CN103427704B - Biped drives piezoelectric linear motor and electric excitation mode - Google Patents
Biped drives piezoelectric linear motor and electric excitation mode Download PDFInfo
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- CN103427704B CN103427704B CN201310327108.7A CN201310327108A CN103427704B CN 103427704 B CN103427704 B CN 103427704B CN 201310327108 A CN201310327108 A CN 201310327108A CN 103427704 B CN103427704 B CN 103427704B
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Abstract
The invention discloses a kind of biped and drive piezoelectric linear motor and electric excitation mode, motor is made up of two stator pack, mover/line slideway, precompressed guide rail, pre-compressed spring and pedestal; Two stator pack distribute along axial symmetry, and one end and precompressed guide rail are connected, and one end and pedestal are connected; Under the elastic-restoring force effect that pre-compressed spring elastic deformation produces, two stator pack and mover/line slideway keep in touch, and make piezoelectric linear motor have the function that cuts off self-lock.Stator pack is made up of piezoelectric actuating unit, flexible connecting member, driving foot, and piezoelectric actuating unit two ends are connected with pedestal with driving foot by flexible connecting member.Piezoelectric actuating unit is modularized structure, makes whole motor structure simple, improves the efficiency of assembling of motor, and it is raw to be easy to realize mass.By applying specific driving voltage signal to stacked piezoelectric group of ceramics in piezoelectric actuating unit, two stator pack can be made to drive sufficient driven mover/line slideway moving linearly.
Description
Technical field:
The present invention relates to biped and drive piezoelectric linear motor and electric excitation mode, belong to Precision Piezoelectric actuation technology field.
Background technology:
In recent years, along with the fast development of the high-technology fields such as IC manufacturing, biomedicine, precision manufactureing, photoelectron/optical fiber industry, in the urgent need to micro-, nano level driver.And traditional electrical magnetic driven device is due to factors such as efficiency during microminiaturization is low, positioning precision is not high, complex structures, can not meet the demands completely.So countries in the world start to explore and research and develop the various next-generation drives that can meet above-mentioned requirements.
Electric energy conversion can be mechanical energy by the inverse piezoelectric effect of piezoelectric ceramic, micron-sized for piezoelectric ceramic double vibrations is converted into mover one-way movement by the mode of friction coupling by the piezoelectric linear motor of effect design accordingly, have cut off self-lock, can directly promote load, precision high, respond the features such as fast, have broad application prospects at precision positioning, fiber alignment, photorefractive crystals, Medical Devices, weaponry and aerospace field.
Piezoelectric linear motor can be divided into resonant and non-resonant two kinds according to mode of vibration.Resonant piezoelectric linear motor is the rectilinear motion utilizing the inverse piezoelectric effect of piezoelectric element and ultrasonic vibration principle elastomeric micro breadth oscillation to be converted to mover macroscopic view by resonance amplification and friction coupling principle.Resonance state is a kind of labile state, and the natural frequency of stator can change along with the change of temperature etc., causes operating frequency to be drifted about; And near resonance frequency, the minor variations of driving frequency all can make the speed generation significant change of motor, and this greatly have impact on the stability of motor.Resonant motor is owing to being subject to the impact of structural modal larger in addition, many employings single-driving foot designs, be operated in ultrasonic frequency domain (> 20KHz), in low-frequency range (< 2KHz) motor drive foot effectively can not depart from mover guide rail, thus this frequency-domain segment be lost efficacy.Non-resonant piezoelectric linear motor adopts stacked piezoelectric pottery as exciting element, it can have larger displacement to export under less voltage driven, stator can make driving foot produce enough amplitudes to drive mover without the need to resonance, thus improves the stability of motor.
