CN108092547A - A kind of biped type piezoelectricity electromagnetism hybrid linear motor and electric excitation method thereof - Google Patents
A kind of biped type piezoelectricity electromagnetism hybrid linear motor and electric excitation method thereof Download PDFInfo
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- CN108092547A CN108092547A CN201810164837.8A CN201810164837A CN108092547A CN 108092547 A CN108092547 A CN 108092547A CN 201810164837 A CN201810164837 A CN 201810164837A CN 108092547 A CN108092547 A CN 108092547A
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- 230000005284 excitation Effects 0.000 title claims abstract description 17
- 238000000034 method Methods 0.000 title claims abstract description 15
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 21
- 238000005086 pumping Methods 0.000 claims description 58
- 230000036316 preload Effects 0.000 claims description 15
- 238000009434 installation Methods 0.000 claims description 12
- 230000000737 periodic effect Effects 0.000 claims description 7
- 238000003475 lamination Methods 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 2
- 210000002683 foot Anatomy 0.000 description 108
- 235000014676 Phragmites communis Nutrition 0.000 description 22
- 238000006073 displacement reaction Methods 0.000 description 11
- 230000008602 contraction Effects 0.000 description 8
- 244000273256 Phragmites communis Species 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
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- 238000005516 engineering process Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
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- 238000002604 ultrasonography Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000000806 elastomer Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
Abstract
The present invention provides a kind of biped type piezoelectricity electromagnetism hybrid linear motor and electric excitation method thereofs, belong to piezoelectric motor field, this biped type piezoelectricity electromagnetism hybrid linear motor, including stator, mover, pedestal and mounting base；Mover is slidably connected with pedestal；First laminated piezoelectric of driving the first driving foot in glide direction movement is provided between first driving foot and frame；Second laminated piezoelectric of driving the second driving foot in glide direction movement is provided between second driving foot and frame；The first electromagnetism group and the second electromagnetism group are fixedly installed on pedestal, the first electromagnetism group driving the first driving foot is closer or far from mover；Second electromagnetism group driving the second driving foot is closer or far from mover；Mounting base, which has, is fixedly mounted on the first leaf spring on pedestal, and perpendicular to the axial direction of the first electromagnetism group, frame is connected the first leaf spring with the first leaf spring.This biped type piezoelectricity electromagnetism hybrid linear motor precision is high, at low cost, long lifespan.
Description
Technical field
The present invention relates to piezoelectric motor field, in particular to a kind of biped type piezoelectricity electromagnetism hybrid linear motor
And electric excitation method thereof.
Background technology
With the development of micro-/ nano technology, all there is an urgent need to submicron orders, micro-/to receive for the research of numerous field of engineering technology
The accurate actuator of meter level.But since traditional electromagnetic machine needs deceleration device, it is being miniaturized, in the developing direction of high power to weight ratio
It is difficult to it breaks through.With the development of material science, new function material proposes new solution for these applications, wherein, it is inverse
The discovery of piezoelectric effect and with superior function piezoelectric ceramics (PZT) material appearance so that Precision Piezoelectric actuator research
It gets the attention, and the prospect of being widely applied is shown in accurate start field.
Linear piezoelectric motor mainly includes resonance type ultrasound electric machine and off-resonance type stepper motor.Resonance type ultrasound electric machine is
It is converted into using the resonance of the inverse piezoelectric effect excitation elastomer of piezoelectric ceramics, and by the Light deformation of elastomer by the coupling that rubs
The macroscopic motion of rotor or mover.Since ultrasound electric machine is run under resonance state, cause its performance affected by environment larger, together
When it is higher to the requirement on machining accuracy of stator.Off-resonance type stepper motor is the precise displacement output characteristics using laminated piezoelectric,
With reference to inertia impact drive principle or looper principle, the step motion that movement parts are continuous, accurate can be realized.With resonant piezoelectric electro
Machine is compared, and non-resonant behavior has wider working band, to the strong interference immunity of ambient enviroment；And to the size of motor stator
It is less high with requirement on machining accuracy, it is easy to ensure the stationarity of motor operation.But inertia impact type and looper principle off-resonance
Linear motor is more harsh to driving control signal requirement, driving force very little.
The content of the invention
The present invention provides a kind of biped type piezoelectricity electromagnetism hybrid linear motor and electric excitation method thereofs, it is intended to solve existing
The above problem existing for biped type piezoelectricity electromagnetism hybrid linear motor and electric excitation method thereof in technology.
What the present invention was realized in：
A kind of biped type piezoelectricity electromagnetism hybrid linear motor, including stator, mover, pedestal and mounting base；
The mover is slidably connected with the pedestal；
The stator include driving the first driving foot that the mover slides forward or backwards in glide direction and
Second driving foot；
The stator further includes frame, and the frame has to install the first driving foot and the described second drive
The installation space of action spot；
The first driving foot has the first driving side, and driving is provided between first driving side and the frame
The first driving foot is in the first laminated piezoelectric of glide direction movement；The second driving foot has away from described first
Second driving side of driving side is provided with driving the second driving foot in institute between second driving side and the frame
State the second laminated piezoelectric of glide direction movement；
The first magnetic part is fixedly installed on the pedestal；It is described first driving foot away from the mover one end be provided with
Second magnetic part of the first magnetic part cooperation；The 3rd magnetic part is further fixedly arranged on the pedestal；The second driving foot is separate
One end of the mover is provided with the 4th magnetic part with the 3rd magnetic part cooperation；
The mounting base, which has, is fixedly mounted on the first leaf spring on the pedestal, and first leaf spring is perpendicular to described the
The axial direction of first electromagnetism group of one magnetic part and the second magnetic part composition, the frame are connected with first leaf spring；
The first electromagnetism group is parallel with the axial direction for the second electromagnetism group that the 3rd magnetic part and the 4th magnetic part form.
