CN105897043A - Diamond-shaped hinge oblique-pulling quadratured driving type piezoelectric stick-slip linear motor and recombination excitation method thereof - Google Patents
Diamond-shaped hinge oblique-pulling quadratured driving type piezoelectric stick-slip linear motor and recombination excitation method thereof Download PDFInfo
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- CN105897043A CN105897043A CN201610386983.6A CN201610386983A CN105897043A CN 105897043 A CN105897043 A CN 105897043A CN 201610386983 A CN201610386983 A CN 201610386983A CN 105897043 A CN105897043 A CN 105897043A
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
Abstract
The invention relates to a diamond-shaped hinge oblique-pulling quadratured driving type piezoelectric stick-slip linear motor and a recombination excitation method thereof, aims to solve the problem that the output mechanical property of the current piezoelectric stick-slip linear motor is limited caused by difficulty in comprehensive control on a friction force. The piezoelectric stick-slip linear motor comprises a pre-tightening force adjustment device, an oblique-pulling stator and a rotor, wherein the oblique-pulling stator generates lateral displacement by an oblique-pulling diamond-shaped movement converter, the friction driving force is increased, and the friction resistance is reduced; and meanwhile, a friction control wave is combined and superposed to a sawtooth driving wave in a rapid deformation stage of the oblique-pulling stator, so that the friction resistance between the stator and the rotor in the rapid deformation stage is reduced, the comprehensive control on the friction force is achieved, and the mechanical output property of the piezoelectric stick-slip linear motor is improved. The piezoelectric stick-slip linear motor has the characteristics of compact structure, high precision, large stroke and the like, and has favorable application prospect in the fields with miniature structures, high positioning accuracy requirements and the like such as semiconductor processing and optical focusing.
Description
Technical field
The present invention relates to a kind of rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor and complex incentive method thereof, belong to micro-nano precision actuation and field of locating technology.
Background technology
Piezoelectricity stick-slip line motor is a kind of inverse piezoelectric effect utilizing piezoelectric element, excites oscillator (or weighed son) to produce micro breadth oscillation under Asymmetric Electric signal encourages, and is coupled the accurate piezo-electric motor realizing machinery output by the friction between oscillator with mover.According to the difference of driving operation principle, piezoelectricity stick-slip line motor is broadly divided into resonance type piezo-electric motor (also referred to as supersonic motor) and the big class of non-co-vibration shape piezo-electric motor (also referred to as piezoelectricity stick-slip motor) two.Compared with resonance type piezo-electric motor, off-resonance piezoelectricity stick-slip line motor has the advantages such as positioning precision is high, simple and compact for structure, easy to control, is widely used in the technical field of precision actuation and location.
Piezoelectricity stick-slip drives and mainly the saw tooth excitation signal of telecommunication is put on piezoelectric element, stator is excited to produce speed motion deformation alternately, control stator and mover is mutually changed between " gluing " and " cunning " two kinds of motion states, utilize frictional force drives mover to realize mechanical movement output.But, owing to piezoelectricity stick-slip drives slowly and the rapid deformation stage, between stator and mover, frictional force plays not same-action, shows as friction drive, and show as frictional resistance when rapid deformation drives the stage when being specially the slowly deformation driving stage.The technology of being disclosed shows current piezoelectricity stick-slip line motor cannot realize the frictional force of whole driving process and carries out comprehensive regulation, causes its output mechanical performance limited.Rapid deformation at stator especially drives the stage, owing to mover friction moves in opposite direction, when mover inertia force is not enough to overcome this frictional resistance, mover will be caused to produce rollback motion, show as the jagged unstable movement output of class, deterioration output performance, the existing saw tooth excitation signal of telecommunication cannot realize driving piezoelectricity stick-slip line motor rapid deformation the regulation and control of stage frictional force, further limit application and the development of piezoelectricity stick-slip line motor.
Summary of the invention
For solving existing piezoelectricity stick-slip line motor due to the comprehensive regulation difficulty that rubs between stator and mover, the mechanical output characteristics caused is limited, produce the unstable movement output of class zigzag, the technical problems such as deterioration driver machinery output performance, the invention discloses a kind of rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor and complex incentive method thereof.
The technical solution adopted in the present invention is:
Described a kind of rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor is made up of pre-tightening force adjusting device, cable-stayed type stator and mover.