Stacked piezoelectric pottery has the feature of high thrust, for overcoming the restriction of its stroke, there is the piezoelectricity stepping motor also adopting alternately clamp mode work with stacked piezoelectric pottery as power source, this kind of motor can have unlimited stroke while thrust output, unlimited closed loop location resolution can also be obtained, owing to adopting the mode of stiction coupling to export step motion, this actuator has larger thrust than adopting the resonant ultrasound electric machine of force of sliding friction coupled modes.But prior art has following four technical barriers:
First, the crucial Shi Yaoliangge clamp unit that Inchworm type clamp step piezoelectric motor can realize stepping alternately can lock closed slide, a segment distance and two clamp units are separated by the movement direction, this requires that the depth of parallelism of closed slide is enough high, under prior art condition, it is very difficult that two guide rails realizing longer distance have the higher depth of parallelism, needs higher cost of manufacture.
The second, the closed slide of Inchworm type clamp step piezoelectric motor is fixing, and the wearing and tearing at clamp units two ends cannot realize clamp by finally causing, and causes losing efficacy.
3rd, stacked piezoelectric pottery can only bear less pulling force, but can bear larger thrust, and therefore, when driver element shortens, the acting ability of stacked piezoelectric pottery is just very little, and this just reduces the efficiency of mover.
4th, when all stacked piezoelectrics pottery all power-off, the coupling mechanism force between clamp units and closed slide much smaller than the coupling mechanism force of clamp units locking closed slide, the therefore ability that almost do not cut off self-lock of Inchworm type clamp step piezoelectric motor.
Summary of the invention:
The invention provides a kind of biped and drive piezoelectric linear motor and electric excitation mode, it is large that it has thrust, Long Distances, and efficiency is high, and the life-span is long, and cost is low, can bidirectional-movement and possess the function that cuts off self-lock.
The present invention adopts following technical scheme: a kind of biped drives piezoelectric linear motor, and it comprises the first stator pack, second stator pack, mover/line slideway, precompressed guide rail, pre-compressed spring and pedestal, described first stator pack, second stator pack distributes along axial symmetry, described first stator pack, one end and the precompressed guide rail of the second stator pack are connected, and the other end and pedestal are connected, and described pre-compressed spring is by the first stator pack, second stator pack is pressed between mover/line slideway and precompressed guide rail, described first stator pack, keep in touch piezoelectric linear motor is cut off self-lock with described mover/line slideway under the elastic-restoring force effect that second stator pack produces in pre-compressed spring elastic deformation, described first stator pack comprises the first piezoelectric actuating unit, second piezoelectric actuating unit, one drives foot, first flexible connecting member, second flexible connecting member, 3rd flexible connecting member, 4th flexible connecting member, described first piezoelectric actuating unit is connected by the first flexible connecting member and the second flexible connecting member with driving foot, described second piezoelectric actuating unit is connected by the 3rd flexible connecting member and the 4th flexible connecting member with driving foot, described first piezoelectric actuating unit, it is mutually vertical that second piezoelectric actuating unit makes rotation axis, it is parallel with mover/line slideway direction of motion that described first piezoelectric actuating unit makes rotation axis, it is vertical with mover/line slideway direction of motion that described second piezoelectric actuating unit makes rotation axis, described first flexible connecting member, second flexible connecting member, 3rd flexible connecting member and the 4th flexible connecting member offer two groups of class " M " type slots, and two groups of slots are symmetrical and do 90 ° of torsions along axis along cross section.
Described first piezoelectric actuating unit is divided into the first back-up block, second back-up block, first extension spring, second extension spring, first pin, second pin, first axle card, second axle card, first stacked piezoelectric group of ceramics, fixing voussoir, adjustment voussoir and adjustment block, described first back-up block, second back-up block is by the first extension spring, second extension spring and the first pin, second pin links into an integrated entity, described first stacked piezoelectric group of ceramics and fixing voussoir, adjustment voussoir and adjustment block axially serial connection are placed in the first back-up block, between the second back-up block, apply pretightning force to the first stacked piezoelectric group of ceramics by the wedging of described adjustment voussoir, described first axle card, second axle card is placed in the first pin respectively, second dowel ends, fix the first pin, second pin is along hole to moving.
