lever input bent arm, a pivot structure and a micro-lever output arm. The front and back symmetrical micro-lever output arms and the input end of the wedge-shaped amplifier form a half-bridge mechanism; the giant magnetostrictive rod with the coil is arranged on the central axis of the rhombic amplification mechanism through a bolt with a hole. The actuator has the advantages of large output displacement, compact structure, small integral size, stable output and safe use.
Description
The technical field is as follows:
the invention belongs to the field of giant magnetostrictive actuators, and particularly relates to a giant magnetostrictive precise micro-displacement actuator with a four-stage amplification function.
Background art:
the giant magnetostrictive material is a metal compound with extremely strong magnetostrictive effect at room temperature, is used as a high-efficiency magnetic energy-mechanical energy conversion material, and has the advantages of large strain, high-efficiency power density, high precision, high response speed, high reliability and the like compared with other materials such as common magnetostrictive materials (such as cobalt and nickel) and piezoelectric materials (such as PZT).
When a ferromagnetic material is magnetized in a magnetic field, a slight amount of elongation or contraction occurs along the magnetization direction, which is called a magnetostriction phenomenon, also called a joule effect. The magnetostrictive effect is one of important physical effects of the giant magnetostrictive material, and according to the effect, micron-scale precise displacement control can be realized by using the deformation of the giant magnetostrictive material. Therefore, a giant magnetostrictive material is used to fabricate a driving device, i.e., a giant magnetostrictive actuator. The giant magnetostrictive actuator made of giant magnetostrictive material has the advantages of simple structure, easy driving, high precision, small drift, wide working frequency range and the like. Although the giant magnetostrictive material has a larger giant magnetostrictive coefficient and a response speed in microsecond level, the giant magnetostrictive actuator has a much higher advantage in the field of micro-driving than the traditional driver, but the output displacement of the giant magnetostrictive actuator is limited, so that the giant magnetostrictive actuator is limited in application in many driving fields requiring large stroke. Therefore, the improvement of the output displacement of the giant magnetostrictive actuator is of great significance for widening the application field thereof.
In recent years, researchers working on giant magnetostrictive materials and applications have made some studies on a method of increasing the output displacement of a giant magnetostrictive actuator. For example, in the design and control of a large-stroke precision positioning giant magnetostrictive actuator disclosed in volume 48, pages 1, 25 to 31 of the mechanical engineering journal of 2012, a large-stroke precision giant magnetostrictive combined actuator was developed by combining a giant magnetostrictive actuator and a flexible hinge amplifying mechanism by a shantang, xupenyou, and the like; in 2012, 31 st volume 07 th 1050-. However, there are only few reports of increasing the output stroke of the giant magnetostrictive actuator by combining a plurality of amplifying mechanisms.
The single-stage amplification mechanism has limited displacement amplification capacity, and in order to increase the output stroke on the existing basis, a combined amplification mechanism which can increase the output displacement and ensure simple and compact whole structure is urgently needed.
The invention content is as follows:
the purpose of the invention is as follows:
the invention provides a giant magnetostrictive precise micro-displacement actuator which can increase output displacement and has a four-stage amplification function by utilizing the magnetostrictive effect characteristic of a giant magnetostrictive material and combining four amplification mechanisms.
The technical scheme is as follows:
the giant magnetostrictive precise micro-displacement actuator with the four-stage amplification function is characterized in that cover plates are respectively arranged above and below a mixed amplification mechanism, the input ends of wedge-shaped amplifiers are arranged on the left side and the right side of the mixed amplification mechanism, and the input ends of the wedge-shaped amplifiers are in contact with the output ends of the wedge-shaped amplifiers on the cover plates to form the wedge-shaped amplifiers; the diamond amplifying mechanism arranged in the middle of the mixing amplifying mechanism is connected with the micro-lever input bent arm; the micro-lever amplifying mechanism consists of a micro-lever input bent arm, a pivot structure and a micro-lever output arm; the front and back symmetrical micro-lever output arms and the input end of the wedge-shaped amplifier form a half-bridge mechanism; the giant magnetostrictive rod with the coil is arranged on the central axis of the rhombic amplification mechanism through a bolt with a hole.
