CN102307021A - Different-order bending vibration modal linear ultrasonic motor and operation way thereof - Google Patents

Different-order bending vibration modal linear ultrasonic motor and operation way thereof Download PDF

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Publication number
CN102307021A
CN102307021A CN201110272712A CN201110272712A CN102307021A CN 102307021 A CN102307021 A CN 102307021A CN 201110272712 A CN201110272712 A CN 201110272712A CN 201110272712 A CN201110272712 A CN 201110272712A CN 102307021 A CN102307021 A CN 102307021A
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stator
piezoelectric ceramic
ceramic piece
bending vibration
driving head
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CN201110272712A
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CN102307021B (en
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张健滔
李朝东
鲍晟
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University of Shanghai for Science and Technology
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University of Shanghai for Science and Technology
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Abstract

The invention provides a different-order bending vibration modal linear ultrasonic motor and an operation way thereof. The motor comprises a stator and a rotor, wherein the motor stator comprises a stator main body, a left piezoelectric ceramic piece, a right piezoelectric ceramic piece, an intermediate block and a pre-tightening bolt; the left piezoelectric ceramic piece, the side piezoelectric ceramic piece, the intermediate block and the stator body are connected into a whole by the pre-tightening bolt; the motor rotor is a sliding strip, and the upper surface of the sliding strip is adhered with a friction layer. The operation way of the motor is as follows: in the first working mode, a cuboid at the lower part of the stator acts first-order bending vibration to stimulate a driving head at the top end of the stator to move vertically; and in the second working mode, the cuboid at the lower part of the stator acts second-order bending vibration to simulate the driving head at the top end of the stator to move horizontally. Two sinusoidal signals with a phase difference being pi/2 are used for simultaneously and respectively stimulating the left piezoelectric ceramic piece and the side piezoelectric ceramic piece and stimulating the two same-frequency working vibration modes with the phase difference being pi/2, so that the particles of the driving head on the stator can carry out elliptic motion and the rotor can be pushed to carry out linear motion positively or oppositely. The linear ultrasonic motor has the advantages of fewer components, simple structure, small size and large thrust-weight ratio, high efficiency and reliability in operation, and can output high thrust.

