CN105915109A - Oblique-pulling rhombic amplification piezoelectric stick-slip linear motor and excitation method thereof - Google Patents
Oblique-pulling rhombic amplification piezoelectric stick-slip linear motor and excitation method thereof Download PDFInfo
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
Abstract
The invention provides an oblique-pulling rhombic amplification piezoelectric stick-slip linear motor and an excitation method thereof, and aims to solve the problem of an existing piezoelectric stick-slip linear motor that the output mechanism performance is limited by difficult comprehensive regulation and control of frictional forces. The oblique-pulling rhombic amplification piezoelectric stick-slip linear motor is composed of a pre-compression device, an oblique-pulling stator and a mover. An oblique-pulling rhombic movement conversion mechanism of the stator has a micro-displacement amplification function, and the distribution of the axial rigidity is uneven and a lateral displacement is generated, so that the friction driving force is increased, and the friction resistance is reduced; in addition, friction regulation and control waves are superposed to sawtooth driving waves in a coupled manner in a rapid deformation driving phase of the oblique-pulling stator, so that the friction resistance between the stator and the mover in the rapid deformation driving phase is reduced, the comprehensive regulation and control of the frictional forces is realized, and the mechanical output characteristic of the piezoelectric stick-slip linear motor is improved. According to the invention, the oblique-pulling rhombic amplification piezoelectric stick-slip linear motor has the advantages that the structure is compact, the assembling is convenient, the positioning precision is high, and the stroke is not limited, so that the oblique-pulling rhombic amplification piezoelectric stick-slip linear motor can be widely applied to the technical field of micro-nano precise driving and positioning such as precise optical instruments.
Description
Technical field
The present invention relates to a kind of cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors and motivational techniques thereof, belong to micro-nano precision actuation and field of locating technology.
Background technology
Piezoelectricity stick-slip linear electric motors are a kind of inverse piezoelectric effects based on piezoelectric element, excite stator (or claiming oscillator) to produce dither a little under Asymmetric Electric signal encourages, utilize the friction between stator with mover to couple the micro-nano precision piezoelectricity stick-slip linear electric motors realizing mechanical energy output.According to the difference of driving principle, piezoelectricity stick-slip linear electric motors are broadly divided into resonance type piezoelectric motor (also referred to as supersonic motor) and the big class of non-co-vibration shape piezoelectric motor (also referred to as piezoelectricity stick-slip motor) two.Compared with resonance type piezoelectric motor, piezoelectricity stick-slip linear electric motors have assembling simple and compact for structure, easy, easy to control, positioning precision high, are widely used in the micro-nano precision actuation such as semiconductor machining, precision optical instrument and field of locating technology.
Piezoelectricity stick-slip drives and mainly the saw tooth excitation signal of telecommunication is put on piezoelectric element, stator is excited to produce speed motion deformation alternately, control stator and mover is mutually changed between " gluing " and " cunning " two kinds of kinestates, utilize frictional force drives mover to realize mechanical movement output.But, drive slowly due to piezoelectricity stick-slip and rapid deformation drives the stage, between stator and mover, frictional force plays not same-action, shows as friction drive, and show as frictional resistance when rapid deformation drives the stage when being specially the slowly deformation driving stage.The technology of being disclosed show current piezoelectricity stick-slip linear electric motors cannot realize to whole stick-slip drive process frictional force carry out comprehensive regulation, cause its output mechanical performance limited.Rapid deformation at stator especially drives the stage, owing to mover friction moves in opposite direction, when mover inertia force is not enough to overcome this frictional resistance, mover will be caused to produce rollback motion, show as the jagged unstable movement output of class, deterioration output performance, the existing saw tooth excitation signal of telecommunication cannot realize driving the frictional force in stage to regulate and control piezoelectricity stick-slip linear electric motors rapid deformation, limit application and the development of piezoelectricity stick-slip linear electric motors further.
Summary of the invention
For solving existing piezoelectricity stick-slip linear electric motors due to the comprehensive regulation difficulty that rubs between stator and mover, the mechanical output characteristics caused is limited, produce the unstable movement output of class zigzag, the technical problems such as deterioration output performance, the open a kind of cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors of the present invention and motivational techniques thereof.