In an embodiment of the present invention, the frame includes the first frame and the second frame, and the installation space also divides
For the second space in the first space in first frame and second frame, the first driving foot is placed in described first
Space, the second driving foot are placed in the second space.
In an embodiment of the present invention, there is the first driving foot threeth opposite with first driving side to drive
Dynamic side is connected between the 3rd driving side and first frame by the first elastic preload piece, the described first elastic preload piece
With the elastic force parallel to the glide direction.
In an embodiment of the present invention, the second driving foot has the 4 wheel driven opposite with second driving side
Dynamic side is connected between the 4th driving side and second frame by the second elastic preload piece, the described second elastic preload piece
With the elastic force parallel to the glide direction.
In an embodiment of the present invention, the first magnetic part is fixed by the first fixed seat, first fixed seat
It is fixedly mounted on the pedestal, first fixed seat has the first stationary plane for fixing the first magnetic part；It is described
3rd magnetic part is fixed by the second fixed seat, and second fixed seat is fixedly mounted on the pedestal, second fixed seat
With for fixing the second stationary plane of the 3rd magnetic part.
In an embodiment of the present invention, first stationary plane is vertical with the axis of the first electromagnetism group, described
First stationary plane is vertical with the axis of the second electromagnetism group.
In an embodiment of the present invention, the frame is additionally provided with the second leaf spring close to one end of the mover,
The frame is connected with second leaf spring.
In an embodiment of the present invention, first is additionally provided between first laminated piezoelectric and first frame to lead
To part, the second guide part is additionally provided between second laminated piezoelectric and second frame.
A kind of electric excitation method thereof uses above-mentioned biped type piezoelectricity electromagnetism hybrid linear motor；
The identical symmetric periodic signal of phase is applied to first laminated piezoelectric and second laminated piezoelectric, to described
Second magnetic part and the 4th magnetic part apply identical pumping signal, apply phase to the first magnetic part and the 3rd magnetic part
Opposite square-wave signal the first electromagnetism group and the second electromagnetism group apply the square-wave signal of opposite in phase.
A kind of electric excitation method thereof uses above-mentioned biped type piezoelectricity electromagnetism hybrid linear motor；
Apply the symmetric periodic signal of opposite in phase to first laminated piezoelectric and second laminated piezoelectric, to described
Second magnetic part and the 4th magnetic part apply identical pumping signal, and the first electromagnetism group and the second electromagnetism group are applied
The square-wave signal of opposite in phase applies the first magnetic part and the 3rd magnetic part square-wave signal of opposite in phase.Electric electricity electricity
The beneficial effects of the invention are as follows：By biped type piezoelectricity electromagnetism hybrid linear motor provided by the invention, with two
Group symmetric periodic signal and two groups of square-wave signals encourage the laminated piezoelectric of parallel mover guide rail arrangement and are led perpendicular to mover respectively
The electromagnetism group of rail arrangement.When using the square-wave signal of two groups of identical symmetric periodic signals and two groups of opposite in phase, the motor
It can realize biped walking mode.When the two symmetric periodic signals for using opposite in phase, voltage different and two groups of opposite in phase
During square-wave signal, which can realize biped differential mode.The type motor works under non-resonant behavior, has wider
Working band is easy to ensure the work smoothness of motor, driving control signal and machining accuracy etc. is required relatively low.Due to longitudinal direction
Displacement output is driven using electromagnetism group, and larger normal pressure and frictional force can be generated on stator and mover interface.Therefore, originally
The displacement resolution of nano-precision easy to implement is invented, and there is off-resonance, wide frequency domain, high thrust, while has both system
The advantages of making at low cost, long lifespan and cutting off self-lock.
Description of the drawings
It, below will be to required use in embodiment in order to illustrate more clearly of the technical solution of embodiment of the present invention
Attached drawing be briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not to be seen as
It is the restriction to scope, it for those of ordinary skill in the art, without creative efforts, can be with root
Other relevant attached drawings are obtained according to these attached drawings.
Fig. 1 is the structure diagram of biped type piezoelectricity electromagnetism hybrid linear motor provided in an embodiment of the present invention；
Fig. 2 is the stator of biped type piezoelectricity electromagnetism hybrid linear motor provided in an embodiment of the present invention and the knot of mounting base
Structure schematic diagram；
Fig. 3 is the structural representation of the stator of biped type piezoelectricity electromagnetism hybrid linear motor provided in an embodiment of the present invention
Figure；
Fig. 4 is the structure diagram of the first leaf spring provided in an embodiment of the present invention；
Fig. 5 is the structure diagram at the first visual angle of mounting base provided in an embodiment of the present invention；
Fig. 6 is the structure diagram at the second visual angle of mounting base provided in an embodiment of the present invention；
Fig. 7 be biped type piezoelectricity electromagnetism hybrid linear motor provided in an embodiment of the present invention under biped walking mode just
Electric excitation signal ideograph when glide direction moves；
Fig. 8 is that biped type piezoelectricity electromagnetism hybrid linear motor provided in an embodiment of the present invention is anti-under biped walking mode
Electric excitation signal ideograph when glide direction moves；
Fig. 9 be biped type piezoelectricity electromagnetism hybrid linear motor provided in an embodiment of the present invention under biped differential mode just
Electric excitation signal ideograph when glide direction moves；
Figure 10 is biped type piezoelectricity electromagnetism hybrid linear motor provided in an embodiment of the present invention under biped differential mode
Electric excitation signal ideograph during positive glide direction movement.
