CN110224631B - Piezoelectric ceramic motor rotor assembly device - Google Patents
Piezoelectric ceramic motor rotor assembly device Download PDFInfo
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- CN110224631B CN110224631B CN201910602811.1A CN201910602811A CN110224631B CN 110224631 B CN110224631 B CN 110224631B CN 201910602811 A CN201910602811 A CN 201910602811A CN 110224631 B CN110224631 B CN 110224631B
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- piezoelectric ceramic
- piezoceramic
- motor
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- assembly fixture
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- 239000000919 ceramic Substances 0.000 title claims abstract description 90
- 230000005489 elastic deformation Effects 0.000 claims description 3
- 238000009434 installation Methods 0.000 abstract description 3
- 230000004075 alteration Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/22—Methods relating to manufacturing, e.g. assembling, calibration
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a piezoelectric ceramic motor rotor assembly fixture which is used for assembling a rotor of a piezoelectric ceramic motor to a stator of the piezoelectric ceramic motor and comprises an upper supporting plate, a lower supporting plate and a piezoelectric ceramic stack. The piezoelectric ceramic stack is formed by stacking a plurality of piezoelectric ceramic plates with electrode layers covered on the surfaces, and is arranged between the upper supporting plate and the lower supporting plate, and when the piezoelectric ceramic stack is electrified, the piezoelectric ceramic stack moves along the normal direction of the supporting plate so as to increase the distance between the upper supporting plate and the lower supporting plate, so that the stator assembly of the piezoelectric ceramic motor is accurately expanded, and the stator assembly of the piezoelectric ceramic motor is conveniently placed in the rotor of the piezoelectric ceramic motor. The invention can solve the problem of difficult assembly of the piezoelectric ceramic motor rotor, the assembly precision can reach the micron level, the accurate installation of the piezoelectric ceramic motor stator is realized under the condition of not damaging the piezoelectric ceramic motor stator, and the operation is convenient and the control is easy.
Description
Technical Field
The invention relates to the field of piezoelectric ceramic motors, in particular to a piezoelectric ceramic motor rotor assembly device.
Background
In recent years, with the continuous improvement of the integration level of large-scale integrated circuit devices, the aberration requirement of a projection objective is also higher and higher, and the requirement of a piezoelectric ceramic motor for driving the posture of a lens is also improved year by year. The motion resolution of the piezoelectric ceramic motor can reach the nanometer level, so that the assembly of a stator and a rotor of the piezoelectric ceramic motor is highly required.
Disclosure of Invention
The invention aims to provide a piezoelectric ceramic motor rotor assembly tool for solving the problem of difficult assembly of a piezoelectric ceramic motor rotor.
In order to solve the above-mentioned problems, according to one aspect of the present invention, there is provided a piezoceramic motor mover assembly fixture for assembling a mover of a piezoceramic motor to a stator of a piezoceramic motor, the piezoceramic motor mover assembly fixture including an upper support plate, a lower support plate, and a piezoceramic stack formed of a plurality of piezoceramic sheets covered on surfaces with electrode layers, the piezoceramic stack being disposed between the upper support plate and the lower support plate and moving in a support plate normal direction upon energization to increase a distance between the upper support plate and the lower support plate,
The top of the piezoelectric ceramic motor stator to be assembled is fixedly connected with the upper supporting plate, the bottom of the piezoelectric ceramic motor stator is fixedly connected with the lower supporting plate, voltage is applied to the piezoelectric ceramic stack, the output force generated by the piezoelectric ceramic stack lifts the upper supporting plate upwards to cause elastic deformation of the piezoelectric ceramic motor stator, then the piezoelectric ceramic motor rotor is slowly and stably assembled into the piezoelectric ceramic motor stator, and when the piezoelectric ceramic motor rotor enters a preset position in the piezoelectric ceramic motor stator, the voltage applied to the piezoelectric ceramic stack is slowly removed.
In one embodiment, the assembly fixture comprises two groups of piezoelectric ceramic stacks symmetrically arranged on two sides of the stator of the piezoelectric ceramic motor.
In one embodiment, the assembly fixture further comprises a linear bearing, wherein the linear bearing is assembled between the upper support plate and the lower support plate, and the upper support plate can move up and down along with the linear bearing.
In one embodiment, the assembly fixture comprises two groups of linear bearings symmetrically arranged on two sides of the piezoelectric ceramic motor stator.
In one embodiment, the assembly fixture comprises two groups of piezoelectric ceramic stacks symmetrically arranged on two sides of the piezoelectric ceramic motor stator, and further comprises two groups of linear bearings symmetrically arranged on two sides of the piezoelectric ceramic motor stator and located on the outer sides of the two groups of piezoelectric ceramic stacks.