The technical solution adopted in the present invention is:
Described cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors are made up of precompression device, cable-stayed type stator and mover.
Described precompression device is made up of lower slide unit, upper slide unit and manual adjusting screw rod；Described lower slide unit is provided with mover installing hole and mover installation base surface, is used for installing fixing mover；It is provided with counter sink bottom described lower slide unit, is connected for fixing with peripheral unit；Described lower slide unit is internally provided with the fixing guide rail in inner side, is used for assisting slide unit to fix guide rail along inner side and moves along a straight line, and inner side is fixed guide rail and is provided with lower guideway installation screw, is used for avoiding slide unit to skid off the fixing guide rail in inner side.Described lower slide unit is provided with ball retainer assembly, for realizing the motion transmission of slide unit；Described lower slide unit is provided with lower spring and fixes screw and pre-compressed spring, for realizing the drawback movement of slide unit；Described lower slide unit is provided with fixing screw, fixed retainer and tie down screw, for being locked upper slide unit；Described lower slide unit is provided with manual adjusting screw rod installing hole, and the pretightning force for cable-stayed type stator regulates.Described upper slide unit is provided with hinge mounting hole, and the installation for cable-stayed type stator is fixed；Described upper slide unit is provided with upper rail and installs screw, is used for limiting the range of movement of slide unit；Described upper slide unit is provided with spring set screw, for fixing the other end of pre-compressed spring, it is possible to the single-degree-of-freedom linear reciprocating motion of slide unit in realization.Described upper slide unit side is provided with fixing screwed hole, for threadeding with tie down screw, it is achieved fixing of upper slide unit；Described upper slide unit is provided with outside moving guide rail, is used for driving slide unit to move.Described manual adjusting screw rod is threadeded with manual adjusting screw rod installing hole, it is achieved the pretightning force of cable-stayed type stator is regulated by prepressing device.
Described cable-stayed type stator is made up of cable-stayed type rhombus movement conversion mechanism, adjustment pad, piezo-electric stack and pre-loading screw.Described cable-stayed type rhombus movement conversion mechanism is provided with hinge fixing hole so that it is be fastenedly connected with upper slide unit；Described cable-stayed type rhombus movement conversion mechanism is provided with cable-stayed type rhombus hinge, can be amplified by the micrometric displacement that produce in sawtooth drive lower piezoelectric stacking.Described cable-stayed type rhombus hinge is provided with the short axle of hinge and hinge major axis, for regulating the micrometric displacement amplification of rhombus flexible hinge.Described cable-stayed type rhombus hinge is provided with flexible beam and buckstay, can be amplified by the micrometric displacement that the vibration of cable-stayed type stator produces further；Described cable-stayed type rhombus movement conversion mechanism is provided with motion foot, is used for driving mover to realize movement output；Described cable-stayed type rhombus movement conversion mechanism is provided with cable-stayed type converter, and the micrometric displacement that piezo-electric stack axial vibration produces can be converted to the lateral displacement of motion foot.Lateral displacement is produced due to axial rigidity skewness, friction drive when increasing the slowly deformation driving stage, reduce frictional resistance when rapid deformation drives the stage, it is achieved the comprehensive regulation to frictional force.Described cable-stayed type rhombus movement conversion mechanism is provided with pre-loading screw installing hole, for piezo-electric stack pretension.It is provided with adjustment pad before and after described piezo-electric stack between end face and pre-loading screw, it is therefore an objective to protection piezo-electric stack, prevents it from producing shear strain or local pressure is uneven, by adjusting the precession amount of pre-loading screw, the regulation of the axial pre tightening force to piezo-electric stack can be realized.
Described mover is biserial decussation roller guide rail, including fixed rack, motion slide rail, roller rolling retainer and end stop screw.Described fixing guide rail is fixed on mover installation base surface by mover installing hole, and described motion guide rail end face scribbles glass fibre class friction material；The slip that described roller rolling retainer is motion slide rail provides sliding support；Described end stop screw is for limiting the range of movement of motion slide rail.
