CN109889088A - Linear actuating device based on full Piezoelectric Ceramic - Google Patents
Linear actuating device based on full Piezoelectric Ceramic Download PDFInfo
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- CN109889088A CN109889088A CN201910213788.7A CN201910213788A CN109889088A CN 109889088 A CN109889088 A CN 109889088A CN 201910213788 A CN201910213788 A CN 201910213788A CN 109889088 A CN109889088 A CN 109889088A
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- amplifier
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- flexible guiding
- support frame
- guiding device
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Abstract
Based on the linear actuating device of full Piezoelectric Ceramic, it is related to a kind of linear actuating device.The present invention solves the problems, such as that existing piezoelectric ceramics is small in the presence of driving movement travel range, positioning accuracy is low.First order amplifier is vertically arranged, macro dynamic pressure electroceramics is vertically arranged in first order amplifier, second level amplifier level be installed on the middle part of first order amplifier and by two chained blocks and first order amplifier it is affixed, each flexible guiding device is fixedly mounted on the base by a crossbeam, a flexible guiding device is provided with above and below each chained block, the fixing end of flexible guiding device is fixedly mounted with crossbeam to be integrated, four flexible guiding devices are opposite two-by-two and are arranged in parallel, cantilever there are four being set on guide support frame, each cantilever of guide support frame is fixedly connected with the output end of a corresponding flexible guiding device, fine motion piezoelectric ceramics is provided between guide support frame in the middle part of the front side of second level amplifier.The present invention is for the big stroke linear driving of total pressure electroceramics.
Description
Technical field
The present invention relates to a kind of linear actuating devices, and in particular to a kind of Linear Driving dress based on full Piezoelectric Ceramic
It sets.
Background technique
Piezoelectric ceramics relies on the characteristics of its high rigidity, high-resolution, high frequency sound to be answered extensively in precision engineering field
With.But due to the limitation of piezoelectric ceramics working principle and technological level, output displacement is only ceramic material overall length
0.1%--0.2%, therefore the maximum stroke movement of conventional use of piezoelectric ceramic stack is typically only 200um.This severely limits
Application of the ceramics in big stroke occasion.Although the ultrasound electric machine of voice coil motor and tribology principle based on electromagnetic principle may be implemented
Millimetre-sized stroke range and micron-sized positioning accuracy, become one of the selection of precision engineering driving, but this kind of straight-line electric
Structure is complicated for machine, and resolution ratio and dynamic property can not be mentioned in the same breath with piezoelectric ceramics.
To sum up, existing Piezoelectric Ceramic movement travel range is small, positioning accuracy is low.
Summary of the invention
The present invention is to solve the problems, such as that existing piezoelectric ceramics is small in the presence of driving movement travel range, positioning accuracy is low, into
And provide a kind of linear actuating device based on full Piezoelectric Ceramic.
The technical solution adopted by the present invention to solve the above technical problem is:
Linear actuating device based on full Piezoelectric Ceramic of the invention includes pedestal 1, second level bridge amplifier 2, light
Displacement transducer 5, guide support frame 6 and four flexible guiding devices 3, the Linear Driving dress based on full Piezoelectric Ceramic
Setting further includes fine motion piezoelectric ceramics 4, and second level bridge amplifier includes first order amplifier 2-1, second level amplifier 2-2, macro dynamic
Piezoelectric ceramics 2-3 and two chained block 2-4, first order amplifier 2-1 and second level amplifier 2-2 are four frame structures, the
First stage amplifier 2-1 is vertically arranged, and macro dynamic pressure electroceramics 2-3 is vertically arranged in first order amplifier 2-1, first order amplifier
The upper and lower side of 2-1 is that first order amplifier is displaced input terminal, and two middle side parts of first order amplifier 2-1 are first order amplifier position
Shifter output terminal, the both ends of second level amplifier 2-2 are that second level amplifier is displaced input terminal, the two sides of second level amplifier 2-2
Middle part is that second level amplifier is displaced output end, and two middle side parts of first order amplifier 2-1 are symmetrically arranged with two chained block 2-
4, second level amplifier 2-2 level is installed on the middle part of first order amplifier 2-1 and is put by two chained block 2-4 with the first order
Big device 2-1 is affixed, and second level bridge amplifier side wall is packed on pedestal 1, and each flexible guiding device 3 is packed in by a crossbeam
On pedestal 1, a flexible guiding device 3, the fixing end of flexible guiding device 3 are provided with above and below each chained block 2-4
It being fixedly mounted with and is integrated with crossbeam, four flexible guiding devices 3 are opposite two-by-two and are arranged in parallel, it is set on guide support frame 6 there are four cantilever,
Each cantilever of guide support frame 6 is fixedly connected with the output end of a corresponding flexible guiding device 3, second level amplifier 2-2
Front side in the middle part of and guide support frame 6 between be provided with fine motion piezoelectric ceramics 4, the upper of pedestal 1 is arranged in grating displacement sensor 5
Portion.