Described driving foot comprises the sufficient body of driving and is bonded in the Ceramic Balls driving sufficient body end, and described driving foot bulk material is 45# steel, and Ceramic Balls material is zirconia or silicon nitride.
Described second piezoelectric actuating unit includes the second stacked piezoelectric group of ceramics, and the structure of described second stator pack is identical with the structure of described first stator pack.
Include the 3rd piezoelectric actuating unit and the 4th piezoelectric actuating unit in described second stator pack, described 3rd piezoelectric actuating unit and the 4th piezoelectric actuating unit include triple stack layers piezoelectric ceramic group, the 4th stacked piezoelectric group of ceramics respectively.
The present invention also adopts following technical scheme: a kind of biped drives the electric excitation mode of piezoelectric linear motor:
Four groups of stacked piezoelectric group of ceramics on exciting electric first stator pack, the second stator pack four piezoelectric actuating unit, make driving foot driven mover/line slideway; Following two kinds of energisation modes can be taked respectively:
First kind of way, apply same frequency and anti-phase sine voltage signal to perpendicular to the mover/line slideway direction of motion second stacked piezoelectric group of ceramics, the 4th stacked piezoelectric group of ceramics, to being parallel to the mover/line slideway direction of motion first stacked piezoelectric group of ceramics, triple stack layers piezoelectric ceramic group applies and the second stacked piezoelectric group of ceramics, the 4th stacked piezoelectric group of ceramics same frequency and have the sine voltage signal of pi/2 phase difference;
The second way, apply same frequency and anti-phase square wave voltage signal to perpendicular to the mover/line slideway direction of motion second stacked piezoelectric group of ceramics, the 4th stacked piezoelectric group of ceramics, to being parallel to the mover/line slideway direction of motion first stacked piezoelectric group of ceramics, triple stack layers piezoelectric ceramic group applies and the second stacked piezoelectric group of ceramics, the 4th stacked piezoelectric group of ceramics same frequency is with the triangle wave voltage signal of initial phase.
Pumping signal negate in the mover/line slideway direction of motion first stacked piezoelectric group of ceramics, triple stack layers piezoelectric ceramic group is parallel to, to make motor counter motion to being applied to.
The present invention has following beneficial effect:
(1) double-driving foot is adopted to design in piezoelectric motor of the present invention, solve the problem that can not with guide rail depart from of single-driving foot motor at lower frequency region on the one hand, solve non-resonant looper motor clamping force deficiency and two clamp units problems apart from each other on the other hand, a pair driving foot is in same position and close to each other in the direction of motion of mover, alternate differential both during work, one-period drives foot acting twice, improves electric efficiency; The contact force produced needed for frictional force is provided by pre-compressed spring, makes full use of the advantage that stacked piezoelectric pottery compressional stiffness is large, not only increase motor thrust, and ensure that the stable of thrust;
(2) the driving foot of motor of the present invention is pressed on mover by pre-compressed spring all the time, this ability motor being had cut off self-lock; And this can aggravate to drive foot and the wearing and tearing of mover guide rail, motor of the present invention to drive sufficient end to adopt the ceramic material of hard high-wearing feature, this useful life of motor of will greatly improve;
(3) piezoelectric actuating unit of the present invention is modularized structure, makes whole motor structure simple, improves the efficiency of assembling of motor, and be easy to realize mass production;
(4) piezoelectric motor of the present invention is due to two groups of orthogonal placements of piezoelectric actuating unit, and mode of operation is simple, can adopt two kinds of different excitation signal drive motors motions; Only need be parallel to pumping signal negate in the mover direction of motion stacked piezoelectric group of ceramics during work, motor counter motion can be realized.
Accompanying drawing illustrates:
Fig. 1 is that biped of the present invention drives piezoelectric linear motor structure principle chart.
Fig. 2 (a) is piezoelectric motor stator pack constituent components STRUCTURE DECOMPOSITION figure.
Fig. 2 (b) is each constituent components STRUCTURE DECOMPOSITION figure of piezoelectric actuating unit.