Description

Not same order bending vibration modes linear ultrasonic motor and function mode thereof
Technical field
The present invention relates to a kind of not same order bending vibration modes linear ultrasonic motor and function mode thereof, belong to the ultrasound electric machine field.
Background technology
Ultrasound electric machine is a kind of inverse piezoelectric effect of piezoelectric and new type power output device of elastomeric ultrasonic vibration of utilizing; It utilizes the inverse piezoelectric effect of piezoelectric ceramic to convert electrical energy into the micro breadth oscillation of ultrasound electric machine stator; Through the rubbing action between stator and the mover, promote mover and realize rectilinear motion output.Utilize the linear ultrasonic motor of a plurality of mode of oscillation work to belong to a type of linear ultrasonic motor, the type linear ultrasonic motor has based on longitudinal vibration mode and bending vibration modes linear ultrasonic motor, based on longitudinal vibration mode and longitudinal vibration mode linear ultrasonic motor, based on bending vibration modes and bending vibration modes linear ultrasonic motor.And two bending vibration modes that utilized based on bending vibration modes and bending vibration modes linear ultrasonic motor at present are often with the bending vibration modes of single order.These motors all are to utilize two approaching modal vibrations of frequency to form elliptic motion on the drive end surface, carry out rectilinear motion to drive mover.Linear ultrasonic motor can directly produce rectilinear motion and tractive effort, need not movement conversion, and its positioning accuracy is high, magnetic field is compatible good.But modern a lot of high-tech products have proposed more how new requirement to actuator, require that the actuator volume is little, installation occupies little space, thrust-weight ratio is big, simple in structure, efficient is high.
Summary of the invention
The objective of the invention is to the problem that exists to prior art, a kind of simple in structure, volume is little, thrust-weight ratio is big, efficient is high, response speed is fast not same order bending vibration modes linear ultrasonic motor and function mode thereof are provided.
For achieving the above object; The present invention adopts following technical proposals: a kind of not same order bending vibration modes linear ultrasonic motor; Comprise stator and mover; It is characterized in that; Said stator is a leg-of-mutton piezoelectric vibrator of class; Comprise stator body, left and right sides piezoelectric ceramic piece, intermediate mass, pretension bolt; Wherein the left and right sides piezoelectric ceramic piece places the intermediate mass both sides; Pretension bolt is connected into one with the Lower Half of left and right sides piezoelectric ceramic piece, intermediate mass, stator body, and the first half top of stator is a driving head; Said mover is a draw runner, and the draw runner upper surface is bonded with frictional layer, contacts with the driving head of said stator; Two installing holes are arranged on the stator intermediate mass both side ends, and it is used to stator is installed and connecting elements that precompression is provided, and stator and mover are linked into an integrated entity constitutes not same order bending vibration modes linear ultrasonic motor.
Above-mentioned not same order bending vibration modes linear ultrasonic motor, it is characterized in that: said stator the first half is a triangle, and the latter half is a cuboid, and wherein cuboid respectively has two grooves along center line symmetry both sides.
A kind of function mode that is used for above-mentioned not same order bending vibration modes linear ultrasonic motor; It is characterized in that; The sinusoidal signal that is pi/2 with two phase differences encourages two groups of piezoelectric ceramic pieces simultaneously respectively; Excite two mode of oscillations of stator with frequency phase difference pi/2; Be that stator the latter half cuboid is when doing first-order bending vibration; The driving head that causes the stator upper end moves up and down; When stator the latter half cuboid is done the second order flexural vibrations; The driving head that causes the stator upper end is done side-to-side movement; Make driving head particle generation elliptic motion on the stator, and the promotion mover carries out rectilinear motion forward or backwards.
The present invention compared with prior art, have following conspicuous outstanding substantive distinguishing features and remarkable advantage: the parts that linear ultrasonic motor of the present invention comprised are few, and are simple in structure.The motor stator design of major parts has reduced the size of the direction vertical with the mover direction of motion along on the mover travel direction, to reduce the requirements of installation space of this direction.This motor is guaranteed two not consistency of same order operation mode frequency through the mode of fluting, improves the reliability of machine operation.This motor utilizes the inverse piezoelectric effect d33 work of piezoelectric ceramic piece, and the motor thrust output is big, thrust-weight ratio is big, efficient is high.
Description of drawings
Fig. 1 is a same order bending vibration modes linear ultrasonic motor structural representation not.
Fig. 2 is an A-A place vertical view among Fig. 1.
Fig. 3 is a same order bending vibration modes linear ultrasonic motor stator operation mode sketch map not.Wherein Fig. 3 (a) is that stator the latter half cuboid is done first-order bending vibration, causes the operation mode () that the driving head of stator upper end moves up and down; Fig. 3 (b) is that stator the latter half cuboid is done the second order flexural vibrations, causes that the driving head of stator upper end does the operation mode (two) of side-to-side movement.Wherein filled arrows is a stator elastomer direction of vibration, and hollow arrow is the driving head direction of motion.
Fig. 4 (a) is a stator piezoelectric ceramic piece polarization sketch map, and Fig. 4 (b) is the polarised direction sketch map of a slice piezoelectric ceramic piece, and arrow, "+", "-" represent the polarised direction of piezoelectric ceramic piece among the figure.