The complex incentive signal of telecommunication employed in described motivational techniques is driven in ripple by the regulation and control ripple complex superposition sawtooth in the cable-stayed type stator rapid deformation stage that rubs, and described friction regulation and control ripple is sinusoidal wave；Described motivational techniques can reduce the frictional resistance between rapid deformation stage cable-stayed type stator and mover, and suppression rollback motion produces, and wherein sawtooth drives be T period of wave1, driving voltage amplitude is V1, symmetry is D, a little friction sine regulation and control period of wave be T2, driving voltage amplitude is V2, sawtooth drives ripple to be T with the period ratio of friction sine regulation and control ripple a little1/T2=10 ~ 100000, driving voltage Amplitude Ration is V1/V2More than 2.
The invention has the beneficial effects as follows:
The present invention uses the cable-stayed type stator structure with frictional force comprehensive regulation function, and encouraged by the coupling excitation signal of telecommunication, increase cable-stayed type stator and slowly deform friction drive between driving stage cable-stayed type stator and mover, reduce frictional resistance between cable-stayed type stator rapid deformation stage cable-stayed type stator and mover, realize the frictional force of piezoelectricity stick-slip linear electric motors whole driving process is carried out comprehensive regulation, the mechanical output characteristics of piezoelectricity stick-slip linear electric motors can be obviously improved, reducing displacement rollback rate, under open loop condition, positioning precision is up to nanoscale.Compared with current prior art, having compact conformation and the advantage such as easy to control, power output promotes more than 20%, and output speed promotes more than 50%, and delivery efficiency promotes more than 70%.
Accompanying drawing explanation
Fig. 1 show the structural representation of the cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors that the present invention proposes；
Fig. 2 show the precompression apparatus structure schematic diagram of the cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors that the present invention proposes；
Fig. 3 show the lower slide unit structural representation of the cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors that the present invention proposes；
Fig. 4 show the upper slide unit plan structure schematic diagram of the cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors that the present invention proposes；
Fig. 5 show the upper slide unit of the cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors that the present invention proposes and looks up structural representation；
Fig. 6 show the cable-stayed type stator structure schematic diagram of the cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors that the present invention proposes；
Fig. 7 show the cable-stayed type rhombus movement conversion mechanism structural representation of the cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors that the present invention proposes；
Fig. 8 show the cable-stayed type rhombus movement conversion mechanism fragmentary top TV structure schematic diagram of the cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors that the present invention proposes；
Fig. 9 show the cable-stayed type rhombus movement conversion mechanism partial side structural representation of the cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors that the present invention proposes；
Figure 10 show the Structure of mover schematic diagram of the cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors that the present invention proposes；
Figure 11 show the coupling excitation electric signal waveform schematic diagram of the cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors that the present invention proposes.
Detailed description of the invention
Detailed description of the invention one: combine Fig. 1 ~ Figure 10 and present embodiment is described.Present embodiment provides the specific embodiments of a kind of cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors.Described a kind of cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors are made up of precompression device 1, cable-stayed type stator 2 and mover 3.