Fig. 3 is that biped of the present invention drives piezoelectric linear motor two kinds of electric excitation signal sequential charts.
Wherein:
1-first stator pack; 1 '-the second stator pack; 2-mover/line slideway; 3-precompressed guide rail; 4-pre-compressed spring; 5-pedestal; A-first piezoelectric actuating unit; B-second piezoelectric actuating unit; C-drives foot; C1-drives sufficient body; C2-Ceramic Balls; D-first flexible connecting member; E-second flexible connecting member; F-the 3rd flexible connecting member; G-the 4th flexible connecting member; A1-first back-up block; A2-second back-up block; A3-first extension spring, a4-second extension spring; A5-first pin; A6-second pin; A7-first axle card; A8-second axle card; A9-first stacked piezoelectric group of ceramics; B9-second stacked piezoelectric group of ceramics; A9 '-triple stack layers piezoelectric ceramic group; B9 '-four stacked piezoelectric group of ceramics; Aa-fixes voussoir; Ab-adjusts voussoir; Ac-adjustment block.
Embodiment:
Please refer to shown in Fig. 1 to Fig. 3, biped of the present invention drives piezoelectric linear motor, is made up of the first stator pack 1, second stator pack 1 ', mover/line slideway 2, precompressed guide rail 3, pre-compressed spring 4 and pedestal 5.Wherein the first stator pack 1, second stator pack 1 ' of piezoelectric linear motor is along axial symmetry distribution, and one end and precompressed guide rail 3 are connected, and one end and pedestal 5 are connected; Under the elastic-restoring force effect that pre-compressed spring 4 elastic deformation produces, the first stator pack 1, second stator pack 1 ' keeps in touch with mover/line slideway 2, makes piezoelectric linear motor have the function that cuts off self-lock.
First stator pack 1, second stator pack 1 ' is placed side by side, symmetrical along Y-axis, is pressed between mover/line slideway 2 and precompressed guide rail 3 by pre-compressed spring 4 by the first stator pack 1, second stator pack 1 '; First stator pack 1, second stator pack 1 ' can be connected on precompressed guide rail 3 and pedestal 5 by securing member (sign).
Above-mentioned piezoelectric linear motor first stator pack 1, second stator pack 1 ' structure is identical, now state the structure only specifically introducing piezoelectric linear motor first stator pack 1, the structure of structure reference piezoelectric linear motor first stator pack 1 of piezoelectric linear motor second stator pack 1 '.Wherein piezoelectric linear motor first stator pack 1 comprises the first piezoelectric actuating unit a, the second piezoelectric actuating unit b, driving sufficient c, the first flexible connecting member d, the second flexible connecting member e, the 3rd flexible connecting member f, a 4th flexible connecting member g; First piezoelectric actuating unit a, the second piezoelectric actuating unit b are connected by the first flexible connecting member d, the second flexible connecting member e, the 3rd flexible connecting member f, the 4th flexible connecting member g with the sufficient c of driving; First piezoelectric actuating unit a, that the second piezoelectric actuating unit b makes rotation axis is mutually vertical, wherein to make rotation axis parallel with mover/line slideway direction of motion for the first piezoelectric actuating unit a, and it is vertical with mover/line slideway direction of motion that the second piezoelectric actuating unit b makes rotation axis.First flexible connecting member d, the second flexible connecting member e, the 3rd flexible connecting member f, the 4th flexible connecting member g offer two groups of class ' M ' type slots, two groups of slots are symmetrical and do 90 ° of torsion along axis, so that the sufficient c of driving can at XOY in-plane moving along cross section.
Fig. 2 (a) is piezoelectric motor stator pack constituent components STRUCTURE DECOMPOSITION figure, during assembling, first the first flexible connecting member d, the second flexible connecting member e are screwed in the first piezoelectric actuating unit a two ends, 3rd flexible connecting member f, the 4th flexible connecting member g are screwed in the second piezoelectric actuating unit b two ends, then be vertically connected to kit form and drive sufficient c two ends, make stator pack spatially in 90 ° orthogonal.