In one embodiment, first order amplifier 2-1 and second level amplifier 2-2 is the amplification of rectangular configuration bridge-type
Device.
In one embodiment, the resolution ratio of the output displacement of second level bridge amplifier is less than fine motion piezoelectric ceramics 4
Stroke.
In one embodiment, flexible guiding device 3 is the elastic spring structure being formed by connecting by multilayer quadrilateral structure.
In one embodiment, the two sides of 3 one end of flexible guiding device are the fixing end of flexible guiding device 3, flexible guiding
The middle part of 3 one end of device is the output end of flexible guiding device 3.
In one embodiment, grating displacement sensor 5 is mounted on the output end of upper left flexible guiding device 3
On.
Compared with the prior art, the invention has the following beneficial effects:
The macro dynamic pressure electroceramics output displacement of linear actuating device based on full Piezoelectric Ceramic of the invention passes through the
It is exported after level-one enlarger and second level enlarger by second level enlarger output end, realizes hundred times of magnitudes of displacement
Amplification guarantees that the displacement of second level enlarger output can achieve a millimeter rank；
Linear actuating device based on full Piezoelectric Ceramic of the invention is installed in the output end of second level bridge amplifier
Fine motion piezoelectric ceramics, the stroke of fine motion piezoelectric ceramics is greater than the resolution ratio of second level bridge amplifier output displacement, so that of the invention
The linear actuating device based on full Piezoelectric Ceramic resolution ratio be equal to fine motion potsherd resolution ratio；
Linear actuating device based on full Piezoelectric Ceramic of the invention realizes piezoelectric ceramics stroke using enlarger
While amplification, fine motion piezoelectric ceramics is introduced, guarantees the high-resolution of linear actuating device；
The present invention is provided with flexible guiding device, and guider fixing end is fixed on the base, output end and second level bridge type mechanism
Output end by guide support frame be connected, improve the intrinsic frequency of linear actuating device, while increasing linear actuating device
Resist the ability of non-athletic direction load.
Detailed description of the invention
Fig. 1 is the overall structure stereogram of the linear actuating device of the invention based on full Piezoelectric Ceramic；
Fig. 2 is the overall structure stereogram exploded view of the linear actuating device of the invention based on full Piezoelectric Ceramic.