Described precompression device 1 is made up of lower slide unit 1-1, upper slide unit 1-2 and manual adjusting screw rod 1-3.Described lower slide unit 1-1 is provided with mover installing hole 1-1-1 and mover installation base surface 1-1-12, is used for installing fixing mover 3；It is provided with counter sink 1-1-2 bottom described lower slide unit 1-1, is connected for fixing with peripheral unit.Described lower slide unit 1-1 is internally provided with the fixing guide rail 1-1-11 in inner side, move along a straight line for assisting upper slide unit 1-2 to fix guide rail 1-1-11 along inner side, the fixing guide rail 1-1-11 in inner side is provided with 4n lower guideway and installs screw 1-1-3, wherein n is the integer more than or equal to 1, is used for avoiding slide unit 1-2 to skid off the fixing guide rail 1-1-11 in inner side.Described lower slide unit 1-1 is provided with ball retainer assembly 1-1-4, for realizing the motion transmission of slide unit 1-2；Described lower slide unit 1-1 is provided with lower spring and fixes screw 1-1-9 and pre-compressed spring 1-1-10, for realizing the drawback movement of slide unit 1-2；Described lower slide unit 1-1 is provided with fixing screw 1-1-5, fixed retainer 1-1-6 and tie down screw 1-1-7, by regulation tie down screw 1-1-7, it is possible to achieve be locked upper slide unit 1-2, prevents upper slide unit 1-2 in motor work from play occurring.Described lower slide unit 1-1 is provided with manual adjusting screw rod installing hole 1-1-8, threadeds by using with manual adjusting screw rod 1-3, it is achieved the pretightning force regulation of cable-stayed type stator 2.Described upper slide unit 1-2 is provided with hinge mounting hole 1-2-1, and the installation for cable-stayed type stator 2 is fixed, and described upper slide unit 1-2 is provided with 4n upper rail and installs screw 1-2-2, for limiting the range of movement of slide unit 1-2；Described upper slide unit 1-2 is provided with spring set screw 1-2-3, for fixing the other end of pre-compressed spring 1-1-10, it is possible to the single-degree-of-freedom linear reciprocating motion of slide unit 1-2 in realization；Described upper slide unit 1-2 side is provided with fixing screwed hole 1-2-4, for threadeding with tie down screw 1-1-7, it is achieved upper slide unit 1-2's is fixing；Described upper slide unit 1-2 is provided with outside moving guide rail 1-2-5, is used for driving slide unit 1-2 to move.Described manual adjusting screw rod 1-3 is threadeded with manual adjusting screw rod installing hole 1-1-8, by changing the precession amount of manual adjusting screw rod 1-3, can regulate the position of slide unit 1-2, it is achieved the pretightning force of cable-stayed type stator 2 is regulated by precompression device 1.
Described cable-stayed type stator 2 is made up of cable-stayed type rhombus movement conversion mechanism 2-1, adjustment pad 2-2, piezo-electric stack 2-3 and pre-loading screw 2-4.Described cable-stayed type rhombus movement conversion mechanism 2-1 uses 6061 aluminum alloy materials as rapidoprint；Described cable-stayed type rhombus movement conversion mechanism 2-1 is provided with hinge fixing hole 2-1-1 so that it is be fastenedly connected with upper slide unit 1-2；Described cable-stayed type rhombus movement conversion mechanism 2-1 is provided with cable-stayed type rhombus hinge 2-1-2, can be amplified by the micrometric displacement of piezo-electric stack 2-3；Described cable-stayed type rhombus hinge 2-1-2 is provided with the short axle of hinge and hinge major axis, specifically, the a length of A of the short axle of hinge, the a length of B of hinge major axis, ratio K=the B/A of its major and minor axis is that cable-stayed type rhombus hinge 2-1-2 is being perpendicular to the micrometric displacement amplification of driving direction, and its micrometric displacement amplification K value is 1 ~ 10, by adjusting the ratio K of major and minor axis, micrometric displacement amplification can be changed, micrometric displacement amplification K=8.5 in present embodiment.Described cable-stayed type rhombus hinge 2-1-2 is provided with flexible beam 2-1-6 and buckstay 2-1-7.Specifically, the wall thickness of flexible beam 2-1-6 is E, the wall thickness of buckstay 2-1-7 is F, its ratio z=F/E value is 1.1 ~ 1.5, by regulation z value, being