Described pre-tightening force adjusting device is made up of erection support, Mobile Slide and pretightning force adjusting screw rod.Described erection support arranges mounting-positioning holes, positioning support plane, is used for installing mover；Installation screwed hole it is provided with, for the connection of erection support Yu peripheral unit bottom described erection support；Described erection support is provided with slideway stop screw, spacing for the movement of Mobile Slide；Described erection support is provided with travelling carriage, for the slip of Mobile Slide；Described erection support is provided with retainer trip bolt, stop bolt retainer and stop bolt, and for the locking to Mobile Slide, after preventing from loading, Mobile Slide moves；Described erection support is provided with slideway, is used for supporting Mobile Slide；Slideway stop screw installed by described slideway, it is to avoid Mobile Slide skids off slideway；Described erection support is provided with spring, lower spring steady pin, and the backhaul for Mobile Slide is moved；Described erection support is provided with loading screwed hole, and it is threadeded with pretightning force adjusting screw rod.Described Mobile Slide is provided with positioning spiro pit, is used for installing cable-stayed type stator；Described Mobile Slide is provided with Mobile Slide stop screw, spacing for the movement of Mobile Slide；Described Mobile Slide is provided with spring steady pin, is used for installing fixing spring；Described Mobile Slide side is provided with stop bolt installing hole, is used for installing stop bolt；Described Mobile Slide is provided with guiding slide bar, and for the mobile guide of Mobile Slide, described guiding slide bar is provided with Mobile Slide stop screw, it is to avoid Mobile Slide skids off slideway.Described pretightning force adjusting screw rod is threadeded with loading screwed hole, can be regulated the position of Mobile Slide by the precession length adjusting pretightning force adjusting screw rod, it is achieved the pre-tightening force adjusting device regulation to pretightning force.
Described cable-stayed type stator includes cable-stayed type rhombus converter, piezo-electric stack, pretension bolt and adjustment pad.Described cable-stayed type rhombus converter uses the hinge of diamond structure.Described cable-stayed type rhombus converter is provided with stator installing hole, for the fixed installation of cable-stayed type rhombus converter；Described cable-stayed type rhombus converter is provided with deflection hinge, circular arc flexible hinge, for regulating the axial rigidity of cable-stayed type rhombus converter；Described cable-stayed type rhombus converter is provided with cut type rhombus hinge, for regulating the deflection stiffness of cable-stayed type rhombus converter；Described cable-stayed type rhombus converter is provided with movement conversion mechanism, and described conversion of motion mechanism is provided with driving straight beam, motion conversion cant beam, and the axial vibratory displacement of piezo-electric stack can be converted to drive the lateral displacement of straight beam by described motion conversion cant beam.Described driving straight beam corresponding arc end topcoating has friction material, and described driving straight beam drives mover motion.Cable-stayed type stator uses cable-stayed type rhombus converter, when piezo-electric stack produces axial vibratory displacement, the driving straight beam of cable-stayed type rhombus converter can produce lateral displacement, increase friction drive when cable-stayed type stator slowly deforms the driving stage, reduce frictional resistance when cable-stayed type stator rapid deformation drives the stage, the comprehensive regulation to frictional force can be realized.Described pretension bolt installing hole is threadeded with pretension bolt.Described piezo-electric stack contacts end face with cable-stayed type rhombus converter, pretension bolt and is provided with adjustment pad, prevents it from producing shear strain.By regulation pretension bolt, the regulation of the axial pre tightening force to piezo-electric stack can be realized.
Described mover is the mover of rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor.Described mover is biserial decussation roller guide rail, including fixing guide rail, movable guiding rail, roller rolling retainer and guide rail caging bolt.Described fixing guide rail is arranged in positioning support plane by mounting-positioning holes；Described movable guiding rail has ceramic-like or glass fibre class friction material with driving straight beam contact jaw topcoating；Described mover is provided with roller rolling retainer, and the slip that roller rolling retainer is guide rail provides and guides；Described fixing guide rail and movable guiding rail two ends are provided with guide rail caging bolt, it is to avoid movable guiding rail skids off fixing guide rail.