Icon：001- biped type piezoelectricity electromagnetism hybrid linear motors；010- stators；030- movers；031- guide parts；
035- gib blocks；050- pedestals；051- bottom plates；053- side plates；070- mounting bases；071- substrates；073- bearings；110- first
Driving foot；The first driving heads of 111-；The first laminated piezoelectrics of 113-；The first guide parts of 115-；The first bolts of 117-；119- first
Elastic preload piece；130- second drives foot；The second driving heads of 131-；The second laminated piezoelectrics of 133-；The second guide parts of 135-；
The second bolts of 137-；The first frames of 210-；The second frames of 230-；250- installation spaces；311- the first electromagnetism groups；The second electromagnetism of 331-
Group；The first leaf springs of 400-；410- ring stands；430- reeds；The second leaf springs of 500-；The first fixed seats of 610-；630- second is fixed
Seat；The first mounting portions of 611-；The first fixed parts of 613-；The second mounting portions of 631-；The second fixed parts of 633-；The first magnetic of 3111-
Part；3113- the second magnetic parts；The 3rd magnetic parts of 3311-；The 4th magnetic parts of 3313-.
Specific embodiment
To make the purpose, technical scheme and advantage of embodiment of the present invention clearer, implement below in conjunction with the present invention
The technical solution in embodiment of the present invention is clearly and completely described in attached drawing in mode, it is clear that described reality
The mode of applying is the embodiment of a part of embodiment of the present invention rather than whole.Based on the embodiment in the present invention, ability
The every other embodiment that domain those of ordinary skill is obtained without creative efforts, belongs to the present invention
The scope of protection.Therefore, below the detailed description of the embodiments of the present invention to providing in the accompanying drawings be not intended to limit will
The scope of the present invention of protection is sought, but is merely representative of the selected embodiment of the present invention.Based on the embodiment in the present invention,
The every other embodiment that those of ordinary skill in the art are obtained without creative efforts belongs to this
Invent the scope of protection.
In the description of the present invention, it is to be understood that the term of indicating position or position relationship is based on shown in attached drawing
Orientation or position relationship, be for only for ease of the description present invention and simplify description rather than instruction or imply signified equipment
Or element must have specific orientation, with specific azimuth configuration and operation, therefore be not considered as limiting the invention.
In the present invention, unless otherwise clearly defined and limited, term " installation ", " connected ", " connection ", " fixation " etc.
Term should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected or integral；Can be that machinery connects
It connects or is electrically connected；It can be directly connected, can also be indirectly connected by intermediary, can be in two elements
The connection in portion or the interaction relationship of two elements.It for the ordinary skill in the art, can be according to specific feelings
Condition understands the concrete meaning of above-mentioned term in the present invention.
In the present invention, unless otherwise clearly defined and limited, fisrt feature can be on or below second feature
Contacted directly including the first and second features, can also include the first and second features not be contact directly but by them it
Between other characterisation contact.Moreover, fisrt feature is on second feature, top and above to include fisrt feature special second
Directly over sign and oblique upper is merely representative of fisrt feature level height higher than second feature.Fisrt feature second feature it
Under, lower section and fisrt feature included below immediately below second feature and obliquely downward or be merely representative of fisrt feature level height
Less than second feature.
Embodiment
A kind of biped type piezoelectricity electromagnetism hybrid linear motor 001 is present embodiments provided, referring to Fig. 1, this biped
Type piezoelectricity electromagnetism hybrid linear motor 001 includes stator 010, mover 030, pedestal 050 and mounting base 070.
Mounting base 070 includes bottom plate 051 and side plate 053, and side plate 053 is fixed on the one side of bottom plate 051, side plate 053 and bottom
Plate 051 is fixedly connected.Guide part 031 is provided on side plate 053, guide part 031 is used to be oriented to for mover 030.
Guide part 031 is fixed on side plate 053 towards the one side of bottom plate 051, the setting on one side away from side plate 053 of guide part 031
Guide groove is equipped with, corresponding gib block 035 is provided on mover 030, gib block 035 is inserted into guide groove so that mover 030
It can be moved upwards in the axis of guide groove, i.e., so that mover 030 is slidably connected with pedestal 050, the specific direction of motion of mover 030
It is related with force direction with axial positive and negative both direction, one of direction is defined as glide direction X, by right
The force of mover 030 may be such that mover 030 positive movement or counter motion on glide direction X.
In the present embodiment, guide groove is dovetail groove, and the shape of corresponding gib block 035 is corresponding with guide groove.Dovetail
The design of slot is so that the direction of motion of mover 030 is limited and can only carry out back and forth movement in glide direction X.
Stator 010 includes the mover 030 is driven to be slided forward or backwards on glide direction X first driving foot 110
With the second driving foot 130.
It please refers to Fig.1 and Fig. 2, the first driving foot 110 and the second driving foot 130, frame is installed to by mounting base 070
On pedestal 050, in order to realize the independent control of 110 and second driving foot 130 of the first driving foot, frame is also classified into the first frame
210 and second frame 230, the first frame 210 is for installing the first driving foot 110, and the second frame 230 is for installing the second driving foot
130.But in some embodiments, two driving foots are installed by a frame, two driving foots can also be realized in slip side
Independent control on X, but the movement perpendicular to glide direction X needs to realize by installing laminated piezoelectric in frame, it appears no
It is enough to stablize.