Fig. 5 is that the stator drive signal loads sketch map.
Fig. 6 is a same order bending vibration modes linear ultrasonic motor operation principle sketch map not, and wherein filled arrows is a stator elastomer direction of vibration, and hollow arrow is the direction of motion of mover, and elliptical orbit is the movement locus of driving head surface particle.
Embodiment:
Preferential embodiment of the present invention combines detailed description of the drawings following:
Embodiment one:
As depicted in figs. 1 and 2, this is same order bending vibration modes linear ultrasonic motor not, comprises stator and mover, and stator the first half is a triangle, and the latter half is a cuboid, and wherein cuboid respectively has two grooves along center line symmetry both sides.Stator comprises stator body 11, left side piezoelectric ceramic piece 31 and right side piezoelectric ceramic piece 32, intermediate mass 41, pretension bolt 21; Wherein left and right sides piezoelectric ceramic piece 31,32 places intermediate mass 41 both sides; Pretension bolt 21 is connected into one with piezoelectric ceramic piece, intermediate mass, stator body, and the stator top is a driving head 12; Mover is a draw runner 52, and draw runner 52 upper surfaces are bonded with frictional layer 51, contacts with the driving head 12 of said stator; Two installing holes 42 are arranged on the stator intermediate mass 41, and it is used to stator is installed and connecting elements that precompression is provided, and stator and mover are linked into an integrated entity constitutes not same order bending vibration modes linear ultrasonic motor.
Embodiment two:
Present embodiment is the function mode that is used for above-mentioned linear ultrasonic motor:
This not same order bending vibration modes linear ultrasonic motor stator two operation modes as shown in Figure 3.Fig. 3 (a) operation mode is characterized in that stator the latter half cuboid is done first-order bending vibration, and in the synthetic up-down vibration of the driving head of stator upper end.When wherein the right ends of stator Lower Half cuboid moved downward, corresponding driving head was done and is moved downward; When the right ends of stator Lower Half cuboid moved upward, corresponding driving head was done and is moved upward.Fig. 3 (b) operation mode is characterized in that stator the latter half cuboid is done the second order flexural vibrations, and in the synthetic side-to-side vibrations of the driving head of stator upper end.The direction of motion of the right ends of stator Lower Half cuboid is opposite, does moving upward when left end, and right-hand member is done when moving downward, and corresponding driving head is done and moved right; Do to move downward when left end, right-hand member is done when moving upward, and corresponding driving head is done to left movement.
Inverse piezoelectric effect by piezoelectric ceramic piece excites elastomeric two operation modes, should adjust elastomeric physical dimension so that the frequency of these two operation modes is consistent.Appropriate design is answered in the position of four grooves of motor stator; To reduce the frequency of second operation mode (shown in Fig. 3 (b)) as far as possible; Do not reduce the frequency of first operation mode (shown in Fig. 3 (a)) as far as possible, finally make this two operation modes frequency consistent or approaching.Answer the physical dimension of appropriate design stator, particularly adjust the width of position, width, the degree of depth and the actuating arm 14 of groove 13, so that stator driving head 12 obtains enough big vibration amplitude.
A concrete arrangement of motor stator piezoelectric ceramic piece is shown in Fig. 4 (a).Stator uses eight piezoelectric ceramic pieces altogether, and per two is one group, and being divided into is four groups.The direction of arrow is the polarised direction of piezoelectric ceramic piece among Fig. 4 (a).Every piezoelectric ceramic piece is two subregion potsherds, and the polarised direction of its two subregions is opposite, shown in Fig. 4 (b).
A kind of concrete load mode of stator drive signal as shown in Figure 5.Electrode slice is laid in the centre of every group of piezoelectric ceramic piece, is used for external pumping signal (1,2), and electrode slice is laid in the both sides of every group of piezoelectric ceramic piece, is used for outer signal ground.When drive signal being provided for signal input part 1 E= VSin ( ω t), drive signal is provided for simultaneously signal input part 2 E= VCos ( ω t), signal input part 3 ground connection, the stack of these two mode of oscillations responses will make driving head 12 end face particles carry out elliptic motion with the operation modes of phase difference pi/2s frequently can to encourage two of stator simultaneously, and promote mover and carry out rectilinear motion.
Fig. 6 is a same order bending vibration modes linear ultrasonic motor operation principle sketch map not, the arrangement of motor stator piezoelectric ceramic piece such as Fig. 4 (a), and drive signal load mode such as Fig. 5 provide drive signal for signal input part 1 E= VSin ( ω t), drive signal is provided for simultaneously signal input part 2 E= VCos ( ω t), signal input part 3 ground connection.State (2)-state (3)-state (4) drives the mover stage for stator, and stator drives mover and is moved to the left a step-length.State (4)-state (1)-state (2) is the stator separation phase, and stator breaks away from mover and resets, and prepares the driving of following one-period.So repeat, can make mover continue to be moved to the left.If drive signal is provided for signal input part 1 E= VCos ( ω t), drive signal is provided for simultaneously signal input part 2 E= VSin ( ω t), signal input part 3 ground connection, stator will drive mover toward right motion.
This linear ultrasonic motor assembly is few, and is simple in structure; The motor stator design of major parts reduces the size of the direction vertical with the mover direction of motion along on the mover travel direction, to reduce the requirements of installation space of this direction; Structural design is easy to guarantee two not consistency of same order operation mode frequency, and functional reliability is high; The motor thrust output is big, thrust-weight ratio is big, efficient is high.