Furthermore, two ends of a diamond amplifying mechanism arranged in the middle of the mixed amplifying mechanism with the symmetrical structure are connected with front and back symmetrical micro-lever input bent arms, and front and back symmetrical micro-lever output arms are connected with the input end of the wedge amplifier to form a half-bridge mechanism.
Furthermore, the front end and the rear end of the diamond amplifying mechanism are respectively provided with a threaded hole e and a deep hole d, and the left side and the right side of the diamond amplifying mechanism are respectively connected with the micro-lever input bent arm through the output end of the diamond amplifying mechanism.
Furthermore, the central axes of a threaded hole e and a deep hole d which are arranged at the front end and the rear end of the rhombic amplification mechanism are superposed, the threaded hole e at the front end is in threaded connection with a bolt with a hole, and the deep hole d at the rear end fixes the giant magnetostrictive rod.
Furthermore, the micro-lever amplifying mechanism consists of a micro-lever input bent arm, a pivot structure and a micro-lever output arm; the four micro-lever amplifying mechanisms are arranged on the left side and the right side of the diamond amplifying mechanism and are symmetrically distributed in pairs; the input bent arms of the two micro-lever amplifying mechanisms which are symmetrical in front and back are connected with the output end of the diamond amplifying mechanism.
Furthermore, the micro-lever output arms which are symmetrical front and back on one side of the diamond amplification mechanism are connected with the input end of the wedge amplifier to form a half-bridge mechanism.
Further, mix mechanism and the apron of amplifying and pass through bolted connection, the apron is equipped with trapezoidal arch towards one side of mixing the mechanism of amplifying, and the other both sides of apron still are equipped with wedge amplifier's output, and wedge amplifier's output corresponds with the input position of mixing the wedge amplifier who amplifies on the mechanism.
Further, a permanent magnet placing groove is formed in the inner side of the cover plate, and the permanent magnet is installed in the permanent magnet placing groove; the permanent magnet is fixed by screwing the inner hexagonal flat end set screw into the front and the back thread mounting holes b of the cover plate.
The advantages and effects are as follows:
the invention utilizes the magnetostriction effect characteristic of the giant magnetostriction material, and combines four mechanisms with displacement amplification function to form an amplification mechanism with four-stage amplification function, so that the output displacement of the whole giant magnetostriction precise micro-displacement actuator is increased.
The actuator has the advantages of large output displacement, compact structure, small overall size, stable output and safe use.
The invention creatively combines and applies four amplifying structures, obviously increases output displacement, has compact design structure and small size, and can meet the requirements of the micro-displacement actuator with amplifying stroke at present.
Description of the drawings:
FIG. 1 is a schematic view of an actuator;
FIG. 2 is an isometric front view of the actuator;
FIG. 3 is an isometric view of an actuator;
FIG. 4 is an isometric top view of an actuator;
FIG. 5 is a sectional view A-A of FIG. 4;
FIG. 6 is a schematic view of the inside of the cover plate;
FIG. 7 is a schematic view of magnet installation
FIG. 8 is a schematic diagram of a mixing and amplifying mechanism;
FIG. 9 is a top view and partial cross-sectional view of the mixing magnification mechanism;
FIG. 10 is a schematic view of the installation of a super magnetostrictive rod;
FIG. 11 is a schematic view of a bolt with a hole;
FIG. 12 is a cross-sectional view B-B of FIG. 11;
FIG. 13 is a schematic view of the overall mounting of the actuator;
FIG. 14 is a graph of current versus displacement versus magnification at 7 Hz;
FIG. 15 is a graph of current versus displacement versus magnification at 10 Hz;
fig. 16 is a graph of current versus displacement versus magnification at 15 HZ.