The complex incentive signal of telecommunication employed in described complex incentive method by rub regulation and control ripple complex superposition in the driving ripple in cable-stayed type stator rapid deformation stage, described friction regulation and control ripple be sine wave, described driving ripple is sawtooth waveforms.The sawtooth that the complex incentive signal of telecommunication employed in described complex incentive method is superimposed on the cable-stayed type stator rapid deformation stage by the sinusoidal regulation and control ripple that rubs a little drives ripple to be composited, described complex incentive method can reduce the frictional resistance between rapid deformation stage cable-stayed type stator and mover, suppression rollback motion produces, and wherein sawtooth drives be T period of wave1, driving voltage amplitude is V1, symmetry is D, a little friction sine regulation and control period of wave be T2, driving voltage amplitude is V2, sawtooth drives ripple to be T with the period ratio of friction sine regulation and control ripple a little1/T2=10 ~ 100000, driving voltage Amplitude Ration is V1/V2More than 2.
The invention has the beneficial effects as follows: due to the fact that and use the asymmetric stator structure with frictional force comprehensive regulation function, encouraged by the complex incentive signal of telecommunication simultaneously, increase cable-stayed type stator and slowly deform friction drive between driving stage cable-stayed type stator and mover, reduce cable-stayed type stator rapid deformation and drive frictional resistance between stage cable-stayed type stator and mover, achieve the comprehensive regulation of frictional force to piezoelectricity stick-slip line motor whole driving process, piezoelectricity stick-slip line motor machinery output characteristics, the generation of suppression displacement rollback motion can be obviously improved.Compared with current prior art, power output promotes more than 25%, and output speed promotes more than 30%, and delivery efficiency improves more than 55%, and under open loop condition, positioning precision reduces by 30% up to nanoscale, displacement rollback rate.
Accompanying drawing explanation
Fig. 1 show the structural representation of the rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor that the present invention proposes；
Fig. 2 show the rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor pre-tightening force adjusting device structural representation that the present invention proposes；
Fig. 3 show the structural representation of the pre-tightening force adjusting device erection support of the rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor that the present invention proposes；
Fig. 4 show the pre-tightening force adjusting device Mobile Slide top view of the rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor that the present invention proposes；
Fig. 5 show the rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor pre-tightening force adjusting device Mobile Slide upward view that the present invention proposes；
Fig. 6 show the structural representation of the rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor cable-stayed type stator that the present invention proposes；
Fig. 7 show the structural representation of the rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor cable-stayed type stator cable-stayed type rhombus converter that the present invention proposes；
Fig. 8 show the partial enlargement structural representation of the rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor cable-stayed type stator cable-stayed type rhombus converter that the present invention proposes；
Fig. 9 show the Structure of mover schematic diagram of the rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor that the present invention proposes；
Figure 10 show the excitation electric signal waveform schematic diagram of the rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor that the present invention proposes.
Detailed description of the invention
Detailed description of the invention one: combine Fig. 1 ~ Fig. 9 and present embodiment is described.Present embodiments provide for the specific embodiments of a kind of rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor.Described a kind of rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor is made up of pre-tightening force adjusting device 1, cable-stayed type stator 2 and mover 3.
Described pre-tightening force adjusting device 1 is the pre-tightening force adjusting device of rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor, described pre-tightening force adjusting device 1 is made up of erection support 1-1, Mobile Slide 1-2 and pretightning force adjusting screw rod 1-3, and described pre-tightening force adjusting device 1 can use aluminum alloy materials.Described erection support 1-1 arranges mounting-positioning holes 1-1-1, positioning support plane 1-1-8, is used for installing mover 3；It is provided with installation screwed hole 1-1-2 bottom described erection support 1-1, is threaded connection the fixed installation that can realize with peripheral unit；Described erection support 1-1 is provided with slideway stop screw 1-1-3, spacing for the movement of Mobile Slide 1-2；Described erection support 1-1 is provided with travelling carriage 1-1-4, for the slip of Mobile Slide 1-2；Described erection support 1-1 is provided with retainer trip bolt 1-1-5, stop bolt retainer 1-1-6 and stop bolt 1-1-7, described stop bolt 1-1-7 fixing for Mobile Slide 1-2, by regulation stop bolt 1-1-7, can realize the locking to Mobile Slide 