Above-mentioned biped drives piezoelectric linear motor to drive sufficient c to comprise and drives sufficient body c1 and be bonded in the Ceramic Balls c2 driving sufficient body c1 end, sufficient body c1 material is driven to be 45# steel, Ceramic Balls c2 material is zirconia or silicon nitride, to improve the resistance to wear driving foot, thus improves the life-span of motor.
Above-mentioned piezoelectric actuating unit is modularized structure, is divided into the first back-up block a1, the second back-up block a2, the first extension spring a3, the second extension spring a4, the first pin a5, the second pin a6, the first axle card a7, the second axle card a8, the first stacked piezoelectric group of ceramics a9, fixing voussoir aa, adjustment voussoir ab and adjustment block ac; First back-up block a1, the second back-up block a2 are linked into an integrated entity by the first extension spring a3, the second extension spring a4 and the first pin a5, the second pin a6; First stacked piezoelectric group of ceramics a9 and fixing voussoir aa, adjust voussoir ab and adjustment block ac and be axially connected in series and be placed between the first back-up block a1, the second back-up block a2; Apply pretightning force to the first stacked piezoelectric group of ceramics a9 by the wedging of adjustment voussoir ab; First axle card a7, the second axle card a8 are placed in the first pin a5, the second pin a6 end, fix the first pin a5, the second pin a6 along hole to moving.
Fig. 2 (b) is each constituent components STRUCTURE DECOMPOSITION figure of piezoelectric actuating unit, first the first back-up block a1, the second back-up block a2 are connected by the first pin a5, the second pin a6 with the first extension spring a3, the second extension spring a4 during assembling, in the first pin a5, the second pin a6 end, the first axle card a7, the second axle card a8 are installed, in case shotpin nail moves along hole direction of principal axis.Then by the first stacked piezoelectric group of ceramics a9 and fixing voussoir aa, adjust voussoir ab and adjustment block ac and be axially connected in series and be placed between the first back-up block a1, the second back-up block a2, constituent components piezoelectric actuating unit.In the present invention, the flexible connecting member at piezoelectric actuating unit two ends goes out two groups of class ' M ' type slots by linear cutter, first at one end cuts out Article 1 slot, after flexible connecting member is cut out Article 2 slot after cross section overturns and rotates about the axis 90 °.
Drive the first stator pack 1 in piezoelectric linear motor to include the first piezoelectric actuating unit a, the second piezoelectric actuating unit b at biped of the present invention, it includes the first stacked piezoelectric group of ceramics a9, the second stacked piezoelectric group of ceramics b9.Because the structure of piezoelectric linear motor second stator pack 1 ' in the present invention is identical with the structure of piezoelectric linear motor first stator pack 1, same, also include two piezoelectric actuating unit (sign) in piezoelectric linear motor second stator pack 1 ', it includes triple stack layers piezoelectric ceramic group a9 ', the 4th stacked piezoelectric group of ceramics b9 '.
Please refer to Fig. 1 to Fig. 2 and shown in composition graphs 3, biped of the present invention drives the electric excitation mode of piezoelectric linear motor as follows: exciting electric first stator pack 1, second stator pack 1 ' four makes four groups of stacked piezoelectric group of ceramics a9 on moving cell, b9, a9 ', b9 ', make driving foot driven mover/line slideway; Electric excitation mode I is apply same frequency and anti-phase sine voltage signal to perpendicular to the mover/line slideway direction of motion second stacked piezoelectric group of ceramics b9, the 4th stacked piezoelectric group of ceramics b9 ', applies with the second stacked piezoelectric group of ceramics b9 (or the 4th stacked piezoelectric group of ceramics b9 ') same frequency and the sine voltage signal having pi/2 phase difference being parallel to the mover/line slideway direction of motion first stacked piezoelectric group of ceramics a9, triple stack layers piezoelectric ceramic group a9 '.Electric excitation mode II is apply same frequency and anti-phase square wave voltage signal to perpendicular to the mover/line slideway direction of motion second stacked piezoelectric group of ceramics b9, the 4th stacked piezoelectric group of ceramics b9 ', applies and the triangle wave voltage signal of the second stacked piezoelectric group of ceramics b9 (or the 4th stacked piezoelectric group of ceramics b9 ') same frequency with initial phase being parallel to the mover/line slideway direction of motion first stacked piezoelectric group of ceramics a9, triple stack layers piezoelectric ceramic group a9 '.