Fig. 2 and Fig. 3 are referred to, the first frame 210 is identical with 230 structure of the second frame, is the framework of concave shape, in framework
Centre has installation space 250, and the installation space 250 that the first driving foot 110 is mounted on the first frame 210 is in the first space second
The installation space 250 that driving foot 130 is mounted on the second frame 230 is in second space.
First driving foot 110 has the first driving head 111 that mover 030 is driven to move close to one end of mover 030,
There is the first driving side in the first driving foot 110, the first driving side is located at the first driving foot 110 and sets the first driving head 111
Side on one side, the first driving side are connected with the first frame 210 by the first laminated piezoelectric 113, and the first laminated piezoelectric 113 is so that the
One driving foot 110 can be moved parallel to glide direction X.In order to ensure that the direction of movement is stablized, the first laminated piezoelectric 113 with
The first guide part 115 is provided between first frame 210, the first guide part 115 can use the common guide part of the prior art, such as wrap
Wrap up in the guide pad of circumferential direction, one direction with larger flexibility of the first laminated piezoelectric 113.The setting of first guide part 115 can be rectified
The output of positive first laminated piezoelectric 113, while the first bolt 117 is provided on the first frame 210 and abuts the first laminated piezoelectric 113 far
One end from the first driving foot 110, may be used also by the first guide part 115 between the first bolt 117 and the first laminated piezoelectric 113
It is contacted directly to avoid the first laminated piezoelectric 113 and the first bolt 117.
First driving foot 110 has threeth driving side opposite with the first driving side, and the 3rd driving side is provided with first
Elastic preload piece 119, in the present embodiment, the first elastic preload piece 119 are preloading spring, and preloading spring is to the first driving foot
110 apply and 113 corresponding power of the first laminated piezoelectric.First 110 one end away from mover 030 of driving foot are provided with two simultaneously
A parallel cantilever flexible beam passes through first the 113, first elastic preload piece 119 of laminated piezoelectric and the common work of cantilever flexible beam
With so that the first driving foot 110 has relatively independent movement, and the stability moved every time is protected.
The first driving foot 110 is set up in parallel with the second driving foot 130 in the present embodiment, i.e., the first driving foot 110 is set
In the second 130 one sides away from bottom plate 051 of driving foot.
Second driving foot 130 has the second driving head 131 that mover 030 is driven to move close to one end of mover 030,
In the initial state, the second driving head 131 is set up in parallel with the first driving head 111.Second driving foot 130 has the second driving
Side, the second driving side are located at the side that the second driving foot 130 sets the one side of the second driving head 131, while the second driving side
It is 130 one sides away from the first laminated piezoelectric 113 of the second driving foot.Second driving side and the second frame 230 pass through the second piezo stack
Layer 133 connects, and the second laminated piezoelectric 133 allows the second driving foot 130 to be moved parallel to glide direction X.In order to ensure to transport
Dynamic direction is stablized, and the second guide part 135, the second guide part are provided between the second laminated piezoelectric 133 and the second frame 230
135 can use the common guide part of the prior art, such as wrap up the circumferential direction of the second laminated piezoelectric 133, one direction has larger flexibility
Guide pad.The setting of second guide part 135 can correct the output of the second laminated piezoelectric 133, while be set on the second frame 230
There is the second bolt 137 to abut the one end of the second laminated piezoelectric 133 away from the second driving foot 130, pass through the second bolt 137 and second
The second guide part 135 between laminated piezoelectric 133 can also avoid the second laminated piezoelectric 133 from directly being connect with the second bolt 137
It touches.
Second driving foot 130 has threeth driving side opposite with the second driving side, and the 3rd driving side is provided with second
Elastic preload piece, in the present embodiment, the second elastic preload piece are preloading spring, and preloading spring applies the second driving foot 130
With 133 corresponding power of the second laminated piezoelectric.It is parallel there are two being set simultaneously in second one end of driving foot 130 away from mover 030
Cantilever flexible beam, pass through the collective effect of the elastic preload piece of the second laminated piezoelectric 133, second and cantilever flexible beam so that the
Two driving foots 130 have relatively independent movement, and the stability moved every time is protected.
Said structure has ensured that the first driving foot 110 and the second driving foot 130 can drive mover 030 in glide direction
It is slided forward or backwards on X.It but can not also be selectively so that the first driving foot 110 or the second driving foot 130 be individually to mover
030 is exported, so that mover 030 can be moved with continuity.
The first electromagnetism group 311 is provided in first one end of frame 210 away from mover 030, the first electromagnetism group 311 drives first
210 entirety of frame drives the first driving foot 110 closer or far from mover 030 namely simultaneously closer or far from mover 030.First electricity
The second magnetic part 3113 in magnetic group 311 is fixedly mounted on the first one side of the frame 210 away from mover 030.First electromagnetism group 311 is such as
Fruit will drive the first frame 210 to move, it is also necessary to be relatively fixed the first magnetic part away from the first frame 210 in the first electromagnetism group 311
3111。
It please refers to Fig.1 and Fig. 4, the first fixed seat 610 is fixed at the first magnetic part 3111 away from the present embodiment
One end of one frame 210.
First fixed seat 610 has the first fixed part 613 and the first mounting portion 611 of Relative vertical, the first fixed part 613
It is vertical with the first mounting portion 611, when the first mounting portion 611 is installed to by bolt on bottom plate 051, the first fixed part 613 i.e. with
Bottom plate 051 is vertical, and the first fixed part 613 sets the extended spot of first the 210 to the first electromagnetism of frame group 311, the first magnetic part 3111 with
First stationary plane of the first fixed part 613 is fixedly connected.