1-2, after preventing from loading, Mobile Slide 1-2 moves；Described erection support 1-1 is provided with slideway 1-1-9, is used for supporting Mobile Slide 1-2；Described slideway 1-1-9 is provided with 4n slideway stop screw 1-1-3, and wherein n is the integer more than or equal to 1, for avoiding Mobile Slide 1-2 to skid off slideway 1-1-9；Described erection support 1-1 is provided with spring 1-1-10, and the backhaul for Mobile Slide 1-2 is moved；Described erection support 1-1 is provided with lower spring steady pin 1-1-11, is used for installing fixing spring 1-1-10；Described erection support 1-1 is provided with loading screwed hole 1-1-12, and it is threadeded with pretightning force adjusting screw rod 1-3.Described Mobile Slide 1-2 is provided with positioning spiro pit 1-2-1, is used for installing cable-stayed type stator 2；Described Mobile Slide 1-2 is provided with Mobile Slide stop screw 1-2-2, spacing for the movement of Mobile Slide 1-2；Described Mobile Slide 1-2 is provided with spring steady pin 1-2-3, coordinates lower spring steady pin 1-1-11 to be used for installing fixing spring 1-1-10；Described Mobile Slide 1-2 side is provided with stop bolt installing hole 1-2-4, described stop bolt installing hole 1-2-4 and threadeds with stop bolt 1-1-7；Described Mobile Slide 1-2 is provided with guiding slide bar 1-2-5, and for the movement of Mobile Slide 1-2, described guiding slide bar 1-2-5 is provided with 4n Mobile Slide stop screw 1-2-2, and wherein n is the integer more than or equal to 1, for avoiding Mobile Slide 1-2 to skid off slideway 1-1-9.Described pretightning force adjusting screw rod 1-3 is threadeded with loading screwed hole 1-1-12, can be regulated the position of Mobile Slide 1-2 by the precession length adjusting pretightning force adjusting screw rod 1-3, it is achieved the pre-tightening force adjusting device 1 regulation to pretightning force.
Described cable-stayed type stator 2 includes cable-stayed type rhombus converter 2-1, piezo-electric stack 2-2, pretension bolt 2-3 and adjusts pad 2-4.Described cable-stayed type rhombus converter 2-1 uses the hinge of diamond structure, and described cable-stayed type rhombus converter 2-1 can use 5052,6061 or 7075 aluminum alloy materials.Described cable-stayed type rhombus converter 2-1 is provided with stator installing hole 2-1-1, for being fastenedly connected of upper surface of cable-stayed type rhombus converter 2-1 and Mobile Slide 1-2；Described cable-stayed type rhombus converter 2-1 is provided with deflection hinge 2-1-2, circular arc flexible hinge 2-1-5, and deflection hinge 2-1-2 has radius of corner value R1, circular arc flexible hinge 2-1-5 has radius of corner value R2, R1With R2Ratio be 0.1 ~ 1, adjust radius of corner R1With R2Ratio, can change cable-stayed type rhombus converter 2-1 axial rigidity distribution.R in present embodiment1With R2Ratio be 0.5.Described cable-stayed type rhombus converter 2-1 is provided with cut type rhombus hinge 2-1-3, and cut type rhombus hinge 2-1-3 wall thickness value is b, R1It is 0.1 ~ 0.45 with the ratio of b, adjusts wall thickness value b and radius of corner R1Ratio, the deflection stiffness of cable-stayed type rhombus converter 2-1 can be changed.R in present embodiment1It is 0.3 with the ratio of b.Described cable-stayed type rhombus converter 2-1 is provided with movement conversion mechanism 2-1-4, described conversion of motion mechanism 2-1-4 is provided with driving straight beam 2-1-4-1, motion conversion cant beam 2-1-4-2, described driving straight beam 2-1-4-1 forms certain angle φ with motion conversion cant beam 2-1-4-2, the value of φ is 45 ° ~ 90 °, and the value changing φ can regulate displacement equations multiple.In present embodiment, the value of φ is 45 °.The axial vibratory displacement of piezo-electric stack 2-2 can be converted to drive the lateral displacement of straight beam 2-1-4-1 by described motion conversion cant beam 2-1-4-2, described driving straight beam 2-1-4-1 corresponding circular arc type end face scribbles friction material, and described driving straight beam 2-1-4-1 drives mover 3 to move；Described driving straight beam 2-1-4-1 has length value L, width value a, and the value changing a can change the driving stationarity driving straight beam, and the ratio of a Yu L is 0.01 ~ 0.2, can change the deflection stiffness of driving straight beam 2-1-4-1 by adjusting the ratio of a Yu L.In present embodiment, the ratio value of a Yu L is 0.1.The ratio that described motion conversion cant beam 2-1-4-2 has width value c, c and a is 0.5 ~ 1.In present embodiment, the ratio of c Yu a is 0.5.Cable-stayed type stator 2 uses cable-stayed type rhombus motion structure, when piezo-electric stack 2-2 produces axial vibratory displacement, the driving straight beam 2-1-4-1 of cable-stayed type rhombus converter 2-1 can produce lateral displacement, increase friction drive when cable-stayed type stator 2 slowly deforms the driving stage, reduce frictional resistance when cable-stayed type stator 2 rapid deformation drives the stage, the comprehensive regulation to frictional force can be realized.Described pretension bolt installing hole 2-1-6 is threadeded with pretension bolt 2-3.Described piezo-electric stack 2-2 can be the piezo-electric stack product of the companies such as PI or NEC, described piezo-electric stack 2-2 contacts end face and is provided with adjustment pad 2-4 with cable-stayed type rhombus converter 2-1, pretension bolt 2-3, prevent it from producing shear strain, by regulation pretension bolt 2-3, the regulation of the axial pretightening to piezo-electric stack 2-2 can be realized.