To electric excitation mode I or II, being parallel to the upper pumping signal negate of the mover/line slideway direction of motion first stacked piezoelectric group of ceramics a9, triple stack layers piezoelectric ceramic group a9 ' to being applied to, motor counter motion can be made.
By applying two kinds of electric excitation signals as shown in Figure 3 to four groups of stacked piezoelectric group of ceramics on two groups of stators, four groups of stacked piezoelectric potteries are done corresponding elongation and are shortened, by friction-driven mover/line slideway moving linearly.In an actuation cycles T, the action sequence of motor is as follows:
In the 0-T/2 stage, extend perpendicular to the mover/line slideway direction of motion second stacked piezoelectric group of ceramics b9,4th stacked piezoelectric group of ceramics b9 ' shortens, driving in piezoelectric linear motor first stator pack 1 foot is contacted with mover/line slideway, and the driving foot in piezoelectric linear motor second stator pack 1 ' departs from mover/line slideway.Be parallel to the mover/line slideway direction of motion first stacked piezoelectric group of ceramics a9 to extend, the driving foot in piezoelectric linear motor first stator pack 1 promotes mover/line slideway along X-axis positive movement;
At T/2-T, shorten perpendicular to the mover/line slideway direction of motion second stacked piezoelectric group of ceramics b9,4th stacked piezoelectric group of ceramics b9 ' extends, driving in piezoelectric linear motor first stator pack 1 foot is departed from mover/line slideway, and the driving foot in piezoelectric linear motor second stator pack 1 ' contacts with mover/line slideway.Be parallel to mover/line slideway direction of motion triple stack layers piezoelectric ceramic group a9 ' to shorten, the driving foot in piezoelectric linear motor second stator pack 1 ' promotes mover/line slideway to be continued along X-axis positive movement.
Repeat by above-mentioned sequential, piezoelectric motor will promote the continuous one-way movement of movement parts.By to being parallel to the mover/line slideway direction of motion first stacked piezoelectric group of ceramics a9 and the negate of triple stack layers piezoelectric ceramic group a9 ' electric excitation, the counter motion of mover/line slideway can be realized.
The above is only the preferred embodiment of the present invention, it should be pointed out that for those skilled in the art, can also make some improvement under the premise without departing from the principles of the invention, and these improvement also should be considered as protection scope of the present invention.
Claims (7)
1. a biped drives piezoelectric linear motor, it comprises the first stator pack (1), second stator pack (1 '), mover/line slideway (2), precompressed guide rail (3), pre-compressed spring (4) and pedestal (5), it is characterized in that: described first stator pack (1), second stator pack (1 ') distributes along axial symmetry, described first stator pack (1), one end and the precompressed guide rail (3) of the second stator pack (1 ') are connected, the other end and pedestal (5) are connected, described pre-compressed spring (4) is by the first stator pack (1), second stator pack (1 ') is pressed between mover/line slideway (2) and precompressed guide rail (3), described first stator pack (1), keep in touch piezoelectric linear motor is cut off self-lock with described mover/line slideway (2) under the elastic-restoring force effect that second stator pack (1 ') produces in pre-compressed spring (4) elastic deformation, described first stator pack (1) comprises the first piezoelectric actuating unit (a), second piezoelectric actuating unit (b), one drives foot (c), first flexible connecting member (d), second flexible connecting member (e), 3rd flexible connecting member (f), 4th flexible connecting member (g), described first piezoelectric actuating unit (a) is connected by the first flexible connecting member (d) and the second flexible connecting member (e) with driving foot (c), described second piezoelectric actuating unit (b) is connected by the 3rd flexible connecting member (f) and the 4th flexible connecting member (g) with driving foot (c), described first piezoelectric actuating unit (a), it is mutually vertical that second piezoelectric actuating unit (b) makes rotation axis, it is parallel with mover/line slideway direction of motion that described first piezoelectric actuating unit (a) makes rotation axis, it is vertical with mover/line slideway direction of motion that described second piezoelectric actuating unit (b) makes rotation axis, described first flexible connecting member (d), second flexible connecting member (e), 3rd flexible connecting member (f) and the 4th flexible connecting member (g) offer two groups of class " M " type slots, two groups of slots are symmetrical and do 90 ° of torsions along axis along cross section.