Specific embodiment
Specific embodiment 1: as shown in Fig. 1~2, the Linear Driving based on full Piezoelectric Ceramic of present embodiment
Device includes pedestal 1, second level bridge amplifier 2, grating displacement sensor 5, guide support frame 6 and four flexible guiding devices 3, institute
Stating the linear actuating device based on full Piezoelectric Ceramic further includes fine motion piezoelectric ceramics 4, and second level bridge amplifier includes first
Grade amplifier 2-1, second level amplifier 2-2, macro dynamic pressure electroceramics 2-3 and two chained block 2-4, first order amplifier 2-1 and
Second level amplifier 2-2 is four frame structures, and first order amplifier 2-1 is vertically arranged, and macro dynamic pressure electroceramics 2-3 is vertically arranged
In first order amplifier 2-1, the upper and lower side of first order amplifier 2-1 is that first order amplifier is displaced input terminal, and the first order is put
Two middle side parts of big device 2-1 are that first order amplifier is displaced output end, and the both ends of second level amplifier 2-2 are second level amplifier
It is displaced input terminal, two middle side parts of second level amplifier 2-2 are that second level amplifier is displaced output end, first order amplifier 2-1
Two middle side parts be symmetrically arranged with two chained block 2-4, second level amplifier 2-2 level is installed on first order amplifier 2-1's
Middle part is simultaneously affixed by two chained block 2-4 and first order amplifier 2-1, and second level bridge amplifier side wall is packed on pedestal 1,
Each flexible guiding device 3 is packed on pedestal 1 by a crossbeam, is provided with one above and below each chained block 2-4
A flexible guiding device 3, the fixing end of flexible guiding device 3 is fixedly mounted with crossbeam to be integrated, and four flexible guiding devices 3 are opposite and flat two-by-two
Row setting is set on guide support frame 6 there are four cantilever, each cantilever of guide support frame 6 and a corresponding flexible guiding device 3
Output end be fixedly connected, be provided with fine motion piezoelectric ceramics between guide support frame 6 in the middle part of the front side of second level amplifier 2-2
4, the top of pedestal 1 is arranged in grating displacement sensor 5.
Linear actuating device based on full Piezoelectric Ceramic of the invention has grade stroke, nano-precision
Driving device；Linear actuating device based on full Piezoelectric Ceramic of the invention realizes piezoelectric ceramics stroke using enlarger
While amplification, fine motion piezoelectric ceramics is introduced, guarantees the high-resolution of linear actuating device.
In order to improve the intrinsic frequency of system, while increasing the ability that driver resists non-athletic direction load, the present invention
It placed flexible guiding device 3 in systems；The basic principle of flexible guiding device 3 is by flexible parallel four side of elastic spring composition
Shape structure realizes guiding using the translation effect of parallelogram mechanism under small stroke, in order to reduce by 3 side of moving of flexible guiding device
To rigidity, using the form of multilayer quadrangle.3 fixing end of flexible guiding device is fixed on the base, 3 output end of flexible guiding device
It is connected with the output end of second level bridge amplifier by guide support frame 6.
Specific embodiment 2: as depicted in figs. 1 and 2, present embodiment first order amplifier 2-1 and second level amplifier
2-2 is rectangular configuration bridge amplifier.It is designed in this way, macro dynamic pressure electroceramics output displacement passes through first order enlarger and the
It is exported after second level enlarger by second level enlarger output end, realizes the amplification of hundred times of magnitudes of displacement, guarantee that second level is put
The displacement of great institutions output can achieve a millimeter rank.Other compositions and connection relationship are same as the specific embodiment one.
Specific embodiment 3: as depicted in figs. 1 and 2, point of the output displacement of present embodiment second level bridge amplifier
Resolution is less than the stroke of fine motion piezoelectric ceramics 4.It is designed in this way, the resolution ratio of entire linear actuating device can be made to be equal to fine motion
The resolution ratio of potsherd.Other compositions and connection relationship are the same as one or two specific embodiments.
Specific embodiment 4: as depicted in figs. 1 and 2, present embodiment flexible guiding device 3 is by multilayer quadrilateral structure
The elastic spring structure being formed by connecting.It is designed in this way, the intrinsic frequency of system can be improved, while increasing linear actuating device and supporting
Resist the ability of non-athletic direction load, multilayer quadrilateral structure can reduce the rigidity of 3 direction of motion of flexible guiding device.Other groups
At and connection relationship be the same as the specific implementation mode 3.