Described mover 3 is the mover of rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor, and described mover 3 is biserial decussation roller guide rail, including fixing guide rail 3-1, movable guiding rail 3-2, roller rolling retainer 3-3 and guide rail caging bolt 3-4.Described fixing guide rail 3-1, is fixed in positioning support plane 1-1-8 by screw；Described movable guiding rail 3-2 has ceramic-like or glass fibre class friction material with driving straight beam 2-1-4-1 contact jaw topcoating；Described mover 3 is provided with roller rolling retainer 3-3, and the slip that roller rolling retainer 3-3 is guide rail provides and guides.In order to avoid roller rolling retainer 3-3 skids off guide rail, with the range of movement of limit mover 3, the two ends at the fixing guide rail 3-1 and movable guiding rail 3-2 of mover 3 arrange guide rail caging bolt 3-4 respectively.Mover 3 upper surface and cable-stayed type stator 2 upper surface are in same plane.
Detailed description of the invention two: combine Figure 10 and present embodiment is described.Present embodiments provide for the specific embodiments of a kind of complex incentive method of rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor.The complex incentive method of described a kind of rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor is as described below.
The complex incentive signal of telecommunication employed in described complex incentive method is superimposed on cable-stayed type stator rapid deformation by the regulation and control ripple that rubs and drives the driving ripple in stage to be composited, and described friction regulation and control ripple is sinusoidal wave, and described driving ripple is sawtooth waveforms.Specifically, the cable-stayed type stator rapid deformation that the complex incentive signal of telecommunication employed in described complex incentive method is superimposed on by the sinusoidal regulation and control ripple that rubs a little drives the sawtooth in stage to drive ripple to be composited, described complex incentive method can reduce the frictional resistance between rapid deformation stage stator and mover, suppression rollback motion produces, and optimizes output performance.Wherein sawtooth drives be T period of wave1, driving voltage amplitude is V1, symmetry is D, a little friction sine regulation and control period of wave be T2, driving voltage amplitude is V2, sawtooth drives ripple to be T with the period ratio of friction sine regulation and control ripple a little1/T2=10 ~ 100000, driving voltage Amplitude Ration is V1/V2More than 2.