Description of reference numerals:
1. the device comprises a cover plate, 2. a mixed amplification mechanism, 3. a bolt with a hole, 4. an output end of a wedge-shaped amplifier, 5. an input end of the wedge-shaped amplifier, 6. a bolt, 7. a permanent magnet placing groove, 8. a half-bridge mechanism, 9. a micro-lever output arm, 10. a pivot structure, 11. a micro-lever input bent arm, 12. a diamond-shaped amplification mechanism, 13. an output end of the diamond-shaped amplification mechanism, 14. a giant magnetostrictive rod
The specific implementation mode is as follows:
the invention is further described below with reference to the accompanying drawings:
currently, most actuators neglect the practicality to optimize the amplification effect. Usually, the amplification mechanism only has a pair of output end and input end, and the stability of structure output is difficult to ensure. Most single-stage amplification mechanisms have limited amplification factors and are limited in practical application of large measuring range. The present invention combines four kinds of amplification mechanisms to increase the output displacement of the entire actuator. Three pairs of output and input ends exist among the amplifying mechanisms, and the output is stable and smooth. The structure is compact as a whole, no redundant design is needed, and the device is suitable for various working environments. The upper cover plate and the lower cover plate are used as a bottom plate and a displacement output top plate, the fixed position of the bottom plate is adjusted, so that the top plate can output displacement in all directions, and compared with a common amplification mechanism, the amplification mechanism has the advantages of being single in output displacement direction, flexible in output and strong in adaptability.
The invention designs a giant magnetostrictive precise micro-displacement actuator with a four-stage amplification function by combining four displacement amplification mechanisms by utilizing the magnetostrictive effect characteristic of a giant magnetostrictive material. For convenience of description, the description is made with reference to the orientation in fig. 2.
As shown in fig. 1, 2, 3, and 9, in the giant magnetostrictive precision micro-displacement actuator with four-stage amplification function, cover plates 1 are respectively arranged above and below a hybrid amplification mechanism 2, input ends 5 of wedge amplifiers are arranged on the left side and the right side of the hybrid amplification mechanism 2, and the input ends 5 of the wedge amplifiers are in contact with output ends 4 of the wedge amplifiers on the cover plates 1 to form the wedge amplifiers; the rhombic amplifying mechanism 12 arranged in the middle of the mixing amplifying mechanism 2 is connected with the micro-lever input bent arm 11; the micro-lever amplifying mechanism consists of a micro-lever input bent arm 11, a pivot structure 10 and a micro-lever output arm 9; the front and back symmetrical micro-lever output arms 9 and the input end 5 of the wedge-shaped amplifier form a half-bridge mechanism 8; the magnetostrictive rod 14 with a coil is mounted on the central axis of the rhombus-shaped magnifying mechanism 12 by the holed bolt 3.
As shown in fig. 1, the upper and lower layers of the actuator are both cover plates 1 with a mixing and amplifying mechanism 2 in the middle. The connection of the cover plate 1 and the mixing and amplifying mechanism 2 is realized through 8 bolts 6. The threaded lower half of the bolt 6 is fixed to the hybrid amplifier 2 through the hole c and the smooth upper half enables the cover 1 to slide up and down. As shown in fig. 4 and 5, when the bolt 6 is selected, a length is reserved in the cover plate mounting hole a, so that the cover plate 1 has a sufficient movement stroke; as shown in fig. 6 and 7, permanent magnet placing grooves 7 are formed in the inner sides of the cover plates 1, and three permanent magnets with the specification of 30 mm by 10 mm by 3 mm are placed in each of the upper cover plate 1 and the lower cover plate 1; as shown in fig. 5, the output end 4 of the wedge-shaped amplifier on the cover plate 1 is in contact with the input end 5 of the wedge-shaped amplifier to form a fourth-stage stroke amplification mechanism, and the stroke amplification factor is 1.7 times; the trapezoidal part on the cover plate 1 is a stroke protection block; as shown in fig. 9, the hybrid amplification mechanism 2 is an integrated stroke amplification mechanism composed of a micro-lever amplification mechanism, a diamond amplification mechanism 12, and a half-bridge amplification mechanism 8. The diamond amplification mechanism 12 is a first-stage stroke amplification mechanism, and the stroke amplification factor is 8.6 times. The micro-lever amplifying mechanism is a second-stage stroke amplifying mechanism, and the stroke amplification factor is 1.4 times. The half-bridge mechanism 8 is a third-stage amplification mechanism, and the stroke amplification factor is 1.5 times. The four-stage amplification factor is a multiplication relation. It can be seen that the elongation of the magnetostrictive rod 14 is amplified by 30.7 times after four-stage amplification; as shown in fig. 10, the diameter of the super magnetostrictive rod 14 is 8 mm, the length of the super magnetostrictive rod is 40 mm, the super magnetostrictive rod 14 wound with 600 turns of coils extends into the threaded hole e, and one end of the super magnetostrictive rod is fixed in the deep hole d with the same diameter as that of the super magnetostrictive rod 14 in the hybrid amplifying mechanism 2. The other end is fixed in a giant magnetostrictive rod mounting hole f with the same diameter as the giant magnetostrictive rod 14 in the perforated bolt 3, and when the perforated bolt 3 is screwed into the mixing and amplifying mechanism 2, the two ends of the giant magnetostrictive rod 14 are fixed by the deep hole d and the giant magnetostrictive rod mounting hole f.