Second fixed seat 630 has the second fixed part 633 and the second mounting portion 631 of Relative vertical, the second fixed part
633 is vertical with the second mounting portion 631, and when the second mounting portion 631 is installed to by bolt on bottom plate 051, the second fixed part 633 is
Vertical with bottom plate 051, the second fixed part 633 sets the extended spot of second the 230 to the second electromagnetism of frame group 331, the 3rd magnetic part 3311
It is fixedly connected with the second stationary plane of the second fixed part 633, the 4th magnetic part 3313 in the second electromagnetism group 331 is fixedly mounted on
Two one sides of the frame 230 away from mover 030.Wherein in order to ensure the first fixed seat 610 and the second mounting base 070 are on bottom plate 051
Installation is stablized, and is mounted on bolt in the both sides of 610 opposite first electromagnetism group 311 of the first fixed seat, the second fixed seat 630 is opposite
The both sides of second electromagnetism group 331 are respectively mounted bolt, cause the conflict of installation site.
In the present embodiment, it is by the way that the first fixed seat 610 is designed bigger than the second fixed seat 630, then fixed first
610 intermediate sets of holes of seat have one for housing the accommodating space of the second fixed seat 630.Wherein the second mounting portion 631 is first
Among mounting portion 611, the second fixed part 633 is among the first fixed part 613.
In order to ensure the first frame 210 and the second frame 230 are controlling its other party parallel to the movement of electromagnetism group axially direction
Upward position, there is provided the first leaf spring 400 and the second leaf springs 500 to be relatively fixed frame.First leaf spring 400 has ring
Frame 410 and multiple reeds 430, ring stand 410 provides base support for reed 430, and reed 430 is used to be relatively fixed the first frame
210 and second frame 230.
Please refer to Fig.1, Fig. 5 and Fig. 6 ring stands 410 are installed to by mounting base 070 on bottom plate 051, mounting base 070 has
Substrate 071 and the bearing 073 perpendicular to substrate 071, two bearings 073 are arranged at the one side of substrate 071 for installing ring stand
410.And substrate 071 is mounted by means of bolts on bottom plate 051.In actual installation, frame is arranged at two bearings
Between 073.
One end of ring stand 410 is fixed on a bearing 073, and the other end is fixed on another bearing 073, that is, is caused
The middle part alignment frame of ring stand 410.Have in the centre of ring stand 410 and house sky for installing the reed of reed 430
Between, the first reed portion and the second reed portion are provided in reed accommodating space.
In the present embodiment, there are two reed 430, two reeds 430 are connected the first reed portion tool with the first frame 210.
In the same plane, and the plane is parallel with glide direction X for reed 430 and ring stand 410, with the 4th magnetic part 3313
The direction of motion is vertical.Allow reed 430 that the first frame 210 is prevented to be moved on glide direction X, but parallel to the second magnetic
There is larger flexible degree of freedom on the direction of motion direction of part 3113.
There are two reed 430, two reeds 430 are connected second reed portion tool with the second frame 230.
Reed 430 is vertical with the direction of motion of the direction of motion of the second magnetic part 3113.Reed 430 is allowd to prevent second
Frame 230 moves on glide direction X, but has larger flexibility certainly on the direction of motion parallel to the second magnetic part 3113
By spending.
Equally using mounting base 070, the second leaf spring 500 is additionally provided with close to one end of mover 030 in frame.Second plate
Spring 500 is fixed on the one end of bearing 073 away from the first leaf spring 400.Second leaf spring 500 is identical with 400 structure of the first leaf spring, also sets
It is equipped with multiple reeds 430.Part reed 430 is directly connected to the first frame 210 close to one end of mover 030, another part reed
430 are directly directly connected to the second frame 230 close to one end of mover 030.
Further, according to above-mentioned biped type piezoelectricity electromagnetism hybrid linear motor 001, two kinds of electric excitation sides are provided
Method, to realize the following two kinds drive pattern, the electric excitation signal of each drive pattern is as shown in Fig. 7-Figure 10.Pumping signal a is the
The pumping signal of two magnetic parts 3113 and the 4th magnetic part 3313 keeps stablizing.Pumping signal b, d is symmetrical rectangular pulse signal,
Duty cycle is equal to 0.5, and wherein b is the application driving voltage of 311 first magnetic part 3111 of the first electromagnetism group；D is the second electromagnetism group 331
The application driving voltage of 3rd magnetic part 3311；Pumping signal c, e is triangular signal, and wherein c is applying for the first laminated piezoelectric 113
Add driving voltage；Wherein e is the application driving voltage of the second laminated piezoelectric 133.