Claims (3)

1. same order bending vibration modes linear ultrasonic motor not; Comprise stator and mover; It is characterized in that; Said stator is a leg-of-mutton piezoelectric vibrator of class; Comprise stator body (11), left and right sides piezoelectric ceramic piece (31,32), intermediate mass (41), pretension bolt (21); Wherein piezoelectric ceramic piece (31,32) places intermediate mass (41) both sides; Pretension bolt (21) is connected into one with the Lower Half of left and right sides piezoelectric ceramic piece (31,32), intermediate mass (41), stator body (11), and the first half top of stator is a driving head (12); Said mover is draw runner (52), and draw runner (52) upper surface is bonded with frictional layer (51), contacts with the driving head (12) of said stator; The intermediate mass of stator (41) both side ends has two installing holes (42), and it is used to stator is installed and connecting elements that precompression is provided, and stator and mover are linked into an integrated entity constitutes not same order bending vibration modes linear ultrasonic motor.
2. not same order bending vibration modes linear ultrasonic motor according to claim 1, it is characterized in that: said stator the first half is a triangle, and the latter half is a cuboid, and wherein cuboid respectively has two grooves (13) along center line symmetry both sides.
3. function mode that is used for not same order bending vibration modes linear ultrasonic motor according to claim 1; It is characterized in that; The sinusoidal signal that is pi/2 with two phase differences encourages left side piezoelectric ceramic piece (31) and right side piezoelectric ceramic piece (32) simultaneously respectively; Excite two mode of oscillations of stator with frequency phase difference pi/2; Be that stator the latter half cuboid is when doing first-order bending vibration; The driving head that causes the stator upper end moves up and down; When stator the latter half cuboid is done the second order flexural vibrations; The driving head that causes the stator upper end is done side-to-side movement; Make driving head particle generation elliptic motion on the stator, and the promotion mover carries out rectilinear motion forward or backwards.
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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103427706A (en) * 2013-08-21 2013-12-04 金陵科技学院 Single-mode and antifriction driven single-driving-foot platy piezoelectric motor and working modes thereof
CN105048863A (en) * 2015-07-31 2015-11-11 南京航空航天大学 Bending vibration mode-based linear ultrasonic motor and electric excitation method thereof
CN105897043A (en) * 2016-06-06 2016-08-24 长春工业大学 Diamond-shaped hinge oblique-pulling quadratured driving type piezoelectric stick-slip linear motor and recombination excitation method thereof
CN106849738A (en) * 2015-12-04 2017-06-13 佳能株式会社 Drive method, oscillation drive and the plant equipment of oscillation actuator
CN112054713A (en) * 2020-09-24 2020-12-08 南京工程学院 Composite mode type linear ultrasonic motor based on end oblique piezoelectric ceramics
CN112072951A (en) * 2020-09-14 2020-12-11 哈尔滨工程大学 A-type elastic topological piezoelectric actuating mechanism
CN112104257A (en) * 2020-09-15 2020-12-18 南京工程学院 High-thrust inertia piezoelectric linear motor
CN112468013A (en) * 2020-11-18 2021-03-09 哈尔滨工程大学 Double-diamond topological structure non-resonant inchworm type piezoelectric driver
CN112542959A (en) * 2020-11-25 2021-03-23 上海工程技术大学 Single-phase excitation bidirectional movement miniature ultrasonic motor and method
CN114759827A (en) * 2022-05-17 2022-07-15 山东理工大学 Clamping type large-amplitude ultrasonic motor stator