amplified by cable-stayed type rhombus movement conversion mechanism 2-1 by the micrometric displacement that the vibration of piezo-electric stack 2-3 produces further, the ratio choosing buckstay and flexible beam in present embodiment is 1.5.Described cable-stayed type rhombus movement conversion mechanism 2-1 is provided with motion foot 2-1-4, and its end face scribbles ceramic-like friction material, is used for driving mover 3 to move.Specifically, the thickness of motion foot 2-1-4 is M, and regulation motion foot 2-1-4 thickness M can change the rigidity of himself, and its thickness M is less than mover contact surface thickness 3 ~ 5 mm.Described cable-stayed type rhombus movement conversion mechanism 2-1 is provided with cable-stayed type converter 2-1-3, cable-stayed type converter 2-1-3 forms an angle value θ with motion foot 2-1-4 shape, wherein θ value is 20 ° ~ 65 °, the lateral displacement of the foot 2-1-4 that can be converted to move by the micrometric displacement that the axial vibration of piezo-electric stack 2-3 produces.Lateral displacement is produced due to the axial rigidity skewness of cable-stayed type stator 2, friction drive when increasing the slowly deformation driving stage, reduce frictional resistance when rapid deformation drives the stage, the comprehensive regulation to frictional force can be realized；Angle theta=25 ° in present embodiment.Described cable-stayed type converter 2-1-3 presents straight beam structure and oblique pull girder construction, preferably realizes micrometric displacement motion conversion for realizing cable-stayed type converter, and the present invention reasonably mates straight beam structure and the dimensional parameters of oblique pull girder construction.Specifically, a length of L of straight beam structure, width is N, a length of Q of oblique beam structure, and width is P, wherein L=1 ~ 1.25Q, N=1 ~ 1.1P.Described cable-stayed type rhombus movement conversion mechanism 2-1 is provided with pre-loading screw installing hole 2-1-5, for piezo-electric stack 2-3 pretension.Described piezo-electric stack 2-3 uses the product of the companies such as NEC, adjustment pad 2-2 it is provided with between end face and pre-loading screw 2-4 before and after piezo-electric stack 2-3, described adjustment pad 2-2 uses stainless steel material, its thickness is best results when 1 ~ 2 mm scope, and adjusting pad 2-2 thickness in present embodiment is 2 mm.The purpose of described adjustment pad 2-2 is protection piezo-electric stack 2-3, prevents it from producing shear strain or local pressure is uneven, by adjusting the precession amount of pre-loading screw 2-4, can realize the regulation of the axial pre tightening force to piezo-electric stack 2-3.
Described mover 3 is biserial decussation roller guide rail, including fixed rack 3-1, motion slide rail 3-2, roller rolling retainer 3-3 and end stop screw 3-4.Described fixing guide rail 3-1 is fixed on mover installation base surface 1-1-12 by mover installing hole 1-1-1, described motion guide rail 3-2 end face scribbles glass fibre class friction material, the slip that described roller rolling retainer 3-3 is motion slide rail 3-2 provides and supports, and described end stop screw 3-4 is for limiting the range of movement of motion slide rail 3-2.
Detailed description of the invention two: combine Figure 11 figure explanation present embodiment.Present embodiment provides the specific embodiments of a kind of cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors motivational techniques.The motivational techniques of described a kind of cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors are as follows.
The complex incentive signal of telecommunication employed in described motivational techniques is driven in ripple by the regulation and control ripple complex superposition sawtooth in the cable-stayed type stator rapid deformation stage that rubs, and described friction regulation and control ripple can be sinusoidal wave.Wherein, sawtooth drives be T period of wave1, driving voltage amplitude is V1, symmetry is D, a little friction sine regulation and control period of wave be T2, driving voltage amplitude is V2, sawtooth drives ripple to be T with the period ratio of friction sine regulation and control ripple a little1/T2=10 ~ 100000, driving voltage Amplitude Ration is V1/V2More than 2.