The specific driving principle of each drive pattern is as follows：
First, biped walking mode：
Positive friction-driven process：The first step, the first driving foot 110 drive the stage, while to laminated piezoelectric and electromagnetism group
Applying pumping signal as shown in Figure 7, the pumping signal of the second magnetic part 3113 is a, and the pumping signal of the first magnetic part 3111 is b,
The electrode that the first electromagnetism group 311 at this time generates be it is in the same direction, it is mutually exclusive, the first driving enough 110 the first driving head 111 and
Normal pressure between mover 030 is maximum；The pumping signal of first laminated piezoelectric 113 is c, and driving voltage at this time is in descending grade,
First laminated piezoelectric 113 is slowly shunk, and the contraction of the first laminated piezoelectric 113 makes the first driving 110 transverse-vibration motion blocks of foot be slided to positive
Dynamic direction X movements；The pumping signal of the 4th magnetic part 3313 of second electromagnetism group 331 is a with the second magnetic part 3113, the 3rd magnetic part 3311
Pumping signal for d, the electrode that the second electromagnetism group 331 at this time generates is incorgruous, is attracted each other, at this time the second driving foot 130
Transverse-vibration motion block and mover 030 depart from；The pumping signal of second laminated piezoelectric 133 is e, and driving voltage at this time is in descending grade,
Second laminated piezoelectric 133 is slowly shunk, and the contraction of the second laminated piezoelectric 133 makes the second driving 130 transverse-vibration motion blocks of foot be slided to anti-
Dynamic direction movement；Only first driving foot 110 does work, therefore mover 030 is moved to positive glide direction X.
Second step, the second driving foot 130 drive the stage, and the pumping signal of the second magnetic part 3113 is a, the first magnetic part 3111
Pumping signal is b, and the electrode of the first electromagnetism group 311 generation at this time is incorgruous, is attracted each other, the first driving 110 transverse-vibrations of foot
Motion block and mover 030 depart from；The pumping signal of first laminated piezoelectric 113 is c, and driving voltage at this time is in uphill slope, the first pressure
Electric lamination 113 slowly extends, and the elongation of the first laminated piezoelectric 113 makes the first driving 110 transverse-vibration motion blocks of foot to anti-glide direction
Movement；The pumping signal of 4th magnetic part 3313 is a, and the pumping signal of the 3rd magnetic part 3311 is d, the second electromagnetism group 331 at this time
The electrode of generation is in the same direction, and mutually exclusive, the normal pressure between the second driving 130 transverse-vibration motion blocks of foot and mover 030 is maximum；The
The pumping signal of two laminated piezoelectrics 133 is e, and driving voltage is in uphill slope, the second slowly elongation of laminated piezoelectric 133, the second piezoelectricity
The elongation of lamination 133 makes the second driving 130 transverse-vibration motion blocks of foot be moved to positive glide direction X；Only second driving foot 130 is done
Work(, therefore mover 030 is moved to positive glide direction X.
To sum up, first drive 110 driving stages of foot and the second driving 130 driving stages of foot that mover 030 can all slided to positive
Dynamic direction X movements, a cycle inner stator 010 do work twice.
Reverse friction drives process：The first step, the first driving foot 110 drive the stage, while to laminated piezoelectric and electromagnetism group
Applying pumping signal as shown in Figure 8, the pumping signal of the second magnetic part 3113 is a, and the pumping signal of the first magnetic part 3111 is b,
The electrode that the first electromagnetism group 311 at this time generates is in the same direction, mutually exclusive, 111 He of the first driving head of the first driving foot 110
Normal pressure between mover 030 is maximum；The pumping signal of first laminated piezoelectric 113 is c, and driving voltage at this time is in uphill slope,
The first slowly elongation of laminated piezoelectric 113, the elongation of the first laminated piezoelectric 113 make the first driving head 111 of the first driving foot 110
It is moved to anti-glide direction；The pumping signal of 4th magnetic part 3313 is a, and the pumping signal of the 3rd magnetic part 3311 is d, at this time the
The electrode that two electromagnetism groups 331 generate is incorgruous, is attracted each other, and the second driving head 131 and mover 030 of the second driving foot 130 are de-
From；The pumping signal of second laminated piezoelectric 133 is e, and driving voltage at this time is in uphill slope, and the second laminated piezoelectric 133 is slowly stretched
Long, the elongation of the second laminated piezoelectric 133 makes the second driving head 131 of the second driving foot 130 be moved to positive glide direction X；Only
First driving foot 110 does work, therefore mover 030 is moved to positive glide direction X.
Second step, the second driving foot 130 drive the stage, and the pumping signal of the second magnetic part 3113 is a, the first magnetic part 3111
Pumping signal is b, and the electrode of the first electromagnetism group 311 generation at this time is incorgruous, is attracted each other, the first driving sufficient 110 at this time
First driving head 111 and mover 030 depart from；The pumping signal of first laminated piezoelectric 113 is c, and driving voltage is in descending grade, first
Laminated piezoelectric 113 is slowly shunk, and the contraction of the first laminated piezoelectric 113 makes the first driving head 111 of the first driving foot 110 to just
Glide direction X is moved；The pumping signal of 4th magnetic part 3313 is a, and the pumping signal of the 3rd magnetic part 3311 is d, at this time second
The electrode that electromagnetism group 331 generates be in the same direction, mutually exclusive, the second driving at this time 130 the second driving head 131 and mover 030 enough
Depart from and do not do work；The pumping signal of second laminated piezoelectric 133 is e, and driving voltage is in descending grade, and the second laminated piezoelectric 133 is slow
Slow to shrink, the contraction of the second laminated piezoelectric 133 makes the second driving head 131 of the second driving foot 130 move to anti-glide direction
Gesture；Only second driving foot 130 does work, therefore mover 030 is moved to anti-glide direction.
To sum up, first drive 110 driving stages of foot and the second driving 130 driving stages of foot that mover 030 can all slided to anti-
Dynamic direction movement, a cycle inner stator 010 do work twice.