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CN101499739A (en) * 2009-02-25 2009-08-05 南京航空航天大学 In-plane mode linear ultrasonic motor having triangular displacement amplifying mechanism and working mode thereof
CN101694974A (en) * 2009-10-16 2010-04-14 南京航空航天大学 Tower-shaped linear ultrasonic motor and electric excitation mode
CN101071995B (en) * 2007-06-14 2010-08-04 南京航空航天大学 Dual-driving foot longitudinal-vibration mode stacked linear ultrasonic motor and working mode and electric exciting manner

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US20080303384A1 (en) * 2007-06-11 2008-12-11 Olympus Corporation Ultrasonic motor
CN101071995B (en) * 2007-06-14 2010-08-04 南京航空航天大学 Dual-driving foot longitudinal-vibration mode stacked linear ultrasonic motor and working mode and electric exciting manner
CN101499739A (en) * 2009-02-25 2009-08-05 南京航空航天大学 In-plane mode linear ultrasonic motor having triangular displacement amplifying mechanism and working mode thereof
CN101694974A (en) * 2009-10-16 2010-04-14 南京航空航天大学 Tower-shaped linear ultrasonic motor and electric excitation mode

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103427706B (en) * 2013-08-21 2015-04-22 金陵科技学院 Single-mode and antifriction driven single-driving-foot platy piezoelectric motor and working modes thereof
CN103427706A (en) * 2013-08-21 2013-12-04 金陵科技学院 Single-mode and antifriction driven single-driving-foot platy piezoelectric motor and working modes thereof
CN105048863A (en) * 2015-07-31 2015-11-11 南京航空航天大学 Bending vibration mode-based linear ultrasonic motor and electric excitation method thereof
US10516349B2 (en) 2015-12-04 2019-12-24 Canon Kabushiki Kaisha Method of driving vibration actuator with enhanced sliding efficiency, vibration drive device, and mechanical apparatus
CN106849738A (en) * 2015-12-04 2017-06-13 佳能株式会社 Drive method, oscillation drive and the plant equipment of oscillation actuator
CN106849738B (en) * 2015-12-04 2019-08-06 佳能株式会社 Drive method, oscillation drive and the mechanical equipment of oscillation actuator
CN105897043A (en) * 2016-06-06 2016-08-24 长春工业大学 Diamond-shaped hinge oblique-pulling quadratured driving type piezoelectric stick-slip linear motor and recombination excitation method thereof
CN112072951A (en) * 2020-09-14 2020-12-11 哈尔滨工程大学 A-type elastic topological piezoelectric actuating mechanism
CN112104257A (en) * 2020-09-15 2020-12-18 南京工程学院 High-thrust inertia piezoelectric linear motor
CN112104257B (en) * 2020-09-15 2021-08-31 南京工程学院 High-thrust inertia piezoelectric linear motor
CN112054713A (en) * 2020-09-24 2020-12-08 南京工程学院 Composite mode type linear ultrasonic motor based on end oblique piezoelectric ceramics
CN112054713B (en) * 2020-09-24 2021-11-30 南京工程学院 Composite mode type linear ultrasonic motor based on end oblique piezoelectric ceramics
CN112468013A (en) * 2020-11-18 2021-03-09 哈尔滨工程大学 Double-diamond topological structure non-resonant inchworm type piezoelectric driver
CN112542959A (en) * 2020-11-25 2021-03-23 上海工程技术大学 Single-phase excitation bidirectional movement miniature ultrasonic motor and method
CN114759827A (en) * 2022-05-17 2022-07-15 山东理工大学 Clamping type large-amplitude ultrasonic motor stator

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