Specific embodiment 5: as depicted in figs. 1 and 2, the two sides of 3 one end of present embodiment flexible guiding device are led for flexibility
To the fixing end of device 3, the middle part of 3 one end of flexible guiding device is the output end of flexible guiding device 3.It is designed in this way, can be improved and be
The intrinsic frequency of system, while increasing the ability that linear actuating device resists non-athletic direction load, while being convenient for flexible guiding device 3
It is connect with four cantilevers of guide support frame 6.Other compositions and connection relationship are identical as specific embodiment four.
Specific embodiment 6: as shown in Figure 1, present embodiment grating displacement sensor 5 be mounted on it is upper left
On the output end of flexible guiding device 3.It is designed in this way, it is compact-sized, the closed-loop control of linear actuating device may be implemented, realize line
The Real-time Feedback of property driving device output displacement.Other compositions and connection relationship and specific embodiment one, two, four or five phases
Together.
Specific embodiment 7: as depicted in figs. 1 and 2, present embodiment guide support frame 6 includes support frame body 6-1
With four cantilever 6-2, support frame body 6-1 in I-shaped, circular arc mistake on the I-shaped crossbeam both ends each of support frame body 6-1
Crossing connection, there are two cantilever 6-2.It is designed in this way, the intrinsic frequency of system can be improved, while increasing linear actuating device resistance
The ability of non-athletic direction load, while being connect convenient for flexible guiding device 3 with four cantilevers of guide support frame 6.Other compositions
And connection relationship is identical as specific embodiment six.
The above is only the preferred embodiment of the present invention, it should be pointed out that: those skilled in the art are come
It says, without departing from the principle of the present invention, several improvement and equivalent replacement can also be made, these want right of the present invention
The technical solution improved with after equivalent replacement is sought, protection scope of the present invention is all fallen within.
Claims (7)
1. a kind of linear actuating device based on full Piezoelectric Ceramic, the Linear Driving dress based on full Piezoelectric Ceramic
It sets including pedestal (1), second level bridge amplifier (2), grating displacement sensor (5), guide support frame (6) and four flexible guidings
Device (3), it is characterised in that: the linear actuating device based on full Piezoelectric Ceramic further includes fine motion piezoelectric ceramics (4), and two
Grade bridge amplifier includes first order amplifier (2-1), second level amplifier (2-2), macro dynamic pressure electroceramics (2-3) and two chains
It connects block (2-4), first order amplifier (2-1) and second level amplifier (2-2) are four frame structures, first order amplifier (2-
1) it is vertically arranged, macro dynamic pressure electroceramics (2-3) is vertically arranged in first order amplifier (2-1), first order amplifier (2-1)
Upper and lower side is that first order amplifier is displaced input terminal, and two middle side parts of first order amplifier (2-1) are the displacement of first order amplifier
Output end, the both ends of second level amplifier (2-2) are that second level amplifier is displaced input terminal, the two of second level amplifier (2-2)
Middle side part is that second level amplifier is displaced output end, and two middle side parts of first order amplifier (2-1) are symmetrically arranged with two links
Block (2-4), second level amplifier (2-2) level are installed on the middle part of first order amplifier (2-1) and by two chained block (2-
4) affixed with first order amplifier (2-1), second level bridge amplifier side wall is packed on pedestal (1), each flexible guiding device (3)
It is packed on pedestal (1) by a crossbeam, is provided with a flexible guiding device above and below each chained block (2-4)
(3), the fixing end of flexible guiding device (3) is fixedly mounted with crossbeam is integrated, and four flexible guiding devices (3) are opposite two-by-two and set in parallel
Set, set on guide support frame (6) there are four cantilever (6-2), each cantilever (6-2) of guide support frame (6) with corresponding one
The output end of flexible guiding device (3) is fixedly connected, in the middle part of the front side of second level amplifier (2-2) between guide support frame (6)
It is provided with fine motion piezoelectric ceramics (4), grating displacement sensor (5) is arranged on the top of pedestal (1).
2. the linear actuating device according to claim 1 based on full Piezoelectric Ceramic, it is characterised in that: the first order is put
Big device (2-1) and second level amplifier (2-2) are rectangular configuration bridge amplifier.