As shown in fig. 8 and 9, two ends of a diamond amplification mechanism 12 arranged in the middle of the hybrid amplification mechanism 2 with a symmetrical structure are connected with a micro-lever input bent arm 11 which is symmetrical front and back, the micro-lever amplification mechanism is composed of the micro-lever input bent arm 11, a pivot structure 10 and a micro-lever output arm 9, and the micro-lever output arm 9 which is symmetrical front and back is connected with an input end 5 of a wedge amplifier to form a half-bridge mechanism 8.
As shown in fig. 9 and 10, the hybrid amplifying mechanism 2 has a symmetrical structure, and includes a diamond amplifying mechanism 12, a micro-lever amplifying mechanism, and a half-bridge mechanism 8 in sequence from inside to outside. The coil wound magnetostrictive rod 14 is placed in the position of the center axis. The position of the super magnetostrictive rod mounting hole f of the bolt with hole 3 and the deep hole d of the mixing and amplifying mechanism 2 keeps high coaxiality with the central shaft.
The front end and the rear end of the rhombic amplification mechanism 12 are respectively provided with a threaded hole e and a deep hole d, and the left side and the right side of the rhombic amplification mechanism are respectively connected with the micro-lever input bent arm 11 through the output end 13 of the rhombic amplification mechanism.
The central axes of the threaded hole e and the deep hole d arranged at the front end and the rear end of the diamond amplification mechanism 12 are superposed, the threaded hole e at the front end is in threaded connection with the perforated bolt 3, and the deep hole d at the rear end fixes the giant magnetostrictive rod 14.
As shown in fig. 11 and 12, the outer side of the bolt with hole 3 is provided with a thread, and the central part is provided with a super magnetostrictive rod mounting hole f matched with the diameter of the super magnetostrictive rod 14, for matching with the deep hole d to fix the two ends of the super magnetostrictive rod 14 at the central shaft of the diamond-shaped amplifying mechanism 12.
The micro-lever amplifying mechanism consists of a micro-lever input bent arm 11, a pivot structure 10 and a micro-lever output arm 9; the four micro-lever amplifying mechanisms are arranged on the left side and the right side of the diamond amplifying mechanism and are symmetrically distributed in pairs; the input bent arms 11 of the two micro-lever amplifying mechanisms which are symmetrical in front and back are connected with the output end 13 of the diamond amplifying mechanism.
The micro-lever output arms 9 which are symmetrical front and back on one side of the diamond amplification mechanism 12 are connected with the input end 5 of the wedge amplifier to form a half-bridge mechanism 8.
As shown in FIGS. 9 and 10, the invention has compact structure, the output arms 9 of the micro levers on the front side and the rear side are connected with the input end 5 of the wedge amplifier arranged in the middle to form a half-bridge mechanism 8, the output arms 9 of the micro levers using the micro lever amplifying mechanism are used as a part of the half-bridge mechanism, and the invention has smart design and simplified structure.
The hybrid amplification mechanism 2 is connected with the cover plate 1 through a bolt 6, and a trapezoidal protrusion is arranged on one side, facing the hybrid amplification mechanism 2, of the cover plate 1, so that the wedge-shaped amplifier is protected from being damaged when the cover plate 1 is subjected to vertical overload force. The other two sides of the cover plate 1 are also provided with output ends 4 of the wedge amplifiers, and the output ends 4 of the wedge amplifiers correspond to the input ends 5 of the wedge amplifiers on the mixed amplification mechanism 2 in position.
The wedge on the hybrid amplifying mechanism 2 is used as the input end 5 of the wedge amplifier, the wedge on the cover plate 1 is used as the output end 4 of the wedge amplifier, and the horizontal movement of the input end 5 of the wedge amplifier is converted into the vertical movement of the output end 4 of the wedge amplifier.