Operation principle: cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors and motivational techniques thereof are mainly under coupled electrical signal encourages, the frictional force between comprehensive regulation cable-stayed type stator and mover, and then promote the mechanical output characteristics of piezoelectricity stick-slip linear electric motors.Wherein, slowly deforming the driving stage at cable-stayed type stator, mover occurs slowly " gluing " to move under stiction effect together along with stator, and now stiction provides driving force, and between increase cable-stayed type stator and mover, frictional force can lifting motor output performance；The stage is driven at cable-stayed type stator rapid deformation, the force of sliding friction produced between cable-stayed type stator and mover is frictional resistance, particularly when mover inertia force is not enough to overcome this frictional resistance, mover will be caused to produce rollback motion, show as the jagged unstable motion of class on microcosmic, deteriorate output performance, affect positioning precision, now manage to reduce cable-stayed type stator and mover sliding-frictional resistance, the comprehensive output characteristics of motor can be improved.The cable-stayed type stator of the present invention is owing to using cable-stayed type rhombus movement conversion mechanism, make cable-stayed type stator shaft orientation Stiffness Distribution uneven, cable-stayed type stator drive end is excited to produce lateral displacement, adjust cable-stayed type stator and the normal pressure contacted between mover, i.e. slowly deform the driving stage at cable-stayed type stator, increase cable-stayed type stator and the normal pressure contacted between mover, and then increase the friction drive between cable-stayed type stator and mover, the stage is driven at cable-stayed type stator rapid deformation, reduce cable-stayed type stator and the normal pressure contacted between mover, and then reduce the frictional resistance between cable-stayed type stator and mover, realize slowly deformation driving stage friction drive and rapid deformation are driven the comprehensive regulation of stage frictional resistance, promote complete machine output performance.Simultaneously, the present invention drives in ripple by friction regulation and control ripple coupling is superimposed on the sawtooth in cable-stayed type stator rapid deformation stage, cable-stayed type stator is excited to be in dither state a little, thus reduce rapid deformation and drive frictional resistance between stage fixed and moving son, suppression rollback motion produces, and can be obviously improved the mechanical output characteristics of piezoelectricity stick-slip linear electric motors.
Comprehensive above said content, the present invention provides a kind of cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors and motivational techniques thereof, to solve the problems such as output mechanical performance that current piezoelectricity stick-slip linear electric motors are caused due to frictional force comprehensive regulation difficulty is limited.The cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors proposed, have compact conformation, a feature such as easy to assembly, positioning precision is high and stroke is unrestricted.The motivational techniques proposed can obviously reduce the displacement of piezoelectricity stick-slip linear electric motors and rewind rate, promote its machinery output characteristics, have good application prospect in the micro-nano precision actuation such as precision optical instrument, semiconductor machining and field of locating technology.
Claims (9)
1. cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors, it is characterised in that these cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors are made up of precompression device (1), cable-stayed type stator (2) and mover (3)；Described cable-stayed type stator (2) is fixed on precompression device (1), and mover (3) is fixed on precompression device (1).
A kind of cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors the most according to claim 1, it is characterised in that precompression device (1) is made up of lower slide unit (1-1), upper slide unit (1-2) and manual adjusting screw rod (1-3)；Described lower slide unit (1-1) arranges fixing mover installing hole (1-1-1) and mover installation base surface (1-1-12), is fixed on mover installation base surface (1-1-12) by mover (3) by mover installing hole (1-1-1)；Lower slide unit (1-1) is provided with counter sink (1-1-2), and lower slide unit (1-1) is internally provided with the fixing guide rail (1-1-11) in inner side, and inner side is fixed guide rail (1-1-11) and is provided with lower guideway installation screw (1-1-3)；Lower slide unit (1-1) is provided with lower spring and fixes screw (1-1-9) and pre-compressed spring (1-1-10)；Lower slide unit (1-1) is provided with fixing screw (1-1-5), fixed retainer (1-1-6) and tie down screw (1-1-7), is locked with fixed retainer (1-1-6) by upper slide unit (1-2) with threadeding of fixed retainer (1-1-6) by tie down screw (1-1-7)；Lower slide unit (1-1) is provided with manual adjusting screw rod installing hole (1-1-8)；Described upper slide unit (1-2) is provided with hinge mounting hole (1-2-1), is fixed with upper slide unit (1-2) by cable-stayed type stator (2) by hinge mounting hole (1-2-1)；Upper slide unit (1-2) end is provided with upper rail and installs screw (1-2-2) and upper spring set screw (1-2-3), upper slide unit (1-2) side is provided with fixing screwed hole (1-2-4), fixing upper slide unit (1-2) by using with tie down screw (1-1-7) to threaded, upper slide unit (1-2) is provided with outside moving guide rail (1-2-5)；Described manual adjusting screw rod (1-3) uses with manual adjusting screw rod installing hole (1-1-8) and threadeds pretension cable-stayed type stator (2).