In one embodiment, the linear bearing comprises a linear bearing shaft, a first linear bearing carrier moving part and a second linear bearing moving part, wherein the upper supporting plate is provided with a bearing hole, the linear bearing shaft passes through the bearing hole and abuts against the lower supporting plate, the first linear bearing carrier moving part is matched with the bearing shaft and is installed above the upper supporting plate, and the second linear bearing moving part is matched with the linear bearing shaft and is installed below the upper supporting plate.
In one embodiment, the upper support plate is fixed to the upper surface of the piezoceramic motor stator by a screw, and the lower support plate is fixed to the lower surface of the piezoceramic motor stator by a screw.
In one embodiment, the upper surface of the upper support plate is provided with a pit, and the top surface of the piezoelectric ceramic stack is provided with a protrusion matched with the pit.
In one embodiment, the lower support plate is secured to the assembly operating platform by a connector.
In one embodiment, the upper and lower end surfaces of the piezoelectric ceramic stack are fixed to the lower surface of the upper support plate and the upper surface of the lower support plate, respectively, by bonding.
In one embodiment, the piezoceramic motor mover slowly removes the voltage applied to the piezoceramic stack as it enters a predetermined position in the piezoceramic motor stator.
The assembly fixture for the piezoelectric ceramic motor rotor can solve the problem of difficult assembly of the piezoelectric ceramic motor rotor, the assembly precision can reach the micron level, the accurate installation of the piezoelectric ceramic motor stator is realized under the condition that the piezoelectric ceramic motor stator is not damaged, and meanwhile, the assembly fixture is convenient to operate and easy to control.
Drawings
FIGS. 1-2 are perspective views of an assembled piezoceramic motor from different perspectives, respectively;
FIG. 3 is a perspective view of the piezoelectric ceramic motor mover assembly tooling of the present invention;
FIG. 4 is a front view of the piezoceramic motor rotor assembly tooling of FIG. 3;
FIG. 5 is a top view of the piezoceramic motor rotor assembly tooling of FIG. 3; and
Fig. 6 is a schematic perspective view of one embodiment of a piezoelectric ceramic stack.
Detailed Description
The preferred embodiments of the present invention will be described in detail below with reference to the attached drawings, so that the objects, features and advantages of the present invention will be more clearly understood. It should be understood that the embodiments shown in the drawings are not intended to limit the scope of the invention, but rather are merely illustrative of the true spirit of the invention.
In the following description, for the purposes of explanation of various disclosed embodiments, certain specific details are set forth in order to provide a thorough understanding of the various disclosed embodiments. One skilled in the relevant art will recognize, however, that an embodiment may be practiced without one or more of the specific details. In other instances, well-known devices, structures, and techniques associated with the present application may not be shown or described in detail to avoid unnecessarily obscuring the description of the embodiments.
Reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment. Thus, appearances of the phrases "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
In the following description, for the purposes of clarity of presentation of the structure and manner of operation of the present invention, the description will be made with the aid of directional terms, but such terms as "forward," "rearward," "left," "right," "outward," "inner," "outward," "inward," "upper," "lower," etc. are to be construed as convenience, and are not to be limiting.
Fig. 1-2 are perspective views of an assembled piezoceramic motor 200 from different perspectives, respectively. As shown in fig. 1-2, the piezoceramic motor 200 includes a stator 201 and a mover 202. The stator 201 is a frame structure having an opening 205 therein, the opening 205 is for accommodating the mover 202, an upper mount 203 is provided on a top wall of the opening 205, a lower mount 204 is provided on a lower portion of the opening 205, and a top and a bottom of the mover 202 are respectively mounted in the upper mount 203 and the lower mount 204.
The motion resolution of the piezoelectric ceramic motor can reach the nanometer level, so that high requirements are put on the assembly of a stator and a rotor of the piezoelectric ceramic motor. The invention aims to solve the problem of how to assemble the rotor 202 of the piezoceramic motor to the stator 201.