3. the linear actuating device according to claim 1 or 2 based on full Piezoelectric Ceramic, it is characterised in that: second level
The resolution ratio of the output displacement of bridge amplifier is less than the stroke of fine motion piezoelectric ceramics (4).
4. the linear actuating device according to claim 3 based on full Piezoelectric Ceramic, it is characterised in that: flexible guiding
Device (3) is the elastic spring structure being formed by connecting by multilayer quadrilateral structure.
5. the linear actuating device according to claim 4 based on full Piezoelectric Ceramic, it is characterised in that: flexible guiding
The two sides of device (3) one end are the fixing end of flexible guiding device (3), and the middle part of flexible guiding device (3) one end is flexible guiding device (3)
Output end.
6. the linear actuating device according to claim 1,2,4 or 5 based on full Piezoelectric Ceramic, it is characterised in that:
Grating displacement sensor (5) is mounted on the output end of upper left flexible guiding device (3).
7. the linear actuating device according to claim 6 based on full Piezoelectric Ceramic, it is characterised in that: guide support
Frame (6) includes support frame body (6-1) and four cantilevers (6-2), and support frame body (6-1) is in I-shaped, support frame body (6-
Each of 1) there are two cantilever (6-2) for arc transition connection on I-shaped crossbeam both ends.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910213788.7A CN109889088B (en) | 2019-03-20 | 2019-03-20 | Linear driving device based on full-piezoelectric ceramic driving |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910213788.7A CN109889088B (en) | 2019-03-20 | 2019-03-20 | Linear driving device based on full-piezoelectric ceramic driving |
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| CN109889088A true CN109889088A (en) | 2019-06-14 |
| CN109889088B CN109889088B (en) | 2020-06-09 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110224631A (en) * | 2019-07-05 | 2019-09-10 | 复旦大学 | Piezoelectric ceramic motor mover assembles device |
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| CN102723893A (en) * | 2012-07-03 | 2012-10-10 | 吉林大学 | Micro-nano simulation rotating drive device |
| WO2012162604A1 (en) * | 2011-05-25 | 2012-11-29 | Parker-Hannifin Corporation | Smart material actuator |
| US20150277103A1 (en) * | 2014-04-01 | 2015-10-01 | Luzhong Yin | Microelectromechanical displacement structure and method for controlling displacement |
| CN106788271A (en) * | 2016-11-22 | 2017-05-31 | 哈尔滨工业大学 | Two grades of bridge amplifiers of hybrid hinge formula that a kind of rigidity is strengthened |
| CN109412459A (en) * | 2018-12-18 | 2019-03-01 | 北京无线电测量研究所 | A kind of flexible amplification mechanism |
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2019
- 2019-03-20 CN CN201910213788.7A patent/CN109889088B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012162604A1 (en) * | 2011-05-25 | 2012-11-29 | Parker-Hannifin Corporation | Smart material actuator |
| CN102723893A (en) * | 2012-07-03 | 2012-10-10 | 吉林大学 | Micro-nano simulation rotating drive device |
| US20150277103A1 (en) * | 2014-04-01 | 2015-10-01 | Luzhong Yin | Microelectromechanical displacement structure and method for controlling displacement |
| CN106788271A (en) * | 2016-11-22 | 2017-05-31 | 哈尔滨工业大学 | Two grades of bridge amplifiers of hybrid hinge formula that a kind of rigidity is strengthened |
| CN109412459A (en) * | 2018-12-18 | 2019-03-01 | 北京无线电测量研究所 | A kind of flexible amplification mechanism |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110224631A (en) * | 2019-07-05 | 2019-09-10 | 复旦大学 | Piezoelectric ceramic motor mover assembles device |
| CN110224631B (en) * | 2019-07-05 | 2024-05-03 | 复旦大学 | Piezoelectric ceramic motor rotor assembly device |
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| CN109889088B (en) | 2020-06-09 |
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