The trapezoidal protrusion on the cover plate 1 prevents the overload impact force from being applied to the upper part of the cover plate 1 during the use process of the actuator, and the cover plate 1 is pressed down to exceed the stroke. Thereby protecting the hybrid amplification mechanism.
A permanent magnet placing groove 7 is formed in the inner side of the cover plate 1, and the permanent magnet is installed in the permanent magnet placing groove 7; the permanent magnet is fixed by screwing the hexagon socket flat end set screw in through the front and the back thread mounting holes b of the cover plate 1.
As shown in fig. 6 and 7, three permanent magnets with the specification of 30 × 10 × 3 mm are respectively mounted on the inner sides of the upper and lower cover plates 1, and are fixed by hexagon socket flat end set screws through threaded mounting holes b on the walls of the cover plates 1.
As shown in fig. 10 and 13, the mounting method of the present invention is: the permanent magnet is placed in the permanent magnet placing groove 7 and fixed through the hexagon socket flat end fastening screw, the giant magnetostrictive rod 14 is inserted into the mixed amplification mechanism 2 through the threaded hole e at the front end of the mixed amplification mechanism 2, one end of the giant magnetostrictive rod 14 is inserted into the deep hole d, the other end of the giant magnetostrictive rod is connected with the giant magnetostrictive rod mounting hole f in the bolt with the hole 3, the fixation of the giant magnetostrictive rod 14 is guaranteed, and the upper cover plate 1 and the lower cover plate 1 are connected with the mixed amplification mechanism 2 in the middle through the eight bolts 6. When the wedge-shaped amplifier is installed, the output end 4 of the wedge-shaped amplifier corresponds to the input end 5 of the wedge-shaped amplifier in the up-down position.
Experimental measurement results:
after the coil was connected to an external power supply, the external power supply supplied a sinusoidal alternating current, and the length change of the magnetostrictive rod and the rising height of the cover plate 1 were measured at frequencies of 7HZ, 10HZ, and 15HZ, respectively, as shown in fig. 14, 15, and 16. The calculation shows that the average magnification is 30.3, the theoretical design magnification is 30.7, and the design result is met.
The working principle of the invention is as follows:
according to the magnetostrictive effect principle of a giant magnetostrictive material, when the magnetization state of the giant magnetostrictive rod 14 changes, the axial size of the giant magnetostrictive rod 14 changes, at the moment, the deformation stroke and force of the giant magnetostrictive rod 14 are amplified through the diamond-shaped amplifying mechanism 12 of the first-stage amplifying mechanism, the deformation stroke and force are transmitted to the input bent arm 11 of the micro-lever mechanism connected with the diamond-shaped amplifying mechanism through the output end 13 of the diamond-shaped amplifying mechanism, and the second-stage micro-lever amplifying mechanism moves through the pivot structure 10. Then, the third-stage half-bridge mechanism 8 connected with the second-stage micro-lever amplification mechanism deflects along with the movement of the micro-lever amplification mechanism, and the half-bridge mechanism 8 continuously amplifies the displacement. The force and displacement amplified by the first three stages drives the input end 4 of the wedge amplifier to move horizontally, and then the input end is converted into the vertical movement of the output end 5 of the wedge amplifier. Finally, the displacement amplified by four stages is output through the cover plate 1.
And (4) conclusion:
the invention has simple and reasonable structure, simple operation and smooth output. By combining different amplification mechanisms, the output displacement of the actuator is increased. The application occasions of the giant magnetostrictive actuator are widened, the giant magnetostrictive actuator is not limited to the small-stroke occasions, and the giant magnetostrictive actuator has great significance for the actual application occasions of the actuator.