Fig. 3 is a perspective view of the piezoelectric ceramic motor mover assembly fixture 100 of the present invention, fig. 4 is a front view of the piezoelectric ceramic motor mover assembly fixture of fig. 3, and fig. 5 is a top view of the piezoelectric ceramic motor mover assembly fixture of fig. 3. As shown in fig. 3 to 5, the piezoceramic motor rotor assembly fixture 100 includes an upper support bracket 10, a lower support plate 20, and a piezoceramic stack 30. The piezoelectric ceramic stack 30 is disposed between the upper support plate 10 and the lower support plate 20, and upper and lower ends of the piezoelectric ceramic stack 30 respectively abut against the upper support plate 10 and the lower support plate 20, and a stator 201 of the piezoelectric ceramic motor 200 to be assembled is fixed between the upper support plate 10 and the lower support plate 20. Wherein the piezoelectric ceramic stack 30 is formed by stacking a plurality of piezoelectric ceramic sheets covered with electrode layers on the surfaces.
In one embodiment, the piezoelectric ceramic stack 30 is fixed to the lower surface of the upper support plate 10 and the upper surface of the lower support plate 20 by means of bonding, and the end surface flatness of the alumina plate on the surface of the piezoelectric ceramic stack is ensured to be in the micrometer scale. Since the piezoelectric ceramic stack is used to drive the support plate to move, the piezoelectric ceramic stack needs to have a large output force.
Specifically, in the present embodiment, the stator 201 of the piezoceramic motor 200 to be assembled is fixed between the upper support plate 10 and the lower support plate 20 by the upper screw 51 and the lower screw 52. The middle part of the upper support plate 10 is provided with a first through hole, the middle part of the lower support plate 20 is provided with a second through hole, the upper screw 51 is fixed to the upper mount 203 of the stator 201 of the piezoceramic motor 200 to be assembled through the first through hole, and the lower screw 52 is fixed to the lower mount 204 of the stator 201 of the piezoceramic motor 200 to be assembled through the second through hole.
After the stator 201 is mounted on the piezoceramic motor rotor assembly fixture 100, the piezoceramic stack 30 is slowly electrified, output force is generated after the piezoceramic stack 30 is electrified, the distance between the upper support plate and the lower support plate is increased, the stator 201 of the piezoceramic motor 200 is fixed between the upper support plate 10 and the lower support plate 20, the stress of the upper support plate 10 and the lower support plate 20 causes elastic deformation of the piezoceramic motor stator 201, namely the upper mounting seat 203 slightly moves upwards along with the upper support plate 10, so that the distance between the upper mounting seat 203 and the lower mounting seat 204 is increased, then the piezoceramic motor rotor 202 to be assembled is slowly and stably assembled in the piezoceramic motor stator 201, and when the piezoceramic motor rotor 202 enters a preset position in the piezoceramic motor stator 201, the voltage applied to the piezoceramic stack 30 is slowly removed.
With continued reference to fig. 3-5, the piezoceramic motor rotor assembly fixture includes two groups of piezoceramic stacks 30, the two groups of piezoceramic stacks 30 are symmetrically arranged at two sides of the piezoceramic motor stator 201, and equal voltage is applied to the two groups of piezoceramic stacks 30 at the same speed when the piezoceramic motor stator is electrified, so that the upper support plate 10 is ensured to be lifted uniformly. While this embodiment shows two sets of piezoelectric ceramic stacks 30, those skilled in the art will appreciate that four or six sets of piezoelectric ceramic stacks may be provided.
In addition, as the piezoelectric ceramic stack is used for power output and stability of the movement direction is guaranteed, a linear bearing is needed to limit the movement direction of the piezoelectric ceramic stack. Further, the linear bearings and the piezoelectric ceramic stacks are uniformly and symmetrically arranged, so that stable operation is ensured. The linear bearing 40 is described in detail below.
With continued reference to fig. 3-5, the piezoceramic assembly fixture 100 further includes a linear bearing 40, the linear bearing 40 being assembled between the upper support plate 10 and the lower support plate 20, the upper support plate 10 being capable of moving up and down with the linear bearing. Specifically, two sets of linear bearings 40 are arranged on both sides of the piezoceramic motor stator 201, and the two sets of linear bearings 40 are preferably arranged on the outer sides of the two sets of piezoceramic stacks 30.
The linear bearing 40 includes a linear bearing shaft 41, a first linear bearing moving member 42, and a second linear bearing moving member 43, the upper support plate is provided with a bearing hole 11, the linear bearing shaft 41 passes through the bearing hole 11 and abuts on the lower support plate 20, the first linear bearing moving member 42 is coupled with the bearing shaft and mounted above the upper support plate 10, and the second linear bearing moving member 43 is coupled with the linear bearing shaft 41 and mounted below the upper support plate 10. The first linear bearing moving member 42 and the second linear bearing moving member 43 fix the bearing shaft 41 from the up-down direction of the support plate 10, respectively. When the upper support plate 10 is supported after the piezoelectric ceramic stack 30 is electrified, the bearing shaft 41 rotates, the upper support plate 10 rises upwards to drive the piezoelectric ceramic motor stator 201 to elastically deform, and the distance between the upper mounting portion 203 and the lower mounting portion 204 in the piezoelectric ceramic motor stator 201 is increased, so that the piezoelectric ceramic motor mover 202 is mounted in the piezoelectric ceramic motor stator 201.