A kind of cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors the most according to claim 1, it is characterised in that cable-stayed type stator (2) is made up of cable-stayed type rhombus movement conversion mechanism (2-1), adjustment pad (2-2), piezo-electric stack (2-3) and pre-loading screw (2-4)；Described cable-stayed type rhombus movement conversion mechanism (2-1) uses oblique pull beam type rhombus flexible hinge structure；Cable-stayed type rhombus movement conversion mechanism (2-1) is provided with hinge fixing hole (2-1-1) and cable-stayed type rhombus hinge (2-1-2)；Cable-stayed type rhombus movement conversion mechanism (2-1) is provided with motion foot (2-1-4) and cable-stayed type converter (2-1-3)；Cable-stayed type rhombus movement conversion mechanism (2-1) is provided with pre-loading screw installing hole (2-1-5), is used with pre-loading screw (2-4) by pre-loading screw installing hole (2-1-5) to threaded and piezo-electric stack (2-3) is fixed；Adjustment pad (2-2) it is provided with between end face and pre-loading screw (2-4) before and after described piezo-electric stack (2-3).
A kind of cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors the most according to claim 1, it is characterized in that mover (3) is biserial decussation roller guide rail, including fixed rack (3-1), motion slide rail (3-2), roller rolling retainer (3-3) and end stop screw (3-4)；Fixing guide rail (3-1) is fixed on mover installation base surface (1-1-12) by mover installing hole (1-1-1), described fixed rack (3-1) and motion slide rail (3-2) end are provided with end stop screw (3-4), and fixed rack (3-1) is by roller rolling retainer (3-3) and motion slide rail (3-2) mediate contact.
A kind of Wedge type rhombus enlarger piezoelectricity stick-slip linear electric motors the most according to claim 1, it is characterised in that cable-stayed type rhombus movement conversion mechanism (2-1) of cable-stayed type stator (2) uses 5052 aluminium alloys, 6061 aluminium alloys, 7075 aluminium alloys, Ti-35A titanium alloy or Ti-13 titanium alloy material；Lower slide unit (1-1) and the lower slide unit (1-2) of described precompression adjusting means (1) all use stainless steel material；The fixing guide rail (3-1) of described mover (3) and motion slide rail (3-2) all use No. 45 Steel materials.
A kind of cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors the most according to claim 3, it is characterized in that cable-stayed type rhombus hinge (2-1-2) of cable-stayed type stator (2) is provided with the short axle of hinge and hinge major axis, the a length of A of the short axle of hinge, the a length of B of hinge major axis, its major axis is that cable-stayed type rhombus hinge (2-1-2) is being perpendicular to the micrometric displacement amplification of driving direction with the ratio K=B/A of short axle, and the amplification K value of its micrometric displacement is 1 ~ 10.
A kind of cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors the most according to claim 3, it is characterized in that cable-stayed type rhombus movement conversion mechanism (2-1) of cable-stayed type stator (2) is provided with cable-stayed type converter (2-1-3), cable-stayed type converter (2-1-3) forms angle value θ with motion foot (2-1-4), and wherein θ value is 20 ° ~ 65 °.
A kind of cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors the most according to claim 3, it is characterised in that motion foot (2-1-4) end face of cable-stayed type stator (2) scribbles ceramic-like or glass fibre class friction material.
9. cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors motivational techniques, these motivational techniques realize based on the cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors described in claim 1；Described motivational techniques are characterised by that driving ripple is sawtooth waveforms, and friction regulation and control ripple is sinusoidal wave, and wherein sawtooth drives be T period of wave1, driving voltage amplitude is V1, symmetry is D, a little friction sine regulation and control period of wave be T2, driving voltage amplitude is V2, sawtooth drives ripple to be T with the period ratio of friction sine regulation and control ripple a little1/T2=10 ~ 100000, driving voltage Amplitude Ration is V1/V2More than 2.
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