Claims (8)
1. The giant magnetostrictive precise micro-displacement actuator with the four-stage amplification function is characterized in that: the upper part and the lower part of the mixed amplification mechanism (2) are respectively provided with a cover plate (1), the left side and the right side of the mixed amplification mechanism (2) are provided with input ends (5) of a wedge-shaped amplifier, and the input ends (5) of the wedge-shaped amplifier are contacted with output ends (4) of the wedge-shaped amplifier on the cover plate (1) to form the wedge-shaped amplifier; a rhombic amplifying mechanism (12) arranged in the middle of the mixing amplifying mechanism (2) is connected with the micro-lever input bent arm (11); the micro-lever amplifying mechanism consists of a micro-lever input bent arm (11), a pivot structure (10) and a micro-lever output arm (9); the front and back symmetrical micro-lever output arms (9) and the input end (5) of the wedge-shaped amplifier form a half-bridge mechanism (8); the giant magnetostrictive rod (14) with the coil is arranged on the central axis of the rhombic amplification mechanism (12) through the bolt (3) with the hole.
2. The giant magnetostrictive precise micro-displacement actuator with the four-stage amplification function according to claim 1, characterized in that: two ends of a rhombic amplification mechanism (12) arranged in the middle of the mixed amplification mechanism (2) with a symmetrical structure are connected with front and back symmetrical micro-lever input bent arms (11), and front and back symmetrical micro-lever output arms (9) are connected with an input end (5) of the wedge-shaped amplifier to form a half-bridge mechanism (8).
3. The giant magnetostrictive precise micro-displacement actuator with four-stage amplification function according to claim 1 or 2, characterized in that: the front end and the rear end of the rhombic amplification mechanism (12) are respectively provided with a threaded hole e and a deep hole d, and the left side and the right side of the rhombic amplification mechanism are respectively connected with the micro-lever input bent arm (11) through the output end (13) of the rhombic amplification mechanism.
4. The giant magnetostrictive precise micro-displacement actuator with the four-stage amplification function according to claim 3, characterized in that: the central axes of a threaded hole e and a deep hole d which are arranged at the front end and the rear end of the rhombic amplification mechanism (12) are superposed, the threaded hole e at the front end is in threaded connection with the perforated bolt (3), and the deep hole d at the rear end fixes the giant magnetostrictive rod (14).
5. The giant magnetostrictive precise micro-displacement actuator with four-stage amplification function according to claim 1 or 2, characterized in that: the micro-lever amplifying mechanism consists of a micro-lever input bent arm (11), a pivot structure (10) and a micro-lever output arm (9); the four micro-lever amplifying mechanisms are arranged on the left side and the right side of the diamond amplifying mechanism (12) and are symmetrically distributed in pairs; the input bent arms (11) of the two micro-lever amplification mechanisms which are symmetrical in front and back are connected with the output end (13) of the diamond amplification mechanism.
6. The giant magnetostrictive precise micro-displacement actuator with four-stage amplification function according to claim 1 or 2, characterized in that: and micro-lever output arms (9) which are symmetrical front and back on one side of the diamond amplification mechanism (12) are connected with an input end (5) of the wedge-shaped amplifier to form a half-bridge mechanism (8).
7. The giant magnetostrictive precise micro-displacement actuator with four-stage amplification function according to claim 1 or 2, characterized in that: mix mechanism (2) and apron (1) of amplifying and pass through bolt (6) and connect, apron (1) is equipped with trapezoidal arch towards one side of mixing mechanism (2) of amplifying, and the other both sides of apron (1) still are equipped with output (4) of wedge amplifier, and output (4) of wedge amplifier correspond with input (5) position of the wedge amplifier on mixing mechanism (2) of amplifying.
8. The giant magnetostrictive precise micro-displacement actuator with the four-stage amplification function according to claim 7, characterized in that: a permanent magnet placing groove (7) is formed in the inner side of the cover plate (1), and the permanent magnet is installed in the permanent magnet placing groove (7); the permanent magnet is fixed by screwing the inner hexagonal flat end set screw into the front and the back thread mounting holes b of the cover plate (1).
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| JP3407080B2 (en) * | 1993-09-02 | 2003-05-19 | 太平洋セメント株式会社 | Precision positioning device |
| JP3525313B2 (en) * | 1995-06-30 | 2004-05-10 | 太平洋セメント株式会社 | Positioning device with lever displacement enlargement mechanism |
| DE102013211289A1 (en) * | 2013-06-17 | 2014-12-18 | Siemens Aktiengesellschaft | Device and method for lifting objects |
| CN106782674B (en) * | 2017-02-07 | 2022-10-25 | 广东工业大学 | Micro-displacement amplifier and nano positioning device |
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