2. biped as claimed in claim 1 drives piezoelectric linear motor, it is characterized in that: described first piezoelectric actuating unit (a) is divided into the first back-up block (a1), second back-up block (a2), first extension spring (a3), second extension spring (a4), first pin (a5), second pin (a6), first axle card (a7), second axle card (a8), first stacked piezoelectric group of ceramics (a9), fixing voussoir (aa), adjustment voussoir (ab) and adjustment block (ac), described first back-up block (a1), second back-up block (a2) is by the first extension spring (a3), second extension spring (a4) and the first pin (a5), second pin (a6) links into an integrated entity, described first stacked piezoelectric group of ceramics (a9) and fixing voussoir (aa), adjustment voussoir (ab) and adjustment block (ac) axially serial connection are placed in the first back-up block (a1), between the second back-up block (a2), apply pretightning force, described first axle card (a7) to the first stacked piezoelectric group of ceramics (a9) by the wedging of described adjustment voussoir (ab), second axle card (a8) is placed in the first pin (a5) respectively, second pin (a6) end, fixes the first pin (a5), second pin (a6) is along hole to moving.
3. biped as claimed in claim 2 drives piezoelectric linear motor, it is characterized in that: the described foot (c) that drives comprises the sufficient body of driving (c1) and is bonded in the Ceramic Balls (c2) driving sufficient body (c1) end, the sufficient body of described driving (c1) material is 45# steel, and Ceramic Balls (c2) material is zirconia or silicon nitride.
4. biped as claimed in claim 3 drives piezoelectric linear motor, it is characterized in that: described second piezoelectric actuating unit (b) includes the second stacked piezoelectric group of ceramics (b9), the structure of described second stator pack (1 ') is identical with the structure of described first stator pack (1).
5. biped as claimed in claim 4 drives piezoelectric linear motor, it is characterized in that: in described second stator pack (1 '), include the 3rd piezoelectric actuating unit and the 4th piezoelectric actuating unit, described 3rd piezoelectric actuating unit and the 4th piezoelectric actuating unit include respectively triple stack layers piezoelectric ceramic group (a9 '), the 4th stacked piezoelectric group of ceramics (b9 ').
6. biped as claimed in claim 5 drives an electric excitation mode for piezoelectric linear motor, it is characterized in that:
Four groups of stacked piezoelectric group of ceramics on exciting electric first stator pack (1), the second stator pack (1 ') four piezoelectric actuating unit, make driving foot driven mover/line slideway; Following two kinds of energisation modes can be taked respectively:
First kind of way, apply same frequency and anti-phase sine voltage signal to perpendicular to the mover/line slideway direction of motion second stacked piezoelectric group of ceramics (b9), the 4th stacked piezoelectric group of ceramics (b9 '), to being parallel to the mover/line slideway direction of motion first stacked piezoelectric group of ceramics (a9), triple stack layers piezoelectric ceramic group (a9 ') applies and the second stacked piezoelectric group of ceramics (b9), the 4th stacked piezoelectric group of ceramics (b9 ') same frequency and have the sine voltage signal of pi/2 phase difference;
The second way, apply same frequency and anti-phase square wave voltage signal to perpendicular to the mover/line slideway direction of motion second stacked piezoelectric group of ceramics (b9), the 4th stacked piezoelectric group of ceramics (b9 '), to being parallel to the mover/line slideway direction of motion first stacked piezoelectric group of ceramics (a9), triple stack layers piezoelectric ceramic group (a9 ') applies with the second stacked piezoelectric group of ceramics (b9), the 4th stacked piezoelectric group of ceramics (b9 ') same frequency with the triangle wave voltage signal of initial phase.