Fig. 6 is a schematic perspective view of one embodiment of a piezoelectric ceramic stack 30. As shown in fig. 6, the upper surface of the piezoelectric ceramic stack 30 is provided with protrusions 31, and the lower surface of the upper support plate 10 is provided with recesses (not shown), and the protrusions 31 are engaged with the recesses, thereby confining the piezoelectric ceramic stack 30 within the recesses, and thus maintaining the relative position between the piezoelectric ceramic stack and the upper support plate 10.
Referring back to fig. 3, the lower support plate 20 of the present invention may be secured to an assembly operating platform (not shown) by a connector (not shown).
The assembly fixture for the piezoelectric ceramic motor rotor can solve the problem of difficult assembly of the piezoelectric ceramic motor rotor, the assembly precision can reach the micron level, the accurate installation of the piezoelectric ceramic motor stator is realized under the condition that the piezoelectric ceramic motor stator is not damaged, and meanwhile, the assembly fixture is convenient to operate and easy to control.
While the preferred embodiments of the present application have been described in detail, it will be appreciated that those skilled in the art, upon reading the above teachings, may make various changes and modifications to the application. Such equivalents are also intended to fall within the scope of the application as defined by the following claims.
Claims (10)
1. The utility model provides a piezoceramics motor rotor assembly fixture for assemble piezoceramics motor's rotor to piezoceramics motor's stator, its characterized in that, piezoceramics motor rotor assembly fixture includes upper backup pad, lower backup pad and piezoceramics stack, piezoceramics stack is formed by a plurality of surface cover electrode layer's piezoceramics piece stacks, piezoceramics stack sets up in between upper backup pad and the lower backup pad, and piezoceramics stack moves in backup pad normal direction in order to increase the distance between upper backup pad and the lower backup pad when the circular telegram,
The top of the piezoelectric ceramic motor stator to be assembled is reliably connected with the upper supporting plate, the bottom of the piezoelectric ceramic motor stator is reliably connected with the lower supporting plate, voltage is applied to the piezoelectric ceramic stack, the output force generated by the piezoelectric ceramic stack lifts the upper supporting plate upwards to cause elastic deformation of the piezoelectric ceramic motor stator, then the piezoelectric ceramic motor rotor is slowly and stably assembled into the piezoelectric ceramic motor stator assembly, and when the piezoelectric ceramic motor rotor enters a preset position in the piezoelectric ceramic motor stator assembly, the voltage applied to the piezoelectric ceramic stack is slowly removed.
2. The piezoceramic motor mover assembly fixture of claim 1, wherein the assembly fixture comprises two sets of piezoceramic stacks symmetrically mounted on both sides of the piezoceramic motor stator.
3. The piezoceramic motor mover assembly fixture of claim 1, further comprising a linear bearing assembled between the upper and lower support plates, the upper support plate being movable up and down with the linear bearing.
4. A piezoceramic motor mover assembly fixture according to claim 3, wherein the assembly fixture comprises two sets of linear bearings symmetrically arranged on both sides of the piezoceramic motor stator.
5. The piezoceramic motor mover assembly fixture of claim 1, wherein the assembly fixture comprises two sets of piezoceramic stacks symmetrically mounted on both sides of the piezoceramic motor stator, and further comprising two sets of linear bearings symmetrically disposed on both sides of the piezoceramic motor stator and outside the two sets of piezoceramic stacks.
6. The piezoceramic motor mover assembly fixture of claim 3, wherein the linear bearing comprises a linear bearing shaft, a first linear bearing carrier moving member and a second linear bearing moving member, the upper support plate is provided with a bearing hole, the linear bearing shaft passes through the bearing hole and abuts against the lower support plate, the first linear bearing shaft moving member is matched with the linear bearing shaft and is mounted above the upper support plate, and the second linear bearing moving member is matched with the linear bearing shaft and is mounted below the upper support plate.
7. The piezoceramic motor mover assembly fixture of claim 1, wherein the upper support plate is fixed to the upper surface of the piezoceramic motor stator by screws, and the lower support plate is fixed to the lower surface of the piezoceramic motor stator by screws.