2nd, biped differential mode：
Positive friction-driven process：The first step, the first driving foot 110 drive the stage, while to laminated piezoelectric and electromagnetism group
Applying pumping signal as shown in Figure 9, the pumping signal of the second magnetic part 3113 is a, and the pumping signal of the first magnetic part 3111 is b,
The electrode that the first electromagnetism group 311 at this time generates is in the same direction, mutually exclusive, 111 He of the first driving head of the first driving foot 110
Normal pressure between mover 030 is maximum；The pumping signal of first laminated piezoelectric 113 is c, and driving voltage at this time is in descending grade,
First laminated piezoelectric 113 is slowly shunk, and the contraction of the first laminated piezoelectric 113 makes the first driving head 111 of the first driving foot 110
It is moved to positive glide direction X；The pumping signal of 4th magnetic part 3313 is a, and the pumping signal of the 3rd magnetic part 3311 is d, at this time
The electrode of second electromagnetism group 331 generation is incorgruous, is attracted each other, and second drives the second driving head 131 of foot 130 at this time and moves
Son 030 departs from；The pumping signal of second laminated piezoelectric 133 is e, and driving voltage at this time is in uphill slope, the second laminated piezoelectric 133
Slowly elongation, the elongation of the second laminated piezoelectric 133 make the second driving head 131 of the second driving foot 130 be transported to positive glide direction X
It is dynamic；First driving head 111 of the only first driving foot 110 does work, and driving mover 030 is moved to positive glide direction X.
Second step, the second driving foot 130 drive the stage, and the pumping signal of the second magnetic part 3113 is a, the first magnetic part 3111
Pumping signal is b, and the electrode of the first electromagnetism group 311 generation at this time is incorgruous, is attracted each other, the first of the first driving foot 110
Driving head 111 and mover 030 depart from；The pumping signal of first laminated piezoelectric 113 is c, and driving voltage at this time is in uphill slope,
The slowly elongation of first laminated piezoelectric 113, the elongation of the first laminated piezoelectric 113 make the second driving enough 130 the second driving head 131 to
Anti- glide direction movement；The pumping signal of 4th magnetic part 3313 is a, and the pumping signal of the 3rd magnetic part 3311 is d, at this time second
Electromagnetism group 331 generate electrode be it is in the same direction, it is mutually exclusive, at this time second drive enough 130 the second driving head 131 and mover 030
Between normal pressure it is maximum；The pumping signal of second laminated piezoelectric 133 is e, and driving voltage at this time is in descending grade, the second piezoelectricity
Lamination 133 is slowly shunk, and contractions of the second laminated piezoelectric 133 makes the second driving head 131 of the second driving foot 130 to anti-slip side
To movement；Only second driving foot 130 does work, and mover 030 is moved to anti-glide direction.
To sum up, first drive 110 driving stages of foot and the second driving 130 driving stages of foot that mover 030 is made to be slided to positive respectively
Dynamic direction X is moved and moved to anti-glide direction, and when voltage peak-to-peak value e is less than voltage peak-to-peak value c, two driving foots are common
Driving motor mover 030 realizes a differential displacement to positive glide direction X.Since the differential displacement numerical value is less than single drive
The displacement that action spot generates, therefore the displacement resolution of motor can be improved.
Reverse friction drives process：The first step, the first driving foot 110 drive the stage, while to laminated piezoelectric and electromagnetism group
Applying pumping signal as shown in Figure 10, the pumping signal of the second magnetic part 3113 is a, and the pumping signal of the first magnetic part 3111 is b,
The electrode that the first electromagnetism group 311 at this time generates is in the same direction, mutually exclusive, 111 He of the first driving head of the first driving foot 110
Normal pressure between mover 030 is maximum；The pumping signal of first laminated piezoelectric 113 is c, and driving voltage at this time is in uphill slope,
The first slowly elongation of laminated piezoelectric 113, the elongation of the first laminated piezoelectric 113 make the first driving head 111 of the first driving foot 110
It is moved to anti-glide direction；The pumping signal of 4th magnetic part 3313 is a, and the pumping signal of the 3rd magnetic part 3311 is d, at this time the
The electrode that two electromagnetism groups 331 generate is incorgruous, is attracted each other, and the second driving head 131 and mover 030 of the second driving foot 130 are de-
From；The pumping signal of second laminated piezoelectric 133 is e, and driving voltage at this time is in descending grade, and the second laminated piezoelectric 133 is slowly received
Contracting, the contraction of the second laminated piezoelectric 133 make the second driving head 131 of the second driving foot 130 be moved to anti-glide direction；Only
One driving foot 110 does work, and mover 030 is moved to anti-glide direction.
Second step, the second driving foot 130 drive the stage, and the pumping signal of the second magnetic part 3113 is a, the first magnetic part 3111
Pumping signal is b, and the electrode of the first electromagnetism group 311 generation at this time is incorgruous, is attracted each other, the first of the first driving foot 110
Driving head 111 and mover 030 depart from；The driving voltage of first laminated piezoelectric 113 is in descending grade, and the first laminated piezoelectric 113 is slowly
It shrinks, the contraction of the first laminated piezoelectric 113 makes the first driving head 111 of the first driving foot 110 be moved to positive glide direction X；The
The pumping signal of four magnetic parts 3313 is a, and the pumping signal of the 3rd magnetic part 3311 is d, the electricity of the second electromagnetism group 331 generation at this time
Extremely in the same direction, mutually exclusive, the normal pressure at this time between the second driving head 131 of the second driving foot 130 and mover 030 is maximum；The
The driving voltage of two laminated piezoelectrics 133 is in uphill slope, and the second laminated piezoelectric 133 slowly stretch by elongation, the second laminated piezoelectric 133
Long the second driving head 131 for making the second driving foot 130 is moved to positive glide direction X；Only second driving foot 130 does work, mover
030 moves to positive glide direction X.