7. biped as claimed in claim 6 drives the electric excitation mode of piezoelectric linear motor, it is characterized in that: be parallel to the mover/line slideway direction of motion first stacked piezoelectric group of ceramics (a9), the upper pumping signal negate of triple stack layers piezoelectric ceramic group (a9 '), to make motor counter motion to being applied to.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201310327108.7A CN103427704B (en) | 2013-07-31 | 2013-07-31 | Biped drives piezoelectric linear motor and electric excitation mode |
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| CN201310327108.7A CN103427704B (en) | 2013-07-31 | 2013-07-31 | Biped drives piezoelectric linear motor and electric excitation mode |
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| Publication Number | Publication Date |
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| CN103427704A CN103427704A (en) | 2013-12-04 |
| CN103427704B true CN103427704B (en) | 2016-01-13 |
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| CN105071686B (en) * | 2015-07-17 | 2017-08-04 | 南京航空航天大学 | A kind of symmetrical expression biped drives off-resonance piezoelectric linear motor |
| CN105743387B (en) * | 2016-03-30 | 2017-07-11 | 南京航空航天大学 | Alternating step piezoelectric linear electric motors based on lever amplification |
| CN105932900B (en) * | 2016-06-15 | 2018-04-17 | 南京航空航天大学 | A kind of biped driving off-resonance piezoelectric linear motor based on lever amplification |
| CN108155830A (en) * | 2018-02-26 | 2018-06-12 | 盐城工学院 | A kind of double-driving foot type linear piezoelectric motor and electric excitation method thereof |
| CN108092547A (en) * | 2018-02-26 | 2018-05-29 | 盐城工学院 | A kind of biped type piezoelectricity electromagnetism hybrid linear motor and electric excitation method thereof |
| CN108199611A (en) * | 2018-02-26 | 2018-06-22 | 盐城工学院 | A kind of double-driving foot type linear piezoelectric motor and electric excitation method thereof |
| CN108508361A (en) * | 2018-04-09 | 2018-09-07 | 南京航空航天大学 | A kind of linear piezoelectric motor electromechanical properties test system |
| CN110198141B (en) * | 2019-06-27 | 2024-02-02 | 华侨大学 | Differential clamping inchworm type piezoelectric linear motor |
| CN110233584B (en) * | 2019-06-27 | 2024-02-02 | 华侨大学 | Counterweight stepping mechanism |
| CN111030504B (en) * | 2019-12-24 | 2023-12-29 | 上海交通大学 | Piezoelectric ceramic composite driving actuator with fixedly installed two ends |
| CN112260578B (en) * | 2020-09-02 | 2022-01-04 | 广州大学 | Low-voltage driving V-shaped linear ultrasonic motor |
| CN112366977B (en) * | 2020-10-26 | 2021-10-01 | 南京航空航天大学 | Large-thrust large-stroke piezoelectric inchworm actuator and driving method thereof |
| CN112564542A (en) * | 2020-11-12 | 2021-03-26 | 东南大学 | Low-speed high-precision rotation driving device based on piezoelectric actuation principle |
| CN112737401B (en) * | 2020-12-30 | 2024-06-07 | 华侨大学 | Alternate rowing type piezoelectric linear motor |
| CN113029235B (en) * | 2021-02-25 | 2021-09-10 | 哈尔滨工业大学 | Small-stroke nanoscale motion platform and heat-related hysteresis data measuring method |
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