8. The piezoceramic motor rotor assembly fixture of claim 1, wherein the upper surface of the upper support plate is provided with a pit, and the top surface of the piezoceramic stack is provided with a protrusion matched with the pit.
9. The piezoceramic motor mover assembly fixture of claim 1, wherein the lower support plate is secured to the assembly operating platform by a connector.
10. The piezoceramic motor mover assembly fixture of claim 1, wherein the upper end face and the lower end face of the piezoceramic stack are fixed to the lower surface of the upper support plate and the upper surface of the lower support plate, respectively, by bonding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910602811.1A CN110224631B (en) | 2019-07-05 | 2019-07-05 | Piezoelectric ceramic motor rotor assembly device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910602811.1A CN110224631B (en) | 2019-07-05 | 2019-07-05 | Piezoelectric ceramic motor rotor assembly device |
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| CN110224631A CN110224631A (en) | 2019-09-10 |
| CN110224631B true CN110224631B (en) | 2024-05-03 |
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Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101272108A (en) * | 2008-05-05 | 2008-09-24 | 华南农业大学 | In-plane composite mode straight line ultrasound electric motor of square transducer |
| CN101984549A (en) * | 2010-11-24 | 2011-03-09 | 南京航空航天大学 | Clamp positioning device for linear ultrasonic motor |
| CN102195516A (en) * | 2011-05-20 | 2011-09-21 | 南京航空航天大学 | S-shaped multi-pin clamped piezoelectric motor and operating mode thereof |
| CN103912573A (en) * | 2014-03-27 | 2014-07-09 | 广东工业大学 | Replaceable inlaid-type flexible hinge fixing structure |
| CN104942377A (en) * | 2015-07-07 | 2015-09-30 | 长春工业大学 | Ellipse vibration cutting auxiliary device based on three-piezoelectric driving |
| CN106953539A (en) * | 2017-04-14 | 2017-07-14 | 哈尔滨工业大学 | The vertical accurate piezoelectric actuator of curved compound creeping motion type and its motivational techniques |
| CN108120578A (en) * | 2017-12-16 | 2018-06-05 | 渤海大学 | A kind of triple axle exciting bank that shock loading can be loaded to MEMS micro-structures |
| CN109217720A (en) * | 2017-07-08 | 2019-01-15 | 浙江师范大学 | A kind of driving method of list rotary permanent-magnet clamp straight line stepping type piezoelectric actuator and the driver |
| CN109519320A (en) * | 2018-11-08 | 2019-03-26 | 瑞迪智能运动（深圳）有限公司 | Body-building version water potential energy electricity generation system |
| CN109889088A (en) * | 2019-03-20 | 2019-06-14 | 哈尔滨工业大学 | Linear actuating device based on full Piezoelectric Ceramic |
-
2019
- 2019-07-05 CN CN201910602811.1A patent/CN110224631B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101272108A (en) * | 2008-05-05 | 2008-09-24 | 华南农业大学 | In-plane composite mode straight line ultrasound electric motor of square transducer |
| CN101984549A (en) * | 2010-11-24 | 2011-03-09 | 南京航空航天大学 | Clamp positioning device for linear ultrasonic motor |
| CN102195516A (en) * | 2011-05-20 | 2011-09-21 | 南京航空航天大学 | S-shaped multi-pin clamped piezoelectric motor and operating mode thereof |
| CN103912573A (en) * | 2014-03-27 | 2014-07-09 | 广东工业大学 | Replaceable inlaid-type flexible hinge fixing structure |
| CN104942377A (en) * | 2015-07-07 | 2015-09-30 | 长春工业大学 | Ellipse vibration cutting auxiliary device based on three-piezoelectric driving |
| CN106953539A (en) * | 2017-04-14 | 2017-07-14 | 哈尔滨工业大学 | The vertical accurate piezoelectric actuator of curved compound creeping motion type and its motivational techniques |
| CN109217720A (en) * | 2017-07-08 | 2019-01-15 | 浙江师范大学 | A kind of driving method of list rotary permanent-magnet clamp straight line stepping type piezoelectric actuator and the driver |
| CN108120578A (en) * | 2017-12-16 | 2018-06-05 | 渤海大学 | A kind of triple axle exciting bank that shock loading can be loaded to MEMS micro-structures |
| CN109519320A (en) * | 2018-11-08 | 2019-03-26 | 瑞迪智能运动（深圳）有限公司 | Body-building version water potential energy electricity generation system |
| CN109889088A (en) * | 2019-03-20 | 2019-06-14 | 哈尔滨工业大学 | Linear actuating device based on full Piezoelectric Ceramic |
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