To sum up, first drive 110 driving stages of foot and the second driving 130 driving stages of foot that mover 030 is made to be slided to anti-respectively
Dynamic direction moves and is moved to positive glide direction X, and when voltage peak-to-peak value c is more than voltage peak-to-peak value e, two driving foots are common
Driving motor mover 030 realizes a differential displacement to anti-glide direction.Since the differential displacement numerical value is less than single drive
The displacement that action spot generates, therefore the displacement resolution of motor can be improved.
By biped type piezoelectricity electromagnetism hybrid linear motor 001 provided by the invention, motor can be in 1Hz-1Khz models
Interior work is enclosed, motor stator 010 is off-resonance working condition.Under biped walking mode, motor has fair speed and larger
Thrust can realize micron order and submicron-level positioning accuracy；Under biped differential mode, motor has low speed and high thrust
Feature can realize submicron order and nano grade positioning precision.
The foregoing is merely the preferred embodiment of the present invention, are not intended to limit the invention, for this field
For technical staff, the invention may be variously modified and varied.Within the spirit and principles of the invention, that is made is any
Modification, equivalent substitution, improvement etc., should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of biped type piezoelectricity electromagnetism hybrid linear motor, which is characterized in that including stator, mover, pedestal and mounting base；
The mover is slidably connected with the pedestal；
The stator includes the mover is driven to be slided forward or backwards in glide direction first driving foot and second
Driving foot；
The stator further includes frame, and the frame has to install the first driving foot and the described second driving foot
Installation space；
The first driving foot has the first driving side, is provided between first driving side and the frame described in driving
First driving foot is in the first laminated piezoelectric of glide direction movement；The second driving foot has away from the described first driving
Second driving side of side is provided with driving the second driving foot in the cunning between second driving side and the frame
Second laminated piezoelectric of dynamic direction movement；
The first magnetic part is fixedly installed on the pedestal；It is described first driving foot away from the mover one end be provided with it is described
Second magnetic part of the first magnetic part cooperation；The 3rd magnetic part is further fixedly arranged on the pedestal；The second driving foot is away from described
One end of mover is provided with the 4th magnetic part with the 3rd magnetic part cooperation；
The mounting base has the first leaf spring being fixedly mounted on the pedestal, and first leaf spring is perpendicular to first magnetic
The axial direction of first electromagnetism group of part and the second magnetic part composition, the frame are connected with first leaf spring；
The first electromagnetism group is parallel with the axial direction for the second electromagnetism group that the 3rd magnetic part and the 4th magnetic part form.
2. biped type piezoelectricity electromagnetism hybrid linear motor according to claim 1, which is characterized in that the frame bag
The first frame and the second frame are included, the installation space is also classified into second in the first space in first frame and second frame
Space, the first driving foot are placed in first space, and the second driving foot is placed in the second space.
3. biped type piezoelectricity electromagnetism hybrid linear motor according to claim 2, which is characterized in that first driving
Foot has threeth driving side opposite with first driving side, passes through first between the 3rd driving side and first frame
Elastic preload piece connection, the described first elastic preload piece have the elastic force parallel to the glide direction.
4. biped type piezoelectricity electromagnetism hybrid linear motor according to claim 2, which is characterized in that second driving
Foot has fourth driving side opposite with second driving side, passes through second between the 4th driving side and second frame
Elastic preload piece connection, the described second elastic preload piece have the elastic force parallel to the glide direction.
5. biped type piezoelectricity electromagnetism hybrid linear motor according to claim 2, which is characterized in that the first magnetic part
It is fixed by the first fixed seat, first fixed seat is fixedly mounted on the pedestal, and first fixed seat, which has, to be used for
First stationary plane of the fixed first magnetic part；The 3rd magnetic part is fixed by the second fixed seat, and second fixed seat is consolidated
On the pedestal, second fixed seat has the second stationary plane for fixing the 3rd magnetic part for Dingan County.
6. biped type piezoelectricity electromagnetism hybrid linear motor according to claim 5, which is characterized in that described first fixes
Face is vertical with the axis of the first electromagnetism group, and first stationary plane is vertical with the axis of the second electromagnetism group.
7. biped type piezoelectricity electromagnetism hybrid linear motor according to claim 1, which is characterized in that the frame leans on
One end of the nearly mover is additionally provided with the second leaf spring, and the frame is connected with second leaf spring.
8. biped type piezoelectricity electromagnetism hybrid linear motor according to claim 2, which is characterized in that first piezoelectricity
The first guide part is additionally provided between lamination and first frame, is also set up between second laminated piezoelectric and second frame
There is the second guide part.
9. a kind of electric excitation method thereof, which is characterized in that mixed using such as claim 1-8 any one of them biped type piezoelectricity electromagnetism
Box-like linear motor；
The identical symmetric periodic signal of phase is applied to first laminated piezoelectric and second laminated piezoelectric, to described second
Magnetic part and the 4th magnetic part apply identical pumping signal, apply opposite in phase to the first magnetic part and the 3rd magnetic part
Square-wave signal.
10. a kind of electric excitation method thereof, which is characterized in that using such as claim 1-8 any one of them biped type piezoelectricity electromagnetism
Hybrid linear motor；
Apply the symmetric periodic signal of opposite in phase to first laminated piezoelectric and second laminated piezoelectric, to described second
Magnetic part and the 4th magnetic part apply identical pumping signal, apply opposite in phase to the first magnetic part and the 3rd magnetic part
Square-wave signal.
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