Operation principle: under Asymmetric Electric signal encourages, slowly deforms and the frictional force in rapid deformation two driving stage at cable-stayed type stator by changing rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor, it is achieved the comprehensive regulation of frictional force.Wherein slowly deform the driving stage at cable-stayed type stator, mover occurs slowly " gluing " to move along with cable-stayed type stator under stiction effect together, now stiction provides driving force, increases frictional force between cable-stayed type stator and mover and can promote motor output performance；The stage is driven at cable-stayed type stator rapid deformation, the force of sliding friction produced between cable-stayed type stator and mover is frictional resistance, particularly when mover inertia force is not enough to overcome this frictional resistance, mover will be caused to produce rollback motion, show as the jagged unstable motion of class on microcosmic, deteriorate output performance, affect positioning precision, now manage to reduce cable-stayed type stator and mover sliding-frictional resistance, the comprehensive output characteristics of motor can be improved.Due to the fact that employing cable-stayed type rhombus linkage, make cable-stayed type stator shaft orientation Stiffness Distribution uneven, when piezo-electric stack excites generation axial vibratory displacement, cable-stayed type stator drive end produces lateral displacement, adjust cable-stayed type stator and the normal pressure contacted between mover, i.e. slowly deform the driving stage at cable-stayed type stator, increase cable-stayed type stator and the normal pressure contacted between mover, and then increase the friction drive between cable-stayed type stator and mover, the stage is driven at cable-stayed type stator rapid deformation, reduce cable-stayed type stator and the normal pressure contacted between mover, and then the frictional resistance between reduction cable-stayed type stator and mover realizes the comprehensive regulation to slowly deformation driving stage friction drive with rapid deformation driving stage frictional resistance, promote motor output performance.Simultaneously, the present invention is by putting in the driving ripple that cable-stayed type stator rapid deformation drives the stage by friction regulation and control ripple coupling, cable-stayed type stator is excited to be in dither state a little, thus reduce rapid deformation and drive frictional resistance between stage fixed and moving son, suppression rollback motion produces, and promotes piezoelectricity stick-slip line motor machinery output characteristics.
Comprehensive above said content, the present invention provides a kind of rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor, cable-stayed type rhombus converter axial rigidity skewness is utilized to produce lateral displacement, the frictional force between comprehensive regulation cable-stayed type stator and mover；The complex incentive method that the present invention provides can suppress the generation that rollback moves, and is obviously improved the mechanical output performance of piezoelectricity stick-slip line motor.Cable-stayed type rhombus converter and piezo-electric stack are assembled into a stator, and assembling is simple, it is easy to regulation.Designed charger, can regulate the pretightning force contacted between stator with output guide rail easily.The present invention has the features such as compact conformation, positioning precision is high, stroke is big, has good application prospect at micro-nano precision actuation such as micro-nano operation, semiconductor machining, precision optical instrument, biological microoperations in positioning field.
Claims (8)
1. a rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor, it is characterised in that described cable-stayed type rhombus hinge quadrature drive type piezoelectricity stick-slip line motor is made up of pre-tightening force adjusting device (1), cable-stayed type stator (2) and mover (3)；Cable-stayed type stator (2) is arranged on pre-tightening force adjusting device (1), and mover (3) is arranged on pre-tightening force adjusting device (1).
A kind of rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor the most according to claim 1, it is characterised in that described pre-tightening force adjusting device (1) is made up of erection support (1-1), Mobile Slide (1-2) and pretightning force adjusting screw rod (1-3)；nullWherein erection support (1-1) arranges mounting-positioning holes (1-1-1)、Positioning support plane (1-1-8)，Mover (3) is fixed in positioning support plane (1-1-8)，Erection support (1-1) bottom is provided with installation screwed hole (1-1-2)，Erection support (1-1) is connected with ancillary equipment by installing screwed hole (1-1-2)，Erection support (1-1) is provided with slideway stop screw (1-1-3)、Travelling carriage (1-1-4) and slideway (1-1-9)，Slideway stop screw (1-1-3) is arranged on slideway (1-1-9)，Travelling carriage (1-1-4) slides between slideway stop screw (1-1-3)，Erection support (1-1) is provided with retainer trip bolt (1-1-5)、Stop bolt retainer (1-1-6) and stop bolt (1-1-7)，The stop realizing Mobile Slide (1-2) by screwing stop bolt (1-1-7) is fixed，Erection support (1-1) is provided with spring (1-1-10)，Erection support (1-1) is connected with slide unit (1-2) by spring (1-1-7)，Erection support (1-1) is provided with lower spring steady pin (1-1-11)，Spring (1-1-10) one end is connected with erection support (1-1) by lower spring steady pin (1-1-11)，Erection support (1-1) is provided with loading screwed hole (1-1-12)，It is threadeded with pretightning force adjusting screw rod (1-3)；nullMobile Slide (1-2) is provided with positioning spiro pit (1-2-1)，Cable-stayed type stator (2) is fixed on Mobile Slide (1-2) by positioning spiro pit (1-2-1)，Mobile Slide (1-2) is provided with Mobile Slide stop screw (1-2-2)、Guide slide bar (1-2-5)，Mobile Slide stop screw (1-2-2) is arranged on guiding slide bar (1-2-5) end，Travelling carriage (1-1-4) slides between Mobile Slide stop screw (1-2-2)，Mobile Slide (1-2) is provided with spring steady pin (1-2-3)，The other end of spring (1-1-10) is connected with Mobile Slide (1-2) by upper spring steady pin (1-2-3)，Mobile Slide (1-2) side is provided with stop bolt installing hole (1-2-4)，Stop bolt installing hole (1-2-4) is threadeded with stop bolt (1-1-7)；Pretightning force adjusting screw rod (1-3) is threadeded with loading screwed hole (1-1-12), can be regulated the position of Mobile Slide (1-2) by the precession length adjusting pretightning force adjusting screw rod (1-3), it is achieved the pre-tightening force adjusting device (1) regulation to pretightning force.
A kind of rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor the most according to claim 1, it is characterised in that described cable-stayed type stator (2) is made up of cable-stayed type rhombus converter (2-1), piezo-electric stack (2-2), pre-loading screw (2-3) and adjustment pad (2-4)；nullCable-stayed type rhombus converter (2-1) uses rhombus flexible hinge structure，Cable-stayed type rhombus converter (2-1) is provided with stator installing hole (2-1-1)，Cable-stayed type stator (2) is fixed on Mobile Slide (1-2) by stator installing hole (2-1-1)，Cable-stayed type rhombus converter (2-1) is provided with deflection hinge (2-1-2)、Circular arc flexible hinge (2-1-5)，For regulating the deflection stiffness of cable-stayed type rhombus converter (2-1)，Cable-stayed type rhombus converter (2-1) is provided with cut type rhombus hinge (2-1-3)，For regulating the axial rigidity of cable-stayed type rhombus converter (2-1)，Cable-stayed type rhombus converter (2-1) is provided with movement conversion mechanism (2-1-4)，Cable-stayed type rhombus converter (2-1) is provided with pretension bolt installing hole (2-1-6)，Pretension bolt 2-3 is threadeded with pretension bolt installing hole (2-1-6)；Adjustment pad (2-4) it is provided with between end face and pretension bolt (2-3) before and after piezo-electric stack (2-2).
A kind of rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor the most according to claim 3, it is characterised in that described deflection hinge (2-1-2) has radius of corner value R1, circular arc flexible hinge (2-1-5) has radius of corner value R2, R1With R2The value that ratio is S, S meet in the range of 0.1 ~ 1.
A kind of rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor the most according to claim 3, it is characterized in that described movement conversion mechanism (2-1-4) is provided with driving straight beam (2-1-4-1), motion conversion cant beam (2-1-4-2), described driving straight beam (2-1-4-1) forms certain angle φ with motion conversion cant beam (2-1-4-2), and the value of φ meets in the range of 45 ° ~ 90 °.
A kind of rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor the most according to claim 3, it is characterised in that cable-stayed type rhombus converter (2-1) of described cable-stayed type stator (2) can use 5052 aluminium alloys, 6061 aluminium alloys, 7075 aluminum alloy materials.
A kind of rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor the most according to claim 1, it is characterized in that described mover (3) is biserial decussation roller line slideway, it is formed by fixing guide rail (3-1), movable guiding rail (3-2), retainer (3-3) and guide rail caging bolt (3-4)；Fixing guide rail (3-1) is mounted in positioning support plane (1-1-8), movable guiding rail (3-2) end face scribbles ceramic-like or glass fibre class friction material, retainer (3-3) is that the motion of movable guiding rail (3-2) provides guiding, and guide rail caging bolt (3-4) is used for avoiding the sports limiting of movable guiding rail (3-2).
8. a rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor complex incentive method, this complex incentive method realizes based on the cable-stayed type rhombus hinge quadrature drive type piezoelectricity stick-slip line motor described in claim 1；Described complex incentive method characteristic is that described driving ripple is sawtooth waveforms, and described friction regulation and control ripple is sinusoidal wave, and wherein sawtooth drives be T period of wave1, driving voltage amplitude is V1, symmetry is D, a little friction sine regulation and control period of wave be T2, driving voltage amplitude is V2, sawtooth drives ripple to be T with the period ratio of friction sine regulation and control ripple a little1/T2=10 ~ 100000, driving voltage Amplitude Ration is V1/V2More than 2.
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